Evaporator for coating substrate

Abstract

The present disclosure relates to an evaporator (10) for use inside an evaporation chamber (8) and configured to evaporate an evaporation material (12), the evaporator (10) comprising:-an evaporation crucible (20) comprising an evaporation chamber (19) to contain an evaporation material (14); -an outlet arrangement (24) in flow connection with the evaporation chamber (19) and comprising an evaporation orifice (26) for the flow of evaporated evaporation material (14) from the evaporation chamber (19) into the evaporation chamber (8), where the orifice (26) comprises a flow cross-section with variable and / or adjustable dimensions.

Description

[0001] This invention relates to the field of coating substrates, and more particularly to the field of coating metal substrates with a metal coating or an anti-corrosion coating. In another aspect, this invention relates to an evaporator, a coating arrangement, and a method for continuously coating a movable substrate inside an evaporation or vacuum chamber. Background Technology

[0002] Coating materials, such as gaseous metals or metal layers, can be coated onto the surface of a metal substrate, such as a single sheet or steel strip. Here, the substrate is arranged in a coating atmosphere or a vacuum atmosphere. In vacuum deposition, various deposition methods can be applied to evaporate solid or liquid coating materials, such as metal coating materials. This typically means that the evaporating material is heated to an evaporation temperature, for example, in a vacuum atmosphere, to transform it into a gaseous or evaporated state. Once the evaporating material has been sufficiently evaporated, a thin film is formed on the substrate as a coating.

[0003] Typically, and for physical vapor deposition (PVD) of fairly large-scale substrates, controlling the deposition rate of the evaporator located inside the vacuum atmosphere is quite challenging. Controlling the geometric diffusion of the evaporated material inside the evaporation or vacuum chamber is also quite challenging. Typically, vapor deposition equipment is designed for a predetermined or fixed width of the substrate, as seen perpendicular to the substrate's direction of movement. When coating or processing substrates that involve reduced width, such coating equipment can become quite inefficient, as a significant portion of the coating material is wasted and cannot be utilized.

[0004] Therefore, it is desirable to provide an arrangement and solution for individually adjusting the effective coating width of the evaporator, such that the geometry or geometric diffusion of the evaporating material inside the evaporation chamber is appropriately adapted to the size or geometry of the substrate to be coated or treated. This solution should be achievable with modest cost and investment. It should be easily controllable and provide in-situ regulation of vapor diffusion or vapor distribution. Summary of the Invention

[0005] In one aspect, an evaporator is provided for use inside an evaporation chamber, typically inside an evaporation chamber of a coating arrangement. The evaporator is configured to evaporate an evaporation material, such as a molten evaporation material, such as a metallic material. A coating material is deposited on the surface of a substrate via vapor deposition.

[0006] The evaporator includes an evaporation crucible. The evaporation crucible includes an evaporation chamber for containing evaporating material. The evaporation chamber can be configured to contain or receive evaporating material, for example, in a molten or solid state, and allow the evaporating material to evaporate into an evaporated or gaseous state. The evaporator further includes an outlet arrangement in flow connection with the evaporation chamber. Typically, and inside the evaporation crucible, the evaporating material is melted or provided in a molten state. It is then further heated to transform into an evaporated state.

[0007] The outlet arrangement includes evaporation orifices for allowing the evaporated material to flow from the evaporation chamber into the evaporation cavity. The orifices in the outlet arrangement have flow cross-sections with variable and / or adjustable dimensions. Orifices in the outlet arrangement with variable and / or adjustable dimensions allow modification of the geometric diffusion and / or geometric extent of the evaporated material escaping from the evaporation chamber toward the evaporation cavity surrounding the evaporator. In this way, for varying coating conditions, the effective evaporation rate and the geometry of the evaporated material (i.e., geometric diffusion and / or geometric extent) can be modified and adjusted, as they can be determined by the geometry of the substrate.

[0008] In some cases, the flow cross-section of the guide orifice of the evaporator outlet arrangement can be varied and / or adjusted during the evaporation or coating process. This allows for in-situ adjustment or variation of the orifice size of the outlet arrangement. In fact, the coating width of the evaporator can be adjusted or varied depending on the given width of the substrate to be coated. In this way, the coating material can be used more efficiently and material loss and contamination of the evaporation chamber can be minimized.

[0009] Furthermore, by allowing the size or geometry of the flow cross-section to be varied or adjusted during the coating or evaporation process, the evaporator can be adjusted almost instantaneously to meet variable coating or evaporation requirements. This reduces the setup time required to configure or reconfigure the coating equipment.

[0010] According to another example, the flow cross-section of the evaporation orifice has a variable geometry and / or an adjustable geometry. Therefore, the width or length of the evaporation orifice can be changed or adjusted. In this way, the dimensions of the evaporation orifice's cross-section can be varied, thereby modifying or adjusting the effective evaporation rate of the evaporated material escaping from the evaporation chamber toward and into the evaporation chamber, and thus modifying or adjusting its flow.

[0011] Furthermore, the flow cross-section of the evaporation orifice can be varied or adjusted while maintaining the overall dimensions of the cross-section. In some cases, the length of the evaporation orifice can be reduced by simultaneously increasing its width. In this way, the geometry of the evaporation orifice can be modified, thereby correspondingly modifying the geometric extent and / or geometric diffusion of the evaporated material escaping from the evaporation chamber.

[0012] Not only can the length and / or width of the evaporation orifice be altered, but the shape factor of the evaporation orifice can also be changed. Therefore, the geometry or form of the evaporation orifice can be changed, thereby altering the overall geometry of the geometric diffusion of the evaporated material released or escaping from the evaporation chamber.

[0013] According to another example, the position of the evaporation orifice relative to the evaporation crucible is variable and / or adjustable. Typically, the melting crucible is fixed inside the evaporation chamber. The melting crucible can be arranged in a fixed relationship relative to the substrate support, and therefore can be in a fixed position relative to the substrate surface to be coated or treated by the evaporated material. By changing or adjusting the position of the evaporation orifice relative to the evaporation crucible, the geometry and / or diffusion of the evaporated material released or escaping from the evaporation chamber toward the substrate can be changed and modified relative to the substrate. Therefore, by modifying or adjusting the position of the evaporation orifice, the entry angle of the evaporated material in contact with the substrate surface can be changed, varied, or adjusted accordingly.

[0014] In another example of an evaporator, the outlet arrangement includes a vapor guiding section with sidewalls. The sidewalls include guide orifices extending through them. The guide orifices can be fixed orifices. The guide orifices may be stationary relative to the evaporation crucible. The vapor guiding section may be part of the evaporation crucible and may be integrated into the evaporation crucible, for example, into a shell or sidewall structure formed or constituted by the evaporation crucible. The guiding structure can provide clearly defined guidance for the evaporated material.

[0015] A guide orifice extending through the sidewall can form part of the evaporation orifice in the outlet arrangement. In other examples, the guide orifice of the vapor guiding section can be a movable orifice. Moreover, the vapor guiding section can be implemented as a movable vapor guiding section that is movable relative to the evaporation crucible. In this way, the guide orifice can change its position and / or orientation, thus making it possible to modify the vapor escape angle or release direction of the evaporating material released or escaping from the evaporation chamber toward and into the evaporation chamber.

[0016] According to another example, the outlet arrangement includes a first movable portion movable relative to the steam guide portion. The first movable portion includes a movable sidewall to at least partially and variably or adjustably obscure the guide orifice of the steam guide portion. By moving the first movable portion relative to the steam guide portion, the sidewall can be movable relative to the guide orifice. By moving the movable sidewall of the first movable portion at least partially across the guide orifice, the effective size of the guide orifice can be varied.

[0017] Typically, the movable sidewall of the first movable portion can be movable relative to the vapor guiding portion and thus relative to the guide orifice, such that the movable sidewall does not obstruct the guide orifice, partially obstructs the guide orifice, or completely obstructs the guide orifice. In this way, the available or effective size of the guide orifice through which the evaporating material can be released or escaped is dimensionally variable.

[0018] By moving the movable sidewall of the first movable portion relative to the guide orifice of the vapor guiding portion, the dimensions of the flow cross-section for the evaporated material can be changed and modified. In this way, the degree to which the guide orifice is obstructed by the movable sidewall of the first movable portion controls or regulates the flow cross-section of the orifice at the outlet arrangement.

[0019] Typically, and according to another example, a gasket or seal is provided between the movable sidewall and the vapor guide portion, such that vapor guided by the vapor guide portion and located inside the vapor guide portion flows through the unblocked portion of the guide orifice and through the movable sidewall of the first movable portion.

[0020] According to another example, the first movable portion is movably disposed on or inside the steam guide portion. In this way, the first movable portion can be movably attached to the steam guide portion. No additional fastening structure is required besides the steam guide portion. The movable attachment of the first movable portion to the steam guide portion provides a fairly direct and simple way to move the first movable portion and its movable sidewall relative to the guide orifice of the steam guide portion. In this way, a fairly integrated solution can be provided for providing a guide orifice with variable and adjustable dimensions. Furthermore, the mounting space required for providing the first movable portion relative to the steam guide portion can be reduced, and the available mounting space can be optimized.

[0021] According to another example, the guide orifice is an elongated orifice extending along a first direction. A first movable portion is movable relative to the steam guide portion along the first direction to vary the degree to which the guide orifice is obstructed by the first movable portion, particularly by the movable sidewalls of the first movable portion. By moving the first movable portion relative to the steam guide portion, the degree of overlap and / or obstruction between the sidewalls of the movable portion and the guide orifice can be varied and / or adjusted.

[0022] The first movable portion can be guided along the elongated orifice of the guide orifice. In some examples, the first movable portion can be secured or connected to the steam guide portion by a sliding guide. In this way, fairly controlled and precise movement of the first movable portion relative to the steam guide portion can be provided, thereby allowing fairly reproducible variations or adjustments to the flow cross-section of the orifice of the outlet arrangement.

[0023] The first movable part can be fixed to the guide orifice or the steam guide part relative to the guide orifice or the steam guide part, or can be in any position or orientation relative to the guide orifice or the steam guide part.

[0024] According to some examples, the outer surface of the movable part and the inner surface of the vapor guiding part are complementaryly formed. Specifically, the outer surface of the sidewall of the movable part can be complementaryly formed with the inner surface of the sidewall of the vapor guiding part. In this way, the outer surface of the sidewall of the movable part can be in sliding engagement with the inner surface of the sidewall of the vapor guiding part.

[0025] In another configuration or example, the inner surface of the sidewall of the movable part is in sliding engagement with the outer surface of the sidewall of the vapor guide part. Similarly, by making the movable part slidably movable relative to the vapor guide part in the longitudinal direction, the elongation or size of the evaporation orifice can be modified and / or adjusted accordingly.

[0026] According to another example, the outlet arrangement includes an additional first movable portion, which is movable relative to the steam guide portion (e.g., movably disposed on or inside the steam guide portion) and includes a movable sidewall for at least partially obscuring the guide orifice of the steam guide portion. The first movable portion is movably disposed at or near a first longitudinal end of the guide orifice. The additional first movable portion is movably disposed at or near a second longitudinal end of the guide orifice, the second longitudinal end being opposite to the first longitudinal end of the guide orifice. In this way, the two opposite longitudinal ends of the guide orifice may respectively have separate first movable portions or additional first movable portions.

[0027] The first movable portion and the other first movable portion can be implemented in a slightly identical manner. By moving the first movable portion relative to the guide orifice, the position of the first longitudinal end of the guide orifice can be effectively modified. Similarly, depending on the changed position or location of the other first movable portion, the second longitudinal end of the guide orifice can be blocked.

[0028] In some examples, and when the distance between the first movable portion and the other first movable portion is reduced, the total longitudinal range of the guide orifice of the vapor guide portion can be reduced. Conversely, by increasing the distance between the first movable portion and the other first movable portion, the longitudinal range of the guide orifice of the vapor guide portion can be increased.

[0029] By moving the first movable portion and the other first movable portion in a coordinated manner (e.g., moving the same distance in the same or common direction), the overall size of the guide orifice can remain unchanged without modification, while its position relative to the steam guide portion can be changed accordingly. In this way, the position of the steam escape orifice or steam release orifice can be modified, thereby modifying the effective position of the orifice in the outlet arrangement.

[0030] In some examples, the first movable part and the other first movable part can be mechanically connected. Therefore, movement of the first movable part can automatically translate into a corresponding movement of the other first movable part. In other examples, the first movable part and the other first movable part can be movable individually or independently of each other. They can be mechanically decoupled from each other.

[0031] For example, the longitudinal direction of the guide orifice, and thus the longitudinal direction of the orifice of the outlet arrangement formed by the guide orifice, can extend substantially perpendicular to the elongation or movement direction of the substrate. In this respect, the longitudinal extent of the guide orifice can be oriented along the transverse width of the substrate. By modifying or adjusting the positions of the first movable portion and the other first movable portion, the correspondingly oppositely positioned longitudinal ends of the guide orifice can be precisely adjusted according to the lateral edges of the substrate to be coated or treated by the evaporated material. In this way, and by means of the first movable portion and the other first movable portion, not only the total length or width of the guide orifice of the vapor guiding portion, but also its position relative to the evaporation crucible and / or relative to the substrate or substrate support, can be modified.

[0032] According to another example, the first movable portion and / or the other first movable portion are continuously and / or steplessly movable or arrangeable relative to the guide orifice. In this way, fairly precise adjustment can be provided for the partial obstruction of the guide orifice of the steam guide portion.

[0033] According to some examples, the vapor guiding section includes sidewalls forming or constituting a longitudinal tube with a cylindrical, rectangular, square, or polygonal cross-section. A first movable portion slidably engages with the sidewall of the vapor guiding section. The first movable portion and / or another first movable portion are longitudinally slidably engaged with the sidewall of the vapor guiding section. For vapor flowing through the vapor guiding section, one or more first movable portions may be impermeable. In this way, and when the sidewalls of one or more movable portions at least partially and variably obstruct the guide orifice, the size or elongation of the evaporation orifice can be changed and modified accordingly.

[0034] According to some examples, the sidewall of the vapor guiding section includes a first sidewall section having a guide orifice and thus forming an evaporation orifice with an outlet arrangement. Another sidewall section of the vapor guiding section has an inlet orifice through which the evaporated material can flow from the evaporation chamber into the vapor guiding section. For a cylindrical sidewall of the vapor guiding section, the inlet orifice can be positioned circumferentially offset from the guide orifice. The inlet orifice can be positioned diametrically opposite to the guide orifice. For a rectangular or polygonal cross-section of the sidewall of the vapor guiding section, the inlet orifice can be positioned substantially opposite to the evaporation orifice.

[0035] According to another example, the first movable portion includes a first outlet orifice in the movable sidewall, which at least partially overlaps with the guide orifice of the guide portion. In this way, the effective size and / or geometry of the flow cross-section of the orifice in the outlet arrangement can be adjusted according to the degree of overlap between the guide orifice of the steam guide portion and the outlet orifice of the movable portion. The outlet orifice in the movable sidewall may have substantially the same or different geometry or size as the guide orifice of the steam guide portion.

[0036] In some examples, the size or geometry of the first outlet orifice may be slightly equal to that of the guide orifice of the steam guiding section. Then, when the first outlet orifice and the guide orifice are in a substantially overlapping configuration, the flow cross-section of the externally arranged orifice can be maximized. By moving the first movable portion having its first outlet orifice relative to the steam guiding section, the sidewall of the first outlet orifice adjacent to or closing the movable portion can begin to obscure or at least partially obscure the guide orifice of the steam guiding section; or vice versa.

[0037] The sidewall of the vapor guide section can at least partially block the first outlet orifice of the movable sidewall of the first movable section. In effect, the size and / or geometry of the available orifice through which the evaporated material can flow are reduced, and therefore the remaining orifice is modified.

[0038] For the first movable portion including the first outlet orifice, the geometry, size, or adjustment of the orifice of the outlet arrangement can be modified and / or adjusted with a greater degree of flexibility. Specifically, a relatively high degree of variation in the geometry, position, and form of the flow cross-section of the orifice of the outlet arrangement can be provided, said flow cross-section being formed by at least partial overlap between the first outlet orifice and the guide orifice of the vapor guiding portion.

[0039] According to another example, the first movable portion is movable relative to the steam guide portion to vary the degree of overlap between the first outlet orifice and the guide orifice. Depending on the respective shape factors or geometries of the first outlet orifice and the guide orifice, and depending on the direction of relative movement between the first movable portion and the steam guide portion, a wide variety of different sizes, positions, and / or forms of the remaining open flow orifices of the outlet arrangement can be provided.

[0040] According to another example, the first movable portion is removably disposed on or inside the vapor guide portion. Here, the first movable portion may be movable relative to the vapor guide portion about a first direction and / or about a second direction.

[0041] According to another example, the sidewall of the guide portion has a tubular shape, and the first movable portion is rotatable relative to the sidewall with the longitudinal axis of the sidewall as the axis of rotation.

[0042] Alternatively or additionally, the first movable portion may be longitudinally slidable relative to the guide portion. Thus, the first movable portion may be longitudinally slidable along the longitudinal direction of the tubular guide portion or the cylindrical axis.

[0043] Similarly, the guide orifice can extend along the longitudinal direction of the steam guiding section. The width of the guide orifice can extend or be oriented in the circumferential direction of the tubular sidewall of the guiding section. In this way, and by rotating the first movable part relative to the sidewall of the steam guiding section, the degree of overlap or obstruction between the guide orifice and the first outlet orifice can be easily modified.

[0044] In some examples, the axis of the sidewall (the sidewall of the first movable portion can rotate according to said axis) can substantially coincide with the longitudinal axis or the axis of symmetry of the guide portion.

[0045] According to some examples, the first movable portion is rotatably supported by the steam guide portion. Therefore, the first movable portion can be pivotally or rotatably attached to the steam guide portion. The first movable portion can be pivotally attached, thereby rotating about the axis of rotation. This provides a fairly well-defined mobility of the first movable portion relative to the steam guide portion.

[0046] In some examples, the first movable portion may also include a tubular shape. The first movable portion may be arranged coaxially with the tubular shape of the steam guide portion.

[0047] The first movable portion can be rotatably or coaxially arranged inside or outside the steam guide portion. In any case, the first outlet orifice of the first movable portion can be movable relative to the guide orifice of the steam guide portion, thereby modifying the degree of mutual obstruction and / or overlap between the guide orifice and the first outlet orifice, which can thereby modify the size, geometry, or position of the orifices arranged externally on the evaporator.

[0048] According to another example, one of the guide orifice and the first outlet orifice includes an elongated slit. The other of the guide orifice and the first outlet orifice includes one of a rectangle, triangle, rhombus, circle, ellipse, or egg shape. By providing different orifice geometries for the guide orifice and the first outlet orifice, when the first movable portion undergoes movement relative to the guide portion, i.e., when the first outlet orifice undergoes movement relative to the guide orifice, the geometry of the outlet arrangement can be changed, such that the degree of overlap of the corresponding orifices is changed accordingly.

[0049] In another example, the overall geometry of the guide orifice and the first outlet orifice may be slightly similar. Of course, the geometric dimensions of the guide orifice and the first outlet orifice can be distinguished from each other. Therefore, in some examples, the guide orifice may include a rectangular shape. The outlet orifice may also include a rectangular shape. The longitudinal and transverse dimensions of the corresponding orifices of the guide orifice and the first outlet orifice can be distinguished from each other. In the same way, when the first movable portion undergoes movement relative to the steam guide portion, the overall shape of the remaining orifices of the outlet arrangement can be provided to change.

[0050] Furthermore, when one of the first outlet orifice and the guide orifice includes an elongated slit and the other of the first outlet orifice and the guide orifice includes a rhomboid or triangular shape, continuous size and positional variation of the resulting orifice of the outlet arrangement can be effectively provided when the first movable part moves or rotates, for example, relative to the steam guide part.

[0051] For example, the triangular sides of a triangular orifice can extend at a predetermined angle relative to the longitudinal extent of another orifice, which includes an elongated slit. Here, the elongated slit can form a virtual connection between the relatively positioned triangular sides of the triangular orifices of one of the guide orifices and the first outlet orifice. The elongated slit of the other of the guide orifice and the first outlet orifice can extend between the opposing triangular sides.

[0052] By moving the first movable portion relative to the steam guide portion, the relative positions of the triangular orifice and the elongated slit can be changed, thereby altering the distance between the sides of the triangle virtually connected by the elongated slit. In this way, the effective length and therefore the effective size of the elongated slit forming the outlet arrangement of the orifice can be varied and adjusted. Here, the movement of the first movable portion relative to the steam guide portion can be a rotational movement, which can be readily achieved in an evaporator.

[0053] Furthermore, when the first movable portion is coaxially arranged inside or outside the tubular vapor guide portion, the orifice's dimensional variation (e.g., longitudinal range variation) in the longitudinal or axial direction of the tubular guide portion can be provided simply by rotating the first movable portion relative to the vapor guide portion. In this way, the longitudinal dimension of the orifice can be modified without moving the first movable portion along the longitudinal or axial direction, but simply by rotating it relative to the guide portion about its central axis. This allows for the realization of an evaporator with a constant length along the elongation direction of the tubular vapor guide portion.

[0054] According to another example, the outlet arrangement includes a second movable portion, movable relative to the steam guide portion, and includes a movable shield for at least partially and variably or adjustably shielding the guide orifice of the steam guide portion. In addition to the first movable portion, and also in addition to the aforementioned second movable portion, a second movable portion may be provided. The second movable portion may be movable along a second direction, while the first movable portion may be movable along a first direction. The first and second directions may be distinct from each other. In some examples, the first and second directions may be oriented in the same or common direction. In some examples, the second movable portion is movable along the second direction relative to the steam guide portion and / or relative to the first movable portion. The second direction may be oriented perpendicular to the first direction.

[0055] In some examples, the first direction may be oriented along the elongation of the vapor guide portion, and the second direction may be oriented transversely to the longitudinal extent of the vapor guide portion.

[0056] In some examples, and when the guide orifice provided in the sidewall of the vapor guide portion is an elongated slit extending substantially along the longitudinal extent of the vapor guide portion of the first movable portion, and the first and / or the additional first movable portion can be movable relative to the vapor guide portion along a first direction, which may coincide with the elongation direction of the vapor guide portion. Then, the second movable portion can be movable in a lateral direction, for example, each perpendicular to the first direction. Here, the first movable portion and optionally the additional first movable portion can be used to modify the elongation and therefore the longitudinal extent of the guide orifice.

[0057] The second movable portion, having its movable shield, can be used to modify and / or reduce the dimensions of the guide orifice along a second direction (e.g., along the transverse direction of the vapor guide portion). In this way, not only the effective length of the guide orifice provided in the sidewall of the vapor guide portion can be modified, but also its width. Here, the first movable portion and / or the additional first movable portion are used to adjust or modify the longitudinal range of the slit-like guide orifice, while the second movable portion is used to modify or reduce the width of such an orifice.

[0058] According to another example, the outlet arrangement includes a second movable portion that is movable relative to the steam guide portion and includes a second outlet orifice to partially and variably or adjustably overlap with the guide orifice.

[0059] Similarly, the second outlet orifice may at least partially obscure the first outlet orifice and / or the guide orifice. The overlapping area of ​​the guide orifice, the first outlet orifice, and the second outlet orifice forms or constitutes an orifice for the outlet arrangement, through which the evaporated material can be released or escape from the evaporation chamber toward and into the surrounding evaporation chambers.

[0060] The second movable portion may have a tubular shape and may be arranged coaxially with the first movable portion and / or with the vapor guide portion. The second movable portion may be disposed inside the first movable portion. The second movable portion may also be disposed outside the first movable portion and inside the vapor guide portion. In another example, the second movable portion may be disposed outside both the vapor guide portion and the first movable portion. The second movable portion may also be disposed between the first movable portion and the vapor guide portion. At least one or more gaskets may be provided between the first movable portion, the vapor guide portion, and the second movable portion, respectively allowing relative movement between the first movable portion, the second movable portion, and the vapor guide portion.

[0061] For example, one or more gaskets forming a seal between the guide orifice, the first outlet orifice, and the second outlet orifice provide a relatively lossless release or escape of the evaporated material from the evaporation chamber through at least partially overlapping orifices (i.e., correspondingly through the guide orifice, the first outlet orifice, and the second outlet orifice).

[0062] Furthermore, the second movable portion can be movably disposed on or inside the steam guiding portion. The second movable portion can also be movably disposed on or inside the first movable portion.

[0063] According to another example, at least one of the guide orifice, the first outlet orifice, and the second outlet orifice each includes an elongated slit, wherein the other of the guide orifice, the first outlet orifice, and the second outlet orifice includes one of the following shapes: rectangular, triangular, rhomboid, circular, elliptical, or oval.

[0064] It is also conceivable that only one of the guide orifice, the first outlet orifice, and the second outlet orifice comprises an elongated slit, and the other two of the guide orifice, the first outlet orifice, and the second outlet orifice comprise one of the following shapes: rectangular, triangular, rhomboid, circular, elliptical, or oval. In this way, depending on the relative position or orientation of the first movable part, the second movable part, and the vapor guide part relative to each other, a wide variety of sizes and geometries of the outlet arrangement orifices can be provided.

[0065] According to another aspect, a coating arrangement for coating the surface of a substrate by vapor deposition is provided. The coating arrangement includes an evaporation chamber for receiving the substrate. The coating arrangement further includes an evaporator as described above and in direct flow connection with the interior of the evaporation chamber.

[0066] In some examples, the evaporator may be arranged inside the evaporation chamber. In other examples, the evaporator may be located or arranged outside the evaporation chamber such that its outlet arrangement is in direct flow communication with the interior of the evaporation chamber. When the evaporator is arranged outside the evaporation chamber, the outlet arrangement of the evaporator may extend into or through the chamber wall of the evaporation chamber, such that the evaporation orifice of the outlet arrangement is in direct flow communication with the interior of the evaporation chamber.

[0067] The evaporation chamber can be implemented as a vacuum chamber. The evaporation chamber can be evacuated by a vacuum pump. In this regard, the coating arrangement can be operable to coat the surface located inside the evaporation chamber under vacuum conditions.

[0068] The coating arrangement can be implemented as a coating arrangement suitable for physical vapor deposition (PVD). An evaporator can be fixed inside the evaporation chamber and provided with an outlet arrangement having orifices comprising a flow cross-section with variable and / or adjustable size, position, or orientation. In this way, the geometric extent or geometric diffusion of the evaporated material released or escaping through the evaporator's outlet arrangement can be adjusted, for example, in situ during the coating process. Therefore, and specifically, the width of the vapor diffusion can be precisely adapted to the width of the substrate, for example, in a direction perpendicular to the substrate's direction of movement or elongation.

[0069] Typically, the coating arrangement includes a vacuum pump for evaporating the evaporation chamber.

[0070] The coating arrangement further includes a heating device for heating an evaporation crucible, thereby converting the evaporation material inside the evaporation crucible into a gaseous state, thus producing evaporated evaporation material that expands inside the evaporation chamber and is released or escapes from the evaporation chamber through an outlet arrangement.

[0071] According to another example, the substrate comprises one of a continuous strip or strip of material and a sheet of material that moves continuously relative to the evaporator along a transport direction. Therefore, the coating arrangement includes a corresponding transport device suitable for continuously feeding or moving the strip or sheet-like substrate relative to the evaporator. The flow cross-section of the evaporator orifice (which is dimensionally variable and / or adjustable along a first direction) extends at a predetermined angle relative to the transport direction. Typically, and in some examples, the first direction extends perpendicular to the transport direction or perpendicular to the main elongation direction of the substrate.

[0072] In some examples, the substrate transport direction extends substantially vertically. Here, the evaporator can be arranged laterally or horizontally offset from the substrate, and the outlet arrangement can be horizontally upward towards the substrate. In other examples, the substrate transport direction extends substantially horizontally. Here, the evaporator can be arranged vertically offset from the substrate. It can be arranged below the substrate, and the outlet arrangement can be upward towards the substrate.

[0073] The coating arrangement includes an evaporator as described above. In this regard, all the features, effects, and benefits described above in conjunction with the evaporator also apply to the coating arrangement; and vice versa.

[0074] In some examples, the substrate comprises a steel sheet or a metal sheet. In other examples, the substrate comprises a continuous strip or tape of metal or steel coated with a metal or metal alloy evaporation material, said metal or metal alloy evaporation material comprising at least one or a combination of the following materials: zinc, aluminum, nickel, chromium, magnesium, or titanium.

[0075] In some examples, the coating arrangement is configured to coat the surface of the substrate with an anti-corrosion layer or coating. In some examples, the vacuum coating system is configured to coat a strip of metal substrate, such as steel, with a metallic material or metal alloy, for example by means of physical vapor deposition (PVD), said metallic material or metal alloy comprising at least one or a combination of at least one or more of the following materials: zinc, aluminum, nickel, chromium, magnesium, or titanium.

[0076] In another aspect, this disclosure also relates to a method for coating the surface of a substrate inside an evaporation chamber arranged as described above. Typically, the method is configured for continuously coating the surface of a movable substrate. The method includes the steps of: continuously moving the substrate along a transport direction; guiding evaporated material onto the surface of the moving substrate; and adjusting the flow cross-section of the orifice of the evaporator outlet arrangement, for example, with respect to the width of the substrate in a direction perpendicular to the transport direction.

[0077] The method described herein is specifically configured to be implemented by an evaporator as described above and / or a coating arrangement as described above.

[0078] In this regard, all the effects, features and benefits described above in conjunction with the evaporator and coating arrangement also apply to the method of coating the surface of a movable substrate; and vice versa. Attached Figure Description

[0079] In the following sections, examples of evaporator and coating arrangements, as well as methods for coating substrates, are described in more detail with reference to the accompanying drawings, wherein:

[0080] Figure 1 The diagram schematically shows a cross-section through an evaporator arranged inside an evaporation chamber, through which a substrate moves.

[0081] Figure 2 An exemplary side view of the evaporator in relation to the width of the substrate in a first configuration is shown.

[0082] Figure 3 It shows a different configuration. Figure 2 The arrangement of the apertures, wherein the width of the apertures is adjusted to the width of the substrate,

[0083] Figure 4 A cross-section through an example evaporator is shown.

[0084] Figure 5 This is a separate view of the steam guiding section.

[0085] Figure 6 This is a separate perspective view of the first movable section.

[0086] Figure 7 yes Figure 5 and Figure 6 A perspective view of the components of the steam guiding section and the first movable section.

[0087] Figure 8 A separate perspective view of the second movable section is shown.

[0088] Figure 9 The assembly of the steam guiding section with the first movable section and the second movable section is shown.

[0089] Figure 10 This is another cross-section through another example of an evaporator.

[0090] Figure 11 Further examples of a steam guiding section with a first movable section and another first movable section are shown.

[0091] Figure 12 It shows Figure 11 The arrangement includes a first movable part and another first movable part movably arranged inside the steam guide part.

[0092] Figure 13 The steam guiding section and the second movable section are shown.

[0093] Figure 14 Show Figure 12 The arrangement and the second movable part,

[0094] Figure 15 Another example of an evaporator is shown in cross-section.

[0095] Figure 16 The sidewall and bottom sections of an example evaporation crucible are shown.

[0096] Figure 17 Another example of the sidewall and bottom sections of an evaporation crucible is shown.

[0097] Figure 18 This is a flowchart of a method for coating a surface using an evaporator and a coating arrangement.

[0098] Figure 19 Another example of a vapor guide section with a first movable portion is shown.

[0099] Figure 20 It shows Figure 19 The arrangement includes a first movable part and another first movable part movably arranged inside the steam guide part. Detailed Implementation

[0100] Figure 1A schematic example of a coating arrangement 1 is shown. The coating arrangement 1 includes an evaporation chamber 8, with an evaporator 10 disposed inside the evaporation chamber. The evaporation chamber 8, which can form a vacuum chamber, can be evacuated by an evaporation pump 6. In this way, the pressure P1 inside the evaporation chamber 8 can be significantly lower than the pressure P2 outside the evaporation chamber 8. An evaporation arrangement 5 is arranged inside the evaporation chamber 8. The evaporation arrangement 5 includes an evaporator 10 and heating devices 16 and 18, by means of which the evaporator 10 can be heated to the evaporation temperature.

[0101] Evaporator 10 includes an evaporation crucible 20. The evaporation crucible 20 defines an evaporation chamber 19. An evaporation material 12 can be stored or contained inside the evaporation chamber 19. The evaporation material 12 can be stored in a liquid state inside the evaporation chamber 19. Here, the evaporation material is molten evaporation material 12. Alternatively, the evaporation material is provided or supplied to the evaporation crucible in a solid state. By feeding molten evaporation material 12 into the evaporation crucible 20, the evaporation material, which is further heated inside the evaporation crucible, can evaporate and can be converted or transformed into evaporated evaporation material 14, thus filling the chamber 19 above the fluid surface 15 of the molten evaporation material 12.

[0102] The evaporation crucible 20 includes sidewalls 21 and a bottom 22. The evaporation crucible 20 may be closed upwards by a top 23. At least one of the sidewalls 21 and the top 23 of the evaporation crucible 20 includes an outlet arrangement 24. The outlet arrangement 24 includes an evaporation orifice 26. The evaporation orifice 26 includes a flow cross-section having variable and / or adjustable dimensions. Evaporated material 14 is allowed to flow through the evaporation orifice 26 from the evaporation chamber 19 into the surrounding evaporation chamber 8 and thus outside the evaporation crucible 20.

[0103] A substrate 2 is further disposed inside the evaporation chamber 8. The substrate 2 includes a surface 3 to be processed (e.g., to be coated by physical vapor deposition with evaporated evaporation material). The outlet arrangement 24 may include or may form a nozzle section 25 through which the evaporated evaporation material 14 can flow in a controlled manner toward the surface 3 of the substrate 2.

[0104] The evaporation chamber 8 includes a chamber wall 11 that is substantially closed separately from an optional through opening through which the substrate 2 can be conveyed along the transport direction 9. The chamber wall 11 may further intersect with a supply for the evaporation arrangement 5 or the evaporator 10. The supply includes a conduit 28 heated by a heater 18 and in fluid communication with the evaporation chamber 19. Evaporation material can be melted outside the evaporation chamber 8 via the conduit 28 and can be supplied to the evaporation chamber 19 in a liquid or molten state.

[0105] The chamber wall 11 defines the interior 13 of the evaporation chamber 8. Typically, and as... Figure 1 As shown, the evaporator 10 is located inside the interior 13 of the evaporation chamber 8. In other examples, the evaporator 10 may be located outside the evaporation chamber 8. However, the outlet arrangement 24 of the evaporator 10 is located inside the interior 13 of the evaporation chamber or at least in direct fluid communication with the interior 13. The outlet arrangement 24 (at least the evaporation orifice) may intersect the chamber wall 11 from the outside, such that the evaporation orifice 26 is in direct fluid communication with the interior 13. The arrangement of the evaporator 10 outside the evaporation chamber 8 facilitates the supply of molten or solid evaporation material to the evaporation crucible 20.

[0106] Typically or preferably, the end section 29 of the supply conduit 28 is in fluid communication with the inlet 27 of the evaporation crucible 20, either at or near the lower portion of the sidewall 21 and / or near or within the bottom 22 of the evaporation chamber 19 or the evaporation crucible 20. In some examples, the conduit 28 or supply for the molten evaporation material 12 may be in fluid communication with the bottom 22 of the evaporation crucible 20. In this way, a bottom-side supply of molten evaporation material 12 can be provided, which can easily allow the evaporation crucible 20 to be emptied during downtime or in the event of a shutdown of the evaporator 10 or the evaporation arrangement 5.

[0107] In some examples, the substrate 2 is an elongated strip or sheet of metal material, such as a steel strip or strip to be processed (e.g., coated with an anti-corrosion coating). The coating can be provided by an evaporated material 12, 14 deposited on the surface 3 by means of physical vapor deposition.

[0108] In some examples, the substrate 2 may be subjected to continuous movement relative to the evaporation arrangement 5 and / or relative to the evaporator 10 along the transport direction 9. In order to provide a continuous, uniform and high-quality coating on the surface 3 of the substrate 2, it is desirable to provide a uniform distribution or uniform geometric diffusion of the evaporated material 14 near the moving surface 3 of the substrate 2.

[0109] exist Figure 1 In this example, the substrate 2 extends vertically, and the substrate transport direction 9 is parallel to the extension of the planar strip substrate 2. Therefore, the substrate transport direction 9 also extends vertically. The evaporator 10 is positioned laterally (i.e., horizontally) away from the substrate 2, with the outlet arrangement 24 facing the substrate 2. The outlet arrangement 24 (and in particular the orifice 26 of the outlet arrangement 24) faces the surface 3 of the substrate 2 in the horizontal direction.

[0110] The outlet arrangement 24 of the evaporator 10 includes a flow cross section of variable and / or adjustable dimensions, such as from... Figure 2 and Figure 3 This will become clear through comparison. Figure 2The image shows an elongated structure of the outlet arrangement 24 along the first direction (y) as the substrate 2 moves along the second direction (x). (See image from...) Figure 2 It is immediately clear that the elongation of the evaporation orifice 26 and therefore the elongation of the outlet arrangement 24 along the first direction (y) defines the coating width 7, which in Figure 2 In this example, the area is greater than the corresponding range of substrate 2 along this first direction (y). The opposite ends of the coating width 7 are separated by a distance that exceeds the corresponding range of the surface 3 of substrate 2 as defined by the opposite side edges 4, 4' of substrate 2. In this configuration, a non-negligible amount of evaporated material 14 is actually lost, and the area around substrate 2 may be contaminated, and thus the interior of the evaporation chamber 8 may be contaminated.

[0111] To optimize the coating process and reduce the loss of evaporating materials 12, 14, the outlet arrangement 24 is provided with an orifice adjustment section 30, by means of which the size and / or geometry and / or position of the flow cross-section of the evaporation orifice 26 can be adjusted and / or modified. Figure 3 As shown, the effective coating width 7 of the outlet arrangement 24 (and therefore the evaporation orifice 26) has been reduced to match the width of the substrate 2, which is defined by the distance between the opposite side edges 4, 4' of the substrate 2.

[0112] There are different ways to obtain or realize evaporation orifices 26 with variable and / or adjustable flow cross sections, such as from Figures 4 to 10 The examples shown become clear, or as Figures 11-15 As illustrated in the example shown.

[0113] By according to Figures 4-10 For example, a tubular vapor guide portion 40 is provided. The vapor guide portion 40 is in permanent fluid communication with the evaporation chamber 19. The vapor guide portion 40 includes a tubular sidewall 41 characterized by an inlet opening 45 that extends entirely along an extension of the sidewall 41 of the vapor guide portion 40, such as from... Figure 4 It becomes clear in the middle. The inlet orifice 45 is not in... Figure 5 The perspective view shows this in detail. The sidewall 41 thus intersects with the inlet orifice 45, and the interior of the tubular sidewall 41 remains in permanent flow communication with the evaporation chamber 19. In this way, the evaporated evaporation material 14 produced by the evaporation of the molten evaporation material 12 inside the evaporation chamber 19 can flow into the interior of the sidewall 41 of the vapor guide section 40.

[0114] The vapor guiding portion 40 further includes an orifice 44, the orifice being represented as shown in the figure below. Figure 5The illustrated guide orifice 44 extends through the sidewall 41. The guide orifice 44 includes an elongated slit 46 extending along a first direction (y), which may extend parallel to the central axis 49 of the tubular sidewall 41. The sidewall 41, and therefore the steam guide portion 40, may be closed towards two opposite longitudinal ends by end walls 42, 43. In this way, steam entering the steam guide portion 40 through the inlet orifice 45 can only escape from the steam guide portion 40 through the guide orifice 44.

[0115] Export arrangement 24 further includes, for example, Figure 6 The first movable portion 50 is shown. The first movable portion 50 may further include a tubular sidewall 51 having opposing end walls 52, 53 and an outlet orifice 54 extending through the sidewall 51. The sidewall 51 further includes an inlet orifice 58 circumferentially offset from the outlet orifice 54. The sidewall 51 includes a central axis 59, which, in an assembly configuration with the vapor guide portion 40, may coincide with or substantially overlap with the central axis 49 of the vapor guide portion 40, as shown. Figure 7 What is shown.

[0116] In the example shown, the outer diameter of the first movable portion 50 is slightly smaller than the inner diameter of the steam guide portion 40. This allows for a nested arrangement and therefore an interlaced or telescoping arrangement of the first movable portion 50 within the tubular sidewall 41 of the steam guide portion 40. The first movable portion 50 is rotatably supported within the steam guide portion 40. It can rotate relative to the steam guide portion 40 about a rotation axis 49.

[0117] Inlet orifice 58 substantially coincides with and overlaps with inlet orifice 45. In this manner, the evaporated material 14 is allowed to flow into the interior of the first movable portion 50. The first movable portion 50 includes an outlet orifice 54 in a rhomboid or triangular shape. The outlet orifice 54 includes a first inclined section 55 and a second inclined section 56. These inclined sections extend at a predetermined angle relative to the axis of rotation 49. Figure 7 In the illustrated assembly configuration, the outlet orifice 54 of the movable portion 50 overlaps with the guide orifice 44, and thus with the elongated slit 46 of the vapor guide portion 40. In this way, the resulting evaporation orifice 26, formed by the unobstructed portions of the outlet orifice 54 and the guide orifice 44, can be provided.

[0118] like Figure 7 As shown, the relatively positioned inclined portions or inclined sections 55, 56 define the longitudinal range of the guide orifice 44. Therefore, the sidewall 51 of the movable portion 50 adjacent to the inclined sections 55, 56 at least partially obstructs a portion of the elongated slit 46, and thus obstructs a portion of the guide orifice 44.

[0119] In this way, the size of the remaining evaporation orifice 26 formed by the overlapping area of ​​the outlet orifice 54 and the guide orifice 44 is variable and / or adjustable.

[0120] By rotating the movable portion 50 relative to the vapor guide portion 40 in a first rotational direction, the portions of the inclined sections 55, 56 that overlap with the guide orifice 44 are modified accordingly, thus increasing the longitudinal extent of the evaporation orifice 26. When the first movable portion 50 is rotated or moved in the opposite and therefore second rotational direction, the longitudinal extent and thus the size of the evaporation orifice 26 decrease accordingly.

[0121] With the help of the inclined sections 55 and 56, a continuous and stepless dimensional change of the evaporation orifice 26 can be provided when the first movable portion 50 moves (e.g., rotates relative to the vapor guide portion 40).

[0122] As from Figure 4 As will become clear in the cross-section, at least one gasket 47, 48 is provided between the outer surface of the sidewall 51 of the movable portion 50 and the inner surface of the sidewall 41 of the vapor guide portion 40. In this way, it can be provided that the evaporating material 14 flowing through the outlet orifice 54 of the movable portion 50 does not escape uncontrollably between the sidewalls 41, 51, but only escapes from the evaporation chamber 19 through the overlapping portion of the outlet orifice 54 and the guide orifice 44. The first movable portion 50 and the vapor guide portion 44 form or constitute an orifice adjustment section 30, by means of which the longitudinal extension and / or position of the evaporation orifice 26, as seen in the circumferential direction, can be continuously changed and / or adjusted.

[0123] In any conceivable orientation position of the first movable portion 50 relative to the vapor guide portion 40, the first movable portion 50 can be fixed relative to the vapor guide portion 40, thereby maintaining the predetermined size or geometry of the evaporation orifice 26.

[0124] It should be further noted that, according to Figure 4 The evaporator 10 in the example includes an outlet arrangement 24 at the top 23 of the evaporation crucible 20. This configuration of the evaporator 10 is particularly suitable for the horizontal transport direction of the substrate 2. Here, the evaporator 10 is specifically configured to be arranged vertically below the substrate 2. The orifice 26 of the outlet arrangement 24 can face upwards, toward the lower side or lower surface 3 of the moving substrate 9.

[0125] Optionally, such as Figure 7 The orifice adjustment part 30 shown may also be provided as in Figure 8The second movable portion 60 is shown separately. The second movable portion 60 may also include a tubular shape and may be characterized by tubular or cylindrical sidewalls 61, which are closed at opposite longitudinal ends by corresponding end walls 62, 63. The second movable portion 60 may be movably disposed on or inside one of the first movable portion 50 and the vapor guiding portion 40. The second movable portion is rotatable about a central axis that is a rotation axis 69. The sidewall 61 of the second movable portion 60 includes a second outlet orifice 64.

[0126] A second inlet orifice 68 is provided, circumferentially offset from the second outlet orifice 64, and appropriately overlaps with the first inlet orifice 58 and the inlet orifice 45. A second movable portion 60 having its second outlet orifice 64 is movable relative to the first movable portion 50 and relative to the vapor guide portion 40. The second movable portion may be movable independently of the movement of the first movable portion 50. The second outlet orifice 64 has a rectangular shape. The second outlet orifice may include or form an elongated slit 66. The circumferential dimension of the width of the elongated slit 66 may be greater than or less than the corresponding circumferential dimension or width of the elongated slit 46 or the guide orifice 44. In fact, and by moving the second movable portion 60 relative to at least one of the vapor guide portion 40 and the first movable portion 50, the effective width of the resulting evaporation orifice 26 can be modified, and thus the extent of the flow evaporation orifice 26 along the circumferential direction can be modified.

[0127] Therefore, in the example currently shown, the movement of the first movable portion 50 relative to the vapor guide portion 40 provides modification or adjustment of the longitudinal range of the evaporation orifice 26. By means of the movement of the second movable portion 60 relative to the vapor guide portion 40 and / or relative to the first movable portion 50, the extension or size of the evaporation orifice 26 in the circumferential direction can be modified and / or adjusted.

[0128] The triangular shape of the first outlet orifice 54 is merely one example of various conceivable geometric forms of the first outlet orifice 54. For a rhomboid or triangular first outlet orifice 54, when the first movable portion 50 undergoes movement relative to the vapor guide portion 40 in the circumferential direction, and therefore in the second direction, the resulting evaporation orifice 26 can be provided with dimensional and morphological changes along the first direction (y) and therefore along the longitudinal extension or axial direction of the vapor guide portion 40. In this way, the longitudinal dimension of the evaporator 10 is not modified when the longitudinal dimension of the evaporation orifice 26 is adjusted.

[0129] As from Figure 10The cross-section becomes clearer, and the orifice adjustment section 30 and the entire outlet arrangement 24 can be arranged at or near the upper end of the side wall 21 of the evaporation crucible 20. It can be arranged adjacent to the closed top 23 of the evaporation crucible 20. The bottom 22 of the evaporation crucible 20 may include multiple bottom sections 32, 33, 34, such as... Figure 10 and Figure 16 As shown. Here, the bottom 22 may include a central and relatively planar bottom section 32, which is adjacent to or transformed into a slightly vertically oriented sidewall 21 by a plurality of oblique or inclined bottom sections 33, 34, 35 or 36.

[0130] The sloping or inclined bottom sections 33, 34, 35, and 36 provide variations in the total surface area of ​​the molten evaporating material 12 within the evaporation chamber 19. By raising or lowering the fluid level 15 in the regions of the sloping or inclined bottom sections 33, 34, 35, and 36, the surface dimensions of the molten evaporating material 12 can be modified and altered, thereby allowing modification, adjustment, or change of the evaporation rate. Typically, the evaporation rate at which the molten evaporating material 12 transforms into the evaporated material 14 is proportional to the surface dimensions of the fluid level 15.

[0131] For example Figures 4-10 In the example shown, the first movable portion 50 is movably arranged inside the steam guiding portion 40. The second movable portion 16 may be arranged between the first movable portion 50 and the steam guiding portion 40. The second movable portion may also be located inside the first movable portion 50. In other examples, the first movable portion 50 may be movably arranged on or outside the steam guiding portion 40. Furthermore, the second movable portion 16 may be arranged outside the steam guiding portion 40 and / or outside the first movable portion 50.

[0132] Furthermore, the guide orifice 44 is not limited to the elongated slit 46. In other examples, the guide orifice 44 may be a guide orifice 44 having a rectangular, triangular, rhomboid, circular, elliptical, or oval shape, while the first outlet orifice 54 or the second outlet orifice 64 has an elongated slit.

[0133] In some examples, the first movable portion 50 and / or the second movable portion 60 may be open at the ends. Therefore, they may not have closed end walls 52, 53, 62, 63, provided that the discontinuous area between the vapor guide portion 40, the first movable portion 50, and the second movable portion 60 is adequately sealed, for example, by means of one or more gaskets 47, 48. Specifically, the first gasket 47, for example, in the form of an annular gasket, may be positioned around the circumference of the first movable portion 50, longitudinally offset from the first longitudinal end of the first outlet orifice 54. The second gasket may be positioned around the circumference of the first movable portion, longitudinally offset from the second longitudinal end of the first outlet orifice 54. Similarly, the area between the first movable portion 50 and the second movable portion 60 may be correspondingly sealed by means of additional gaskets (not shown).

[0134] exist Figures 11-15 In another example, a different solution is shown for the orifice adjustment section 130 or the outlet arrangement 124 including the orifice adjustment section 130. Here, the vapor guide section 140 has a cubic shape. The vapor guide section includes a sidewall 141 having a square or rectangular cross-section. The sidewall 141 also includes an elongated orifice 144, which is also implemented as an elongated slit 146. The elongated slit 146 includes longitudinal ends 144a, 144b positioned opposite each other. The sidewall 141 opens toward the opposite longitudinal ends. Similarly, and as described with respect to the sidewall 41, the sidewall 141 also includes an inlet orifice 145, which is only located at... Figure 15 The cross-section is indicated. The vapor generated inside the evaporation chamber 19 can flow through the inlet orifice 145 into the interior of the sidewall 141.

[0135] The orifice adjustment section 130 and thus the outlet arrangement 24 provided by the steam guide section 140 are further provided with a first movable portion 150. The first movable portion includes a sidewall 151 having an outer geometry that matches the inner side 138 of the sidewall 141. The first movable portion 150 can be longitudinally slidably disposed on the inner side of the open end sidewall 141 of the steam guide section 140. (As from...) Figure 11 and Figure 12 As becomes clear in the comparison, the first movable portion 150 can be slidably supported or slidably inserted into a receiving portion 142 formed at or within the longitudinal end of the sidewall 141. The first movable portion 150 includes a closed end wall 153 that, when properly mounted inside the sidewall 141 and thus inside the receiving portion 142, effectively closes the vapor guide portion 140 toward the corresponding longitudinal end. Therefore, the movable portion 150 includes a body 154 that forms a movable closure for the hollow vapor guide portion 140 toward the first longitudinal end of the vapor guide portion 140.

[0136] The first movable portion 150 is slidably movable relative to the sidewall 141, thereby blocking a larger or smaller portion of the orifice 144. The first movable portion 150 may also be provided with a closed end wall 152 opposite to the end wall 153. The first movable portion may further include a top 158 side and a bottom 154 side formed corresponding to or complementary to the top side 148 and bottom 147 of the sidewall 141 of the vapor guide portion 140.

[0137] The first movable portion 150 can be implemented as a slider, which is slidably disposed inside the vapor guiding portion 140. Here, the outer surface or outer cross-section of the first movable portion 150 matches the inner diameter or inner cross-section of the vapor guiding portion 140, thus allowing the first movable portion to move relative to the vapor guiding portion 140 along a longitudinal range, and therefore along a first direction (y). The sidewall 151 of the first movable portion 150 at least partially obscures the orifice 144 of the sidewall 141, thereby effectively increasing or decreasing the longitudinal range of the resulting evaporation orifice 26 formed by the orifice 144 in the sidewall 141.

[0138] In other examples, the first movable portion 150 may be end-open at its longitudinal end facing the interior of the vapor guide portion 140. It may not have an end wall 153, but may include a closed end wall 152. Here, the inner dimension of the side wall 151 may be designed to receive the outer side of the side wall 141. In this way, the movable portion 150 can be slidably supported on the outer side of the side wall 141 of the vapor guide portion 140. The side wall 151 of the first movable portion 150 may be a closed structure impermeable to the evaporated material 14. In this way, and by sliding the first movable portion 150 relative to the vapor guide portion 140, the effective longitudinal range of the orifice 144 can be modified and adjusted accordingly.

[0139] like Figure 11 and Figure 12 Furthermore, an additional first movable portion 150' may be provided. This additional first movable portion 150' may be slidably disposed at the opposite longitudinal end, and thus disposed within the second receiving portion 143 of the vapor guiding portion 140. This additional first movable portion may be used to at least partially obscure the opposite longitudinal end 144b of the elongated orifice 144 in the sidewall 141 of the vapor guiding portion 140. The additional first movable portion 150' may be shaped identically to the first movable portion 150. In this regard, all the features, effects, and benefits of the first movable portion 150 as described above also apply to the additional first movable portion 150'.

[0140] Furthermore, in another example, the additional first movable portion 150' may include a hollow shape and may not have an end wall 152. The additional first movable portion may be closed at an oppositely positioned end wall 153. Here, the dimensions of the inner cross-section or inner section of the hollow sidewall 151 may be designed and configured to receive the outer surface or outer cross-section of the elongated vapor guide portion 140. In either case, the first movable portions 150, 150' may be slidably displaced relative to the vapor guide portion 140, thereby allowing modification of the longitudinal extent of the resulting evaporation orifice 26, which is the unobstructed portion of the elongated orifice 144 not obstructed by one or more sidewalls 151 of the first movable portion 150 and the additional first movable portion 150'.

[0141] Of course, a gasket may also be provided between sidewall 141 and one or more sidewalls 151 to prevent the evaporating material 14 from escaping or being released uncontrollably from the evaporation chamber 19.

[0142] The first movable portion 150 and the other first movable portion 150' can be movable independently of each other and relative to the vapor guide portion 140. The position of the first movable portion 150 relative to the vapor guide portion 140 can determine the geometry or extension of the evaporated material 14 released from the outlet arrangement 24. The position of the first movable portion 150 relative to the vapor guide portion 140 can therefore determine the first edge or end of the vapor diffusion as seen along a first direction (y) (e.g., perpendicular to the substrate transport direction 9).

[0143] The position of the additional first movable portion 150' relative to the vapor guide portion 140 can determine the position or geometric diffusion of the evaporated material 14 in the opposite direction (-y).

[0144] Therefore, by individually controlling and modifying or adjusting the position of the first movable portion 150 and the position of the other first movable portion 150' relative to the vapor guiding portion 140, the size (i.e., longitudinal range) of the resulting evaporation orifice 26 and the position of the evaporation orifice 26 relative to the evaporation crucible 20 along the first direction (y) can be adjusted to precisely match the position and / or lateral width of the movable substrate 2.

[0145] like Figure 13 and Figure 14As further illustrated, the evaporator 10 and, in particular, the outlet arrangement 24 of the orifice adjustment section 30 may be provided with a second movable portion 160. The second movable portion 160 may include a shield 161 with a baffle 162, which is impenetrable by the evaporated evaporation material 14. The shield 161 may be provided with at least one handle 163, 164, by means of which the shield 161 can be moved along a second direction (x). The second direction (x) may be perpendicular to the first direction (y). The second direction may extend substantially parallel to the substrate transport direction 9. By moving the shield 161 and the therefore impenetrable baffle section 162 along the second direction (x), the width of the evaporation orifice 26 can be modified along this second direction (x).

[0146] Therefore, the movement of the second movable portion 160 along the second direction (x) provides for the dimensional adjustment of the evaporation orifice 26 with respect to the second direction (x).

[0147] The movement of the first movable portion 150 or the other first movable portion 150' provides modification or adjustment of the position and / or longitudinal range of the evaporation orifice 26 along the first direction (y).

[0148] Of course, the second movable portion 160 may include, for example, a sidewall provided by a baffle section 162. The sidewall or baffle section 162 may be relative to... Figure 8 The second movable portion 60 shown is provided with an elongated orifice in a similar manner to that described above. Here, and by modifying the degree of overlap or obstruction between the orifice in the shield 161 and the orifice 144 provided in the sidewall 141, the corresponding size adjustment of the resulting evaporation orifice 26 can be provided.

[0149] exist Figure 15 The diagram schematically shows gaskets 47 and 48 between the outer surfaces of the first movable portions 150 and 150' and the inner side of the sidewall 151 of the vapor guiding portion 140. Typically, the gaskets are positioned at or near end walls 152 and 153 facing inward toward the interior of the sidewall 141, which are used to cover or define orifices 144 in the sidewall 141 of the vapor guiding portion 140.

[0150] exist Figure 17 The image further illustrates another example of the bottom 22 of the evaporation crucible 20. Here, the bottom 22 may have a shape similar to... Figure 16The bottom 22 shown has a slightly similar shape. However, the upper ends of the sloping or inclined bottom sections 33, 34, 35, and 36, arranged in a rectangular funnel shape, transition into a laterally extending, outwardly extending intermediate sidewall section 72, which extends considerably steeper than the sloping bottom sections 33, 34, 34, and 36. The upper ends of the sidewall section 72 merge into other upper sidewall sections 73, 74, 75, and 76, which extend at a smaller angle relative to the sidewall section 72. The upper ends of the sidewall sections 73, 74, 75, and 76 extend into the upright or vertically oriented sidewall 21 of the evaporation crucible 20.

[0151] The intermediate sidewall section 72 forms a liquid collection section with fairly steep lateral enclosure. When the fluid level 15 is in the intermediate sidewall section 72, the rise and fall of the fluid level 15 has a fairly limited effect on the change in the evaporation rate. When the fluid level 15 is in the upper sidewall sections 73, 74, 75, and 76, the rise and fall of the fluid level 15 are accompanied by a corresponding increase or decrease in the surface area of ​​the molten evaporation material 12 inside the evaporation crucible 20.

[0152] An increase in the fluid level 15 results in a corresponding increase in the surface area of ​​the molten evaporating material, which in turn increases the evaporation rate without modifying the temperature of the evaporation crucible 20 or the temperature of the molten evaporating material 12. A decrease in the fluid level 15 in the regions of the sidewall sections 73, 74, 74, 76 allows for a reduction in the total surface area of ​​the molten evaporating material 12, and thus a reduction in the evaporation rate without modifying the temperature of the evaporator 10.

[0153] exist Figure 18 The flowchart schematically illustrates a method for coating the surface 3 of the substrate 2. Here, and in the first step 100, the substrate 2 is moved along the transport direction 9 through the evaporation chamber 8, as shown... Figure 1 As shown, the movable substrate 2 can enter and exit the evaporation chamber 8 through one or more vacuums not specifically shown herein. In step 102, the evaporated evaporation material 14 is guided onto the surface 3 of the movable substrate 2, and in step 104, the size of the flow cross-section of the orifice 26 of the outlet arrangement 24 of the evaporator 10 as described herein is adjusted with respect to or about the width of the substrate 2 perpendicular to the transport direction 9. Size adjustment can be achieved without moving the evaporator 10 or the outlet arrangement 24 relative to the evaporation chamber 20. Instead, an orifice adjustment section 30 is provided, which allows the evaporation width of the evaporator 10 to be adjusted in situ simply by moving the first movable portions 50, 150, optionally an additional first movable portion 150' and / or optional second movable portions 60, 160 relative to the vapor guide portions 40, 140 as described above.

[0154] exist Figure 19 and Figure 20 In another example, a different solution is shown for the outlet arrangement 224 of the evaporator 10, which includes or constitutes an orifice adjustment section 230. In principle, and unless otherwise described, Figure 19 and Figure 20 Examples combined with the above Figures 11-15 The examples described are highly similar or even identical. Here, and with... Figures 11-15 In contrast, the vapor guide portion 240 has a cylindrical shape. Furthermore, the movable portions 250, 250' can also have a cylindrical shape. The vapor guide portion 240 includes cylindrical sidewalls 241 with a circularly symmetrical cross-section. The movable portion 250 or the movable portions 250, 250' include the same cylindrical shape.

[0155] In addition, the implementation of the outlet arrangement 224 and the orifice adjustment section 230 is equivalent to combining Figures 11-15 The aforementioned implementation method. Therefore, Figure 19 and Figure 20 Examples and Figures 11-15 Similar or corresponding parts or features of the examples that are functionally identical are given the same or similar reference numerals. Figures 11-15 Compared to the previous figures, these same or similar figures have 100 more reference numerals.

[0156] Therefore, sidewall 241 includes an elongated orifice 244 implemented as an elongated slit 246. The elongated slit 246 includes opposing longitudinal ends 244a, 244b. Sidewall 241 opens toward at least one longitudinal end. Sidewall 241 may open toward two opposing longitudinal ends. Sidewall 241 includes an inlet orifice 245, which... Figure 19 Only a portion is shown in the perspective view. The vapor generated inside the evaporation chamber 19 can flow through the inlet orifice 245 into the outlet arrangement 224, and thus into the interior of the sidewall 241.

[0157] The orifice adjustment section 230 and thus the outlet arrangement 24 provided by the steam guide section 240 are further provided with a first movable portion 250. The first movable portion includes a sidewall 251 having an outer geometry that matches the inner side 238 of the sidewall 241. The first movable portion 250 can be longitudinally slidably disposed on the inner side of the open end sidewall 241 of the steam guide section 240. (As from...) Figure 19 and Figure 20As becomes clear in the comparison, the first movable portion 250 can be slidably supported or slidably inserted into a receiving portion 242 formed at or within the longitudinal end of the sidewall 241. The first movable portion 250 includes a closed end wall 253 that, when properly mounted inside the sidewall 241 and thus inside the receiving portion 242, effectively closes the vapor guide portion 240 toward the corresponding longitudinal end. Therefore, the movable portion 250 includes a body 254 that forms a movable closure for the hollow vapor guide portion 240 toward the first longitudinal end of the vapor guide portion 240.

[0158] The first movable portion 250 is slidably movable relative to the sidewall 241, thereby blocking a larger or smaller portion of the orifice 244. The first movable portion 250 may also have a closed end wall 252 opposite to the end wall 253. The sidewall 259 of the movable portion 250 is formed including a cylinder 258, which is dimensionally matched to the corresponding cylinder 248 of the sidewall 249 of the vapor guide portion 240. The cylinders 248 and 249 are complementary in shape. They can be arranged in a telescoping and slidably nested arrangement.

[0159] The first movable portion 250 can be implemented as a slider, which is slidably disposed inside the vapor guiding portion 240. Here, the outer surface or outer cross-section of the first movable portion 250 matches the inner diameter or inner cross-section of the vapor guiding portion 240, thus allowing the first movable portion to move relative to the vapor guiding portion 240 along a longitudinal range, and therefore along a first direction (y). The sidewall 251 of the first movable portion 250 at least partially obscures the orifice 244 of the sidewall 241, thereby effectively increasing or decreasing the longitudinal range of the resulting evaporation orifice 26 formed by the orifice 244 in the sidewall 241.

[0160] In addition to geometric changes, according to Figure 19 and Figure 20 The orifice adjustment part 230 is slightly equivalent to the combination Figures 11-15 The orifice adjustment section 130 is described above. In this regard, all the features, effects and benefits described above in connection with the orifice adjustment section 130 also apply to the orifice adjustment section 230, and vice versa.

[0161] The orifice adjusting portion 230 may similarly be provided with a second movable portion (not shown), which is comparable to the second movable portion 160 and is movable in the circumferential direction relative to the cylindrical sidewall 241 of the vapor guiding portion 240 and / or relative to the orifice 244, similar to the cylindrical shape of the vapor guiding portion 240. The second movable portion for the orifice adjusting portion 230 may include a partially cylindrical shape complementary to the shape of the sidewall 241. The second movable portion may include a movable shield to at least partially and variably or adjustably shield the guide orifice 244 of the vapor guiding portion 241.

[0162] Figure Labels

[0163] 1 Coating Arrangement

[0164] 2 substrates

[0165] 3 surfaces

[0166] 4 side edges

[0167] 5 Evaporation Arrangement

[0168] 6 Evaporation Pumps

[0169] 7 Coating width

[0170] 8 Evaporation Chambers

[0171] 9 Conveying directions

[0172] 10 Evaporators

[0173] 11 chamber wall

[0174] 12 Molten materials

[0175] 13 Internal

[0176] 14 Evaporated materials

[0177] 15 Fluid Surface

[0178] 16 heating devices

[0179] 18 heating devices

[0180] 19 cavities

[0181] 20 Evaporation Crucible

[0182] 21 sidewalls

[0183] 22 bottom

[0184] 23 Top

[0185] 24 Exit Arrangements

[0186] 25 nozzle section

[0187] 26 Evaporation orifice

[0188] 27 Entrance

[0189] 28 pipes

[0190] 29 end sections

[0191] 30-hole adjustment section

[0192] 32 bottom section

[0193] 33 Bottom Section

[0194] 34 bottom section

[0195] 35 bottom section

[0196] 36 bottom section

[0197] 40 Steam Guide Section

[0198] 41 sidewalls

[0199] 42 end wall

[0200] 43 end wall

[0201] 44 guide hole

[0202] 45 Inlet Port

[0203] 46 slits

[0204] 47 gasket

[0205] 48 gasket

[0206] 49 central axis

[0207] 50 movable parts

[0208] 51 sidewalls

[0209] 52 end wall

[0210] 53 end wall

[0211] 54 Outlet Port

[0212] 55 slope section

[0213] 56 inclined section

[0214] 57 Rhomboid geometric shape

[0215] 58 Inlet Port

[0216] 59 Rotation axis

[0217] 60 movable parts

[0218] 61 sidewalls

[0219] 62 end wall

[0220] 63 end wall

[0221] 64 Outlet Port

[0222] 65 edge

[0223] 66 slits

[0224] 67 edge

[0225] 68 Inlet Port

[0226] 69 Rotation axis

[0227] 72 sidewall sections

[0228] 73 sidewall section

[0229] 74 sidewall sections

[0230] 75 sidewall section

[0231] 76 sidewall sections

[0232] 130-hole adjustment section

[0233] 138 inner side

[0234] 139 outer side

[0235] 140 Steam Guide Section

[0236] 141 sidewall

[0237] 142 Receiving Section

[0238] 143 Receiving Department

[0239] 144 Outlet Port

[0240] 145 Inlet Port

[0241] 146 slits

[0242] 147 bottom

[0243] 148 top

[0244] 149 sidewalls

[0245] 150 movable parts

[0246] 151 sidewall

[0247] 152 end wall

[0248] 153 end wall

[0249] 154 body

[0250] 157 bottom

[0251] 158 top

[0252] 159 sidewalls

[0253] 160 movable parts

[0254] 161 shielding parts

[0255] Section 162

[0256] 163 handles

[0257] 164 handles

[0258] 240 Steam Guide Section

[0259] 241 sidewall

[0260] 242 Receiving Unit

[0261] 243 Receiving Department

[0262] 244 Outlet Port

[0263] 245 Inlet Port

[0264] 246 slits

[0265] 248 cylinders

[0266] 249 sidewalls

[0267] 250 movable parts

[0268] 251 sidewall

[0269] 252 end wall

[0270] 253 end wall

[0271] 254 body

[0272] 258 cylinders

[0273] 259 sidewalls

Claims

1. An evaporator (10) for use inside an evaporation chamber (8) and configured to evaporate an evaporating material (12), the evaporator (10) comprising: - Evaporation crucible (20), the evaporation crucible including an evaporation chamber (19) for containing evaporation material (14). - Outlet arrangement (24), which is in flow connection with the evaporation chamber (19) and includes an evaporation orifice (26) for allowing evaporated evaporation material (14) to flow from the evaporation chamber (19) into the evaporation chamber (8), wherein the evaporation orifice (26) includes a flow cross section having a variable and / or adjustable size.

2. The evaporator (10) according to claim 1, wherein, The outlet arrangement (24) includes a steam guide portion (40; 140; 240) having a sidewall (41; 141; 241) and the sidewall including a guide orifice (44; 144; 244) extending through the sidewall (41; 141; 241).

3. The evaporator (10) according to claim 2, wherein, The outlet arrangement (24) includes a first movable portion (50; 150; 250) movable relative to the steam guide portion (40; 140; 240), wherein the first movable portion (50, 150; 250) includes a movable sidewall (51; 151; 251) for at least partially and variably or adjustably shielding the guide orifice (44; 144; 244) of the steam guide portion (40; 140; 240).

4. The evaporator (10) according to claim 3, wherein, The guide orifice (44; 144; 244) is an elongated orifice (44; 144; 244) extending along a first direction (y), and wherein the first movable portion (150; 250) is movable relative to the vapor guiding portion (140; 240) along the first direction (y) to vary the degree of obstruction of the guide orifice (144; 244) by the first movable portion (150; 250).

5. The evaporator (10) according to any one of claims 3 or 4, wherein, The outlet arrangement (24) includes an additional first movable portion (150'; 250') movably disposed on or inside the steam guide portion (140; 240) and including a movable sidewall (151'; 251') for at least partially obscuring the guide orifice (144; 244) of the steam guide portion (140; 240), wherein the first movable portion (150; 250) is movably disposed at or near a first longitudinal end (144a; 244a) of the guide orifice (144; 244), and wherein the additional first movable portion (150'; 250') is movably disposed at or near a second longitudinal end (144b; 244b) of the guide orifice (144; 244), the second longitudinal end being opposite to the first longitudinal end (144a; 244a) of the guide orifice (144; 244).

6. The evaporator (10) according to any one of claims 3 to 5 further includes a gasket or seal between the sidewall (151; 251) of the movable portion (150; 250) and the vapor guiding portion (140; 240).

7. The evaporator (10) according to any one of claims 3 to 6, wherein, The first movable portion (150; 250) is continuously and / or steplessly movable or arrangeable relative to the guide orifice (144; 244).

8. The evaporator (10) according to any one of the preceding claims, wherein, The flow cross-section of the guide orifice (144; 244) of the outlet arrangement (24) is variable and / or adjustable during the evaporation or coating process.

9. The evaporator (10) according to any one of the preceding claims, wherein, The position of the evaporation orifice (26) relative to the evaporation crucible (20) is variable and / or adjustable.

10. The evaporator (10) according to any one of claims 2 to 9, wherein, The outlet arrangement (24) includes a second movable portion (160) movable relative to the steam guide portion (40; 140; 240) and includes a movable shield (161) for at least partially and variably or adjustablely shielding the guide orifice (44; 144; 244) of the steam guide portion (40; 140; 240).

11. The evaporator (10) according to claim 10, wherein, The second movable portion (160) is movable relative to the vapor guiding portion (140; 240) along a second direction (z).

12. The evaporator (10) according to any one of claims 2 to 9, wherein, The outlet arrangement (24) includes a second movable portion (60; 160) movable relative to the steam guide portion (40; 140; 240) and includes a second outlet orifice (64) for at least partially and variably or adjustably overlapping the guide orifice (44; 144; 244).

13. A coating arrangement (1) for coating a surface (3) of a substrate (2) by vapor deposition, the coating arrangement (1) comprising: - An evaporation chamber (8) for receiving the substrate (2), and - The evaporator (10) according to any one of the preceding claims is in direct flow connection with the interior (13) of the evaporation chamber (8).

14. The coating arrangement (1) according to claim 13, wherein, The substrate (2) includes one of a continuous material strip or strip and a material sheet that moves continuously relative to the evaporator (10) along a transport direction (9), and wherein the flow cross section of the orifice (26) of the evaporator (10) is dimensionally variable and / or adjustable along a first direction (y) that extends at a predetermined angle relative to the transport direction (9).

15. A method for continuously coating the surface (3) of a movable substrate (2) inside an evaporation chamber (8) of a coating arrangement (1) according to claim 13 or 14, the method comprising the steps of: - The substrate (2) is continuously moved along the conveying direction (9). - The evaporated material (14) is guided onto the surface (3) of the moving substrate (2), and - Adjust the size of the flow cross section of the orifice (26) of the outlet arrangement (24) of the evaporator (10) for the width of the substrate (2) perpendicular to the conveying direction (9).

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