Workpiece conveying equipment with integrated vision end effector inspection

Abstract

A configurable robot has a base and an articulated robotic arm with an end effector thereon. A controller is connected to and configured to articulate the articulated robotic arm. A detector detects the end effector. Each end effector has identifying features, and the detector registers the identifying features and generates identification data reflecting predetermined configuration characteristics of the detected end effector. The controller is programmed to automatically identify and determine the predetermined configuration characteristics of the detected end effector from the data.

Description

[0001] Cross-references to related applications This application is a non-provisional application of U.S. Provisional Patent Application No. 63 / 586,853, filed on September 29, 2023, and claims the benefit thereof, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0002] This disclosure generally relates to workpiece handling, and more specifically to the calibration and monitoring of workpiece handling robots. Background Technology

[0003] Typically, automated robot teaching techniques for training workpiece handling robots to position themselves within automated processing environments (e.g., semiconductor processing systems) employ machine vision (e.g., cameras) mounted on a fixed device. The robot arm moves to position its end effector within the camera's field of view, which is used to detect the end effector's position. When the end effector is within the fixed device, its movement is restricted, which in turn limits the end effector's imaging using machine vision, making its absolute position uncertain. Furthermore, automated robot teaching techniques often employ training objects, such as those placed on the end effector by an operator. Placing such training objects on the end effector can lead to deviations in teaching accuracy.

[0004] Workpiece handling robots typically do not include feedback on the physical position of the end effector relative to the robot itself. During the operation of a workpiece handling robot, the end effector may shift or move relative to other parts of the robot, resulting in pick-up / placement errors.

[0005] Workpiece handling robots are typically manually configured for a specific type of end effector mounted on them. For example, when an end effector is mounted on a workpiece handling robot, the operator configures the robot by inputting (e.g., into the robot's controller) the type of end effector mounted (e.g., its operating characteristics). As can be recognized, manual configuration introduces potential human error during the workpiece handling robot configuration process.

[0006] Therefore, this disclosure resolves many of these problems. Attached Figure Description

[0007] The foregoing aspects and other features of this disclosure are explained in the following description in conjunction with the accompanying drawings, in which: Figure 1 This is an exemplary schematic diagram of a processing device in conjunction with the present disclosure; Figure 2A Based on this disclosure Figure 1An exemplary schematic perspective view of a portion of the processing equipment; Figure 2B-2G This is an exemplary description of a part of the workpiece conveyor of the processing apparatus according to this disclosure; Figure 3A This is an exemplary top view of a part of the workpiece conveyor of the processing apparatus according to this disclosure; Figure 3B Based on this disclosure Figure 3A An exemplary side view of a portion of the workpiece conveyor; Figure 3C Based on this disclosure Figure 3A An exemplary perspective view of a portion of a workpiece conveyor; Figure 4A Based on this disclosure Figure 3A An exemplary top view of a portion of the workpiece conveyor; Figure 4B Based on this disclosure Figure 3A An exemplary side view of a portion of the workpiece conveyor; Figure 5 Based on this disclosure Figure 3A A schematic perspective view of an exemplary end effector of a workpiece conveyor; Figure 5A Based on this disclosure Figure 1 A schematic diagram of a portion of the processing equipment; Figure 5B Based on this disclosure Figure 1 A schematic diagram of a portion of the processing equipment; Figure 6 and 7 This is a flowchart of an exemplary method according to this disclosure; Figure 8 Based on this disclosure Figure 3A An exemplary top view of a portion of the workpiece conveyor; Figure 8A Based on this disclosure Figure 3A An exemplary side view of a portion of the workpiece conveyor; Figure 9 This is a flowchart of an exemplary method according to this disclosure; Figure 10 Based on this disclosure Figure 1 A schematic diagram of a portion of the processing equipment; Figure 11A-11C It is based on this disclosure and is in various orientations Figure 10 A schematic diagram of a part of the workpiece conveyor; Figure 12 This is a flowchart of an exemplary method according to this disclosure; Figure 13This is a flowchart of an exemplary method according to this disclosure; Figure 14 This is a flowchart of an exemplary method according to this disclosure; Figure 15 A flowchart illustrating an exemplary method according to this disclosure; and Figure 16 This is a flowchart of an exemplary method according to this disclosure. Detailed Implementation

[0008] The following detailed description is intended to assist those skilled in the art in understanding and is not intended to unduly limit the claims relating to or relating to this disclosure in any way.

[0009] The following detailed description refers to the various accompanying drawings, wherein, whether or not a specific drawing is referenced, the same reference numerals refer to the same parts and features in the various drawings.

[0010] As used herein, the word “each / every” refers to a single object (i.e., object) in the case of a single object or each object in the case of multiple objects. As used herein, the words “a,” “one,” and “the” include “at least one” and “one or more” so as not to limit the objects referred to in their “singular” form.

[0011] Figure 1 An exemplary processing apparatus or tool 100 according to this disclosure is shown. Although this disclosure will be described with reference to the accompanying drawings, it should be understood that this disclosure can be implemented in many forms. Furthermore, any suitable size, shape, or type of element or material can be used. It should also be noted that although this disclosure refers to X, Y, Z, R, EX, EY, EZ axes and rotational terms θ, ERx (pitch), ERy (roll), ERz (yaw) as well as directional terms (e.g., vertical, horizontal, etc.), such naming is merely exemplary, and the different axes (axis lines) and directions mentioned herein can be referred to using any suitable naming.

[0012] As used herein, this disclosure provides an improved (compared to the conventional techniques described above) automated teaching process for teaching the position of a workpiece handling robot (also referred to herein as a configurable robot, robot, or workpiece conveyor) 180 within a teaching process apparatus 100. The automated teaching process provides a general and uniform teaching algorithm that incorporates any number of different types of end effectors 200 (e.g., physical configurations and operational characteristics as described herein). Here, the automated teaching algorithm utilizes only three cameras (e.g., at least one of a two-dimensional camera and a stereo camera pair and a depth-determining camera) or at least one optical array sensor to provide detection / measurement of the attitude of the end effector 200 in six degrees of freedom (i.e., X, Y, Z, pitch, roll, and yaw in the conveyor reference frame, and / or EX, EY, EZ, pitch, roll, and yaw in the end effector reference frame). The automated teaching process employs a neural network model NNM or any other suitable algorithm trained to detect different types of end effectors in order to substantially eliminate or at least reduce the possibility of human error during robot configuration. The stereo camera provides depth calculations to the pair of cameras and / or the depth determination camera to more accurately measure the end effector attitude. The at least one optical array sensor also provides depth calculations to more accurately measure the end effector attitude.

[0013] This disclosure also provides automatic configuration of the workpiece conveyor 180 by automatically detecting the type of the end effector 200 installed on the workpiece conveyor 180, so that the workpiece conveyor 180 is automatically configured with operating parameters corresponding to the installed end effector 200 (also referred to herein as predetermined configuration characteristics PCC, PCCA-PCCn, see...). Figure 1 Here, each end effector 200 is provided with an integrated self-identifying feature (also referred to herein as an identifier or identification device) 500, which can be detected by the workpiece conveyor 180 (e.g., by its detector 370 or a detector 370 communicatively connected to it). The self-identifying feature 500 corresponds to predetermined operating parameters (e.g., predetermined robot operation functions) (e.g., via a lookup table 500T stored in any suitable memory of the controller 199), which are automatically loaded into the controller 199 for operating the workpiece conveyor 180. This automatic detection and configuration is achieved during the initial setup of the workpiece conveyor 180 and during any reconfiguration of the workpiece conveyor 180 in the robot manufacturing plant or on-site (e.g., the customer's plant where the workpiece conveyor 180 is operated in product production) (e.g., exchange of end effectors of the same or different types). The identifier 500 can be configured to achieve end effector attitude determination by detecting the identifier 500 using at least one of at least two-dimensional cameras, a stereo camera pair, and a depth-determining camera, and at least one optical array sensor.

[0014] This disclosure also provides for automatically reconfiguring the workpiece conveyor 180 by utilizing the automatic exchange of end effectors within a production environment (e.g., within a processing tool), thereby avoiding tool downtime typically associated with workpiece conveyor reconfiguration. Here, an end effector exchange station 169 is located in or coupled to the processing tool 100. As described above, each end effector 200 may include a self-identifying feature (e.g., an identifier 500) detectable by the workpiece conveyor 180 for reconfiguration of the workpiece conveyor 180 by exchanging the end effector 200 at the end effector exchange station 169. It can be recognized that, given that the workpiece conveyor 180 has already been taught its position within the processing equipment 100, and that the operating characteristics of each end effector 200 are known from the lookup table 500T, when each end effector 200 is exchanged and coupled to the workpiece conveyor 180, the base plate position of the end effector 200 (which is at a predetermined known position on the end effector 200, the predetermined known position being the operating characteristics of the end effector 200 obtained from the lookup table 500T) is known to the controller 199, so that it is not necessary to re-teach the position of the workpiece conveyor 180.

[0015] According to this disclosure, the workpiece handling robot 180 is also configured with a machine vision system 180V (also referred to herein as vision system 180V) for monitoring the position of the end effector 200 relative to other parts of the workpiece conveyor 180. The vision system may be part of a detector 370 having at least one of an identification sensor 370D, vision system 180V, and end effector sensor 316. Monitoring the position of the end effector 200 can substantially prevent robot pick / placement errors, as the operator can be alerted when a deviation of the end effector 200 from a predetermined position relative to other parts of the workpiece conveyor 180 is detected, allowing for correction of the positional deviation.

[0016] Processing apparatus 100 can be configured to process any suitable workpiece W in any suitable processing environment. For example, workpiece W can be any desired type of planar workpiece, such as a semiconductor workpiece, a flat panel for a flat panel display, an imaging plate (e.g., a mask or photomask), a semiconductor packaging substrate (e.g., high-density interconnects), a semiconductor wafer (e.g., 200 mm, 300 mm, or larger), or any other planar workpiece. The processing environment in one or more portions of processing apparatus 100 can be a vacuum environment or an atmospheric pressure environment (e.g., where an atmospheric pressure environment includes at least a portion of processing apparatus 100 filled with inert gas or clean, dry air). For example, one portion of processing apparatus 100 may have a vacuum environment while another portion of processing apparatus 100 has an atmospheric pressure environment, or all portions of processing apparatus 100 may have an atmospheric pressure environment.

[0017] For illustrative purposes only, the processing apparatus 100 includes a workpiece processing section 150 and a loading port module 120 coupled to the workpiece processing section 150. The loading port module 120 is configured to interface with a transfer container 110 to open the transfer container 110 to the processing environment within the workpiece processing section 110. The workpiece processing section 150 includes, for example, an environment front-end module or EFEM 130 and a workpiece processing module 140.

[0018] See Figure 1 The EFEM 130 may have a housing or enclosure (also referred to as an EFEM frame) defining a protected environment or microenvironment in which workpiece W can be accessed and processed with minimal possibility of contamination between the transfer containers 110. The protected environment is used for transferring workpiece W to and from the processing equipment 100 and workpiece processing module 140. The EFEM 130 also includes a workpiece conveyor 180 disposed within the EFEM 130 frame and configured with at least one end effector 200 for transferring workpiece W between the transfer container 110 and the workpiece processing module 140.

[0019] According to this disclosure, as described herein, the workpiece conveyor 180 includes a vision system 180V, wherein the vision system 180V is configured to image and monitor the state of at least one end effector 200 in one or more dimensions, thereby enabling the determination of any deviation of the end effector 200 from a predetermined nominal state of the end effector 200 (in a nominal posture determined by the detector 370 from the initial installation of the end effector to the conveyor arm 180TA and / or from the CAD model of the robot 180). As also described herein, at least one end effector 200 of the workpiece conveyor 180 may be interchangeable (e.g., manually or automatically) with and selected from a number of different end effectors 200A-200n (hereinafter generally referred to as end effector 200). Each of the different end effectors 200, 200A-200n has a different predetermined configuration characteristic PCC, PCCA-PCCn, which characterizes a corresponding different predetermined operation robot function corresponding to the end effector 200A-200n selected for coupling to the workpiece conveyor 180.

[0020] Each different end effector 200, 200A-200n includes at least an identifier 500 (see Figure 3) that can be read by the identification sensor 370D of the workpiece conveyor 180. Figure 5This allows the end effector 200, 200A-200n to be automatically identified by the workpiece conveyor 180 when the end effectors 200, 200A-200n are mounted to the workpiece conveyor 180. As described herein, each end effector 200 has an identifier 500 integrated with and outside the body of the end effector 200 (e.g., any one or more of the end effector base 510, workpiece holding station 520, and end effector supports 310A, 310B), wherein (as described herein) the identifier 500 is configured to express (or otherwise embody) identification data corresponding to the different predetermined configuration characteristics PCC, PCCA-PCCn of the end effectors 200, 200A-200n. End effectors 200, 200A-200n are mounted to conveyor arm 180TA in a predetermined orientation relative to conveyor arm 180TA, wherein, according to this disclosure, the (actual) orientation of end effectors 200, 200A-200n relative to the predetermined orientation is determined (e.g., according to predetermined configuration characteristics PCC, PCCA-PCCn) and monitored during the deployment of end effectors 200, 200A-200n onto conveyor arm 180TA.

[0021] EFEM 130 may also include (or be coupled to) an autonomous workpiece transfer teaching station 166, which is configured to determine the position of the workpiece conveyor 180 within the processing equipment 100 (the position including, for example, the center position of the end effector 200 and the spatial orientation of the end effector 200 relative to the reference frame of the workpiece conveyor 180) and teach the position to the workpiece conveyor 180.

[0022] The workpiece processing module 140 can be configured to perform any appropriate processing on the workpiece W. For example, the workpiece processing module 140 can be configured as a workpiece classifier, a storage device, a metering module, or configured to perform manufacturing processes on the workpiece. The workpiece processing module 140 can have any suitable controlled environment (e.g., atmospheric pressure environment, inert gas environment, clean dry air environment, vacuum environment, etc.) and typically includes a processing system for handling the workpiece. Where the workpiece processing module 140 includes a vacuum environment, the vacuum can be a high vacuum, for example, approximately 1 × 10⁻⁶. -5 Pa (e.g., approximately 0.001 Pa) or lower. Exemplary processes that can be performed in the processing module include, but are not limited to, cleaning, baking, inspection, thin film processing using vacuum (e.g., plasma etching or other etching processes), chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation (e.g., ion implantation), metrology, rapid thermal processing (RTP), dry strip atomic layer deposition (ALD), oxidation / diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonding and evaporation, and other thin film processing using vacuum pressure.

[0023] Suitable examples of the processing apparatus that can be used with the present disclosure can be found, for example, in the following documents: U.S. Patent Application No. 15 / 215,143, filed July 20, 2016, entitled “Substrate Processing Apparatus”; U.S. Patent No. 10,777,438, entitled “Processing Apparatus”, granted September 15, 2020; U.S. Patent No. 8,960,099, entitled “Substrate Processing Apparatus”, granted February 24, 2015; U.S. Patent No. 8,371,792, entitled “Substrate Processing Apparatus”, granted February 12, 2013; and U.S. Patent No. 7,988,398, entitled “Linear Substrate Transport”. U.S. Patent No. 9,105,673, entitled "Side Opening Unified Pod," was granted on August 11, 2015; U.S. Patent No. 9,401,294, entitled "Compact Substrate Transport System," was granted on July 26, 2016; U.S. Patent No. 6,520,727, entitled "Modular Sorter," was granted on February 18, 2003; U.S. Patent No. 8,292,563, entitled "Nonproductive Wafer Buffer Module for Substrate Processing Apparatus," was granted on October 23, 2012; and U.S. Patent No. 11,295,975, entitled "Method and Apparatus for Substrate Alignment," was granted on October 23, 2012. U.S. Patent No. 7,100,340, entitled "Unified Frame for Semiconductor Material Handling System," was granted on April 5, 2022; U.S. Patent No. 7,100,340, entitled "Unified Frame for Semiconductor Material Handling System," was granted on September 5, 2006; and U.S. Patent No. 7,217,076, entitled "Semiconductor Material Handling System," was granted on May 15, 2007.U.S. Patent No. 7,648,327, entitled "Wafer Engine," granted January 19, 2010; U.S. Patent No. 7,066,707, entitled "Wafer Engine," granted June 27, 2006; U.S. Patent No. 9,943,969, entitled "Clean Transfer Robot," granted April 17, 2018; and International Patent Application No. PCT / US13 / 25513, entitled "Substrate Processing Apparatus," filed February 11, 2013, are incorporated herein by reference in their entirety.

[0024] See Figure 2A-2G The workpiece conveyor 180 has a base 180B, at least one articulated robotic arm (also referred to herein as a conveyor arm) 180TA, and a controller 199 (which may be integrated with or detached from the controller of the device in which the workpiece conveyor 180 operates). The controller 199 is connected and configured to articulate the conveyor arm 180TA to perform the predetermined robotic functions described herein.

[0025] The base 180B of the transfer arm 180TA is movably mounted to the frame 130F of the EFEM 130 or the frame of any suitable transfer chamber (e.g., having a vacuum or atmospheric environment) of any suitable processing equipment. The workpiece transferor 180 includes any suitable number of drive shafts (e.g., motors / drivers) to enable the transfer arm 180 to articulate and move the workpiece along one or more of the X, Y, Z, θ, Rx, Ry, and R (end-effector or workpiece holder 200) axes. For example, the workpiece transferor 180 includes at least one transfer arm 180TA, each of which has an end-effector 200 and is articulated to move with at least one degree of freedom, and utilizes the end-effector 200 to perform a predetermined manipulator function. The predetermined manipulator function can be any suitable manipulator function, including but not limited to picking up, placing, aligning, clamping, or performing any other function to handle and / or transfer workpieces.

[0026] At least one conveyor arm 180TA can be mounted to the bracket 241 such that at least one conveyor arm 180TA is movably mounted to the frame 130F. The bracket 241 can be mounted to the slider 241S for movement in the X direction; however, the bracket 241 can be mounted to the frame 130F for fixation in the X (and / or Y) direction. Any suitable actuator 242 is mounted to the frame 130F and drivenly connected to the bracket 241 via any suitable transmission 242T to move the base 240 in the X direction. The transmission 242T can be a belt and pulley drive, and the actuator 242 is a rotary actuator, but the actuator 242 can be a linear actuator, drivenly connected to the bracket 241 using any suitable transmission or without a transmission (e.g., as in the case where the bracket includes a drive portion of a linear actuator).

[0027] At least one transfer arm 180TA is any suitable transfer arm, such as... Figure 2C The linear sliding transmission arm 214 shown, or any suitable arm linkage mechanism (e.g., Figure 2B-2G(as shown) any other suitable transfer arm, wherein the hinge of the arm is one or more of the linear sliding motion and rotational motion of one or more arm links. Suitable examples of arm linkage mechanisms can be found, for example, in the following documents: U.S. Patent No. 7,578,649, issued August 25, 2009; U.S. Patent No. 5,794,487, issued August 18, 1998; U.S. Patent No. 7,946,800, issued May 24, 2011; U.S. Patent No. 6,485,250, issued November 26, 2002; U.S. Patent No. 7,891,935, issued February 22, 2011; U.S. Patent No. 8,419,341, issued April 16, 2013; U.S. Patent Application Serial No. 13 / 293,717, entitled "Dual Arm Robot," filed November 10, 2011; and U.S. Patent Application Serial No. 13 / 861,693, entitled "Linear Vacuum Robot with Z-axis Motion and Articulated Arm." U.S. Patent No. 7,648,327, entitled “Wafer Engine,” filed September 5, 2013; U.S. Patent No. 16 / 257,595, entitled “Automatic Wafer Centering Method and Apparatus,” filed January 25, 2019; and U.S. Patent Application No. 14 / 928,352, entitled “Wafer Aligner,” filed October 30, 2015, are all of the disclosures of which are incorporated herein by reference in their entirety.

[0028] In this disclosure, at least one transfer arm 180TA can be or is derived from: a conventional SCARA (Selective Compliant Articulated Robotic Arm) type design (see...) Figure 2F The SCARA arm 219 (in which the upper arm, forearm, and end effector are located); or is derived from a telescopic arm or any other suitable arm design, such as a Cartesian linear sliding arm (see example...). Figure 2A and 3A Any such design configuration also includes a sliding body 220 and at least one substrate holder 200A1, 200A2 (see at least [reference needed]). Figure 3A and 3B As further described herein. For example, the sliding body 220 can be mounted to the arm link of any suitable articulated transfer arm 180TA, 180TA1, 180TA2 (see at least [reference needed]). Figure 2A and3A For example, suitable examples of transport arms can be found in U.S. Patent Application Serial No. 12 / 117,415, filed May 8, 2008, entitled “Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism,” and Patent No. 7,648,327, granted January 19, 2010, the disclosure of which is incorporated herein by reference in its entirety. The operation of transport arms 180TA, 180TA1, and 180TA2 can be independent of each other (e.g., the extension / retraction of each arm is independent of the others), can be operated by a bleed switch, or can be operably linked in any suitable manner such that the arms share at least one common drive axis, wherein at least one common drive axis is implemented in a drive shaft or drive member (or otherwise defined by a drive shaft or drive member). Transport arms 180TA, 180TA1, and 180TA2 can have any other desired arrangement, such as frog-leg arm 216 (…). Figure 2B Configuration, Frog Jump Arm 217 ( Figure 2E Configuration, double symmetrical arm 218 ( Figure 2D ) configuration, multi-SCARA arm configuration ( Figure 2GSuitable examples of conveyor arms can be found in the following documents: U.S. Patent No. 6,231,297, issued May 15, 2001; U.S. Patent No. 5,180,276, issued January 19, 1993; U.S. Patent No. 6,464,448, issued October 15, 2002; U.S. Patent No. 6,224,319, issued May 1, 2001; U.S. Patent No. 5,447,409, issued September 5, 1995; U.S. Patent No. 7,578,649, etc. U.S. Patent No. 5,794,487, granted on August 25, 2009; U.S. Patent No. 7,946,800, granted on May 24, 2011; U.S. Patent No. 6,485,250, granted on November 26, 2002; U.S. Patent No. 7,891,935, granted on February 22, 2011; U.S. Patent Application No. 16 / 257,595, entitled "Automatic Wafer Centering Method and Apparatus" U.S. Patent Application No. 13 / 293,717, entitled “Dual Arm Robot,” filed January 25, 2019; and U.S. Patent Application No. 13 / 270,844, entitled “Coaxial Drive Vacuum Robot,” filed October 11, 2011, are all incorporated herein by reference in their entirety.

[0029] See Figure 2A , 3A In accordance with 3B, for illustrative purposes, the workpiece conveyor 180 includes a rotary driver 262, a Z-drive column 280, a sliding body 220, and one or more (e.g., at least one) end effectors 200, 200A1, 200A2. The rotary driver 262 is any suitable rotary driver mounted to a frame 130F of the conveyor chamber 130 or to a sliding bracket 241 of the conveyor chamber 130, wherein the sliding bracket 241 is configured to linearly move the workpiece conveyor 180 along the length of the conveyor chamber 130 (e.g., in the X direction). The Z-drive column 280 is mounted to the output of the rotary driver 262 to rotate about an axis θ (e.g., the θ direction) in the direction of arrow T. The sliding body 220 is movably mounted to the Z-drive column 280, wherein the Z-drive column 280 includes any suitable drive motor 280D and / or transmission 280DT for moving the sliding body 220 in the Z direction. Here, the Z-drive column 280 and the sliding body 220 (and any arm / end effector connected to the sliding body 220) rotate as a unit about the θ axis.

[0030] One or more end effectors 200, 200A1, 200A2 are movably mounted to the sliding body 220 in any suitable manner for extending and retracting in the R direction. (Although for illustrative purposes only...) Figure 3A and 3B Two end effectors 200A1 and 200A2 are shown, but it should be understood that any suitable number of end effectors 200 can be mounted to the sliding body 220 (i.e., coupled to the sliding body 220 to be suspended from and move / slide along the sliding body in any suitable manner, such as in a manner similar to that described in U.S. Patent Nos. 7,100,340, 7,066,707, 7,648,327, and 7,217,076, the disclosure of which is previously incorporated herein by reference in its entirety). For example... Figure 2A A single end effector 200 is shown mounted on a sliding body 220 for workpiece transfer. More than two end effectors 200 may be mounted on the sliding body 220 for workpiece transfer. As will be described in more detail here, end effectors 200 are selectively mounted on the transfer arm 180TA from a number of different, interchangeable end effectors 200A-200n, each end effector having different predetermined configuration characteristics PCC, PCCA-PCCn, which characterize corresponding different predetermined robot functions for the selected end effector 200. The different predetermined configuration characteristics PCC, PCCA-PCCn of the end effectors 200, 200A-200n can be any suitable characteristics for interfacing with the workpiece held thereon, including but not limited to passive workpiece clamping configurations, active workpiece clamping configurations, vacuum workpiece clamping configurations, workpiece alignment configurations (the end effector includes an integrated workpiece aligner), batch workpiece holding configurations, and any other suitable configurations or combinations thereof for holding, interfacing, and transferring one or more workpieces. Here, the end effectors 200, 200A-200n, which are mounted on the conveyor arm 180TA, select and determine the corresponding different operating robot functions of the workpiece conveyor 180.

[0031] It can be appreciated, and for illustrative purposes only, that each of one or more end effectors 200, 200A1, 200A2, in units of transfer arms 180TA, 180TA1, 180TA2, is laterally moved relative to frame 130F in a first direction (e.g., in the Z direction or in a direction within a plane defined by the X and Y directions) (see [link to documentation]). Figure 2AOne or more end effectors 200, 200A1, 200A2 also linearly lateralize relative to the sliding body 220 in a second direction (e.g., the R direction) different from the first direction. The sliding body 220 includes one or more linear actuators 225 configured to independently move each end effector 200, 200A1, 200A2 in the R direction. One or more linear actuators 225 are any suitable actuators with any suitable drive mechanism (e.g., screw drive, belt / pulley drive, belt / pulley drive, etc.), which may be substantially similar to those described, for example, in the following documents: U.S. Patent No. 10,134,621 entitled "Substrate Transport Apparatus," issued November 20, 2018, the disclosure of which is incorporated herein by reference in its entirety; and U.S. Patent Nos. 7,100,340, 7,066,707, 7,648,327, and 7,217,076, the disclosures of which are previously incorporated herein by reference in their entirety. In the example shown, end effectors 200, 200A1, and 200A2 are arranged on the sliding body 220 such that they are stacked one on top of the other, thus having a common extension and retraction axis R; however, end effectors 200 may be arranged side-by-side on the sliding body 220.

[0032] Each end effector 200, 200A1, 200A2 is supported by a sliding body 220 via corresponding sliders 221, 222, which reciprocate along the sliding body 220 in direction R (e.g., along a suitable track in a manner similar to that described in U.S. Patent Nos. 7,100,340, 7,066,707, 7,648,327, and 7,217,076, the disclosure of which is previously incorporated herein by reference in its entirety). Each slider 221, 222 includes an end effector engagement section 325 configured to engage with end effector supports 310A, 310B.

[0033] See also Figure 5Each end effector 200 includes an end effector base 510 and a workpiece holding station 520, which is coupled to or integrated with the end effector base 510 in any suitable manner (e.g., integrated into a single unit). For example, the end effector 200 may be formed by additive manufacturing, machining, and / or any other suitable manufacturing method. The workpiece holding station 520 is shown in the figure as having three workpiece supports / clamps 360A-360C, one or more of which may be movable for actively clamping and releasing the workpiece; however, the workpiece supports 360A-360C may be fixed for passively clamping the workpiece W. The workpiece holding station 520 may have any suitable configuration, such as a vacuum clamping configuration, a scraper configuration, etc.

[0034] See Figure 1 As described herein, end effectors 200 can be configured to be releasably connected to corresponding transfer arms 180TA, 180TA1, 180TA2 to enable automatic exchange of end effectors 200, which can be selected from a number of different end effectors 200A-200n. Here, the processing apparatus 100 includes an end effector exchange station 169, which is coupled to or disposed within an EFEM 130 or any other suitable transfer chamber (e.g., vacuum or atmosphere), incorporating a workpiece conveyor of this disclosure located within the transfer chamber for transferring workpiece W. The end effector exchange station 169 includes an end effector holding station 169S (e.g., a rack or other suitable support for holding the end effectors at predetermined positions where the workpiece conveyor 180 enables the picking (coupling) and placement (decoupling) of the end effectors), at which different end effectors 200A-200n are arranged in a stacked manner (see...). Figure 5A ), side by side (see Figure 5B (or any other suitable arrangement / array) is maintained, which facilitates the automatic coupling and decoupling of different end effectors 200A-200n to and from the workpiece conveyor 180.

[0035] As described herein, each different end effector 200A-200n has a corresponding predetermined configuration characteristic PCC, PCCA-PCCn, which differs from the corresponding predetermined configuration characteristic PCC, PCCA-PCCn of each other end effector 200A-200n. For example, the predetermined characteristics include, but are not limited to, one or more of the following: workpiece holding capability (e.g., configured to hold a workpiece W with a diameter of 200 mm, 300 mm, 400 mm, or any other suitable size); workpiece holding configuration (e.g., configured to hold a disc-shaped or plate-shaped workpiece); clamping type (e.g., active clamping, passive clamping, vacuum clamping, or any other suitable clamping type); end effector offset (e.g., end effectors of different lengths); workpiece alignment capability; or any other suitable characteristic corresponding to the manipulation and / or processing of the workpiece W processed by the processing equipment 100. As will be described in more detail below, each end effector includes an identifier or identification feature 500 that uniquely identifies the different predetermined characteristics of the corresponding end effector 200A-200n.

[0036] The end effectors are automatically coupled to and decoupled from the workpiece conveyor 180 via any suitable releasable coupling (also referred to herein as a deterministic coupling) 599, which is configured to automatically couple each end effector 200, 200A-200n to and release from the conveyor arm 180TA. The releasable coupling 599 can be any suitable releasable coupling that enables repeatable positioning and engagement of the end effectors 200A-200n with the workpiece conveyor 180. For example, as a non-limiting example, the releasable coupling 599 may be an actuated ball coupling 599A (having a ball on one member that engages a corresponding recess in another member to pull the two members toward each other), an actuated threaded coupling 599B (e.g., having a threaded member that engages a mating threaded member to pull the two members toward each other), an actuated sliding pin or wedge coupling 599C (e.g., one member having a pin / wedge that inserts into a recess in another member to engage with the recess and pull the two members toward each other), an actuated cam coupling 599D (e.g., one member having a follower that engages a cam surface on another member, wherein the engagement of the follower with the cam pulls the two members toward each other), a motion coupling, or any other suitable releasable coupling that positions and holds the end effector relative to the workpiece conveyor 180 in a predetermined position.

[0037] The releasable coupling 599 can be configured to connect the end effector 200A-200n (in...) Figure 5A The overall diagram shows the end effector 200) connected to the corresponding end effector brackets 310A and 310B (note that the end effector bracket 310B is in...). Figure 5 and 5A The end effector support 310A and the corresponding end effector include substantially similar releasable couplings 599. The releasable coupling 599 may include one or more reference features 598A, 598B (e.g., surfaces, protrusions, recesses, etc.; in the example shown, the reference feature is a surface) disposed on the end effector supports 310A, 310B, configured to engage corresponding reference features 597A, 597B (e.g., mating surfaces, mating recesses, mating protrusions, etc.) disposed on the end effectors 200A-200n. The releasable coupling 599 can be configured to pull the reference features 597A, 597B of the end effectors 200A-200n toward the reference features 598A, 598B of the end effector supports 310A, 310B in the direction 555, so as to repeatably (kinematically) position and hold the end effectors 200A-200n on the end effector supports 310A, 310B.

[0038] Retractable connector 599 (part of which is in) Figure 5 (As shown in the image) can be configured to hold the end effector bracket / end effector assembly (e.g., as shown in the image) Figure 5B As shown, end effector brackets 310A and 310B have corresponding end effectors 200A-200n connected to them, which are connected to corresponding sliders 221 and 222 (note that slider 221 is in...). Figure 5B The slide 221 is shown as being coupled to the support / end effector assembly; however, the slide 222 may be coupled to the support / end effector assembly using a substantially similar releasable coupling 599. Here, the releasable coupling 599 may include one or more reference features 598C, 598D (e.g., surfaces, protrusions, recesses, etc., in the example shown, the reference features are protrusions and recesses) disposed on the end effector supports 310A, 310B, which are configured to engage corresponding reference features 597C, 597D (e.g., mating surfaces, mating recesses, mating protrusions, etc.) disposed on the slides 221, 222. The releasable coupling 599 (which may be substantially similar to the coupling described above) can be configured to pull the reference features 597C, 597D of the end effector supports 310A, 310B toward the reference features 598C, 598D of the sliders 221, 222 for repeatable (kinematic) positioning and holding of the end effectors 200A-200n on the end effector supports 310A, 310B.

[0039] The releasable coupling 599 can be actuated and de-actuated in any suitable manner. For example, the releasable coupling 599 can be an electrically actuated coupling (e.g., including a motor / driver disposed in the sliders 221, 222 or end effector brackets 310A, 310B and under the control of the controller 199 for actuation and de-actuation), a pneumatically actuated coupling (e.g., sliders 221, 222 or end effector brackets 310A, 310B including any suitable pneumatic conduit connected to a pneumatic actuator under the control of the controller 199, which enables actuation and de-actuation of the releasable coupling), or powered in any other suitable manner.

[0040] See also Figure 6 To automatically exchange end effectors 200A-200n, end effectors 200A-200n are positioned at end effector exchange station 169 in any suitable manner (e.g., on a suitable bracket mentioned herein). Controller 199 moves workpiece conveyor 180 to align the end effector held thereon (e.g., end effector 200B) with the empty end effector holding station 169S, thereby placing end effector 200B in end effector holding station 169S by automatically releasing releasable coupling 599. Figure 6 (Box 600). Controller 199 operates workpiece conveyor 180 to align workpiece conveyor 180 with a replacement end effector (e.g., end effector 200A) located at another end effector holding station 169S. As can be appreciated, the position of end effector holding station 169S can be known by controller 199 / workpiece conveyor 180 by teaching workpiece conveyor 180 its position within the processing equipment 100 in the manner described herein. Workpiece conveyor 180 moves from another end effector holding station 169S (box 600) to another end effector holding station 169S by automatically engaging releasable coupling 599 and moving the conveyor arms 180TA, 180TA1, 180TA2 with the replacement end effector connected from end effector exchange station 169. Figure 6 (Box 620) Pick and replace the end effector.

[0041] See Figure 1 , 3AAs described above, the workpiece conveyor 180 is configured to automatically identify end effectors 200A-200n and, when the end effectors 200A-200n are connected to the workpiece conveyor 180 (e.g., during the initial setup of the workpiece conveyor 180, or in the field, e.g., using automatic or manual exchange of the end effectors), automatically configure itself (e.g., via controller 199) using the operating parameters of the end effectors 200A-200n (also referred to as predetermined configuration characteristics PCC, PCCA-PCCn). For example, controller 199 is programmed (using any suitable non-transient computer program code stored in any suitable memory of controller 199) to automatically configure the conveyor arm 180TA to implement corresponding predetermined robot functions corresponding to the end effectors 200 selected based on the determination of predetermined configuration characteristics PCC, PCCA-PCCn.

[0042] The workpiece conveyor 180 includes any suitable detector 370, and each end effector 200A-200n includes a corresponding identifier 500 on any one or more of the end effector base 510, workpiece holding station 520, and end effector supports 310A, 310B. The detector 370 is configured to detect (as described herein) the end effector 200 and register (in any suitable memory, such as the memory of the controller 199) the identification features 500 of the selectively mounted end effector 200, and generate identification data (including imaging data, see [link to relevant documentation]) reflecting the predetermined configuration characteristics PCC, PCCA-PCCn of the detected end effector 200. Figure 3A , 4A (and 10). The controller 199 is programmed such that, in response to the optional installation of the end effector 200, the controller 199 automatically identifies and determines the predetermined configuration characteristics PCC, PCCA-PCCn of the detected end effector 200 from the (identification) data.

[0043] The controller 199 is configured (e.g., including and functioning with any suitable non-transient computer program code stored in or accessible by the controller 199) to register (e.g., stored in memory and identified using, for example, lookup table 500T) the identification data of the selected end effectors 200, 200A-200n installed on the transfer arm 180TA, from the detector 370 of the recognizer 500. The controller 199 is also configured to determine, from it, the corresponding different operational robot functions (such as from lookup table 500T) the identification of the selected end effectors 200, 200A-200n.

[0044] Detector 370 is coupled to controller 199 and configured to read identifier 500 to transmit information embodied in identifier 500 (i.e., identification data embodying the predetermined configuration characteristics PCC, PCCA-PCCn of the detected end effector 200) to controller 199 for automatic configuration of workpiece conveyor 180 (and its conveyor arm 180TA) connected to end effectors 200A-200n. Controller 199 is programmed (using any suitable non-transient computer program code) to automatically configure conveyor arm 180TA to implement corresponding predetermined robot operation functions for the end effector 200 selected based on the identification data and / or the determination of predetermined configuration characteristics PCC, PCCA-PCCn. Controller 199 is set (or otherwise programmed with any suitable non-transient computer program code) such that the selection of the end effector 200 for installation automatically determines the corresponding different robot operation functions.

[0045] For example, each recognizer 500 recognizes predetermined characteristics of the corresponding end effector (e.g., but not limited to, those characteristics mentioned above, such as workpiece holding capability, workpiece holding configuration, clamping type). The controller 199 may include (in any suitable memory) or access any suitable lookup table 500T ( Figure 1 The lookup table associates each identifier 500 with a corresponding predetermined characteristic of the end effector 200A-200n, such that when an identifier 500 is read by the detector 370, the controller 199 looks up the predetermined characteristic of the corresponding end effector 200A-200n from the lookup table 500T. The identifier may include predetermined characteristics, allowing the controller 199 to directly obtain the predetermined characteristics of any given end effector 200A-200n by reading the identifier 500. Based on the predetermined characteristics of the end effectors 200A-200n obtained by reading the identifier 500 using the detector 370, the controller 199 automatically configures the workpiece conveyor 180 by loading the corresponding operating parameters to enable the operation of the workpiece conveyor 180 connected to the end effectors 200A-200n.

[0046] As described herein, detector 370 includes one or more of an identification sensor 370D (which is disposed at any suitable location on workpiece conveyor 180) and a vision system 180V adjacent to workpiece conveyor 180, such that an identifier 500 on end effectors 200A-200n can be detected by detector 370 at some points along the extension / retraction path of end effectors 200A-200n (e.g., within its range or field of view). For example, identification sensor 370D may be disposed on sliding body 220 facing end effectors 200A1, 200A2, and positioned such that when end effectors 200A1, 200A2 are in the retracted position (see [link to documentation]). Figure 3A When the end effector 200A-200N is not obstructed or otherwise covered by the end effectors 200A1 and 200A2, the recognition sensor 370D is not blocked or otherwise covered. Thus, without interference from another end effector of the workpiece conveyor 180 (e.g., in the retracted position), the recognition sensor 500 of the end effectors 200A-200N can be read when the end effectors 200A-200N are retracted or extended. The machine vision system 180V (e.g., which includes at least one two-dimensional camera 1021 and at least one three-dimensional imager 1020 (e.g., one or more of a stereo camera pair 1020SP and a depth determining camera 1020DC, each of which may be referred to as an optical array sensor) (see...) Figure 10 The detector 370 is arranged in an extension / retraction path adjacent to the workpiece conveyor 180 or adjacent to the end effectors 200A-200n, such that the identifier 500 of the end effector is within the field of view and imaged by the vision system 180V. For illustrative purposes only, the detector 370 may be configured to read, and the identifier 500 may be any suitable identification feature, including but not limited to barcodes, two-dimensional matrix codes (or any other suitable encoding and / or marking), any suitable machine-readable mark, any suitable electromagnetic communication device (including but not limited to radio frequency identification (RFID) tags, near field communication (NFC) devices, Bluetooth devices, etc.) and / or any suitable vision-based and / or radio frequency-based identification features embedded or otherwise disposed on the end effectors 200A-200n.

[0047] In the case where the detector 370 (and the workpiece conveyor 180, of which the detector 370 is a part) includes at least one two-dimensional camera 1021 and at least one three-dimensional imager 1020, the detector 370 (in the form of a vision system 180V) is arranged to image the selectively mounted end effector 200 and generate imaging data that embodies and describes the essential characteristics of the end effector 200 (e.g., in six degrees of freedom – X, Y, Z, roll, pitch, and yaw) and predetermined configuration characteristics PCC, PCCA-PCCn, which identify the end effector 200 and whose predetermined configuration characteristics PCC, PCCA-PCCn are different from those of other different end effectors 200A-200n. Here, the controller 199 is programmed (i.e., including any suitable non-transient computer program code stored in any suitable memory of the controller 199) such that, in response to the optional installation of the end effector 200, the controller 199 automatically moves and positions the transfer arm 180TA of the end effector 200 for imaging by the machine vision system 180V, and automatically identifies and determines the predetermined configuration characteristics PCC, PCCA-PCCn of the end effector 200 from the imaging data (see...). Figure 3A , 4A and 10).

[0048] See also, as an example of end effector identification. Figure 7 Upon initial startup of the workpiece conveyor 180, any suitable default end effector operating parameters can be loaded into the controller 199 for operation of the workpiece conveyor 180. The default end effector parameters may correspond to the last known end effector coupled to the workpiece conveyor or any other end effector parameters. The workpiece conveyor 180 is initialized, and the drives of the workpiece conveyor 180 are homed (e.g., brought to a homed or zeroed position, from which the position offset of the corresponding drive is measured). In the case of homing of the extended axis (e.g., the R-axis), the identifiers 500 of the corresponding end effectors 200A1, 200A2 can be read by the identification sensor 370 (and / or by the vision system 180V). Figure 7 (Frame 700). The recognition sensor 370 (and / or vision system 180V) can transmit data from the recognizer 500 to the controller, enabling the controller 199 to acquire predetermined characteristics of the end effector. Figure 7 (Box 710). As described above, the predetermined characteristics can be obtained from lookup table 500T or directly from recognizer 500. Controller 199 loads the operating parameters (e.g., predetermined characteristics) of the end effector into memory to configure the workpiece conveyor 180 with end effector 200 based on the predetermined characteristics of the end effector. Figure 7 (frame 720).

[0049] Controller 199 can be configured to annotate predetermined characteristics using any suitable history of the end effector. Figure 7 Box 730, for example, allows data to be entered into Table 500T, or, in the case of obtaining predetermined characteristics directly from the identifier, an annotation table associated with different identifiers can be created. For example, the installation / removal date of each end effector can be recorded, as can changes in the geometry of the end effector, or any other data affecting the operation of the end effector. The annotated data can be used for maintenance or any other suitable purpose.

[0050] See Figure 1 , 3A 3B, 4A, and 4B, the workpiece conveyor 180 includes one or more (e.g., at least one) end effector sensors 316A-316H (collectively referred to herein as end effector sensor 316) positioned relative to predetermined positions (e.g., calibration or baseline positions) of the end effectors 200A1, 200A2 relative to the workpiece conveyor 180 in multiple dimensions. One or more end effector sensors 316A to 316H are positioned on the workpiece conveyor 180 at any suitable location to determine the end effector position relative to the conveyor arm 180TA, for example, relative to the sliding body 220 (or other arm links, bases, or frames on which sensors 316A to 316D are arranged), in six degrees of freedom (e.g., EX, EY, EZ, ERx, ERy, ERz, which can be converted to a workpiece conveying reference frame, or the six degrees of freedom of the end effector can be determined in the workpiece conveying reference frame). In the example shown, sensors 316A-316H are positioned on the sliding body 220, but can be positioned on any arm link or workpiece transfer base / frame, as long as the end effector can be imaged by the end effector sensors 316A-316H.

[0051] Sensors 316A-316H may be part of detector 370, in which at least one or more of a two-dimensional camera 1021 and at least one three-dimensional imager 1020 may be employed (using or replacing sensors 316A-316H to determine the attitude of end effectors 200, 200A-200n). When one or more of at least one two-dimensional camera 1021 and at least one three-dimensional imager 1020 are used for end effector pose determination, the recognizer 500 may include deterministic features (e.g., two-dimensional codes such as ArUco tags, April tags, QR codes, or other suitable reference markers) or pose determination features (e.g., asymmetric shapes, etc.)) imaged by one or more of at least one two-dimensional camera 1021 and at least one three-dimensional imager 1020; and the controller may be configured to determine the pose of the end effector (in one or more of the six degrees of freedom) based on any suitable image analysis (such as those image analysis techniques known in the art) of the deterministic features of the recognizer 500 in a manner substantially similar to that described in U.S. Provisional Patent No. 63 / 509,553, filed June 22, 2023, the disclosure of which is incorporated herein by reference in its entirety.

[0052] One or more end effector sensors 316A-316H are in the form of at least one optical array sensor 316PA (where each end effector sensor may be referred to as an optical array sensor), wherein the pixels are at least a linear array (e.g., at least linearly distributed pixels), however, any suitable sensor may be used. As will be described herein, controller 199 may communicatively connect (e.g., via any suitable wired or wireless communication) to one or more end effector sensors 316A-316H to register sensor data from one or more end effector sensors 316A-316. Controller 199 is configured to parse predetermined configuration characteristics PCC, PCCA-PCCn from the registered sensor data based on the sensor data, and thereby determine the attitude of end effectors 200, 20A-200n relative to the transport arm 180TA with respect to at least two directional degrees of freedom (e.g., at least two of EX, EY, EZ, X, Y, Z, ERx, ERy, ERz, θ, Rx, Ry). One or more end effector sensors 316A-316H are configured such that at least two attitude degrees of freedom are determined substantially simultaneously (e.g., in real time, where real time is about 100 ms or less).

[0053] The controller 199 is configured to determine the difference between the attitude determined by one or more end effector sensors 316A-316H and a predetermined attitude of the end effectors 200, 200A-200n (such as the nominal attitude determined by detector 370 from the initial installation of the end effector to the transfer arm 180TA and / or from the CAD model of the robot 180). The controller 199 is configured to generate a predetermined command in response to the difference exceeding a predetermined threshold (e.g., the predetermined threshold is the displacement difference of one or more axes of axes EX, EY, EZ, X, Y, Z, ERx, ERy, ERz, θ, Rx, Ry, which will affect the pick / placement accuracy of the workpiece / plate, thus affecting the processing of the workpiece / plate). The predetermined command is at least one of the following: generating a predetermined signal to the operator indicating a non-nominal state of the end effectors 200, 200A-200n; registering a remedial action in the maintenance register MR (of the controller 199 or other suitable memory accessible to the controller and / or the operator) in response to the non-nominal state of the end effectors 200, 200A-200n; and initializing the response action of the transfer arm 180TA in response to the non-nominal state of the end effectors 200, 200A-200n.

[0054] One or more end effector sensors 316A to 316H include at least one sensor disposed at a location on the sliding body (or other suitable portion of the workpiece conveyor 180) that images one or more of at least one edge of the main planar surface (e.g., bottom or top) of the end effector 200A1, 200A2 and at least one edge of the secondary planar surface (e.g., lateral side) of the end effector 200A1, 200A2. As described herein, one or more end effector sensors 316A-316H are configured to sense predetermined characteristics PCC, PCCA-PCCn in one or more of the following ways: on opposite sides of end effectors 200, 200A-200n; at a longitudinal (e.g., along the longitudinal axis, e.g., in the X, EX direction) offset position of end effectors 200, 200A-200n; in the lateral direction of end effectors 200, 200A-200n (e.g., in a direction transverse to the longitudinal axis, e.g., in the Y, EY direction) to determine Z-axis attitude, roll attitude, and pitch attitude; and in the vertical (Z, EZ) direction to determine one or more of the roll attitude and yaw attitude of end effectors 200, 200A-200n, and one or more of the X-axis and Y-axis attitudes. As also described herein, the predetermined configuration features PCC, PCCA-PCCn are defined by an integrated identification device 500 that is integrated with the body of the end effectors 200, 200A-200n (e.g., any one or more of the end effector base 510, workpiece holding station 520, and end effector brackets 310A, 310B) and is located outside the body.

[0055] A single sensor (e.g., any one of sensors 316A-316H) can image the edges of both the primary and secondary planes to determine the orientation of the end effectors 200A1 and 200A2 in the six degrees of freedom EX, EY, EZ, ERx, ERy, and ERz. At least one of sensors 316A-316D can be arranged on the sliding body, close to the plane defined by the EX and EY axes, without interfering with the operation of the workpiece transfer 180, to image the edges of the primary plane surface; and at least one sensor 316E-316H is arranged on the sliding body, as close as possible to the EZ axis, without interfering with the operation of the workpiece transfer 180, for imaging the edges of the secondary plane surface.

[0056] For illustrative purposes only, four end effector sensors 316A-316D are positioned on the sliding body (e.g., in the EX-EY plane as described above) for imaging the edges of the primary planar surfaces (e.g., the bottom) of end effectors 200A1, 200A2, while four end effector sensors 316E-316H are positioned on the sliding body (e.g., as close as possible to the EZ axis as described above) for imaging the edges of the secondary planar surfaces (e.g., the lateral sides) of end effectors 200A1, 200A2. More or fewer end effector sensors may be present for imaging the bottom and / or sides of end effectors 200A1-200A2. The top of the end effector may be imaged, rather than the bottom.

[0057] Sensors 316A-316H can be any suitable optical array sensor, including but not limited to electro-coupled devices (CCDs) and cameras (e.g., two-dimensional or three-dimensional), each positioned with a corresponding field of view 317A-317H, in which the edges of end effectors 200A1 and 200A2 are positioned. End effector sensors 316A-316H are connected to controller 199 and configured to send data representing the image / position of the end effectors to controller 199 for determining the displacement and rotation of the end effectors along six degrees of freedom EX, EY, EZ, ERx, ERy, and ERz.

[0058] When mounting end effectors 200A-200n to workpiece conveyor 180, controller 199 may employ one or more end effector sensors 316A-316H to obtain at least a calibration image of the end effector 200 in its six degrees of freedom EX, EY, EZ, ERx, ERy, ERz relative to the reference frame REFSEN of the respective end effector sensor 316A-316H and the reference frame of workpiece conveyor 180 (e.g., controller 199 determines a predetermined orientation of end effector 200 based on this calibration image). Here, end effectors 200 are selected from different end effectors 200A-200n and are coupled to end effector supports 310A, 310B (or, if the end effector and support are integrated, to the end effector coupling section 325 of the corresponding sliders 221, 222). The end effector 200 is leveled (e.g., relative to the EX-EY plane (which substantially coincides with the XY plane)) and aligned with the extension / retraction axis (e.g., the centerline CL of the end effector 200 is aligned with the R-axis (see...) Figure 3A(And the center 520C of the workpiece holding station 520 travels along the R-axis), with the end effectors 200 leveled and aligned, the controller 199 uses one or more end effector sensors 316A-316H to obtain one or more calibration images of each end effector 200 (in the illustrated example, end effectors 200A1, 200A2) coupled to the workpiece conveyor 180. These calibration images 333 (see, for example, FIG. 3) are stored in the memory of the controller 199 (or in memory accessible to the controller 199) for comparison with maintenance images 334 subsequently obtained for each end effector 200 coupled to the workpiece conveyor 180. The calibration images 333 are available with the respective end effector 200 in any suitable position (e.g., fully retracted, fully extended, or any position between fully extended and fully retracted).

[0059] With the workpiece conveyor 180 in operation, the controller 199 uses one or more end effector sensors 316A-316H to acquire a maintenance image 334 (e.g., the controller 199 determines a predetermined orientation of the end effector 200 based on it). The maintenance image 334 can be acquired at any suitable time, such as periodically, after a predetermined number of pick / place cycles, or at any other suitable interval, to monitor the deviation of the end effector position relative to the calibration image 333 (e.g., to determine the difference between the predetermined orientation and the determined orientation). Here, the controller 199 includes (i.e., is programmed to) any suitable image processing algorithm configured to compare the maintenance image 334 with the calibration image 333 (see...). Figure 8 This is compared to determine (in any suitable manner, such as pixel analysis, edge detection, etc.) any deviation between the end-effector position (the determined pose) and the calibrated end-effector position (the predetermined pose) (e.g., as imaged in calibration image 333). This is for illustrative purposes only. Figure 8 The image shows the deviations ΔEX, ΔEY, and ΔERz of the end effector in the EX, EY, and ERz directions; however, the deviations in ERx, ERy, and EZ can be determined by comparing other calibration images 333 with corresponding other maintenance images 334, such as... Figure 8A As shown. If any of the deviations ΔEX, ΔEY, and ΔERz exceed a predetermined amount, the controller 199 may alert the operator (e.g., by auditory, visual, or any suitable means), register a remedial action in the maintenance register MR, and initialize the response action of the transfer arm 180TA (as described herein) to remedy the deviation.

[0060] In an exemplary end-effector position monitoring operation, the end-effector 200 is mounted on the workpiece conveyor 180 in the manner described herein. The end-effector 200 is mounted so as to be leveled and aligned with the R-axis as described herein. The leveled and aligned position of the end-effector 200 is imaged by one or more sensors 316A-316H, and the images are registered in the controller 199 (e.g., in any suitable memory) as one or more calibration images 333. Figure 9 (See box 900). Workpiece W is transferred using workpiece conveyor 180 (see box 900). Figure 1 In the case of ), at any appropriate time, by sensor 316A-316H ( Figure 9 (Box 910) Takes one or more maintenance images 334, wherein the maintenance images 334 are registered in the controller 199, for example, registered in any suitable memory. The controller 199 compares the one or more maintenance images 334 with corresponding calibration images 333 (e.g., comparing images taken by common sensors with each other) to determine the deviation of the end effector from the calibration position. Figure 9 (See box 920). When a deviation exists and exceeds a predetermined amount / threshold, the controller 199 notifies the operator of the deviation. Figure 9 (See box 930, as described herein) to remedy the deviation (e.g., perform preventative maintenance on workpiece conveyor 180).

[0061] One or more sensors 316A-316H may be configured as a sensor module 316MOD, which is configured to be coupled to an end effector to improve or upgrade the end effector to include end effector position deviation monitoring. One or more sensors 316A-316H are integrated into the end effector, for example, during the manufacture of the end effector. When one or more sensors 316A-316H are configured as a sensor module 316MOD, it should be understood that, when the sensor module 316MOD is mounted to the end effector, the controller 199 is configured (e.g., including any suitable image analysis programming) to perform a comparison of the calibration image 333 with the maintenance image (334) to determine the position deviation of the end effector from the calibrated end effector position.

[0062] As described above, the autonomous workpiece transfer teaching station 166 can be coupled to the EFEM 130 (or any transfer chamber in which the workpiece conveyor is located). The autonomous workpiece transfer teaching station 166 is configured to determine and teach the workpiece conveyor 180 the position of the workpiece conveyor 180 within the processing equipment 100 (such position includes, for example, the position of the center 520C of the workpiece holding station 520 of the end effector 200 and the spatial orientation of the end effector 200 relative to the reference frame of the workpiece conveyor 180). The autonomous workpiece transfer teaching station 166 includes a frame 166F forming a housing 166FE into which the workpiece conveyor 180 inserts the end effector 200. At least one camera (e.g., 1020, 1021) of the vision system 180V is coupled to the frame 166F. For illustrative purposes, the machine vision system 180V is encapsulated (e.g., via housing 166FE) to block one or more of ambient and stray illumination from the field of view of the end effector 200 in at least one camera of the vision system 180V, and the encapsulation has an opening or aperture 166FA, which is sized and shaped to allow the end effector 200 to move through the aperture 166FA in at least one degree of freedom of movement of the transfer arm via the hinge of the transfer arm 180TA. As an example, a two-dimensional camera 1020 is oriented (e.g., on frame 166F) to observe a side view of the end effector 200 (see [link to image]). Figure 11C The stereo camera is oriented to observe the end effector 200 and determine the absolute orientation of the end effector 200 at least around three axes (X, Y, Z) of the end effector 200 (i.e., in six degrees of freedom X, Y, Z, pitch, roll and yaw).

[0063] A 3D imager 1020 is coupled to one side of the frame 166F (e.g., the top or bottom of the frame 166F) to image at least the primary planar surface (e.g., the top or bottom). The 3D imager 1020 can be configured to acquire a 3D image of the end effector 200 in any suitable manner, including but not limited to laser scanning, optical profilometry, photogrammetry, and structured light scanning. Suitable 3D imagers include, but are not limited to, stereo vision cameras (stereo camera pair 1020SP) and depth determination cameras 1020DC (including, but not limited to, time-of-flight cameras, laser scanners, and structured light scanners). A 2D imager 1021 is coupled to the other side of the frame 166F (e.g., the lateral side relative to the R-axis of the end effector 200, extending and retracting) to image at least a subplane (e.g., the lateral side) of the end effector 200. The 2D imager 1021 can be an electrically coupled device (CCD), a complementary metal-oxide-semiconductor (CMOS), or any other suitable imager configured to acquire a 2D image of the end effector 200. The vision system's 180V camera provides imaging data (see at least...). Figure 10 The imaging data describes the absolute position of the end effector 200, and the controller 199 is arranged to automatically teach the taught position to the configurable robot or workpiece conveyor 180 based on the absolute position of the end effector 200 as described herein.

[0064] As described above and further herein, the position of the workpiece conveyor 180 (e.g., along the X, Y, and Z axes, and in pitch, roll, and yaw directions) can be taught using only the 3D imager 1020 and the 2D imager 1021. Where the imagers 1020 and 1021 are cameras, only three cameras are used to teach the position of the workpiece conveyor 180. Using only three cameras, or only the 3D imager 1020 and the 2D imager 1021, simplifies the mechanical / hardware design of the teaching system, where conventional teaching systems typically employ, for example, six cameras for six-degree-of-freedom position determination.

[0065] As can be recognized, each of the imagers 1020 and 1021 is calibrated in a known manner according to the type of imager. For example, in the case where the 3D imager 1020 is a stereo camera comprising a pair of cameras, each camera in the camera pair is calibrated to estimate the internal and external parameters of the camera. In calibrating each camera in the camera pair, a reference camera is set using one or more known photogrammetric calibration techniques and self-calibration techniques. The 2D imager 1021 can be calibrated in a known manner according to the type of imager to, for example, estimate the internal and external parameters of the camera of the imager. Through the calibration of the 3D imager 1020 and the 2D imager 1021, a calibration end effector center point CEEP is established relative to the 3D imager 1020 and the 2D imager 1021. The calibration end effector center point CEEP is a point in space located at a predetermined known position relative to the 3D imager 1020 and the 2D imager 1021. The calibration end effector center point (CEEP) is used to establish the position of the teach workpiece conveyor 180 within the processing equipment 100, wherein during the teaching process, the center 520C of the end effector 200 workpiece holding station 520 is substantially aligned with the calibration end effector center point (CEEP). The calibration end effector center point (CEEP) can be established in any suitable manner, for example, by imaging any suitable calibration fixture (which may be the same fixture as or different from the fixture used for calibrating imagers 1020, 1021).

[0066] The environment within the frame 166F can be configured to optimize imaging quality (e.g., by substantially eliminating shadows or in any other suitable manner). Here, the housing 166FE formed by the frame 166F includes an aperture 166FA through which at least the end effector 200 is inserted into the housing 166FE. The aperture 166FA is shaped and sized to minimize the entry of light outside the housing 166FE into the housing 166FE when imaging the end effector 200. For example, the aperture 166FA has a width at least substantially equal to the lateral width EEW of the end effector (see...). Figure 5 The width SL of the end effector 200 allows for lateral / rotational movement of the transfer arms 180TA1, 180TA2 and / or end effector supports 310A, 310B within the bore 166FA for substantially aligning the center 520C of the workpiece holding station 520 of the end effector 200 with the calibration end effector center point CEEP. The bore 166FA has a width SL of at least substantially equal to the height EEH of the end effector (see [reference needed]). Figure 5The height SH of the aperture 166FA allows for vertical movement of the transfer arms 180TA1, 180TA2 and / or end effector supports 310A, 310B within the aperture 166FA to substantially align the center 520C of the end effector 200 workpiece holding station 520 with the calibration end effector center point CEEP. As an example, the height SH of the aperture 166FA is approximately 20 mm (approximately 0.8 inches) to approximately 30 mm (approximately 1.2 inches), but can be less than approximately 20 mm or greater than approximately 30 mm. In addition to minimizing external light entering the housing 166FE, any suitable lighting 1010 may be provided internally or otherwise positioned (e.g., inside or outside the frame 166F (via a window in the frame)) to optimize photographic illumination within the housing 166FE (e.g., substantially eliminating shadows) for imaging at least the end effector 200. Such illumination 1010 may include, but is not limited to, on-axis illumination for one or more of the three-dimensional imager 1020 and the two-dimensional imager 1021, off-axis illumination relative to one or more of the three-dimensional imager 1020 and the two-dimensional imager 1021, diffuse illumination, etc.

[0067] As described herein, controller 199 is configured with (e.g., programmed with non-transitory computer program code) a neural network model NNM, which is trained in any suitable known manner (e.g., backpropagation or any other suitable manner) to detect any number of known different end effector configurations / types 200A-200n (e.g., all possible end effector types) that can be coupled to workpiece conveyor 180. It can be appreciated that neural network model NNM can be trained to include new types of end effectors, as such end effectors are developed and implemented during the manufacture of workpiece W. Training neural network model NNM to identify or otherwise detect any number of known different end effector configurations / types 200A-200n generalizes and unifies the teaching algorithm to include all different types of end effectors 200A-200n. Training the neural network model NNM to identify or otherwise detect any number of known different end effector configurations / types 200A-200n also essentially eliminates any dependency of the teaching algorithm on obtaining end effector characteristics from, for example, the workpiece conveyor 180, making the teaching algorithm agnostic to the configuration / type of the workpiece conveyor 180.

[0068] In operation, the workpiece conveyor 180 is taught its position in the processing equipment 100 by moving or otherwise positioning the end effector 200 within the autonomous workpiece conveying teaching station 166. Figure 12(See box 1200). The workpiece conveyor 180 can read the end effector identifier 500 (as described herein) to obtain the operational characteristics of the end effector 200 coupled to the workpiece conveyor 180. The operational characteristics can provide the workpiece conveyor 180 (and its controller 199) with a coarse or approximate position of the end effector 200 at the center 520C of the workpiece holding station 520. The approximate position of the end effector 200 in the space of the workpiece conveyor 180 can provide information for automatically placing the end effector 200 into the autonomous workpiece conveyor teaching station 166 via the workpiece conveyor 180. The workpiece conveyor 180 can be manually controlled to move the end effector 200 into the autonomous workpiece conveyor training station 166.

[0069] In the case of an end effector within the autonomous workpiece transfer teaching station 166, the end effector is illuminated by lighting 1010, and an image of the end effector is captured by a 3D imager 1020 and a 2D imager 1021 or otherwise obtained. Figure 12 (Box 1210). The image can be a live video stream or a still image, which is analyzed by a neural network model NNM using any suitable image analysis software programmed into the controller 199. The neural network model NNM determines which of the different types and different types of end effectors 200A-200n is coupled to the workpiece conveyor 180 (…). Figure 12 (See box 1220). When the type of end effector 200 is determined, controller 199 determines the center 520C of the workpiece holding station 520 of the end effector 200 (e.g., from any suitable lookup table associated with different types of end effectors 200A-200n) or from the image itself. Controller 199 also knows the calibration end effector center point CEEP of the autonomous workpiece transfer training station 166 from the calibration of the 3D imager 1020 and the 2D imager 1021; center 520C will be substantially aligned to this calibration end effector center point CEEP.

[0070] Controller 199 enables the end effector 200 to move along one or more of the X, Y, and Z axes, such that the center 520C of the workpiece holding station 520 of the end effector 200 is substantially aligned with the calibration end effector center point CEEP. Figure 12 (Box 1230). The movement of the end effector 200 can be repeated or substantially simultaneous with the imaging of the end effector ( Figure 12 (See box 1210), thus providing position feedback for the relative positions ΔX, ΔY, ΔZ of the center 520C determined by image analysis (e.g., by controller 199) and the calibrated end effector center point CEEP, to control the X-axis drive 242 (see box 1210), which is independent of the position of the motor encoders 242E, 280DE, 225E, 262E. Figure 2A ), Z-axis drive motor 280D (for example) Figure 3B ), linear driver 225 (see example) Figure 3B ) and rotary driver 262 (see example) Figure 3B One or more of them, and achieve basic alignment of the center 520C with the calibration end effector center point CEEP.

[0071] As can be appreciated, the analysis of the image by the controller 199 also provides the determination of the yaw ΔRz, pitch ΔRx, and roll ΔRy of the end effector relative to the calibration position of the end effector (e.g., the centerline CL of the end effector 200 is substantially aligned with the radial path Rc extending and retracting to the calibration end effector center point CEEP, and the end effector is leveled with the workpiece transfer plane WTP). Figure 12 (See box 1240). For example, the 3D imager 1020 is positioned to determine relative positions ΔX, ΔY, and ΔZ on the X, Y, and Z axes, where the positions on the X, Y, and Z axes can be determined from point cloud analysis or any other suitable depth / position determination technique. The ability of the 3D imager 1020 to determine depth provides for the determination of roll ΔRy and pitch ΔRx deviations of the end effector. The workpiece conveyor 180 may include a driver configured to move the end effector 200 in one or more of pitch, roll, and yaw modes, thereby correcting for one or more of position deviations ΔRy, ΔRx, and ΔRz by driving the end effector 200 (or at least a portion of the conveyor arms 180TA and 180TB) in a roll and / or pitch manner. For example, if the end effector 200 cannot move in one or more of roll, pitch, and yaw, the controller 199 may use positional deviations ΔRy, ΔRx, ΔRz to generate positional offsets relative to the wafer transfer plane WTP and the radial axis Rc of extension and retraction, wherein these offsets define the spatial envelope occupied by the end effector, wherein the controller 199 uses the envelope to determine the trajectory of the end effector and avoid contact between the end effector and features of the processing device 100 (i.e., the offset effectively increases the size of the end effector, wherein the controller uses the increased end effector size to avoid contact between the end effector and features of the processing device when planning the pick / place trajectory of the end effector).

[0072] When determining one or more of roll, pitch, and yaw ( Figure 12(Box 1240) The two-dimensional imager 1021 is used in conjunction with the three-dimensional imager 1020 to verify and / or enhance the determination of pitch ΔRz and Z position, thereby achieving the absolute position determination of the end effector 200. Here, the two-dimensional image analysis may include edge detection, which detects the lateral side of the end effector 200 to at least achieve the determination of the pitch and Z position of the end effector 200, wherein the pitch and Z position determinations of the two-dimensional imager 1021 and the three-dimensional imager 1020 are complementary to each other (note that determining the Z position of one lateral side of the end effector may also enhance / complement the roll and yaw determinations made by the three-dimensional imager 1020).

[0073] With the center 520C of the workpiece holding station 520 of the end effector 200 substantially aligned with the calibration end effector center point CEEP (and in some respects, corrected for roll, yaw, and pitch), the controller 199 reads the positions of the motor encoders 242E, 280DE, 225E, and 262E and correlates the encoder positions with the position of the center 520C, whereby this correlation teaches the position of the workpiece conveyor 180 relative to the calibration end effector center point CEEP. Figure 12 (Box 1250). It can be understood that the position of the calibration end effector center point CEEP is known within the processing device 100, thereby teaching the position of the workpiece conveyor 180 relative to the calibration end effector center point CEEP, teaching the position of the workpiece conveyor 180 throughout the processing device 100 (e.g., the workpiece conveyor 180 is now configured to pick up a workpiece and place it into any workpiece holding station / position of the processing device 100).

[0074] See Figure 1-5B Sections 10 and 13 will describe exemplary methods for selectively mounting an end effector 200 onto a transfer arm 180TA. This method includes providing the configurable robot or workpiece transfer arm 180 described herein. Figure 13 (frame 1300). As described herein, the workpiece conveyor 180 includes a base 180B, an articulated robot arm or conveyor arm 180TA connected to the base 180B, a controller 199, and a detector 370. The conveyor arm 180TA has an end effector 200 and is articulated to move with at least one degree of freedom, and utilizes the end effector 200 to perform predetermined robotic functions (as described herein). The controller 199 is connected to and configured to articulate the conveyor arm 180TA to perform the predetermined robotic functions. As described herein, the detector 370 detects the end effector 200.

[0075] In this method, the end effector 200 is selectively mounted (as described herein) from a number of different end effectors 200A-200n that are interchangeable with each other to the transfer arm 180TA. Figure 13 (see box 1310), and each end effector has a different predetermined configuration characteristic PCCA-PCCn, which characterizes a different predetermined operation robot function corresponding to the selected end effector 200A-200n. As described herein, each end effector 200, 200A-200n has an identification feature 500 that identifies its corresponding different predetermined characteristic PCC, PCCA-PCCn. Detector 370 registers the identification feature 500 of the selectively installed end effectors 200, 200A-200n (see box 1310), and each end effector has a different predetermined configuration characteristic PCCA-PCCn, which characterizes a different predetermined operation robot function corresponding to the selected end effector 200A-200n. Figure 13 (Box 1320), Controller 199 generates data ( Figure 13 (See box 1330). This data reflects the identification of the predetermined configuration characteristics PCC, PCCA-PCCn of the detected end effectors 200, 200A-200n. In response to the optional installation of end effectors 200, 200A-200n, controller 199 automatically identifies and determines the predetermined configuration characteristics PCC, PCCA-PCCn of the detected end effectors 200, 200A-200n from the data. Figure 13 (Frame 1340).

[0076] In this method, the controller 199 automatically configures the transfer arm 180TA to implement different predetermined robot operation functions corresponding to the end effectors 200, 200A-200n selected based on the determination of predetermined configuration characteristics PCC, PCCA-PCCn. The controller 199 is configured such that the selection of the end effectors 200, 200A-200n for installation automatically determines the corresponding different robot operation functions.

[0077] In this method, the detector 370 is in the form of a machine vision system 180V, wherein the method includes using the machine vision system 180V to image selectively mounted end effectors 200, 200A-200n and generating imaging data that reflects and describes the absolute pose of the end effectors 200, 200A-200n and the predetermined configuration characteristics PCC, PCCA-PCCn that distinguish them from other end effectors 200, 200A-200n, and the intrinsic characteristics that identify the end effectors 200, 200A-200n.

[0078] See Figure 1-5B Sections 10 and 14 will describe exemplary methods for selectively mounting an end effector 200 onto a transfer arm 180TA. In this method, a configurable robot or workpiece transfer arm 180 is provided. Figure 14(frame 1400). As described herein, the workpiece conveyor 180 includes a base 180B, an articulated robotic arm or conveyor arm 180TA, and a controller 199. The conveyor arm 180TA is connected to the base 180B and has an end effector 200 thereon. The conveyor arm 180TA is articulated to move with at least one degree of freedom and utilizes the end effector 200 to perform predetermined robotic manipulation functions (as described herein). The controller 199 is connected to the conveyor arm 180TA and configured to articulate the conveyor arm 180TA to perform the predetermined robotic manipulation functions.

[0079] The end effector 200 is selectively installed on the transfer arm 180TA from a number of different end effectors 200A-200n that are interchangeable with each other. Figure 14 (see box 1410), and each end effector has different predetermined configuration characteristics PCC, PCCA-PCCn, which characterize corresponding predetermined operational robot functions corresponding to the selected end effector 200. At least one camera (e.g., 1020, 1021) of the machine vision system 180V images the selectively mounted end effectors 200, 200A-200n. Figure 14 (Frame 1420). The machine vision system generates imaging data at 180V ( Figure 14 (See frame 1430). This imaging data reflects and describes the absolute attitude of the end effectors 200, 200A, and 200n, as well as the predetermined configuration characteristics PCC, PCCA-PCCn that distinguish them from other end effectors 200, 200A-200n. This absolute attitude identifies the end effectors 200, 200A, and 200n. The controller 199 automatically moves the transfer arm 180TA in response to the optional installation of the end effectors 200, 200A-200n. The transfer arm 180TA positions the end effectors 200, 200A-200n (…). Figure 14 (Frame 1440) so that it can be imaged by the machine vision system 180V. The controller 199 automatically identifies and determines the predetermined configuration characteristics PCC, PCCA-PCCn of the end effectors 200, 200A-200n from the imaging data. Figure 14 (Frame 1450).

[0080] In this method, imaging data describes the absolute positions of end effectors 200, 200A-200n, and controller 199 automatically teaches the taught positions to configurable robot or workpiece conveyor 180 based on the absolute positions of end effectors 200, 200A-200n.

[0081] In this method, the controller 199 automatically configures the transfer arm 180TA to realize different predetermined operation robot functions corresponding to the end effectors 200, 200A-200n selected based on the determination of predetermined configuration characteristics PCC, PCCA-PCCn.

[0082] See Figure 1-5B Sections 10 and 15 will describe an exemplary method for selectively mounting an end effector 200 onto a transfer arm 180TA. In this method, a configurable robotic arm or workpiece transferor 180 is provided. Figure 15 (Frame 1500). The workpiece transfer device includes a base 180B, a transfer arm 180TA connected to the base 180B, and a controller 199. As described herein, the transfer arm 180TA has an end effector 200 and is hinged to move with at least one degree of freedom, and the end effector 200 is used to perform a predetermined robotic operation function. The controller 199 is connected to the transfer arm 180TA and configured to hinge the transfer arm 180TA to perform the predetermined robotic operation function.

[0083] In this method, the end effector 200 is selectively mounted onto the transfer arm ( Figure 15 (See box 1510). The end effector 200 is selected from a plurality of interchangeable end effectors 200A-200n, each end effector having different predetermined configuration characteristics PCC, PCCA-PCCn, which characterize corresponding different predetermined operational robot functions for the selected end effector 200A-200n. As described herein, each end effector 200, 200A-200n has an integrated identification device or identifier 500 integrated with and outside the body of the end effector 200, 200A-200n (e.g., any one or more of the end effector base 510, workpiece holding station 520, and end effector supports 310A, 310B). The identifier 500 is configured to express (or otherwise embody) identification data used to identify the different predetermined configuration characteristics PCC, PCCA-PCCn corresponding to the end effector 200, 200A-200n.

[0084] In this method, controller 199 registers identification data of the selectable end effector 200A-200n from detector 307 of recognizer 500 and detectors of the selected end effector 200A-200n mounted on transfer arm 180TA (in any suitable memory, such as detectors of controller 199). Controller 199 also determines from the identification data the corresponding different operation robot functions corresponding to the identification of the selected end effector 200A-200n. In response to the selectable mounting of end effector 200A-200n, controller 199 automatically identifies and determines the predetermined configuration characteristics PCCA-PCCn of end effector 200A-200n from the identification data. Controller 199 (as described herein) automatically configures transfer arm 180TA to implement the corresponding different predetermined operation robot functions corresponding to the end effector 200A-200n selected based on the identification data.

[0085] See Figure 1-5B Sections 10 and 16 will describe exemplary methods for determining the orientation of an end effector 200. In this method, a robot 180 ( Figure 16 (frame 1600), wherein robot 180 includes base 180B, conveyor arm 180TA, at least one optical array sensor 370DA, 316PA, 1020, 1021 (see frame ... Figures 3A-4B (and 11C) and controller 199. As described herein, a conveyor arm 180TA is connected to a base 180B and has an end effector 200 thereon. The conveyor arm 180TA is hinged to move the end effector 200 with at least one degree of freedom, wherein the end effector 200 is mounted to the conveyor arm 180TA in a predetermined orientation relative to the conveyor arm 180TA. At least one optical array sensor 370DA, 316PA, 1020, 1021 has pixels (e.g., at least linearly distributed pixels) in at least a linear array connected to the conveyor arm 180TA. The controller 199 is communicatively coupled (e.g., via any suitable wired or wireless communication) to at least one optical array sensor 370DA, 316PA, 1020, 1021.

[0086] In this method, at least one optical array sensor 370DA, 316PA, 1020, 1021 senses the attitude of the end effectors 200, 200A-200n (e.g., in one or more of the end effector axes EX, EY, EZ, ERx, ERy, ERz, which can be converted to robot axes X, Y, Z, θ, Rx, Ry using any suitable transformation / algorithm of the controller 199) based on the predetermined configuration characteristics PCC, PCCA-PCCn of the end effector. Figure 16(See box 1610). The at least one optical array sensor 370DA, 316PA, 1020, 1021 generates sensor data reflecting predetermined configuration characteristics PCC, PCCA-PCCn (see box 1610). Figure 3A , 4A and 10) Figure 16 (Frame 1620).

[0087] Sensor data is registered by controller 199 ( Figure 16 (Box 1630). Controller 199 parses the predetermined configuration characteristics PCC, PCCA-PCCn from the registered sensor data. Figure 16 (See box 1640). Controller 199 determines the attitude of end effectors 200, 200A-200n relative to the transfer arm 180TA from the resolved predetermined configuration characteristics PCC, PCCA-PCCn, which is relative to at least two attitude degrees of freedom (e.g., at least two of EX, EY, EZ, X, Y, Z, ERx, ERy, ERz, θ, Rx, Ry). Here, at least one optical array sensor 370DA, 316PA, 1020, 1021 is configured such that at least two attitude degrees of freedom are determined substantially simultaneously (e.g., in real time, where real time is approximately 100 ms or less).

[0088] In this method, controller 199 can determine the difference between the determined posture and a predetermined posture of end effectors 200, 200A-200n, and generate a predetermined command in response to the difference exceeding a predetermined threshold (e.g., the predetermined threshold is a displacement difference on one or more axes of axes EX, EY, EZ, X, Y, Z, ERx, ERy, ERz, θ, Rx, Ry, which will affect the pick / placement accuracy of the workpiece / substrate, thus affecting the processing of the workpiece / substrate). The predetermined command is at least one of the following: generating a predetermined signal to the operator to indicate a non-nominal state of end effectors 200, 200A-200n; registering a remedial action in a maintenance register MR (in controller 199 or other suitable memory accessible to the controller and / or operator) for the non-nominal state of end effectors 200, 200A-200n; and initializing the response action of transfer arm 180TA in response to the non-nominal state of end effectors 200, 200A-200n.

[0089] In this method, at least one optical array sensor 370DA, 316PA, 1020, 1021 is configured to sense predetermined characteristics PCC, PCCA-PCCn in one or more of the following ways: on opposite sides of end effectors 200, 200A-200n; at a longitudinal (e.g., along the longitudinal axis, e.g., in the X, EX direction) offset position of end effectors 200, 200A-200n; in the lateral direction of end effectors 200, 200A-200n (e.g., in a direction transverse to the longitudinal axis, e.g., in the Y, EY direction) to determine Z-axis attitude, roll attitude, and pitch attitude; and move in the vertical (Z, EZ) direction to determine one or more of the roll attitude and yaw attitude of end effectors 200, 200A-200n, and one or more of the X-axis and Y-axis attitudes. As described herein, the predetermined configuration characteristics PCC, PCCA-PCCn are defined by an integrated identification device 500 that is integrated with the body of the end effectors 200, 200A-200n (e.g., any one or more of the end effector base 510, workpiece holding station 520, and end effector brackets 310A, 310B) and is located outside the body.

[0090] The following are provided in accordance with this disclosure, and the following may be used individually, in any combination of each other, and / or in any combination with the foregoing features: According to this disclosure, a configurable robot includes: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector and being articulated to move with at least one degree of freedom and to perform a predetermined operation robot function using the end effector; a controller connected to the articulated robot arm and configured to articulate the articulated robot arm to perform the predetermined operation robot function; and a detector for detecting the end effector; wherein the end effector is selectively mounted to the articulated robot arm from a plurality of different end effectors interchangeable with each other, each end effector having different predetermined configuration characteristics, the different predetermined configuration characteristics characterizing different predetermined operation robot functions corresponding to the selected end effector; wherein each end effector has an identification feature that identifies the different predetermined characteristics corresponding to it, and the detector registers the identification features of the selectively mounted end effectors and generates identification data reflecting the predetermined configuration characteristics of the detected end effector; and wherein the controller is programmed such that, in response to the selective mounting of the end effector, the controller automatically identifies and determines the predetermined configuration characteristics of the detected end effector from the data.

[0091] Configurable robots can be individually, in any suitable combination, and / or in any suitable combination with the features described herein, including one or more of the following: The controller is programmed to automatically configure the articulated robot arm to perform different predetermined robot functions corresponding to the end effector selected based on predetermined configuration characteristics. The controller is configured such that the selection of the end effector used for installation automatically determines the corresponding different operational robot functions; and / or The detector is a machine vision system having: at least one of a stereo camera pair and a depth-determining camera; and at least another two-dimensional camera; wherein the vision system is arranged to image the selectively mounted end effector and generate imaging data that reflects and describes the absolute pose and predetermined configuration characteristics of the end effector's intrinsic features, the absolute pose identifying the end effector, and the predetermined configuration characteristics being different from other different end effectors; According to this disclosure, a configurable robot includes: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector and being articulated to move with at least one degree of freedom and to perform a predetermined robot operation function using the end effector; and a controller connected to the articulated robot arm and configured to articulate the articulated robot arm to perform the predetermined robot operation function; wherein the end effector is selectively mounted to the articulated robot arm from a plurality of different end effectors that are interchangeable with each other, each end effector having different predetermined configuration characteristics, the different predetermined configuration characteristics characterizing a different predetermined robot operation function corresponding to the selected end effector; and It also includes a machine vision system communicatively connected to the controller, the machine vision system having at least one camera configured to image a selectively mounted end effector and generate imaging data that reflects and describes the absolute attitude and predetermined configuration characteristics of the end effector's intrinsic features, the absolute attitude identifying the end effector, the predetermined configuration characteristics being different from other different end effectors; wherein the controller is programmed such that, in response to the selective mounting of the end effector, the controller automatically moves and positions the articulated robotic arm of the end effector for imaging by the machine vision system, and automatically identifies and determines the predetermined configuration characteristics of the end effector from the imaging data.

[0092] Configurable robots can be individually, in any suitable combination, and / or in any suitable combination with the features described herein, including one or more of the following: The controller is programmed to automatically configure the articulated robot arm to perform different predetermined robot functions corresponding to the end effector selected based on predetermined configuration characteristics. The at least one camera includes: at least one of a stereo camera pair and a depth-determining camera; and at least one other two-dimensional camera; The at least one other two-dimensional camera is oriented to observe a side view of the end effector, and at least one of the stereo camera pair and the depth determining camera is oriented to observe the end effector and determine the absolute orientation of the end effector at least around three axes of the end effector; The machine vision system is encapsulated to block one or more of ambient lighting and stray lighting from the field of view of at least one camera, and the encapsulation has an opening sized and shaped to allow the end effector to move through the opening with at least one degree of freedom via an arm hinge; and / or The imaging data describes the absolute position of the end effector, and the controller is configured to automatically teach the configurable robot the taught position from the absolute position of the end effector.

[0093] According to this disclosure, a method includes: providing a configurable robot including a base, an articulated robot arm connected to the base, a controller, and a detector, the articulated robot arm having an end effector thereon and being articulated to move in at least one degree of freedom and to perform a predetermined manipulating robot function together with the end effector, the controller being connected to the articulated robot arm and configured to articulate the articulated robot arm to perform the predetermined manipulating robot function, the detector detecting the end effector; selectively mounting an end effector to the articulated robot arm from a plurality of different end effectors interchangeable with each other, each end effector having a different predetermined configuration characteristic, the different predetermined configuration characteristics characterizing a different predetermined manipulating robot function corresponding to the selected end effector, wherein each end effector has an identification feature that identifies the different predetermined characteristic corresponding to it; registering the identification feature of the selectively mounted end effector using the detector; generating data using the controller, the data reflecting the identification of the predetermined configuration characteristics of the detected end effector; and automatically identifying and determining the predetermined configuration characteristics of the detected end effector from the data using the controller in response to the selective mounting of the end effector.

[0094] The method may be used alone, in any suitable combination thereof, and / or in any suitable combination thereof with the features described herein, including one or more of the following: The controller automatically configures the articulated robot arm to achieve the corresponding different predetermined operation robot functions corresponding to the end effector selected based on the determination of the predetermined configuration characteristics; The controller is configured such that the selection of the end effector used for installation automatically determines the corresponding different operational robot functions; and / or The detector is a machine vision system having at least one of a stereo camera pair and a depth-determining camera; and at least one other two-dimensional camera arranged thereon; and the method further includes: imaging the selectively mounted end effector using the machine vision system; and generating imaging data of an absolute pose that reflects and describes the intrinsic characteristics of the end effector and predetermined configuration characteristics that distinguish it from other different end effectors, the intrinsic characteristics identifying the end effector.

[0095] According to this disclosure, a method includes: providing a configurable robot including a base, an articulated robot arm connected to the base, and a controller, the articulated robot arm having an end effector and being articulated to move in at least one degree of freedom and to perform a predetermined manipulating robot function together with the end effector, the controller being connected to the articulated robot arm and configured to articulate the articulated robot arm to perform the predetermined manipulating robot function; selectively mounting end effectors to the articulated robot arm from a plurality of different end effectors that are interchangeable with each other, each end effector having a different predetermined configuration characteristic, the different predetermined configuration characteristic characterizing a corresponding different predetermined operation corresponding to the selected end effector. The robot functions to: image the selectively mounted end effector using at least one camera of a machine vision system communicatively connected to the controller; generate imaging data using the machine vision system, the imaging data reflecting and describing the absolute orientation and predetermined configuration characteristics of the end effector's intrinsic features, the intrinsic features identifying the end effector, the predetermined configuration characteristics being different from other different end effectors; automatically move an articulated robot arm using the controller in response to the selective mounting of the end effector, the articulated robot arm positioning the end effector for imaging by the machine vision system; and automatically identify and determine the predetermined configuration characteristics of the end effector from the imaging data using the controller.

[0096] The method may be used alone, in any suitable combination thereof, and / or in any suitable combination thereof with the features described herein, including one or more of the following: Using the controller, the articulated robot arm is automatically configured to perform different predetermined robot functions corresponding to the end effector selected based on the determination of the predetermined configuration characteristics; The at least one camera includes: at least one of a stereo camera pair and a depth-determining camera; and at least one other two-dimensional camera; The at least one other two-dimensional camera is oriented to observe a side view of the end effector, and at least one of the stereo camera pair and the depth determining camera is oriented to observe the end effector and determine the absolute orientation of the end effector at least around three axes of the end effector; The machine vision system is encapsulated to block one or more of ambient lighting and stray lighting from the field of view of at least one camera, and the encapsulation has an opening sized and shaped to allow the end effector to move through the opening with at least one degree of freedom via an arm hinge; and / or The imaging data describes the absolute position of the end effector, and the method further includes automatically teaching a taught position to a configurable robot from the absolute position of the end effector using a controller.

[0097] According to this disclosure, a configurable robot includes: a base; an articulated robot arm connected to the base, the articulated robot arm having an end effector and being articulated to move with at least one degree of freedom and to perform a predetermined operation robot function using the end effector; and a controller connected to the articulated robot arm and configured to articulate the articulated robot arm to perform the predetermined operation robot function; wherein the end effector is selectively mounted to the articulated robot arm from a plurality of different end effectors that are interchangeable with each other, each end effector having a different predetermined configuration characteristic that characterizes a corresponding different predetermined operation robot function corresponding to the selected end effector; and wherein each end effector has an integrated identification device integrated with and outside the body of the end effector, the identification device being configured to express identification data that identifies the different predetermined configuration characteristics corresponding to the end effector.

[0098] Configurable robots can be individually, in any suitable combination, and / or in any suitable combination with the features described herein, including one or more of the following: The controller is programmed to: register identification data from the detector of the integrated identification device with the selected end effector installed on the articulated robot arm; and thereby determine the corresponding different robot operation functions corresponding to the identification of the selected end effector; The controller is programmed to automatically identify and determine the predetermined configuration characteristics of the end effector from identification data in response to the optional installation of the end effector. The controller is programmed to automatically configure the articulated robot arm to perform different pre-defined robot functions corresponding to the end effector selected based on recognition data; The identification device is at least one of a machine-readable tag, code, marker, and electromagnetic communication device; and / or Each end effector has a deterministic coupling that is configured for the automatic engagement and disengagement of each end effector with the articulated robotic arm.

[0099] According to this disclosure, a method includes: providing a configurable robot including a base, an articulated robot arm, and a controller, the articulated robot arm being connected to the base, the articulated robot arm having an end effector and being articulated to move with at least one degree of freedom and to perform a predetermined operation robot function using the end effector, the controller being connected to the articulated robot arm and configured to articulate the articulated robot arm to perform the predetermined operation robot function; and selectively mounting an end effector to the articulated robot arm, wherein the end effector is selected from a plurality of different end effectors that are interchangeable with each other, each end effector having a different predetermined configuration characteristic that characterizes a corresponding different predetermined operation robot function corresponding to the selected end effector; and wherein each end effector has an integrated identification device integrated with and outside the body of the end effector, the identification device being configured to express identification data that identifies the different predetermined configuration characteristic corresponding to the end effector.

[0100] The method may be used alone, in any suitable combination thereof, and / or in any suitable combination thereof with the features described herein, including one or more of the following: The controller registers the identification data of the selected end effector installed on the articulated robot arm from the detector of the integrated identification device; and the controller determines the corresponding different operation robot functions corresponding to the identification of the selected end effector from the identification data. Using the controller, in response to the optional installation of the end effector, the predetermined configuration characteristics of the end effector are automatically identified and determined from the identification data; The controller automatically configures the articulated robot arm to perform different predetermined robot functions corresponding to the end effector selected based on recognition data. The identification device is at least one of a machine-readable tag, code, marker, and electromagnetic communication device; and / or Each end effector has a deterministic coupling that is configured for the automatic engagement and disengagement of each end effector with the articulated robotic arm.

[0101] According to this disclosure, a robot includes: a base; an articulated robotic arm connected to the base, the articulated robotic arm having an end effector and being articulated to move the end effector in at least one degree of freedom, the end effector being mounted to the articulated robotic arm in a predetermined posture relative to the articulated robotic arm; at least one photoelectric array sensor having pixels in at least a linear array (connected to the articulated robotic arm and configured to sense predetermined configuration characteristics of the end effector describing the posture of the end effector and generate sensor data embodying the predetermined configuration characteristics); and a controller communicatively connected to the at least one photoelectric array sensor to register the sensor data, and the controller being configured to parse the predetermined configuration characteristics from the sensor data from the registered sensor data and determine, based thereon, the posture of the end effector relative to the articulated robotic arm with respect to at least two posture degrees of freedom, the at least one photoelectric array sensor being configured to determine the at least two posture degrees of freedom substantially simultaneously.

[0102] The robot may be individually, in any suitable combination thereof, and / or in any suitable combination thereof with the features described herein, including one or more of the following: The controller is configured to: determine the difference between the determined posture and the predetermined posture of the end effector, and generate a predetermined command in response to the difference exceeding a predetermined threshold; The predetermined command is at least one of the following: generating a predetermined signal to the operator indicating a non-nominal state of the end effector, registering a remedial action for the non-nominal state of the end effector in the maintenance register, and initializing a response action of the articulated robot arm in response to the non-nominal state of the end effector. The at least one optical array sensor is configured to sense the predetermined configuration characteristics on the opposite side of the end effector; The at least one optical array sensor is configured to sense the predetermined configuration characteristic at a longitudinal offset position of the end effector; The at least one optical array sensor is configured to sense the predetermined configuration characteristics of the end effector in the lateral direction in order to determine the Z-axis attitude, roll attitude, and pitch attitude. The at least one optical array sensor is configured to sense the predetermined configuration characteristics in the vertical direction in order to determine one or more of the roll attitude and yaw attitude, and one or more of the X-axis and Y-axis attitudes; The predetermined configuration features are defined by an integrated identification device integrated with the body of the end effector and outside the body; and / or The end effector is selectively mounted onto the articulated robot arm from a number of different end effectors that are interchangeable with each other. The predetermined configuration characteristics of the end effectors are different from each other, and the different predetermined configuration characteristics characterize different predetermined robot functions corresponding to the selected end effector.

[0103] According to this disclosure, the method includes: providing a robot including a base, an articulated robot arm connected to the base, at least one optical array sensor having pixels in at least one linear array connected to the articulated robot arm, and a controller communicatively connected to the at least one optical array sensor, the articulated robot arm having an end effector and being articulated to move the end effector with at least one degree of freedom, the end effector being mounted to the articulated robot arm in a predetermined posture relative to the articulated robot arm; sensing predetermined configuration characteristics of the end effector describing the posture of the end effector using the at least one optical array sensor, and generating sensor data embodying the predetermined configuration characteristics; and using the controller to: register the sensor data, parse the predetermined configuration characteristics from the registered sensor data, and thereby determine the posture of the end effector relative to the articulated robot arm with respect to at least two posture degrees of freedom; wherein the at least one optical array sensor is configured such that the at least two posture degrees of freedom are determined substantially simultaneously.

[0104] The method may be used alone, in any suitable combination thereof, and / or in any suitable combination thereof with the features described herein, including one or more of the following: Using the controller: determine the difference between the determined posture and the predetermined posture of the end effector, and generate a predetermined command in response to the difference exceeding a predetermined threshold; The predetermined command is at least one of the following: generating a predetermined signal to the operator indicating a non-nominal state of the end effector, registering a remedial action for the non-nominal state of the end effector in the maintenance register, and initializing a response action of the articulated robot arm in response to the non-nominal state of the end effector. The at least one optical array sensor senses the predetermined configuration characteristics on the opposite side of the end effector; The at least one optical array sensor senses the predetermined configuration characteristics at the longitudinal offset position of the end effector; The at least one optical array sensor senses the predetermined configuration characteristics of the end effector in the lateral direction in order to determine the Z-axis attitude, roll attitude, and pitch attitude; The at least one optical array sensor senses the predetermined configuration characteristics in the vertical direction in order to determine one or more of the roll attitude and yaw attitude, and one or more of the X-axis and Y-axis attitudes; The predetermined configuration features are defined by an integrated identification device integrated with the body of the end effector and outside the body; and / or An end effector is selectively mounted onto an articulated robot arm from a number of different end effectors that are interchangeable with each other. The predetermined configuration characteristics of the end effectors are different from each other, and the different predetermined configuration characteristics characterize the corresponding different predetermined operation robot functions corresponding to the selected end effector.

[0105] It should be understood that the foregoing description is merely illustrative of this disclosure. Those skilled in the art can devise various alternatives and modifications without departing from this disclosure. Therefore, this disclosure is intended to cover all such alternatives, modifications, and variations that fall within the scope of the appended claims. Furthermore, the mere fact that different features are recited in mutually different dependent or independent claims does not imply that combinations of these features cannot be advantageously used, such combinations remaining within the scope of this disclosure.

Claims

1. A configurable robot, the configurable robot comprising: Base; An articulated robot arm is connected to the base, the articulated robot arm having an end effector and being articulated to move with at least one degree of freedom and to perform a predetermined robot function using the end effector; A controller connected to and configured to hinge the articulated robot arm to perform the predetermined robot function; as well as Detector, the detector detects the end effector; The end effector is selectively mounted to the articulated robot arm from a number of different end effectors that are interchangeable with each other, each end effector having different predetermined configuration characteristics, the different predetermined configuration characteristics representing different predetermined robot functions corresponding to the selected end effector; Each end effector has an identification feature that identifies a different predetermined characteristic, and the detector registers the identification features of the selectively installed end effectors and generates data that reflects the identification of the predetermined configuration characteristics of the detected end effector. as well as The controller is programmed such that, in response to the optional installation of the end effector, the controller automatically identifies and determines the predetermined configuration characteristics of the detected end effector from the data.

2. The configurable robot according to claim 1, wherein, The controller is programmed to automatically configure the articulated robot arm to implement the corresponding different predetermined operation robot functions corresponding to the end effector selected based on the determination of the predetermined configuration characteristics.

3. The configurable robot according to claim 1, wherein, The controller is configured such that the selection of the end effector used for installation automatically determines the corresponding different robot operation functions.

4. The configurable robot according to claim 1, wherein, The detector is a machine vision system, which has the following characteristics: At least one of the following: Stereo camera pair, and Depth-determining cameras; and At least another two-dimensional camera; The vision system is configured to image selectively mounted end effectors and generate imaging data that reflects and describes the absolute attitude and predetermined configuration characteristics of the end effector's intrinsic features. The absolute attitude identifies the end effector, and the predetermined configuration characteristics are different from other end effectors.

5. A configurable robot, the configurable robot comprising: Base; An articulated robot arm is connected to the base, the articulated robot arm having an end effector and being articulated to move with at least one degree of freedom and to perform a predetermined robot function using the end effector; A controller connected to and configured to hinge the articulated robot arm to perform the predetermined robot function; The end effector is selectively mounted to the articulated robot arm from a plurality of different end effectors that are interchangeable with each other. Each end effector has different predetermined configuration characteristics, which characterize different predetermined robot functions corresponding to the selected end effector. It also includes a machine vision system communicatively connected to the controller, the machine vision system having at least one camera configured to image a selectively mounted end effector and generate imaging data that reflects and describes the absolute attitude and predetermined configuration characteristics of the end effector’s intrinsic features, the absolute attitude identifying the end effector, the predetermined configuration characteristics being different from other different end effectors; The controller is programmed such that, in response to the optional installation of the end effector, the controller automatically moves and positions the articulated robotic arm of the end effector for imaging by the machine vision system, and automatically identifies and determines the predetermined configuration characteristics of the end effector from the imaging data.

6. The configurable robot according to claim 5, wherein, The controller is programmed to automatically configure the articulated robot arm to implement the corresponding different predetermined operation robot functions corresponding to the end effector selected based on the determination of the predetermined configuration characteristics.

7. The configurable robot according to claim 5, wherein, The at least one camera includes: At least one of the following: Stereo camera pair, and Depth-determining camera, and At least another two-dimensional camera.

8. The configurable robot according to claim 7, wherein, The at least one other two-dimensional camera is oriented to observe a side view of the end effector, and at least one of the stereo camera pair and the depth-determining camera is oriented to observe the end effector and determine the absolute orientation of the end effector at least with respect to three axes of the end effector.

9. The configurable robot according to claim 5, wherein, The machine vision system is encapsulated to block one or more of ambient lighting and stray lighting of the end effector in the field of view of the at least one camera, and the encapsulation has an opening sized and shaped to allow the end effector to move through the opening with at least one degree of freedom via an arm hinge.

10. The configurable robot according to claim 5, wherein, The imaging data describes the absolute position of the end effector, and the controller is configured to automatically teach the configurable robot a teaching position from the absolute position of the end effector.

11. A method, the method comprising: A configurable robot is provided, the configurable robot comprising: Base An articulated robotic arm, connected to the base, has an end effector and is hinged to move with at least one degree of freedom, and utilizes the end effector to perform predetermined robotic manipulation functions. A controller, connected to and configured to hinge the articulated robot arm to perform the predetermined robot function, and Detector, the detector detects the end effector; The end effector is selectively mounted to the articulated robot arm from a number of different end effectors that are interchangeable with each other, each end effector having a different predetermined configuration characteristic that characterizes a different predetermined operation robot function corresponding to the selected end effector, wherein each end effector has an identification feature that identifies the different predetermined characteristic corresponding to it; The detector is used to register the identification features of the selectively installed end effector; The controller generates data reflecting the identification of predetermined configuration characteristics of the detected end effector; and In response to the optional installation of the end effector, the controller automatically identifies and determines the predetermined configuration characteristics of the detected end effector from the data.

12. The method of claim 11, further comprising: The controller automatically configures the articulated robot arm to achieve the corresponding different predetermined operation robot functions corresponding to the end effector selected based on the determination of the predetermined configuration characteristics.

13. The method according to claim 11, wherein, The controller is configured such that the selection of the end effector used for installation automatically determines the corresponding different robot operation functions.

14. The method according to claim 11, wherein, The detector is a machine vision system, which has: At least one of the following: Stereo camera pair, and Depth-determining camera; as well as At least one other two-dimensional camera was deployed; and The method further includes: The machine vision system is used to image the selectively installed end effector; as well as Imaging data is generated that reflects and describes the absolute attitude of the end effector and its predetermined configuration characteristics, which are different from those of other end effectors, to identify the end effector.

15. A method comprising: A configurable robot is provided, the configurable robot comprising: Base An articulated robot arm connected to the base, the articulated robot arm having an end effector and being articulated to move with at least one degree of freedom, and utilizing the end effector to realize a predetermined robot operation function, and A controller connected to and configured to hinge the articulated robot arm to perform the predetermined robot function; An end effector is selectively mounted onto an articulated robot arm from a number of different end effectors that are interchangeable with each other, each end effector having a different predetermined configuration characteristic that characterizes a different predetermined operation robot function corresponding to the selected end effector; The selectively mounted end effector is imaged using at least one camera of a machine vision system communicatively connected to the controller; Imaging data is generated using a machine vision system. The imaging data reflects and describes the absolute pose and predetermined configuration characteristics of the intrinsic features of the end effector. The intrinsic features identify the end effector, and the predetermined configuration characteristics are different from other different end effectors. In response to the optional installation of an end effector, a controller automatically moves an articulated robotic arm, which positions the end effector for imaging by a machine vision system; and The controller automatically identifies and determines the predetermined configuration characteristics of the end effector from the imaging data.

16. The method of claim 15, further comprising: The controller automatically configures the articulated robot arm to achieve the corresponding different predetermined operation robot functions corresponding to the end effector selected based on the determination of the predetermined configuration characteristics.

17. The method according to claim 15, wherein, The at least one camera includes: At least one of the following: Stereo camera pair, and Depth-determining cameras; and At least another two-dimensional camera.

18. The method according to claim 17, wherein, The at least one other two-dimensional camera is oriented to observe a side view of the end effector, and at least one of the stereo camera pair and the depth-determining camera is oriented to observe the end effector and determine the absolute orientation of the end effector at least around three axes of the end effector.

19. The method according to claim 15, wherein, The machine vision system is encapsulated to block one or more of ambient lighting and stray lighting of the end effector in the field of view of the at least one camera, and the encapsulation has an opening sized and shaped to allow the end effector to move through the opening with at least one degree of freedom via an arm hinge.

20. The method of claim 15, wherein, The imaging data describes the absolute position of the end effector, and the method further includes: automatically teaching the configurable robot a teaching position from the absolute position of the end effector using the controller.

Images