Apparatus and method for using low reference voltage with microelectromechanical systems devices

CN122138106APending Publication Date: 2026-06-02KNOWLES ELECTRONICS LLC

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
KNOWLES ELECTRONICS LLC
Filing Date
2025-11-27
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

The small size requirement of MEMS sensor packages necessitates low-voltage power supply, but capacitors require higher voltages, and existing charge pump designs struggle to provide sufficient voltage while reducing the number of stages.

Method used

By employing a boost circuit and a switching control circuit, the gate-source voltage of the transistor is controlled independently of the reference voltage. Combined with a multiplexer and a complementary clock driver, this achieves efficient boosting of the charge pump, reduces the number of charge pump stages, and provides the required voltage.

Benefits of technology

It effectively reduces the number of charge pump stages, provides the high voltage required by MEMS devices, improves the efficiency and adaptability of charge pumps, and supports voltage regulation for different applications.

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Abstract

This application relates to apparatus and methods for using low reference voltages with microelectromechanical systems (MEMS) devices. A sensor component may include a housing, an electrical interface, and a capacitive transducer, the capacitive transducer including a first electrode and a second electrode. The sensor component may include circuitry including a bias voltage source coupled to the first electrode. The bias voltage source may include a boost circuit coupled to a charge pump and coupled to a reference voltage source. The boost circuit may receive a reference voltage and a clock signal, increase the reference voltage, and increase the voltage of the clock signal supplied to the clock input of the charge pump based on the increased reference voltage. The boost circuit may supply the increased reference voltage to the input of the charge pump. The boost circuit may also include a switch control circuitry that controls at least two transistors of the boost circuitry independently of the reference voltage.
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