A thickness laser measuring device and method based on diaphragm material processing

Abstract

The application discloses a kind of based on diaphragm material processing thickness laser measuring device and method, it is related to detection technical field, including: organism, it can change environmental light measuring chamber, the conveying unit is equipped in the measuring chamber and is passed through measuring chamber;Laser array and photosensitive array, located inside the measuring chamber, the laser array and the photosensitive array are correspondingly arranged, to make the laser array produce to the surface of diaphragm laser by the photosensitive array after diaphragm reflection;Clamping part, located inside the measuring chamber, the clamping part is clamped to the diaphragm, to make the diaphragm switch between the conveying position and the measuring position of conveying unit.The application is arranged by laser array and photosensitive array in controllable measuring chamber, switchable clamping and conveying mechanism, up and down slippable detection unit and pressure pressure measuring and feedback device, realize the quick switching measurement between the top surface and bottom surface of diaphragm in conveying position and measuring position.

Description

Technical Field

[0001] This application relates to the field of detection technology, specifically to a thickness laser measurement device and method based on diaphragm material processing. Background Technology

[0002] The thickness of the diaphragm is a key parameter that determines the sensor’s sensitivity, linear range, ultimate pressure resistance and natural frequency. The selection of diaphragm material and processing technology should be based on the measurement range, sensitivity, temperature / corrosion resistance and cost. Common options are silicon, stainless steel / nickel alloy and ceramic / SiC, and the corresponding preparation processes are CVD / sputtering / wet etching, stamping / laser cutting / electrochemical polishing and sol-gel / sintering, respectively.

[0003] The deflection at the center of the diaphragm is strongly correlated with its thickness, and theoretically approximates an h-shape. -3 The relationship is that even a small change in thickness can significantly alter the sensitivity and range. Thickness affects the elastic range and nonlinear initiation pressure. Incorrect thickness can lead to range mismatch or early nonlinear distortion. Insufficient thickness will reduce the ultimate bearing pressure and fatigue life, and increase the risk of fracture or drift. Excessive thickness will reduce sensitivity and affect response speed.

[0004] CN119934988A discloses a device and method for measuring the thickness of diaphragm parts. The device consists of a four-axis motion component, including three linear axes for part movement and one linear axis for probe movement. It can realize the fixed-point drive of the displacement probe, complete the measurement action, and perform subsequent data processing. The point cloud data processing technology combined with the color laser coaxial displacement measurement technology realizes the intelligent acquisition of the complete three-dimensional contour point cloud data of the diaphragm parts. The overall measurement method is simple and realizes the intelligent scanning of diaphragm parts, which greatly reduces the workload of process personnel and further improves production efficiency.

[0005] The surface thickness difference is mainly caused by three factors: uneven film formation / processing, substrate contamination, and internal stress. The accuracy of laser thickness measurement is mainly affected by optical geometry and coaxiality, optical properties of the film surface being measured, environmental disturbances (vibration and ambient light), temperature drift, and signal processing algorithms.

[0006] In existing technologies, laser thickness measurement is only relatively accurate when detecting thickness differences on one side. When the diaphragm is flipped or when precise thickness data of the diaphragm is obtained by laser, the error is large. Therefore, multiple detection methods need to be combined to improve the accuracy of diaphragm thickness detection. Summary of the Invention

[0007] In view of this, embodiments of this application aim to provide a thickness laser measurement device and method based on diaphragm material processing to solve the above-mentioned problems.

[0008] To achieve the above objectives, the first aspect of this application provides: a thickness laser measurement device based on diaphragm material processing, comprising: The body has a measuring chamber capable of changing ambient light, and the measuring chamber is equipped with a conveying unit that runs through the measuring chamber; A laser array and a photosensitive array are located inside the measuring chamber. The laser array and the photosensitive array are arranged correspondingly so that the laser generated by the laser array is reflected by the membrane and then received by the photosensitive array. A clamping part, located inside the measuring chamber, clamps the diaphragm to switch the diaphragm between the conveying position and the measuring position of the conveying unit; Both the laser array and the photosensitive array are capable of sliding up and down, and the laser array and the photosensitive array are divided into a first detection position and a second detection position along the measurement position. The first detection position corresponds to the top surface of the membrane, and the second detection position corresponds to the bottom surface of the membrane.

[0009] In some embodiments, the measuring chamber is provided with a sliding stage, the laser array and the photosensitive array are connected to the sliding stage and move along a first direction under the drive of the sliding stage, and a guide rail is provided on the outside of the sliding stage, the laser array and the photosensitive array are adapted to the guide rail; The laser array and the photosensitive array are equipped with pressure measuring components, which contact the guide rail to detect pressure changes as the laser array and the photosensitive array slide up and down.

[0010] In some embodiments, the pressure measuring assembly includes a pressure sensor, a first magnetic plate, a second magnetic plate, and a feedback unit. The pressure sensor is fixed to the side of the laser array or the photosensitive array facing the guide rail. The first magnetic plate is located on the pressure measuring side of the pressure sensor and connected to the pressure measuring side. The second magnetic plate is embedded inside the guide rail. The first magnetic plate and the second magnetic plate repel each other. The feedback unit is disposed within the laser array or the photosensitive array and is electrically connected to the pressure sensor.

[0011] In some embodiments, the laser array includes at least two sets of laser heads, which are staggered to form two sets of lasers that are directed toward the surface of the membrane at different angles. The photosensitive array includes at least two sets of photosensitive elements, which are staggered to receive laser reflected from the laser array at different angles. Both the laser array and the photosensitive array have a mounting bracket, which is connected to the slide, and the pressure measuring component is at least partially located within the mounting bracket.

[0012] In some embodiments, the clamping part includes a lifting assembly, which includes a lifting frame, a mounting base, an elastic element, a limiter, and rollers. The mounting base is located below the conveying position. The lifting frame is inserted into the mounting base and connected to the mounting base through the elastic element. The limiter is installed on the upper part of the mounting base to limit the upper limit position of the lifting frame when it is supported by the elastic element. The roller is embedded inside the lifting frame and can rotate relative to the lifting frame. The lifting frame has a pad on the side facing the diaphragm so that the lifting frame supports the diaphragm through the pad when lifting the diaphragm.

[0013] In some embodiments, the clamping part includes a clamping assembly, the clamping assembly including a plurality of jaws, a connecting frame, and a leveling unit, the connecting frame being located in the measuring chamber and connected to the measuring chamber, and the jaws and the leveling unit being circumferentially mounted inside the connecting frame; The connecting frame has multiple slides, which are inserted into the connecting frame and connected to the grippers or leveling units. Several of the grippers and leveling units are capable of extending, retracting or swinging relative to the connecting frame.

[0014] In some embodiments, the gripper has at least two cavities, with a spacer between the two cavities. The spacer is connected to the outer walls of the two cavities on both sides, so that when the spacer is attached to the side wall of the diaphragm, the two cavities expand or contract to change the elastic state of the spacer. The spacer has a groove in the middle, and the upper and lower parts of the spacer have multiple clamping grooves on the side that is attached to the diaphragm, so that the elastic state of the spacer on the other side does not change when the spacer is stretched by the expansion or contraction of the cavity on one side. The expansion or contraction of the two chambers can alter the way the chambers obstruct the surface of the diaphragm.

[0015] In some embodiments, the gripper further includes a clamping plate, a spring, a cylinder, and a frame. The clamping plate is embedded inside the slide, the telescopic end of the cylinder is connected to the frame, one end of the clamping plate extending into the slide is hinged to the frame and can swing relative to the frame, and the spring is fixed inside the slide and supports the clamping plate. The clamping plate is connected to the cavity. The outer side of the clamping plate has a protrusion, and the inner side of the slide is provided with a slide groove. The protrusion extends into the slide groove so that the protrusion and the slide groove cooperate to restrict the movement path of the clamping plate.

[0016] In some embodiments, the leveling unit includes a clamping piece, a patch, an electromagnet, a connecting plate, and a diaphragm. The connecting plate is embedded inside the carriage. The clamping piece is hinged to the connecting plate and can swing relative to the connecting plate. The clamping piece and the connecting plate are respectively connected to both sides of the diaphragm so that when the clamping piece swings relative to the connecting plate, the diaphragm bends and bulges. The patch is adhered to the inner side of the clamp, and the electromagnet is fixed inside the carriage. The electromagnet and the patch are magnetically engaged to adjust the swing angle of the clamp relative to the connecting plate.

[0017] A second aspect of this application provides a laser measurement method for film thickness, characterized by the following steps: Turn off the strong external light in the measurement chamber and turn on the adjustable lighting and temperature control. Confirm that the slide, lifting assembly and conveying unit are running normally under no-load. The film is fed into the conveying unit from the upstream station and conveyed stably at a set speed. The conveying unit then conveys the film to the predetermined conveying position. The clamping part holds the diaphragm and lifts it smoothly to the measurement position; The slide switches the laser array and photosensitive array to the first detection position and stabilizes them in place. After confirming that there are no abnormalities, it triggers multi-angle laser emission and photosensitive reception, records and preliminarily processes the top surface ranging data. The slide table switches to the second detection position and stabilizes in place, triggering multi-angle measurement of the bottom surface, recording the bottom surface distance measurement data and performing preliminary filtering; Once the measurement is successful or the processing is completed, the clamping part is retracted, and the conveying unit transports the diaphragm to the downstream station or rejection area.

[0018] This application achieves rapid switching measurement of the top and bottom surfaces of a diaphragm between conveying and measuring positions by arranging a laser array and a photosensitive array, a switchable clamping and conveying mechanism, a vertically sliding detection unit, and a pressure measurement and feedback device in a controllable measurement chamber. During the measurement process, pressure detection and clamping protection prevent damage to the diaphragm, thereby improving measurement accuracy, stability, and production line compatibility.

[0019] Other features and advantages of this application will be set forth in the following description, and in part will be apparent from the description, or may be learned by practicing the application. The objectives and other advantages of this application may be realized and obtained by means of the structures particularly pointed out in the written description and the accompanying drawings. Attached Figure Description

[0020] Figure 1 This is an assembly drawing for this application; Figure 2 This is a schematic diagram of the internal structure of the measuring chamber in this application; Figure 3This is a schematic diagram of the photosensitive array of this application; Figure 4 This is a schematic diagram of the laser array in this application; Figure 5 This is a plan view of the guide rail structure of this application; Figure 6 This is a schematic diagram showing the location of the pressure measuring component in this application; Figure 7 This is a schematic diagram of the pressure measurement component of this application; Figure 8 This is a schematic diagram of the lifting component of this application; Figure 9 This is an exploded view of the lifting component of this application; Figure 10 This is a schematic diagram of the clamping component of this application; Figure 11 This is a schematic diagram of the gripper structure of this application; Figure 12 This is a schematic diagram of the internal structure of the gripper in this application; Figure 13 This is a plan view of the partition structure of this application; Figure 14 This is a schematic diagram of the flat element in this application; Figure 15 This is a plan view of the flat unit in this application.

[0021] In the diagram: 100 body, 200 measuring chamber, 300 laser array, 400 photosensitive array, 500 clamping part; 21 Slide table, 22 Guide rail, 23 Pressure measuring assembly; 31 Pressure sensor, 32 First magnetic plate, 33 Second magnetic plate, 34 Feedback unit; 41 Laser head, 42 Photosensitive element, 43 Mounting bracket; 51 Lifting assembly, 52 Mounting base, 53 Lifting frame, 54 Elastic element, 55 Limiter, 56 Roller, 57 Gasket; 61 Clamping assembly, 62 gripper, 63 connecting frame, 64 leveling unit, 65 carriage; 71. Cavity, 72. Partition, 73. Groove, 74. Clamping groove, 75. Clamping plate, 76. Spring, 77. Cylinder, 78. Frame; 81 Clip, 82 Patch, 83 Electromagnet, 84 Connecting plate, 85 Diaphragm. Detailed Implementation

[0022] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. The terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion.

[0024] In the description of the embodiments of this application, the technical terms "first," "second," "third," etc., are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0025] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0026] In the description of the embodiments of this application, unless otherwise expressly specified and limited, technical terms such as "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.

[0027] The uniformity of diaphragm material thickness directly affects device performance and yield. Existing measurement methods often face problems in production line environments, such as ambient light interference, clamping deformation affecting measurement accuracy, difficulty in simultaneously measuring the upper and lower surfaces, and difficulty in quickly switching between transport and measurement positions.

[0028] Laser thickness measurement is relatively accurate only when detecting thickness differences on one side. When the membrane is flipped or when precise thickness data of the membrane is obtained by laser, the error is large. Therefore, multiple detection methods need to be combined to improve the accuracy of membrane thickness detection.

[0029] Furthermore, the optical unit and clamping mechanism are prone to damage to the diaphragm or measuring elements during switching or abnormal contact, and the lack of real-time force sensing and protection mechanisms leads to insufficient equipment reliability and production line compatibility. Therefore, a thickness measuring device with dual-position measurement, sliding switching, pressure feedback, and flexible clamping protection is needed in a controllable measurement environment to meet the requirements of high-speed online detection and production process control.

[0030] To address the aforementioned problems, embodiments of this application provide a thickness laser measurement device based on diaphragm material processing, see reference. Figure 1-15 As shown, it includes a body 100 and a measuring chamber 200. The measuring chamber 200 can change the ambient light to reduce ambient light interference. A conveying unit is installed through the measuring chamber 200 to transport the diaphragm from the upstream station to the measuring position and then to the downstream station. The measuring chamber 200 is a controllable environmental space with light shielding or adjustable lighting to reduce ambient light interference. The conveying unit is installed through the cavity 71 to achieve continuous connection with upstream and downstream processes.

[0031] The measuring chamber 200 contains a laser array 300 and a photosensitive array 400 arranged correspondingly. The laser beam irradiates the surface of the membrane and, after reflection, is received by the photosensitive array 400. Both the laser array 300 and the photosensitive array 400 can slide vertically, forming a first detection position and a second detection position at the measurement location, corresponding to the upper and lower planes of the membrane, respectively, to achieve independent measurement of the upper and lower surfaces. The laser array 300 and the photosensitive array 400 are mounted on a slide table 21, which moves smoothly along a guide rail 22 to switch between the measurement and maintenance positions.

[0032] With the controllable measurement chamber 200 and the dual-position detection design, non-contact thickness measurement can be stably performed in the production line environment. It can also perform double-sided measurement of the film in a stable clamping state, avoiding measurement errors caused by film flipping or repositioning. It significantly reduces the impact of ambient light and temperature fluctuations on measurement accuracy and supports simultaneous or alternating measurement of the upper and lower surfaces to improve detection efficiency.

[0033] In some embodiments, a slide 21 is provided inside the measuring chamber 200. The laser array 300 and the photosensitive array 400 are mounted on the slide 21 and move along a first direction under the drive of the slide 21 to complete the switching between the measuring position and the maintenance position. A guide rail 22 is provided on the outside of the slide 21. The laser array 300 and the photosensitive array 400 are adapted to the guide rail 22 to ensure smooth sliding.

[0034] The guide rail 22 serves to limit the movement of the laser array 300 and the photosensitive array 400, thereby improving the stability of their movement and reducing vibration during sliding.

[0035] To detect contact or abnormal friction during the upward and downward sliding process, the laser array 300 and the photosensitive array 400 are equipped with a pressure measuring component 23. The pressure measuring component 23 contacts the guide rail 22 to detect pressure changes during the upward and downward sliding. The pressure measuring component 23 includes a pressure sensor 31, a first magnetic plate 32, a second magnetic plate 33, and a feedback unit 34. The pressure sensor 31 is fixed on the side of the laser array 300 or the photosensitive array 400 facing the guide rail 22. The first magnetic plate 32 is located on the pressure measuring side of the pressure sensor 31 and is connected to it. The second magnetic plate 33 is embedded inside the guide rail 22. The first magnetic plate 32 and the second magnetic plate 33 repel each other to generate a measurable force change during abnormal contact. The feedback unit 34 is disposed in the laser array 300 or the photosensitive array 400 and is electrically connected to the pressure sensor 31, feeding back the pressure change signal to the controller to trigger protection or calibration actions.

[0036] When the slide table 21 moves the laser array 300 and the photosensitive array 400 up and down, the magnetic forces of the first magnetic plate 32 and the second magnetic plate 33 remain stable. The force state of the first magnetic plate 32 is detected by the pressure sensor 31 to determine the vibration state of the laser array 300 during the sliding process.

[0037] The slide table 21 and guide rail 22 ensure smooth movement and repeated positioning of the measuring unit. The pressure measuring component 23 monitors the pressure changes during the sliding process in real time and realizes a rapid response to vibration through the feedback unit 34, protecting the measuring unit and diaphragm and improving the reliability of the equipment.

[0038] In some embodiments, the laser array 300 includes at least two sets of laser heads 41, which are staggered to form two sets of lasers that are directed toward the surface of the film at different angles; the photosensitive array 400 includes at least two sets of photosensitive elements 42, which are staggered to receive reflected light at different angles.

[0039] The staggered array arrangement of the laser head 41 and the photosensitive element 42 can improve the coverage during the laser detection process, thereby reducing the amount of action required to detect the laser on the film plane. During the detection process, the two emission angles constitute staggered detection or two detections at one position.

[0040] Both the laser array 300 and the photosensitive array 400 have a mounting bracket 43, which is connected to the slide 21. The pressure measuring component 23 is at least partially located within the mounting bracket 43 to save space and facilitate wiring and maintenance. Multi-angle measurement improves robustness to diaphragm surface tilt, texture, or local defects by combining different incident and reflection angles, and the thickness value can be obtained by calculating the position of the upper and lower surfaces through triangulation or phase difference methods.

[0041] Multi-angle laser and photosensitive configuration enhances adaptability to complex surface morphology, reduces the dependence of single-angle measurement on surface reflection characteristics, improves the accuracy and stability of thickness measurement, and is suitable for a variety of film materials and surface treatment processes.

[0042] In some embodiments, the clamping part 500 includes a lifting assembly 51, which consists of a lifting frame 53, a mounting base 52, an elastic element 54, a limiter 55, and a roller 56. The mounting base 52 is located at the lower part of the conveying position. The lifting frame 53 is inserted into the mounting base 52 and connected to the mounting base 52 through the elastic element 54. The limiter 55 is installed on the upper part of the mounting base 52 to limit the upper limit position of the lifting frame 53 when supported by the elastic element 54. The roller 56 is embedded in the inner side of the lifting frame 53 and can rotate relative to the lifting frame 53. The side of the lifting frame 53 facing the diaphragm is provided with a pad 57 to support the diaphragm when lifting it.

[0043] During the diaphragm transport process, the lifting assembly 51 lifts the diaphragm to the transport position and intercepts it. After the diaphragm contacts one of the rollers 56, the rollers 56 roll continuously during the diaphragm's continuous movement until the diaphragm contacts both rollers 56. After the diaphragm is aligned, the lifting frame 53 continues to lift the diaphragm to the measurement position, where it is detected by the laser array 300 and the photosensitive array 400.

[0044] The lifting assembly 51 is in a retracted state at the conveying position for transport. When it reaches the measuring position, the lifting frame 53 is lifted by the elastic element 54 and the diaphragm is supported by the pad 57, so that the diaphragm is in a stable stress state during measurement and avoids deformation due to excessive clamping rigidity. The limiter 55 prevents over-travel during lifting, and the roller 56 cooperates with the conveying unit to reduce friction.

[0045] It should be noted that the elastic element 54 is designed to control the lifting frame 53. Optionally, the elastic element 54 can be the magnetic force of two electromagnetic components to change the height of the lifting frame 53. Alternatively, the elastic element 54 can also be a telescopic electric telescopic rod to control the movement of the lifting frame 53.

[0046] The lifting assembly 51 enables a smooth switch between transport and measurement. The elastic support and pad 57 protect against diaphragm deformation or damage caused by clamping, ensuring the stability of the diaphragm surface during measurement, thereby improving measurement repeatability and accuracy.

[0047] In some embodiments, the clamping part 500 further includes a clamping assembly 61, which consists of a plurality of jaws 62, a connecting frame 63 and a leveling unit 64. The connecting frame 63 is located inside and connected to the measuring chamber 200. The jaws 62 and the leveling unit 64 are both annularly mounted inside the connecting frame 63. The connecting frame 63 has a plurality of slides 65, which are inserted into the connecting frame 63 and connected to the jaws 62 or the leveling unit 64. The plurality of jaws 62 and the leveling assembly can extend or swing relative to the connecting frame 63 to adapt to diaphragms of different diameters or shapes.

[0048] An electric telescopic rod is installed inside the slide 65 to control the position of the slide 65. First, the lifting frame 53 lifts the diaphragm to the detection position, and then the electric telescopic rod pushes the slide 65 toward the diaphragm until the gripper 62 and the leveling unit 64 contact the diaphragm to form support for the diaphragm.

[0049] In some embodiments, each gripper 62 has at least two cavities 71, with a spacer 72 between the two cavities 71. The spacer 72 is connected to the outer walls of the two cavities 71 on both sides. When the spacer 72 is attached to the side wall of the diaphragm, the two cavities 71 expand or contract, changing the elastic state of the spacer 72. The spacer 72 has a groove 73 in the middle and multiple clamping grooves 74 on the side of the upper and lower parts that are attached to the diaphragm, so that the elastic state of the spacer 72 on the other side is not changed when the spacer 72 is pulled by the expansion or contraction of one cavity 71. The expansion or contraction of the two cavities can change the obstruction of the diaphragm surface, thereby achieving precise control of the clamping force and the obstruction surface.

[0050] Furthermore, the gripper 62 also includes a clamping plate 75, a spring 76, a cylinder 77, and a frame 78. The clamping plate 75 is embedded inside the slide 65. The telescopic end of the cylinder 77 is connected to the frame 78. The clamping plate 75 extends into the slide 65 and is hinged to the frame 78 at one end, and can swing relative to the frame 78. The spring 76 is fixed inside the slide 65 and supports the clamping plate 75. The outer side of the clamping plate 75 has a protrusion. The inner side of the slide 65 is provided with a sliding groove. The protrusion extends into the sliding groove so that the protrusion and the sliding groove cooperate to restrict the movement path of the clamping plate 75.

[0051] The combination of the multi-cavity 71 gripper 62 and the leveling unit 64 enables flexible contact and controllable clamping force with the sidewall and surface of the diaphragm. The cooperation of the cylinder 77 and the spring 76 provides coarse and fine clamping control, which can ensure the flatness of the diaphragm during clamping and achieve micro-position correction by adjusting the pressure of the cavity 71 or electromagnetic adjustment during the measurement process, thereby improving measurement consistency and adapting to various diaphragm specifications.

[0052] In some embodiments, the leveling unit 64 includes a clamping piece 81, a patch 82, an electromagnet 83, a connecting plate 84, and a diaphragm 85: the connecting plate 84 is embedded inside the carriage 65, the clamping piece 81 is hinged to the connecting plate 84 and can swing relative to the connecting plate 84, the clamping piece 81 and the connecting plate 84 are respectively connected to both sides of the diaphragm 85, so that the diaphragm 85 bends and bulges when the clamping piece 81 swings relative to the connecting plate 84; the patch 82 is bonded to the inside of the clamping piece 81 to provide a frictional or magnetic mating surface, the electromagnet 83 is fixed inside the carriage 65, and the electromagnet 83 and the patch 82 are magnetically mated to adjust the swing angle of the clamping piece 81 relative to the connecting plate 84, thereby realizing online fine adjustment of the local bonding angle of the diaphragm surface; the diaphragm 85 is made of an elastomer to ensure multiple bending life; the electromagnet 83 is driven by a controller according to measurement feedback closed-loop control.

[0053] The leveling unit 64 achieves online fine-tuning of the local posture of the diaphragm surface through the cooperation of electromagnetic and diaphragm 85, which can compensate for the slight warping caused by transportation or clamping, improve the geometric alignment and thickness measurement accuracy of laser measurement, and support automated closed-loop correction.

[0054] This application also provides a laser measurement method for film thickness, implemented using the aforementioned laser measurement device, with the following specific steps: Turn off the external strong light in the measuring chamber 200 and turn on the adjustable lighting and temperature control. Place the standard plate and thickness standard sheet to perform optical geometric calibration and time synchronization, and save the calibration matrix. Run the pressure measuring component 23 for self-test and record the baseline pressure curve to confirm that the slide table 21, lifting component 51 and conveying unit are running normally under no-load.

[0055] The upstream station feeds the film into the conveying unit and conveys it stably at a set speed. The conveying unit then conveys the film to the predetermined conveying position and triggers a confirmation signal.

[0056] The lifting assembly 51 switches from the contracted state to the intercepted state. The roller 56 guides the diaphragm to roll and completes the coarse alignment. After confirming that the diaphragm is in contact with the two rollers 56 and that the position is aligned, it is ready to be lifted.

[0057] The lifting frame 53 is smoothly lifted under the control of the elastic element 54 or electric drive. The pad 57 supports the diaphragm so that it enters a controlled force state. The limiter 55 prevents overtravel and the pressure measuring component 23 confirms that the support force is within the allowable range.

[0058] The electric telescopic rod pushes the slide 65 so that the gripper 62 and the leveling unit 64 contact the diaphragm. The flexible fit and initial posture correction are completed by adjusting the pressure of the preset cavity 71 or by electromagnetic fine adjustment. The pressure measuring component 23 monitors the clamping force and feeds it back to the controller.

[0059] The slide 21 switches the laser array 300 and the photosensitive array 400 to the first detection position and stabilizes them in place. After confirming that there are no abnormalities in the pressure measurement, it triggers multi-angle laser emission and photosensitive reception, records and preliminarily processes the top surface ranging data.

[0060] The slide 21 switches to the second detection position and stabilizes in place. After the pressure measurement is confirmed, it triggers multi-angle measurement of the bottom surface, records the bottom surface distance measurement data, and performs preliminary filtering.

[0061] Once the measurement is qualified or the processing result is completed, the lifting frame 53 is retracted, and the conveying unit transports the diaphragm to the downstream workstation or rejection area; the measured values, visual defect markings, pressure measurement curves and clamping status are saved in batches and uploaded to the upper system for traceability.

[0062] The above embodiments are merely illustrative of the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application, and all should be covered within the scope of this application. In particular, as long as there is no structural conflict, the various technical features mentioned in the embodiments can be combined in any way. This application is not limited to the specific embodiments disclosed herein.

Claims

1. A thickness laser measurement device based on diaphragm material processing, characterized in that, include: The body (100) has a measuring chamber (200) capable of changing ambient light, and the measuring chamber (200) is provided with a conveying unit that passes through the measuring chamber (200); A laser array (300) and a photosensitive array (400) are located inside the measurement chamber (200). The laser array (300) and the photosensitive array (400) are arranged correspondingly so that the laser generated by the laser array (300) is reflected by the membrane and received by the photosensitive array (400). A clamping part (500) is located inside the measuring chamber (200). The clamping part (500) clamps the diaphragm so that the diaphragm can switch between the conveying position and the measuring position of the conveying unit. The laser array (300) and the photosensitive array (400) can slide up and down, and the laser array (300) and the photosensitive array (400) are divided into a first detection position and a second detection position along the measurement position. The first detection position corresponds to the top surface of the membrane, and the second detection position corresponds to the bottom surface of the membrane.

2. The thickness laser measurement device based on diaphragm material processing according to claim 1, characterized in that, The measuring chamber (200) is equipped with a slide (21). The laser array (300) and the photosensitive array (400) are connected to the slide (21) and move along a first direction under the drive of the slide (21). The slide (21) is equipped with a guide rail (22) on the outside. The laser array (300) and the photosensitive array (400) are adapted to the guide rail (22). The laser array (300) and the photosensitive array (400) are equipped with a pressure measuring component (23), which contacts the guide rail (22) to detect the pressure change when the laser array (300) and the photosensitive array (400) slide up and down.

3. The thickness laser measurement device based on diaphragm material processing according to claim 2, characterized in that, The pressure measuring component (23) includes a pressure sensor (31), a first magnetic plate (32), a second magnetic plate (33), and a feedback unit (34). The pressure sensor (31) is fixed to the side of the laser array (300) or the photosensitive array (400) facing the guide rail (22). The first magnetic plate (32) is located on the pressure measuring side of the pressure sensor (31) and connected to the pressure measuring side. The second magnetic plate (33) is embedded inside the guide rail (22). The first magnetic plate (32) and the second magnetic plate (33) repel each other. The feedback unit (34) is disposed within the laser array (300) or the photosensitive array (400) and is electrically connected to the pressure sensor (31).

4. The thickness laser measurement device based on diaphragm material processing according to claim 3, characterized in that, The laser array (300) includes at least two sets of laser heads (41), which are staggered so that the laser array (300) forms two sets of lasers that are directed at the surface of the membrane at different angles; The photosensitive array (400) includes at least two sets of photosensitive elements (42), which are staggered to receive laser reflected from the laser array (300) at different angles; Both the laser array (300) and the photosensitive array (400) have a mounting bracket (43) connected to the slide (21), and the pressure measuring component (23) is at least partially located within the mounting bracket (43).

5. The thickness laser measurement device based on diaphragm material processing according to claim 1, characterized in that, The clamping part (500) includes a lifting assembly (51), which includes a lifting frame (53), a mounting base (52), an elastic element (54), a limiter (55), and a roller (56). The mounting base (52) is located below the conveying position. The lifting frame (53) is inserted into the mounting base (52) and connected to the mounting base (52) through the elastic element (54). The limiter (55) is installed on the upper part of the mounting base (52) to limit the upper limit position of the lifting frame (53) when it is supported by the elastic element (54). The roller (56) is embedded inside the lifting frame (53) and can rotate relative to the lifting frame (53). The lifting frame (53) has a pad (57) on the side facing the diaphragm so that the lifting frame (53) supports the diaphragm through the pad (57) when lifting the diaphragm.

6. A thickness laser measurement device based on diaphragm material processing according to claim 1 or 5, characterized in that, The clamping part (500) includes a clamping assembly (61), which includes a plurality of jaws (62), a connecting frame (63), and a leveling unit (64). The connecting frame (63) is located inside the measuring chamber (200) and connected to the measuring chamber (200). The jaws (62) and the leveling unit (64) are both circumferentially mounted inside the connecting frame (63). The connecting frame (63) has multiple slides (65), which are inserted into the connecting frame (63) and connected to the grippers (62) or the leveling unit (64). The grippers (62) and the leveling unit are all capable of extending or swinging relative to the connecting frame (63).

7. The thickness laser measurement device based on diaphragm material processing according to claim 6, characterized in that, The gripper (62) has at least two cavities (71), and a partition (72) is provided between the two cavities (71). The two sides of the partition (72) are respectively connected to the outer walls of the two cavities (71) so that when the partition (72) is attached to the side wall of the membrane, the two cavities (71) expand or contract to change the elastic state of the partition (72). The partition (72) has a groove (73) in the middle, and the upper and lower parts of the partition (72) have multiple clamping grooves (74) on the side of the film to be attached, so that the elastic state of the partition (72) on the other side does not change when the partition (72) is stretched by the expansion or contraction of the cavity (71) on one side; The expansion or contraction of the two chambers can alter the way the chambers obstruct the surface of the diaphragm.

8. The thickness laser measurement device based on diaphragm material processing according to claim 7, characterized in that, The gripper (62) also includes a clamping plate (75), a spring (76), a cylinder (77), and a frame (78). The clamping plate (75) is embedded inside the slide (65). The telescopic end of the cylinder (77) is connected to the frame (78). One end of the clamping plate (75) extending into the slide (65) is hinged to the frame (78) and can swing relative to the frame (78). The spring (76) is fixed inside the slide (65) and supports the clamping plate (75). The clamp (75) is connected to the cavity (71). The outer side of the clamp (75) has a protrusion, and the inner side of the slide (65) is provided with a slide groove. The protrusion extends into the slide groove so that the protrusion and the slide groove cooperate to restrict the movement path of the clamp (75).

9. A thickness laser measurement device based on diaphragm material processing according to claim 7, characterized in that, The leveling unit (64) includes a clamp (81), a patch (82), an electromagnet (83), a connecting plate (84), and a diaphragm (85). The connecting plate (84) is embedded inside the carriage (65). The clamp (81) is hinged to the connecting plate (84) and can swing relative to the connecting plate (84). The clamp (81) is connected to the connecting plate (84) on both sides of the diaphragm (85) so that when the clamp (81) swings relative to the connecting plate (84), the diaphragm (85) bends and bulges. The patch (82) is bonded to the inside of the clip (81), and the electromagnet (83) is fixed inside the carriage (65). The electromagnet (83) and the patch (82) are magnetically coupled to adjust the swing angle of the clip (81) relative to the connecting plate (84).

10. A laser measurement method for diaphragm thickness, characterized in that, The steps are as follows: Turn off the strong light outside the measuring chamber (200) and turn on the adjustable lighting and temperature control to confirm that the slide (21), lifting assembly (51) and conveying unit are running normally under no-load conditions; The film is fed into the conveying unit from the upstream station and conveyed stably at a set speed. The conveying unit then conveys the film to the predetermined conveying position. The clamping part (500) clamps the diaphragm and lifts it smoothly to the measurement position; The slide (21) switches the laser array (300) and the photosensitive array (400) to the first detection position and stabilizes them in place. After confirming that there are no abnormalities, it triggers multi-angle laser emission and photosensitive reception, records and preliminarily processes the top surface ranging data. The slide (21) switches to the second detection position and stabilizes in place, triggering multi-angle measurement of the bottom surface, recording the bottom surface distance measurement data and performing preliminary filtering; Once the measurement is successful or the processing is completed, the clamping part (500) is retracted, and the conveying unit transports the diaphragm to the downstream station or rejection area.

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