X-ray source based on gas plasma discharge

Abstract

The application relates to the technical field of X-ray sources, and discloses an X-ray source based on gas plasma discharge, which comprises a vacuum containing cavity formed in a gas containing structure; a discharge cathode structure comprises a cathode target, the cathode target is used for discharging to a working gas in the vacuum containing cavity, so that cations formed by the working gas bombard the cathode target to generate an electron beam; a driving structure is connected with the vacuum containing cavity and an anode target structure, the anode target structure comprises an anode target, the driving structure is used for driving the electron beam to flow into the anode target structure through the driving structure and bombard the anode target, so that the anode target structure emits X-rays. By arranging the cathode target, the problem of filament overheating and ablation can be avoided, the service life of the X-ray source is prolonged, the stable output of the electron beam is realized, the photon flux of the X-rays is improved, and the X-ray source can meet the use requirements of high-precision detection and analysis instruments.

Images