Process path scheduling method, module and related equipment

Abstract

A process path scheduling method, module and related equipment, the process path scheduling method comprising: acquiring a material process path, the material process path comprising information of a plurality of process chambers through which a material sequentially passes in a process flow, the plurality of process chambers forming a resource ring, and at least two of the plurality of process chambers being identical; before materials to be processed are conveyed according to the material process path, whether the resource ring is in an unsaturated state or not is judged according to the number of existing materials in the resource ring; if the resource ring is in the saturated state, waiting for the resource ring to enter an unsaturated state again; and if the resource ring is in an unsaturated state, conveying the to-be-processed material according to the material process path. According to the technical scheme, the success rate of conveying the to-be-processed material according to the material process path can be increased, and the processing efficiency of the material is correspondingly improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a process path scheduling method, module and related equipment. Background Technology

[0002] In some manufacturing processes, it is necessary to perform corresponding procedures on the materials to be processed according to the process flow. Specifically, the materials to be processed are transported according to the corresponding process path, so that the materials to be processed pass through multiple process chambers in sequence.

[0003] However, current process path scheduling methods suffer from low scheduling success rates, which reduces material processing efficiency. Summary of the Invention

[0004] The problem solved by the embodiments of the present invention is to provide a process path scheduling method, module and related equipment, which can improve the success rate of material transfer operations according to the material process path, and thus help improve the material processing efficiency.

[0005] To address the above problems, embodiments of the present invention provide a process path scheduling method, comprising:

[0006] Obtain the material process path, which includes information on multiple process chambers that the material to be processed passes through sequentially in the process flow. The multiple process chambers form a resource loop, and at least two of the multiple process chambers are the same.

[0007] Before transferring the material to be processed according to the material process path, determine whether the resource ring is in an unsaturated state based on the quantity of existing materials in the resource ring.

[0008] If the resource ring is in a saturated state, then wait for the resource ring to re-enter a non-saturated state;

[0009] If the resource ring is in an unsaturated state, the material to be processed is transferred according to the material process path.

[0010] Optionally, the resource ring includes multiple resource loops divided according to function;

[0011] Determining whether a resource loop is in an unsaturated state based on the quantity of existing materials in the resource loop includes: determining whether the quantity of existing materials in each of the multiple resource loops satisfies: 0 ≤ m i ≤M i -n i , where i is an integer greater than or equal to 1; and m i M represents the quantity of materials already present in the i-th resource loop. in represents the number of process chambers in the i-th resource loop that the material to be processed passes through during its transport along the material process path. i This represents the number of exits of the i-th resource loop.

[0012] Optionally, the multiple resource loops in the resource ring are arranged sequentially in the longitudinal or transverse direction.

[0013] Optionally, if the resource loop is in an unsaturated state, the material to be processed is transferred according to the material process path, including:

[0014] Based on the material process path, obtain the information of the target process chamber corresponding to the current transfer operation;

[0015] If the target process chamber is fully loaded, a dwelling operation is performed on the material to be processed, so that the material to be processed dwells in the previous process chamber or the robot arm closest to the target process chamber, until the target process chamber is idle.

[0016] If the target process chamber is currently idle, the material to be processed is transferred to the target process chamber.

[0017] After the material to be processed is transferred to the target process chamber, the next transfer operation is obtained as the current transfer operation, and the process restarts from the step of obtaining the information of the target process chamber corresponding to the current transfer operation according to the material process path, until all transfer operations corresponding to the material process path are completed.

[0018] Optionally, the step of performing a dwelling operation on the material to be processed, causing the material to be processed to dwell in the robotic arm closest to the previous process chamber or the target process chamber, includes:

[0019] Obtain the dwell status information of the target process chamber;

[0020] When the dwelling state of the target process chamber is the first dwelling state, the material to be processed is dwelling in the current process chamber;

[0021] When the dwelling state of the target process chamber is the second dwelling state, the material to be processed is dwelled on the robot arm closest to the target process chamber.

[0022] Optionally, the material to be processed includes a wafer.

[0023] Accordingly, embodiments of the present invention also provide a process path scheduling module, including:

[0024] The path acquisition unit is adapted to acquire the material process path, which includes information on multiple process chambers that the material to be processed passes through sequentially in the process flow. The multiple process chambers constitute a resource loop, and at least two of the multiple process chambers are the same.

[0025] The transmission control unit is adapted to determine whether the resource ring is in an unsaturated state based on the quantity of existing materials in the resource ring before transmitting the material to be processed according to the material process path; if the resource ring is in a saturated state, it waits for the resource ring to re-enter an unsaturated state; if the resource ring is in an unsaturated state, it transmits the material to be processed according to the material process path.

[0026] Accordingly, embodiments of the present invention also provide a computer program product, including a computer program / instructions, which, when executed by a processor, are used to implement the process path scheduling method as described in any of the preceding claims.

[0027] Accordingly, embodiments of the present invention also provide an apparatus including at least one memory and at least one processor, wherein the memory stores one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the process path scheduling method as described in any of the preceding claims.

[0028] Accordingly, embodiments of the present invention also provide a storage medium storing one or more computer instructions for implementing the process path scheduling method as described in any of the preceding claims.

[0029] Compared with the prior art, the technical solution of the embodiments of the present invention has the following advantages:

[0030] The process path scheduling method provided in this embodiment of the invention includes: acquiring a material process path, wherein the material process path includes information on multiple process chambers that the material to be processed sequentially passes through in the process flow, the multiple process chambers forming a resource loop, and at least two of the multiple process chambers being identical; before transferring the material to be processed according to the material process path, determining whether the resource loop is in an unsaturated state based on the quantity of existing material in the resource loop; if the resource loop is in a saturated state, waiting for the resource loop to re-enter an unsaturated state; if the resource loop is in an unsaturated state, transferring the material to be processed according to the material process path.

[0031] In the process path scheduling method provided by this invention, before transferring the material to be processed according to the material process path, it is first determined whether the resource ring is in an unsaturated state based on the quantity of existing materials in the resource ring. If the resource ring is in an unsaturated state, the material to be processed is transferred according to the material process path. This can avoid the competition for the residence position among materials in the resource ring, improve the success rate of the material transfer operation according to the material process path, and correspondingly improve the material processing efficiency. Attached Figure Description

[0032] Figure 1 This is a flowchart illustrating an embodiment of the process path scheduling method provided by the technical solution of the present invention;

[0033] Figure 2 This is a schematic diagram of an embodiment of the resource ring in the technical solution of the present invention;

[0034] Figure 3 This is a schematic diagram of the structure of an embodiment of the process path scheduling module provided by the technical solution of the present invention;

[0035] Figure 4 This is a schematic diagram of an optional hardware structure of the device provided by the technical solution of the present invention. Detailed Implementation

[0036] As can be seen from the background technology, current process path scheduling methods suffer from low scheduling success rates, which reduces material processing efficiency.

[0037] To address the aforementioned technical problem, the present invention provides a process path scheduling method, comprising: acquiring a material process path, wherein the material process path includes information on multiple process chambers through which the material to be processed sequentially passes in the process flow, the multiple process chambers constituting a resource loop, and at least two of the multiple process chambers being identical; before transferring the material to be processed according to the material process path, determining whether the resource loop is in an unsaturated state based on the quantity of existing material in the resource loop; if the resource loop is in a saturated state, waiting for the resource loop to re-enter an unsaturated state; if the resource loop is in an unsaturated state, then transferring the material to be processed according to the material process path.

[0038] In the process path scheduling method provided in this embodiment of the invention, before transferring the material to be processed according to the material process path, it is first determined whether the resource ring is in an unsaturated state based on the quantity of existing materials in the resource ring. If the resource ring is in an unsaturated state, the material to be processed is transferred according to the material process path. This can avoid the competition for the residence position among materials in the resource ring, which is conducive to improving the success rate of the transfer operation of the material to be processed according to the material process path, and correspondingly, it is conducive to improving the processing efficiency of materials.

[0039] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0040] Figure 1 A schematic flowchart of an embodiment of the process path scheduling method provided by the present invention is shown. (Reference) Figure 1 A process path scheduling method may specifically include the following steps:

[0041] Step S110: Obtain the material process path, which includes information on multiple process chambers that the material to be processed passes through sequentially in the process flow. The multiple process chambers form a resource loop, and at least two of the multiple process chambers are the same.

[0042] Step S120: Before transferring the material to be processed according to the material process path, determine whether the resource ring is in an unsaturated state based on the quantity of existing materials in the resource ring;

[0043] Step S130: If the resource ring is in a saturated state, wait for the resource ring to re-enter a non-saturated state;

[0044] Step S140: If the resource ring is in an unsaturated state, the material to be processed is transferred according to the material process path.

[0045] Please continue to refer to this. Figure 1 Execute step S110 to obtain the material process path, which includes information on multiple process chambers that the material to be processed passes through sequentially in the process flow. The multiple process chambers constitute a resource loop, and at least two of the multiple process chambers are the same.

[0046] Obtaining the material process path provides a basis for transferring the material to be processed according to the material process path if the resource ring is in an unsaturated state.

[0047] The material process path is planned according to the process flow. Specifically, the material process path includes information on multiple process chambers in the same resource loop that the material to be processed passes through sequentially in the corresponding process flow.

[0048] The resource ring comprises a process chamber within the material processing platform and a material transfer device (such as a robotic arm or robotic hand) for transferring the material to be processed. In this embodiment, the resource ring includes multiple resource loops divided according to function, and these multiple resource loops are connected through the outlets of their respective resource loops, allowing the material to be processed to be transferred and processed sequentially among the multiple resource loops in the resource ring.

[0049] Figure 2 A schematic diagram of a resource loop is shown. (For example...) Figure 2 As shown, the resource ring 20 includes a buffer resource ring 210 and a transmission resource ring 220 arranged vertically. The buffer resource ring 210 is used to temporarily store materials during the process flow, and the transmission resource ring 220 is used to process the materials according to the process flow.

[0050] Specifically, the buffer resource loop 210 includes a buffer chamber 211, a robot 212 located within the buffer chamber 211, and vacuum transition chambers (Load Lock, LL) A, Vacuum Transition Chambers (Load Lock, LL) B, and process chambers A to F located around the buffer chamber 211. Vacuum transition chambers A and B serve as the outlet of the buffer resource loop 210. The transmission resource loop 220 includes a transmission chamber 221, a robot 222 located within the transmission chamber 221, and process chambers A, B, and process chambers 1, 2, 5, and 6 located around the transmission chamber 221. Process chamber 5 serves as the outlet of the transmission resource loop 220. Process chambers A and B are shared process chambers of the buffer resource loop 210 and the transmission resource loop 220, meaning that process chambers A and B simultaneously belong to both the buffer resource loop 210 and the transmission resource loop 220.

[0051] It should be noted that the above example of a resource ring including a vertically arranged cache resource ring and a transmission resource ring is merely an example. In other embodiments, the resource ring may include a larger number of resource rings, and the multiple resource rings may be arranged horizontally.

[0052] Reference Figure 2 The material process path is LLA→CHC→CHA→CH6→CHB→

[0053] Taking CHE / F→CHD→CHA→CH1→CH2 / 5→CHB→LLB as an example, during the execution of the corresponding processing technology, the material to be processed passes through the vacuum transition chamber A, process chamber C, process chamber A, process chamber 6, process chamber B, process chamber E / F, process chamber D, process chamber A, process chamber 1, process chamber 2 / 5, process chamber B and vacuum transition chamber B in sequence.

[0054] It is understood that the multiple process chambers in the resource ring are fixedly configured in a preset order. However, when the material to be processed is transferred according to certain process flows, the material to be processed cannot be transferred in the same order as the process chambers in the resource ring, resulting in the material to be processed passing through the same process chamber at least twice in the process flow.

[0055] Accordingly, if the material process path includes information on at least two identical process chambers in the same resource loop, that is, the material to be processed passes through at least the same process chamber at least twice in the process flow, then the material process path is called a cross process path.

[0056] Please continue to refer to the reference. Figure 2 Taking the material process path LLA→CHC→CHA→CH6→CHB→CHE / F→CHD→CHA→CH1→CH2 / 5→CHB→LLB as an example, during the transfer of the material to be processed along this path, the material will pass through process chamber B twice. This means that process chamber B needs to simultaneously handle the transfer of materials from process chambers 6 and 2 / 5. In other words, the material process path LLA→CHC→CHA→CH6→CHB→CHE / F→CHD→CHA→CH1→CH2 / 5→CHB→LLB intersects at process chamber B. Accordingly, the material process path LLA→CHC→CHA→CH6→CHB→CHE / F→CHD→CHA→CH1→CH2 / 5→CHB→LLB is an intersecting process path.

[0057] In this embodiment, the material to be processed is a wafer. Accordingly, the material process path corresponds to the wafer process path. As an example, the wafer process path is the process path corresponding to the vacuum pretreatment process before film fabrication on the wafer.

[0058] Please continue to refer to this. Figure 1 In step S120, before transferring the material to be processed according to the material process path, it is determined whether the resource ring is in an unsaturated state based on the quantity of existing materials in the resource ring.

[0059] Before transferring the material to be processed according to the material process path, it is determined whether the resource ring is in an unsaturated state based on the quantity of existing material in the resource ring. This provides a basis for waiting for the resource ring to re-enter an unsaturated state if it is in a saturated state, and for transferring the material to be processed according to the material process path if it is in an unsaturated state.

[0060] In this embodiment, the resource ring includes multiple resource loops. Accordingly, the resource ring is determined to be in an unsaturated state based on the quantity of existing materials in the resource ring, that is, whether the quantity of existing materials in the multiple resource loops of the resource ring has reached the corresponding maximum quantity.

[0061] In this embodiment, the quantity m of existing materials in each resource loop of the resource loop is used as an example. i Real-time recording is performed to determine the quantity m of existing materials in each resource loop within the resource loop. i Determine whether the multiple resource loops in the resource ring are in a saturated state.

[0062] Specifically, it is determined whether the quantity of materials in the multiple resource loops of the resource ring corresponds to the maximum quantity, that is, whether the quantity of materials in the multiple resource loops of the resource ring satisfies the following:

[0063] 0≤m i ≤M i -n i (1)

[0064] Where i is an integer greater than or equal to 1, m i M represents the quantity of materials already present in the i-th resource loop. i n represents the number of process chambers in the i-th resource loop that the material to be processed passes through during its transport along the material process path. i This represents the number of exits of the i-th resource loop.

[0065] The number M of process chambers in the i-th resource loop that the material to be processed passes through during its transport along the material process path. i This can also be referred to as the maximum resource bit of the i-th resource loop corresponding to the material process path.

[0066] Please continue to refer to the reference. Figure 2 Resource ring 20 includes buffer resource ring 210 and transmission resource ring 220, and follows the material process path LLA→CHC→CHA→CH6→CHB→CHE / F→CHD→

[0067] Taking CHA→CH1→CH2 / 5→CHB→LLB as an example, the material process path LLA→CHC→CHA→CH6→CHB→CHE / F→CHD→CHA→CH1→CH2 / 5→CHB→LLB passes through 7 process chambers located in the buffer resource loop 210, so the maximum resource bits of the buffer resource loop 210 are 7; the material process path LLA→CHC→CHA→CH6→CHB→CHE / F→CHD→CHA→CH1→CH2 / 5→CHB→LLB passes through 4 process chambers located in the transmission resource loop 220, so the maximum resource bits of the transmission resource loop 220 are 4.

[0068] Accordingly, it is determined whether the resource ring 20 is in a non-saturated state, that is, whether the cache resource ring 210 and the transmission resource ring 220 respectively satisfy:

[0069] 0≤m1≤(M1-n1=7-2=5) (2)

[0070] 0≤m2≤(M2-n2=4-1=3) (3)

[0071] Wherein, m1 represents the number of existing materials in the cache resource loop, M1 represents the maximum resource bit of the cache resource loop corresponding to the material process path, n1 represents the number of exits of the cache resource loop, m2 represents the number of existing materials in the transmission resource loop, M2 represents the maximum resource bit of the transmission resource loop corresponding to the material process path, and n2 represents the number of exits of the transmission resource loop.

[0072] Please continue to refer to this. Figure 1 Execute step S130: If the resource ring is in a saturated state, wait for the resource ring to re-enter a non-saturated state.

[0073] If the resource ring is in a saturated state, it waits for the resource ring to re-enter a non-saturated state, which can avoid transferring the material to be processed into the resource ring when the resource ring is in a saturated state.

[0074] If the resource loop is saturated, it waits for the resource loop to re-enter a non-saturated state; that is, no new materials to be processed are transferred to the resource loop while it is saturated. Correspondingly, over time, the amount of existing materials in the resource loop will gradually decrease, thus ensuring that the amount of existing materials in each resource loop reaches a non-saturated state.

[0075] Accordingly, the quantity of existing materials in each resource ring is obtained according to a preset time period, and when the current quantity of materials in the resource ring satisfies the above formula (1), the resource ring is determined to re-enter the unsaturated state from the saturated state.

[0076] Please continue to refer to this. Figure 1 Execute step S140. If the resource ring is in an unsaturated state, the material to be processed is transferred according to the material process path.

[0077] When the resource ring is in an unsaturated state, the material to be processed is transferred according to the material process path, which can avoid the material competing for the residence position in the process flow, thereby avoiding the failure of material scheduling in the process flow. This helps to improve the success rate of the material to be processed transfer operation according to the material process path, and thus helps to improve the material processing efficiency.

[0078] In this embodiment, the step of transferring the material to be processed according to the material process path includes: obtaining information about the target process chamber corresponding to the current transfer operation based on the material process path; if the target process chamber is fully loaded, performing a dwell operation on the material to be processed, so that the material to be processed dwells in the previous process chamber or the robot arm closest to the target process chamber, until the target process chamber is idle; if the current target process chamber is idle, transferring the material to be processed to the target process chamber; after transferring the material to be processed to the target process chamber, obtaining the next transfer operation as the current transfer operation, and restarting the step of obtaining information about the target process chamber corresponding to the current transfer operation based on the material process path, until all transfer operations corresponding to the material process path are completed.

[0079] Please continue to refer to the reference. Figure 2 Similarly, taking the material process path LLA→CHC→CHA→CH6→CHB→CHE / F→CHD→CHA→CH1→CH2 / 5→CHB→LLB as an example, if the current transmission action is LLA→CHC, then the corresponding target process chamber is process chamber C.

[0080] The target process chamber being in a fully loaded state means that there are already other materials in the target process chamber.

[0081] In this embodiment, the step of performing a dwelling operation on the material to be processed, so that the material to be processed dwells in the previous process chamber or the robot arm closest to the target process chamber, includes: obtaining dwelling state information of the target process chamber; when the dwelling state of the target process chamber is a first dwelling state, dwelling the material to be processed in the current process chamber; when the dwelling state of the target process chamber is a second dwelling state, dwelling the material to be processed on the robot arm closest to the target process chamber.

[0082] In this embodiment, the residence state of each process chamber in the resource ring is either a first residence state or a second residence state. Specifically, the process chambers that serve as the exits of each resource loop and the shared process chambers between two adjacent resource loops do not accept material residence; therefore, the process chambers that serve as the exits of each resource loop and the shared process chambers between two adjacent resource loops do not have residence state information.

[0083] Please continue to refer to the reference. Figure 2 In the buffer resource loop 210, process chambers C, D, and F have a second dwell state, and process chamber E has a first dwell state; in the transmission resource loop 220, process chambers 1, 2, and 6 have a second dwell state. Vacuum transition chambers A and B, and process chambers A, B, and 5 do not have corresponding dwell state information.

[0084] In this embodiment, the dwelling state of each process chamber in the resource ring can be pre-configured according to the requirements of the material to be processed for process parameters such as temperature in the process flow. For example, if the temperature difference between the current process chamber and the temperature of the buffer chamber or transfer chamber where the nearest robot arm is located is large, and dwelling the material to be processed on the robot arm closest to the target process chamber would adversely affect the processing of the material, then the dwelling state of the target process chamber is set to the first state; if the temperature difference between the current process chamber and the temperature of the buffer chamber or transfer chamber where the nearest robot arm is located is small, and dwelling the material to be processed on the robot arm closest to the target process chamber would not adversely affect the processing of the material, then the dwelling state of the target process chamber is set to the second state.

[0085] A dwelling operation is performed on the material to be processed, so that the material to be processed dwells in the previous process chamber or the robot arm closest to the target process chamber. The status information of the target process chamber is obtained according to a preset time period. When the target process chamber is found to be in an idle state, the current transfer operation is performed to transfer the material to be processed to the target process chamber.

[0086] Accordingly, this embodiment of the invention also provides a process path scheduling module.

[0087] Figure 3 A schematic diagram of an embodiment of the process path scheduling module provided by the present invention is shown. (Refer to reference...) Figure 3 A process path scheduling module 30 may include: a path acquisition unit 301, adapted to acquire a material process path, the material process path including information on multiple process chambers through which the material to be processed sequentially passes in the process flow, the multiple process chambers forming a resource loop, and at least two of the multiple process chambers being identical; and a transmission control unit 302, adapted to determine whether the resource loop is in an unsaturated state based on the quantity of existing material in the resource loop before transmitting the material to be processed according to the material process path; if the resource loop is in a saturated state, wait for the resource loop to re-enter an unsaturated state; if the resource loop is in an unsaturated state, transmit the material to be processed according to the material process path.

[0088] The process path scheduling module in this embodiment of the invention can be used to execute the aforementioned process path scheduling method, or other functional modules can be used to execute the aforementioned process path scheduling method. For a detailed description of the process path scheduling method, please refer to the foregoing section; it will not be repeated here.

[0089] Accordingly, embodiments of the present invention also provide an apparatus that can implement the process path scheduling method provided in the embodiments of the present invention by loading the above-described process path scheduling method in the form of a program.

[0090] refer to Figure 4 The diagram illustrates an optional hardware structure of a device provided in an embodiment of the present invention. The device in this embodiment includes: at least one processor 01, at least one communication interface 02, at least one memory 03, and at least one communication bus 04.

[0091] In this embodiment, the number of processor 01, communication interface 02, memory 03 and communication bus 04 is at least one, and processor 01, communication interface 02 and memory 03 communicate with each other through communication bus 04.

[0092] Communication interface 02 can be an interface for a communication module used for network communication, such as the interface for a GSM module.

[0093] Processor 01 may be a central processing unit (CPU), an application-specific integrated circuit (ASIC), or one or more integrated circuits configured to implement the process path scheduling method of this embodiment.

[0094] Memory 03 may include high-speed RAM, and may also include non-volatile memory, such as at least one disk storage device. Memory 03 stores one or more computer instructions, which are executed by processor 01 to implement the process path scheduling method provided in the foregoing embodiments.

[0095] It should be noted that the above-described implementing electronic device may also include other devices (not shown) that may not be essential to understanding the content disclosed in the embodiments of the present invention; given that these other devices may not be essential to understanding the content disclosed in the embodiments of the present invention, the embodiments of the present invention will not describe them one by one.

[0096] Accordingly, embodiments of the present invention also provide a computer program product, including a computer program / instructions, which, when executed by a processor, are used to implement the process path scheduling method described in the embodiments of the present invention.

[0097] This invention also provides a storage medium storing one or more computer instructions for implementing the process path scheduling method provided in the foregoing embodiments.

[0098] The embodiments of the present invention described above are combinations of elements and features of the present invention. Unless otherwise stated, elements or features may be considered optional. Individual elements or features may be practiced without combination with other elements or features. Furthermore, embodiments of the present invention may be constructed by combining some elements and / or features. The order of operations described in the embodiments of the present invention may be rearranged. Some constructions of any embodiment may be included in another embodiment and may be replaced by corresponding constructions of another embodiment. It will be apparent to those skilled in the art that claims in the appended claims that are not expressly referenced in each other may be combined to form embodiments of the present invention, or may be included as new claims in amendments made after the filing of this application.

[0099] Embodiments of the present invention can be implemented by various means, such as hardware, firmware, software, or combinations thereof. In a hardware configuration, the method according to an exemplary embodiment of the present invention can be implemented by one or more application-specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DSPDs), programmable logic devices (PLDs), field-programmable gate arrays (FPGAs), processors, controllers, microcontrollers, microprocessors, etc.

[0100] In firmware or software configuration, embodiments of the present invention can be implemented in the form of modules, processes, functions, etc. Software code can be stored in a memory unit and executed by a processor. The memory unit is located inside or outside the processor and can send data to and receive data from the processor via various known means.

[0101] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is accorded the widest scope consistent with the principles and novel features disclosed herein.

[0102] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A process path scheduling method, characterized in that, include: Obtain the material process path, which includes information on multiple process chambers that the material to be processed passes through sequentially in the process flow. The multiple process chambers form a resource loop, and at least two of the multiple process chambers are the same. Before transferring the material to be processed according to the material process path, determine whether the resource ring is in an unsaturated state based on the quantity of existing materials in the resource ring. If the resource ring is in a saturated state, then wait for the resource ring to re-enter a non-saturated state; If the resource ring is in an unsaturated state, the material to be processed is transferred according to the material process path.

2. The process path scheduling method as described in claim 1, characterized in that, The resource ring includes multiple resource loops divided according to function; Determining whether a resource loop is in an unsaturated state based on the quantity of existing materials in the resource loop includes: determining whether the quantity of existing materials in each of the multiple resource loops satisfies: 0 ≤ m i ≤M i -n i , where i is an integer greater than or equal to 1; and m i M represents the quantity of materials already present in the i-th resource loop. i n represents the number of process chambers in the i-th resource loop that the material to be processed passes through during its transport along the material process path. i Indicates the first i The number of exits of each resource loop.

3. The process path scheduling method as described in claim 2, characterized in that, The resource loops in the resource loop are arranged longitudinally or laterally in sequence.

4. The process path scheduling method according to any one of claims 1 to 3, characterized in that, If the resource loop is in an unsaturated state, the material to be processed is transferred according to the material process path, including: Based on the material process path, obtain the information of the target process chamber corresponding to the current transfer operation; If the target process chamber is fully loaded, a dwelling operation is performed on the material to be processed, so that the material to be processed dwells in the previous process chamber or the robot arm closest to the target process chamber, until the target process chamber is idle. If the target process chamber is currently idle, the material to be processed is transferred to the target process chamber. After the material to be processed is transferred to the target process chamber, the next transfer operation is obtained as the current transfer operation, and the process restarts from the step of obtaining the information of the target process chamber corresponding to the current transfer operation according to the material process path, until all transfer operations corresponding to the material process path are completed.

5. The process path scheduling method as described in claim 1, characterized in that, The step of performing a dwelling operation on the material to be processed, causing the material to be processed to dwell in the previous process chamber or the robot arm closest to the target process chamber, includes: Obtain the dwell status information of the target process chamber; When the dwelling state of the target process chamber is the first dwelling state, the material to be processed is dwelling in the current process chamber; When the dwelling state of the target process chamber is the second dwelling state, the material to be processed is dwelled on the robot arm closest to the target process chamber.

6. The process path scheduling method as described in claim 1, characterized in that, The material to be processed includes wafers.

7. A process path scheduling module, characterized in that, include: The path acquisition unit is adapted to acquire the material process path, which includes information on multiple process chambers that the material to be processed passes through sequentially in the process flow. The multiple process chambers constitute a resource loop, and at least two of the multiple process chambers are the same. The transmission control unit is adapted to determine whether the resource ring is in an unsaturated state based on the quantity of existing materials in the resource ring before transmitting the material to be processed according to the material process path; if the resource ring is in a saturated state, it waits for the resource ring to re-enter an unsaturated state; if the resource ring is in an unsaturated state, it transmits the material to be processed according to the material process path.

8. A computer program product comprising a computer program / instructions, characterized in that, When the computer program / instructions are executed by the processor, they are used to implement the process path scheduling method as described in any one of claims 1-6.

9. A device, characterized in that, It includes at least one memory and at least one processor, the memory storing one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the process path scheduling method as described in any one of claims 1-6.

10. A storage medium, characterized in that, The storage medium stores one or more computer instructions, which are used to implement the process path scheduling method as described in any one of claims 1-6.

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