Double-station ultrasonic scanning detection device

Abstract

The invention belongs to the technical field of ultrasonic scanning detection, and particularly relates to a double-station ultrasonic scanning detection device which comprises a workbench, an X-direction movement mechanism, a Y-direction movement mechanism, a Z-direction movement mechanism and an ultrasonic probe, the workbench is provided with a first station and a second station, and the first station and the second station are each provided with a workpiece to be detected; y-direction movement mechanisms are arranged on the left side and the right side of the workbench respectively, the two ends of the X-direction movement mechanism are connected to the two Y-direction movement mechanisms respectively, the front side and the rear side of the X-direction movement mechanism are connected with Z-direction movement mechanisms respectively, and the two Z-direction movement mechanisms are provided with ultrasonic probes respectively. The two ultrasonic probes directly face the first station and the second station respectively so as to scan and detect the corresponding workpieces to be detected; by arranging the double-station ultrasonic probe, the scanning efficiency of the to-be-detected workpiece can be improved, the misjudgment risk is reduced, automatic scanning is achieved, and the detection efficiency is improved.

Description

Technical Field

[0001] This invention belongs to the field of ultrasonic scanning and testing technology, and specifically relates to a dual-station ultrasonic scanning and testing device. Background Technology

[0002] An IGBT module includes an aluminum substrate, a copper-clad laminate, chips and electronic components mounted on the copper-clad laminate. The copper-clad laminate and the aluminum substrate are soldered together. After the IGBT module is assembled, the connection surface between the copper-clad laminate and the aluminum substrate needs to be scanned using an ultrasonic microscope (SAT) and imaged in software. The image in the software can clearly identify whether there are voids on the solder surface between the copper-clad laminate and the aluminum substrate.

[0003] An ultrasonic microscope outputs ultrasonic signals. When the signal encounters the interface of different materials, it will be partially reflected and penetrated. The intensity of this echo will vary depending on the density of the material. Based on this characteristic, defects inside the IGBT module can be examined and imaged according to the changes in the received signal.

[0004] With the rapid development of ultrasonic microscopy scanning inspection in the semiconductor industry, ultrasonic imaging inspection of components is becoming more diversified. However, in the existing technology, the scanning inspection process of ultrasonic microscopes is mostly completed manually, which cannot accurately control the scanning position and scanning depth. Furthermore, the single-sided ultrasonic scanning is slow when scanning and inspecting products, reducing work efficiency.

[0005] Therefore, it is necessary to improve the existing technology to overcome its shortcomings in practical applications. Summary of the Invention

[0006] Based on the aforementioned shortcomings and deficiencies in the prior art, one of the objectives of this invention is to at least solve one or more of the aforementioned problems in the prior art. In other words, one of the objectives of this invention is to provide a dual-station ultrasonic scanning detection device that meets one or more of the aforementioned requirements.

[0007] To achieve the above-mentioned objectives, the present invention adopts the following technical solution:

[0008] This invention provides a dual-station ultrasonic scanning and testing device, comprising a worktable, an X-axis motion mechanism, a Y-axis motion mechanism, a Z-axis motion mechanism, and ultrasonic probes. The worktable is configured with a first station and a second station, with workpieces to be tested respectively placed at the first station and the second station. Y-axis motion mechanisms are respectively provided on the left and right sides of the worktable. The two ends of the X-axis motion mechanism are respectively connected to the two Y-axis motion mechanisms, and the front and rear sides of the X-axis motion mechanism are respectively connected to the Z-axis motion mechanism. Ultrasonic probes are respectively provided on the two Z-axis motion mechanisms, and the two ultrasonic probes are respectively facing the first station and the second station to scan and test the corresponding workpieces.

[0009] As a preferred embodiment, each of the Y-axis motion mechanisms includes a base, a first drive module, a first guide rail, and a first slider. The worktable is provided with bases on the left and right sides respectively. The first drive module and the first guide rail arranged along the Y direction are respectively installed on each base. The first slider is slidably connected to the first guide rail.

[0010] As a preferred embodiment, the two ends of the X-axis motion mechanism are respectively connected to the first drive module, and the first drive module drives the X-axis motion mechanism to move along the Y direction, so as to link the first slider to move along the first guide rail.

[0011] As a preferred embodiment, the X-axis motion mechanism includes a crossbeam, a second drive module, a second guide rail, and a second slider. The second drive module, the second guide rail, and the second slider are respectively arranged along the X-direction on the front and rear sides of the crossbeam, and each second slider is slidably connected to the corresponding second guide rail.

[0012] As a preferred embodiment, the two Z-axis motion mechanisms are respectively connected to the corresponding second sliders, and each second drive module drives the corresponding Z-axis motion mechanism to move along the X direction, so as to move the corresponding second slider along the second guide rail.

[0013] As a preferred embodiment, each of the Z-axis motion mechanisms includes a fixed plate, a third drive module, a slide block, a third guide rail, and a third slider. The third drive module is disposed on the fixed plate, the fixed plate is provided with a third guide rail, the third slider is slidably connected to the third guide rail, the third drive module is drively connected to the slide block, and the slide block is provided with a fine-tuning mechanism.

[0014] As a preferred embodiment, an ultrasonic probe is mounted on the fine-tuning mechanism and the ultrasonic probe is arranged along the Z-direction; the third drive module drives the third slider to move, so that the third slider moves along the third guide rail, thereby linking the ultrasonic probe to move along the Z-direction, so that the ultrasonic probe can scan and detect the workpiece to be tested.

[0015] As a preferred embodiment, the fine-tuning mechanism includes a first adjustment component and a second adjustment component. The first adjustment component is connected to the ultrasonic probe and is used to adjust the movement position of the ultrasonic probe in the Y direction. The second adjustment component is disposed on the first adjustment component and is used to adjust the movement position of the ultrasonic probe in the X direction.

[0016] As a preferred embodiment, the first station and the second station are respectively equipped with water tanks, which are used to contain liquid and place the workpiece to be tested in the liquid for scanning and detection by an ultrasonic probe.

[0017] Compared with the prior art, the beneficial effects of this invention are:

[0018] This invention provides a dual-station ultrasonic scanning and inspection device. By setting up dual-station ultrasonic probes, the ultrasonic probes can automatically scan and inspect the workpiece under test, making the inspection structure more accurate and improving the automation rate and inspection efficiency per unit time. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained from these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a dual-station ultrasonic scanning detection device according to an embodiment of the present invention;

[0021] Figure 2 This is a schematic diagram from another perspective of a dual-station ultrasonic scanning detection device according to an embodiment of the present invention.

[0022] Figure 3 This is a schematic diagram of the Z-axis motion mechanism according to an embodiment of the present invention;

[0023] Figure 4 This is a schematic diagram of the X-axis motion mechanism according to an embodiment of the present invention;

[0024] Figure 5 This is a side view of the X-axis motion mechanism according to an embodiment of the present invention;

[0025] Figure 6 This is a schematic diagram showing the connection between the fine-tuning mechanism and the ultrasonic probe in an embodiment of the present invention;

[0026] Figure 7 Exploded view of the fine-tuning mechanism according to an embodiment of the present invention;

[0027] Figure 8This is a schematic diagram of the wedge-shaped groove according to an embodiment of the present invention;

[0028] In the diagram: 1. Workbench, 11. Water tank, 2. X-axis motion mechanism, 21. Crossbeam, 22. Second drive module, 23. Second guide rail, 24. Second slider, 3. Y-axis motion mechanism, 31. Base, 32. First drive module, 33. First guide rail, 34. First slider, 4. Z-axis motion mechanism, 41. Fixed plate, 42. Third drive module, 43. Third guide rail, 44. Third slider, 45. Fine-tuning mechanism, 451. First adjustment component, 452. Second adjustment component, 453. Fixed seat, 46. Slide, 5. Ultrasonic probe. Detailed Implementation

[0029] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of this application. For those skilled in the art, these drawings can be applied to other similar scenarios without creative effort. Unless obvious from the context or otherwise specified, the same reference numerals in the drawings represent the same structures or operations.

[0030] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0031] In the description of this application, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is usually based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this application; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0032] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, these terms have no special meaning and therefore should not be construed as limiting the scope of protection of this application. In addition, although the terminology used in this application is selected from commonly known and used terms, some terms mentioned in this application's specification may have been chosen by the applicant according to his or her judgment, and their detailed meanings are explained in the relevant sections of this description. Moreover, this application should be understood not only through the actual terms used, but also through the meaning implied by each term.

[0033] According to some embodiments of this application, please refer to Figures 1 to 8 As shown, a dual-station ultrasonic scanning and testing device is provided, including a worktable 1, an X-axis motion mechanism 2, a Y-axis motion mechanism 3, a Z-axis motion mechanism 4, and an ultrasonic probe 5. The worktable 1 is configured with a first station and a second station, and the workpieces to be tested are respectively placed at the first station and the second station. The left and right sides of the worktable 1 are respectively provided with Y-axis motion mechanisms 3. The two ends of the X-axis motion mechanism 2 are respectively connected to the two Y-axis motion mechanisms 3. The front and rear sides of the X-axis motion mechanism 2 are respectively connected to the Z-axis motion mechanism 4. The two Z-axis motion mechanisms 4 are respectively provided with ultrasonic probes 5. The two ultrasonic probes 5 are respectively facing the first station and the second station to scan and test the corresponding workpieces to be tested.

[0034] In some embodiments of this application, each Y-axis motion mechanism 3 includes a base 31, a first drive module 32, a first guide rail 33, and a first slider 34. The left and right sides of the worktable 1 are respectively provided with bases 31. The first drive module 32 and the first guide rail 33 arranged along the Y direction are respectively installed on each base 31. The first slider 34 is slidably connected to the first guide rail 33.

[0035] Specifically, the two ends of the X-axis motion mechanism 2 are respectively connected to the first drive module 32. The first drive module 32 drives the X-axis motion mechanism 2 to move along the Y direction, so as to link the first slider 34 to move along the first guide rail 33, thereby driving the ultrasonic probe to move in the Y direction.

[0036] Furthermore, the first drive module 32 is configured as a linear motor, the mover of the linear motor is connected to the X-axis motion mechanism 2, the mover of the linear motor moves linearly along the stator, thereby driving the X-axis motion mechanism 2 to move the first slider 34 along the first guide rail 33.

[0037] In some embodiments of this application, the X-direction motion mechanism 2 includes a crossbeam 21, a second drive module 22, a second guide rail 23, and a second slider 24. The second drive module 22, the second guide rail 23, and the second slider 24 are respectively arranged along the X direction on the front and rear sides of the crossbeam 21. Each second slider 24 is slidably connected to the corresponding second guide rail 23.

[0038] Specifically, second drive modules 22 are installed on the front and rear sides of the crossbeam 21, respectively. Each second drive module 22 is configured as a linear motor. The mover 221 of the linear motor is connected to the fixed plate 41 of the Z-axis motion mechanism 4. The mover 221 of the linear motor moves linearly along the stator 222 to drive the Z-axis motion mechanism to move the second slider 24 along the second guide rail 23, thereby driving the ultrasonic probe 5 to move in the X-direction. It should be noted that the first drive module 32 and the second drive module 22 have the same structure, both being configured as linear motors.

[0039] In some embodiments of this application, two Z-axis motion mechanisms 4 are respectively connected to the corresponding second slider 24, and each second drive module 22 drives the corresponding Z-axis motion mechanism 4 to move along the X direction, so as to link the corresponding second slider 24 to move along the second guide rail 23.

[0040] Specifically, each Z-axis motion mechanism 4 includes a fixed plate 41, a third drive module 42, a third guide rail 43, a third slider 44, and a slide block 46. The third drive module 42 is mounted on the fixed plate 41, the fixed plate 41 is provided with the third guide rail 43, the third slider 44 is slidably connected to the third guide rail 43, the third drive module 42 is drively connected to the slide block 46, and the slide block 46 is provided with a fine-tuning mechanism 45.

[0041] Furthermore, an ultrasonic probe 5 is installed on the fine-tuning mechanism 45, and the ultrasonic probe 5 is arranged along the Z direction; the third drive module 42 drives the third slider 44 to move, so that the third slider 44 moves along the third guide rail 43, so as to link the ultrasonic probe 5 to move along the Z direction, so that the ultrasonic probe 5 can scan and detect the workpiece to be tested.

[0042] According to some embodiments of this application, such as Figures 6 to 8 As shown, the fine-tuning mechanism 45 includes a first adjustment component 451, a second adjustment component 452, and a fixed base 453. The fixed base 453 is connected to the lower part of the first adjustment component 451. The fixed base 453 is connected to the ultrasonic probe 5 and is used to adjust the moving position of the ultrasonic probe 5 in the Y direction. The second adjustment component 452 is disposed on the first adjustment component 451 and is used to adjust the moving position of the ultrasonic probe 5 in the X direction.

[0043] Specifically, the first adjustment component 451 includes a wedge groove 4511, an adjustment screw 4512, a wedge block 4513, and a stud 4514. The adjustment screw 4512 is disposed in the wedge groove 4511 in the transverse direction, and the stud 4514 is disposed in the wedge block 4513 in the vertical direction. The adjustment screw 4514 is provided with a screw hole, and the stud is provided with a thread. The two are connected and engaged by the thread. By rotating the thread engagement between the adjustment screw 4512 and the stud 4514, the wedge block 4513 is moved relative to the wedge groove 4511, thereby enabling the ultrasonic probe to move in the Y direction (i.e., the front-to-back direction).

[0044] Furthermore, the second adjustment component 452 has the same structure as the first adjustment component 451. The second adjustment component 452 includes a wedge groove 4521, an adjustment screw 4522, a wedge block 4523, and a stud 4524. The adjustment screw 4522 is disposed in the wedge groove 4521 in the transverse direction, and the stud 4524 is disposed in the wedge block 4523 in the vertical direction. The adjustment screw 4524 is provided with a screw hole, and the stud is provided with a thread. The two are connected and engaged by the thread. By rotating the thread engagement between the adjustment screw 4522 and the stud 4524, the wedge block 4523 is moved relative to the wedge groove 4521, thereby enabling the ultrasonic probe to move in the X direction (i.e., the left and right direction), thereby achieving precise fine adjustment of the position of the ultrasonic probe.

[0045] In a specific embodiment of this application, the moving positions of the two ultrasonic probes can be adjusted synchronously or individually, which can satisfy the requirement that the two ultrasonic probes perform synchronous or asynchronous detection on the workpieces to be tested at the first and second workstations. Furthermore, the two ultrasonic probes are not limited by their moving positions, which allows for simultaneous scanning and detection of two workpieces to be tested, thereby improving detection efficiency.

[0046] In some embodiments of this application, the first and second workstations on the workbench 1 are respectively equipped with water tanks 11. The water tanks 11 are used to contain liquid, and the workpiece to be tested is placed in the liquid. By adjusting the movement of the X-axis motion mechanism, the Y-axis motion mechanism and the Z-axis motion mechanism, the ultrasonic probe is linked to scan and detect the workpiece to be tested in the water tank.

[0047] According to some embodiments of this application, by adjusting the movements of the X-axis motion mechanism, the Y-axis motion mechanism and the Z-axis motion mechanism, the ultrasonic probes of the first station and the second station are linked to perform automated scanning of the workpiece under test, thereby improving the scanning efficiency of the workpiece under test, reducing the risk of misjudgment, and increasing the automation rate and the detection efficiency per unit time.

[0048] In the description of the embodiments of this application, unless otherwise expressly specified and limited, the technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.

[0049] The above description is only a detailed explanation of the preferred embodiments and principles of this application. For those skilled in the art, there may be changes in the specific implementation based on the ideas provided by this invention, and these changes should also be considered within the scope of protection of this application.

Claims

1. A dual-station ultrasonic scanning detection device, characterized in that, The device includes a worktable, an X-axis motion mechanism, a Y-axis motion mechanism, a Z-axis motion mechanism, and an ultrasonic probe. The worktable is configured with a first station and a second station, with the workpiece to be tested placed at the first station and the second station respectively. Y-axis motion mechanisms are respectively provided on the left and right sides of the worktable. The two ends of the X-axis motion mechanism are respectively connected to the two Y-axis motion mechanisms. The front and rear sides of the X-axis motion mechanism are respectively connected to the Z-axis motion mechanism. The two Z-axis motion mechanisms are respectively equipped with ultrasonic probes, which are respectively facing the first station and the second station to scan and detect the corresponding workpiece.

2. The dual-station ultrasonic scanning detection device according to claim 1, characterized in that, Each of the Y-axis motion mechanisms includes a base, a first drive module, a first guide rail, and a first slider. The worktable is provided with bases on the left and right sides respectively. The first drive module and the first guide rail arranged along the Y direction are respectively installed on each base. The first slider is slidably connected to the first guide rail.

3. The dual-station ultrasonic scanning detection device according to claim 2, characterized in that, The two ends of the X-axis motion mechanism are respectively connected to the first drive module. The first drive module drives the X-axis motion mechanism to move along the Y direction, so as to link the first slider to move along the first guide rail.

4. The dual-station ultrasonic scanning detection device according to claim 1, characterized in that, The X-axis motion mechanism includes a crossbeam, a second drive module, a second guide rail, and a second slider. The second drive module, the second guide rail, and the second slider are respectively arranged along the X-direction on the front and rear sides of the crossbeam, and each second slider is slidably connected to the corresponding second guide rail.

5. A dual-station ultrasonic scanning detection device according to claim 4, characterized in that, The two Z-axis motion mechanisms are respectively connected to the corresponding second sliders. Each second drive module drives the corresponding Z-axis motion mechanism to move along the X direction, so as to move the corresponding second slider along the second guide rail.

6. The dual-station ultrasonic scanning detection device according to claim 1, characterized in that, Each of the Z-axis motion mechanisms includes a fixed plate, a third drive module, a slide block, a third guide rail, and a third slider. The third drive module is mounted on the fixed plate, the fixed plate is provided with the third guide rail, the third slider is slidably connected to the third guide rail, the third drive module is drively connected to the slide block, and the slide block is provided with a fine-tuning mechanism.

7. A dual-station ultrasonic scanning detection device according to claim 6, characterized in that, An ultrasonic probe is mounted on the fine-tuning mechanism and is arranged along the Z-direction. The third drive module drives the third slider to move along the third guide rail, thereby moving the ultrasonic probe along the Z-direction so that the ultrasonic probe can scan and detect the workpiece under test.

8. A dual-station ultrasonic scanning detection device according to claim 6, characterized in that, The fine-tuning mechanism includes a first adjustment component and a second adjustment component. The first adjustment component is connected to the ultrasonic probe and is used to adjust the movement position of the ultrasonic probe in the Y direction. The second adjustment component is disposed on the first adjustment component and is used to adjust the movement position of the ultrasonic probe in the X direction.

9. A dual-station ultrasonic scanning detection device according to claim 1, characterized in that, The first and second workstations are each equipped with a water tank, which is used to contain liquid. The workpiece to be tested is placed in the liquid for scanning and detection by an ultrasonic probe.

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