A floating adjustable pressure head device
By using a floating adjustable pressure head device, uniform contact between the pressure head and the product is achieved, protecting the seals, solving the problems of sintering quality and demolding, and improving sintering efficiency and product reliability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 深圳市申拓科技有限公司
- Filing Date
- 2025-12-15
- Publication Date
- 2026-05-26
AI Technical Summary
During the sintering process, existing technologies make it difficult to achieve uniform contact between the pressure head and the product, resulting in poor sintering quality. At the same time, the seals are prone to aging and oxidation, which affects the packaging quality. Furthermore, the Teflon film is easily damaged during the demolding process, and the recycling problem has not been effectively solved.
A floating adjustable pressure head device was designed, which achieves automatic adjustment through the spherical contact of the pressure rod and the connecting rod to ensure full contact between the pressure head and the product. It also integrates hot pressing, water cooling and demolding mechanisms to protect the seals and prevent aging. A tension spring is used to ensure consistent pressure head reset. During the demolding process, a synchronous cylinder push rod is used to peel off the Teflon film.
It improves sintering quality, ensures uniform temperature and pressure distribution, prevents aging of seals, achieves uniform peeling of Teflon membrane, reduces energy consumption and recycling difficulty, and improves sintering efficiency and product reliability.
Smart Images
Figure CN122094538A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of sintering equipment, and more specifically to a hot pressing head device used in sintering equipment. Background Technology
[0002] In the field of semiconductor chip packaging, the connection between the chip and the substrate is generally achieved through sintering bonding. This involves fixing the chip using micro / nano silver paste or silver film, or micro / nano metals, or silver / copper solder paste. During the sintering process, pressure is applied to the semiconductor chip at 150–300°C using a pressure head to promote the densification and aggregation of the micro / nano metal particles, while simultaneously causing the organic solvents in the micro / nano metal solder paste to evaporate, thus achieving mechanical and electrical connections between the chip and the substrate. The control and uniformity of heating and pressure during the sintering process are critical indicators. Minimizing porosity in the silver paste, improving sintering quality, eliminating solder voids, increasing soldering efficiency, and reducing losses are core aspects that the sintering process must focus on. To prevent damage to the chip from the pressing device, a coating is placed between the pressing device and the chip; a new coating is needed for each hot pressing. In addition, during the sintering process, semiconductor products exposed to oxygen at elevated temperatures will oxidize, affecting the quality and reliability of semiconductor packaging. Nitrogen can effectively replace or dilute the oxygen in the sealed transfer chamber, which controls the oxygen content, thus requiring the oxygen content in the chamber to be maintained at a low level. Summary of the Invention
[0003] One objective of this invention is to provide a floating adjustable pressure head device, which automatically adjusts the position of the pressure head according to the product to ensure uniform and sufficient contact between the pressure head and the product, thereby improving the quality of hot pressing sintering.
[0004] One objective of this invention is to provide a floating adjustable pressure head device, which can automatically center itself relative to the pressure rod and automatically reset to a uniform initial state before hot pressing.
[0005] One object of the present invention is to provide a floating adjustable pressure head device that can protect the relevant seals, prevent heating from accelerating the aging of the seals or even causing them to fail, and at the same time can quickly adjust the temperature.
[0006] One object of the present invention is to provide a floating adjustable pressure head device that can protect the relevant seals, prevent heating from accelerating the aging of the seals or even causing them to fail, and at the same time can quickly adjust the temperature.
[0007] One objective of this invention is to provide a floating adjustable pressure head device, which also has a film removal mechanism. When two or more film removal air inlets are simultaneously inflated, the piston of the film removal cylinder drives the entire film removal template to move downward through the push rod, peeling off the Teflon film adhering to the pressure head. Moreover, the synchronicity of the downward movement of the entire film removal template is high, and there is no tilting. The displacement is controllable and the control precision is high, making the synchronicity and peeling force of the Teflon film peeling of the pressure head more uniform. This can prevent problems such as Teflon film breakage or damage that lead to difficulties in Teflon film recycling.
[0008] According to one aspect of the present invention, the present invention provides a floating adjustable pressure head device, characterized in that it comprises: including The main body has a high-pressure air inlet, two or more demolding air inlets, a water inlet, a water outlet, and a cooling plate; A hot-pressing mechanism includes a hot-pressing cylinder, a hot-pressing piston, a pressure rod, a connecting rod, a tension spring, a heating block, and a pressure head. The hot-pressing piston divides the hot-pressing cylinder into an upper chamber and a lower chamber, and a high-pressure air inlet communicates with the upper chamber of the hot-pressing cylinder. The upper end of the pressure rod is connected to the hot-pressing piston, and the lower end passes through a cooling block and connects to the upper end of the connecting rod. The lower end of the connecting rod is fixedly connected to the heating block, and a pressure head is fixedly installed at the bottom of the heating block. The lower end of the pressure rod has a concave ball head design, and the upper end of the connecting rod has a convex ball head design. The two ends of the tension spring are inserted into the pressure rod and the connecting rod, respectively. The upper end of the tension spring is fixed to the pressure rod or the hot-pressing piston, and the lower end of the tension spring is fixed to the connecting rod or the heating block. A cooling mechanism, wherein the cooling mechanism has a water-cooling channel disposed on a cooling plate, and the two ends of the water-cooling channel are respectively connected to the water inlet and the water outlet; The demolding mechanism comprises a low-pressure chamber, a demolding cylinder piston, push rods, and a demolding plate. The number of low-pressure chambers, demolding cylinder pistons, and push rods is the same as the number of demolding air inlets. The demolding cylinder piston is built into the low-pressure chamber, and the demolding air inlets are connected one-to-one with the low-pressure chamber. The upper end of each push rod is connected to the corresponding demolding cylinder piston, and the lower end is fixed to the demolding plate. In this way, the pressure rod and connecting rod are connected through matching spherical or near-spherical arc surfaces, allowing the connecting rod, the heating block fixedly connected to the connecting rod, and the pressure head to automatically adjust according to product movement. Even if there are deviations in product placement, such as tilting, the pressure head can maintain full contact with the product, achieving uniform thermal pressure and thus improving the quality of hot-pressing sintering. Furthermore, the tension spring is located inside the pressure rod and connecting rod, so it does not affect the floating connection. The tension spring also ensures that the convex ball head of the connecting rod automatically centers before hot pressing, and that the pressure head automatically returns to a uniform initial state (horizontal) before hot pressing, guaranteeing the consistency of the pressure head's state before hot pressing. Because it integrates hot pressing, water cooling, and film removal mechanisms within a limited space / volume, it can protect the relevant seals, preventing accelerated aging or even failure due to heating. It also allows for rapid temperature adjustment and prevents problems such as Teflon film breakage or damage that could lead to difficulties in Teflon film recycling. Additionally, it provides precise temperature and pressure control and uniform temperature and pressure distribution.
[0009] In a preferred embodiment, the lower end of the pressure rod and the center of the connecting rod are respectively provided with holes extending from top to bottom. The two ends of the tension spring are inserted into / pass through the holes and then fixedly connected to the lower end of the pressure rod and the connecting rod to realize that the upper convex ball head of the connecting rod is automatically centered relative to the lower concave ball head of the pressure rod.
[0010] In a preferred embodiment, the main body further includes a connecting plate, a cylinder, and a sealing plate, which are stacked sequentially from top to bottom. The high-pressure air inlet and two or more demolding air inlets are disposed on the connecting plate. The upper end of the pressure rod passes through the corresponding through holes of the cooling plate and the sealing plate in sequence before being fixedly connected to the hot-pressing piston. In this way, the heat generated by the heating block can be blocked and dissipated when it is transferred towards the main body, thus effectively protecting the seals on the connecting plate, cylinder, and sealing plate.
[0011] In a preferred embodiment, the water inlet and water outlet are respectively disposed on the cooling plate.
[0012] In a preferred embodiment, the heating block is provided with an electric heating wire on the side adjacent to the pressure head. This allows heat to be directly conducted to the pressure head, reducing energy consumption and minimizing heat transfer towards the main body.
[0013] In a preferred embodiment, the upper chamber of the hot-press cylinder is further provided with a buffer block, and the buffer block is provided with a through hole. The high-pressure air inlet is connected to the upper chamber through the through hole of the buffer block to reduce the impact on the cylinder body.
[0014] In a preferred embodiment, at least one heat insulation plate is further provided in the space between the heating block and the main body. This further improves the protection of the seals on the connecting plate, cylinder, and sealing plate.
[0015] In a preferred embodiment, the area of the pressure head in the horizontal direction is greater than 70% of the area of the heating block. This single-module pressure head structure allows for a larger pressure head due to the larger size of the heating block, making it suitable for hot pressing and sintering of products with larger substrate sizes.
[0016] In a preferred embodiment, the floating adjustable pressure head device has two or more demolding air inlets, two demolding cylinder pistons, and two push rods. The two push rods are symmetrically arranged relative to the central axis of the main body, which further improves the synchronicity of the overall downward movement of the template, prevents tilting, and ensures high displacement controllability and control precision, making the Teflon film peeling of the pressure head more synchronous and the peeling force more uniform.
[0017] In a preferred embodiment, the connecting plate of the main body is also provided with an electrical docking plug, which enables the device to be quickly and modularly connected to other mechanisms or sintering equipment main unit / control box, etc. Attached Figure Description
[0018] Figure 1 This is a three-dimensional structural schematic diagram of an airbag inflator device according to an embodiment.
[0019] Figure 2 for Figure 1 A side view diagram.
[0020] Figure 3 for Figure 1 A top view diagram.
[0021] Figure 4 for Figure 3 Sectional view at AA. Detailed Implementation
[0022] The following description is intended to disclose the present invention and enable those skilled in the art to implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art. The basic principles of the invention defined in the following description can be applied to other embodiments, modifications, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the invention.
[0023] Those skilled in the art should understand that, in the disclosure of this invention, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "X-axis," "Y-axis," "Z-axis," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as limiting this invention.
[0024] It is understood that the term "a" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element can be multiple, and the term "a" should not be understood as a limitation on the number.
[0025] refer to Figures 1 to 4 A preferred embodiment of a floating adjustable pressure head device is provided. The floating adjustment pressure head device includes: The main body comprises a connecting plate 11, a cylinder 14, a sealing plate 12, and a cooling plate 13, stacked sequentially from top to bottom. The main body also includes a high-pressure air inlet 15, two or more demolding air inlets 16, a water inlet 312, and a water outlet 311. Preferably, the high-pressure air inlet 15 and the two or more demolding air inlets 16 are located on the connecting plate 11.
[0026] Hot pressing mechanism: It involves a hot-press cylinder 21, a buffer block 29, a hot-press piston 22, a pressure rod 23, a connecting rod 24, a tension spring 27, a heating block 25, and a pressure head 26, etc.
[0027] The main body 14 houses a thermostatic cylinder 21, and a thermostatic piston 22 is built into the thermostatic cylinder 21. The thermostatic piston 22 is sealed to the inner wall of the thermostatic cylinder 21 via a piston ring. The thermostatic piston 22 divides the thermostatic cylinder 21 into an upper chamber and a lower chamber. The high-pressure air inlet 15 communicates with the upper chamber of the thermostatic cylinder 21. The upper end of the pressure rod 23 is connected to the thermostatic piston 22, and the lower end is connected to the upper end of the connecting rod 24. The lower end of the connecting rod 24 is fixedly connected to the heating block 25. A pressure head 26 is fixedly installed at the bottom of the heating block 25. The lower end of the pressure rod 23 has a concave ball head design, and correspondingly, the upper end of the connecting rod 24 has a convex ball head design. In other words, the pressure rod 23 and the connecting rod 24 are connected by matching spherical or near-spherical arc surfaces to achieve automatic floating adjustment. On the one hand, this allows the connecting rod 24 to automatically tilt and adjust left and right, and back and forth, following the pressure head 26. On the other hand, it ensures that the concave ball head of the pressure rod 23 and the convex ball head of the connecting rod 24 have sufficient contact surface to achieve uniform pressure transmission. The pressure rod 23 and the connecting rod 24 are respectively provided with through holes or blind holes extending from top to bottom. The two ends of the tension spring 27 are inserted into the corresponding through holes or blind holes of the pressure rod 23 and the connecting rod 24, and are fixed to the pressure rod 23 and the connecting rod 24 respectively. In this way, the tension spring 27 is located inside the pressure rod 23 and the connecting rod 24, which does not affect the floating connection. On the other hand, the tension spring 27 ensures that the convex ball head of the connecting rod 24 is automatically centered before hot pressing. That is to say, the heating block 25 and the pressure head 26, which are fixedly connected to the connecting rod 24, can automatically reset to a uniform initial state before hot pressing, ensuring the consistency of the pressure head 26 before hot pressing. In addition, it is worth mentioning that when the pressure rod 23 and the connecting rod 24 are respectively provided with through holes, the two ends of the tension spring 27 can also pass through the corresponding through holes of the pressure rod 23 and the connecting rod 24 respectively, and one end is fixed to the hot-pressing piston 22, and the other end is fixed to the heating block 25, which can also achieve a similar effect.
[0028] Furthermore, when the upper end of the pressure rod 23 is connected to the hot-pressing piston 22, it first passes through the corresponding through holes of the cooling plate 13 and the sealing plate 12 to reach the hot-pressing piston 22. The pressure rod 23 can be sealed to the inner wall of the through hole of the sealing plate 12 by the sealing ring 28 to prevent air leakage caused by the pressure rod 23. In addition, a bushing 231 or the like can be set between the pressure rod 23 and the through hole of the cooling plate 13 to ensure the flexibility of the pressure rod 23's vertical movement. Since the pressure rod 23 passes through the cooling plate 13 downwards before connecting to the connecting rod 24, the heat generated by the heating block 25 is transferred to the main body through the connecting rod 24, the pressure rod 23, etc., and can be quickly cooled and dissipated by the cooling plate 13 to block heat transfer, thus effectively protecting the seal and ensuring the stability and accuracy of the hot-pressing pressure.
[0029] Preferably, the size of the pressure head 26 is matched with that of the heating block 25. For example, the area / size of the pressure head 26 and the heating block 25 are the same in the horizontal direction, or the ratio of the area of the pressure head 26 to that of the heating block 25 is greater than 70% in the horizontal direction. Using a single-module pressure head 26 structure, since the heating block 25 is relatively large, the pressure head 26 can also have a relatively large size, making it suitable for hot pressing and sintering of products with large substrate sizes. More preferably, an electric heating wire 261 is provided on the side of the heating block 25 adjacent to the pressure head 26. In this way, heat can be directly conducted to the pressure head 26, reducing energy consumption and minimizing heat transfer towards the main body.
[0030] Preferably, the upper chamber of the hot-pressing cylinder 21 is also equipped with a buffer block 29. The buffer block 29 has a through hole, and the high-pressure air inlet 15 communicates with the upper chamber through the through hole of the buffer block 29. The buffer block 29 is sealed to the inner wall of the hot-pressing cylinder 21 by a sealing ring 28, etc. The buffer block 29 can reduce the impact on the connecting plate 11 when the hot-pressing piston 22 moves upward, reduce noise, and reduce the risk of air leakage from the relevant inlet holes of the connecting plate 11.
[0031] The hot pressing mechanism works as follows: High-pressure gas is input through the high-pressure inlet 15, causing the hot pressing piston 22 to move downwards. The force is then evenly transmitted through the concave ball head of the pressure rod 23 and the convex ball head of the connecting rod 24 to the pressure head 26 heated by the heated block 25, ultimately leading to pressurized sintering of the product. The sintering product pressure = high-pressure gas pressure * piston area. The ratio of high-pressure gas pressure to sintering product pressure can be set according to the hot pressing requirements of different products; for example, a sintering product pressure of 30 MPa can be used.
[0032] Cooling mechanism: The system includes an inlet 312, an outlet 311, and a water-cooling channel 31. The inlet 312 and outlet 311 are located on the cooling plate 13, and the water-cooling channel 31 on the cooling plate 13 is connected to both the inlet 312 and outlet 311, enabling water-cooled heat dissipation from the cooling plate 13. When the heat generated by the heating block 25 is transferred towards the main body via the connecting rod 24 and pressure rod 23, it is rapidly cooled by the cooling plate 13, preventing heat transfer and effectively protecting the seals, thus ensuring the stability and accuracy of the thermal pressure. Furthermore, compared to fan cooling, the structure is simpler and more efficient.
[0033] Preferably, the space between the heating block 25 and the main body is further provided with at least one heat insulation plate 32 to further reduce the transfer of heat generated by the heating block 25 towards the main body. This further effectively protects the seal and ensures the stability and accuracy of the hot pressing pressure.
[0034] Demolding mechanism: It involves two or more demolding air inlets 16, a low-pressure chamber 41, a demolding cylinder piston 42, a push rod 43, and a demolding plate 44.
[0035] The main body cylinder 14 has two or more low-pressure chambers 41, the same number as the number of descaling air inlets 16. The number of low-pressure chambers 41, descaling cylinder pistons 42, and push rods 43 is the same as the number of descaling air inlets 16. The descaling cylinder pistons 42 are built into the low-pressure chambers 41, and the descaling air inlets 16 are connected to the low-pressure chambers 41 one-to-one. The upper end of the push rod 43 is connected to the descaling cylinder piston 42, and the lower end is fixed to the descaling plate 44. After hot pressing and sintering is completed, the descaling air inlets 16 fill the low-pressure chambers 41 with air. The air pressure pushes the descaling cylinder pistons 42 and push rods 43 downward, which in turn moves the descaling plate 44 downward, peeling off the Teflon film that may be stuck to the pressure head 26.
[0036] Preferably, the two push rods 43 are symmetrically arranged relative to the central axis of the main body. In this way, the two demolding cylinder pistons 42 and push rods 43 move synchronously, and the demolding plate 44 moves synchronously as a whole without tilting. The Teflon film peeling force is uniform, which will not cause damage to the Teflon film and solve the problem of Teflon film damage and difficulty in recycling.
[0037] In addition, preferably, the main body's connecting plate 11 is also provided with an electrical docking plug 5 to realize the interaction of data / control commands between the floating adjustment pressure head device and other structures or the main body / control box of the sintering equipment, realize the modularization of the floating adjustment pressure head device, and facilitate the rapid assembly and connection with the sintering equipment.
[0038] It will be understood by those skilled in the art that the above embodiments are merely examples, and features of different embodiments can be combined with each other to obtain implementation methods that are readily conceivable according to the content disclosed in the present invention but are not explicitly shown in the accompanying drawings.
[0039] Those skilled in the art should understand that the embodiments of the present invention described above and shown in the accompanying drawings are merely examples and do not limit the present invention. The objectives of the present invention have been fully and effectively achieved. The functions and structural principles of the present invention have been demonstrated and explained in the embodiments, and any variations or modifications may be made to the implementation of the present invention without departing from the stated principles.
Claims
1. A floating adjustable pressure head device, characterized in that: include The main body has a high-pressure air inlet, two or more demolding air inlets, a water inlet, a water outlet, and a cooling plate; A hot-pressing mechanism includes a hot-pressing cylinder, a hot-pressing piston, a pressure rod, a connecting rod, a tension spring, a heating block, and a pressure head. The hot-pressing piston divides the hot-pressing cylinder into an upper chamber and a lower chamber, and a high-pressure air inlet communicates with the upper chamber of the hot-pressing cylinder. The upper end of the pressure rod is connected to the hot-pressing piston, and the lower end passes through a cooling block and connects to the upper end of the connecting rod. The lower end of the connecting rod is fixedly connected to the heating block, and a pressure head is fixedly installed at the bottom of the heating block. The lower end of the pressure rod has a concave ball head design, and the upper end of the connecting rod has a convex ball head design. The two ends of the tension spring are inserted into the pressure rod and the connecting rod, respectively. The upper end of the tension spring is fixed to the pressure rod or the hot-pressing piston, and the lower end of the tension spring is fixed to the connecting rod or the heating block. A cooling mechanism, wherein the cooling mechanism has a water-cooling channel disposed on a cooling plate, and the two ends of the water-cooling channel are respectively connected to the water inlet and the water outlet; The film removal mechanism has a low-pressure chamber, a film removal cylinder piston, push rods, and a film removal plate. The number of low-pressure chambers, film removal cylinder pistons, and push rods is the same as the number of film removal air inlets. The film removal cylinder piston is built into the low-pressure chamber, and the film removal air inlets are connected to the low-pressure chamber one-to-one. The upper end of each push rod is connected to the corresponding film removal cylinder piston, and the lower end is fixed to the film removal plate.
2. The floating adjustment pressure head device according to claim 1, characterized in that: The lower end of the pressure rod and the center of the connecting rod are respectively provided with holes extending from top to bottom. The two ends of the tension spring are inserted into / pass through the holes and then fixedly connected to the lower end of the pressure rod and the connecting rod to achieve automatic centering of the upper convex ball head of the connecting rod relative to the lower concave ball head of the pressure rod.
3. The floating adjustment pressure head device according to claim 2, characterized in that: The main body also includes a connecting plate, a cylinder body, and a sealing plate, which are stacked sequentially from top to bottom. The high-pressure air inlet and two or more demolding air inlets are located on the connecting plate. The upper end of the pressure rod passes through the corresponding through holes of the cooling plate and the sealing plate in sequence and is then fixedly connected to the hot-pressing piston.
4. The floating adjustment pressure head device according to claim 3, characterized in that: The water inlet and outlet are respectively located on the cooling plate.
5. The floating adjustment pressure head device according to claim 1, characterized in that: The heating block is provided with an electric heating wire on the side adjacent to the pressure head.
6. The floating adjustment pressure head device according to claim 5, characterized in that: The upper chamber of the hot-press cylinder is also equipped with a buffer block, and the buffer block has a through hole. The high-pressure air inlet is connected to the upper chamber through the through hole of the buffer block.
7. The floating adjustment pressure head device according to claim 6, characterized in that: At least one heat insulation plate is also provided in the space between the heating block and the main body.
8. The floating adjustment pressure head device according to claim 7, characterized in that: In the horizontal direction, the ratio of the area of the pressure head to the area of the heating block is greater than 70%.
9. The floating adjustment pressure head device according to claim 7, characterized in that: The floating adjustment pressure head device has two or more demolding air inlets, two demolding cylinder pistons, and two push rods, with the two push rods symmetrically arranged relative to the central axis of the main body.
10. The floating adjustment pressure head device according to claim 7, characterized in that: The main body's connecting plate is also equipped with an electrical docking plug.