An automatically cleaning ion source device

Abstract

This invention discloses an automatically cleaning ion source device, relating to the technical field of ion source devices. The automatically cleaning ion source device includes a housing, on which are arranged an adjustment component, a driving component, a cleaning assembly, and a gas supply component. The ion source body is mounted on the actuating end of the adjustment component. The cleaning assembly includes a box, a suction plate, a blowing plate, gas columns, gas holes, and a switching component. The box is mounted on the actuating end of the driving component. The suction plate and blowing plate are installed inside the box. Multiple gas columns are installed above the blowing plate, and each gas column has two gas channels. Multiple gas holes are opened on the top of the box, and the gas holes are connected to the gas columns via the switching component. When the device is working, the gas supply component provides argon and oxygen to the ion source body. The position of the ion source body is adjusted by the adjustment component. After the ion source body finishes working, the driving component moves the box closer to the ion source body for cleaning.

Description

Technical Field

[0001] This invention relates to the field of ion source device technology, specifically an automatically cleaning ion source device. Background Technology

[0002] An ion source is a core component for ionizing atoms or molecules and outputting a stable ion beam. It is widely used in mass spectrometry, semiconductor ion implantation, vacuum coating, and space electric propulsion. It converts neutral particles into charged ions through an ionization structure, which, along with the extraction electrodes and optical system, form a controllable ion beam. This beam offers advantages such as stable ion beam current, high ionization efficiency, and adjustable operating parameters.

[0003] Traditional ion source cleaning requires shutdown for disassembly, manual wiping, or chemical cleaning, which results in long downtime, complex operation, and easy damage to precision components, seriously affecting the continuous operation efficiency of the equipment. Summary of the Invention

[0004] The purpose of this invention is to provide an automatically cleaning ion source device to solve the problems raised in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: The automatic cleaning ion source device includes a housing, on which an adjustment component, a driving component, and a gas supply component are provided. The ion source body is installed at the actuating end of the adjustment component, and the gas inlet end of the ion source body is connected to the gas supply component through a pipe. The actuating end of the driving component penetrates through the side wall of the housing and is equipped with a cleaning component. The cleaning components include a housing, an extraction plate, an air blowing plate, an air column, air holes, and a switching element; The actuator of the drive unit is equipped with a housing. From bottom to top, an extraction plate and an air blowing plate are installed inside the housing. Multiple air columns are installed above the air blowing plate, each with two air channels. These channels are connected to the extraction plate and air blowing plate via pipes. Multiple air holes are located at the top of the housing, and the corresponding air holes are coaxial with the air columns. The air holes and air columns are connected via a switching mechanism. When the device is operating, the gas supply unit provides argon and oxygen to the ion source body, causing it to form a directional ion beam output, cleaning the membrane surface and increasing membrane adhesion. The position of the ion source body is adjusted by an adjusting mechanism. After the ion source body finishes operating, the drive unit moves the housing closer to the ion source body. At this time, the switching mechanism controls the extraction plate to form a channel with the air holes, or the air blowing plate to form a channel with the air holes, thereby cleaning the ion source body in two states: blowing or absorption, to adapt to different working ring requirements.

[0006] As a preferred technical solution, the switching component includes a connecting column, a spiral groove, a gas flow channel, a drive plate, balls, and a lifting component; A connecting column is rotatably mounted on the top of the air column, and the top of the connecting column is rotatably connected to the bottom of the air hole. A gas flow channel is opened inside the connecting column. The top opening of the gas flow channel is concentric with the air hole, and the bottom opening and the center of the two air channels are located on the same circumference. A drive plate is slidably mounted inside the box. Multiple lifting components are installed on the side wall of the box. The actuating end of the lifting component is fastened to the drive plate. Multiple circular holes are opened on the drive plate, and the connecting column penetrates through the circular holes. A spiral groove is opened on the cylindrical surface of the connecting column. A ball bearing is installed on the contact surface between the drive plate and the circular holes, and the ball bearing slides into the spiral groove. When the ion source body is cleaned by absorption, the lifting component drives the drive plate to rise, and then the ball bearing and the spiral groove cooperate to rotate the connecting column. The rotation of the connecting column causes the bottom opening of the gas flow channel to move from the position of the air channel connected to the blowing plate to the position of the air channel connected to the suction plate, thereby completing the switching of the cleaning state.

[0007] As a preferred technical solution, the switching component further includes a T-shaped slide, a T-shaped slider, an arc-shaped block, a slide, a drive block, a groove, a stop rod, and a contact ball; The vent consists of a flared hole at the top and a cylindrical hole at the bottom. Multiple T-shaped tracks are formed on the inner wall of the flared hole. A T-shaped slider is slidably mounted within each T-shaped track. An arc-shaped block is mounted on the T-shaped slider. The outer arc surface of the arc-shaped block fits against the inner wall of the flared hole, and the radius of its inner arc surface is the same as the radius of the cylindrical hole. A track is formed on one side of the vent, and this track is connected to the T-shaped track via a passageway. A driving block is slidably mounted within each track and is securely connected to the T-shaped slider. The bottom of the block has a sliding groove, and multiple sets of abutment rods are installed on the drive plate. The abutment rods pass through the sliding groove, and a contact ball is installed on the top of the abutment rod. The contact ball is slidably installed in the sliding groove. When the drive plate rises, the multiple sets of abutment rods lift the drive block. As the drive block moves upward along the sliding groove, it drives the arc-shaped blocks on the T-shaped slider to move upward, thereby exposing the horn hole and increasing the size of the absorption port. In the blowing state, the arc rings inside the multiple arc blocks form a channel with the same radius as the cylindrical hole, reducing the diffusion when the gas is ejected and ensuring the blowing force.

[0008] As a preferred technical solution, the driving component includes a cover, a slide, a chamber, an adjusting rod, an angle adjusting gear, a mounting bracket, a cam, a mounting plate, a rotating wheel, a locking block, and a driving claw; A cover is installed on one side of the housing. A sliding plug is slidably installed inside the cover, and an adjusting rod is installed on the sliding plug. The sliding plug has a chamber, which is penetrated by one end of the adjusting rod. An angle adjusting gear is installed on the adjusting rod inside the chamber. A mounting bracket is installed on one side of the angle adjusting gear. A mounting plate is rotatably installed on the mounting bracket. A rotating wheel is rotatably installed on one side of the bottom of the mounting plate. A cam is rotatably installed on the mounting bracket below the rotating wheel. A locking block is installed on the side of the mounting plate near the angle adjusting gear. A drive pawl is rotatably installed on the top of the mounting plate. When the cleaning angle needs to be adjusted, the mounting plate is oscillating back and forth on the mounting bracket by controlling the rotation of the cam. When the mounting plate oscillates away from the angle adjusting gear, the locking block disengages from the tooth groove of the angle adjusting gear. At this time, the drive pawl moves from the original tooth groove to the next tooth groove. Then, when the mounting plate oscillates towards the angle adjusting gear, the drive pawl pushes the angle adjusting gear to rotate by an angle. At this time, the locking block is locked in the tooth groove for a limit, thereby completing the angle adjustment.

[0009] As a preferred technical solution, the driving component further includes an air chamber, an impeller, an air inlet, an air outlet, an air inlet switch, a one-way valve, and an air compressor; The slide plug has an air chamber, an air inlet, and an air outlet on the side away from the chamber. An impeller is rotatably mounted in the air chamber, and the impeller is connected to the cam via a connecting shaft. The air chamber is connected to the air inlet and the air outlet. An air inlet switch is installed at the inlet of the air inlet, and a one-way valve is installed at the outlet of the air outlet. An air compressor is installed on one side of the housing, and a solenoid valve is installed at the drive output end of the air compressor. The solenoid valve is connected to the airflow holes at both ends of the housing via pipes. When the ion source body needs to be cleaned, the air compressor inputs compressed air into the airflow hole on the housing at the end away from the adjusting rod, and air exits from the other end of the airflow hole, causing the slide plug to drive the adjusting rod forward. When the angle needs to be adjusted, the air inlet switch is opened, and compressed air enters the air chamber through the air inlet to drive the impeller to rotate, thereby driving the cam to rotate.

[0010] As a preferred technical solution, a buffer ring for cushioning and a guide rod for guiding are installed inside the housing.

[0011] As a preferred technical solution, a detection camera is installed on one side of the box, and the detection camera is electrically connected to the air intake switch and the lifting component.

[0012] As a preferred technical solution, the housing is equipped with a cooling water circulator and a negative pressure machine. The ion source body is provided with a cooling pipe. The return water end and the inlet water end of the cooling pipe are connected to the cooling water circulator to form a circulation loop. The clean output end of the air compressor is connected to the air blowing plate through a pipe. The negative pressure machine is connected to the air extraction plate through a pipe.

[0013] As a preferred technical solution, a gas filter is provided on the pipe connecting the ion source body and the gas supply component.

[0014] As a preferred technical solution, a vacuum pumping device is provided on the top of the box to perform vacuum pumping inside the box.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. This application provides argon and oxygen to the ion source body through a gas supply component, enabling it to form a directional ion beam output, cleaning the membrane surface and increasing the membrane adhesion. The position of the ion source body is adjusted by an adjustment component. After the ion source body finishes working, the drive component moves the box closer to the ion source body. At this time, the switching component controls the air extraction plate to form a channel with the air hole or the air blowing plate to form a channel with the air hole, thereby cleaning the ion source body in two states: blowing or absorption, to adapt to different working ring requirements.

[0016] 2. This application uses a lifting component to drive the drive plate upward, and then uses the cooperation of the ball bearings and the spiral groove to rotate the connecting column. The rotation of the connecting column causes the bottom opening of the gas flow channel to move from the position of the air channel connected to the blowing plate to the position of the air channel connected to the suction plate, thereby completing the switching of the cleaning state. Multiple sets of push rods lift the drive block. As the drive block moves upward along the slide, it drives the arc-shaped block on the T-shaped slider to move upward, thereby exposing the horn hole and increasing the size of the absorption port. In the blowing state, the arc rings inside the multiple arc-shaped blocks form a channel with the same radius as the cylindrical hole to reduce the diffusion when the gas is ejected and ensure the blowing force.

[0017] 3. This application controls the rotation of the cam to make the mounting plate swing back and forth on the mounting frame. When the mounting plate swings away from the angle adjustment gear, the locking block disengages from the tooth groove of the angle adjustment gear. At this time, the drive pawl moves from the original tooth groove to the next tooth groove. Then, when the mounting plate swings towards the angle adjustment gear, the drive pawl pushes the angle adjustment gear to rotate by an angle. At this time, the locking block is locked in the tooth groove for a limit, thereby completing the angle adjustment. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structural features of the present invention. Figure 2 This is a schematic diagram of the first cross-sectional structure of the present invention; Figure 3 This is a schematic diagram of the second cross-sectional structure of the present invention; Figure 4 This is a first-view structural diagram of the cleaning component of the present invention; Figure 5 This is a schematic diagram of the first cross-sectional structure of the cleaning component of the present invention; Figure 6This is a schematic diagram of the second cross-sectional structure of the cleaning component of the present invention; Figure 7 This is a schematic diagram of the first cross-sectional structure of the driving component of the present invention; Figure 8 This is a schematic diagram of the second cross-sectional structure of the driving component of the present invention; Figure 9 This is a schematic diagram of the third cross-sectional structure of the driving component of the present invention; Figure 10 for Figure 5 Enlarged structural diagram at point A; Figure 11 for Figure 6 A magnified structural diagram at point B in the middle.

[0019] In the diagram: 1. Housing; 2. Adjustment components; 4. Gas supply components; 5. Ion source body; 502. Cooling pipes; 3. Drive components; 301. Cover; 302. Sliding plug; 3021. Chamber; 303. Adjusting rod; 304. Guide rod; 305. Buffer ring; 306. Angle adjusting gear; 307. Mounting bracket; 3071. Cam; 308. Mounting plate; 3081. Rotary wheel; 3082. Locking block; 3083. Drive claw; 309. Air chamber; 310. Impeller; 311. Air inlet; 312. Air outlet; 313. Air inlet switch; 314. Check valve; 315. Air compressor; 3151. Solenoid valve; 316. Detection camera; 6. Cleaning components; 601. Box body; 602. Suction plate; 603. Air blowing plate; 604. Air column; 6041. Air passage; 605. Air hole; 6051. Horn hole; 6052. Cylindrical hole; 606. Switching component; 6061. Connecting column; 6062. Spiral groove; 6063. Gas flow channel; 6064. Drive plate; 6065. Ball bearing; 6066. Lifting component; 6067. T-shaped slide; 6068. T-shaped slider; 6069. Arc-shaped block; 6070. Slide; 6071. Drive block; 6072. Slide groove; 6073. Support rod; 6074. Contact ball; 7. Cooling water circulator; 8. Negative pressure machine; 9. Gas filter; 10. Vacuum pumping device. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Example: Figures 1-6As shown, the present invention provides a technical solution for an automatically cleaning ion source device. The automatically cleaning ion source device includes a housing 1, on which an adjustment component 2, a driving component 3, and a gas supply component 4 are provided. An ion source body 5 is installed on the actuating end of the adjustment component 2. The gas inlet end of the ion source body 5 is connected to the gas supply component 4 through a pipe. The actuating end of the driving component 3 penetrates through the side wall of the housing 1 and is equipped with a cleaning component 6. The cleaning component 6 includes a housing 601, an air extraction plate 602, an air blowing plate 603, an air column 604, an air hole 605, and a switching component 606; The actuator of the drive unit 3 is equipped with a housing 601. Inside the housing 601, from bottom to top, are an air extraction plate 602 and an air blowing plate 603. Multiple air columns 604 are mounted above the air blowing plate 603. Each air column 604 has two air passages 6041, which are connected to the air extraction plate 602 and the air blowing plate 603 respectively via pipes. The top of the housing 601 has multiple air holes 605, and the corresponding air holes 605 are coaxial with the air columns 604. The air holes 605 and air columns 604 are connected via a switching component 606. When the equipment is working... The gas supply component 4 provides argon and oxygen to the ion source body 5, enabling it to form a directional ion beam output, cleaning the membrane surface and increasing the membrane's adhesion. The position of the ion source body 5 is adjusted by the adjustment component 2. After the ion source body 5 finishes working, the drive component 3 moves the box 601 close to the ion source body 5. At this time, the switching component 606 controls the suction plate 602 to form a channel with the air hole 605 or the blowing plate 603 to form a channel with the air hole 605, thereby cleaning the ion source body 5 in two states: blowing or absorption, to adapt to different working ring requirements.

[0022] like Figure 5 , Figure 6 , Figure 10 and Figure 11 As shown, the switching component 606 includes a connecting post 6061, a spiral groove 6062, a gas flow channel 6063, a drive plate 6064, a ball bearing 6065, and a lifting component 6066. A connecting column 6061 is rotatably mounted on the top of the air column 604. The top of the connecting column 6061 is rotatably connected to the bottom of the air hole 605. A gas flow channel 6063 is formed inside the connecting column 6061. The top opening of the gas flow channel 6063 is concentric with the air hole 605, and the bottom opening and the center of the two air channels 6041 are located on the same circumference. A drive plate 6064 is slidably mounted inside the box body 601. Multiple lifting components 6066 are installed on the side wall of the box body 601. The actuating end of the lifting component 6066 is fastened to the drive plate 6064. Multiple round holes are formed on the drive plate 6064, and the round holes are penetrated by the connecting column 6061. The cylindrical part of the connecting column 6061... A spiral groove 6062 is provided on the surface. A ball bearing 6065 is installed on the contact surface between the drive plate 6064 and the circular hole, and the ball bearing 6065 slides into the spiral groove 6062. When the ion source body 5 is cleaned by absorption, the drive plate 6064 is driven to rise by the lifting component 6066. Then, the connecting column 6061 is rotated by the cooperation of the ball bearing 6065 and the spiral groove 6062. The rotation of the connecting column 6061 causes the bottom opening of the gas flow channel 6063 to move from the position of the air channel 6041 connected to the blowing plate 603 to the position of the air channel 6041 connected to the suction plate 602, thereby completing the switching of the cleaning state.

[0023] The switching component 606 also includes a T-shaped slide 6067, a T-shaped slider 6068, an arc-shaped block 6069, a slide 6070, a drive block 6071, a groove 6072, a stop rod 6073, and a contact ball 6074. The vent 605 consists of a flared hole 6051 at the top and a cylindrical hole 6052 at the bottom. Multiple T-shaped tracks 6067 are formed on the inner wall of the flared hole 6051. A T-shaped slider 6068 is slidably installed within each T-shaped track 6067. An arc-shaped block 6069 is mounted on the T-shaped slider 6068. The outer arc surface of the arc-shaped block 6069 fits against the inner wall of the flared hole 6051, and the radius of its inner arc surface is the same as the radius of the cylindrical hole 6052. A track 6070 is formed on one side of the vent 605, and the track 6070 is connected to the T-shaped track 6067 via a passageway. A drive block 6071 is slidably installed within the track 6070. The drive block 6071 is securely connected to the T-shaped slider 6068. The bottom of the drive block 6071... The drive plate 6064 has a sliding groove 6072, and multiple sets of abutment rods 6073 are installed on the drive plate 6064. The abutment rods 6073 pass through the sliding groove 6070, and a contact ball 6074 is installed on the top of the abutment rod 6073. The contact ball 6074 is slidably installed in the sliding groove 6072. When the drive plate 6064 rises, the multiple sets of abutment rods 6073 lift the drive block 6071. As the drive block 6071 moves upward along the sliding groove 6070, it drives the arc-shaped block 6069 on the T-shaped slider 6068 to move upward, thereby exposing the horn hole 6051 and increasing the size of the absorption port. In the blowing state, the arc rings inside the multiple arc-shaped blocks 6069 form a channel with the same radius as the cylindrical hole 6052 to reduce the diffusion when the gas is ejected and ensure the blowing force.

[0024] like Figures 7-9 As shown, the driving component 3 includes a cover 301, a slide 302, a chamber 3021, an adjusting rod 303, an angle adjusting gear 306, a mounting bracket 307, a cam 3071, a mounting plate 308, a rotating wheel 3081, a locking block 3082, and a driving claw 3083. A cover 301 is installed on one side of the housing 1. A slide plug 302 is slidably installed inside the cover 301, and an adjusting rod 303 is installed on the slide plug 302. A chamber 3021 is provided inside the slide plug 302, and one end of the adjusting rod 303 passes through the chamber 3021. An angle adjusting gear 306 is installed on the adjusting rod 303 located in the chamber 3021. A mounting bracket 307 is installed on one side of the angle adjusting gear 306. A mounting plate 308 is rotatably installed on the mounting bracket 307. A rotating wheel 3081 is rotatably installed on one side of the bottom of the mounting plate 308. A cam 3071 is rotatably installed on the mounting bracket 307 below the rotating wheel 3081. A cam 3071 is installed on the side of the mounting plate 308 near the angle adjusting gear 306. The mounting plate 308 has a drive pawl 3083 rotatably mounted on top of the locking block 3082. When the cleaning angle needs to be adjusted, the mounting plate 308 is reciprocated on the mounting bracket 307 by controlling the rotation of the cam 3071. When the mounting plate 308 swings away from the angle adjustment gear 306, the locking block 3082 disengages from the tooth groove of the angle adjustment gear 306. At this time, the drive pawl 3083 moves from the original tooth groove to the next tooth groove. Then, when the mounting plate 308 swings towards the angle adjustment gear 306, the drive pawl 3083 pushes the angle adjustment gear 306 to rotate by an angle. At this time, the locking block 3082 is locked in the tooth groove for a limit, thereby completing the angle adjustment.

[0025] The drive unit 3 also includes an air chamber 309, an impeller 310, an air inlet 311, an air outlet 312, an air inlet switch 313, a one-way valve 314, and an air compressor 315; An air chamber 309, an air inlet 311, and an air outlet 312 are provided inside the side of the slide plug 302 away from the chamber 3021. An impeller 310 is rotatably mounted inside the air chamber 309. The impeller 310 is connected to the cam 3071 via a connecting shaft. The air chamber 309 is connected to the air inlet 311 and the air outlet 312. An air inlet switch 313 is installed at the inlet of the air inlet 311, and a one-way valve 314 is installed at the outlet of the air outlet 312. An air compressor 315 is installed on one side of the housing 1. The drive output end of the air compressor 315 is... Equipped with a solenoid valve 3151, the solenoid valve 3151 is connected to the airflow holes at both ends of the housing 301 through pipes. When the ion source body 5 needs to be cleaned, the air compressor 315 inputs compressed air into the airflow hole on the housing 301 at the end away from the adjusting rod 303, and the airflow hole at the other end outputs air, causing the slide plug 302 to drive the adjusting rod 303 to extend forward. When the angle needs to be adjusted, the air intake switch 313 is opened, and the compressed air enters the air chamber 309 through the air intake passage 311 to drive the impeller 310 to rotate, thereby driving the cam 3071 to rotate.

[0026] The housing 301 contains a buffer ring 305 for cushioning and a guide rod 304 for guiding.

[0027] A detection camera 316 is installed on one side of the housing 601. The detection camera 316 is electrically connected to the air intake switch 313 and the lifting component 6066.

[0028] The housing 1 is equipped with a cooling water circulator 7 and a negative pressure machine 8. The ion source body 5 is equipped with a cooling pipe 502. The return water end and the inlet water end of the cooling pipe 502 are connected to the cooling water circulator 7 to form a circulation loop. The clean output end of the air compressor 315 is connected to the air blowing plate 603 through a pipe. The negative pressure machine 8 is connected to the air extraction plate 602 through a pipe.

[0029] A gas filter 9 is installed on the pipe connecting the ion source body 5 and the gas supply component 4.

[0030] A vacuum pumping device 10 is provided on the top of the box 1 for evacuating the inside of the box 1.

[0031] Working principle of the invention: When the equipment is working, the gas supply component 4 provides argon and oxygen to the ion source body 5, so that it forms a directional ion beam output, cleans the membrane surface, and increases the adhesion of the membrane. The position of the ion source body 5 is adjusted by the adjustment component 2. When the ion source body 5 finishes working, the drive component 3 drives the box 601 to approach the ion source body 5. At this time, the switching component 606 controls the suction plate 602 to form a channel with the air hole 605 or the blowing plate 603 to form a channel with the air hole 605, so as to clean the ion source body 5 in two states: blowing or absorption, to adapt to different working ring requirements.

[0032] When the ion source body 5 is cleaned using the absorption method, the lifting component 6066 drives the drive plate 6064 to rise, and then the connecting column 6061 rotates through the cooperation of the ball bearing 6065 and the spiral groove 6062. The rotation of the connecting column 6061 causes the bottom opening of the gas flow channel 6063 to move from the position of the air channel 6041 connected to the blowing plate 603 to the position of the air channel 6041 connected to the suction plate 602, thereby completing the switching of the cleaning state.

[0033] When the drive plate 6064 rises, multiple sets of abutment rods 6073 lift the drive block 6071. As the drive block 6071 moves upward along the slide rail 6070, it drives the arc-shaped block 6069 on the T-shaped slider 6068 to move upward, thereby exposing the horn hole 6051 and increasing the size of the absorption port. In the blowing state, the inner arc rings of multiple arc-shaped blocks 6069 form a channel with the same radius as the cylindrical hole 6052 to reduce the diffusion when the gas is ejected and ensure the blowing force.

[0034] When the cleaning angle needs to be adjusted, the mounting plate 308 is reciprocated on the mounting bracket 307 by controlling the rotation of the cam 3071. When the mounting plate 308 swings away from the angle adjustment gear 306, the locking block 3082 disengages from the tooth groove of the angle adjustment gear 306. At this time, the drive pawl 3083 moves from the original tooth groove to the next tooth groove. Then, when the mounting plate 308 swings towards the angle adjustment gear 306, the drive pawl 3083 pushes the angle adjustment gear 306 to rotate by an angle. At this time, the locking block 3082 is locked in the tooth groove for a limit, thereby completing the angle adjustment.

[0035] When the ion source body 5 needs to be cleaned, the air compressor 315 inputs compressed air into the airflow hole on the cover 301 at the end away from the adjusting rod 303, and the airflow hole at the other end outputs air, causing the slide plug 302 to drive the adjusting rod 303 to extend forward. When the angle needs to be adjusted, the air intake switch 313 is opened, and the compressed air enters the air chamber 309 through the air intake passage 311 to drive the impeller 310 to rotate, thereby driving the cam 3071 to rotate.

[0036] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An automatically cleaning ion source device, characterized in that: The automatic cleaning ion source device includes a housing (1), on which an adjustment component (2), a drive component (3) and a gas supply component (4) are provided. The actuating end of the adjustment component (2) is equipped with an ion source body (5). The gas inlet end of the ion source body (5) is connected to the gas supply component (4) through a pipe. The actuating end of the drive component (3) penetrates the side wall of the housing (1) and is equipped with a cleaning component (6). The cleaning component (6) includes a housing (601), an air extraction plate (602), an air blowing plate (603), an air column (604), an air hole (605), and a switching component (606). The actuator (3) is equipped with a housing (601). The bottom of the housing (601) is equipped with an air extraction plate (602) and an air blowing plate (603) from bottom to top. Multiple air columns (604) are installed above the air blowing plate (603). Two air passages (6041) are opened on the air column (604), and the two air passages (6041) are respectively connected to the air extraction plate (602) and the air blowing plate (603) through pipes. Multiple air holes (605) are opened on the top of the housing (601), and the corresponding air holes (605) are coaxial with the air column (604). The air holes (605) and the air column (604) are connected through a switching component (606).

2. The automatically cleaning ion source device according to claim 1, characterized in that: The switching component (606) includes a connecting post (6061), a spiral groove (6062), a gas flow channel (6063), a drive plate (6064), a ball bearing (6065), and a lifting component (6066). A connecting column (6061) is rotatably mounted on the top of the air column (604). The top of the connecting column (6061) is rotatably connected to the bottom of the air hole (605). A gas flow channel (6063) is opened inside the connecting column (6061). The top opening of the gas flow channel (6063) is concentric with the air hole (605), and the bottom opening and the center of the two air channels (6041) are located on the same circumference. A drive plate (6064) is slidably mounted inside the box body (601). Multiple lifting components (6066) are installed on the side wall. The lifting component (6066) is fastened to the drive plate (6064) at its actuating end. Multiple round holes are opened on the drive plate (6064), and the round holes are penetrated by connecting columns (6061). A spiral groove (6062) is opened on the cylindrical surface of the connecting column (6061). A ball bearing (6065) is installed on the contact surface between the drive plate (6064) and the round hole, and the ball bearing (6065) slides into the spiral groove (6062).

3. The automatically cleaning ion source device according to claim 2, characterized in that: The switching component (606) further includes a T-shaped slide (6067), a T-shaped slider (6068), an arc-shaped block (6069), a slide (6070), a drive block (6071), a groove (6072), a stop rod (6073), and a contact ball (6074). The air vent (605) consists of a flared hole (6051) at the top and a cylindrical hole (6052) at the bottom. Multiple T-shaped slides (6067) are provided on the inner wall of the flared hole (6051). A T-shaped slider (6068) is slidably installed in the T-shaped slide (6067). An arc-shaped block (6069) is installed on the T-shaped slider (6068). The outer arc surface of the arc-shaped block (6069) fits against the inner wall of the flared hole (6051), and the radius of the inner arc surface is the same as the radius of the cylindrical hole (6052). A slide (6070) is provided on one side of the air vent (605). Furthermore, the slide (6070) and the T-shaped slide (6067) are connected through a passageway. A drive block (6071) is slidably installed in the slide (6070). The drive block (6071) is fastened to the T-shaped slider (6068). A groove (6072) is opened at the bottom of the drive block (6071). Multiple sets of abutment rods (6073) are installed on the drive plate (6064). The abutment rods (6073) pass through the slide (6070). A contact ball (6074) is installed at the top of the abutment rods (6073). The contact ball (6074) is slidably installed in the groove (6072).

4. The automatically cleaning ion source device according to claim 1, characterized in that: The driving component (3) includes a cover (301), a slide (302), a chamber (3021), an adjusting rod (303), an angle adjusting gear (306), a mounting bracket (307), a cam (3071), a mounting plate (308), a rotating wheel (3081), a locking block (3082), and a driving claw (3083). A cover (301) is installed on one side of the housing (1). A slide plug (302) is slidably installed inside the cover (301), and an adjusting rod (303) is installed on the slide plug (302). A chamber (3021) is provided inside the slide plug (3021). One end of the adjusting rod (303) passes through the chamber (3021). An angle adjusting gear (306) is installed on the adjusting rod (303) located in the chamber (3021). An angle adjusting gear (306) is installed on one side of the angle adjusting gear (306). The mounting bracket (307) is provided, and a mounting plate (308) is rotatably mounted on the mounting bracket (307). A rotating wheel (3081) is rotatably mounted on one side of the bottom of the mounting plate (308). A cam (3071) is rotatably mounted on the mounting bracket (307) below the rotating wheel (3081). A locking block (3082) is mounted on the side of the mounting plate (308) near the angle adjustment gear (306). A drive pawl (3083) is rotatably mounted on the top of the mounting plate (308).

5. The automatically cleaning ion source device according to claim 4, characterized in that: The drive unit (3) also includes an air chamber (309), an impeller (310), an air inlet (311), an air outlet (312), an air inlet switch (313), a one-way valve (314), and an air compressor (315). The slide plug (302) has an air chamber (309), an air inlet (311), and an air outlet (312) on the side away from the chamber (3021). An impeller (310) is rotatably installed in the air chamber (309). The impeller (310) is connected to the cam (3071) via a connecting shaft. The air chamber (309) is connected to the air inlet (311) and the air outlet (312). An air inlet switch (313) is installed at the inlet of the air inlet (311). A one-way valve (314) is installed at the outlet of the air outlet (312). An air compressor (315) is installed on one side of the housing (1). A solenoid valve (3151) is installed at the drive output end of the air compressor (315). The solenoid valve (3151) is connected to the airflow holes at both ends of the housing (301) via a pipe.

6. The automatically cleaning ion source device according to claim 5, characterized in that: The housing (301) is equipped with a buffer ring (305) for cushioning and a guide rod (304) for guiding.

7. The automatically cleaning ion source device according to claim 6, characterized in that: A detection camera (316) is installed on one side of the housing (601), and the detection camera (316) is electrically connected to the air intake switch (313) and the lifting component (6066).

8. The automatically cleaning ion source device according to claim 1, characterized in that: The housing (1) is equipped with a cooling water circulator (7) and a negative pressure machine (8). The ion source body (5) is equipped with a cooling pipe (502). The return water end and the inlet water end of the cooling pipe (502) are connected to the cooling water circulator (7) to form a circulation loop. The clean output end of the air compressor (315) is connected to the air blowing plate (603) through a pipe. The negative pressure machine (8) is connected to the air extraction plate (602) through a pipe.

9. The automatically cleaning ion source device according to claim 1, characterized in that: A gas filter (9) is provided on the pipe connecting the ion source body (5) and the gas supply unit (4).

10. An automatically cleaning ion source device according to claim 1, characterized in that: The top of the box (1) is equipped with a vacuum pumping device (10) for evacuating the inside of the box (1).

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