Mask combination and separation system, semiconductor equipment and mask positioning method

Abstract

The invention relates to the field of semiconductors, and discloses a mask combination and separation system, semiconductor equipment and a mask positioning method. The mask plate combination and separation system comprises a carrier, the carrier comprises a tray used for containing a mask plate, the top face of the tray is provided with a first containing part used for containing at least part of the mask plate, the tray is provided with one or more first feature parts, and the first feature parts penetrate through the tray in the thickness direction of the tray; the projections of the first feature part and the first accommodating part in the thickness direction are at least partially overlapped; the workbench comprises a first mounting mechanism and a second mounting mechanism, the first mounting mechanism is provided with a first supporting surface, the first supporting surface is used for mounting a tray, the second mounting mechanism is provided with a second supporting surface, and the second supporting surface is used for mounting a mask plate; and one or more zoom cameras, the zoom cameras being located below the tray when the tray is located on the first support surface, the field of view of the zoom cameras covering the first feature. The mask combination and separation system can reduce the damage risk of the mask.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and in particular to a mask assembly and separation system, semiconductor equipment, and mask positioning method. Background Technology

[0002] The manufacturing process of a photomask involves placing it in a process chamber to grow material layers such as light-shielding or reflective layers on specific areas of its surface. Typically, the photomask needs to be housed in a dedicated carrier for easy transfer between equipment and for processing. This reduces the risk of damage to the photomask during transport and allows for structural design of the carrier to minimize the risk of the material layers growing on areas outside the designated processing zones. Specifically, the photomask and carrier are assembled before processing, and separated after processing.

[0003] Position detection is required before the mask is assembled or separated from the vehicle to verify whether the positional offset between the mask and the vehicle is within the allowable range, thereby reducing the risk that the mask and the vehicle cannot be assembled or separated correctly. Summary of the Invention

[0004] Current commonly used mask transport systems rely on fixed-layout vision inspection devices. These devices can only perform single-point or single-layer imaging inspections of each component before the mask and carrier are assembled, determining whether the positional offset of each component is within acceptable limits to facilitate assembly. However, when the mask and carrier are in a combined state and about to separate, their positions differ from those before assembly. The vision inspection devices cannot detect this offset when the mask and carrier are in a combined state and about to separate. If the mask experiences a significant offset during this process and it is not detected in time, it can easily lead to misalignment between the mask and its supporting structure, or even serious safety accidents such as the mask colliding or falling.

[0005] Therefore, there is an urgent need in the field for a technical solution that can detect the position of each structure when the mask and carrier are in a combined state and about to be separated, so as to improve the safety and accuracy of the mask transport process and meet the higher requirements of advanced semiconductor manufacturing for process stability and equipment reliability.

[0006] In a first aspect, this application provides a mask assembly and separation system, comprising: a carrier including a tray for accommodating a mask, the top surface of the tray having a first receiving portion for accommodating at least a portion of the mask, the tray having one or more first features penetrating the tray along its thickness direction, the first features at least partially overlapping the projection of the first receiving portion along the thickness direction; a worktable including a first mounting mechanism and a second mounting mechanism, the first mounting mechanism having a first support surface for mounting the tray, the second mounting mechanism having a second support surface for mounting the mask; and one or more zoom cameras located below the first support surface, the field of view of the zoom cameras covering the first features. This technical solution, by having the first features on the tray penetrate and project onto the first receiving portion, allows the zoom cameras to directly pass through the tray to photograph the mask disposed on the tray. This technical solution enables the use of a zoom camera to visually inspect the positions of the tray and the mask plate separately. In particular, it can identify the offset of the mask plate relative to the ideal position when the mask plate and the carrier are in a combined state and about to be separated, so as to improve the alignment accuracy of the mask plate and eliminate the risk of damage to the mask plate in time.

[0007] In one possible implementation, the carrier further includes a cover plate with a second receiving portion on its bottom surface. The second receiving portion is disposed opposite to the first receiving portion to jointly accommodate the mask. The cover plate has one or more second feature portions on its side near the tray, with each first feature portion corresponding to at least one second feature portion. The second feature portions and the first feature portions project at least partially overlap in the thickness direction. This technical solution, by setting the cover plate and its second feature portions, and ensuring that the second feature portions project and overlap with the first feature portions of the tray in the thickness direction, allows a single zoom camera to sequentially capture the first feature portion, the mask, and the second feature portion through zoom. This design expands the detection capability of a single camera, enabling it to simultaneously perform position detection on multi-layer structures above the tray, further improving the system's ability to monitor the position of the mask and its carrier.

[0008] In one possible implementation, the tray has two first feature portions, each located on either side of a first central axis of the tray. The first central axis is parallel to the thickness direction and passes through the geometric center of the top surface of the tray. The one or more zoom cameras include two zoom cameras, each corresponding to one of the two first feature portions. This technical solution, by setting two opposing first feature portions and corresponding two cameras, enables the system to image from different positions on the mask / carrier. This layout allows the system to detect not only translational displacement of objects but also rotational displacement, thereby achieving more comprehensive and higher-precision detection of the planar position and angular orientation of the mask and carrier.

[0009] In one possible implementation, the zoom range of the zoom camera is from a first focal length to a second focal length, where the first focal length is less than or equal to the distance between the zoom camera and the first support surface, and the second focal length is greater than or equal to the distance between the zoom camera and the second support surface. This technical solution, by covering the distances from the zoom camera to both the first and second support surfaces with its zoom range, enables the camera to adjust its focal length to identify, capture, and obtain clear images of the tray on the first support surface and the mask on the second support surface.

[0010] In one possible implementation, the mask assembly and separation system further includes a mask having a third feature portion. When the mask is at least partially located in the first receiving portion, the projections of the first feature portion and the third feature portion along the thickness direction at least partially overlap. This technical solution, by setting a detection feature portion on the mask and making its projection overlap with the first feature portion of the tray, enables the zoom camera to directly acquire the position image of the mask after zooming, thereby improving the accuracy of mask position detection.

[0011] In one possible implementation, the workbench includes: a base with a mounting surface; a first mounting mechanism including a plurality of first support columns, each first support column being mounted on the mounting surface, the first support columns being arranged in parallel, and the end faces of each first support column away from the base collectively forming the first support surface, with a first distance between the first support surface and the mounting surface; and a second mounting mechanism including a plurality of second support columns, each second support column being mounted on the mounting surface, the second support columns being arranged in parallel with the first support columns, the end faces of each second support column away from the base collectively forming the second support surface, and the second support surface having a second distance between it and the mounting surface, the second distance being greater than the first distance. This technical solution uses the end faces of multiple support columns away from the base to form the support surface, which can create a more stable and reliable support for the tray and the mask. Furthermore, by limiting the second distance to be greater than the first distance, it also ensures that the mask and the tray have a distance between them when separated without interfering with each other.

[0012] In one possible implementation, the mask assembly and separation system further includes: a loading dock for accommodating the carrier; a storage box for accommodating the mask; and a first robotic arm for transporting the pallet between the loading dock and the first support surface, and the mask between the storage box and the second support surface when the carrier and the mask are separated; and for releasing the pallet to the first support surface and the mask to the second support surface when the carrier and the mask are assembled. This technical solution, by further configuring the storage box, loading dock, and first robotic arm within the mask assembly and separation system, constitutes a complete mask assembly and separation system, achieving automated flow of the mask and carrier. The robotic arm can release the pallet and mask to their respective support surfaces during assembly, and retrieve them from their respective support surfaces and return them to their respective storage units during separation. The collaborative operation of a single robotic arm simplifies the equipment structure and improves overall operational efficiency.

[0013] Secondly, this application also provides a mask assembly and separation system, comprising: a carrier including a tray and a cover plate, the top surface of the tray having a first receiving portion for accommodating at least a portion of the mask plate, the bottom surface of the cover plate having a second receiving portion, the second receiving portion being disposed opposite to the first receiving portion for jointly accommodating the mask plate, the cover plate having one or more second feature portions penetrating the cover plate along its thickness direction, the projections of the second feature portions and the second receiving portions along the thickness direction at least partially overlapping; a worktable including a first mounting mechanism, a second mounting mechanism, and a third mounting mechanism, the first mounting mechanism having a first support surface for mounting the tray, the second mounting mechanism having a second support surface for mounting the mask plate, the third mounting mechanism having a third support surface for mounting the cover plate; and one or more zoom cameras located above the third support surface, the field of view of the zoom cameras covering the second feature portions. This technical solution provides a top-down detection path by overlapping the projections of the second feature portions on the cover plate with the second receiving portions along the thickness direction. It allows a zoom camera mounted on top to directly photograph the mask through the cover plate, providing another flexible system configuration for realizing the position detection of the mask and the vehicle.

[0014] In one possible implementation, the tray has one or more first feature portions, each second feature portion corresponding to at least one first feature portion, and the second feature portion and the corresponding first feature portion at least partially overlap along the thickness direction. This technical solution allows a zoom camera to capture images of the first feature portion of the tray through the second feature portion of the cover plate and the first feature portion of the tray in the thickness direction. This design enables a single zoom camera to simultaneously image the positional features of the cover plate and the tray within the same field of view, expanding the detection capability for multi-layered structures in top-down detection configurations.

[0015] In one possible implementation, the cover plate has two second feature portions, which are respectively located on both sides of a second central axis of the cover plate. The second central axis is parallel to the thickness direction and passes through the geometric center of the top surface of the cover plate. The one or more zoom cameras include two zoom cameras, each corresponding to one of the two second feature portions. This technical solution, by providing two opposing second feature portions on the cover plate in conjunction with two zoom cameras, enables multi-view imaging even along the top-down detection path. This also improves the detection accuracy and reliability of the planar position and angular displacement of the mask and carrier under this system configuration.

[0016] In one possible implementation, the zoom range of the zoom camera is from a first focal length to a second focal length, where the first focal length is less than or equal to the distance between the zoom camera and the first support surface, and the second focal length is greater than or equal to the distance between the zoom camera and the third support surface. This technical solution, by covering the entire vertical travel from the first support surface to the third support surface with the zoom range of the zoom camera, allows the camera to clearly image the tray, mask, and cover plate at different heights by adjusting the focal length, ensuring the continuity and reliability of the detection function throughout the entire process. In one possible implementation, the mask plate assembly and separation system further includes a mask plate with a third feature portion. When the mask plate is at least partially located in the first receiving portion, the projections of the first feature portion, the second feature portion, and the third feature portion along the thickness direction at least partially overlap. In this top-down detection configuration, by setting the detection feature portion of the mask plate itself to overlap with the through area of ​​the second feature portion of the cover plate, the camera above can also directly image the positional features on the mask plate, thereby achieving accurate detection of the mask plate position in this configuration.

[0017] In one possible implementation, the workbench includes: a base with a mounting surface; a first mounting mechanism including a plurality of first support columns, the first support columns being mounted on the mounting surface, each of the first support columns being arranged in parallel, and the end faces of each of the first support columns away from the base collectively forming the first support surface, the first support surface having a first distance from the mounting surface; a second mounting mechanism including a plurality of second support columns, the second support columns being mounted on the mounting surface, each of the second support columns being arranged in parallel with the first support columns, the end faces of each of the second support columns away from the base collectively forming the second support surface, the second support surface having a second distance from the mounting surface, the second distance being greater than the first distance; and a third mounting mechanism including a plurality of third support columns, the third support columns being mounted on the mounting surface, the end face of each third support column away from the mounting surface having a third distance from the mounting surface, the third distance being greater than the second distance, each of the third support columns being arranged in parallel with the first support columns, and the end faces of each third support column away from the base collectively forming the third support surface. This technical solution uses a series of support columns—a first, a second, and a third—that increase in height sequentially to form the support surfaces for the tray, the mask, and the cover, respectively. This layered support structure allows the tray, mask, and cover to be stably placed at different heights on the worktable, maintaining a predetermined distance between them without interfering with each other. This provides a clear and reliable spatial basis for the robotic arm's pick-and-place operations and the zoom camera's layered detection.

[0018] In one possible implementation, the mask assembly and separation system further includes: a loading dock for accommodating the carrier; a storage box for accommodating the mask; and a first robotic arm for transporting the pallet between the loading dock and the first support surface, the cover plate between the loading dock and the third support surface, and the mask plate between the storage box and the second support surface when the carrier and the mask are separated; and for releasing the pallet to the first support surface, the mask plate to the second support surface, and the cover plate to the third support surface when the carrier and the mask are assembled. This technical solution, through further configuration of the storage box, loading dock, and robotic arm, constructs a complete automated material handling system including the cover plate. The robotic arm can remove the pallet, mask plate, and cover plate from their respective support surfaces and return them to their corresponding storage units during separation, and release them to their respective support surfaces during assembly. Through the coordinated operation of a single robotic arm, a fully automated assembly and separation process for the three-layer structure including the cover plate is achieved, simplifying the equipment structure and improving overall operational efficiency and consistency of position control.

[0019] Thirdly, this application also provides a semiconductor device, comprising: the aforementioned mask assembly and separation system; and a process processing system, including at least one process chamber for processing the mask housed in the carrier, wherein a first robotic arm is used to transport the carrier and the mask in a combined state between the mask separation system and the process processing system. This technical solution integrates the aforementioned high-safety mask assembly and separation system with the process processing system to form a complete semiconductor processing device. By using a robotic arm to transport the mask and carrier in a combined state between the assembly and separation system and the process chamber, a fully automated closed-loop process from position detection, assembly, process processing to separation is achieved. This device has the capability to perform safe detection and precise positioning of the mask before and after process processing.

[0020] Fourthly, this application also provides a mask positioning method applied to the aforementioned mask assembly and separation system. The mask positioning method includes: controlling a first robotic arm to transport the assembled carrier and mask to a preset position, wherein the preset position is higher than the second support surface relative to the base; controlling a zoom camera to acquire first image information of the first feature portion and second image information of the third feature portion located on the mask; determining a first offset corresponding to the first feature portion and a second offset corresponding to the third feature portion based on the first image information and the second image information; if the first image information and the second image information satisfy a first preset condition, controlling the first robotic arm to stop the separation operation, wherein the first preset condition includes: the first offset being greater than or equal to a first threshold, and / or, the second offset being greater than or equal to a second threshold. This technical solution actively controls a zoom camera to acquire image information of the tray features and mask features before the assembly of the mask and carrier is placed on the worktable for separation, and while still suspended above the support surface at a preset position, and calculates the offsets of the two relative to a preset ideal position. The robot arm stops immediately when any offset exceeds a preset threshold, achieving proactive safety detection before separation. This method reduces the risk of mask damage caused by direct separation due to abnormal displacement of the assembly during processing or transport, improving operational safety. Furthermore, by separately detecting the features of the pallet and mask, independent monitoring of the position and status of the carrier and mask is achieved.

[0021] In one possible implementation, the method further includes: if the first image information and the second image information satisfy a second preset condition, controlling the first robotic arm to transport the carrier and the mask in the combined state, so that the pallet is supported on the first support surface and the mask is supported on the second support surface, wherein the second preset condition includes: the first offset is less than a first threshold and the second offset is less than a second threshold. This technical solution controls the robotic arm to continue performing placement and separation operations when the offsets of the pallet and the mask are detected to be within safety thresholds, forming a complete "detection-judgment-execution" closed-loop control logic. This method ensures both proactive intervention in high-risk scenarios and process continuity under normal operating conditions, achieving a balance between safety and production efficiency. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the architecture of a semiconductor device according to an embodiment of this application;

[0024] Figure 2 This is a schematic diagram of the structure of a mask assembly and separation system according to an embodiment of this application;

[0025] Figure 3 This is a schematic diagram of the detection height difference of a mask assembly and separation system according to an embodiment of this application;

[0026] Figure 4 This is a schematic diagram of the structure of a mask and a carrier with the view of a zoom camera according to an embodiment of this application;

[0027] Figure 5 for Figure 4 A magnified view of each detection feature;

[0028] Figure 6 This is a schematic diagram showing the positional offset of the mask and the carrier according to one embodiment of this application;

[0029] Figure 7 This is a schematic diagram of another mask and carrier from the perspective of a zoom camera according to an embodiment of this application;

[0030] Figure 8 This is a flowchart illustrating a mask positioning method according to an embodiment of this application;

[0031] Figure 9 This is a schematic diagram of the first action of the assembly stage in one embodiment of this application.

[0032] Figure 10 This is a schematic diagram of the second action in the assembly stage of one embodiment of this application.

[0033] Figure 11 This is a schematic diagram of the third action in the assembly stage of an embodiment of this application.

[0034] Figure 12 This is a schematic diagram of the fourth action in the assembly stage of an embodiment of this application.

[0035] Figure 13 This is a schematic diagram of the fifth action in the assembly stage of an embodiment of this application.

[0036] Figure 14 This is a schematic diagram of the sixth action in the assembly stage of an embodiment of this application.

[0037] Figure 15 This is a schematic diagram of the seventh action in the assembly stage of an embodiment of this application.

[0038] Figure 16This is a schematic diagram of the first action of the separation stage in one embodiment of this application.

[0039] Figure 17 This is a schematic diagram of the second action of the separation stage in one embodiment of this application.

[0040] Figure 18 This is a schematic diagram of the third action in the separation stage of one embodiment of this application.

[0041] Figure 19 This is a schematic diagram of the fourth action of the separation stage in one embodiment of this application.

[0042] Figure 20 This is a schematic diagram of the fifth action of the separation stage in one embodiment of this application.

[0043] Figure 21 This is a schematic diagram of the sixth action of the separation stage in one embodiment of this application.

[0044] Figure 22 This is a schematic diagram of the seventh action of the separation stage in one embodiment of this application.

[0045] Explanation of reference numerals in the attached figures:

[0046] 100-Mask Assembly and Separation System;

[0047] 10-Mask;

[0048] 11-Third Feature Section;

[0049] 20 - Vehicles;

[0050] 21-Tray; 211-First feature; 212-First receiving part; 213-Support through hole;

[0051] 22-Cover plate; 221-Second feature; 222-Second receiving part;

[0052] 30 - Workbench;

[0053] 31-First mounting mechanism; 32-Second mounting mechanism; 33-Third mounting mechanism; 34-Base;

[0054] 40-Zoom Camera;

[0055] 50 - First robotic arm;

[0056] 201 - Storage box; 202 - Loading dock;

[0057] 300 - Processing System;

[0058] 301 - Transmission chamber; 302 - Process chamber. Detailed Implementation

[0059] The mask assembly and separation system provided in this application can be applied to semiconductor manufacturing processes, primarily in the front-end processes of semiconductor manufacturing, especially in automated equipment involving mask handling, cleaning, inspection, or storage. For example, the mask assembly and separation system provided in this application can serve as an important subsystem of a mask handling platform or dedicated mask process equipment, performing or participating in process operations such as mask handling, assembly, separation, temporary storage, and position calibration.

[0060] like Figure 1 As shown, the mask assembly and separation system 100 provided in this application can be integrated into the Equipment Front End Module (EFEM) of a semiconductor device. Downstream of the EFEM, a process processing system 300 for performing process processing on the mask (such as cleaning, coating, inspection, etc.) can be provided. The process processing system 300 may include a transport chamber 301 for transporting the mask and its carrier and / or a process chamber 302 for performing process processing on the mask (such as a cleaning chamber, coating chamber, inspection chamber, etc.).

[0061] When the mask and carrier are separated, acquiring their positions using a conventional camera and determining whether their positions meet expectations is a standard detection method in this field. However, effectively detecting positional shifts when the mask and carrier are still assembled and about to separate remains a problem to be solved. The mask assembly and separation system provided in this application can visually detect positional shifts of the mask before separation from its carrier, identifying abnormal shifts in advance, improving the safety of the mask separation process, and preventing accidental bumps or damage during separation.

[0062] Example 1

[0063] Embodiment 1 of this application provides a mask assembly and separation system 100, which can be used to achieve safe and precise transfer of the mask 10 within a semiconductor device, such as... Figure 2 and Figure 3 As shown, the mask assembly and separation system 100 may include a carrier 20, a worktable 30, and one or more zoom cameras 40. The carrier 20 may include a tray 21 for accommodating the mask 10, and the top surface of the tray 21 may have a first receiving portion 212 for accommodating at least a portion of the mask 10. For example, as... Figure 2As shown, the first receiving portion 212 may be a recess that sinks relative to the main body of the tray 21; or, the first receiving portion 212 may also be an area surrounded by a plurality of positioning protrusions. In one example, the wall of the first receiving portion 212 may be adjacent to or in contact with the mask plate placed therein, that is, the gap between the first receiving portion 212 and the mask plate 10 placed therein is small, so that the mask plate 10 has a high relative positioning accuracy relative to the tray 21.

[0064] Furthermore, the tray 21 may be provided with one or more first feature portions 211. At least a portion of the first feature portion 211 may extend through the tray 21 along its thickness direction. For example, Figure 4 , Figure 5 and Figure 6 As shown, the first feature 211 can be a circular opening; as Figure 7 As shown, the first feature 211 can also be a rectangular opening; of course, in other examples, the first feature 211 can also be configured with other shapes or structures. The projections of the first feature 211 and the first receiving portion 212 along the thickness direction can at least partially overlap (i.e., be aligned in a direction perpendicular to both surfaces). Specifically, the first feature 211 can penetrate the tray 21 and at least partially overlap with the projection of the first receiving portion 212 along the thickness direction. This can be achieved by: the first feature 211 extending from the surface of the tray 21 away from the first receiving portion 212 to the first receiving portion 212, so that the projections of the first feature 211 and the first receiving portion 212 along the thickness direction at least partially overlap; or, the first feature 211 can also extend from the surface of the tray 21 away from the first receiving portion 212 to the surface of the tray 21 where the first receiving portion 212 is located, and intersect with the first receiving portion 212, so that the projections of the first feature 211 and the first receiving portion 212 along the thickness direction at least partially overlap.

[0065] like Figure 2As shown, the workbench 30 may include a first mounting mechanism 31 for supporting the tray 21, a second mounting mechanism 32 for supporting the mask plate 10, a third mounting mechanism 33 for supporting the cover plate 22, and a base 34. The base 34 may have a mounting surface, and the first mounting mechanism 31, the second mounting mechanism 32, and the third mounting mechanism 33 may all be fixedly mounted on the base 34. The first mounting mechanism 31 may include multiple first support columns, which may be mounted on the mounting surface. The first support columns may be arranged in parallel, and the end faces of each first support column away from the base together constitute a first support surface, with a first distance between the first support surface and the mounting surface. The second mounting mechanism 32 may include multiple second support columns, which may be mounted on the mounting surface. Each second support column may be arranged parallel to the first support column, and the end faces of each second support column away from the base together constitute a second support surface, with a second distance between the second support surface and the mounting surface, which may be greater than the first distance.

[0066] The zoom camera 40 is a sensor used to acquire images of the first feature portion 211 and the mask plate housed in the tray 21. Located below the first support surface, the zoom camera 40's field of view covers the first feature portion 211, allowing it to capture images of both the first feature portion 211 and the interior of the first receiving portion 212. This enables the zoom camera 40 to capture images of the mask plate 10 when it is housed in the first receiving portion 212, thus allowing the identification of the offset of the tray 21 and the offset of the mask plate 10. The mask plate 10 may include a third feature portion 11, and the through area of ​​the first feature portion 211 may project and overlap with at least a portion of the third feature portion 11, allowing the zoom camera 40 to more accurately identify the position of the mask plate 10. Optionally, the third feature portion 11 may be a right-angled edge, a straight edge, or a visual feature such as a pattern, text, or a combination thereof on the lower surface of the mask plate. In some scenarios, the mask assembly and separation system 100 may also include the mask 10, meaning the mask 10 is part of the mask assembly and separation system 100. The arrangement of the zoom camera 40 below the tray 21 reduces the risk of particles falling onto the carrier 20 and mask 10, potentially damaging the mask 10, if the zoom camera 40 is positioned above the carrier 20.

[0067] When the tray 21 is provided with a first feature 211, the mask assembly separation system includes a zoom camera 40, the field of view of which covers the corresponding first feature 211; when the tray 21 is provided with multiple first feature 211, the mask assembly separation system includes multiple zoom cameras 40, the field of view of each zoom camera 40 can cover one first feature 211 respectively.

[0068] Furthermore, such as Figures 2 to 5As shown, the carrier 20 may further include a cover plate 22. The bottom surface of the cover plate 22 may be provided with a second receiving portion 222. The second receiving portion 222 may be disposed opposite to the first receiving portion 212, and the two together form a complete cavity structure for jointly accommodating the mask plate 10. The cover plate 22 may be provided with one or more second feature portions 221 on the side near the tray 21. The first feature portion 211 may at least partially overlap with the second feature portion 221 along the aforementioned thickness direction, that is, the zoom camera 40 can capture at least a portion of the second feature portion 221 through the first feature portion 211. By setting the cover plate 22 and the second feature portion 221 thereon, and aligning the second feature portion 221 with the first feature portion 211 of the tray 21 in the thickness direction (i.e., the projection at least partially overlaps), the same zoom camera 40 can sequentially capture the first feature portion 211, the mask plate 10, and the second feature portion 221 through zoom, thereby realizing the position detection of the three. For example, as shown... Figure 4 and Figure 5 As shown, the second feature portion 221 can be a circular feature mark. The second feature portion 221 can be a three-dimensional structural mark such as a protrusion and / or a groove, or a planar mark such as a pattern and / or text.

[0069] Accordingly, the workbench 30 also includes a third mounting mechanism 33. The third mounting mechanism 33 may include multiple third support columns, which can be mounted on the mounting surface. Each third support column can be arranged parallel to the first support column, and the end faces of each third support column away from the base collectively form a third support surface. A third distance exists between the third support surface and the mounting surface, and this third distance can be greater than the second distance. Correspondingly, the tray 21 may also be provided with several through holes 213 for the second mounting mechanism 32 and the third mounting mechanism 33 to pass through.

[0070] In one example, such as Figure 4 and Figure 6 As shown, the tray 21 may have two first feature portions 211, which may be respectively located on both sides of the first central axis of the tray 21. The first central axis may be parallel to the thickness direction of the tray 21 and pass through the geometric center of the top surface of the tray 21. Correspondingly, as... Figure 2 As shown, one or more zoom cameras 40 may specifically include two zoom cameras 40, and the two zoom cameras 40 may correspond one-to-one with the two first feature parts 211. For example... Figure 6 As shown, Figure 6In the diagram, the solid line represents the actual position of the vehicle 20, the dashed line represents the theoretical position of the vehicle 20, and the box represents the field of view of the zoom camera 40. The actual position of the first feature 211 in the upper left corner deviates less from the theoretical position, while the actual position of the first feature 211 in the lower right corner deviates more from the theoretical position. Therefore, it can be seen that, under the same deviation angle, the greater the distance between the two first feature 211s, the greater the difference in offset that the two zoom cameras 40 can determine, and the easier it is to identify the positional offset of the tray.

[0071] Furthermore, such as Figure 1 , Figure 2 and Figure 3 As shown, the mask assembly and separation system also includes a loading dock 202 for accommodating a carrier and a storage box 201 for accommodating the mask. The mask assembly and separation system may also include a first robotic arm 50, which can be used to transport the mask 10 and the carrier 20, including transporting all or part of the carrier 20 separately, the mask 10, and combinations of the mask 10 and the carrier 20. Specifically, the first robotic arm 50 can be used to transport a pallet 21 between the loading dock 202 and a first support surface, a cover plate 22 between the loading dock 202 and a third support surface, and the mask 10 between the storage box 201 and a second support surface when the carrier 20 and the mask 10 are separated. When the carrier 20 and the mask 10 are combined, the first robotic arm can be used to release the pallet 21 to the first support surface, release the mask 10 to the second support surface, and release the cover plate 22 to the third support surface.

[0072] In one example, such as Figure 3As shown, the zoom range of the zoom camera 40 can be from a first focal length to a second focal length, wherein the first focal length can be less than or equal to the distance between the zoom camera 40 and the first supporting surface, and the second focal length can be greater than or equal to the distance between the zoom camera 40 and the second supporting surface. Therefore, the focal length of the zoom camera 40 can at least cover the distance from the first supporting surface to the second supporting surface. Thus, when the tray 21 and the mask 10 have been placed on the first and second support surfaces by the robotic arm, the zoom camera 40 can focus on and photograph the tray 21 and the mask 10, thereby acquiring images of the first feature portion 211 and the third feature portion 11 of the mask 10, and thus determining the positional offset of the tray 21 and the mask 10. When the tray 21 and the mask 10 are in a combined state and about to separate, the tray 21 and the mask 10 are located at the edge of the second support surface, and the zoom camera 40 can focus on and photograph the tray 21 and the mask 10, thereby acquiring images of the first feature portion 211 and the third feature portion 11 of the mask 10, and thus determining the positional offset of the tray 21 and the mask 10. Therefore, this mask assembly and separation system 100 can acquire images of the carrier 20 and the mask 10 not only when they are in a separated state and about to be assembled, but also when they are in a combined state and about to be separated, in order to identify potential risks such as collisions or drops to the mask. Preferably, the second focal length can be greater than or equal to the third spacing mentioned above. This setting allows the tray 21, the mask plate 10, and the cover plate 22 to be in a combined state, that is, when the cover plate 22 has not yet been separated, the zoom camera 40 can focus on and take pictures of the tray 21, the mask plate 10, and the cover plate 22, thereby obtaining images of the first feature portion 211, the third feature portion 11 of the mask plate 10, and the second feature portion 221, and thus knowing the positional offset of the tray 21, the mask plate 10, and the cover plate 22.

[0073] The mask assembly and separation system may further include a control unit. The control unit can actively schedule the zoom camera 40 to acquire position images, analyze the positional offsets of the mask 10 and the carrier 20 in real time using image processing technology, and make logical judgments based on preset safety thresholds (including the first and second thresholds mentioned below). When it is determined that the offset of the mask 10 and / or the carrier 20 exceeds the limit, the control unit immediately issues a stop command to the first robotic arm 50, interrupting the current operation and triggering an alarm. For example, the control unit can be communicatively connected and / or electrically connected to the zoom camera 40 and the first robotic arm 50. The control unit may include a processor and a memory, the memory storing computer program instructions and preset first / second thresholds. The control unit can be configured to: actively dispatch the zoom camera 40 to acquire position images; analyze the acquired images using image processing technology to calculate in real time the positional offsets of the mask 10 and the carrier 20 relative to their theoretical positions; compare the calculated offsets with first / second thresholds stored in the memory and perform logical judgments; when either offset exceeds the corresponding safety threshold, the control unit immediately issues a stop command to the first robotic arm 50, interrupting the current operation process and triggering an alarm. Through this configuration, the control unit achieves closed-loop control from image acquisition and data analysis to decision execution, enabling timely intervention when positional anomalies are detected.

[0074] Example 2

[0075] Based on the above embodiment one, embodiment two of this application provides another configuration of the mask assembly and separation system. The main difference from embodiment one is that the detection path of the zoom camera 40 is from top to bottom. Figure 2 Combination Figure 4 As shown, the system may also include a carrier 20, a worktable 30, and one or more zoom cameras 40. The carrier 20 may include a tray 21 and a cover 22. The top surface of the tray 21 has a first receiving portion 212 for receiving at least a portion of the mask 10. The bottom surface of the cover 22 has a second receiving portion 222, which is disposed opposite to the first receiving portion 212 to form a complete cavity structure for receiving the mask 10.

[0076] Unlike Embodiment 1, the detection feature in this embodiment is disposed on the cover plate 22. Specifically, the cover plate 22 is provided with one or more second feature portions 221, at least a portion of the second feature portion 221 penetrating the cover plate 22 along its thickness direction. The projections of the second feature portion 221 and the second receiving portion 222 along their thickness direction at least partially overlap. For example, as shown... Figure 4 and Figure 5 As shown, the second feature 221 can be a circular opening; as Figure 7 As shown, the second feature 221 can also be a rectangular opening or other shapes.

[0077] The workbench 30 may include a first mounting mechanism 31, a second mounting mechanism 32, and a third mounting mechanism 33. The first mounting mechanism 31 has a first support surface for mounting the tray 21; the second mounting mechanism 32 has a second support surface for mounting the mask plate 10; and the third mounting mechanism 33 has a third support surface for mounting the cover plate 22. One or more zoom cameras 40 may be positioned above the third support surface of the workbench 30, with their field of view covering the second feature portion 221. Since the second feature portion 221 penetrates the cover plate 22 and overlaps with the projection of the second receiving portion 222, the zoom camera 40 can directly capture images of the mask plate 10 located below the cover plate 22 through the second feature portion 221, thereby obtaining a positional image of the mask plate 10.

[0078] Furthermore, the tray 21 may also have one or more first feature portions 211 on the side facing the cover plate 22, and each second feature portion 221 corresponds to at least one first feature portion 211. The projections of the second feature portion 221 and the corresponding first feature portion 211 along the thickness direction at least partially overlap. With this design, the zoom camera 40 can capture images of not only the mask plate 10 but also the first feature portions 211 on the tray 21 through the second feature portions 221 on the cover plate 22, thereby achieving position detection of the three-layer structure of the cover plate 22, the mask plate 10, and the tray 21.

[0079] In one example, such as Figure 4 and Figure 6 As shown, the cover plate 22 may have two second feature portions 221. The two second feature portions 221 are respectively located on both sides of the second central axis of the cover plate 22. The second central axis is parallel to the thickness direction of the tray and passes through the geometric center of the top surface of the cover plate 22. Correspondingly, the zoom camera 40 may include two zoom cameras 40, with each zoom camera 40 corresponding to one of the two second feature portions 221. Figure 6 As shown, imaging from different positions of the mask 10 and / or the vehicle 20 helps to further improve the system's ability to identify the offsets (especially their rotational offsets) of the mask 10 and the vehicle 20.

[0080] In one example, such as Figure 3As shown, the zoom range of the zoom camera 40 can be from a first focal length to a second focal length. Specifically, the first focal length can be less than or equal to the distance between the zoom camera 40 and the first support surface, and the second focal length can be greater than or equal to the distance between the zoom camera 40 and the third support surface. Thus, the zoom camera 40 can acquire images of the first feature portion 211, the second feature portion 221, and the third feature portion when the tray 21, the mask plate 10, and the cover plate 22 are respectively located on the first support surface, the second support surface, and the third support surface, for use in detecting positional shifts before their combination. It can also acquire images of the first feature portion 211, the second feature portion 221, and the third feature portion when the tray 21, the mask plate 10, and the cover plate 22 are in a combined state and located near the third support surface, for use in detecting positional shifts before their separation.

[0081] In one example, the mask assembly and separation system may further include a mask 10, which has a third feature 11. When the mask 10 is at least partially located in the first receiving portion 212, the projections of the first feature 211, the second feature 221, and the third feature 11 along the thickness direction at least partially overlap. This allows the zoom camera 40 to simultaneously acquire positional images of the first feature 211 of the tray 21, the third feature 11 of the mask 10, and the second feature 221 of the cover plate 22 through the second feature 221 on the cover plate 22, further improving the accuracy of mask position detection.

[0082] like Figure 2 As shown, the specific structure of the workbench 30 is similar to that of Embodiment 1, also including a base 34 and a first mounting mechanism 31, a second mounting mechanism 32, and a third mounting mechanism 33 disposed on the base 34. The first mounting mechanism 31 includes a plurality of first support columns, the end faces of which together form a first support surface; the second mounting mechanism 32 includes a plurality of second support columns, the end faces of which together form a second support surface; the third mounting mechanism 33 includes a plurality of third support columns, the end faces of which together form a third support surface. The tray 21 is provided with a plurality of support member through holes 213 for the second mounting mechanism 32 and the third mounting mechanism 33 to pass through.

[0083] The mask assembly and separation system also includes a first robotic arm 50, a loading dock 202 for accommodating a carrier, and a storage box 201 for accommodating the mask. The first robotic arm 50 is used to transport a pallet 21 between the loading dock 202 and a first support surface, a cover plate 22 between the loading dock 202 and a third support surface, and the mask 10 between the storage box 201 and a second support surface when the carrier 20 and the mask 10 are assembled; and to release the pallet 21 to the first support surface, the mask 10 to the second support surface, and the cover plate 22 to the third support surface when the carrier 20 and the mask 10 are assembled.

[0084] In Embodiment 1, the zoom camera 40 is preferably located below the worktable to reduce the risk of interference between the camera and the entire structure of the worktable. Correspondingly, the worktable 30 needs to be perforated so that the camera can capture images of the tray and the mask. In Embodiment 2, the zoom camera 40 can be placed a certain distance above the worktable, which eliminates the need to perforate the worktable 30 and simplifies the manufacturing process of the mask assembly and separation system 100.

[0085] Example 3

[0086] Please combine Figure 1 Based on the above embodiments, this third embodiment provides a semiconductor device, which may include the mask assembly and separation system 100 and the process processing system 300 of the aforementioned embodiments one or two. The process processing system 300 includes at least one process chamber 302 for performing process processing, such as coating, on the mask 10 housed in the carrier 20. The aforementioned robotic arm is used to transport the carrier 20 and the mask 10 in an assembled state between the mask assembly and separation system 100 and the process processing system 300.

[0087] An exemplary workflow of the device is as follows: First, the first robotic arm 50 removes the carrier 20 (an assembly of the pallet 21 and cover 22) from the loading dock 202 and places it on the worktable 30, separating the pallet 21 and cover 22 in the height direction. Then, it removes the mask 10 from the storage box 201 and places it on the worktable 30, positioning the mask 10 between the pallet 21 and cover 22, aligning it with the first receiving portion of the pallet 21 and the second receiving portion of the cover 22. After passing the position detection, the first robotic arm 50 assembles the mask 10 with the carrier 20 (described in detail later) and sends it through the transfer chamber 301 into the process chamber 302 for processing. After processing, the assembly is returned to the worktable 30, where a position detection is performed again before separation to ensure safety. Finally, the mask 10 and carrier 20 are returned to their respective storage units. This semiconductor device, by integrating a highly reliable position detection system, improves the safety of mask transportation and use.

[0088] Because it includes the aforementioned mask assembly and separation system, this semiconductor device can reduce the risks of masks being dropped or bumped during transportation.

[0089] Example 4

[0090] Based on the above embodiments, such as Figure 8As shown, this fourth embodiment provides a mask positioning method, which is applied to the aforementioned mask assembly and separation system or a semiconductor device including such a system. This embodiment uses the application of this mask positioning method to a mask assembly and separation system, specifically to the control unit of the mask assembly and separation system or a semiconductor device including such a system, as an example for explanation. The mask positioning method may include a stage of assembling the carrier and the mask, and a stage of separating the carrier and the mask, as detailed below.

[0091] 1) The stage of combining vehicle 20 and mask plate 10

[0092] The process of assembling the carrier 20 and the mask plate 10 is largely similar to that in related technologies. First, the first robotic arm 50 ( Figures 9 to 22 The vehicle 20 in its assembled state (taking a vehicle including pallet 21 and cover plate 22 as an example) can be removed from the loading dock 202 used to house the vehicle 20. Subsequently, as... Figure 9 As shown, the first robotic arm 50 can move the carrier 20 above the worktable 30. Figure 10 As shown, the first robotic arm 50 descends and places the tray 21 and cover plate 22 onto the worktable 30, respectively, where the tray 21 and cover plate 22 may have been pre-positioned. During this process, the tray 21 is placed on the lower first mounting mechanism 31, while the cover plate 22 is placed on the higher third mounting mechanism 33, where multiple third support columns of the third mounting mechanism 33 pass through support through holes 213 on the tray 21, thereby spatially separating the cover plate 22 from the tray 21. Then, as... Figure 11 and Figure 12 As shown, the first robotic arm 50 removes the mask 10 from the storage box 201, transports it, and places it on the second mounting mechanism 32, which is centered on the worktable 30. At this point, the mask 10, the tray 21, and the cover plate 22 are supported in layers by different support members on the worktable 30 and are in a separate state.

[0093] Before the first robotic arm 50 performs the lifting and assembly action, the position of each component is detected. One or more zoom cameras 40 are controlled to perform zoom and image capture operations, respectively imageing the first feature 211 of the tray 21 placed on the worktable 30, the third feature 11 on the mask 10, and the second feature 221 on the cover 22, to obtain position images of each layer. Based on these images, the system calculates the offset of each component relative to its preset theoretical position. If the offset of any component exceeds a preset safety threshold, a risk is determined, the process is terminated, and an alarm is issued to prevent assembly in an unfavorable position. If all offsets are within the allowable range, a permission command is issued.

[0094] After confirming that the offset is within the allowable range, such as Figure 13 , Figure 14and Figure 15 As shown, the first robotic arm 50 extends from the bottom of the tray 21 and lifts the tray 21, mask 10, and cover plate 22 upwards in sequence. During this process, the cover plate 22 engages with the tray 21, and the mask 10 is safely housed within the cavities provided by both, thus forming a stable integral assembly. Finally, the first robotic arm 50 transports the assembly out of the worktable 30 and sends it to the designated process system for cleaning, coating, or inspection.

[0095] 2) The stage of separation between the carrier and the mask

[0096] The separation stage can occur after the process system has completed its operation, requiring the returned overall component to be disassembled into independent mask 10 and carrier 20. For example... Figure 16 As shown, the first robotic arm 50 can transport the assembly of the mask 10 and the carrier 20 from the process chamber 302 through the transfer chamber 301 and suspend it above the worktable 30. Before separation, the system performs pre-separation position detection. The control unit can control the zoom camera 40 to image the assembly in the assembled state. Specifically, the zoom camera 40 captures position images of the mask 10 and each detection feature on the carrier 20 through the first feature 211 on the carrier 20, and calculates the overall positional offset of the assembly.

[0097] like Figure 8 As shown, the mask positioning method may include the following steps:

[0098] S1: Control the first robotic arm 50 to transport the combined carrier 20 and mask 10 to a preset position, wherein the preset position is higher than the second support surface relative to the base 34. For example, when the carrier includes a cover plate 22, the preset position may be higher than the third support surface, so that the zoom camera 40 can perform the image acquisition step before the cover plate 22 is separated.

[0099] S2: Control the zoom camera 40 to acquire first image information of the first feature portion 211 of the tray 21 and second image information of the third feature portion 11 located on the mask plate 10.

[0100] In one example, the zoom camera 40 is controlled to first zoom to focus on the first feature 211 to obtain clear first image information; then it zooms to focus on the third feature 11 to obtain clear second image information. When the system is equipped with multiple zoom cameras 40 and the tray 21 is provided with multiple first feature 211, each zoom camera 40 corresponds to one first feature 211, and respectively obtains the first image information of the corresponding first feature 211 and the second image information of the corresponding third feature 11.

[0101] S3: Based on the first image information and the second image information, determine the first offset (i.e., the offset of the tray 21) corresponding to the first feature part 211 and the second offset (i.e., the offset of the mask 10) corresponding to the third feature part 11.

[0102] In one example, after acquiring the first image information, a comparison can be made between the first image information and a first preset image to determine the first offset of the first feature 211; wherein the first preset image can be captured by the zoom camera 40 when the tray 21 is located on the first support surface and in an ideal position. Specifically, the offset pixel amount of the first feature 211 can be determined by comparing the pixel position of the first feature 211 in the first image information (the actual position during the separation stage) with the pixel position in the first preset image (the ideal position pre-configured), and this offset pixel amount is used as the first offset. After acquiring the second image information, a comparison can be made between the second image information and a second preset image to determine the second offset of the second feature 221; wherein the second preset image can be captured by the zoom camera 40 when the mask 10 is located on the second support surface and in an ideal position. Specifically, the offset pixel amount of the third feature unit 11 in the second image information (the actual position during the separation stage) and the pixel position in the second preset image (the ideal position pre-configured) can be determined, and this offset pixel amount can be used as the second offset. Furthermore, when multiple zoom cameras 40 are used, the first offset and the second offset corresponding to each zoom camera 40 are determined separately.

[0103] S4: If the first image information and the second image information meet the first preset condition, then control the first robotic arm 50 to stop the separation operation. The first preset condition includes: a first offset greater than or equal to a first threshold, and / or, a second offset greater than or equal to a second threshold.

[0104] When at least one of the first offset and the second offset is greater than or equal to the corresponding threshold, it indicates that the actual position of the tray 21 and / or the mask 10 deviates too much from the ideal position. In this case, the separation operation between the tray 21 and the mask 10 needs to be stopped to reduce the risk of the mask 10 falling or being bumped during the separation process. Simultaneously, an alarm can be issued to prompt personnel to intervene. In the case of multiple cameras, if any first offset is greater than or equal to the first threshold, and / or any second offset is greater than or equal to the second threshold, the first robotic arm 50 can be controlled to stop the separation operation.

[0105] S5: If the first image information and the second image information meet the second preset condition, then control the first robot arm 50 to continue transporting the carrier 20 and the mask plate 10 in the combined state, so that the tray 21 is supported on the first support surface and the mask plate 10 is supported on the second support surface. The second preset condition includes: a first offset is less than a first threshold, and a second offset is less than a second threshold.

[0106] When both the first offset and the second offset are within their corresponding thresholds, it indicates that the actual position of tray 21 and / or mask 10 deviates from the ideal position within the allowable tolerance. In this case, the separation of tray 21 and mask 10 can continue. For multiple cameras, the second preset condition is only satisfied when the first offset for all cameras is less than the first threshold and the second offset for all cameras is less than the second threshold.

[0107] If the first image information and the second image information meet the second preset condition, the mask assembly and separation system continues to perform the operation of separating the carrier 20 and the mask 10, as detailed below. Figure 16 , Figure 17 and Figure 18 As shown, the first robotic arm 50 descends and places the assembly onto the worktable 30. At this time, the tray 21 is supported by the first mounting mechanism 31, the mask plate 10 is supported by the second mounting mechanism 32 passing through the support through-hole 213 of the tray 21, and the cover plate 22 is supported by the third mounting mechanism 33 passing through the support through-hole 213 of the tray 21, thereby achieving physical separation of the three components. Subsequently, as... Figure 19 and Figure 20 As shown, the first robotic arm 50 first removes the mask 10 and places it back into the storage box 201. (As indicated...) Figure 21 and Figure 22 As shown, the first robotic arm 50 then lifts the pallet 21 and cover plate 22 from the bottom to reassemble them, and puts the empty vehicle 20 back into the loading dock 202.

[0108] The above control methods and control steps can all be implemented through software, hardware, or a combination of software and hardware in the control unit. In this application, "implemented through software" means that the processor reads and executes program instructions stored in memory to implement the functions corresponding to the above modules or units. Here, the processor refers to a processing circuit capable of executing program instructions, including but not limited to at least one of the following: a central processing unit (CPU), a microprocessor, a digital signal processor (DSP), a microcontroller unit (MCU), or an artificial intelligence processor, etc., and other processing circuits capable of running program instructions. In other embodiments, the processor may also include circuits with other processing functions (such as hardware circuits for hardware acceleration, bus and interface circuits, etc.). Processors can be presented as integrated chips, for example, as integrated chips whose processing functions only include executing software instructions, or they can be presented as SoCs (system on a chip), that is, on a single chip, in addition to the processing circuits (usually called "cores") that can run program instructions, there are also other hardware circuits for implementing specific functions (of course, these hardware circuits can also be implemented separately based on ASICs or FPGAs). Correspondingly, in addition to executing software instructions, the processing functions can also include various hardware acceleration functions (such as AI calculations, encoding and decoding, compression and decompression, etc.).

[0109] In this application, "implemented in hardware" means that the functions of the above-mentioned modules or units are implemented through hardware processing circuits that do not have program instruction processing capabilities. These hardware processing circuits can be composed of discrete hardware components or integrated circuits. To reduce power consumption and size, integrated circuits are typically used. Hardware processing circuits can include ASICs (application-specific integrated circuits) or PLDs (programmable logic devices); PLDs can include FPGAs (field-programmable gate arrays), CPLDs (complex programmable logic devices), and so on. These hardware processing circuits can be a single packaged semiconductor chip (e.g., packaged as an ASIC); or they can be integrated with other circuits (e.g., CPUs, DSPs) and packaged into a single semiconductor chip. For example, multiple hardware circuits and a CPU can be formed on a silicon substrate and packaged into a single chip; this type of chip is also called a SoC. Alternatively, circuits for implementing FPGA functions and a CPU can be formed on a silicon substrate and encapsulated into a single chip; this type of chip is also called a SoPC (system on a programmable chip).

[0110] It should be noted that when this application is implemented through software, hardware, or a combination of both, different software or hardware can be used, and it is not limited to using only one type of software or hardware. For example, one module or unit can be implemented using a CPU, while another module or unit can be implemented using a DSP. Similarly, when implemented using hardware, one module or unit can be implemented using an ASIC, while another module or unit can be implemented using an FPGA. Of course, it is not limited to using the same software (e.g., all through a CPU) or the same hardware (e.g., all through an ASIC) to implement some or all modules or units. Furthermore, those skilled in the art will understand that software is generally more flexible but less performant than hardware, while hardware is the opposite. Therefore, those skilled in the art can choose software, hardware, or a combination of both based on actual needs.

[0111] The foregoing preferred embodiments have further illustrated the objectives, technical solutions, and advantages of the present invention. It should be understood that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A mask assembly and separation system, characterized in that, include: A carrier includes a tray for accommodating a mask, the top surface of the tray having a first receiving portion for accommodating at least a portion of the mask, the tray having one or more first features extending through the tray along its thickness direction, the first features at least partially overlapping the projection of the first receiving portion along the thickness direction. The workbench includes a first mounting mechanism and a second mounting mechanism. The first mounting mechanism has a first support surface for mounting the tray, and the second mounting mechanism has a second support surface for mounting the mask. as well as One or more zoom cameras are located below the first support surface, and the field of view of the zoom cameras covers the first feature.

2. The mask assembly and separation system according to claim 1, characterized in that, The carrier further includes a cover plate, the bottom surface of which is provided with a second receiving portion. The second receiving portion is disposed opposite to the first receiving portion to jointly receive the mask. The cover plate has one or more second features on the side near the tray, each of the first features corresponds to at least one second feature, and the second features and the first features are projected to at least partially overlap along the thickness direction.

3. The mask assembly and separation system according to claim 1 or 2, characterized in that, The tray is provided with two first feature portions, which are respectively located on both sides of the first central axis of the tray. The first central axis is parallel to the thickness direction and passes through the geometric center of the top surface of the tray. The one or more zoom cameras include two zoom cameras, and the two zoom cameras correspond one-to-one with the two first feature parts.

4. The mask assembly and separation system according to any one of claims 1 to 3, characterized in that, The zoom range of the zoom camera is from a first focal length to a second focal length, where the first focal length is less than or equal to the distance between the zoom camera and the first support surface, and the second focal length is greater than or equal to the distance between the zoom camera and the second support surface.

5. The mask assembly and separation system according to any one of claims 1 to 4, characterized in that, It also includes a mask having a third feature portion, wherein when the mask is at least partially located in the first receiving portion, the projections of the first feature portion and the third feature portion along the thickness direction at least partially overlap.

6. The mask assembly and separation system according to any one of claims 1 to 5, characterized in that, The workbench includes: The base has a mounting surface; The first mounting mechanism includes a plurality of first support columns, which are mounted on the mounting surface. The first support columns are arranged in parallel, and the end faces of each first support column away from the base collectively form the first support surface. A first distance exists between the first support surface and the mounting surface. The second mounting mechanism includes a plurality of second support columns, which are mounted on the mounting surface. Each second support column is arranged parallel to the first support column. The end faces of each second support column away from the base together form the second support surface. There is a second distance between the second support surface and the mounting surface, which is greater than the first distance.

7. The mask assembly and separation system according to any one of claims 1 to 6, characterized in that, Also includes: A loading dock for accommodating the vehicle; Storage box for accommodating the mask; A first robotic arm is configured to transport the pallet between the loading dock and the first support surface, and the mask between the storage box and the second support surface when the carrier and the mask are separated, and to release the pallet to the first support surface and the mask to the second support surface when the carrier and the mask are combined.

8. A mask assembly and separation system, characterized in that, include: A carrier includes a tray and a cover plate. The top surface of the tray has a first receiving portion for receiving at least a portion of the mask, and the bottom surface of the cover plate has a second receiving portion. The second receiving portion is disposed opposite to the first receiving portion for jointly receiving the mask plate. The cover plate has one or more second features that penetrate the cover plate along its thickness direction. The projections of the second features and the second receiving portions along the thickness direction at least partially overlap. The workbench includes a first mounting mechanism, a second mounting mechanism, and a third mounting mechanism. The first mounting mechanism has a first support surface for mounting the tray. The second mounting mechanism has a second support surface for mounting the mask plate. The third mounting mechanism has a third support surface for mounting the cover plate. One or more zoom cameras are located above the third support surface, and the field of view of the zoom cameras covers the second feature.

9. The mask assembly and separation system according to claim 8, characterized in that, The tray is provided with one or more first feature portions, each second feature portion corresponding to at least one first feature portion, and the second feature portion and the corresponding first feature portion at least partially overlap along the thickness direction.

10. The mask assembly and separation system according to claim 8 or 9, characterized in that, The cover plate is provided with two second feature portions, which are respectively located on both sides of the second central axis of the cover plate. The second central axis is parallel to the thickness direction and passes through the geometric center of the top surface of the cover plate. The one or more zoom cameras include two zoom cameras, and the two zoom cameras correspond one-to-one with the two second feature parts.

11. The mask assembly and separation system according to any one of claims 8 to 10, characterized in that, The zoom range of the zoom camera is from a first focal length to a second focal length, where the first focal length is less than or equal to the distance between the zoom camera and the first support surface, and the second focal length is greater than or equal to the distance between the zoom camera and the third support surface.

12. The mask assembly and separation system according to any one of claims 9 to 11, characterized in that, It also includes a mask having a third feature portion, wherein when the mask is at least partially located in the first receiving portion, the projections of the first feature portion, the second feature portion, and the third feature portion along the thickness direction at least partially overlap.

13. The mask assembly and separation system according to any one of claims 8 to 12, characterized in that, The workbench includes: The base has a mounting surface; The first mounting mechanism includes a plurality of first support columns, which are mounted on the mounting surface. The first support columns are arranged in parallel, and the end faces of the first support columns away from the base together constitute the first support surface. The first support surface and the mounting surface have a first distance. The second mounting mechanism includes a plurality of second support columns, which are mounted on the mounting surface. Each second support column is arranged parallel to a first support column. The end faces of each second support column away from the base collectively form the second support surface. A second distance exists between the second support surface and the mounting surface, and this second distance is greater than the first distance. The third mounting mechanism includes a plurality of third support columns, which are mounted on the mounting surface. Each third support column is arranged parallel to the first support column. The end faces of each third support column away from the base together constitute the third support surface. There is a third distance between the third support surface and the mounting surface, which is greater than the second distance.

14. The mask assembly and separation system according to any one of claims 8 to 13, characterized in that, Also includes: A loading dock for accommodating the vehicle; Storage box for accommodating the mask; A first robotic arm is configured to transport the pallet between the loading dock and the first support surface, the cover plate between the loading dock and the third support surface, and the mask plate between the storage box and the second support surface when the carrier and the mask plate are separated; and to release the pallet to the first support surface, the mask plate to the second support surface, and the cover plate to the third support surface when the carrier and the mask plate are combined.

15. A semiconductor device, characterized in that, include: The mask assembly and separation system according to any one of claims 1 to 7 or the mask assembly and separation system according to any one of claims 8 to 14; as well as A process system includes at least one process chamber for processing the mask plate housed in the carrier, and a first robotic arm for transporting the carrier and the mask plate in a combined state between the mask plate separation system and the process system.

16. A method for locating a photomask, characterized in that, The mask positioning method, applied to the mask assembly and separation system of claim 7 or 14, comprises: The first robotic arm is controlled to transport the combined carrier and the mask to a preset position, wherein the preset position is higher than the second support surface relative to the base. The zoom camera is controlled to acquire first image information of the first feature portion and second image information of the third feature portion located on the mask. Based on the first image information and the second image information, determine the first offset corresponding to the first feature portion and the second offset corresponding to the third feature portion; If the first image information and the second image information meet a first preset condition, then the first robotic arm is controlled to stop the separation operation, wherein the first preset condition includes: the first offset is greater than or equal to a first threshold, and / or the second offset is greater than or equal to a second threshold.

17. The mask positioning method according to claim 16, characterized in that, The method further includes: If the first image information and the second image information satisfy the second preset condition, then the first robotic arm is controlled to transport the carrier and the mask in the combined state, so that the pallet is supported on the first support surface and the mask is supported on the second support surface, wherein the second preset condition includes: the first offset is less than the first threshold and the second offset is less than the second threshold.

Images