A pressure adaptive method and system for thermal mass flow controllers

CN122111123AInactive Publication Date: 2026-05-29CHENGDU RUIBAO ELECTRONIC TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
CHENGDU RUIBAO ELECTRONIC TECH CO LTD
Filing Date
2026-04-30
Publication Date
2026-05-29
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

Existing technologies in thermal mass flow controllers rely on pressure sensors for pressure compensation, which leads to increased costs, increased structural complexity, and affected temperature characteristics. Furthermore, existing solutions cannot achieve consistent operating characteristics across different pressure ranges without adding pressure sensors.

Method used

By acquiring the transient pulse characteristics of the flow signal, the type and range of pressure changes are identified, and the accuracy and control parameters are compensated based on the model identification results. A database is established for learning and storage to achieve adaptive control of pressure changes.

Benefits of technology

Without the need to add a pressure sensor, the control accuracy and dynamic response characteristics of the thermal mass flow controller remain consistent across different pressure ranges, reducing costs and improving system stability and responsiveness.

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Abstract

The application discloses a pressure self-adaption method and system for a thermal mass flow controller and relates to the field of gas measurement and control. The method comprises the following steps: under the condition of no pressure sensor, a pressure change signal is captured by a flow measurement signal, when a preset determination condition is met, a transient pulse in the flow signal is determined as a pressure step signal, and a transient characteristic is extracted; model identification is performed based on the transient characteristic to determine the pressure change type, the pressure range and whether the control parameter needs to be adjusted, and precision compensation and control parameter compensation are performed accordingly; and the identification result is stored in a database, and when the same or similar pulse is detected subsequently, the corresponding compensation parameter is called. The application can realize pressure compensation under different pressure intervals without increasing a pressure sensor, reduces the hardware cost of the system, and improves the flow control precision and dynamic response stability.
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