A water-based plasma jet cleaning method and apparatus

By configuring plasma discharge parameters driven by multimodal contamination detection and material safety margin, a multi-path collaborative cleaning flow is established, which solves the problems of insufficient contamination state perception and material safety margin decoupling in existing cleaning solutions, and achieves efficient, uniform cleaning and accurate termination of precision workpieces.

CN122138640APending Publication Date: 2026-06-02HUNAN JIECHENG AUTOMATION TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HUNAN JIECHENG AUTOMATION TECH CO LTD
Filing Date
2026-03-06
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

Existing cleaning solutions cannot systematically perceive the surface contamination status of workpieces and lack differentiated cleaning strategies. This leads to a decoupling between cleaning energy configuration and material safety margin, making it difficult to achieve efficient cleaning of precision workpieces and easily causing local damage. The determination of when to terminate cleaning relies on human experience and lacks objective basis.

Method used

By generating a contamination feature map through multimodal contamination detection, and combining it with plasma discharge parameter configuration driven by material safety margin, a multi-path collaborative cleaning flow is established. A local enhancement compensation mechanism is introduced, and the optimal cleaning termination time is determined using the cleanliness convergence curve to achieve adaptive passivation treatment.

Benefits of technology

It achieves a systematic quantitative description of workpiece surface contamination and adaptive control of material sensitivity, improves the accuracy of parameter configuration and material protection capabilities in the cleaning process, and enhances the uniformity of cleaning effect and the accuracy of termination timing.

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Abstract

This invention discloses a water-based plasma jet cleaning method and apparatus. The method involves collecting multi-modal contamination detection data from the workpiece surface, analyzing the physicochemical properties of the contamination to generate a contamination characteristic spectrum, matching a pre-stored material specification library to generate a discharge safety margin coefficient, and then performing plasma discharge treatment on deionized water under its constraint to generate a plasma-activated water flow, establishing a water-based plasma composite cleaning domain. Multi-path collaborative cleaning flow is generated through decoupling and regulating the jet intensity and water-air ratio. The cleaning effect is monitored to identify residual deviation characteristics, extracting the schedulable margin in lightly contaminated areas to trigger a compensation mechanism, generating cleaning compensation parameters, and constructing an enhanced cleaning configuration. Based on the enhanced cleaning configuration, the cleanliness convergence curve is monitored, and the optimal cleaning termination time is determined by identifying the decreasing convergence slope. Adaptive passivation processing is then performed based on the cleanliness convergence curve, achieving closed-loop adaptive control throughout the entire process, including contamination perception, safety margin configuration, process compensation, and convergence termination.
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