Wafer transfer system

Abstract

The application relates to the field of semiconductor process equipment, in particular to a wafer conveying system. The wafer conveying system comprises a base, a POD door opening mechanism, at least one pair of CST supporting mechanisms, a CST horizontal moving mechanism, a controller and a linear driving module. The CST horizontal moving mechanism is provided with a CST carrier with a C-shaped opening. The C-shaped opening and a pickup end of an internal mechanical arm of a Mini Stocker form a three-dimensional space avoidance, so that the cassette only needs to be horizontally moved once to reach a position directly accessible by the internal mechanical arm. By decomposing the traditional "lifting-horizontal moving-descending" compound motion into vertical transfer completed by the CST supporting mechanism and one-way horizontal conveying completed by the CST horizontal moving mechanism, the application significantly simplifies the system structure, reduces the moving parts, improves the conveying efficiency and long-term operation reliability, and is particularly suitable for the automatic logistics interface of an 8-inch and above semiconductor production line.

Description

Technical Field

[0001] This invention relates to the field of semiconductor process equipment, and more specifically to a wafer transfer system, particularly suitable for a transfer device integrated with a Mini Stocker for automatically opening and closing doors of a Standard Mechanical Interface Box (SMIF POD) and automatically transferring internal cassettes (wafer carriers). Background Technology

[0002] In advanced semiconductor manufacturing, fully automated material handling systems are crucial for improving production efficiency and product yield. Typical 8-inch and larger production lines employ a logistics model of "overhead crane / automated guided vehicle (OHT / VGA) → mini stocker → process equipment." The mini stocker, as a critical buffer node, needs to frequently and precisely perform operations such as retrieving cassettes from the SMIF POD or placing them back.

[0003] Traditional solutions typically divide the wafer transport system into separate SMIF modules (responsible for POD processing) and LOADER modules (responsible for cassette handling). The LOADER module usually employs a multi-axis robotic arm or complex motion mechanism to perform a compound motion of "lifting the cassette upwards → moving it horizontally → placing it downwards into the buffer position." This design has significant drawbacks: complex mechanisms, numerous components, large space occupation, cumbersome motion control, and a high failure rate and high maintenance costs over long-term operation.

[0004] While existing technologies offer solutions to optimize wafer separation or improve inspection security—such as the wafer separation and transfer device disclosed in Chinese Patent CN117524951A and the integrated sensing wafer transfer system disclosed in Chinese Patent CN118692964A—none of them provide fundamental solutions for simplifying the core structure and optimizing the path of cassette transfer between the SMIF POD and the Mini Stocker. Designing a wafer transfer system with a simpler structure, more direct operation, and higher reliability to adapt to increasing automation demands and compact equipment layouts has become a pressing technical problem for those skilled in the art. Summary of the Invention

[0005] This invention aims to overcome the aforementioned shortcomings of existing technologies and provide a wafer transfer system that is compact, reliable in motion, and highly space-efficient. Through innovative modular design and a unique C-shaped stage structure, this system decouples traditional multi-axis composite motion into simple vertical separation and unidirectional horizontal transfer, thereby significantly simplifying the system and improving performance.

[0006] The technical solution adopted by this invention to solve its technical problem is as follows: a wafer transfer system is provided, comprising: a base; a POD opening mechanism for positioning and opening the SMIF POD baseplate, the POD opening mechanism being mounted on the base via a linear drive module; at least one pair of CST placement mechanisms, symmetrically arranged and fixed on the base and located on both sides of the movement path of the POD opening mechanism, for supporting or releasing cassettes carrying wafers; a CST traversing mechanism, mounted on the base and located between the CST placement mechanisms, including a CST stage for supporting the cassette, the CST stage having a C-shaped opening; and a controller electrically connected to the linear drive module, the POD opening mechanism, the CST placement mechanism, and the CST traversing mechanism respectively; wherein, the C-shaped opening is configured to allow the picking end of the robot inside the micro-storage compartment to pass through, so as to achieve structural avoidance between the CST stage and the picking end of the robot inside the micro-storage compartment in three-dimensional space.

[0007] Optionally, the base is provided with a POD housing platform for supporting the SMIF POD housing, a guide block and two platform micro switches, and a POD housing locking unit for fixing the SMIF POD housing after the SMIF POD is in place; the POD housing locking unit includes a rotatable POD housing clip and a first driving member for driving the POD housing clip to rotate.

[0008] Optionally, the POD opening mechanism includes: a base plate support platform for supporting the SMIF POD base plate, wherein the base plate support platform is provided with a base plate micro switch for detecting whether the SMIF POD base plate is placed in place; multiple positioning pins are provided on the base plate support platform for cooperating with positioning holes on the SMIF POD base plate; and an opening key that can be driven to rotate by the controller for unlocking or locking the SMIF POD base plate.

[0009] Optionally, the CST placement mechanism includes: a first linear drive member fixed to the base; a rotary drive member connected to the output end of the first linear drive member; and a CST tray fixedly connected to the output end of the rotary drive member; wherein the first linear drive member is used to drive the rotary drive member and the CST tray to move up and down in a direction perpendicular to the moving plane of the CST lateral mechanism, and the rotary drive member is used to drive the CST tray to rotate in the horizontal plane.

[0010] Optionally, the first linear drive is a cylinder or an electric cylinder; the rotary drive is a servo motor or a rotary cylinder.

[0011] Optionally, the CST lateral movement mechanism further includes: a horizontal linear guide rail disposed on the base; a lateral drive member for driving the CST platform to move along the horizontal linear guide rail between an external receiving position and an internal conveying position; at least two positioning blocks disposed on the bearing surface of the CST platform for positioning the cassette; and a load detection switch disposed on the CST platform for detecting whether the cassette is placed in place.

[0012] Optionally, the lateral drive component is a rodless cylinder, a linear motor, or an electric slide.

[0013] Optionally, the linear drive module is a servo cylinder, an electric slide, or a linear motor.

[0014] Optionally, the controller is configured to perform the following steps: in response to an SMIF POD placement signal, control the POD opening mechanism to lock the SMIF POD shell and unlock the SMIF POD base plate; control the linear drive module to lower the POD opening mechanism, the SMIF POD base plate, and the cassette together to a first preset position, and then drive the CST tray of the CST placement mechanism to rotate to a supporting position; control the linear drive module to continue moving downwards, so that the cassette is supported by the CST tray and separated from the SMIF POD base plate, until the SMIF POD base plate descends to a second preset position; control the CST platform of the CST traversing mechanism to move horizontally to directly below the cassette, and control the CST placement mechanism to place the cassette onto the CST platform; control the CST traversing mechanism to move the CST platform carrying the cassette to a preset handover position inside the Mini Stocker, and initiate a handover signal.

[0015] Optionally, the wafer transfer system operates in a bidirectional manner, used to perform an inbound process of transferring cassettes from an external SMIF POD to the MiniStocker, and an outbound process of transferring completed cassettes from the MiniStocker back to the SMIF POD and locking them.

[0016] The wafer transfer system provided by this invention has the following significant advantages.

[0017] 1. Simplified structure and high reliability: By decomposing the traditional "lifting-lateral movement-lowering" compound motion into the "rotational support and release" of the CST support mechanism and the "unidirectional horizontal movement" of the CST lateral movement mechanism, functional modularization is achieved, which significantly reduces the number of moving parts and components, reduces system complexity and failure rate, and improves long-term operational stability.

[0018] 2. Efficient and direct transmission path: The C-shaped opening of the CST lateral movement mechanism complements and avoids the picking end of the Mini Stocker's internal robotic arm, allowing the cassette to reach the position that the internal robotic arm can directly access with just one horizontal movement. This eliminates the complex intermediate transition and cooperative avoidance steps in traditional solutions, greatly improving transmission efficiency and space utilization.

[0019] 3. High space utilization: All functional modules are highly integrated on a unified base, forming a compact transmission unit. This integrated design reduces the space occupied by the system inside the Mini Stocker, which is conducive to optimizing the equipment layout.

[0020] 4. Highly efficient and scalable: This invention significantly shortens the transfer cycle of a single cassette through hardware structure optimization and collaborative control. The controller's programmed process control ensures the accuracy and timing of actions. Its modular design and high level of automation enable seamless integration into a wider range of automated logistics systems for semiconductor production lines. Attached Figure Description

[0021] The accompanying drawings, which are provided to further illustrate this application and form part of this application, illustrate exemplary embodiments of this application and are used to explain this application, but do not constitute an undue limitation of this application.

[0022] Figure 1 This is a schematic diagram of the structure of a wafer transfer system from one angle in an embodiment of the present invention.

[0023] Figure 2 This is a schematic diagram of a wafer transfer system from another angle in an embodiment of the present invention.

[0024] Figure 3 for Figure 1 A three-dimensional schematic diagram of the central base and some integrated components.

[0025] Figure 4 This is a three-dimensional structural diagram of the POD door opening mechanism in an embodiment of the present invention.

[0026] Figure 5 This is a three-dimensional structural diagram of the CST support mechanism in an embodiment of the present invention.

[0027] Figure 6 This is a three-dimensional structural diagram of the CST lateral movement mechanism in an embodiment of the present invention.

[0028] Figure 7 This is a schematic diagram illustrating the process of a wafer transfer system in an embodiment of the present invention transferring a cassette from an external SMIF POD to the MiniStocker.

[0029] Figure 8 This is a schematic diagram of the intermediate state of the workflow (cassette input) of this invention.

[0030] Figure 9 This is a schematic diagram illustrating the completion status of the workflow (cassette input) of this invention.

[0031] Figure 10 This is a schematic diagram of the workflow of this invention (internal handover via cassette).

[0032] Figure Descriptions: 1-Base, 2-POD opening mechanism, 3-CST placement mechanism, 4-CST lateral movement mechanism, 5-Controller, 6-Linear drive module, 11-POD housing platform, 12-Guide block, 13-POD housing clip, 14-First drive component, 15-Original position detection switch, 16-Original position limit block, 17-External position detection switch, 18-External position limit block, 19-Platform micro switch, 21-Base plate support platform, 22-Base plate micro switch, 23-Positioning pin, 24-Opening key, 31-First linear drive component, 32-Rotation drive component, 33-CST tray, 34-Connecting plate, 41-Horizontal linear guide rail, 42-Transverse drive component, 43-CST platform, 44-Positioning block, 45-Load detection switch, 7-VGA / OHT system, 8-DHT trolley system, 9-Mini Stocker, 101-CTR robotic arm, 102-CST pickup module, 103-SMIF POD housing, 104-cassette, 105-wafer, 106-SMIF POD base plate. Detailed Implementation

[0033] The embodiments of this application will now be described in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. Furthermore, the following embodiments and features can be combined with each other unless otherwise specified. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0034] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0035] Please see Figure 1-2 This embodiment provides a wafer transfer system, which mainly includes a base 1, a POD opening mechanism 2, a CST placement mechanism 3, a CST traversing mechanism 4, a controller 5, and a linear drive module 6.

[0036] Base 1, serving as the structural core and mounting platform of the wafer transfer system, is typically made of rigid metallic materials such as aluminum alloy or steel. See also... Figure 3 , Figure 8 and Figure 9 The base 1 is equipped with a POD housing platform 11, a guide block 12, and two platform microswitches 19 for precisely supporting the SMIF POD housing 103 transported by the VGA / OHT system 7. The base 1 integrates a POD housing locking device, including a rotatable POD housing clip 13 and a first drive component 14 (motor or cylinder) to drive its rotation, used to fix the housing after the SMIF POD is placed in position, preventing displacement during subsequent operations. Furthermore, the base 1 is equipped with an initial position detection switch 15 and an initial position limit block 16, as well as an external position detection switch 17 and an external position limit block 18, for precisely controlling the travel of the CST platform 43. The base 1 is used to connect the CST placement mechanism 3, the linear drive module 6, and the CST traversing mechanism 4 via screws, forming a unified structure for the entire conveying system.

[0037] Please see Figure 1 , Figure 4 and Figure 8The POD opening mechanism 2 is fixedly mounted on the movable end of the linear drive module 6 (preferably a high-precision servo electric cylinder in this embodiment) by screws or clips, and is used to position the SMIF POD precisely, detect the presence or absence of the SMIF POD, and open the SMIF POD base plate 106. The POD opening mechanism 2 includes a base plate support platform 21, which is equipped with multiple high-precision positioning pins 23 for use with the standard positioning holes of the SMIF POD base plate 106 to ensure alignment accuracy. A base plate micro switch 22 is installed on the base plate support platform 21 to detect whether the SMIF POD base plate 106 is in place. The POD opening mechanism 2 contains an opening key 24 that can be rotated by the controller 5, which is inserted into the lock hole of the SMIF POD base plate 106 and rotated 90 degrees to unlock or lock the SMIF POD base plate 106.

[0038] Please see Figure 1 , Figure 5 , Figure 8 and Figure 9 Two CST placement mechanisms 3 are symmetrically bolted to both sides of the base 1. They are used to first rotate and support the cassette 104, which is moving downwards along with the SMIF POD base plate. Once the CST traversing mechanism 4 is in place, they move downwards to place the cassette 104 onto the CST platform 43 of the CST traversing mechanism 4. Each CST placement mechanism 3 includes a first linear drive 31 (a cylinder in this embodiment), whose cylinder body is fixed to the base 1 via a connecting plate 34. A rotary drive 32 (a servo motor in this embodiment) is connected to the piston rod end of the cylinder. The CST tray 33 is fixed to the output shaft of the servo motor. The controller 5 can independently control the cylinder-driven CST tray 33 of each CST placement mechanism 3 to lift and lower, and the servo motor-driven CST tray 33 to rotate approximately 90 degrees in the horizontal plane, allowing it to rotate laterally into the conveying path of the cassette 104.

[0039] Please see Figure 1 , Figure 6 , Figure 8 and Figure 9The CST lateral movement mechanism 4 is mounted on the base 1, located between the two CST placement mechanisms 3. When the cassette 104 is placed by the CST placement mechanism 3, it moves the cassette 104 laterally to be conveyed into the Mini Stocker 9. Because the C-shaped opening design of the CST platform 43 avoids the CST pickup module 102 of the CTR robot 101 inside the Mini Stocker 9, the CTR robot 101 inside the Mini Stocker 9 can directly pick up and place the cassette 104. The CST lateral movement mechanism 4 includes a horizontal linear guide rail 41, a lateral drive component 42 (in this embodiment, a rodless cylinder), and a CST platform 43 driven by the rodless cylinder. Positioning blocks 44 are provided at the four corners of the bearing surface of the CST platform 43 for precisely positioning the cassette 104 placed thereon. A load detection switch 45 (such as a microswitch) is also installed on the CST platform 43 to detect whether the cassette 104 is placed in the correct position. The core improvement of the CST stage 43 is its C-shaped opening structure. The size and shape of the C-shaped opening are carefully designed to ensure that when the CST stage 43 is moved into the designated position inside the Mini Stocker 9, the "C-shaped" picking end of the internal CTR robot 101 (i.e., the CST picking module 102) can extend into the opening without obstruction to directly grab or place the cassette 104, and the two do not interfere with each other in space.

[0040] The controller 5 (usually a PLC or industrial computer) is connected via cables to all the aforementioned drive components (first linear drive 31, rotary drive 32, etc.), sensors (base plate micro switch 22, original position detection switch 15, etc.), and the Mini Stocker9 main control system. It stores a preset control program internally to coordinate the sequential actions of the entire system.

[0041] The linear drive module 6 is used to drive the POD door opening mechanism 2 to move up and down, and to stop at a designated position during the movement. The linear drive module 6 can be an electric slide, a servo cylinder, a linear motor, etc.

[0042] Please see Figure 1-10 The import process of this invention (taking the import of cassette104 into Mini Stocker9 as an example) includes the following steps.

[0043] 1. SMIF POD Placement and Positioning: The front-end VGA / OHT system 7 transports the SMIF POD loaded with the wafer 105 to be processed to the input / output (I / O) port stage of this system (the SMIF POD loaded with the wafer 105 is transported to the base 1 via the DHT trolley system 8). At this time, the SMIF POD shell 103 contacts the POD shell stage 11 on the base 1, and the SMIF POD shell 103 is supported by the base plate support 21 of the POD opening mechanism 2. The three positioning pins 23 on the POD opening mechanism 2 cooperate with the corresponding positioning holes on the SMIF POD base plate 106 to ensure the precise positioning of the SMIF POD. Simultaneously, the two platform microswitches 19 on the POD housing platform 11 are pressed down by the SMIF POD, and the four base plate microswitches 22 of the POD door opening mechanism 2 are also pressed down by the SMIF POD (it should be noted that: the detection function can be achieved with ≥1 base plate microswitch 22. In this embodiment, multiple switches are set to improve the accuracy of detecting the correct placement of the SMIF POD. When all base plate microswitches 22 are triggered, it indicates that the SMIF POD is in the correct position). The controller 5 confirms the signal that all base plate microswitches 22 have been triggered, thereby identifying that the SMIF POD has been accurately placed in place.

[0044] 2. Locking and Opening: After confirming that the SMIF POD is in place, the controller 5 first controls the first drive unit 14 on the base 1 to rotate the POD housing latch 13 by a preset angle (e.g., 90°), locking the SMIF POD housing onto the POD housing platform 11 to prevent it from moving during subsequent operations. Then, the controller 5 drives the opening key 24 on the POD opening mechanism 2 to rotate by a preset angle (e.g., 90°), releasing the mechanical lock on the SMIF POD base plate 106, preparing for the subsequent lowering of the base plate and the internal cassette 104.

[0045] 3. SMIF POD base plate 106 descends and passively separates from cassette 104: Controller 5 drives the linear drive module 6 to start working, causing the entire POD opening mechanism 2 and the SMIF POD base plate 106, which is tightly fixed to it, to move smoothly downwards. When the linear drive module 6 drives the base plate and cassette 104 to descend to a first preset position, the descent stops. Controller 5 then commands the rotary drive components 32 of the CST placement mechanisms 3, symmetrically arranged on both sides, to rotate their respective CST trays 33 by approximately 90°, extending horizontally into the conveying path below cassette 104.

[0046] 4. Cassette 104 connection and complete separation: Please refer to Figure 1, Figure 5 and Figure 8 (in, Figure 8 The demonstration shows the process of the CST tray 33 of the CST placement mechanism 3 rotating to support the cassette 104, and the cassette 104 separating from the SMIF POD base plate 106. After the CST tray 33 rotates into position, the controller 5 continues to control the linear drive module 6 to drive the POD opening mechanism 2 and the SMIF POD base plate 106 to continue moving downwards. During the downward movement, the side or bottom of the cassette 104 will contact and be supported by the horizontally extended CST tray 33. As the SMIF POD base plate 106 continues to descend independently, the cassette 104 is able to physically separate from the SMIF POD base plate 106. This separation process is mainly passively completed by the continuous downward movement of the SMIF POD, and the structure is simple and reliable. The linear drive module 6 finally drives the POD opening mechanism 2 and the SMIF POD base plate 106 to a second preset position.

[0047] 5. CST Horizontal Transfer Platform Positioning and Cassette 104 Placement: Controller 5 controls the lateral drive 42 of the CST horizontal transfer mechanism 4 to move the CST platform 43 with the C-shaped opening horizontally from its original waiting position along the horizontal linear guide 41 to directly below the cassette 104 supported by the CST tray 33. The CST platform 43 stops when it contacts the external position limit block 18 on the base 1 and triggers the associated external position detection switch 17. After receiving the signal from the external position detection switch 17, controller 5 immediately commands the first linear drive 31 of the two CST placement mechanisms 3 to descend synchronously. Thus, the two CST trays 33 move downward together, smoothly and accurately placing the cassette 104 on the CST platform 43 of the CST horizontal transfer mechanism 4, where it is accurately positioned by multiple positioning blocks 44 on the CST platform 43. When the cassette 104 is placed in position, it will trigger the load detection switch 45 set on the CST platform 43.

[0048] 6. CST tray 33 reset and cassette 104 lateral conveying: After the controller 5 detects the cassette 104's arrival signal, it first controls the rotation drive 32 of the two CST placement mechanisms 3 to rotate in the opposite direction by approximately 90°, causing the CST tray 33 to rotate out of the conveying path and return to its initial (retracted) position, making room for the next cycle or reverse conveying process. Next, the controller 5 controls the lateral drive 42 of the CST lateral movement mechanism 4 to drive the CST platform 43 carrying the cassette 104 to return horizontally to its initial position (or internal conveying position) along the horizontal linear guide rail 41. When the CST platform 43 reaches the initial position, it triggers the original position detection switch 15 on the base 1 and stops when it contacts the original position limit block 16.

[0049] 7. Internal handover complete: Please refer to Figure 1 , Figure 6 , Figure 9 and Figure 10 (in, Figure 9 The demonstration shows the CST traverse mechanism 4 carrying cassette 104 and moving it to the internal handover position of the Mini Stocker 9 (with the CTR robot 101 inside the Mini Stocker 9 ready to pick up and place the cassette). After the controller 5 recognizes that the CST stage 43 has reached its internal position, it sends a "cassette handover ready" signal to the Mini Stocker 9 main control system via the communication interface. The CTR robot 101 inside the Mini Stocker 9 then moves from its internal storage position, and its CST pick-up module 102 (designed with a "C-shaped" structure to avoid the C-shaped opening of the CST stage 43) extends directly into the C-shaped opening of the CST stage 43, safely and efficiently removing cassette 104 and sending it to the buffer position inside the Mini Stocker 9. The wafer 105 inside cassette 104 can then be removed by the Wafer Transfer Robot for further processing.

[0050] The outgoing process of the present invention (after the wafer 105 is processed in the process equipment, the cassette 104 will be sent back to the SMIF POD in the following reverse order) includes the following steps.

[0051] 1. Internal Reception Preparation: Upon receiving the instruction from VGA / OHT system 7 to retrieve the SMIF POD, the CTR robot 101 inside MiniStocker9 transfers the cassette 104, containing the completed wafer 105, from the buffer and places it on the CST stage 43 of the CST traverse mechanism 4 of this system. The cassette 104 presses against the loading detection switch 45 on the CST stage 43, sending a positioning signal to the controller 5.

[0052] 2. CST platform 43 output: After the controller 5 confirms that the cassette 104 is in place, it controls the transverse drive 42 of the CST transverse mechanism 4 to drive the CST platform 43 carrying the cassette 104 to move horizontally to the "external position", that is, the position where the cassette 104 was previously received (triggering the external position detection switch 17). At this time, the cassette 104 is located directly above the CST tray 33.

[0053] 3. Cassette 104 Pickup and Lifting: The controller 5 controls the movement of the CST support mechanism 3 on both sides: First, its rotary drive 32 drives the CST tray 33 to rotate and extend under the cassette 104; then the first linear drive 31 drives the CST tray 33 to rise, lifting the cassette 104 from the CST platform 43.

[0054] 4. Pallet retraction and platform reset: After the CST pallet 33 stabilizes the cassette 104, the controller 5 controls the CST lateral movement mechanism 4 to drive the CST platform 43 to move horizontally back to its "original / internal position".

[0055] 5. Base Plate Lifting and Cassette 104 Reinstallation: Controller 5 drives the linear drive module 6 to lift the POD opening mechanism 2 and the SMIF POD base plate 106, which is already in its lowest position. When the SMIF POD base plate 106 rises to contact and lift the bottom of the cassette 104 supported by the CST support plate 33, the CST support plate 33 then moves downward under the command of controller 5, placing the cassette 104 completely on the SMIF POD base plate 106, completing the docking of the cassette 104 and the SMIF POD base plate 106.

[0056] 6. Base Plate Locking: The SMIF POD base plate 106 continues to rise to the initial closed position. The controller 5 drives the door key 24 to rotate in the opposite direction (e.g., -90°), locking the SMIF POD base plate 106.

[0057] 7. POD housing unlocking: The controller 5 controls the first drive unit 14 on the base 1 to reverse the action, drive the POD housing card 13 to rotate, and release the SMIF POD housing 103.

[0058] 8. SMIF POD Outbound: At this point, cassette 104 has been safely returned to the SMIF POD and the SMIF POD has been locked. The system sends a removable signal to the VGA / OHT system 7, and the VGA / OHT system retrieves the SMIF POD containing the completed wafer 105 and transfers it to the next station.

[0059] In another preferred embodiment of the present invention, the controller 5 can receive external instructions as needed, or identify wafer information in the wafer cassette through the scanning device of the detection device, and automatically execute or fine-tune the above process according to the feedback of the sensor, so as to achieve a higher degree of automation and information management.

[0060] In summary, this invention provides a wafer transfer system with a simple structure, reliable operation, and high space utilization through the C-shaped opening design of the CST stage 43 and modular action decomposition. It effectively solves the problems of complex structure and low reliability of traditional solutions, and has significant practical value and promotion prospects.

[0061] The above description, in conjunction with specific embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the inventive concept, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A wafer transfer system, characterized in that, include: Base; POD opening mechanism, used to position and open SMIF POD base plate, wherein the POD opening mechanism is installed on the base via a linear drive module; At least one pair of CST support mechanisms are symmetrically arranged and fixed on the base and located on both sides of the moving path of the POD opening mechanism, for supporting or releasing the cassette carrying the wafer; The CST transverse mechanism, mounted on the base and located between the CST support mechanisms, includes a CST platform for supporting the cassette, the CST platform having a C-shaped opening; The controller is electrically connected to the linear drive module, the POD door opening mechanism, the CST lifting mechanism, and the CST lateral movement mechanism, respectively. The C-shaped opening is configured to allow the picking end of the robot inside the micro storage compartment to pass through, thereby achieving structural avoidance between the CST platform and the picking end of the robot inside the micro storage compartment in three-dimensional space.

2. The wafer transfer system according to claim 1, characterized in that, The base is provided with a POD shell platform for supporting the SMIF POD shell, a guide block and two platform micro switches, as well as a POD shell locking unit for fixing the SMIF POD shell after the SMIF POD is in place; the POD shell locking unit includes a rotatable POD shell clip and a first driving member for driving the POD shell clip to rotate.

3. The wafer transfer system according to claim 1, characterized in that, The POD door opening mechanism includes: A base plate support platform is used to support the SMIF POD base plate. The base plate support platform is equipped with a base plate micro switch for detecting whether the SMIF POD base plate is placed in place. Multiple positioning pins are provided on the base plate support platform for use in conjunction with positioning holes on the SMIF POD base plate; The door key, which can be driven to rotate by the controller, is used to unlock or lock the SMIF POD base plate.

4. A wafer transfer system according to claim 1, characterized in that, The CST placement mechanism includes: The first linear drive component is fixed on the base; A rotary drive unit is connected to the output end of the first linear drive unit; CST plate, fixedly connected to the output end of the rotary drive component; The first linear drive is used to drive the rotary drive and the CST pallet to move up and down in a direction perpendicular to the moving plane of the CST lateral mechanism, and the rotary drive is used to drive the CST pallet to rotate in the horizontal plane.

5. A wafer transfer system according to claim 4, characterized in that, The first linear drive component is a pneumatic cylinder or an electric cylinder; the rotary drive component is a servo motor or a rotary cylinder.

6. A wafer transfer system according to claim 1, characterized in that, The CST lateral movement mechanism also includes: A horizontal linear guide rail is provided on the base; A transverse drive unit is used to drive the CST platform to move between the external receiving position and the internal conveying position along a horizontal linear guide rail. At least two positioning blocks are provided on the bearing surface of the CST platform for positioning the cassette; A load detection switch located on the CST platform is used to detect whether the cassette is placed in the correct position.

7. A wafer transfer system according to claim 6, characterized in that, The lateral drive component is a rodless cylinder, a linear motor, or an electric slide.

8. A wafer transfer system according to claim 1, characterized in that, The linear drive module is a servo electric cylinder, an electric slide table, or a linear motor.

9. A wafer transfer system according to claim 1, characterized in that, The controller is configured to perform the following steps: In response to the SMIF POD placement signal, the POD opening mechanism is controlled to lock the SMIF POD shell and unlock the SMIF POD base plate; The linear drive module is controlled to drive the POD door opening mechanism, SMIF POD base plate and cassette to descend to the first preset position, and then drive the CST tray of the CST support mechanism to rotate to the support position. The linear drive module is controlled to continue moving downwards, so that the cassette is supported by the CST tray and separated from the SMIF POD base plate, until the SMIF POD base plate descends to the second preset position. The CST platform of the CST lateral movement mechanism is controlled to move horizontally to directly below the cassette, and the CST placement mechanism is controlled to lower the cassette onto the CST platform. The CST traverse mechanism is controlled to move the CST platform carrying the cassette to a preset handover position inside the Mini Stocker and initiate a handover signal.

10. A wafer transfer system according to claim 1, characterized in that, The wafer transfer system operates bidirectionally, performing the inbound process of transferring cassettes from the external SMIF POD to the Mini Stocker, and the outbound process of transferring completed cassettes from the Mini Stocker back to the SMIF POD and locking them.

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