Substrate delivery device with integrated power and data transmission

Abstract

A substrate delivery device includes: a base; a hinged arm connected to the base; and a power and data communication system distributed via the hinged arm, wherein the power and data communication system has a wireless power and data communication interface, the interface being wired via at least one rotary joint of a housing of at least one movable arm link of the hinged arm, the wireless power and data communication interface being configured as a contactless wireless communication interface via the at least one rotary joint.

Description

[0001] Cross-reference of related applications This application claims the benefit of U.S. Provisional Patent Applications No. 63 / 612,055 (filed December 19, 2023) and No. 63 / 660,187 (filed June 14, 2024), the entire disclosure of which is incorporated herein by reference. This application also claims the benefit of U.S. Provisional Patent Applications No. 63 / 581,512 (filed September 8, 2023) and No. 63 / 685,401 (filed August 21, 2024), the entire disclosure of which is incorporated herein by reference. Background Technology 1. Technical Field This invention relates generally to robotic systems, and more specifically to robotic conveying systems.

[0003] 2. Brief overview of relevant progress Automated processing systems, such as semiconductor processing systems, comprise multiple components that support the implementation of processes to achieve predetermined levels of quality and repeatability in semiconductor chip manufacturing. These semiconductor processing systems are also increasingly configured for greater throughput. For example, in semiconductor processing, vacuum systems are trending towards narrower or elongated designs. These narrow vacuum systems are taking up increasingly larger footprints, particularly in length, and if these systems are pressurized, the throughput of semiconductor production will be impacted by the time required for evacuation and purging. To maintain or achieve greater throughput, semiconductor processing equipment manufacturers are trending towards implementing automated maintenance and diagnostic procedures performed by the semiconductor processing equipment without vacuum loss within the vacuum system. These maintenance and diagnostic procedures may include replacing components of a process module using a substrate transport robot, transporting metrology kits (e.g., wafers or substrates with instruments) into the process module using a substrate transport robot, or any other suitable maintenance / diagnostic procedure.

[0004] It's important to note that metrology kits can be configured to inspect the condition of wafer chucks, spray heads, lifting devices, or any other suitable components of a process module. In other applications, metrology kits can also be used to calibrate wafer placement within semiconductor processing systems. Typically, conventional metrology kits are battery-powered and use Bluetooth. ®Alternatively, it may use a Wi-Fi network to communicate with an external host (e.g., outside the semiconductor processing system). Because the metering kits are battery-powered, their operation and communication must be configured for low power, which can limit the architecture of these battery-powered metering kits. In this respect, communication from the metering kits may be subject to radio frequency (RF) interference from other RF generating components within the semiconductor manufacturing facility's fab (fab).

[0005] As of this writing, best practices for automating substrate or wafer transport in a vacuum environment avoid placing wires (including wiring through the robotic arm of a substrate transport robot) and electronics in a vacuum. Wires and insulation, as well as the potting epoxy of electronics (and any non-metallic components), can release gases, introducing molecular contamination into semiconductor manufacturing processes in a vacuum environment. Typically, data transfer within or at rotary joints or shafts (e.g., in transport devices) is achieved using slip rings and / or hardwired connections.

[0006] To protect the wiring and electronics (within the atmospheric environment), the wiring must pass through at least a hermetically sealed feedthrough at the robot joints, where flexible cables are used. However, if the robot joints are configured for unrestricted rotation, flexible cables (e.g., hard-wired connections) cannot be used because they would restrict the rotation of the arm joints. Hard-wired connections (e.g., clock spring cables) do not allow for unlimited rotation of the axis. Clock spring cables also take up considerable space, especially when greater rotation is required. Hard-wired connections also impose additional torque loads on the axis, meaning a more powerful motor is needed to drive the axis containing the clock spring cable. Cables are also consumable components that can generate particulate matter over time.

[0007] Slip rings can be used to provide rotational degrees of freedom for robot joints; however, while slip rings are sufficient for power transmission, they can be unreliable for data communication at gigabits per second (Gbps) speeds. Although slip rings allow for infinite rotation of the axis, their use for data transmission is generally not recommended as they introduce noise into the signal, especially as the slip ring module ages. Slip rings contain brushes, which are wear-prone components with a finite lifespan and can generate significant amounts of particulate matter, which is not ideal for cleanroom operations.

[0008] Furthermore, when the robot arm is articulated, bending of the wires within the robot arm, such as in a hard-wired connection scheme, can lead to wire wear, and power and data transmission via slip rings may not provide adequate thermal management for the active electronics within the delivery arm of a substrate delivery robot.

[0009] Therefore, this disclosure resolves several of these problems. Attached Figure Description

[0010] The foregoing aspects and other features of this disclosure are described in the following description in conjunction with the accompanying drawings, wherein: Figure 1A-1I This is a schematic diagram of a substrate processing apparatus according to the present disclosure; Figure 2A-2H This is a schematic diagram of an exemplary substrate delivery device according to the present disclosure, which can be used in... Figure 1A-1I In any substrate processing device; Figure 3A-3P This is a schematic diagram of a portion of an exemplary substrate delivery device according to the present disclosure, which can be used for... Figure 1A-1I In any substrate processing device; Figure 3Q Based on this disclosure Figure 3C A schematic cross-sectional view of a portion of the rotating joint or shaft of a conveying device; Figure 3R Based on this disclosure Figure 3C An exemplary cross-sectional view of a portion of the rotating joint of the conveying device; Figure 3S Based on this disclosure Figure 3R A schematic plan view of a portion of the wireless data transmission module of the rotary joint shown. Figure 3T Based on this disclosure Figure 1A-1I A schematic cross-sectional view of a portion of the conveying device of the processing apparatus; Figure 3U Based on this disclosure Figure 3C An exemplary cross-sectional view of a portion of the rotating joint of the conveying device; Figures 4A-4F This is a schematic diagram of the partitioned arm linkage structure of the substrate transport device according to the present disclosure; Figure 5 Based on this disclosure Figures 4A-4F A schematic diagram of a part of the arm linkage structure; Figure 6 Based on this disclosure Figures 4A-4F A schematic diagram of a part of the arm linkage structure; Figure 7 , 7A 7B is in accordance with this disclosure. Figures 4A-4F A schematic diagram of each part of the arm linkage structure; Figures 8A-8C Based on this disclosure Figures 4A-4F A schematic diagram illustrating exemplary connections between the various parts of the arm linkage structure; Figure 9This is an exemplary illustration of the Gray code pattern of the encoder of the substrate delivery apparatus described herein according to this disclosure; Figure 10 It is an exemplary dial of an encoder for a substrate delivery apparatus as described herein according to this disclosure; Figure 11A-11C These are schematic diagrams of various portions of an exemplary substrate delivery apparatus according to the present disclosure, which can be used in... Figure 1A-1I In any substrate processing device; Figure 12 Based on this disclosure Figure 11A-11C A schematic diagram of a portion of the partitioned arm linkage structure of the substrate delivery device; Figure 13 Based on this disclosure Figure 11A-11C A schematic diagram of a portion of the partitioned arm linkage structure of the substrate delivery device; Figure 14 This is a schematic diagram of a portion of an exemplary substrate delivery device according to the present disclosure, which can be used for... Figure 1A-1I In any substrate processing device; Figure 15A and 15B This is a schematic diagram of a portion of an exemplary substrate delivery device according to the present disclosure, which can be used for... Figure 1A-1I In any substrate processing device; Figure 16 This is a schematic diagram of a portion of an exemplary substrate delivery device according to the present disclosure, which can be used for... Figure 1A-1I In any substrate processing device; Figures 17-19 This is a flowchart of an exemplary method according to this disclosure; Figure 20 It is based on various aspects of the disclosed embodiments. Figure 1A-1I An exemplary schematic diagram of a portion of the power and data communication system of an exemplary substrate delivery device; and Figure 21 This is a flowchart of an exemplary method according to the present disclosure. Detailed Implementation

[0011] The following detailed description is intended to help those skilled in the art to understand and is not intended to unduly limit the claims related to or relating to this disclosure in any way.

[0012] The following detailed description references various figures, where the same reference numerals indicate the same parts and features in various figures, regardless of whether a specific figure is referenced.

[0013] The word “each” as used in this article refers to a single item (i.e., the item) when referring to a single item, or each item when referring to multiple items. The words “a,” “one,” and “the” as used in this article all include “at least one” and “one or more,” and therefore do not restrict the nouns mentioned to their “singular” form.

[0014] Figure 1A-1I This is a schematic diagram of a substrate processing apparatus according to the present disclosure. Although the present disclosure will be described with reference to the accompanying drawings, it should be understood that the present disclosure can be implemented in many forms. Furthermore, any suitable size, shape, or type of element or material can be used.

[0015] This disclosure can provide one or more of power and communication for a substrate-transfer robotic arm, while addressing one or more of the aforementioned deficiencies.

[0016] This disclosure may provide a method for Figure 1A-1I Vacuum substrate transport apparatus 104 (which can also be used in atmospheric environments) of substrate processing devices 100A, 100B, 100C, 100D, 100E, 100F, and 100G. The substrate transport apparatus 104 is configured to operate at high process temperatures (e.g., about 70°C, about 100°C, about 150°C, or higher, according to the semiconductor processes described herein). Here, the substrate transport apparatus 104 may include a hybrid rotary sealing method, wherein a ferrofluidic seal is placed in a cooler location within the substrate transport apparatus 104 (e.g., away from the end effector and wrist joint, at temperatures of about 70°C or below), which improves the reliability of the substrate transport apparatus compared to conventional transport apparatuses. The wrist axis WX includes at least one vacuum isolation wall and is encapsulated with a rotor and a magnetic encoder for cleanliness and corrosion resistance (the magnetic encoder allows for higher operating temperatures of the substrate transport apparatus 104, such as the high process temperatures described herein). The structure of the wrist (and other rotary joints of the substrate transport apparatus) and arm linkage provides hydrogen resistance and mitigates / substantially eliminates electrostatic discharge.

[0017] As described herein, the portions of the mechanical joints (e.g., one or more of the shoulder joint 179S, elbow joint 179E, and wrist joint 179W, generally and / or collectively referred to as mechanical joints or rotary joints MJ) that house at least the motor stator and motor encoder share a common pressurized environment with the articulated arm 333 of the substrate delivery device 104 (e.g., see...). Figure 3A The vacuum or reduced-pressure environment in which it operates is sealed and isolated. The manner in which the various parts of the sealed mechanical joints affect the operation of the substrate delivery device 104 when exposed to high process temperatures. By employing the features of this disclosure, the exposure of active electronic components to a vacuum environment can be substantially eliminated or minimized. For example, this disclosure can provide a power bus and a high-speed data communication bus (see...). Figure 20 These buses can form a common (e.g., combined) bus or separate buses, which are distributed in one or more arms of the substrate delivery device 104 while maintaining a common pressurized environment.

[0018] Adjacent arm links can communicate electrically and / or data via one or more mechanical joints 179 using a Power and / or Data Communication Interface (WPDC, also referred to herein as a Wireless Data Transmission Module) located at a corresponding joint of one or more of the mechanical joints 179. The WPDC allows for unlimited rotation of the mechanical joints 179, may contain no vulnerable parts, may not generate particulate matter, and / or may be used for power and / or data transmission without introducing noise into the transmitted data signal. Compared to conventional slip ring and hard-wired connection schemes (e.g., clock spring cables), the WPDC provides better signal integrity and a longer service life. The WPDC can be a modular unit or sub-assembly, which can be built externally to the conveyor and installed as a modular unit within the conveyor at desired locations, such as at any or more of the mechanical joints 179.

[0019] The power distributed via the power bus can be direct current (DC) or alternating current (AC). The power and data communication system (PS) can be distributed via an articulated arm, wherein the power and data communication PDCS has at least one wireless power and / or data communication interface (WPDC), which is wired via at least one rotary joint (e.g., at least one joint located on each axis BSX, BEX, SX, EX, WX) of the housing of at least one movable arm link. The wireless power and / or data communication interface (WPDC) is configured as a contactless wireless communication interface via said at least one rotary joint. As described herein, the data communication and bus power network (PDCN) (e.g., a network of power and data communication systems comprised of the power and data communication system PDCS) is mounted on the articulated arm. The data communication and bus power network (PDCN) is distributed throughout the articulated arm, from the end joint (e.g., a mechanical joint MJ located on one or more axes SX, BSX) through the distal joint (e.g., a mechanical joint MJ located on the wrist axis WX), for example, see... Figure 3CThe wireless power and / or data communication interfaces (WPDCA, WPDCB, WPDCC) are provided. A data communication and bus power network (PDCN) is housed within the housing and extends through at least one rotating joint of the housing. The PDCN includes local control devices (e.g., transmitters, receivers, controllers, etc. of the substrate delivery device described herein) and sensors (e.g., encoders, substrate sensors, metering kit sensors, auxiliary device sensors, imaging / vision sensors, thermal sensors, displacement sensors, and other sensors described herein), respectively disposed on at least one movable link and at least one other movable arm link and end effector, connected via a network interface (e.g., the corresponding wireless power and / or data communication interface (WPDC) described herein), thereby enabling local, onboard, real-time control of at least one of the following: active thermal control of the end effector; kinematic movement of the substrate holding stage SHS articulated by one or more movable arm links of the articulated arm; substrate or process metering; imaging of at least a portion of the articulated arm using an onboard imaging sensor; and onboard health monitoring of the articulated arm.

[0020] As described herein, this disclosure provides a way to route power and communication components to electrical components (e.g., motors, motor encoders, power docks, communication docks, accessory components, etc.) located outside a vacuum environment, either within or connected to the arm, so that the power and communication components are unaffected by the vacuum environment and gas escape. Conductors (e.g., electrical wires and communication lines) and cooling pipes within the arm are fixed relative to the corresponding arm links, so that the conductors and cooling pipes do not bend relative to the hinged arm 333 due to the arm hinge connection. This extends the lifespan of the electrical conductors and cooling pipes and improves the reliability of the substrate delivery device 104.

[0021] At least the data communication provided by this disclosure can be achieved without mechanical contact with, for example, slip rings of the arm. This data communication is not limited by the use of slip rings and can support high bandwidth (gigabit or higher) data rates for high-speed (gigabit or higher) synchronous data transmission, enabling motion control of the arm and digital signal processing of the arm's electronics. Electrical transmissions (some of which may be high-current transmissions) can be achieved within the arm using slip rings, while data transmission bypasses the slip rings. In some portions of the articulated arm 333, power (e.g., electrical transmission) can also be transmitted without the use of slip rings, allowing power to be transmitted between pressurized and unpressurized environments, or between pressurized and unpressurized environments. In this way, this disclosure can provide the placement of sensors and / or actuators within or on the arm and end effector without exposing the electronics and / or cables of the sensors and / or actuators to a vacuum environment. Wireless power / data transmission between arm links and / or between arm links and the end effector enables one or more joints of the articulated arm 333 of the substrate delivery device 104 to rotate substantially indefinitely. The wireless power / data transmission of the disclosed embodiments can provide large / high-speed data bandwidth (e.g., about 1 gigabits per second or higher) and ultra-low latency (e.g., nanosecond level), thereby enabling direct driving of one or more joints of the articulated arm 333 and / or sensing of the substrate carried by the substrate delivery device 104.

[0022] This disclosure allows for the provision of a power and data extension dock (e.g., an interface or wireless docking station) on the arm wrist plate, on the end effector, or at any other suitable location on the arm. The docking station interacts with any suitable accessory that uses power and / or data communication. Such accessory devices include, but are not limited to, metering kits. When the metering kit receives power from the power extension dock and communicates through the docking station's data extension dock, the metering kit can receive substantially unrestricted power and is provided with high-speed data transmission, and is substantially unaffected by external radio frequency interference (e.g., caused by the short-range, high-bandwidth data communication described herein).

[0023] This disclosure provides a sensor solution for various types of sensor feedback, enhancing the performance of the substrate delivery device 104. The sensor features described herein are implemented using an application-dependent, modular, and flexible architecture. The substrate delivery device 104 may include all or some of the sensors described herein.

[0024] According to this disclosure, one or more of the following (as described herein) may be provided: a wireless power and / or data communication interface WPDC via at least one other rotary joint to at least one of at least one other arm link and an end effector is configured as a contactless wireless communication interface, wherein at least one rotary joint or at least one other rotary joint includes at least one wrist joint of an articulated arm connecting the end effector to one or more movable arm links; the contactless wireless communication interface is at least one of near-field wireless communication (as described herein) and short-range wireless communication (as described herein); the contactless wireless communication interface is configured for near-field wireless power and / or data communication, including optical communication, radio frequency communication, Wi-Fi communication, near-field communication, ultra-wideband communication, millimeter-wave communication, inductive communication, capacitive communication, resonant capacitor communication, and Bluetooth. ® Infrared and Zigbee ® (As described herein); a contactless wireless communication interface is configured for a communication distance of approximately 20 mm or less (as described herein); a wireless contactless power and / or data communication interface via another rotary joint forms a contactless communication power and / or data link between at least one of the other arm link and end effector and at least one movable arm link, the contactless communication link traversing a spatial gap (e.g., gap MAG) formed at the rotary joint between the movable arm link and at least one of the other arm link and end effector; the housing is configured to form a sealed air chamber internally (e.g., see...). Figure 3C (etc.), the sealed chamber houses the respective portions of the transmitter and receiver of the wireless communication power and / or data communication interface in a sealed atmosphere, which is sealed and isolated from the depressurized environment outside the housing (e.g., see Figure 3D-3G (e.g., 3L, 3P, etc.); and any other features described herein.

[0025] As described herein, this disclosure can provide active forced convection cooling for each arm joint via a shared common pressurized environment, which can cool the arm and electrical components (such as those described herein) located within the shared common pressurized environment.

[0026] Still referencing Figure 1A-1IThe present disclosure illustrates substrate processing apparatuses 100A, 100B, 100C, 100D, 100E, 100F, and 100G, such as semiconductor tool tables. Although semiconductor tool tables are shown in the figures, the features of the present disclosure described herein can be applied to any tool table or application employing a robotic arm. Processing apparatuses 100A, 100B, 100C, 100D, 100E, 100F, and 100G are shown with a clustered tool arrangement (e.g., a substrate holding stage connected to a central chamber); however, the processing apparatus can be a linearly arranged tool table or any suitable tool table. Apparatuses 100A, 100B, 100C, 100D, 100E, 100F, and 100G generally include an atmospheric front end 101, at least one vacuum loading lock 102, 102A, or 102B, and a vacuum back end 103. At least one vacuum loading lock 102, 102A, 102B can be connected to any suitable port or opening of the front end 101 and / or the rear end 103 in any suitable arrangement. For example, one or more loading locks 102, 102A, 102B can be arranged side-by-side in a common horizontal plane, such as... Figure 1B , 1D Visible in -1H. One or more load locks can be arranged in a grid pattern, such that at least two load locks 102A, 102B, 102C, 102D are arranged in rows (e.g., with spaced horizontal planes) and columns (e.g., with spaced vertical planes), as shown. Figure 1I As shown. One or more load locks can be as follows: Figure 1A The single in-line loading lock 102 is shown. At least one loading lock 102, 102E can be as follows: Figure 1C The arrangement shown is in a stacked, in-line configuration. It should be understood that although the load locks are illustrated as being located on the end 100E1 or face 100F1 of the transport chambers or transfer devices 125A, 125B, 125C, 125D, 125E, 125F, 125G (each transport chamber or transfer device has a frame TCF forming a sealed chamber configured to maintain a processing vacuum (e.g., high vacuum) therein), one or more load locks may be arranged on any number of sides 100S1, 100S2, ends 100E1, 100E2, or faces 100F1-100F8 of the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G. Each of at least one load lock may also include one or more wafer / substrate support planes (WRPs). Figure 1CIn the substrate support plane, the substrate is held on a suitable support within the respective loading lock; however, the tool table can have any suitable configuration. Components of each of the front end 101, at least one loading lock 102, 102A, 102B, and the rear end 103 can be connected to a controller 110, which can be part of any suitable control architecture, such as a cluster architecture control. The control system can be a closed-loop controller having a master controller, a cluster controller, and an autonomous remote controller, such as the controller disclosed in U.S. Patent No. 7,904,182, issued March 8, 2011, entitled “Scalable Motion Control System,” the entire disclosure of which is incorporated herein by reference. In other respects, any suitable controller and / or control system can be used.

[0027] Front end 101 typically includes a loading port module 105 and a micro-environment 106, such as a device front-end module (EFEM). The loading port module 105 can be a BOLTS (Board Opener to Tool Standard) interface conforming to SEMI standards E15.1, E47.1, E62, E19.5, or E1.9, for a 300 mm loading port, front-opening or bottom-opening box / chamber, or cassette. The loading port module can be configured as a 200 mm wafer / substrate interface, a 450 mm wafer / substrate interface, or any other suitable substrate interface, such as larger or smaller semiconductor wafers / substrates, flat panel displays, solar panels, photomasks, or any other suitable object. Although in Figure 1A , 1B Three loading port modules 105 are shown in 1D, 1E, 1F, 1G, and 1H, but any suitable number of loading port modules can be incorporated into the front end 101. Loading port modules 105 can be configured to receive substrate carriers or cassettes C from overhead transport systems, automated guided vehicles, personnel-guided vehicles, rail-guided vehicles, or any other suitable transport method. Loading port modules 105 can be connected to the microenvironment 106 via loading port 107. Loading port 107 allows the substrate to pass between the substrate cassette and the microenvironment 106.

[0028] The microenvironment 106 typically includes any suitable handling robot 108, which may incorporate one or more features of this disclosure as described herein. Robot 108 may be a track-mounted robot, such as those described in U.S. Patents 6,002,840 (issued December 14, 1999), 8,419,341 (issued April 16, 2013), and 7,648,327 (issued January 19, 2010), the entire contents of which are incorporated herein by reference. Robot 108 with respect to rear end 103 may be substantially similar to the robot described herein. The microenvironment 106 may provide a controlled clean area for transferring substrates between multiple loading port modules.

[0029] At least one vacuum loading lock 102, 102A, 102B may be located between and connected to the microenvironment 106 and the rear end 103. The loading port 105 may be substantially directly coupled to at least one loading lock 102, 102A, 102B or transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, wherein the substrate carrier C is evacuated to the vacuum of the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, and the substrate is directly transferred between the substrate carrier C and the loading lock or transport chamber. The substrate carrier C may act as a loading lock, such that the processing vacuum of the transport chamber extends into the substrate carrier C. As can be appreciated, when the substrate carrier C is substantially directly connected to the loading lock via a suitable loading port, any suitable transfer device can be located within the loading lock, or otherwise accessible to the carrier C, for transferring the substrate to and from the substrate carrier C. It should be noted that the term "vacuum" as used herein can refer to a high vacuum, such as 1 × 10⁻⁶. -5Torr or lower. At least one loading lock 102, 102A, 102B typically includes an atmospheric valve and a vacuum slit valve. The slit valves of loading locks 102, 102A, 102B (and for the processing stage 130) provide environmental isolation for evacuating the loading locks after loading the substrate from the atmospheric front end and for maintaining a vacuum in the delivery chamber when the loading locks are vented with an inert gas (e.g., nitrogen). As will be described herein, the slot valves of the processing devices 100A, 100B, 100C, 100D, 100E, 100F, and 100G may be located in the same plane, in different vertical stacking planes, or a combination of slot valves located in the same plane and slot valves located in different vertical stacking planes (as described above regarding the loading ports) to facilitate the transfer of substrates to at least processing stage 130 and loading locks 102, 102A, and 102B connected to transport chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G, and from at least processing stage 130 and loading locks 102, 102A, and 102B connected to transport chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G. At least one loading lock 102, 102A, 102B (and / or front end 101) may also include an aligner ALN for aligning the substrate reference marks to the location required for processing, or any other suitable substrate metrology device. The vacuum loading lock may be located in any suitable location of the processing apparatus and may have any suitable configuration.

[0030] The vacuum backend 103 typically includes transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, one or more processing stages 130, and any suitable number of transfer unit modules 104 (also referred to herein as substrate transport devices), which contain one or more handling robots that may include one or more features of this disclosure as described herein. The transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G may have any suitable shape and size, for example, conforming to SEMI Standard E72 Guide. The transfer unit modules 104 and one or more handling robots, which may be at least partially located within the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, are described below for transporting substrates between loading locks 102, 102A, 102B (or cassette C located at the loading port) and the respective processing stages 130. The transmission unit module 104 can be detached from the transmission chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G as a modular unit, making the transmission unit module 104 compliant with SEMI standard E72 guidelines.

[0031] Stage 130 can operate on a substrate using various deposition, etching, or other types of high-vacuum processes to form circuits or other desired structures on the substrate. Typical processes include, but are not limited to, thin-film processes using vacuum, such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation (e.g., ion implantation), metrology, rapid thermal processing (RTP), dry lift-off atomic layer deposition (ALD), oxidation / diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonding, and evaporation or other thin-film processes using vacuum pressure. Stage 130 is communicatively connected to transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G in any suitable manner (e.g., via a slot valve SV), thereby allowing substrates to be transferred from transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G to stage 130 and vice versa. The slot valves SV of transport chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G can be arranged to allow connection of dual processing stages (e.g., more than one substrate processing chamber located within a common housing) or side-by-side processing stages 130T1, 130T2, single processing stage 130S, and / or stacked process modules / loading locks. Figure 1C and 1I ).

[0032] It should be noted that when one or more arms of the transfer unit module 104 are aligned with a predetermined processing stage 130, transfer of substrates to and from the processing stage 130 and to the loading locks 102, 102A, 102B (or cassette C) connected to the transfer chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G can occur. According to this disclosure, one or more substrates can be transferred individually or substantially simultaneously to the respective predetermined processing stage 130 (e.g., as shown in the image). Figure 1B , 1D As shown in 1H, for example when picking up / placing a substrate from a side-by-side or tandem processing stage). The transfer unit module 104 can be mounted on the arm 143 (e.g., see 1H). Figure 1E , 1F , 1H) or linear carriage 144 (e.g., see Figure 1C The disclosures of, for example, those described in U.S. Patent No. 10,777,438 (titled “Processing Apparatus,” issued September 15, 2020) and International Patent Application No. PCT / US13 / 25513 (titled “Substrate Processing Apparatus,” filed February 11, 2013) are incorporated herein by reference in their entirety.

[0033] refer to Figure 2A and 2BAn exemplary boom arm configuration will be described, to which the transfer unit module 104 can be coupled. The boom arm 143 and the transfer unit module 104 can be collectively referred to as a substrate delivery device (however, if the transfer unit module 104 is used without the boom arm 143, then as described herein, the transfer unit module can be referred to as a substrate delivery device). Here, the boom arm 143 can be a single non-hinged linkage boom 220 (…). Figure 2A ), or articulated boom 222 ( Figure 2B ).

[0034] refer to Figure 2A A single non-hinged linkage boom 220 is rotatably connected to the frame or base 201 of the conveyor. The base 201 includes a drive section 200 configured to rotate the boom 220 about a boom rotation axis BSX. A transfer unit module 104 is connected to the distal end of the boom 143 (opposite to the boom rotation axis BSX). It should be understood that although the transfer unit module 104 is illustrated as having a SCARA arm 210 (or dual SCARA arms 210, 210A), the transfer unit module 104 can have any suitable arm configuration, including but not limited to the configurations described herein.

[0035] refer to Figure 2B The articulated boom 220 includes an upper boom link 220, the proximal end of which is rotatably connected to the frame or base 201 of the conveyor (at the boom rotation axis BAX). The other or distal end of the upper boom link 220 is rotatably connected at the proximal end of the front boom link 221 at the boom joint rotation axis BEX, wherein the transmission unit module 104 is connected to and supported by the front boom link 221 at its distal end. The drive unit is configured to drive rotation of the upper boom link 220 about axis BSX and the front boom link 221 about axis BEX in any suitable manner. For example, the upper boom link 220 may be driven by a motor of the drive section 20, while the front boom link 221 is driven to rotate (e.g., by a belt and pulley drive that makes the rotation of the front boom link 221 driven by the frame 201), but the front boom link 221 and the upper boom link 220 may also be driven by their respective motors of the drive section 200. Although the articulated boom 222 is illustrated as having two links, it should be understood that the articulated boom 222 may have any suitable number of links connected in series with each other. Suitable examples of booms that can be used with aspects of the disclosed embodiments are described in U.S. Patent Application No. 15 / 215,143, filed July 20, 2016, entitled “Substrate Processing Apparatus,” the entire disclosure of which is incorporated herein by reference.

[0036] Although Figure 2A and Figure 2BThe transfer unit module or substrate delivery device 104 is illustrated as having a SCARA arm 210 (or dual SCARA arms 210, 210A) configuration, but the transfer unit module 104 can have any suitable transfer arm configuration, including but not limited to the configurations described herein. For example, the transfer unit module 104 can have any other desired arrangement, such as a frog leg arm 216 ( Figure 2C Configuration, jumping frog arm 217 ( Figure 2D ) configuration, double symmetrical arms 218 ( Figure 2E Configuration, etc. As another example, see [reference needed]. Figure 2F The transmission unit module 104 can be configured as a transmission arm 219. The transmission arm 219 includes at least first and second articulated SCARA arms 210 and 210A, wherein each arm 210 and 210A includes an end effector 211 configured to hold at least two substrates S1, S2 side-by-side in a common transmission plane (each substrate holding position of the end effector 211 shares a common actuator for picking up and placing substrates S1, S2), wherein the spacing DX between substrates S1, S2 corresponds to a fixed spacing between the side-by-side substrate holding positions. Reference Figure 2F and 2GThe SCARA arm 210 (and arm 210A) includes an upper arm 213, a forearm 212, and an end effector 211, which are connected in series to form an articulated chain arm link. The end effector 211 described herein has at least one substrate holding stage 211S, each substrate holding stage 211S having a predetermined center point or end effector reference point 211C. The end effector 211 is configured to hold a substrate S (also referred to herein as a wafer) at the substrate holding stage 211S and to transport the substrate within the substrate processing apparatus. Here, at least one of the arm links 213, 212, and 211 is driven by a respective drive motor of a drive section. One or more of the arm links, such as the forearm 212 and / or the end effector 211, can be driven to rotate via any suitable belt and pulley drive (or other suitable transmission) to achieve the extension and retraction of the SCARA arm. Suitable examples of transmission arms that may be used in this disclosure can be found in U.S. Patents 6,231,297 (issued May 15, 2001), 5,180,276 (issued January 19, 1993), 6,464,448 (issued October 15, 2002), 6,224,319 (issued May 1, 2001), 5,447,409 (issued September 5, 1995), 7,578,649 (issued August 25, 2009), 5,794,487 (issued August 18, 1998), 7,946,800 (issued May 24, 2011), and 6,485,250 (issued November 26, 2002). U.S. Patent Application No. 13 / 293,717, filed November 10, 2011, entitled “Dual-Arm Robot”, and U.S. Patent Application No. 13 / 270,844, filed October 11, 2011, entitled “Coaxial Driven Vacuum Robot”, the entire contents of which are incorporated herein by reference. Suitable examples of belt / pulley drives that may be used with this disclosure are described in U.S. Patent Nos. 5,682,795 (issued November 4, 1997), 5,778,730 (issued July 14, 1998), and 11,201,073 (issued December 14, 2021), the entire contents of which are incorporated herein by reference.

[0037] refer to Figure 2H The diagram illustrates another transmission unit module 104. Figure 2HThe transmission unit module, like other transmission unit modules described herein, can be connected to boom 143 (e.g., see...). Figure 1H , 2A (and 2B), so that it can be transported by boom 143; it can be connected to linear carriage 144 (e.g., see 2B). Figure 1G ), so that it can be conveyed by linear carriage 144; or it can be fixed to the frame TFC of conveying chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G (e.g., Figure 1A-1I (as shown) (or the frame of the micro-environment 106). Here, the transmission unit module 104 includes a frame 266F to which the turret 266 is rotatably connected for rotation about the turret rotation axis TAX. The drive section 200 includes a turret driver 200R disposed on the turret rotation axis TAX for driving the turret 266 to rotate in the direction T3. The turret 266 includes transmission arm supports 270A and 270B extending from opposite sides of the turret 266, with each transmission arm 210, 210A, 216, 217, and 218 connected to these two transmission arm supports. The transmission arm supports 270A and 270B are spaced apart from each other such that the transmission arms are supported by the turret 266 in a side-by-side arrangement, wherein each of the side-by-side transmission arms includes an end effector 211 configured to hold at least one substrate side-by-side in a common transmission plane, wherein the spacing DX between substrates S1 and S2 corresponds to a fixed spacing between the side-by-side substrate holding positions (e.g., similar to the spacing between the substrates S1 and S2 in the micro-environment 106). Figure 2F The manner in which it is described, and the entire disclosure of U.S. Patent No. 10,134,621, issued November 20, 2018, are incorporated herein by reference.

[0038] The turret 266 may include one or more linear motors 200LM connected to respective transfer arm supports 270A, 270B for moving the respective transfer arm supports 270A, 270B along directions 271A, 271B to achieve adjustment of distance DX (or independent adjustment of respective distances DX1, DX2 from axis TAX) to take into account variability between substrate holding stages and to automatically center the independent wafers relative to the transfer arms held on the respective transfer arm supports 270A, 270B. Here, turret 266 provides individual or independent Cartesian coordinate adjustments for each respective transfer arm support 270A, 270B (and the respective transfer arms connected thereto) to maintain substrate alignment and reduce substrate change time, because the position correction achieved by Cartesian coordinate (e.g., XY) positioning of the end effector 211 of at least one transfer arm connected to transfer arm support 270A is performed in parallel with the Cartesian coordinate positioning of the end effectors 211, 211DS, 211DE, 211DT, 211DQ of at least one other transfer arm connected to transfer arm support 270B. Each transfer arm support 270A, 270B may also include a respective Z-axis driver for moving the corresponding transfer arm held on that transfer arm support 270A, 270B independently of the Z-axis movement of the corresponding transfer arm held on the other transfer arm support 270A, 270B. Another Z-axis driver may be provided for moving turret 266 and any transfer arms connected thereto as a whole in the Z-direction.

[0039] The drive unit 200 can be a distributed drive unit, wherein the drive motors 200M1, 200M2, 200M3A, and 200M3B of the drive unit 200 are distributed within the arm 333, for example at the mechanical joint MJ, or otherwise within the arm links 213 and 212 of the arm 333; however, the drive unit 200 can also be a coaxial drive unit (see [link to relevant documentation]). Figure 3T The boom drive motors are housed in the housing 200H of the drive section 200, wherein each motor is connected to a corresponding boom link 213, 212, 211 for transmission via any suitable drive mechanism (e.g., direct drive of the drive shaft, see [link]). Figure 3C and Figure 3T The motor 200M1), belt and pulley drive devices BPT, BPTE (see Figure 3T (and / or any other suitable transmission device) drives the rotation of the corresponding arm links 213, 212, 211.

[0040] refer to Figures 3A-3CAn exemplary vacuum substrate delivery device 104 is illustrated as having a base or frame 201 and a hinged arm 333 connected to the base 201. As will be described in more detail below, the hinged arm 333 is connected to the base 201 via an end-effector (rotational) joint MJ (e.g., one or more of axes such as SX, BSX), around which the hinged arm 333 extends. The hinged arm 333 has one or more movable arm links 213, 212, and end effectors 211, 211A, 211B, which are connected to the one or more movable arm links 213, 212 at a distal (rotational) joint MJ (e.g., such as at a wrist axis WX). Both the end-effector and distal joints are rotational joints MJ, and the end effectors 211, 211A, 211B have a substrate holding position SHS thereon.

[0041] At least one movable link 213, 212 of one or more movable arm links is connected to housings 370-375, 200H, which includes at least one rotary joint MJ having rotation axes SX, BSX, EX. The at least one movable link 213, 212 is hinged about the rotary joint to achieve the extension and retraction of the articulated arm 333. The at least one movable link 213, 212 has a link housing 370-375, which includes at least another rotary joint MJ having corresponding rotation axes EX, WX. Another arm link 212 and at least one of end effectors 211, 211A, 211B are rotatably connected to at least one movable link 213, 212 through the other rotary joint.

[0042] The power and data communication system (PDCS) is distributed via articulated arms 333. The PDCS has a contactless wireless data transmission or communication module 180 at at least one or at least one other rotary joint MJ. The contactless wireless data communication module 180 has a module housing 2010 that houses transmitter and receiver printed circuit boards 250 and 251 (at least shown) of a printed circuit board pair. Figure 3UA contactless wireless communication interface WPDC is formed at and through at least one or more rotating joints MJ, which decouples the rotation of the at least one or more rotating joints MJ from the constraints of the power and data communication system PDCS, thereby making the rotation of the at least one or more rotating joints MJ substantially infinite. The transmitter and receiver printed circuit boards 250, 251 of the printed circuit board pair are aligned with predetermined alignment tolerances to provide a transmission rate of the contactless wireless data communication interface WPDC in the gigabytes per second (Gbps) range throughout the substantially infinite rotation.

[0043] As described herein, the exemplary vacuum substrate delivery device 104 may include one or more of the following, individually or in any suitable combination thereof, and / or in any suitable combination with other features described herein: a contactless wireless data communication interface WPDC with a transmission rate of up to about 3.125 The module housing 2010 has a static housing component 2000 and a dynamic housing component 205 connected to each other. One of the transmitter or receiver printed circuit boards 250, 251 of the printed circuit board pair is housed in the static housing component 2000, while the other transmitter or receiver printed circuit board 250, 251 of the printed circuit board pair is housed in the dynamic housing component 205. The static housing component 2000 is fixedly connected to at least one of the housing 200H and the connecting rod housings 370-375, and the dynamic housing component 205 has a rotor 2100 that rotates about a corresponding rotation axis SAX of at least one or at least another rotating joint MJ relative to the static housing component 2000 during the entire rotation of at least one or at least another rotating joint MJ. The other transmitter or receiver printed circuit board 250, 251 of the printed circuit board pair is mounted to the rotor 2100 in the dynamic housing component 205 so that during the entire rotation of at least one or at least another rotating joint MJ... During the process, relative to one of the transmitter or receiver printed circuit boards 250, 251 stationary in the static housing component 2000, the other transmitter or receiver printed circuit board 250, 251 rotates as a whole with the rotor 2100 about the corresponding rotation axis SAX of at least one or at least another rotary joint MJ; throughout the rotation of at least one or at least another rotary joint MJ, the other transmitter or receiver printed circuit board 250, 251 in the printed circuit board pair is held by the rotor 2100 aligned with one of the transmitter or receiver printed circuit boards 250, 251 in the printed circuit board pair by a predetermined alignment tolerance, which is substantially decoupled from the alignment and runout tolerances of at least one or at least another rotary joint MJ exceeding the predetermined alignment tolerance; the rotor 2100 is positioned relative to the static housing component 2000 by a deep groove radial ball bearing 215; the deep groove radial ball bearing 215 defines the predetermined alignment tolerance of the transmitter and receiver printed circuit boards 250, 251 in the printed circuit board pair.The module housing 2010 has a static housing component 2000 and a dynamic housing component 205 connected to each other. One of the transmitter or receiver printed circuit boards 250, 251 of the printed circuit board pair is housed in the static housing component 2000, while the other of the transmitter or receiver printed circuit boards 250, 251 is mounted to the rotor 2100 of the dynamic housing component 205. An hermetically sealed isolation wall HSIW separates the rotor 2100 from the static housing component 2000, wherein the hermetically sealed isolation wall HSIW is configured to allow data transmission between the transmitter and receiver printed circuit boards 250, 251 of the printed circuit board pair; and a flexible shaft coupling 260, which is located between the rotor 2100 of the dynamic housing component 205 and the output shaft 290 of at least one rotary joint MJ or at least another rotary joint MJ, and connects the rotor 2100 of the dynamic housing component 205 to the output shaft 290 of at least one rotary joint MJ or at least another rotary joint MJ.

[0044] The base 201 can be connected to the frame of the substrate processing apparatus (e.g., the frame of the delivery chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G). The articulated arm 333 has an end or shoulder (rotational) joint 309 (e.g., located at the shoulder axis SX) about which the articulated arm 333 rotates and extends. The articulated arm 333 also includes at least one movable arm link 213, 212 and at least one end effector 211A, 211B connected to at least one movable arm link 213, 212. Here, the articulated arm 333 is illustrated as a SCARA arm extending from the end joint 309 about which it rotates and extends, but the arm can have any suitable configuration, such as those described herein. The SCARA arm has more than one arm link 213, 212 and at least one end effector 211A, 211B attached thereto. Each arm link 213, 212 is connected in series with end effectors 211A, 211B at the distal end of the SCARA arm. At least one movable arm link of the SCARA arm includes an upper arm link 213 and a forearm link 212. The proximal end of the upper arm link 213 is rotatably connected to the base 201 at the shoulder joint 309. The proximal end of the forearm link 212 is rotatably connected to the distal end of the upper arm link 213 at the elbow joint 310. At least one end effector is rotatably connected to the distal end of the forearm link 212 at the wrist joint 311. At least one end effector 211A, 211B is illustrated in connection with... Figure 2F The end effector 211DS consists of two end effectors 211A and 211B that are substantially similar; however, the at least one end effector may have any suitable configuration. Each end effector 211A and 211B includes at least one substrate holding stage SHS located thereon.

[0045] At least one movable arm link 213, 212 has a housing 213H, 212H, which includes at least one rotary joint (e.g., a corresponding one of shoulder joint 309 and elbow joint 310, with elbow joint 310 distal to shoulder joint 309) having a rotation axis. The at least one movable arm link 213, 212 is hingedly rotated about this rotary joint to achieve extension and retraction of the hinged arm 333. As will be described in more detail below, each housing 213H, 212H is an assembly formed by housing components 370-375, which are sealed to maintain a sealed atmosphere within each housing 213H, 212H, which is inside a vacuum within a sealed chamber (e.g., delivery chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G). The outer casings 213H and 212H are configured such that at least one movable arm link 213, 212 forms a pressure vessel (as described herein and as...). Figure 3C As shown), its axis of rotation (e.g., the axis of rotation of the shoulder and elbow joints) extends from the pressure vessel. Figure 3C As shown, the outer casings 213H and 212H are at least partially depressurized (see pressure vessels or pipelines PT1-PT3) such that the walls 213W and 212W of the depressurized portions of the outer casings 213H and 212H are in pressure equilibrium within the wall thickness WTH range (e.g., the vacuum pressure on one side of the walls 213W and 212W is substantially the same as the vacuum pressure on the other side of the walls 213W and 212W). The depressurized portions of the outer casings 213H and 212H are configured to be commensurate with the static and dynamic loads applied to at least one movable arm link 213 and 212 by the corresponding static and dynamic operating conditions of the articulated arm 333, and are unaffected by differential pressure loads.

[0046] The sealing housing components 370-375 of the respective outer shells 213H and 212H are interconnected via at least one mechanical joint MJ to form a sealed interface (see...). Figure 3B The sealing atmosphere communicates through the sealing interface between each sealing housing component of the housing 213H, 212H and each other sealing housing component (e.g., the sealing housing components share a common pressurized environment). One or more sealing housing components 370-375 (e.g., part of the housing constituting the corresponding arm link of the arm) are configured to form a sealing gas chamber within the corresponding sealing housing component (e.g., see...). Figure 3B , 3C (e.g., 3P, etc.), this sealed chamber houses the corresponding components (as described herein) of the transmitter and receiver of a contactless communication power and / or data link in a sealed atmosphere that is sealed and isolated from the depressurized environment outside the housing. Figure 3BAs can be seen, the sealed interface divides at least one movable arm link 213, 212 in two between the end portions 370, 372, 373, 375 of at least one movable arm link 213, 212 and another end portion 370, 372, 373, 375. Figure 3B As can also be seen, the sealed interface divides the outer wall of the outer shell 213H, 212H or the outer shell 213W, 212W into two parts. Figure 3C An exemplary schematic diagram of the sealed communication between each housing component is provided, wherein a pressurized environment within the sealed atmosphere (compared to a vacuum or depressurized environment in the chamber in which the substrate transfer arm is housed) extends from the base 201 to the wrist housing component 375 with a minimized volume, thereby minimizing the exposure of the sealed boundary of the sealed atmosphere to a vacuum environment. As can be appreciated, when a ferrofluid seal FFS is used between the drive shafts 200M1D, 200M2D and the corresponding motor housings, at the shoulder axis SX and elbow axis EX, the motor stator and motor rotor (see...) Figure 3B Both can be placed in an atmospheric environment. For example, at the wrist axis WX, when no ferrofluid seal is used, the stator is isolated from the vacuum by an isolation wall (as described herein), and the rotor is located in a vacuum environment.

[0047] At least one sealed housing component 370, 372, 373, 375 is an end portion or coupling of at least one movable arm link 213, 212. At least one sealed housing component 370, 372, 373, 375 accommodates at least one rotary joint 309, 310, 311 (or at least a portion thereof), wherein at least one rotary joint 309, 310, 311 is contained within at least one sealed housing component 370, 372, 373, 375 of at least one movable arm link 213, 212. See also, for example, [reference needed]. Figures 4A-4EThe movable arm links 213 and 212 are reconfigurable arm links 213R and 212R, which have modular composite arm link housings or shells 213H and 212H, formed by link housing modules rigidly connected to each other. As will be described in more detail herein, the rigidly connected link housing modules include end couplings 370, 372, 373, and 375 (also referred to herein as link housing end modules or shell components), which are connected by at least one central arm segment 371 and 374 (also referred herein as interchangeable link housing extension modules or extruded arm housing components), which has predetermined features for determining the length OAL of the movable arm links 213 and 212. According to this disclosure, at least one central arm segment 371, 374 is optional for connection to end couplings 370, 372, 373, 375, and forms reconfigurable arm links 213R, 212R from multiple different central arm segments (interchangeable link housing extension modules) 371A1-371An, 374B1-374Bn, each central arm segment having different corresponding predetermined features for determining corresponding different lengths of movable arm links 213, 212, thereby selectively configuring modular composite arm link housings 213H, 212H and reconfiguring arm links 213R, 212R from multiple predetermined arm link lengths OALn to a predetermined arm link length OAL (each different length OALn corresponds to a different length CAL1-CALn of different central arm segments 371A1-371An, 374B1-374Bn).

[0048] As an example, each of the upper arm link 213 and the forearm link 212 is a modular arm link, each having a respective central arm segment 371, 374 and a respective end coupling 370-375. For example, the upper arm link 213 includes a proximal end coupling 370 that forms the proximal end 213E1 of the upper arm link 213. The central arm segment 371 is connected to the proximal end coupling 370 in any suitable manner, such as by any suitable removable fastener. The distal end coupling 372 is connected to the central arm segment 371 opposite to the proximal end coupling 370, thereby forming the distal end 213E2 of the upper arm 213. Similarly, the forearm link 212 includes a proximal end coupling 373 that forms the proximal end 212E1 of the forearm link 212. The center arm segment 374 is connected to the proximal end coupling 370 in any suitable manner, such as using any suitable removable fastener. The distal end coupling 375 is connected to the center arm segment 374 opposite to the proximal end coupling 373, thereby forming the distal end 212E2 of the forearm link 212.

[0049] As described herein, the central arm segments 371, 374 have a closed cross-section (e.g., a closed box shape). For example, the central arm segments 371, 374 include an integral tubular frame 410F, which can have any suitable cross-section. Figures 4A-4E In the example shown, the tubular frame 410F has a rectangular cross-section; however, its cross-section can be square, circular, oval, I-beam shaped, slotted C-shaped, or U-shaped, or any combination thereof. The central arm segments 371, 374 are mechanically fastened to each of the end couplings 370, 372, 373, 375, thereby forming the modular composite arm link housings 213H, 212H. The central arm segments 371, 374 can be mechanically fastened to each of the end couplings 370, 372, 373, 375 via mechanical fastener joints (including removable mechanical fasteners described below) to form the modular composite arm link housings 213H, 212H.

[0050] The tubular frame 410F includes end flanges 540 and 541 configured to connect any one of end couplings 370, 372, 373, and 375 to the tubular frame 410F. Flanges 540 and 541 may be integrally formed with the tubular frame 410F or connected to the tubular frame 410F in any suitable manner. For example, flanges 540 and 541 may be forged, cast, or molded together with the tubular frame 410F; however, flanges 540 and 541 may also be connected to the tubular frame by welding, mechanical fasteners, adhesives, friction fits (e.g., shrinkage fits, press fits, etc.), clamps, or any other suitable manner. End flanges 540 and 541 may include locating features (e.g., holes 545 and slots 546), and end couplings 370, 372, 373, and 375 may include mating locating features (e.g., pins 547 or other protrusions that engage with the locating features of end flanges 540 and 541—see Figure 5 (c) These positioning features orient / position each end coupling 370, 372 (or end couplings 373, 375 relative to the forearm link 212) of the upper arm link 213 to the center arm segment 371 (or center arm segment 374 relative to the forearm link 212) and relative to each other in at least two degrees of freedom. The positioning features and mating positioning features can be asymmetrical, thereby providing error-proofing to the connection (e.g., asymmetrical positioning features significantly prevent assembly errors when the end couplings are connected to the corresponding center arm segments). See also... Figure 8AThe positioning features may include protrusions 4100 and grooves 4110 formed in the central arm segments 371, 374 and the end couplings 370, 372, 373, 375, wherein the protrusions 4100 and grooves 4110 are configured to position the end couplings 370, 372, 373, 375 relative to the respective central arm segments 371, 374 in predetermined positions. For example, the central arm segments 371, 374 may include grooves 4110, and the end couplings 370, 372, 373, 375 may include protrusions 4100, wherein the grooves 4110 receive the respective protrusions 4100 to position the end couplings 370, 372, 373, 375 relative to the respective central arm segments 371, 374 in predetermined positions. The end couplings may include grooves and the central arm segments may include protrusions. The grooves and protrusions can be continuous and extend around the entire peripheral edge of the respective end coupling and the central arm segment; however, they can also be discontinuous, extending around a predetermined portion of the peripheral edge of the respective end coupling and the central arm segment. The protrusions and grooves can mate with one or more pins / holes / slots such that when the grooves and protrusions position the end coupling relative to the central arm segment in a predetermined position, the pins / holes / slots define the directional assembly orientation of the end coupling relative to the central arm segment (e.g., which surface of the end coupling is the top, bottom, etc.). End couplings 370, 372, 373, 375 can be connected to the respective central arm segments 371, 374 without positioning features, wherein the end coupling and central arm segment assemblies are secondary-machined to achieve predetermined dimensional tolerances from one end coupling to the other.

[0051] End flanges 540 and 541 also include fastener connectors 560-563, and end couplings 370, 372, 373, and 375 include mating fastener connectors 560A-563A. These connectors together enable connection of end couplings 370, 372, 373, and 375 to center arm segments 371 and 374. For example, fastener connectors 560-563 and mating fastener connectors 560A-563A may be in the form of threaded holes and orifices into which bolts / screws can be inserted, or in the form of any other removable fastener system. See also... Figure 8B As described herein, the figures illustrate that end couplings 370, 372, 373, and 375 are connected to center arm segments 371 and 374 via clamps 4200, wherein each clamp simultaneously engages both end couplings 370, 372, 373, and 375 and center arm segments 371 and 374, thereby forming a compression connection between the end couplings 370, 372, 373, and 375 and the center arm segments 371 and 374. See also... Figure 8CAs described herein, the figures illustrate the connection of end couplings 370, 372, 373, and 375 to center arm segments 371 and 374 via frictional fits (e.g., contraction fits, press fits, etc.). The protrusions 4300 on the end couplings 370, 372, 373, and 375 frictionally engage with the grooves 4310 (or their inner or outer surfaces) on the center arm segments 371 and 374 (and vice versa), thereby connecting the end couplings 370, 372, 373, and 375 to the center arm segments 371 and 374. The grooves 4310 and protrusions 4300 can be substantially similar to the grooves 4110 and protrusions 4100 described above, except that they have a frictional fit (also known as a press fit or interference fit, which refers to the fastening between two parts through friction after they are forcibly pushed together—there is no gap between the assembled parts) Figure 8C ), rather than a sliding fit (e.g., the end coupling and the center arm section can easily slide relative to each other during assembly—there is a gap between the assembled parts) (e.g. Figure 8A (As shown).

[0052] The central arm segments 371, 374 may have a length CAL, which, together with the corresponding end couplings 370, 372, 373, 375, defines the total length OAL (from joint center to joint center - see [link]) of the corresponding upper arm link 213 or forearm link 212. Figure 4C The articulated arm 333 (and other arms described herein) can be constructed / reconstructed by changing the length CAL of the central arm segments 371, 374. As described herein, the central arm segments 371, 374 can be manufactured to have different predetermined lengths CAL, CAL1-CALn. Therefore, each central arm segment 371, 374 can be selected from a plurality of central arm segments 371A1-371An, 374B1-374Bn, where “n” is an integer representing an upper limit on the number of central arm segments. The lengths CAL1-CALn of each optional central arm segment 371A1-371An, 374B1-374Bn may differ from the length of another optional central arm segment 371A1-371An, 374B1-374Bn. Here, for installation in the corresponding upper arm link 213 or forearm link 212, the selection of optional arm segments 371A1-371An, 374B1-374Bn, together with the corresponding end couplings 370, 372, 373, 375, defines the variable length of the upper arm link 213 or forearm link 212 (i.e., achieved by selecting the center arm segments 371A1-371An, 374B1-374Bn). As can be appreciated, by selecting the optional center arm segments 371A1-371An, 374B1-374Bn, the total length OAL of one or more of the upper arm link 213 and forearm link 212 can be increased or decreased.

[0053] Also refer to Figure 7A One or more of the central arm segments 371, 374 may be telescopic central arm segments 510T (e.g., in a manner similar to a segmented optical telescope, where the individual arm segments of the telescopic arm slide relative to each other to change length). The telescopic central arm segment 510T includes a first frame portion 510T1 and a second frame portion 510T2. The shape and dimensions of the first frame portion 510T1 are designed to receive the second frame portion 510T2 in a sliding fit, such that either the first frame portion 510T1 or the second frame portion 510T2 slides linearly in the longitudinal direction relative to the other of the first frame portion 510T1 or the second frame portion 510T2, thereby increasing or decreasing the length CAL of the telescopic central arm segment 510T. The telescopic central arm segment 510T may include any suitable removable or non-removable fasteners 4000 (e.g., screws, bolts, pins, clips, welds, etc.) to lock the movement of the first frame portion 510T1 relative to the second frame portion 510T2, thereby setting / fixing the length CAL of the telescopic central arm segment 510T. If the fasteners are removable, the length of the arm link can be adjusted as needed to accommodate additional or removed substrate processing modules or transfer chamber sections (e.g., the reach of the arm can be increased or decreased as needed).

[0054] refer to Figure 7B One or more of the central arm segments 371, 374 can be segmented arm segments 510S, wherein each segment 4020 has a fixed length CAS and is connected to each other in an adjacent manner (e.g., end-to-end), such that when connected end-to-end, each segment has the length CAL of the central arm segments 371, 374. The fixed length CAS of different segments 4020 can be the same, but the fixed lengths of each segment 4020 can also be different.

[0055] The center arm segments 371, 374, 371A1-371An, 374B1-374Bn of different lengths can be manufactured from any suitable material and in any suitable manner, as described in the text. For example, each of at least one interchangeable center arm segment 371, 374 and several different interchangeable center arm segments 371A1-371An, 374B1-374Bn has a corresponding box-shaped cross section 598, and is characterized in that each of the interchangeable center arm segments 371, 374 and several different interchangeable center arm segments 371A1-371An, 374B1-374Bn has a different corresponding length CAL, CAL1-CALn.

[0056] The box-shaped cross-section 598 provides the tubular shape of the tubular frame 410F and facilitates the manufacture of the central arm segments 371, 374, 371A1-371An, 374B1-374Bn at a lower cost and / or in a higher-volume production manner. For example, the central arm segments 371, 374, 371A1-371An, 374B1-374Bn can be manufactured by extrusion or casting (e.g., forming an extrusion with the box-shaped cross-section 598), thereby reducing machining requirements (e.g., compared to conventional arm links machined from blanks). Other possible manufacturing methods include, but are not limited to, additive manufacturing, conventional machining, folding and welding sheet metal, forging, and injection molding. The tubular form of the tubular frame 410F can be achieved through the aforementioned manufacturing processes, which produce an extrusion with an integral box-shaped cross-section 598, which has significantly higher stiffness compared to conventionally machined arm links. This more rigid box-shaped cross section 598 allows for longer arm lengths and enables the fabrication of tubular frames 410F with thinner sidewalls 510W, a thickness that conventionally machined arm links cannot achieve. This reduces the weight of the arm links and can increase the operating speed of the substrate delivery device 130.

[0057] The dimensions and shape of the corresponding box-shaped cross-section 598 can be designed to correspond to different corresponding lengths CAL, CAL1-CALn, so as to maintain a predetermined stiffness (end-to-end) for each different interchangeable center arm segment 371, 371A1-371An, 374, 374B1-374Bn. For example, regarding the predetermined stiffness, as the lengths CAL, CAL1-CALn of the center arm segments 371, 371A1-371An, 374, 374B1-374Bn increase, the thickness THK of one or more walls 510W of the box-shaped cross-section 598 (…) Figure 5 E) The thickness THK of one or more walls 510W can gradually decrease along their respective lengths CAL, CAL1-CALn, with the wall being thickest at the proximal end of the arm link (relative to the shoulder axis SX) and thinnest at the distal end of the arm link (relative to the shoulder axis SX) (e.g., for arm link 212, the wall thickness can be greatest near the elbow axis AX and thinnest near the wrist axis WX). For example, reinforcing ribs can be formed in the box-shaped cross-section 598 during extrusion. The material of at least one interchangeable center arm segment 371, 374 and each of several different interchangeable center arm segments 371A1-371An, 374B1-374Bn can have a higher stiffness (spring modulus) than the material of the end couplings 370, 372, 373, 375.

[0058] Modular boom linkage structures simplify the manufacturing of boom linkage ends. For example, in conventional boom linkages, the boom linkage ends (to which the boom pulleys and pulley shafts connect) and the central boom section are machined from a single piece of blank as a whole. According to this disclosure, the modular form of the boom linkage allows for separate manufacturing techniques for the end couplings 370, 372, 373, 375 and the central boom sections 371, 374, 371A1-371An, 374B1-374Bn. For example, while the central arm segments 371, 374, 371A1-371An, 374B1-374Bn can be extruded (or manufactured using other methods described herein), the end couplings 370, 372, 373, and 375 can be manufactured by casting, forging, additive manufacturing, conventional machining, and injection molding. This allows the end couplings 370, 372, 373, and 375 to be cast or forged in a near-net-shape manner (i.e., the initial production of the end couplings is very close to the final (net) shape of the end couplings, reducing the need for surface finishing), thereby reducing the amount of machining and cost of the end couplings 370, 372, 373, and 375, and consequently reducing the overall cost of the substrate conveying device 130. End couplings 370, 372, 373, and 375 can be provided as pre-assembled / manufactured arm joints 4700, wherein at least a portion of a drive component (e.g., at least one pulley of one or more of drive components 490, 492, 493, 494, and 495) has been pre-installed in the pre-assembled arm joint 4700. Pre-assembled arm joints 4700 can reduce manufacturing costs and shorten delivery time for transport arm assemblies.

[0059] One or more of the center boom segments 371, 374, 371A1-371An, 374B1-374Bn and end couplings 370, 372, 373, 375 may be made of metallic components, such as aluminum, stainless steel, Inconel, or other metallic alloys, or any other suitable material. One or more of the center boom segments 371, 374, 371A1-371An, 374B1-374Bn and end couplings 370, 372, 373, 375 may be made of any suitable material, including non-metallic materials such as, but not limited to, ceramics, polymers, composite materials, and carbon fiber. As described herein, one or more of the central arm segments 371, 374, 371A1-371An, 374B1-374Bn and end couplings 370, 372, 373, 375 can be manufactured using mass production methods (e.g., molding, casting, forging, extrusion, etc.) to achieve near-net-shape or rough-shape forms (rough-shape forms require more extensive secondary machining operations compared to near-net-shape casting, forging, molding, etc.). It should be noted that the interior of one or more of the central arm segments 371, 374, 371A1-371An, 374B1-374Bn and end couplings 370, 372, 373, 375 can be forged, cast, etc., to achieve near-net-shape forms, while the exterior can be forged, cast, etc., to achieve rough-shape forms. Secondary machining operations may include, but are not limited to, conventional machining, cutting, grinding, and electromagnetic discharge machining. Figures 5-7 The illustration shows an example of an arm component with shaped surfaces (e.g., cast, forged, extruded, etc.) and machined surfaces / features. Figure 5 The illustrations show shaped (e.g., near-net-shape or rough-shape) end couplings 370, 373 and corresponding finished end couplings 370, 373 with machined (using the methods described herein) surfaces / features. Figure 6 The illustrations show shaped (e.g., near-net-shape or rough-shape) end couplings 372, 375 and corresponding finished end couplings 372, 375 with machined (using the methods described herein) surfaces / features. Figure 7 The illustration shows shaped (e.g., near-net-shape or rough-shape) center arm segments 371, 374 and corresponding finished center arm segments 371, 374 with machined (using the methods described herein) surfaces / features.

[0060] like Figures 4A-4CAs can be seen, the upper arm link 213 and the forearm link 212 each have their own height AH. The height AH1 of the forearm link 212 may be less than the height AH2 of the upper arm link 213 (and vice versa), although the height AH1 of the forearm link 212 may also be substantially the same as the height AH2 of the upper arm link 213. The respective heights AH1 and AH2 may depend on the number of pressure vessels or pressure pipes PT1-PT3 extending through the arm links (as described herein—see Figure 3B , 3C (and 4E), or depending on the position of the arm link in the tandem arm link (e.g., where the height of the arm link decreases as it moves away from the shoulder axis SX).

[0061] Refer again Figures 3A-3C The delivery arm may include at least one end effector 211A, 211B (also referred to herein as a substrate holder). For illustrative purposes, two end effectors 211A, 211B are shown in the figures, but as described herein, the delivery arm may have any suitable number of end effectors, each with any suitable structure for holding one or more substrates. Each end effector 211A, 211B is rotatably connected to a joint at a common end of the forearm link 212, such that each end effector 211A, 211B rotates relative to the forearm link 212 about the joint or the common axis of rotation formed therefrom (e.g., see wrist axis or joint WX).

[0062] Refer again Figures 3A-3C 3H and 4E, the outer housings 213H and 212H of at least one movable arm link 213, 212 are configured such that at least one movable arm link 213, 212 forms a pressure vessel, and each of its respective axes of rotation (or multiple axes of rotation) SX, EX, WX extends from the pressure vessel. For example, each of the end couplings 370, 372, 373, 375 and the arm center segments 371, 374 includes at least one atmospheric or pressurized chamber (also referred to herein as a pressure vessel) ACH1-ACH5, PT1-PT3, which are sealed or vacuum (e.g., depressurized) environments with which the conveying arm is located, in any suitable manner, separating the conveying chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G (or other chambers maintaining process vacuum). For example, at the shoulder axis SX and elbow axis EX, pressure chambers ACH1-ACH3 may be at least partially sealed by cover plate 386 and corresponding annular seals 386S (e.g., O-rings or other suitable static seals) and one or more ferrofluid seals FFS. At the wrist axis, which is exposed to higher temperatures than the elbow and shoulder axes, pressure chambers ACH4 and ACH5 are at least partially sealed by cover plates 387, 387E, and 387EA (see also...) Figure 3H and 3I) and the corresponding annular seal 387S seal.

[0063] like Figure 3B , 3C As shown in Figure 4E, the respective pressure chambers ACH1-ACH2 of the end couplings 370 and 372 of the movable arm link 213 are interconnected via at least one pressure pipe PT1. The shoulder rotation axis SX of the movable arm link 213 extends from the shoulder pressure chamber ACH1 to the interior of the base 201, for example, via the hollow drive shaft 200M1D of the direct-drive shoulder motor 200M1 (also known as a brushless motor) of the drive section 200 (which is directly connected to and directly drives the movable arm link 213 to rotate about the shoulder axis SX). Here, at least one sealed housing component 370 houses at least a portion of the brushless motor 200M1. The elbow rotation axis EX of the movable arm link 212 extends from the pressure chamber ACH2 of the elbow end coupling 372 to the pressure chamber ACH3 of the elbow end coupling 373, for example, via the hollow drive shaft 200M2D of the direct-drive elbow motor 200M2 of the drive section 200 (this direct-drive elbow motor 200M2 (also referred to herein as a brushless motor) is directly connected to the movable arm link 212 and directly drives it to rotate about the elbow axis EX). Here, at least one sealed housing component 372, 373 houses at least a portion of the brushless motor 200M2. The pressure chambers ACH4, ACH5 of the wrist end coupling 375 are respectively connected in communication with the pressure chamber ACH3 of the end coupling 373 via at least one pressure pipe PT2, PT3.

[0064] refer to Figure 3D , 4EAnd 8C, pressure tubes PT1-PT3 are sealed against their respective end couplings 370, 372, 373, 375 in any suitable manner. For example, each end coupling 370, 372, 373, 375 has at least one bore 555, 555A, 555B into which at least a portion of the respective pressure tube PT1-PT3 is inserted. The bores 555, 555A, 555B may be arranged in a row or a two-dimensional array. Each pressure tube PT1-PT3 may include at least one annular seal 801A, 801B (e.g., an O-ring or any other suitable static seal) that engages both the outer surface of the pressure tube PT1-PT3 and the surface of the corresponding bore 555, 555A, 555B to at least partially seal and isolate the pressurized chambers ACH1-ACH5 from the vacuum environment. Inserting pressure tubes PT1-PT3 into holes 555, 555A, and 555B compresses annular seals 801A and 801B, thereby sealing and isolating pressurized chambers ACH1-ACH5 from the vacuum environment. Each pressure tube PT1-PT3 may include an annular flange 810 and an annular seal 811 abutting the annular flange 810. When pressure tubes PT1-PT3 are inserted into holes 555, 555A, and 555B, the annular flange 810 presses the annular seal 811 against the machined surfaces of the corresponding end couplings 370, 372, 373, and 375, thereby sealing and isolating pressurized chambers ACH1-ACH5 from the vacuum environment. The annular seal 811 is compressed by fastening the end couplings 370, 372, 373, and 375 to the corresponding central arm segments 371 and 374. Pressure tubes PT1-PT2 may include either or any suitable combination of annular flange 810 and annular seals 801A, 801B, 811.

[0065] As described herein, each pressure tube PT1-PT3 has a minimized internal volume to reduce the surface area of ​​the corresponding arm link exposed to the vacuum environment (and the pressure differential generated therefrom). For example, hollow drive shafts 200M1D, 200M2D and pressure tubes PT1-PT3 are configured for the passage of one or more of the following: cable / communication cable CBL (which may be fiber optic or Ethernet cable, or other suitable cable / conductor for transmitting one or more of power and data), cooling line CLTB, and discharge line EXL, for example, from base 201 to wrist axis WX (e.g., wrist end coupling 375). Short-range wireless networks (as described herein, where data (and / or power) are transmitted between transmitter and receiver via a minimized spatial gap MAG) can be used for high-speed data transmission over at least the entire articulated arm 333 of substrate delivery device 104. It is important to note that, for example, the short-range data transmission described herein does not require changes to the communication protocol (e.g., from 3jnet to Wi-Fi to Ethernet or any other suitable protocol) because short-range data transmission operates at the physical layer (of the Open Systems Interconnection reference model) between nodes, thereby enabling support for industrial networks including, but not limited to, EtherCat, PROFIBUS, and DeviceNet, to achieve real-time data transmission.

[0066] One or more pressure tubes PT1-PT3 can be designed such that one or more cables / communication cables CBL, cooling lines CLTB, and discharge lines EXL passing through them occupy the internal space of the pressure tubes PT1-PT3, thereby leaving as little empty space as possible within the pressure tubes PT1-PT3. One or more pressure tubes PT1-PT3 can be used solely for fluid delivery (e.g., inlet or outlet), wherein the pressure tubes PT1-PT3 have minimized dimensions to provide a predetermined fluid volumetric flow rate, for example, to achieve cooling of the delivery arm components. In this way, in addition to the minimized volume of the pressure tubes PT1-PT3, the central arm sections 371 and 374 can be depressurized to the process (high) vacuum of the delivery chamber.

[0067] Figure 3D-3GAn exemplary rotary joint structure is illustrated, in which hollow drive shafts 200M1D, 200M2D and pressure tubes PT1-PT3 are configured for the passage of one or more cables / communication cables CBL, cooling lines CLTB, and exhaust lines EXL. This rotary joint structure allows for wireless transmission of at least data communication via an air gap MAG (the term "air" is used herein for convenience, as this gap can exist in a vacuum atmosphere relative to the wrist axis, as described herein). The rotary joint can also provide power delivery via slip rings 379 (e.g., at the shoulder and elbow joints), but the power delivery can be wireless (e.g., at one or more of the wrist, shoulder, and elbow joints), similar to the manner of wireless data communication via the air gap MAG. The power delivery and data communication implemented by this disclosure can integrate sensors and / or actuators / direct drive motors into the articulated arm 333 (as described herein), while isolating the sensors and actuators from the vacuum environment in which the articulated arm 333 operates. Any cables, cooling pipes, and other electronic components (including at least the sensors described herein (e.g., encoders, substrate sensors, metrology kit sensors, accessory sensors, imaging / vision sensors, thermal sensors, displacement sensors, etc.) and direct drive motors) are embedded within the atmospheric chambers ACH1-ACH5 of the articulated arm 333 structure (see Figure 3C In this way, pollution to the vacuum environment caused by gas escape from cables, cooling pipes and other electronic components can be largely eliminated.

[0068] Although Figure 3D-3G The illustration shows the elbow joint of articulated arm 333; the shoulder joint and / or wrist joint can also be constructed similarly. See also: Figure 3BThe conduit 381 may extend through the hollow drive shaft 200M2D and the motor rotor (which is formed by the drive shaft, or vice versa, or otherwise connected to it). The conduit 381 may also be formed by the hollow drive shaft 200M2D and / or the motor rotor. At each end of the conduit 381, on opposite sides of a rotating joint (elbow joint in this example), there are rotating manifolds or connectors 381M1 and 381M2, respectively. The manifold 381M1 includes a fixed portion 382 (relative to the upper arm 213) and a movable portion 383 (relative to the upper arm 213), the movable portion forming part of the conduit 381 or otherwise communicating with the conduit 381. The input portion 382 is fixed to the end portion 372 of the upper arm 213 to remain stationary relative to the upper arm 213 and is configured for connection to one or more cooling lines CLTB. The movable portion 383 of conduit 381 and manifold 381M1 is connected to the motor rotor and / or drive shaft 200M2D so as to rotate as a whole about the elbow axis EX with the end portion 373 of the forearm 212 (i.e., the movable portion 383 remains stationary relative to the forearm 212, but rotates about the elbow axis EX relative to the upper arm 213). The movable portion 383 of manifold 381M1 is sealed to the fixed portion 382 of manifold 381M1 by any suitable annular seal 381MS, thereby forming a rotating manifold 381M1. The rotating manifold 381M1 keeps one or more cooling lines CLTB stationary relative to the upper arm 213 while cooling fluid flows between conduit 381 and one or more cooling lines CLTB, with conduit 381 (and forearm 212) rotating about the elbow axis EX. Manifold 381M2 includes one or more fittings configured to connect to the cooling lines CLTB, and as described above, it is fixed (relative to forearm 212).

[0069] Each manifold 381M1, 381M2 also includes a respective orifice sealed to at least one communication cable CBL, wherein the communication cable CBL extends through conduit 381. The communication cable CBL can be any suitable communication cable used to provide high-speed data communication to, for example, motors 200M1-200M3B, encoders 388, 389, 389A, and / or any other suitable electronics integrated with the articulated arm 333. In the upper arm 213, at least one communication cable enters conduit 381 through seal 385A of manifold 381M1, extends through conduit 381 in a channel shared with the cooling fluid flow, and exits conduit 381 through another seal 385B of manifold 381M2 (seals 385A and 385B form a seal between their respective manifolds and at least one communication cable). The communication cable CBL extending through conduit 381 can be replaced with an optical fiber or radio frequency data coupler, which has a transmitter and receiver at seals 385A and 385B for data transmission through conduit 381. Seals 385A and 385B can be zero-pressure seals (e.g., substantially no pressure difference across opposite sides of the seal), providing structural support for holding one or more cables CBL within the articulated arm 333. Seal 385A also substantially prevents cooling fluid from flowing out of conduit 381 at the wire feedthrough, thereby guiding the cooling fluid from inside conduit 381 to a predetermined cooling fluid outlet or connector (see...). Figure 3E The cooling fluid connector can be connected to any suitable conduit (for clarity, the conduit is in...). Figure 3D , 3F As shown in end portion 372 in 3G, but not in end portion 373), the conduit extends through the corresponding arm link (e.g., from an atmospheric chamber in end portions 370, 372, 373, 375 (see...) Figure 3C The atmospheric chambers (ACH1-ACH5) in the center arm sections 371 and 374 are connected to the atmospheric chambers of the other end sections 370, 372, 373, and 375 via the corresponding pressure pipes PT1-PT3; however, cooling fluid connections can lead to the atmospheric chambers of the corresponding end sections 370, 372, 373, and 375.

[0070] To enable data transmission via a rotating joint, again note that as conduit 381 rotates relative to upper arm 213, wireless transmitter 377T is fixed (i.e., stationary) to end portion 372 of upper arm 213. Wireless receiver 377R (e.g., with a disc-shaped antenna or any suitable antenna shape) is fixed to conduit 381 (e.g., fixed to the end of manifold 381M1) so as to rotate as a whole with conduit 381 and connect to communication cable CBL. Wireless transmitter 377T (e.g., with a disc-shaped antenna or any suitable antenna shape) is positioned relative to wireless receiver 377R to transmit data between the two. It should be noted that although transmitter 377T and receiver 377R are shown in the figure, the positions of the transmitter and receiver can be reversed, there can be two transceivers (for providing bidirectional data communication), or there can be two sets of transmitters and receivers (for providing bidirectional data communication). Transmitter 377T and receiver 377R can be configured for optical communication, radio frequency communication (e.g., Wi-Fi, near field communication, ultra-wideband, millimeter wave, etc.), inductive communication, or other short-range wireless communication protocols such as those described herein (e.g., Bluetooth). ® Protocols such as infrared and Zigbee® operate over very short distances, such as approximately 20 mm or less (communication distances can be greater than approximately 20 mm). Short-range communication enables secure data transmission within semiconductor manufacturing facilities (FABs) or factories, as well as immunity to radio frequency noise. A minimum air gap (MAG) is provided between the transmitting and receiving sections of the transmitter and receiver 377T and 377R. This minimum air gap is designed to be approximately the smallest possible gap to ensure that the receiver 377R can rotate relative to the transmitter 377T without contact between the two.

[0071] Still referencing Figure 3B , 3D In 3E, power is transmitted via a rotary joint through a slip ring 379. For example, the brush block 379B of the slip ring 379 is fixed (stationary) to the end portion 372 of the upper arm 213, while the rotating ring 379R of the slip ring is fixed (e.g., relative to the conduit 381) to the conduit 381 so as to rotate with the conduit 381 as a whole. Power is delivered to the brush block 379B via any suitable power cable CBL, and from the rotating ring to the forearm 212 via any suitable power cable CBL, which is routed near the conduit 381 and within the drive shaft 200M2D. Power delivered via cables and slip rings (and in some cases via wireless couplers) through the articulated arm 333 supplies power to the motors 200M1-200M3B, encoders 388, 389, 389A, and / or any other suitable electronics integrated with the articulated arm 333.

[0072] like Figure 3Dand 3E As can be seen, the rotary joint allows the forearm 212 to rotate virtually indefinitely relative to the upper arm 213. Furthermore, since the cable CBL and cooling line CLTB at the elbow joint in the upper arm 213 are connected only to components stationary relative to the upper arm 213 (e.g., transmitter 377T, the fixed portion 382 of manifold 381M1, and the brush block 379B of slip ring 379), the cable CBL and cooling line CLTB will not bend or move with the joint movement of the forearm 212 relative to the upper arm 213, which improves the reliability and service life of the cable CBL and cooling line CLTB. Similarly, since the cable CBL and cooling line at the elbow joint in the forearm 212 are connected only to components stationary relative to the forearm 212 (e.g., receiver 377R, movable portion 383 of manifold 381M1, rotating ring 379R of slip ring 379), the cable CBL and cooling line CLTB will not bend or move with the joint movement of the forearm 212 relative to the upper arm 213, which can improve the reliability and service life of the cable CBL and line CLTB. It can be appreciated that, where substantially unlimited rotation of the arm joint is not required or otherwise undesirable, one or more of the electrical slip ring and data transmitter / receiver can be removed, allowing the power cable and / or data cable to extend through conduit 381 to seal 385B (conduit 381 is statically fixed to the upper arm 213), where the cable forms a clock spring in the forearm 212 that winds and unwinds (in a manner similar to a helical clock spring) as the forearm 212 rotates relative to the upper arm 213.

[0073] Also refer to Figure 3P Power transmission and data communication via rotary joints can both be wireless. For example, rotary joints, such as the elbow joint (although the shoulder and / or wrist joints can be fundamentally similar), and... Figure 3D and Figure 3E The joints shown are substantially similar. Data transmitter 377T and power transmitter 379TX are disposed within the hermetically sealed housing component 372. Each of the data transmitter 377T and power transmitter 379TX has its own transmitting antennas 377TA and 379TXA, which are disposed within the hermetically sealed housing component 372. One or more of the data transmitter 377T, power transmitter 379TX, antennas 377TA and 379TXA may form part of the hermetically sealed housing component 372, although one or more of the data transmitter 377T, power transmitter 379TX, antennas 377TA and 379TXA (which may form part of the hermetically sealed housing component 372) may also be connected to the hermetically sealed housing component 372 in any suitable manner.

[0074] Data receiver 377RA and power receiver 379RX are mounted on the hollow drive shaft 200M2D of motor 200M2 and connected to their respective data receiving antenna 377RA and power receiving antenna 379RXA. Antennas 377RA and 377RXA may be in the form of disks so that they can maintain communication with their respective transmitting antennas 377TA and 379TXA when linkage arm 212 rotates relative to linkage arm 213.

[0075] One or more of the receivers 377R, 379RX and antennas 377RA, 379RXA may be disposed on the hollow drive shaft 200M2D, thereby forming part of a sealing member SLM that seals and isolates a vacuum environment (e.g., the vacuum environment in which the motor rotor is located) from the internal environment of the sealed housing component 372. One or more of the receivers 377R, 379RX and antennas 377RA, 379RXA may be disposed on or otherwise connected to the sealing member SLM. Figure 3P As can be seen, the sealing member SLM can at least partially seal and isolate the encoder's read head ENH from the vacuum environment; however, the read head ENH can also be sealed and isolated from the vacuum environment in any suitable manner.

[0076] Although the figures show the data transmitter 377T, power transmitter 379TX, antenna 377TA, and antenna 379TXA facing the bottom of the hollow drive shaft 200M2D or the bottom of the sealed housing component 372 (for convenience, the spatial term "bottom" is used here), while the receivers 377R, 379RX, and antennas 377RA, 379RX are positioned on the hollow drive shaft 200M2D; however, one or more of the data transmitter 377T, power transmitter 379TX, antenna 377TA, and antenna 379TXA may be positioned facing the top of the sealed housing (for convenience, the spatial term "top") and the bottom of the sealed housing component 372, while the receivers 377R, 379RX, and antennas 377RA, 379RX are positioned facing the bottom of the sealed housing component 373, so as to communicate with each other through the housing component walls and the vacuum environment between the arm links 212, 213.

[0077] refer to Figure 3B and 3F Rotating joints, such as the elbow joint (although the shoulder and / or wrist joints can be fundamentally similar), with Figure 3D and 3E The joints shown are essentially similar. However, the cooling fluid and the communication cable CBL may not share a common channel. Here, conduit 381 forms two concentric chambers or channels, with the cooling fluid flowing through the outer chamber and the communication cable CBL extending through the inner chamber. Figure 3DCompared to the cooling fluid flow that is located inside and in direct contact with the cooling fluid flow, the dual chambers of the conduit 381 can increase the flow rate of the laminar cooling fluid.

[0078] refer to Figure 3B and 3G Rotating joints, such as the elbow joint (although the shoulder and / or wrist joints can be fundamentally similar), with Figure 3D and 3E The joints shown are essentially similar. However, both the power cable CBL and the communication cable CBL extend through the interior of the hollow drive shaft 200M2D and are in direct contact with the cooling fluid flow. Here, both the power cable CBL and the communication cable CBL enter the interior of the hollow drive shaft 200M2D through seal 385A. Conduit 381 (similar to...) Figure 3F The double-lumen catheter, but it can also be similar to... Figure 3D The single-chamber conduit 381 can be connected to the motor rotor or drive shaft 200M2D (e.g., against its seal so as to rotate with it as a whole) and terminate at the bottom of the motor rotor or drive shaft 200M2D. The conduit 381 can be in a similar manner to... Figure 3D and 3F The manner shown extends into the forearm 212. The inner chamber includes a seal 385F that seals the cable CBL when it enters the interior of the hollow drive shaft 200M2D.

[0079] refer to Figure 3A , 3CAlong with 3H, the wrist axis WX may include one or more radial flux motors 200M3A, 200M3B (also referred to as brushless motors), each having a stator 391, a rotor 392, and an output shaft or drive shaft 300M3AD, 300M3BD connected to its respective rotor 392. Here, at least one sealed housing component 375 houses at least a portion of the brushless motors 200M3A, 200M3B. End effectors 211, 211A, 211B are connected to the corresponding drive shafts 300M3AD, 300M3BD for rotation about the wrist axis WX. Each stator 391 of the motors 200M3A, 200M3B can be sealed and isolated from the vacuum environment in which the delivery arm operates by any suitable insulating wall 395. Suitable examples of radial flux motors and isolation walls that can be integrated into the wrist axis WX are described in U.S. Patent No. 9,948,155, issued April 17, 2018, and U.S. Patent No. 9,186,799, issued November 17, 2015, the entire disclosure of which is incorporated herein by reference. As an example, referring to motor 200M3A (motor 200M3B is substantially similar), a stator 391 (and its stator coils) is disposed within a pressure chamber ACH4, wherein the pressure chamber ACH4 is sealed by a cover plate 387 (and its corresponding seals 387S) and an isolation wall 395. The isolation wall 395 is substantially in contact with the cover plate 387, wherein any suitable static seal (e.g., an O-ring) 395S is compressed (at least by the pressure difference between atmospheric pressure and vacuum pressure) between the isolation wall 395 and the cover plate 387. The isolation wall 395 may be a thin film mounted to or otherwise overlapping with the magnetic poles or core of the stator 391, such that the stator substantially supports the isolation wall. The isolation wall 395 may be structurally bonded to, for example, the inner diameter of the stator 391 (or any other suitable portion thereof) using any suitable adhesive in any suitable manner, thereby forming an integral part (e.g., forming a single integral structure or assembly) and / or attached to the stator 391. The isolation wall 395 may be a coating formed on or otherwise attached to the magnetic poles or core of the stator 391. The isolation wall 395 may extend beyond the stator 391 to engage with the cover plate 387. Figure 3H As can be seen, the isolation wall 395 can not support any additional structural loads other than the pressure difference load between the vacuum and atmospheric environments (i.e., the pressure difference load is borne by the isolation wall and the stator).

[0080] As can be appreciated, motors 200M3A and 200M3B may have rotors employing magnets, which may be affected by gases used in semiconductor manufacturing processes. As described herein, the motor rotors of elbow motor 200M2 and shoulder motor 200M1 are sealed and isolated from the vacuum environment by at least a ferrofluidic seal (FFS). For the wrist position, which is subject to temperatures that may be too high for the ferrofluidic seal to be used, the rotor magnet 392M of rotor 392 is encapsulated to isolate the magnet 392M from the vacuum environment. For example, at least a portion of rotor 392 is encapsulated by a sealed nonferrous housing 392H that substantially seals and isolates the magnet 392M from the vacuum environment without degrading motor performance. The nonferrous housing 392H may extend to cover the magnet 392M for encapsulation and provide an hermetically sealed seal to rotor 392 in any suitable manner (e.g., by any suitable vacuum-compatible sealant, adhesive, epoxy, etc.).

[0081] Also refer to Figure 3LPower and / or data can be wirelessly transmitted from, for example, the atmospheric chambers ACH4 and ACH5 of the wrist (at the end portion or sealed housing component 375) to the end effectors 211A and 211B. For example, power and / or data communication can be provided to the wrist via cables to enable operation of at least the drive motors 200M3A and 200M3B and their respective encoders 389 and 389A, wherein the cables extend through one or more corresponding pressure tubes PT2 and PT3 to the corresponding atmospheric chambers ACH4 and ACH5. A short-range wireless communication network can be configured for transmitting power and / or data to and / or from the end effectors 211A and 211B. This short-range wireless communication network may include a power and / or data transmitter 341T disposed within the wrist and a power and / or data receiver 341R disposed within the end effectors 211A and 211B. A short-range wireless communication network can be used for power and / or data transmission between frame 201 and upper arm 213 and / or between upper arm 213 and forearm 212. Referring to atmospheric chamber ACH4, a power and / or data transmitter 341T is disposed within atmospheric chamber ACH4. The power and / or data transmitter 341T is coupled to a transmitting antenna 341TA disposed within a vacuum environment. The transmitting antenna 341TA is constructed of any suitable vacuum-compatible material (e.g., stainless steel) and secured to end 375 in any suitable manner (e.g., using any suitable fasteners). Any suitable seal (e.g., an O-ring) can be provided between the transmitting antenna 341TA and end 375 to seal any feedthrough connecting the transmitting antenna 341TA to the power and / or data transmitter 341T. The transmitting antenna 341TA can surround the drive shaft 200M3AD of the motor 200M3A (and thus the connection between the drive shaft 200M3AD and the corresponding end effector 211B) so that wireless communication between the power and / or data transmitter 341T and the end effector 211B is substantially maintained as the end effector 211B rotates.

[0082] The power and / or data receiver 341R is embedded within the end effector 211B in any suitable manner (e.g., during end effector manufacturing or within a sealed atmospheric chamber within the end effector 211B). The receiving antenna 341RA is positioned in a vacuum environment. The receiving antenna 341RA is constructed of any suitable vacuum-compatible material (e.g., stainless steel) and is secured to the end effector 211B in any suitable manner (e.g., using any suitable fasteners). Any suitable seal (e.g., O-ring) may be provided between the receiving antenna 341RA and the end effector 211B to seal any feedthrough connecting the receiving antenna 341RA to the power and / or data receiver 341R. The receiving antenna 341RA can surround the drive shaft 200M3AD of the motor 200M3A (and thus the connection between the drive shaft 200M3AD and the corresponding end effector 211B) to provide a through passage for the drive shaft 200M3BD of the motor 200M3B, and, as the end effector 211B rotates, the wireless communication between the power and / or data transmitter 341T and the end effector 211B is substantially maintained through the wireless communication between the two loop antennas 341TA and 341RA. The antennas 341TA and 341RA can have any suitable shape. As an example, the antennas 341TA and 341RA can be made of thin foil, allowing them to adhere to / conform to the surface to which they are fixed. As will be appreciated, the transmitter 341T and the receiver 341R can also provide bidirectional data communication. In a manner similar to that described herein, the antennas 341TA and 341RA are separated by a minimized gap MAG.

[0083] Still referencing Figure 3L In a manner substantially similar to that described with respect to end effector 211B, power and / or data can be transmitted to (and from) end effector 211A. For example, power and / or data transmitter 342T is disposed within atmospheric chamber ACH5 (although transmitter 342T is described as transmitting both data and power simultaneously, separate transmitters for power and data could also be present, e.g. Figure 3P(As shown). The power and / or data transmitter 342T can be connected to a transmitting antenna 342TA positioned in a vacuum environment (this antenna can be at least a dual-band antenna, with one band for power transmission and the other for data transmission, but may also have separate antennas for power and data). The transmitting antenna 342TA is constructed of any suitable vacuum-compatible material (e.g., stainless steel) and secured to the end portion 375 in any suitable manner (e.g., using any suitable fasteners). Any suitable seal (e.g., an O-ring) can be provided between the transmitting antenna 342TA and the end portion 375 to seal any feedthrough connecting the transmitting antenna 342TA to the power and / or data transmitter 342T. The transmitting antenna 342TA can surround the drive shaft 200M3BD of the motor 200M3B (and thus the connection between the drive shaft 200M3BD and the corresponding end effector 211A) so that wireless communication between the power and data transmitter 342T and the end effector 211A is substantially maintained as the end effector 211A rotates.

[0084] The power and / or data receiver 342R is disposed within the drive shaft 200M3BD in any suitable manner, such that it is located within a sealed atmospheric chamber ACH6 formed at least partially by the hollow drive shaft 200M3BD (although the receiver 342R is described as receiving both data and power simultaneously, separate receivers for power and data may also be present, such as...). Figure 3P (As shown). The receiving antenna 342RA is positioned in a vacuum environment and connected to the drive shaft 200M3BD, thereby sealing the receiver 342R within the drive shaft 200M2BD (this antenna can be at least a dual-band antenna, with one band for power reception and the other for data reception, but separate antennas for power and data may also be used). Any suitable data / communication cable CBL (or optical communication) extends from the receiver 342R to the end effector 211A within the hollow drive shaft 200M3BD, wherein the end effector forms a seal with the drive shaft 200M3BD to seal and isolate the atmospheric chamber ACH6 within the drive shaft 200M3BD from the vacuum environment.

[0085] The receiving antenna 342RA is constructed of any suitable vacuum-compatible material (e.g., such as stainless steel) and secured to the drive shaft 200M3BD in any suitable manner (e.g., using any suitable fasteners). Any suitable seal (e.g., an O-ring) may be provided between the receiving antenna 342RA and the drive shaft 200M3BD to seal any feedthrough connecting the receiving antenna 342RA to the power and / or data receiver 342R. The receiving antenna 342RA may have a disc shape to substantially maintain wireless communication between the power and / or data transmitter 342T and the end effector 211A via wireless communication between the loop antenna 342TA and the disc-shaped antenna 342RA as the end effector 211B rotates. Antennas 342TA and 342RA may have any suitable shape. As an example, antennas 342TA and 342RA may be made of a thin foil, conforming to the surface to which they are fixed. As will be appreciated, the transmitter 342T and receiver 342R may also provide bidirectional data communication. In a manner similar to that described herein, antennas 342TA and 342RA are separated by a minimized gap MAG.

[0086] Antennas 341T, 341R, 342T, and 342R can be configured for one or more radio frequency (RF) or optical communications to transmit power via one or more of the following: inductive coupling, capacitive coupling, resonant capacitive coupling, power beaming, Wi-Fi coupling, and magnetic coupling. When RF communication is used, it can be near-field communication, ultra-wideband, millimeter wave, or any other frequency / protocol. When optical communication is used, it can include beam steering for beam alignment between antennas 341TA, 341RA, 342T, and 342R. For example, when magnetic coupling is used, end effectors 211B, 211A (or one or more articulated arm links) can include an onboard battery or capacitor PWR that is incrementally charged via magnetic coupling to one or more arm joints (e.g., via the methods described herein). Figure 3L (Described wireless power transmission). One or more of the upper arm 213 and forearm 212 may include one or more onboard battery / capacitor PWRs, which can be incrementally charged via magnetic dynamic coupling with one or more arm joints. A wireless charging station may be provided within the substrate processing device (e.g., see...). Figure 3B The articulated arms 333 and / or end effectors 211A, 211B can be moved to locations close to these charging stations to wirelessly charge the onboard battery / capacitor PWR. The onboard battery / capacitor PWR within one or more of the upper arm 213 and forearm 212 can be discharged, and power from the battery / capacitor PWR can be wirelessly transferred to the end effectors 211A, 211B as described herein.

[0087] refer to Figure 1A-1I The WPDC, configured as a contactless wireless data transmission or communication module 180, comprises a housing 2010 having a lower or first or static housing component 2000 and an upper or second or dynamic housing component 205. The first housing component 2000 and the second housing component 205 are interconnected, for example, by any suitable fastener (e.g., screws, bolts, welding, mechanical or chemical adhesives / bonding agents, etc.). A rotating shaft or rotor 2100 is rotatably connected to the second or dynamic housing component 205 via any suitable bearing 215, which can be a deep groove radial ball bearing, a tapered roller bearing, or any other suitable bearing, providing axial / radial alignment between the wireless data transmission module 180 and its wireless data communication module 255.

[0088] The wireless data transmission module 180 includes a pair of printed circuit boards (PCBs), which may be referred to as carrier boards, 250 and 251. One of the PCBs 250 is attached to the first housing component 2000 in any suitable manner, such as using suitable fasteners (e.g., screws, bolts, mechanical or chemical adhesives / gluors). The other PCB 251 is attached to the rotation axis 2100 in any suitable manner (e.g., using suitable fasteners), such that the other PCB 251 rotates together with the rotation axis 2100 as a whole. Each PCB 250 and 251 contains a respective millimeter-wave wireless data communication module 255, such as the Rosenberger RoProxCon® System Module (SoM), which is a surface-mount full-duplex millimeter-wave module capable of transmission rates up to 3.125 Gbps; however, any suitable communication module may also be used. Printed circuit boards 250 and 251 are mounted opposite each other such that the antennas of the wireless data communication module 255 face each other, and the rotating shaft 2100 and the housing 2010 are rotatedly connected by positional constraints provided by the bearing 215, thereby maintaining their axial / radial alignment.

[0089] Also refer to Figure 3SPrinted circuit boards 250 and 251 each include alignment holes 401 and slots 402 features that provide precise alignment between the respective printed circuit boards 250 and 251 and housing components (e.g., first housing component 2000 and second housing component 205). Printed circuit board 251 is connected to the first housing component 2000, which includes holes 290A and 290B (e.g., holes for receiving locating pins or shoulder bolts / screws 291) positioned relative to the first housing component 2000 at a predetermined known location. Printed circuit board 251 includes alignment hole 401 aligned with one of holes 290A and 290B, such that the locating pin or shoulder bolt / screw 291 extends through alignment hole 401 into hole 290A or 290B to position printed circuit board 251 at a predetermined known location within the first housing component 2000. The slot 402 aligns with another hole 290A or 290B, such that another locating pin or shoulder bolt / screw 291 extends through the slot 402 into the other hole 290A or 290B to rotatably position the printed circuit board 251 in a predetermined known position within the first housing component 2000. The slot is configured to prevent the printed circuit board 251 from being overly constrained when connected to the first housing component 2000.

[0090] A rotating shaft 2100 is positioned at a predetermined known location relative to holes 290A, 290B and a printed circuit board 251 via a bearing 215, such that the axis of rotation SAX of the rotating shaft 2100 is substantially aligned with the wireless data communication module 255 of the printed circuit board 251. The rotating shaft 2100 includes holes 290C, 290D (e.g., holes for receiving locating pins or shoulder bolts / screws 291) positioned relative to the rotating shaft 2100 at the predetermined known location. The printed circuit board 250 includes an alignment hole 401 aligned with one of the holes 290C, 290D, such that the locating pin or shoulder bolt / screw 291 extends through the alignment hole 401 into the holes 290C, 290D, thereby positioning the printed circuit board 250 at the predetermined known location on the rotating shaft 2100. Slot 402 aligns with another hole 290C, 290D, such that another locating pin or shoulder bolt / screw 291 extends through slot 402 into another hole 290C, 290D, thereby rotatably positioning printed circuit board 250 at a predetermined known position on rotation axis 2100. The slot is configured to prevent excessive constraint on printed circuit board 250 when connected to rotation axis 2100. Printed circuit board 250 is connected to rotation axis 2100 via alignment holes 401 and slot 402, aligning the wireless data communication module 255 of printed circuit board 250 with the rotation axis SAX of rotation axis 2100, thereby aligning the wireless data communication modules 255 of printed circuit boards 250 and 251 with each other (e.g., substantially aligned along rotation axis SAX) during rotation of rotation axis 2100 about rotation axis SAX.

[0091] The bearing 215 of housing 2010 provides axial / radial alignment (e.g., rotation axis or central axis SAX around rotation axis 2100) for the wireless data communication modules 255 of the two printed circuit boards 250, 251 throughout the rotation process, and the bearing 215 can maintain a predetermined separation gap / distance G between the wireless data communication modules 255.

[0092] Housing 201 provides a clean and constant environment, ensuring optimal operation of the wireless data communication module 255 from both environmental and radio frequency perspectives. The separation distance G and axial alignment between the wireless data communication modules 255 provide high-bit-rate, error-free communication.

[0093] refer to Figures 3A-3C The rotating portions of the wireless data transmission module 180 (e.g., rotating shaft 2100 and printed circuit board 250) can be connected via coupling 260 to shaft 290 (i.e., drive shaft, such as the drive shaft of a direct drive motor (see shafts 200M1D, 200M2D, 200M3AD, 200M3BD) or driven shaft, such as the driven shaft of a transmission system (see...). Figure 11A-11C and Figure 3T The driven shafts 290F and 290E in the wireless data transmission module 180 can be connected to one or more of the arm linkage, pulleys of the arm drive transmission device, etc., while the fixed parts of the wireless data transmission module 180 (e.g., the first housing component 2000, the second housing component 205, and the printed circuit board 251) can be mounted to any available support structure (e.g., the arm linkage, the conveyor frame, etc.). This is for illustrative purposes only. Figure 3Q A wireless data transmission module 180 is shown positioned at the elbow joint 179E, but the wireless data transmission module 180 may also be positioned at any one or more of the shoulder joint 179S, elbow joint 179E, and wrist joint 179W. The housing 2010 is attached to the upper arm 213 in any suitable manner, such as using any suitable fasteners, including but not limited to those described herein. The housing 2010 is attached to the upper arm 213 such that the rotation axis SAX of the rotation axis 2100 is substantially aligned (e.g., coaxial) with the elbow axis EX.

[0094] Coupling 260 connects rotating shaft 2100 to drive shaft 290 (in Figure 3Q In this example, drive shaft 290 is the drive shaft 200M2D of motor 200M2, and drive shaft 290 directly drives forearm 212 to rotate about elbow axis EX; however, without using a direct-drive distributed motor, coupling 260 can connect rotating shaft 2100 to drive pulleys of any suitable transmission system (such as those described herein, see...). Figure 3T), and / or used with a coaxial drive system in which the motor is located in housing 200H (see Figure 3T Coupling 260 may be a flexible coupling to correct / counteract / compensate any misalignment and runout that may exist between drive shaft 290 and rotary shaft 2100. Coupling 260 is configured to be flexible, providing sufficient degrees of freedom to counteract any alignment problems between wireless data transmission module 180 and drive shaft 290.

[0095] refer to Figure 3U When the wireless data transmission module 180 is used in a vacuum environment, such as through a transmission chamber wall or arm link wall (where the interior of the arm link is exposed to a vacuum), the wireless data transmission module 180 may include suitable seals for vacuum environment isolation. For example, the interior of the rotating shaft 2100 (e.g., where the cable CBL exits from the rotating shaft 2100) may include a vacuum cable through-hole 666 that seals the interior of the rotating shaft 2100 from the vacuum environment. The exterior of the rotating shaft 2100 may be sealed to the upper or second housing component 205 in any suitable manner, for example, by a ferrofluid seal 668 spaced from the bearing 215 by a spacer ring 669. The second housing component 205 may be sealed to the vacuum chamber wall or arm link in any suitable manner, for example, by an O-ring 667 (the second housing component 205 can be attached to the wall and the O-ring 667 can be pressed using any suitable fastener). In addition, the wireless data transmission module 180 and related... Figure 3Q and Figure 3R The same as described in [the text].

[0096] refer to Figure 3Q and 3RA data communication cable CBLA may be routed through the upper arm link 213 (or another suitable portion of the arm 333) to the housing 2010 and connected to the printed circuit board 251 to send and receive data signals to and from the data communication module 255 on the printed circuit board 251. Another data communication cable CBLB may be connected to the printed circuit board 250 and routed through the drive shaft 290 to the forearm 212 (or another suitable portion of the arm 333). The printed circuit board 250 rotates as a whole with the rotation shaft 2100, which is connected to the drive shaft 290, and the drive shaft 290 is connected to the forearm 212 (i.e., to drive the forearm 212 to rotate such that the drive shaft 290 and the forearm 212 rotate as a whole about the elbow axis EX), so that the data communication cable CBLB does not rotate relative to the forearm 212. The relative rotation of printed circuit boards 250 and 251 and the wireless data communication between their data communication modules 255 decouple the data communication cable CBLB from the upper arm 213 (and the data communication cable CBLA), thereby allowing the forearm 212 to rotate infinitely relative to the upper arm 213 about the elbow axis EX.

[0097] refer to Figures 3A-3CThe present disclosure improves the throughput and placement accuracy of semiconductors by using 3L and 3M. For example, one or more substrate sensors 366A-366C may be disposed on end effectors 211A, 211B and positioned to sense a substrate S held on the end effectors. The one or more substrate sensors 366A-366C are positioned relative to each other and relative to the substrate holding stage SHS of the end effectors 211A, 211B such that they have a predetermined spatial relationship with the substrate holding stage SHS and are capable of sensing at least three edge points SP1-SP3 on the circumference of the substrate S. The substrate sensors 366A-366C are calibrated in any suitable manner (e.g., in the reference frame of the substrate transport device 104) such that the controller 110 determines the center SC of the reference position or center position of the substrate S relative to the substrate holding stage SHS of the end effectors 211A, 211B (in the reference frame of the substrate transport device 104) based on the three points SP1-SP3 sensed by the one or more sensors 366A-366C. The center of substrate S can be determined by three points SP1-SP3 in any suitable manner, for example, as described in U.S. Patent No. 7,894,657, issued February 22, 2011. The center positions of end effectors 211A, 211B are known in the coordinate system of the substrate transport apparatus (e.g., based on the geometry of the articulated arms and end effectors), wherein the eccentricity or offset of substrate S relative to the known center positions of end effectors 211A, 211B can be determined by comparing the determined center position of the substrate relative to the known center positions of end effectors 211A, 211B. Knowing the center position of substrate S relative to the center positions of end effectors 211A, 211B, controller 110 can adjust the movement / trajectory of articulated arm 333 such that substrate S is positioned approximately at the center of the substrate holding position of substrate processing apparatus 100A-100G (e.g., process module 130, aligner, etc.).

[0098] As can be appreciated, during the transport of the substrate S by the articulated arm 333, automatic wafer centering (for placing or picking up the substrate) can be achieved on the fly via sensors 366A-366C integrated into the end effectors 211, 211A, 211B (e.g., sensors external to the substrate transport device 104 are essentially unnecessary). As another example, the end effectors may include active edges that grip the substrate S. Here, the end effectors 211A, 211B include one or more active gripping portions 367A-367C that move to engage or disengage from the outer peripheral edge of the substrate S. Gripping the substrate S during transport enables higher substrate transport speeds, which reduces transport time and increases throughput. Power and / or data communication is transmitted between the wrist of the articulated arm 333 and each end effector 211A, 211B via wireless transmission as described above between antennas 341TA, 341RA.

[0099] End effectors 211A and 211B may be configured with integrated power / communication paths 369A and 369B formed therein. The integrated power / communication paths 369A and 369B may be formed in any suitable manner, such as by additive manufacturing, laminating the structural materials of the end effectors, or in any other suitable manner, such that the end effector electronics / communication are sandwiched between and sealed (or otherwise encapsulated) within the structural laminated materials of the end effectors 211A and 211B, etc. The end effector electronics / communication may be isolated from the vacuum environment in which the articulated arm 333 operates. End effectors 211A and 211B may include an onboard processing unit 368 that receives communication signals from, for example, a controller 110 and, based on the communication signals, enables the operation of one or more sensors 366A-366C and grippers 367A-367C. The processing unit 368 may also distribute power to the sensors 366A-366C and grippers 367A-367C.

[0100] As can be recognized, refer to Figure 3B-3H (See also) Figure 3PEach direct-drive motor 200M1, 200M2, 200M3A, 200M3B includes a respective encoder 388, 389, 389A, providing power and / or data communication to the encoder in a manner described herein. Here, at least one hermetically sealed housing component 372, 375 houses at least a portion of the respective encoder 388, 389, 389A. The encoder 388, 389, 389A includes any suitable readhead ENH and any suitable encoder track or dial ENT (e.g., one or more absolute position tracks / dials and incremental tracks / dials). At the elbow and shoulder joints of the conveyor arm, the encoder 388 may be exposed to temperatures of approximately 70ºC and below. Therefore, the encoder can be an optical encoder, a magnetic encoder, or any other suitable encoder constructed for operation in a vacuum environment. At the shoulder and elbow joints, the readhead ENH is located in the corresponding pressurized chambers ACH1, ACH2, while the encoder track ENT is located in the process vacuum (although the encoder track can also be isolated from the vacuum environment in a manner similar to that described herein). Suitable examples of encoders that can be used at least at the wrist and shoulder joints as described in this disclosure are described in U.S. Patent No. 10,742,092 (issued August 11, 2020), the entire contents of which are incorporated herein by reference.

[0101] As an example, also refer to Figure 3I-3K The encoder track ENT is positioned on or otherwise connected to the motor rotor 200MR of the respective motors 200M1 and 200M2. The encoder track ENT defines at least two scales for measuring the position of the rotor 200MR. These at least two scales include an incremental position scale and an absolute position scale. The absolute position scale may contain additional position information required to uniquely determine the position of the rotor 200MR. Absolute position encoders typically provide a unique position without any reference motion. Typically, such encoders may require several scales, each of which can be read by an independent sensor system. The number of scales determines the number of bits in the absolute position encoder, and thus its resolution. Using a digital absolute position scale, the digital absolute position can be read by multiple independent sensors, each facing its respective scale. Each sensor can provide the state of a corresponding bit in the word defining the digital position. Figure 9 The image shows a classic example of pattern 905, known as 5-bit Gray code. Each line of pattern 905 contains a 5-bit word indicating an absolute position, which can be represented as an angular position in degrees. S4 represents the most significant bit of each 5-bit word, and each word differs from the next by only one bit, a typical characteristic of Gray code sequences.

[0102] Absolute position can be obtained via a single digital dial attached to the rotor 200MR. To read the absolute digital position, a set of sensors (e.g., the read head ENH) can be positioned relative to each other at specific intervals, facing the absolute position dial. The number of sensors determines the number of bits used for the absolute position. The advantage of using a single dial design is that it allows for a smaller footprint in the absolute encoder design. The bit pattern sequence of the single dial can also be in Gray code form, i.e., changing only one bit at a time.

[0103] Figure 10 An example of a single dial 1005 used to indicate absolute position is shown. The single dial 1005 has analog... Figure 9 The pattern shown in S4 is represented by five sensors S0 1010, S1 1015, S2 1020, S3 1025, and S4 1030, positioned around the dial 1005 in a specific location. The sensors generate patterns as the pattern rotates. Figure 9 The sequence of numbers thus generates an absolute position indication for the connected rotor. It is important to understand that a dial can be constructed using any number of bits to provide the desired position resolution. A single absolute dial can be coupled with an incremental dial (e.g., Figure 10 The scale 1035 and the incremental scale sensor 1040 are used together.

[0104] In another embodiment, Figure 10 The single absolute dial 1005 can be used independently to simultaneously generate a digital absolute position and an interpolated incremental position within the resolution of the digital absolute position. As described herein, the sensor can provide digital or analog output. When the sensor can provide analog output, a digital output pattern of the absolute position scale can be generated from the analog output signal by setting a threshold to determine when a bit in the pattern changes. Simultaneously, analog values ​​of the changing signal can be measured, and these changing analog values ​​can be used to determine a position with additional resolution compared to that provided by the single absolute dial. For example, a digital signal processor can be used to measure the sensor's output, sensing both the sensor's digital output according to a set threshold and the instantaneous analog output of the sensor undergoing a single bit change. This instantaneous analog output can be used to generate an interpolated position between the current digital absolute position and the next digital absolute position.

[0105] like Figure 3H and 3I As best observed, at the wrist joint, encoders 389 and 389A can withstand substrate temperatures exceeding approximately 70°C (e.g., the process described herein), which may be the operating limit for optical encoders. At the wrist joint, encoders 389 and 389A are magnetic encoders, wherein the magnetic encoder dial ENT (which may have a Gray code configuration, having information about...) Figure 9and Figure 10 The encoder readhead (similar to the absolute and incremental scales described herein) is mounted on the motor rotor 392, and the encoder readhead ENH is mounted within the wrist motor housing (e.g., within pressurized chambers ACH4, ACH5). A suitable nonferrous isolation wall 399 is provided between the readhead ENH and the vacuum environment to isolate the readhead ENH from the vacuum environment (and at least partially seal the pressurized chambers ACH4, ACH5 from the vacuum environment). Placing the encoder readhead ENH within the pressurized chamber allows the magnetic flux from the magnetic encoder dial ENT to be sensed by the readhead ENH behind the isolation wall 399, and places the electronics of the encoders 389, 389A in an atmospheric environment that can be actively cooled (e.g., cooled at least by cooling lines CLTB as described herein).

[0106] refer to Figure 20 Sensor feedback can be integrated into the control logic of the substrate delivery device 104 to improve trajectory, repeatability, and diagnostic performance without contaminating the processing environment. Figure 20 The diagram illustrates an exemplary architecture of a portion of the Power and Data Communication System (PDCS). Power 20101 can be transmitted to the power bus of the PDCS via slip ring 379 or any suitable wireless coupler WC (including, but not limited to, those described herein). Data 20111 can be transmitted to the data bus of the PDCS via slip ring 379 or any suitable wireless coupler WC (including, but not limited to, those described herein). The PDCS (and its data communication and bus power network PDCN) provides flexible, modular sensor integration, where sensors can be added to or removed from the PDCS as needed. The high data transfer rates provided by the data and power couplers described herein allow for the deployment of high-performance sensors within the substrate delivery device 104 without limitations on power consumption and data bandwidth. Sensor feedback regarding the monitoring of robot status and operating environment (including seismic events affecting the substrate handling tool and sensing information permeating different areas of the substrate handling tool) can be provided in real time by sensors connected to the PDCS, where such robot status and operating environment can be monitored by the local controller of the substrate delivery device 104 or broadcast to an external host for processing. Integrating sensors into a data communication network enables the substrate transport device controller to access sensing information from different areas of the processing tool in which the substrate transport device 104 operates, and / or to provide sensor information from the substrate transport device 104 to the controller of the processing tool, thereby improving the operation of one or more of the substrate transport device 104 and the processing tool.

[0107] This exemplary architecture illustrates the transmission of power 20101 and data 20111 (e.g., via any suitable network described herein) to sensors, such as sensors 366A-366C and encoders 388, 389, 389A (or any other suitable digital, analog, and / or image processing sensors, commonly referred to as sensors 20130A, 20130B). As described herein, sensors 20130A, 20130B may be located within the arm assembly of the substrate delivery device 104, such as within arm links 212, 213, end effectors 211A, 211B, or rotary joints (shoulder joint SX, elbow joint EX, and / or wrist joint WX). In these locations, sensor data is connected via cable or wirelessly to sensor input / output module 20140, which is connected to a data network, for example, via data bus 20110. In these locations, sensor power 20101 is connected via cable or wirelessly to sensor input / output module 20140, which is connected to a power network, for example, via power bus 20100. The sensor input / output module 20140 can be a standalone module or integrated with another communication module of the Power and Data Communication System (PDCS) (e.g., but not limited to another EtherCAT module, such as servo amplifier 20141). This provides scalability for sensor support in a distributed architecture supporting motion control and allows sensors to be selectively added to (or removed from) the PDCS as needed. With sensors 20130A and 20130B connected to the PDCS, sensor data can be accessed by other devices within the PDCS (e.g., via data processing unit 20150), regardless of the sensor's native signal (i.e., digital, analog, etc.).

[0108] Also refer to Figure 3J and 3K As described herein, pressure chambers ACH4 and ACH5 are at least partially sealed by cover plates 387, 387E, and 387EA (and corresponding seals 387S) (see [link to document]). Figure 3H and 3I The encoder isolation wall 399 can be integrally formed with the corresponding cover plates 387E and 387EA, as a single integral or monolithic component. For example... Figure 3IAs can be seen, to facilitate sealing of the corresponding pressure chambers ACH4 and ACH5 via cover plates 387, 387E, and 387EA, the wrist end coupling 375 can be a two-part coupling, wherein one end coupling component 375A of the wrist end coupling houses the wrist motor 200M3A, and the other end coupling component 375B houses the wrist motor 200M3B. The two end coupling components 375A, 375B (or more end coupling components of the wrist axis including more than two motors) are connected to each other in any suitable manner (e.g., using mechanical fasteners) to form the wrist end coupling 375. Each end coupling component 375A, 375B can be connected to the components described above regarding... Figure 6 The descriptions are essentially similar. Here, encoders 389 and 389A (and corresponding cover plates 387E and 387EA) are arranged adjacent to each other in a mirror-image configuration at the mid-plane of the wrist end coupling 375 to protect encoders 389 and 389A from the high-temperature environment acting on the outer surface of the wrist end coupling 375. Each of the cover plates 387E and 387EA (and encoder dial ENT) includes a central hole 361 through which the drive shaft 200M3BD passes.

[0109] As described herein, the encoder dial ENT is a magnetic dial placed in a vacuum environment. Here, the magnetic dial is encapsulated within a sealed housing 396. Figure 3J and 3K Best viewed (also see) Figure 3H and 3I The sealed housing 396 includes a ferromagnetic backing or frame 396F containing a connector 396C configured to connect the frame 396F to the corresponding motor rotor 392 (or drive shaft), for example, via any suitable mechanical fastener. The frame 396F is configured to extend radially outward relative to the axis of rotation WX to position the encoder dial ENT in communication with the read head ENH; however, the frame 396F may also have any suitable configuration in which the encoder track is positioned in communication with the read head. The frame 396F includes a recess 396R in which the encoder dial ENT is placed. A non-ferrous isolation wall 396W is positioned above the encoder dial ENT and seals it to the frame 396F (e.g., by welding, epoxy resin, or any other vacuum-compatible fastening method that can form an hermetically tight seal), thereby encapsulating the encoder dial ENT within the frame 396F. The frame 396S or stator 391 may include a ferromagnetic shield 397 configured to magnetically isolate the motor rotor 392 and stator 391 from the interface between the read head ENH and the encoder dial ENT.

[0110] As described above, the encoder dial ENT includes an absolute position scale that provides the absolute position of the rotor 392 without the need for an origin marker or reference motion. Here, the absolute zero point (or any suitable reference position) of the absolute position scale can be mechanically aligned with the frame 396F in any suitable manner. The corresponding rotor 392 and stator 391 can also be positioned in a consistent electrical position relative to the encoder assemblies 389, 389A (e.g., rotationally aligned about the wrist axis WX), thereby producing a consistent motor phase angle between the substrate transport devices within a predetermined tolerance range (e.g., less than about 5 electrical angles) to eliminate the need for measurement operations of the corresponding phase angle during the assembly of the substrate transport devices.

[0111] As will be appreciated, although encoders 389 and 389A described herein are located at the wrist axis WX, instead of encoder 388, encoders 389 and 389A may also be placed at one or more of the elbow axis EX and shoulder axis SX. Here, the center hole 361 allows one or more cables / communication cables CBL, cooling lines CLTB, and exhaust lines EXL to pass through the encoder 389 and 389A assembly, into and through the drive shafts and rotors of the corresponding motors 200M1 and 200M2.

[0112] While the above-described features of this disclosure pertain to a conveyor arm with a direct-drive motor at each of the shoulder axis SX, elbow axis EX, and wrist axis WX, these features can also be applied to conveyor arms having at least one follower arm link or at least one follower end effector. For example, Figure 11A A substrate transport robot with follower end effectors 211A, 211B is shown. Power and / or data can be transmitted to and / or from the follower end effectors 211A, 211B in a manner similar to that described herein. Here, the substrate transport arm is a dual SCARA arm, comprising separated arm links 213, 212L, and 212R that are substantially similar to those described herein. The dual SCARA transport arm includes an upper arm 213 (which is separated in a manner similar to that of the upper arm 213, wherein the upper arm 213 includes a central housing portion 370A and two housing portions 372, the housing portion 370A being substantially similar to the housing portion 370), and two forearms 212R, 212L extending from the opposing ends 213R, 213L (e.g., relative to the shoulder axis SX) of the common (substantially rigid and non-hinged) upper arm 213. Forearm 212R connects to the distal end 213R of upper arm 213 at elbow axis EXR. Forearm 212L connects to the distal end 213L of upper arm 213 at elbow axis EXL. Each forearm 212R, 212L has at least one end effector 211A, 211B connected to it at its respective wrist axis WXR, WXL. Figure 11AIn this configuration, the rotation of end effectors 211A and 211B is followed by the corresponding upper arm portions 213L and 213R; however, drive motors can also be provided at wrist axes WXL and WXR (e.g., in a manner similar to that described herein) to directly drive the rotation of end effectors 211A and 211B. As will be appreciated, providing drive motors at each axis SX, EXR, EXL, WXR, WXL enables nonlinear or offset extension of end effectors 211A and 211B, wherein the drive motors are driven substantially simultaneously to cause end effectors 211, 211DS, 211DE, 211DT, 211DQ to extend along radial or non-radial paths or trajectories; however, the following end effectors are restricted to traveling along radial extension and retraction lines.

[0113] The upper arm 213 is connected to the frame 201 and is directly driven by the drive motor 200M1 in a manner similar to that described herein. In this example, each forearm 212R, 212L is directly driven by its respective drive motor 200M2A, 200M2B in a manner similar to that described herein; however, the rotation of the end effectors 211A, 211B follows the rotation of the corresponding upper arm portions 213L, 213R. Here, elbow drive pulleys 1110 at each elbow axis EXL, EXR may be mounted on a corresponding support 1110S, which is fixedly (e.g., non-rotatably) connected to the upper surface of the corresponding upper arm portions 213L, 213R (the term "upper" is used here for convenience only; it should be understood that any spatial identifier may be used to refer to the so-called upper surface). The support column 1110S (and the elbow drive pulley 1110) is hollow to surround the hollow drive shaft 200M2D of the corresponding motors 200M2A and 200M2B. As can be seen in Figure 11, the support column 1110S can have any suitable height or length depending on the arm configuration, such that at least a portion of the forearms 212R and 212L and the corresponding end effectors 211A and 211B are stacked on top of each other (e.g., at least in...). Figure 11A (The forearm and end effector shown are in the retracted configuration).

[0114] Also refer to Figure 11B , 11C12 and 13, forearms 212R and 212L are configured to accommodate an elbow (driving) pulley 1110, a wrist (driven) pulley 1150, a belt 1160 connecting the elbow driving pulley 1110 and the wrist driven pulley 1150, and one or more pressure tubes PT. Elbow and wrist end couplings 373 and 375 can be substantially similar to the couplings described herein; however, each elbow and wrist end coupling 373 and 375 can be formed with a pulley cavity, a pressure chamber recess, a bore 1200 leading to the interior of the hollow drive shaft 200M2D, and a drive belt channel. During assembly of forearms 212L and 212R, the pulley cavity and drive belt channel are exposed to a vacuum environment. The central arm portion 374 has a box-shaped or channel-shaped cross-section (as described above) that opens to a vacuum environment and is configured to connect with end couplings 373, 375 (e.g., during forearm assembly), such that elbow and wrist pulleys 1110, 1150 are interconnected by a belt 1160 passing through the central arm portion 374. One or more pressure tubes also pass through the central arm portion 374 between the respective pressure chambers ACH3-ACH5 of the end couplings 373, 375.

[0115] like Figure 11B and 11C As best seen in the middle, each of the elbow and wrist end couplings 373, 375 is bifurcated to form its own pressure chamber ACH3-ACH5 (which is similar to...) Figure 3C (As shown, it is connected to pressure chambers ACH2 and ACH1) and their respective pulley chambers (which are exposed to vacuum pressure). One or more pressure tubes PT, PT2, PT3 extend between elbow and wrist end couplings 373, 375, such that one or more of the cable / communication cable CBL, cooling line CLTB, and drain line EXL extend to the wrist axis WX to provide fluid transfer to / from pressure chambers ACH4 and ACH5 and / or to supply power to pressure chambers ACH4 and ACH5. Fluid transfer (e.g., forced convection cooling fluid) to pressure chambers ACH4 and ACH5 can provide cooling for the wrist pulley bearings (e.g., through a heat conduction path from the pressure chamber and bearing coupling to end coupling 375). This can cool the bearing mounting area by approximately 50% to approximately 60% of the ambient temperature of the process vacuum (e.g., above approximately 70ºC or above approximately 100ºC), thereby increasing the lifespan of the bearing lubricant for the wrist pulley 1150 (or, in the case of a direct-drive end effector, the rotor / drive shaft bearing). Cooling of the wrist can also be used to cool the wireless transmitters 341T and 342T (e.g., by convection or conduction cooling) and / or the wireless receivers 341R and 342R (by conduction cooling).

[0116] refer to Figure 1A-1IThe arm 333 of the conveyor 104, illustrated in 3R, 3S, and 3T, is shown with a drive section 200 having a coaxial drive shaft assembly 176, wherein drive motors 200M3 and 200M1 are disposed within a housing 200H and are used to drive their respective arm links 211 and 213. Motor 200M1 is connected to the upper arm 213 via a drive shaft 200M1D, wherein the drive shaft 200M1D and the upper arm 213 rotate as a whole about the shoulder axis SX under the drive of motor 200M1D. Motor 200M3 is connected to the end effector 211 via drive shaft 200M3D and a transmission device BPTE (e.g., a belt and pulley transmission or any other suitable transmission device), thereby driving the end effector 211 (and its connected shaft 290EE) to rotate about the wrist axis WX. The forearm 212 is illustrated as being driven by a transmission device BPT (e.g., a belt and pulley drive or any other suitable transmission device) and shafts 290F and 290FA, which are actuated by the housing 200H. However, a motor 200M2 may also be disposed in the housing 200H to drive shaft 290F, thereby allowing the forearm 212 to rotate independently about the elbow axis EX. Shaft 290FA is fixed to the forearm 212 so that it rotates about the elbow axis EX as a whole with the forearm 212.

[0117] Wireless data communication modules 180A, 180B, and 180C (as described above with respect to wireless data communication module 180) are located at the shoulder axis SX, elbow axis EX, and wrist axis WX, respectively; however, if downstream (e.g., downstream refers to the direction extending from the shoulder axis SX to the wrist axis WX through arm 333) arm links do not require data communication, wireless data communication modules may not be provided at the axes. The housing 2010 of wireless data communication module 180A is fixedly connected to housing 200H, and the rotation shaft 2100 of wireless data communication module 180A is connected to drive shaft 200M3D via a corresponding coupling 260. The housing 2010 of wireless data communication module 180B is fixedly connected to upper arm 213, and the rotation shaft 2100 of wireless data communication module 180B is connected to shaft 290FA via a corresponding coupling 260. The housing 2010 of the wireless data communication module 180C is connected to the forearm 212, while the rotating shaft 2100 of the wireless data communication module 180C is connected to the shaft 290EE via a corresponding coupling 260.

[0118] Data communication cable CBLA is routed into housing 200H and connected to printed circuit board 251 of wireless data transmission module 180A. Data communication cable CBLB is connected to printed circuit board 250 of wireless data transmission module 180A and extends through drive shaft 200M3D into upper arm 213. Data signals are communicated between data communication cables CBLA and CBLB via an interface between printed circuit boards 250 and 251 of wireless data communication module 180A and data communication module 255. Although data communication cable CBLB is illustrated as being connected to printed circuit board 251 of wireless data transmission module 180B, data communication cable CBLB can also provide data communication to components CC located within upper arm 213 (e.g., encoders, other suitable sensors, motors, etc., including wireless docking stations 345, 345A-345C and metering kits 340A, 340B described herein). Data communication cable CBLC, connected to printed circuit board 250 of wireless data transmission module 180B, extends through shaft 290FA into forearm 212. Data signals are communicated between data communication cables CBLB and CBLC via an interface between printed circuit boards 250 and 251 of wireless data communication module 180B and data communication module 255. Although data communication cable CBLC is illustrated as being connected to printed circuit board 251 of wireless data transmission module 180C, it can also provide data communication to components CC located within forearm 212 (e.g., encoders, other suitable sensors, motors, etc., including wireless docking stations 345, 345A-345C and metering kits 340A, 340B as described herein). Data communication cable CBLD, connected to printed circuit board 250 of wireless data transmission module 180C, extends through shaft 290EE to end effector 211 for providing data communication signals to and from any suitable component of end effector 211 (e.g., encoders, other suitable sensors, motors, etc., including wireless docking stations 345, 345A-345C and metering kits 340A, 340B as described herein).

[0119] refer to Figure 3B , 3DAccording to the present disclosure, wireless power and / or data transmission extension docks 345A-345C (also referred to as wireless docking stations) can be positioned at any suitable location on the articulated arms 333 and / or end effectors 211A, 211B. These wireless docking stations can provide power and high-speed data transmission to (and / or from) any suitable accessories carried by the articulated arms 333. These accessories are configured to perform automated maintenance and / or diagnostics on the substrate processing apparatus 100A-100G (or any part thereof). These accessories include, but are not limited to, metering kits 340A, 340B. Metering kits 340A and 340B can include any suitable sensors 340S, including but not limited to cameras, accelerometers, thermometers, tactile sensors (e.g., pressure-sensing pads, transducers, etc.), magnetometers, gyroscopes, contaminant sensors, humidity sensors, gas sensors, chemical sensors, pressure sensors, audio sensors, etc. Metering kits 340A and 340B may also include a processor 340C. Metrology kits 340A and 340B may include a power supply 340P (e.g., a battery, capacitor, etc.). Metrology kit 340A may be any suitable instrumented substrate, similar in shape and size to the production substrate S, but configured with one or more sensors (e.g., those described above) to enable metrology of the substrate processing apparatus 100A-100G.

[0120] The paired wireless docking station 340D provides power and high-speed data transmission to the processor (which can distribute power to the attached sensor 340S and power supply 340P, and communicate with the sensor 340S), wherein the wireless docking station 340D is configured to wirelessly pair with one of the corresponding wireless docking stations 345A-345C (see also described herein). Figure 20 Here, substantially unrestricted power and high-speed data transmission are provided to the metrology kits 340A and 340B for powering the sensor 340S and / or charging the power supply 340P, and for providing sensor feedback to the controller 110 (or any other suitable controller or console of the substrate processing apparatus 100A-100G).

[0121] Although wireless docking stations 345, 345A-345C are illustrated as being located on end effectors 211A, 211B and at wrist joint 340B, the wireless docking stations may also be located at any suitable location on articulated arm 333 that exposes the metering kit to the desired portion of substrate handling apparatus 100A-100G. For example, the wireless docking stations may be located at shoulder joint, elbow joint, wrist joint, on upper arm 213, on forearm 212, and / or on end effectors 211A, 211B (or any other suitable location on substrate delivery apparatus 104). Docking stations 345, 345A-345C may have any suitable configuration (and the paired wireless extension dock 340D may have any suitable configuration) for transmitting power and / or data to and / or from metering kits 340A, 340B. Dock stations 345, 345A-345C communicate with paired wireless docking station 340D via any suitable short-range transmission method (such as those described herein), including but not limited to one or more of millimeter-wave (ultra-wideband) transmission, capacitive transmission, and inductive transmission. Metering kits 340A, 340B are configured such that when picked up by substrate delivery device 104, paired wireless docking station 340D aligns with the corresponding docking station 345, 345A-345C, thereby establishing a wireless power / data link between the corresponding docking station 345, 345A-345C and paired wireless docking station 340D.

[0122] As will be appreciated, wireless power and / or data communication between the substrate delivery device 104 and the metrology kits 340A and 340B enables the implementation of the metrology kits 340A and 340B without being significantly limited by power and / or data bandwidth. In this respect, the metrology kits 340A and 340B can incorporate faster, more powerful processors, a greater number of sensors, etc., which can improve the performance and functionality of the metrology kits compared to conventional battery-powered kits. Furthermore, by employing high-speed data transmission (e.g., at least Gigabit Ethernet or EtherCAT, etc.) provided by this disclosure, the performance and functionality of the metrology kits (e.g., substantially unrestricted inspection / maintenance duration) can also be improved compared to conventional battery-powered metrology kits.

[0123] refer to Figure 14-16 As described herein, this disclosure can be used to provide power and / or data transmission to auxiliary devices connected to the articulated arm 333. For example, these auxiliary devices may include substrate sensors disposed on one or more of the articulated arm 333 and end effectors 211A, 211B. These auxiliary devices may include one or more thermal sensors 1410, heating elements 1520, and imaging sensors 1610. Figure 14As can be seen, one or more thermal sensors 1410 may be attached to the end portion 373 of the forearm 212, located at or near the elbow joint. The one or more thermal sensors 1410 may be infrared thermal sensors configured to sense at least the temperature of the substrate S held on the end effectors 211A, 211B as the end effectors 211A, 211B rotate about the wrist axis WX, such that the substrate S passes over the thermal sensors 1410. The substrate temperature may be received by the controller 110 and / or reported to the operator of the substrate handling apparatus 100A-100G for at least process control applications. The one or more thermal sensors 1410 may also sense the temperature of the end effectors 211A, 211B before picking up the substrate S, wherein the controller 110 may use the end effector temperature to determine thermal growth of the end effectors and / or to determine whether the end effector temperature is suitable for picking up the substrate (e.g., substantially avoiding thermal shock to the substrate by the end effectors 211A, 211B). Power and / or data may be wirelessly transmitted to and / or from one or more thermal sensors 1410, for example via wireless docking station 345 (e.g. Figure 3D , 3F As shown in 3G, the thermal sensor includes a paired wireless docking station 340D and is attached to the upper arm 212 such that the paired wireless docking station 340D is paired with the wireless docking station 345. One or more thermal sensors can be directly connected to the power / data cable CBL through a sealed hole in the end portion 373. Thermal management of the end effector (or other part of the delivery arm) can be managed in a manner similar to that described in U.S. Provisional Patent (Attorney General's Case No. 390P017165-US(-#1), entitled "Active Thermal Management of Substrate Holding Device on Substrate Transport System," filed December 19, 2023), the disclosure of which is incorporated herein by reference in its entirety.

[0124] refer to Figure 15A The heating element 1520 may be disposed on the cantilever support member 1510, which may be fixedly connected to the end portion 373 of the forearm 212, such that the support member 1510 and the forearm 212 rotate as a whole about the elbow axis EX. (Reference) Figure 15B The support member 1510A can be fixedly connected to the upper arm at the wrist axis WX (wherein the support member 1510A extends through the hollow drive shaft of the wrist motors 200M3A, 200M3B). The support member 1510A is connected to the forearm 212 at the wrist axis, such that the support member 1510A and the forearm 212 rotate as a whole about the elbow axis EX. Power and / or data can be transmitted to the heating element by any suitable means, such as wireless transmission from the wireless docking station 345 (e.g. Figure 3D , 3F(as shown in 3G), where each heating element 1520 includes a power and / or data receiver 341R and an associated antenna 341RA, which receives power and / or data transmitted from a power and / or data transmitter 341T and an associated antenna 341TA of a wireless docking station 345. A data and / or power cable CBL may be embedded within the support member 1510 (for sealing isolation from a vacuum environment) and connected to the heating element 1520. The data and / or power cable CBL of the support member 1510 is connected to the data and / or power cable within the atmospheric chamber ACH3 of the end portion 373 via a sealed port of the end portion 373 or via a wireless docking station 345 located within the atmospheric chamber ACH3 of the end portion 373 (the wireless docking station 345 mates with a paired wireless extension dock 340D of the support member 1510) (see [link to relevant documentation]). Figure 3C Heating element 1520 can be used to regulate the temperature of the substrate before and / or after substrate processing in process module 130. Heating element 1520 can be used to maintain a predetermined temperature for end effectors 211A, 211B, such that thermal shock to the substrate S by the end effectors is substantially avoided before or after substrate processing in process module 130. Heating element 1520 can be any suitable heating element, such as an LED heating element. Forearm 212 may include a heat shield such that heating element 1520 substantially does not heat forearm 212.

[0125] refer to Figure 16 One or more imaging sensors 1610 are disposed on at least the end portion 373 of the forearm. The imaging sensor may be a linear laser imaging sensor, or any other sensor suitable for detecting at least the edge of the substrate S (e.g., CCD sensor, CMOS sensor, capacitive sensor, inductive sensor, etc.). Power and / or data transmission may be provided to the one or more imaging sensors 1610 in a manner similar to that described above with respect to the thermal sensor 1410. An optical reflector 1610R may be disposed above the one or more imaging sensors 1610, for example on a support member 1510A (or support member 1510). End effectors 211A, 211B rotate about the wrist axis WX between the optical reflector 1610R and the one or more imaging sensors 1610, such that the one or more imaging sensors 1610 sense one or more of the end effectors 211A, 211B and their respective substrates S, thereby determining the position of the substrate S on the respective end effectors 211A, 211B. The controller 110 can utilize the position of the substrate S relative to the end effectors 211A, 211B to achieve on-the-fly automatic substrate centering for placing the substrate S in a holding position (e.g., the holding position of the process module 130 or other holding positions), or to position the end effectors 211A, 211B for picking up the substrate S from the holding position.

[0126] As can be recognized, Figures 14-16 The thermal sensor 1410, heating element 1520 and imaging sensor 1610 can be used in any suitable combination.

[0127] Refer again Figure 14 Other sensors that may be used for power and / or data transmission disclosed herein include arm linkage thermal sensors TS1-TS5, displacement sensors DS1, DS2, and a vision sensor CM. For example, thermal sensors TS1-TS5 may be placed in their respective end portions 370, 372, 373, 375, wherein the temperature of the end portions 370, 372, 373, 375 is used by the controller to determine, for example, the amount of thermal expansion of the respective upper arm 213 and forearm 212.

[0128] The displacement sensor DS1 can be a line-of-sight displacement sensor, having a transmitter DS1A disposed in one end portion 370, 372, 373, 375 of each of the upper arm 213 and the forearm 212, and a receiver DS1B (or reflector, if DS1A is a transceiver) disposed in the other end portion 370, 372, 373, 375 of each of the upper arm 213 and the forearm 212. Here, the controller 110 can use the displacement sensor DS1 to directly measure the thermal growth of the upper arm 213 and the forearm 212.

[0129] The displacement sensor DS2 can be a strain sensor having a strain gauge DS2G disposed in one end portion 370, 372, 373, 375 of each of the upper arm 213 and the forearm 212, and an anchor point DS2A disposed in the other end portion 370, 372, 373, 375 of each of the upper arm 213 and the forearm 212. A strain element DS2W (e.g., a wire or strip) is stretched between the strain gauge DS2G and the anchor point DS2A, wherein the controller 110 can determine the thermal growth of the upper arm 213 and the forearm 212 based on the tension change of the strain element DS2W.

[0130] The vision sensor CM can be any suitable camera (e.g., CCD, CMOS, etc.). The vision sensor CM can be placed in the arm link at each arm joint and arranged to observe adjacent arm links. For example, refer to... Figure 14In the elbow joint, the vision sensor CM can be arranged in the atmospheric chamber ACH2 of the end portion 372 of the upper arm 213. The vision sensor CM is positioned to observe the forearm 212 via the hollow drive shaft of the motor 200M2. Any suitable reference marker RM can be set within the forearm 212 at the elbow joint and within the field of view of the vision sensor CM. The controller 110 can be configured and the vision sensor CM can be calibrated such that the orientation of the reference marker RM relative to the reference frame of the vision sensor CM indicates the rotational orientation of the forearm 212 relative to the upper arm 213. Here, the rotational position of the forearm 212 relative to the upper arm 213 can be determined by the vision sensor CM, rather than (or supplementarily) by the encoder of the motor 200M2.

[0131] An accelerometer and / or tilt sensor AIS may be placed within the articulated arm 333 (e.g., near the wrist axis WX) to determine the amount of arm droop. The controller 110 is configured to determine the amount of arm droop based on signals received from the accelerometer and / or tilt sensor AIS and to compensate for the amount of arm droop by, for example, Z-axis movement of the articulated arm 333 (here, the drive portion of the arm includes a Z-axis drive motor / system).

[0132] Refer to Figure 1-16 and Figure 17 An exemplary method will be described. In this method, a substrate delivery device 104 is provided ( Figure 17 (Box 17000). The substrate delivery device 104 (described herein) may be mounted to or not mounted to the boom 143. As an example, the substrate delivery device includes a base 201 and articulated arms (including boom 143, turret 266, arm 210, arm 210A, arm 216, arm 217, arm 218, arm 219, arm 333, and one or more of any other articulated arms described herein). The articulated arms (e.g., the articulated arms described above) are connected to the base 201 via end joints (e.g., joints SX and / or BSX), about which the articulated arms rotate and extend, and have one or more movable arm links (e.g., arm links 220, 221, 212, 213, and...). Figure 2A-16 One or more of the arm links shown), and the end effector (e.g. Figure 2A-16 One or more end effectors are shown, which are connected to one or more movable arm links at the distal joint WX, and the end effector has a substrate holding stage SHS thereon (e.g., see...). Figure 3A Note that the other end effectors described herein each have a similar substrate holding stage.

[0133] At least one of the one or more movable arm links has a housing (e.g., see housings 212H, 213H and related information). Figure 2A-16Other arm link housings described and illustrated include at least one rotary joint (e.g., joints located at each of the axes BSX, BEX, SX, EX, WX) having a rotation axis (see axes BSX, BEX, SX, EX, WX), about which the at least one movable arm link is hingedly rotated to achieve extension and retraction of the articulated arm. The housing also includes at least another rotary joint (e.g., another of the axes BSX, BEX, SX, EX, WX), through which another movable arm link and at least one end effector are rotatably connected to at least one movable arm link.

[0134] The method also includes utilizing a power and data communication system (PDCS) distributed via an articulated arm to distribute power and / or data (…). Figure 17 (Block 17010), wherein the power and data communication system PDCS has at least one wireless power and / or data communication interface WPDC, which is wired through at least one rotary joint of the housing of at least one movable arm link (e.g., at least one joint located at each of the respective axes BSX, BEX, SX, EX, WX). The wireless power and / or data communication interface WPDC is configured as a contactless wireless communication interface via at least one rotary joint.

[0135] The method may include any combination of one or more of the following: a wireless power and / or data communication interface WPDC connected via at least one other arm link and at least one end effector via at least another rotary joint is configured as a contactless wireless communication interface; the contactless wireless communication interface is at least one of short-range wireless communication (as described herein) and short-range wireless communication (as described herein); the contactless wireless communication interface is configured for short-range wireless power and / or data communication, including optical communication, radio frequency communication, Wi-Fi communication, near-field communication, ultra-wideband communication, millimeter-wave communication, inductive communication, and Bluetooth. ® Infrared and Zigbee ® (As described herein); the contactless wireless communication interface is configured for a communication distance of approximately 20 mm or less (as described herein); a contactless communication power and / or data link is formed between at least one of the other arm link and end effector and at least one movable arm link via a wireless contactless power and / or data communication interface of another rotary joint, the contactless communication link traversing a spatial gap (e.g., gap MAG) formed by the rotary joint between the movable arm link and at least one of the other arm link and end effector; the housing is configured to form a sealed air chamber internally (e.g., see Figure 3C(etc.), the chamber houses the corresponding components of the transmitter and receiver for wireless communication power and / or data communication interfaces in a sealed atmosphere that is sealed and isolated from the depressurized environment outside the housing (e.g., see Figure 3D-3G (e.g., 3L, 3P, etc.); and any other features described herein.

[0136] Refer to Figure 1-16 and Figure 18 An exemplary method will be described. In this method, a transmission device (e.g., 125A, 125B, 125C, 125D, 125E, 125F, 125G) is provided. Figure 18 (Block 18000). The transfer device includes a frame TCF that forms a sealed chamber, which is sealed to maintain a processing vacuum (as described herein). The transfer device also includes articulated arms (including one or more booms 143, turret 266, arms 210, arms 210A, arms 216, arms 217, arms 218, arms 219, arms 333, and any other articulated arms described herein). The articulated arms (e.g., the articulated arms described above) are connected to the frame TCF inside the sealed chamber via end joints (e.g., joints SX and / or BSX), about which the articulated arms rotate and extend, and have at least one movable arm link (e.g., arm links 220, 221, 212, 213 and...). Figure 2A-16 One or more of the arm links shown), and an end effector (e.g., connected to the at least one movable arm link). Figure 2A-16 One or more end effectors shown), the end effector having a substrate holding stage SHS (e.g., see Figure 3A Note that the other end effectors described herein each have a similar substrate holding stage thereon. The sealed housing components 370-375 are interconnected via at least one mechanical joint MJ to form a sealed interface (e.g., see...). Figure 3B (etc.), the sealing atmosphere communicates between the various sealed housing components of the outer casing through the sealing interface.

[0137] As described herein, at least one movable arm link 213, 212 (and / or link 220, 221) has a housing 213H, 212H (links 220, 221 may have similar housings), which includes at least one rotary joint (e.g., a joint located at each of the respective axes BSX, BEX, SX, EX, WX) having a rotation axis (e.g., axes BSX, BEX, SX, EX, WX), about which at least one movable arm link is hingedly rotated to enable extension and retraction of the articulated arm. Each housing is an assembly of housing components 370-375, which are sealed to maintain a sealed atmosphere within each housing, each housing located within a vacuum inside a sealed chamber (e.g., delivery chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G).

[0138] The method also includes using a power and data communication system (PDCS) distributed via an articulated arm, distributing power and data via the articulated arm. Figure 18 (Box 18010). The Power and Data Communication System (PDCS) has a Wireless Power and / or Data Communication Interface (WPDC) that is wired via at least one rotary joint of the housing of at least one movable arm link. The Wireless Power and / or Data Communication Interface (WPDC) is configured as a contactless wireless communication interface via said at least one rotary joint.

[0139] The method may include any combination of one or more of the following: the contactless wireless communication interface is at least one of near-field wireless communication (as described herein) and short-range wireless communication (as described herein); the contactless wireless communication interface is configured for near-field wireless power and / or data communication, including optical communication, radio frequency communication, Wi-Fi communication, near-field communication, ultra-wideband communication, millimeter-wave communication, inductive communication, and Bluetooth. ® Infrared and Zigbee ® (As described herein); the contactless wireless communication interface is configured for a communication distance of approximately 20 mm or less (as described herein); a contactless communication power and / or data link is formed between at least one of the other arm link and end effector and at least one movable arm link via a wireless contactless power and / or data communication interface of another rotary joint, the contactless communication link traversing a spatial gap (e.g., gap MAG) formed by the rotary joint between the movable arm link and at least one of the other arm link and end effector; the housing is configured to form a sealed air chamber internally (e.g., see Figure 3C (etc.), the chamber houses the corresponding components of the transmitter and receiver for wireless communication power and / or data communication interfaces in a sealed atmosphere that is sealed and isolated from the depressurized environment outside the housing (e.g., see Figure 3D-3G(e.g., 3L, 3P, etc.); and any other features described herein.

[0140] Refer to Figure 1-16 and Figure 19 An exemplary method will be described. In this method, a substrate delivery device 104 is provided ( Figure 17 (Box 19000). The substrate delivery device 104 (described herein) may be mounted to or not mounted to the boom 143. As an example, the substrate delivery device includes a base 201 and articulated arms (including boom 143, turret 266, arm 210, arm 210A, arm 216, arm 217, arm 218, arm 219, arm 333, and one or more of any other articulated arms described herein). The articulated arms (e.g., the articulated arms described above) are connected to the base 201 via end joints (e.g., joints SX and / or BSX), about which the articulated arms rotate and extend, and have one or more movable arm links (e.g., arm links 220, 221, 212, 213, and...). Figure 2A-16 One or more of the arm links shown), and the end effector (e.g. Figure 2A-16 One or more end effectors are shown, which are connected to one or more movable arm links at the distal joint WX, and the end effector has a substrate holding stage SHS thereon (e.g., see...). Figure 3A Note that the other end effectors described herein each have a similar substrate holding stage.

[0141] At least one of the one or more movable arm links has a housing (e.g., see housings 212H, 213H and related information). Figure 2A-16 Other arm link housings described and illustrated include at least one rotary joint (e.g., joints located at each of the axes BSX, BEX, SX, EX, WX) having a rotation axis (see axes BSX, BEX, SX, EX, WX), about which the at least one movable arm link is hingedly rotated to achieve extension and retraction of the articulated arm. The housing also includes at least another rotary joint (e.g., another of the axes BSX, BEX, SX, EX, WX), through which another movable arm link and at least one end effector are rotatably connected to at least one movable arm link.

[0142] The method also includes distributing the data communication and bus power network (PDCN) (e.g., a network of power and data communication systems (PDCS) or a network of power and data communication systems (PDCS)) from the end joint through the distal joint to the entire articulated arm. Figure 19(Box 19010). The Data Communication and Bus Power Network (PDCN) is housed within the housing and extends through at least one rotary joint of the housing. The PDCN includes local control devices (e.g., transmitters, receivers, controllers, etc. of the substrate delivery device described herein) and sensors (e.g., encoders, substrate sensors, metering kit sensors, auxiliary device sensors, imaging / vision sensors, thermal sensors, displacement sensors, and other sensors described herein), respectively disposed on at least one movable link and at least one other movable arm link and end effector, and connected via a network interface (e.g., the corresponding wireless power and / or data communication interface WPDC described herein), thereby enabling local, onboard, real-time control of at least one of the following: active thermal control of the end effector; kinematic movement of the substrate holding stage SHS articulated by one or more movable arm links of the articulated arm; substrate or process metering; imaging of at least a portion of the articulated arm using an onboard imaging sensor; and onboard health monitoring of the articulated arm. The bus power may be DC bus power or AC bus power.

[0143] Although the Power and / or Data Communication Interface (WPDC) is described in relation to a conveyor system, the WPDC shown and described in the figures provides a modular approach that allows for easy integration into a wide range of automation applications requiring data transmission via a rotating shaft. While the WPDC can be described as having a modular implementation (see...), Figure 3B , 3C And 3Q-3T), but the power and / or data communication interface WPDC can also be achieved by using a rotating printed circuit board 251 and a non-rotating printed circuit board 251, and / or as per the above. Figure 3B , 3C The 3D-3G, 3L, and 3P description methods are fully integrated into existing rotary axes. This integration method can be used in space-constrained situations.

[0144] When the power and / or data communication interface WPDC is used in a vacuum or isolated environment (e.g., an inert gas environment), the rotating and non-rotating parts of the power and / or data communication interface WPDC can optionally be equipped with a hermetically sealed isolation wall HSIW (e.g., Figure 3R Separated (as shown), the isolation wall is made of any suitable material to provide data transmission between opposing wireless power and / or data communication components. Using the power and / or data communication interface WPDC in a vacuum or isolated environment can eliminate the cost of rotating vacuum-compatible seals at the rotary joint.

[0145] As described herein, the Power and / or Data Communication Interface (WPDC) provides a solution to the signal integrity issues caused by slip rings and the rotational limitations inherent in hardwired connections. Axial / radial alignment of wireless power and / or data communication components (e.g., wireless data communication module 255 of two printed circuit boards 250 and 251) provides high-bandwidth, high-quality signal transmission, and housing 201 provides a uniform and stable environment for millimeter-wave radio signal transmission, resulting in higher communication reliability. The WPDC provides a contactless approach, eliminating the component lifespan issues inherent in slip rings and hardwired connections.

[0146] refer to Figure 1A-16 20 and 21 will describe an exemplary method according to this disclosure. The method includes providing the substrate delivery device 104 described herein (… Figure 21 (Block 2500). For example, the substrate delivery device 104 may include a hinged arm 333 connected to a base 201 via an end-effector (rotational) joint MJ (e.g., one or more axes such as SX, BSX), the hinged arm 333 extending about the joint. The hinged arm 333 has one or more movable arm links 213, 212, and end effectors 211, 211A, 211B connected at a distal (rotational) joint MJ (e.g., at a wrist axis WX). Both the end-effector and distal joints are rotational joints MJ, and the end effectors 211, 211A, 211B have a substrate holding position SHS thereon. At least one movable link 213, 212 of one or more movable arm links is connected to housings 370-375, 200H, which includes at least one rotary joint MJ having rotation axes SX, BSX, EX. The at least one movable link 213, 212 is hinged about the rotary joint to achieve the extension and retraction of the articulated arm 333. The at least one movable link 213, 212 has a link housing 370-375, which includes at least another rotary joint MJ having corresponding rotation axes EX, WX. Another arm link 212 and at least one of the end effectors 211, 211A, 211B are rotatably connected to the at least one movable link 213, 212 via this other rotary joint. The substrate delivery device 104 may also include a power and data communication system PDCS.

[0147] The method includes a power distribution and data communication system (PDCS) via a hinged arm 333. Figure 21(Block 2510). The Power and Data Communication System (PDCS) has a contactless wireless data transmission or communication module 180 at at least one rotary joint MJ or at least another rotary joint MJ. The contactless wireless data communication module 180 has a module housing 2010 that houses a pair of transmitter and receiver printed circuit boards 250 and 251 (see at least [link to module 2510]). Figure 3U A contactless wireless communication interface WPDC is formed at and through at least one or more rotating joints MJ, which decouples the rotation of the at least one or more rotating joints MJ from the constraints of the power and data communication system PDCS, thereby making the rotation of the at least one or more rotating joints MJ substantially infinite. The transmitter and receiver printed circuit boards 250, 251 of the printed circuit board pair are aligned with predetermined alignment tolerances to provide a transmission rate of the contactless wireless data communication interface WPDC in the gigabytes per second (Gbps) range throughout the substantially infinite rotation.

[0148] The method may include one or more of the following, individually or in any suitable combination thereof, and / or in any suitable combination with other features described herein: the contactless wireless data communication interface WPDC has a transmission rate of up to approximately 3.125 The module housing 2010 has a static housing component 2000 and a dynamic housing component 205 connected to each other. One of the transmitter or receiver printed circuit boards 250, 251 of the printed circuit board pair is housed in the static housing component 2000, while the other transmitter or receiver printed circuit board 250, 251 of the printed circuit board pair is housed in the dynamic housing component 205. The static housing component 2000 is fixedly connected to at least one of the housing 200H and the connecting rod housings 370-375, and the dynamic housing component 205 has a rotor 2100 that rotates about a corresponding rotation axis SAX of at least one or at least another rotating joint MJ relative to the static housing component 2000 during the entire rotation of at least one or at least another rotating joint MJ. The other transmitter or receiver printed circuit board 250, 251 of the printed circuit board pair is mounted to the rotor 2100 in the dynamic housing component 205 so that during the entire rotation of at least one or at least another rotating joint MJ... During the process, relative to one of the transmitter or receiver printed circuit boards 250, 251 stationary in the static housing component 2000, the other transmitter or receiver printed circuit board 250, 251 rotates as a whole with the rotor 2100 about the corresponding rotation axis SAX of at least one or at least another rotary joint MJ; throughout the rotation of at least one or at least another rotary joint MJ, the other transmitter or receiver printed circuit board 250, 251 in the printed circuit board pair is held by the rotor 2100 aligned with one of the transmitter or receiver printed circuit boards 250, 251 in the printed circuit board pair by a predetermined alignment tolerance, which is substantially decoupled from the alignment and runout tolerances of at least one or at least another rotary joint MJ exceeding the predetermined alignment tolerance; the rotor 2100 is positioned relative to the static housing component 2000 by a deep groove radial ball bearing 215; the deep groove radial ball bearing 215 defines the predetermined alignment tolerance of the transmitter and receiver printed circuit boards 250, 251 in the printed circuit board pair.The module housing 2010 has a static housing component 2000 and a dynamic housing component 205 connected to each other. One of the transmitter or receiver printed circuit boards 250, 251 of the printed circuit board pair is housed in the static housing component 2000, while the other of the transmitter or receiver printed circuit boards 250, 251 of the printed circuit board pair is mounted to the rotor 2100 of the dynamic housing component 205. An hermetically sealed isolation wall HSIW separates the rotor 2100 from the static housing component 2000, wherein the hermetically sealed isolation wall HSIW is configured to allow data transmission between the transmitter and receiver printed circuit boards 250, 251 of the printed circuit board pair; and a flexible shaft coupling 260 is interposed between the rotor 2100 of the dynamic housing component 205 and the output shaft 290 of at least one rotary joint MJ or at least another rotary joint MJ, connecting the rotor 2100 of the dynamic housing component 205 to the output shaft 290 of at least one rotary joint MJ or at least another rotary joint MJ.

[0149] The following features are provided pursuant to this disclosure and may be used individually, in any combination with each other, and / or in any combination with the foregoing features: According to this disclosure, a substrate delivery device includes: a base; a hinged arm connected to the base via an end joint, the hinged arm rotating and extending about the end joint and having one or more movable arm links; and an end effector connected at a distal joint to the one or more movable arm links, the end effector having a substrate holding stage thereon, wherein at least one of the one or more movable arm links has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint to achieve extension and retraction of the hinged arm, and the housing containing at least another rotary joint, at least one of the other movable arm link and the end effector being rotatably connected to the at least one movable arm link via the at least other rotary joint; and a power and data communication system distributed through the hinged arm, wherein the power and data communication system has a wireless power and data communication interface, the interface being wired through at least one rotary joint of the housing of the at least one movable arm link, the wireless power and data communication interface being configured as a contactless wireless communication interface via the at least one rotary joint.

[0150] Substrate delivery devices, alone or in any suitable combination thereof, include one or more of the following: The wireless power and data communication interface is configured as a contactless wireless communication interface through at least one other rotary joint to at least one of at least one other arm link and end effector, wherein at least one rotary joint or at least one other rotary joint includes at least one wrist joint of an articulated arm that connects the end effector to one or more movable arm links. Non-contact wireless communication interfaces are at least one of short-range wireless communication and short-field wireless communication; Contactless wireless communication interface configurations are used for short-range wireless power and data communication, including optical communication, radio frequency communication, Wi-Fi communication, near-field communication, ultra-wideband communication, millimeter-wave communication, inductive communication, and Bluetooth. ® Infrared and Zigbee ® ; The contactless wireless communication interface is configured for a communication distance of approximately 20 mm or less; A non-contact power and data communication link is formed between at least one of the other arm links and the end effector and at least one movable arm link via a wireless non-contact power and data communication interface of another rotary joint. This non-contact communication link spans the spatial gap formed by the rotary joint between the movable arm link and at least one of the other arm links and the end effector. The housing is configured to form a sealed gas chamber inside, which houses the corresponding components of the transmitter and receiver for wireless communication power and data communication interfaces in a sealed atmosphere that is sealed and isolated from the depressurized environment outside the housing.

[0151] According to this disclosure, a transfer device includes: a frame forming a sealed chamber configured to maintain a processing vacuum therein; and a hinged arm connected to the frame within the sealed chamber, the hinged arm having an end joint about which it rotates and extends, and having at least one movable arm link and an end effector connected to the at least one movable arm link, on which a substrate holding stage is located; wherein the at least one movable arm link has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint to achieve extension and retraction of the hinged arm, and the housing is composed of housing components. The components are assembled, and these housing parts are sealed to maintain a sealed atmosphere within the housing body inside the processing vacuum of the sealed chamber; and the power and data communication system is distributed via articulated arms, wherein the power and data communication system has a wireless power and data communication interface, which is wired through at least one rotary joint of the housing body of the at least one movable arm link, the wireless power and data communication interface being configured as a contactless wireless communication interface through the at least one rotary joint; wherein the sealed housing parts are interconnected by at least one mechanical joint to form a sealed interface, and the sealed atmosphere is communicated between each sealed housing part of the housing body and each other through the sealed interface.

[0152] The transmission device, alone or in any suitable combination thereof, includes one or more of the following: Non-contact wireless communication interfaces are at least one of short-range wireless communication and short-field wireless communication; Contactless wireless communication interface configurations are used for short-range wireless power and data communication, including optical communication, radio frequency communication, Wi-Fi communication, near-field communication, ultra-wideband communication, millimeter-wave communication, inductive communication, and Bluetooth. ® Infrared and Zigbee ® ; The contactless wireless communication interface is configured for a communication distance of approximately 20 mm or less; A wireless contactless power and data communication interface forms a contactless communication power and data link between at least one movable arm link and the end effector, the contactless communication link bridging a spatial gap formed at the rotary joint between the at least one movable arm link and the end effector; and The housing is configured to form a sealed chamber inside, which houses the corresponding components of the transmitter and receiver for wireless communication power and data communication interfaces in a sealed atmosphere that is sealed and isolated from the depressurized environment outside the housing.

[0153] According to this disclosure, a substrate delivery device includes: a base; a hinged arm connected to the base via an end joint, the hinged arm rotating and extending about the end joint and having one or more movable arm links; and an end effector connected at a distal joint to the one or more movable arm links, the end effector having a substrate holding stage thereon, wherein at least one of the one or more movable arm links has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the at least one rotary joint to achieve extension and retraction of the hinged arm, and the housing containing at least one other rotary joint, at least one of the other movable arm link and the end effector being rotatably connected via the at least one other rotary joint. The system includes: a data communication and bus power network connected to the at least one movable arm link; and an arm-borne data communication and bus power network located on the articulated arm, distributed from the end joint through the distal joints throughout the articulated arm, the network being housed within a housing and passing through at least one rotary joint of the housing; wherein the network includes local control devices and sensors respectively disposed on at least one movable link and at least one other movable arm link and each of the end effector, connected via a network interface, thereby enabling local, onboard, and real-time control of at least one of the following: active thermal control of the end effector; kinematic movement of a substrate holding stage articulated by one or more movable arm links of the articulated arm; substrate or process metering; imaging of at least a portion of the articulated arm using an onboard imaging sensor; and onboard health monitoring of the articulated arm.

[0154] In the substrate delivery device, the bus power is DC bus power.

[0155] According to this disclosure, a method includes: providing a substrate delivery device comprising: a base; a hinged arm connected to the base via an end joint, the hinged arm rotating and extending about the end joint and having one or more movable arm links; and an end effector connected at a distal joint to the one or more movable arm links, the end effector having a substrate holding stage thereon, and wherein at least one of the one or more movable arm links has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint, thereby achieving... The extension and retraction of the articulated arm, and the housing includes at least one other rotary joint, at least one of the other movable arm link and the end effector being rotatably connected to the at least one movable arm link via the at least one other rotary joint; and, using a power and data communication system distributed through the articulated arm, power and data are distributed through the articulated arm, wherein the power and data communication system has a wireless power and data communication interface, which is wired through at least one rotary joint of the housing of at least one movable arm link, the wireless power and data communication interface being configured as a contactless wireless communication interface via the at least one rotary joint.

[0156] The method, alone or in any suitable combination thereof, includes one or more of the following: The wireless power and data communication interface is configured as a contactless wireless communication interface through at least one other rotary joint to at least one of at least one other arm link and end effector, wherein at least one rotary joint or at least one other rotary joint includes at least one wrist joint of an articulated arm that connects the end effector to one or more movable arm links. Non-contact wireless communication interfaces are at least one of short-range wireless communication and short-field wireless communication; Contactless wireless communication interface configurations are used for short-range wireless power and data communication, including optical communication, radio frequency communication, Wi-Fi communication, near-field communication, ultra-wideband communication, millimeter-wave communication, inductive communication, and Bluetooth. ® Infrared and Zigbee ® ; The contactless wireless communication interface is configured for a communication distance of approximately 20 mm or less; A wireless, contactless power and data communication link is formed between at least one of the other arm links and the end effector and at least one movable arm link via a wireless, contactless power and data communication interface of another rotary joint. This contactless communication link spans the spatial gap formed by the rotary joint between the movable arm link and at least one of the other arm links and the end effector. The housing is configured to form a sealed gas chamber inside, which houses the corresponding components of the transmitter and receiver for wireless communication power and data communication interfaces in a sealed atmosphere that is sealed and isolated from the depressurized environment outside the housing.

[0157] According to this disclosure, a method includes: providing a transfer device comprising: a frame forming a sealed chamber configured to maintain a processing vacuum therein; and a hinged arm connected to the frame within the sealed chamber, the hinged arm having an end joint about which it rotates and extends, and having at least one movable arm link and an end effector connected to the at least one movable arm link, on which a substrate holding stage is located, wherein the at least one movable arm link has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint to achieve extension and retraction of the hinged arm, and the housing is composed of housing components. The components, these housing parts are sealed to maintain a sealed atmosphere within the housing body inside the processing vacuum of the sealed chamber; and, using a power and data communication system distributed via a hinged arm, power and data are distributed via the hinged arm, wherein the power and data communication system has a wireless power and data communication interface, which is wired through at least one rotary joint of the housing body of the at least one movable arm link, the wireless power and data communication interface being configured as a contactless wireless communication interface via the at least one rotary joint; wherein the sealed housing parts are interconnected by at least one mechanical joint to form a sealed interface, and the sealed atmosphere is communicated between each sealed housing part of the housing body and each other through the sealed interface.

[0158] The method may include, alone or in any suitable combination, one or more of the following: Non-contact wireless communication interfaces are at least one of short-range wireless communication and short-field wireless communication; Contactless wireless communication interface configurations are used for short-range wireless power and data communication, including optical communication, radio frequency communication, Wi-Fi communication, near-field communication, ultra-wideband communication, millimeter-wave communication, inductive communication, and Bluetooth. ® Infrared and Zigbee ® ; The contactless wireless communication interface is configured for a communication distance of approximately 20 mm or less; A wireless contactless power and data communication interface forms a contactless communication power and data link between at least one movable arm link and the end effector, the contactless communication link bridging a spatial gap formed at the rotary joint between the at least one movable arm link and the end effector; and The housing is configured to form a sealed chamber inside, which houses the corresponding components of the transmitter and receiver for wireless communication power and data communication interfaces in a sealed atmosphere that is sealed and isolated from the depressurized environment outside the housing.

[0159] According to this disclosure, a method includes: providing a substrate delivery device, the substrate delivery device comprising: a base, and an articulated arm connected to the base via an end joint, the articulated arm rotating and extending about the end joint and having one or more movable arm links, and an end effector connected at a distal joint to the one or more movable arm links, the end effector having a substrate holding stage thereon, wherein at least one of the one or more movable arm links has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint to achieve extension and retraction of the articulated arm, and the housing containing at least one other rotary joint, at least one of the other movable arm link and the end effector being connected via the at least one other rotary joint. The joint is rotatably connected to the at least one movable arm link; and a data communication and bus power network located on the articulated arm is distributed from the end joint through the distal joint to the entire articulated arm, the network being housed within a housing and passing through at least one rotary joint of the housing; wherein the network includes local control devices and sensors respectively disposed on at least one movable link and at least one other movable arm link and each of the end effector, connected via a network interface, thereby enabling local, onboard, real-time control of at least one of the following: active thermal control of the end effector; kinematic movement of a substrate holding stage articulated by one or more movable arm links of the articulated arm; substrate or process metering; imaging of at least a portion of the articulated arm using an onboard imaging sensor; and onboard health monitoring of the articulated arm.

[0160] In this method, the bus power is DC bus power.

[0161] According to this disclosure, a substrate delivery device includes: a base; a hinged arm connected to the base via an end joint, the hinged arm extending about the end joint and having one or more movable arm links; and an end effector connected at a distal joint to the one or more movable arm links, both the end joint and the distal joint being rotary joints, the end effector having a substrate holding position thereon; wherein at least one of the one or more movable arm links is connected to a housing, the housing including at least one rotary joint having a rotation axis, the at least one movable link being hingedly rotated about the rotary joint to achieve extension and retraction of the hinged arm, and the at least one movable link having a link housing, the link housing including at least another rotary joint having a corresponding rotation axis, at least one of the other arm link and the end effector being rotatably connected to the at least one movable link via the at least another rotary joint; and power and data According to the communication system distributed via articulated arms, the power and data communication system has a contactless wireless data communication module at at least one or at least another rotating joint. This contactless wireless data communication module has a module housing that houses a pair of transmitter and receiver printed circuit boards formed at at least one or at least another rotating joint, and a contactless wireless communication interface passing through at least one or at least another rotating joint. This interface decouples the rotation of at least one or at least another rotating joint from the constraints of the power and data communication system, thereby making the rotation of at least one or at least another rotating joint substantially infinite. The transmitter and receiver printed circuit boards of the printed circuit board pair are aligned with predetermined alignment tolerances to provide a transmission rate of gigabytes per second (Gbps) for the contactless wireless data communication interface throughout the substantially infinite rotation.

[0162] The substrate delivery device, alone or in any suitable combination thereof, includes one or more of the following: The contactless wireless data communication interface has a transmission rate range of up to approximately 3.125 Gbps; The module housing has static housing components and dynamic housing components connected to each other. One of the transmitter or receiver printed circuit boards in the printed circuit board pair is housed in the static housing component, while the other transmitter or receiver printed circuit board in the printed circuit board pair is housed in the dynamic housing component. The static housing component is fixedly connected to at least one of the housing and the connecting rod housing, and the dynamic housing component has a rotor that rotates relative to the static housing component about a corresponding axis of rotation of at least one or at least another rotating joint during the entire rotation of at least one or at least another rotating joint. Another transmitter or receiver printed circuit board in the printed circuit board pair is mounted to a rotor in the dynamic housing component so that, during the entire rotation of at least one or at least another rotating joint, the other transmitter or receiver printed circuit board rotates as a whole with the rotor about the corresponding rotation axis of at least one or at least another rotating joint, relative to one of the transmitter or receiver printed circuit boards that is stationary in the static housing component. Throughout the rotation of at least one or at least another rotary joint, another of the transmitter or receiver printed circuit boards in the printed circuit board pair is held by a rotor to be aligned with one of the transmitter or receiver printed circuit boards in the printed circuit board pair by a predetermined alignment tolerance, which is substantially decoupled from the alignment and runout tolerances of at least one or at least another rotary joint that exceed the predetermined alignment tolerance. The rotor is positioned relative to the static housing components via deep groove radial ball bearings; Deep groove radial ball bearings limit the predetermined alignment tolerances of the transmitter and receiver printed circuit boards in the PCB alignment process; The module housing has a static housing component and a dynamic housing component connected to each other. One of the transmitter or receiver printed circuit boards in the printed circuit board pair is housed in the static housing component, while the other transmitter or receiver printed circuit board in the printed circuit board pair is mounted to a rotor in the dynamic housing component. An hermetically sealed isolation wall separates the rotor from the static housing component, wherein the hermetically sealed isolation wall is configured to allow data transmission between the transmitter and receiver printed circuit boards in the printed circuit board pair. A flexible shaft coupling is provided between the rotor of a dynamic housing component and the output shaft of at least one rotary joint or at least another rotary joint, and connects the rotor of the dynamic housing component to the output shaft of at least one rotary joint or at least another rotary joint.

[0163] According to this disclosure, a method includes: providing a substrate delivery device comprising: a base; a hinged arm connected to the base via an end joint, the hinged arm extending about the end joint and having one or more movable arm links; and an end effector connected at a distal joint to the one or more movable arm links, the end joint and the distal joint being rotary joints, the end effector having a substrate holding position thereon; wherein at least one of the one or more movable arm links is connected to a housing, the housing including at least one rotary joint having a rotation axis, the at least one movable link being hingedly rotated about the rotary joint to achieve extension and retraction of the hinged arm, and the at least one movable link having a link housing including at least another rotary joint having a corresponding rotation axis, at least one of the other arm link and the end effector being rotatably connected to the at least one movable link via the at least another rotary joint; and power and A data communication system; and a power and data communication system distributed via an articulated arm, wherein the power and data communication system has a contactless wireless data communication module at at least one or at least another rotating joint, the contactless wireless data communication module having a module housing that houses a pair of transmitter and receiver printed circuit boards formed at at least one or at least another rotating joint and through at least one or at least another rotating joint a contactless wireless communication interface that decouples the rotation of at least one or at least another rotating joint from the constraints of the power and data communication system, thereby making the rotation of at least one or at least another rotating joint substantially infinite; wherein the transmitter and receiver printed circuit boards of the pair of printed circuit boards are aligned with predetermined alignment tolerances to provide a transmission rate of gigabytes per second (Gbps) for the contactless wireless data communication interface throughout the substantially infinite rotation.

[0164] The method, alone or in any suitable combination thereof, includes one or more of the following: The contactless wireless data communication interface has a transmission rate range of up to approximately 3.125 Gbps; The module housing has static housing components and dynamic housing components connected to each other. One of the transmitter or receiver printed circuit boards in the printed circuit board pair is housed in the static housing component, while the other transmitter or receiver printed circuit board in the printed circuit board pair is housed in the dynamic housing component. The static housing component is fixedly connected to at least one of the housing and the connecting rod housing, and the dynamic housing component has a rotor that rotates relative to the static housing component about a corresponding axis of rotation of at least one or at least another rotating joint during the entire rotation of at least one or at least another rotating joint. Another transmitter or receiver printed circuit board in the printed circuit board pair is mounted to a rotor in the dynamic housing component so that, during the entire rotation of at least one or at least another rotating joint, the other transmitter or receiver printed circuit board rotates as a whole with the rotor about the corresponding rotation axis of at least one or at least another rotating joint, relative to one of the transmitter or receiver printed circuit boards that is stationary in the static housing component. Throughout the rotation of at least one or at least another rotary joint, another of the transmitter or receiver printed circuit boards in the printed circuit board pair is held by a rotor to be aligned with one of the transmitter or receiver printed circuit boards in the printed circuit board pair by a predetermined alignment tolerance, which is substantially decoupled from the alignment and runout tolerances of at least one or at least another rotary joint that exceed the predetermined alignment tolerance. The rotor is positioned relative to the static housing components via deep groove radial ball bearings; Deep groove radial ball bearings limit the predetermined alignment tolerances of the transmitter and receiver printed circuit boards in the PCB alignment process; The module housing has a static housing component and a dynamic housing component connected to each other. One of the transmitter or receiver printed circuit boards in the printed circuit board pair is housed in the static housing component, while the other transmitter or receiver printed circuit board in the printed circuit board pair is mounted to a rotor in the dynamic housing component. An hermetically sealed isolation wall separates the rotor from the static housing component, wherein the hermetically sealed isolation wall is configured to allow data transmission between the transmitter and receiver printed circuit boards in the printed circuit board pair. A flexible shaft coupling is located between the rotor of the dynamic housing component and the output shaft of at least one rotary joint or at least another rotary joint, and connects the rotor of the dynamic housing component to the output shaft of at least one rotary joint or at least another rotary joint.

[0165] It should be understood that the above description is illustrative only. Those skilled in the art can devise various alternatives and modifications without departing from this disclosure. Therefore, this disclosure is intended to cover all such alternatives, modifications, and variations that fall within the scope of any of the appended claims. Furthermore, the fact that different features are described only in mutually different dependent or independent claims does not mean that combinations of these features cannot be advantageously used, and such combinations remain within the scope of this disclosure.

[0166] What needs protection is:

Claims

1. A substrate delivery device, comprising: Base; A hinged arm connected to a base via an end joint, the hinged arm rotating and extending about the end joint, and having one or more movable arm links, and an end effector connected at a distal joint to the one or more movable arm links, the end effector having a substrate holding stage thereon. Wherein, at least one of the one or more movable arm links has a housing, the housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint to achieve extension and retraction of the articulated arm, and the housing containing at least another rotary joint, at least one of the other movable arm link and an end effector being rotatably connected to the at least one movable arm link via the at least another rotary joint; and The power and data communication system is distributed via an articulated arm, wherein the power and data communication system has a wireless power and data communication interface, the interface being wired through at least one rotary joint of the housing of at least one movable arm link, the wireless power and data communication interface being configured as a contactless wireless communication interface through the at least one rotary joint.

2. The substrate delivery device as claimed in claim 1, wherein, The wireless power and data communication interface is configured as a contactless wireless communication interface via at least one other rotary joint to at least one other arm link and end effector, wherein at least one rotary joint or at least one other rotary joint includes at least one wrist joint of the articulated arm, the at least one wrist joint connecting the end effector to one or more movable arm links.

3. The substrate delivery device as claimed in claim 1, wherein, A contactless wireless communication interface is at least one of short-range wireless communication and short-range wireless communication.

4. The substrate delivery device as claimed in claim 1, wherein, Contactless wireless communication interface configurations are used for short-range wireless power and data communication, including optical communication, radio frequency communication, Wi-Fi communication, near-field communication, ultra-wideband communication, millimeter-wave communication, inductive communication, and Bluetooth. ® Infrared and Zigbee ® .

5. The substrate delivery device as claimed in claim 1, wherein, The contactless wireless communication interface is configured for a communication distance of approximately 20 millimeters or less.

6. The substrate delivery apparatus as claimed in claim 1, wherein, A wireless contactless power and data communication interface of another rotary joint forms a contactless communication power and data link between at least one of the other arm link and end effector and at least one movable arm link, the contactless communication link spanning the spatial gap formed by the rotary joint between the movable arm link and at least one of the other arm link and end effector.

7. The substrate transport apparatus as claimed in claim 1, wherein, The housing is configured to form a sealed gas chamber inside, which houses the corresponding components of the transmitter and receiver of the wireless communication power and data communication interfaces in a sealed atmosphere that is sealed and isolated from the depressurized environment outside the housing.

8. A transmission device, comprising: A frame forming a sealed chamber, wherein the sealed chamber is configured to maintain a processing vacuum therein; and A hinged arm connected to the frame within a sealed chamber, the hinged arm having an end joint, the hinged arm rotating and extending about the end joint, and having at least one movable arm link and an end effector connected to the at least one movable arm link, on which a substrate holding stage is located; The at least one movable arm link has a housing, the housing including at least one rotary joint having a rotation axis, the at least one movable arm link being hinged about the rotary joint to achieve extension and retraction of the hinged arm, and the housing being an assembly of housing components sealed to maintain a sealed atmosphere within the housing within the processing vacuum of the sealed chamber; and The power and data communication system is distributed via an articulated arm, wherein the power and data communication system has a wireless power and data communication interface, the interface being wired through at least one rotary joint of the housing of the at least one movable arm link, and the wireless power and data communication interface being configured as a contactless wireless communication interface through the at least one rotary joint; The sealed housing components are interconnected by at least one mechanical joint to form a sealed interface, and the sealing atmosphere communicates between each sealed housing component of the outer shell and each other through the sealed interface.

9. The substrate delivery device of claim 8, wherein the contactless wireless communication interface is at least one of short-range wireless communication and short-range wireless communication.

10. The substrate delivery apparatus of claim 8, wherein, Contactless wireless communication interface configurations are used for short-range wireless power and data communication, including optical communication, radio frequency communication, Wi-Fi communication, near-field communication, ultra-wideband communication, millimeter-wave communication, inductive communication, and Bluetooth. ® Infrared and Zigbee ® .

11. The substrate delivery apparatus as claimed in claim 8, wherein, The contactless wireless communication interface is configured for a communication distance of approximately 20 millimeters or less.

12. The substrate delivery apparatus as claimed in claim 8, wherein, A wireless contactless power and data communication interface forms a contactless communication power and data link between at least one movable arm link and an end effector, the contactless communication link spanning a spatial gap formed at the rotary joint between at least one movable arm link and the end effector.

13. The substrate delivery apparatus as claimed in claim 8, wherein, The housing is configured to form a sealed chamber inside, which houses the corresponding components of the transmitter and receiver for wireless communication power and data communication interfaces in a sealed atmosphere that is sealed and isolated from the depressurized environment outside the housing.

14. A method comprising: Provide a substrate delivery device, including: Base A hinged arm connected to a base via an end joint, the hinged arm rotating and extending about the end joint, and having one or more movable arm links, and an end effector connected at a distal joint to one or more movable arm links, the end effector having a substrate holding stage thereon, and Wherein, at least one of the one or more movable arm links has a housing, the housing including at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the at least one rotary joint to achieve extension and retraction of the articulated arm, and the housing including at least another rotary joint, at least one of the other movable arm link and an end effector being rotatably connected to the at least one movable arm link via the at least another rotary joint; and A power and data communication system distributed via an articulated arm is used to distribute power and data, wherein the power and data communication system has a wireless power and data communication interface, the interface being wired through at least one rotary joint of the housing of at least one movable arm link, the wireless power and data communication interface being configured as a contactless wireless communication interface through the at least one rotary joint.

15. The method of claim 14, wherein, The wireless power and data communication interface is configured as a contactless wireless communication interface via at least one other rotary joint to at least one other arm link and end effector, wherein at least one rotary joint or at least one other rotary joint includes at least one wrist joint of the articulated arm, the at least one wrist joint connecting the end effector to one or more movable arm links.

16. The method of claim 14, wherein, A contactless wireless communication interface is at least one of short-range wireless communication and short-range wireless communication.

17. The method of claim 14, wherein, Contactless wireless communication interface configurations are used for short-range wireless power and data communication, including optical communication, radio frequency communication, Wi-Fi communication, near-field communication, ultra-wideband communication, millimeter-wave communication, inductive communication, and Bluetooth. ® Infrared and Zigbee ® .

18. The method of claim 14, wherein, The contactless wireless communication interface is configured for a communication distance of approximately 20 millimeters or less.

19. The method of claim 14, wherein, A wireless contactless power and data communication interface of another rotary joint forms a contactless communication power and data link between at least one of the other arm link and end effector and at least one movable arm link, the contactless communication link spanning the spatial gap formed by the rotary joint between the movable arm link and at least one of the other arm link and end effector.

20. The method of claim 14, wherein, The housing is configured to form a sealed gas chamber inside, which houses the corresponding components of the transmitter and receiver of the wireless communication power and data communication interfaces in a sealed atmosphere that is sealed and isolated from the depressurized environment outside the housing.

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