Multi-dimensional adjustable anti-solvent dropping device for spin coating experiment and anti-solvent dropping method

Abstract

The application belongs to the technical field of perovskite film layer preparation, and discloses a multi-dimensional adjustable anti-solvent dropping device for spin coating experiments and an anti-solvent dropping method. The machine frame is detachably and fixedly arranged on a spin coater, and the driving mechanism is detachably and fixedly arranged on the machine frame. In the liquid spraying mechanism, the mounting seat is in transmission connection with the output end of the driving mechanism, a plurality of liquid outlet holes are uniformly arranged on the shunt nozzle, one end of the liquid guide pipe is in communication with the plurality of liquid outlet holes, the other end is in communication with the outlet of the metering pump, a corresponding valve is arranged in the flow path of each liquid outlet hole. The control mechanism receives the rotation speed data of the spin coater, judges the dropping time according to the data, receives the pressure data of the liquid guide pipe, adjusts the dropping flow of the metering pump adaptively at the dropping time, controls the opening and closing and the opening degree of each liquid outlet hole by adjusting the plurality of valves correspondingly, controls the driving mechanism to drive the liquid spraying mechanism to move along the X-axis direction, the Y-axis direction and the Z-axis direction and rotate around the Z-axis, and drops according to the preset dropping path, thereby improving the stability of the thin film crystallization quality.

Description

Technical Field

[0001] This invention relates to the field of perovskite film preparation technology, and in particular to a multi-dimensional adjustable antisolvent addition device and method for spin coating experiments. Background Technology

[0002] Spin coating is the mainstream process for preparing perovskite thin films in the laboratory. The addition of antisolvent is a key step in spin coating film formation. The antisolvent is miscible with the solvent in the perovskite precursor solution but does not dissolve the perovskite grains. Typically, the substrate is placed on a spin coater, which drives the substrate to rotate at high speed. By adding antisolvent to the surface of the high-speed rotating substrate, excessive evaporation of the solvent in the perovskite precursor solution is suppressed, allowing the precursor solution to spread evenly on the substrate surface and form a film. This induces the directional growth of perovskite grains and suppresses defects such as pinholes and cracks, and has a decisive influence on the crystallinity, surface smoothness, and defect density of the film.

[0003] Currently, in laboratory perovskite thin film preparation, antisolvent addition mainly relies on three methods: manual, peristaltic pump quantitative, or semi-automatic time-sequential addition. Manual addition relies on manual operation, making it difficult to control the timing, amount, and uniformity of addition, resulting in large fluctuations in film quality. Quantitative addition uses a peristaltic pump with a fixed flow rate, fixing the dispensing needle above the substrate with a clamp, controlling the amount of drop according to a preset time, and the addition path is only in a single fixed direction, resulting in poor adaptability and incompatibility with different substrate sizes and spin coaters. Semi-automatic time-sequential addition starts 2 seconds after spin coating begins, lacking linkage control between the timing of addition and the spin coating speed, and cannot adapt to the addition requirements at different speed stages. All three methods have significant technical defects, leading to unstable crystallization quality of perovskite films, low reliability of experimental data, and inability to meet the needs of precise laboratory experiments.

[0004] Therefore, there is an urgent need for a multi-dimensional adjustable antisolvent dropping device and antisolvent dropping method for spin coating experiments to solve the above problems. Summary of the Invention

[0005] The first objective of this invention is to provide a multi-dimensional adjustable antisolvent dispensing device for spin coating experiments, which precisely controls the timing, amount, and uniformity of dispensing; the dispensing path is multi-dimensionally adjustable, improving the device's adaptability and ease of maintenance, and is compatible with spin coaters and substrates of different specifications; it adapts to the dispensing requirements at different speed stages, reducing defects in perovskite films; it improves the stability of film crystallization quality and the reliability of experimental data, meeting the precise experimental needs of laboratories.

[0006] To achieve this objective, the present invention adopts the following technical solution: A multi-dimensional adjustable antisolvent dispensing device for spin coating experiments includes: The frame is detachably fixed to the side of the spin coater body, and the spin coater can hold the substrate and drive the substrate to rotate around the Z-axis. The liquid spraying mechanism includes a mounting base, a diversion nozzle, a liquid guide tube, a diversion structure, a metering pump, and multiple valves. The diversion nozzle is mounted on the mounting base and has multiple liquid outlet holes evenly distributed on it. One end of the liquid guide tube is connected to the multiple liquid outlet holes through the diversion structure, and the other end is connected to the outlet of the metering pump. The metering pump is configured to deliver the antisolvent into the liquid guide tube at a preset dripping flow rate. Each liquid outlet hole has a corresponding valve in its flow path, and the valve is configured to adjust the opening and closing of the liquid outlet hole and its opening degree. A drive mechanism is located above the spin coater and is detachably and fixedly connected to the frame; the mounting base is assembled at the output end of the drive mechanism. The condition monitoring mechanism includes a speed detector and a pressure detector, wherein the speed detector is configured to monitor the speed data of the spin coater in real time; and the pressure detector is configured to monitor the pressure data of the liquid guide tube in real time. The control mechanism includes the spraying mechanism, the drive mechanism, the speed detector, and the pressure detector, all of which are electrically connected to the control mechanism. The control mechanism can receive the speed data and determine the timing of dripping accordingly. It can also receive the pressure data and adaptively adjust the dripping flow rate of the metering pump at the appropriate dripping time. Furthermore, it controls multiple valves to adjust the opening and closing of each outlet orifice and the degree of opening. The drive mechanism drives the spraying mechanism to move along the X-axis, Y-axis, and Z-axis and rotate around the Z-axis to drip along a preset dripping path. The X-axis, Y-axis, and Z-axis are perpendicular to each other.

[0007] As an optional solution for a multi-dimensional adjustable antisolvent dispensing device for spin coating experiments, the status monitoring mechanism also includes an alarm, which is electrically connected to the control mechanism. The control mechanism can receive the pressure data and determine whether the pressure in the liquid delivery tube is normal. When the pressure in the liquid delivery tube is abnormal, the alarm is triggered.

[0008] As an optional solution for a multi-dimensional adjustable antisolvent dispensing device for spin coating experiments, the condition monitoring mechanism also includes a flexible coupling. The speed detector is connected to the main shaft of the spin coater through the flexible coupling, and the speed detector is coaxial with the main shaft, so that the speed detector can monitor the speed data of the spin coater in real time.

[0009] As an alternative solution for a multi-dimensional adjustable antisolvent dispensing device for spin coating experiments, the status monitoring mechanism also includes a touch screen, which is electrically connected to the control mechanism. The control mechanism can dynamically display the spin coater's rotation speed-time curve, the metering pump's dispensing amount-time curve, and the liquid guide tube's pressure-time curve through the touch screen.

[0010] As an alternative to a multi-dimensional adjustable antisolvent dispensing device for spin coating experiments, the drive mechanism includes: X-axis drive assembly, which is detachably and fixedly connected to the frame; A Y-axis drive assembly is mounted at the output end of the X-axis drive assembly, and the X-axis drive assembly is capable of driving the Y-axis drive assembly to move along the X-axis direction. A Z-axis drive assembly is mounted at the output end of the Y-axis drive assembly, and the Y-axis drive assembly is capable of driving the Z-axis drive assembly to move along the Y-axis direction. A rotary drive assembly is mounted on the output end of the Z-axis drive assembly, and the Z-axis drive assembly is capable of driving the rotary drive assembly to move along the Z-axis direction; the mounting base is mounted on the output end of the rotary drive assembly, and the rotary drive assembly is capable of driving the liquid spraying mechanism to rotate around the Z-axis.

[0011] As an alternative to a multi-dimensional adjustable antisolvent dispensing device for spin coating experiments, the X-axis drive assembly includes: The first slide rail extends along the X-axis and is detachably and fixedly connected to the frame. The first slider slides in cooperation with the first slide rail, and the Y-axis drive component is mounted on the first slider; The first cylinder has a piston rod connected to the first slider. The first cylinder can drive its piston rod to reciprocate, causing the first slider, the Y-axis drive assembly, the Z-axis drive assembly, and the rotary drive assembly to move synchronously along the X-axis, thereby causing the entire spraying mechanism to move synchronously along the X-axis to the preset dripping position.

[0012] As an optional solution for a multi-dimensional adjustable antisolvent dispensing device for spin coating experiments, the first slide rail is equipped with a connector, and the frame is equipped with a corresponding connector seat. The connector and the connector seat are interlocked to achieve a detachable and fixed connection between the drive mechanism and the frame; or, The first slide rail is provided with a plug-in seat, and the frame is provided with a corresponding plug connector. The plug connector and the plug-in seat are plugged into each other to realize the detachable and fixed connection between the drive mechanism and the frame.

[0013] As an optional solution for a multi-dimensional adjustable antisolvent dispensing device for spin coating experiments, the multi-dimensional adjustable antisolvent dispensing device for spin coating experiments also includes a movable support mechanism. The movable support mechanism includes multiple casters, which are evenly distributed on the lower side of the frame to support the frame and realize the movement and repositioning of the frame.

[0014] The second objective of this invention is to provide an antisolvent dropping method, applicable to the aforementioned multi-dimensional adjustable antisolvent dropping device for spin coating experiments. This method achieves multi-dimensional precise control, accurately managing the timing, amount, and uniformity of dropping, thereby reducing film quality fluctuations. The dropping path is adaptable and can be adjusted to accommodate substrates and spin coaters of different specifications. It enables the linkage control of dropping timing and spin coating speed, adapting to the dropping requirements at different speed stages. This improves the stability of perovskite film crystallization quality and the reliability of experimental data, meeting the precise experimental needs of the laboratory.

[0015] To achieve this objective, the present invention adopts the following technical solution: The antisolvent addition method, applied to the multi-dimensional adjustable antisolvent addition device for the spin coating experiment described above, includes the following steps: Step S100: Move the frame to the side of the spin coater, adjust the frame to be horizontal and fix it to the side of the spin coater body, and place the substrate on the spin coater; Step S200: Install the drive mechanism on the frame, and control the drive mechanism to drive the spraying mechanism to move along the X-axis, Y-axis and Z-axis and rotate around the Z-axis, so that the split nozzle moves to the initial position and maintains a preset gap with the substrate surface; inject anti-solvent into the liquid guide tube; Step S300: The control mechanism sets the spin coating speed stage parameters with the center of the substrate as the origin. In the low-speed spreading stage, the spin coater drives the substrate to rotate at a first preset speed for a first preset time. In the high-speed film formation stage, the spin coater drives the substrate to rotate at a second preset speed for a second preset time. In the low-speed finishing stage, the spin coater drives the substrate to rotate at a third preset speed for a third preset time. The dropping timing is set to a preset delay time after the start of the high-speed film formation stage, and the preset dropping amount, preset dropping flow rate, and preset dropping path are also set. Step S400: Start the spin coater. The speed detector monitors the spin coater's speed data in real time. The control mechanism determines the timing of the droplet application based on the speed data. When the timing of the droplet application is reached, the control mechanism opens the corresponding liquid outlet holes of multiple valves to adapt to the droplet application and coverage requirements of substrates of different sizes. At the same time, the control mechanism starts the metering pump to deliver the anti-solvent into the liquid guide tube at the preset droplet flow rate. The control mechanism drives the split nozzle to move along the preset droplet path for droplet application. Step S500: When the amount of liquid added reaches the preset amount, the control mechanism controls the metering pump to stop and controls the drive mechanism to drive the split nozzle back to the initial position; the spin coater stops after completing the low-speed finishing stage, and the single experiment ends; the control mechanism automatically stores the experimental parameters, and the same experimental conditions can be reproduced by calling the parameters without resetting.

[0016] As an alternative to the antisolvent dripping method, after step S400 and before step S500, the antisolvent dripping method further includes step S401, in which: the pressure detector monitors the pressure data of the liquid guide tube in real time, the control mechanism receives the pressure data, and adaptively controls the dripping flow rate of the metering pump according to the pressure data, while adjusting the opening and closing status and opening degree of multiple valves to match the liquid discharge requirements of the corresponding liquid outlet.

[0017] The beneficial effects of this invention are: This invention provides a multi-dimensional adjustable antisolvent dripping device for spin coating experiments. The device features a detachable frame fixed to the side of the spin coater, and a drive mechanism located above the spin coater and detachably fixed to the frame, improving adaptability and maintenance convenience. It is compatible with different specifications of spin coaters and substrates. The spraying mechanism has multiple outlet holes evenly distributed on the flow-dividing nozzle, each with a corresponding valve, allowing flexible adjustment of the discharge state of each outlet hole. This enables multi-point synchronous dripping of antisolvent onto the substrate surface, improving coverage uniformity. The metering pump precisely controls the dripping flow rate and, combined with the drive mechanism, drives the spraying process. The entire mechanism moves along the X, Y, and Z axes and rotates around the Z axis, enabling multi-dimensional adjustment of the dripping path of the split nozzle and providing strong adaptability. The speed detector of the status monitoring mechanism provides real-time feedback of the spin coater's speed data, and the pressure detector provides real-time feedback of the liquid guide tube's pressure data. The control mechanism determines the dripping timing based on the speed data and adaptively adjusts the dripping flow rate of the metering pump and the liquid outlet status based on the pressure data, precisely controlling the dripping timing, dripping amount, and uniformity to meet the dripping needs at different speed stages, reducing perovskite film defects, improving the stability of film crystallization quality and the reliability of experimental data, and meeting the precise experimental needs of the laboratory.

[0018] This invention also provides an antisolvent dripping method. In this method, the frame is first moved to the side of the spin coater, leveled, and fixed. The substrate is placed on the spin coater, and the drive mechanism is installed on the frame. The control mechanism controls the drive mechanism to move and rotate the spraying mechanism, so that the split nozzle reaches the initial position and maintains a preset gap with the substrate surface, and the antisolvent is injected into the guide tube. After setting the spin coating three-stage rotation speed parameters, dripping timing, dripping amount, dripping flow rate, and dripping path through the control mechanism, the spin coater is started. The rotation speed detector monitors the rotation speed in real time. When the dripping timing is reached, the control mechanism controls multiple valves to open the corresponding liquid outlets, the metering pump starts to input antisolvent into the guide tube, and the drive mechanism drives the split nozzle to move and drip along the preset dripping path. After the preset dripping amount is reached, the metering pump stops, the split nozzle returns to the initial position, the spin coater finishes and stops, and the control mechanism automatically stores the experimental parameters for recall and reproduction. This antisolvent dropping method, through the coordinated action of a spraying mechanism, a driving mechanism, a state monitoring mechanism, and a control mechanism, precisely controls the timing, amount, and uniformity of dropping, reducing film quality fluctuations. It achieves multi-dimensional precise control, with an adaptable dropping path to accommodate substrates and spin coaters of different specifications. It also enables the linkage control of dropping timing and spin coating speed, adapting to the dropping requirements at different speed stages. Furthermore, it improves the stability of perovskite film crystallization quality and the reliability of experimental data, and can automatically store experimental parameters for reproducibility, meeting the needs of precise laboratory experiments and data traceability. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the multi-dimensional adjustable antisolvent dripping device for spin coating experiments described in this embodiment of the invention.

[0020] In the picture: 100. Spin coater; 200. Substrate; 1. Rack; 2. Spraying mechanism; 21. Mounting base; 22. Diverting nozzle; 3. Drive mechanism; 31. X-axis drive assembly; 32. Y-axis drive assembly; 33. Z-axis drive assembly; 34. Rotation drive assembly; 341. Drive motor; 342. Rotation shaft; 41. Touch screen display; 5. Control mechanism. Detailed Implementation

[0021] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0022] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0023] In the description of this invention, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0024] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0025] like Figure 1As shown, this embodiment provides a multi-dimensional adjustable antisolvent dripping device and method for spin coating experiments. The multi-dimensional adjustable antisolvent dripping device for spin coating experiments includes a frame 1, a spraying mechanism 2, a driving mechanism 3, a status monitoring mechanism, and a control mechanism 5. The frame 1 is detachably fixed to the side of the spin coater 100 body. The spin coater 100 can hold a substrate 200 and drive the substrate 200 to rotate around the Z-axis. The spraying mechanism 2 includes a mounting base 21, a diverting nozzle 22, a liquid guide tube, a diverting structure, a metering pump, and multiple valves. The diverting nozzle 22 is mounted on the mounting base 21 and has multiple evenly distributed liquid outlet holes. One end of the liquid guide tube is connected to multiple outlet holes via the diverting structure. The outlet is connected to the metering pump outlet, and the metering pump is used to deliver the antisolvent into the liquid guide tube according to the preset dripping flow rate. Each outlet has a corresponding valve in its flow path, which is used to adjust the opening and closing of the outlet and the opening degree. The drive mechanism 3 is located above the spin coater 100 and is detachably fixedly connected to the frame 1. The mounting base 21 is assembled on the output end of the drive mechanism 3. The status monitoring mechanism includes a speed detector and a pressure detector. The speed detector is used to monitor the speed data of the spin coater 100 in real time. The pressure detector is used to monitor the pressure data of the liquid guide tube in real time. The spraying mechanism 2, drive mechanism 3, speed detector, and pressure detector are all electrically connected to the control mechanism 5. The control mechanism 5 can receive speed data to determine the timing of dripping. The control mechanism 5 can also receive pressure data to adaptively adjust the dripping flow rate of the metering pump at the timing of dripping, and control multiple valves to adjust the opening and closing of each liquid outlet and the degree of opening. It also controls the drive mechanism 3 to drive the spraying mechanism 2 to move along the X-axis, Y-axis, and Z-axis and rotate around the Z-axis to drip according to the preset dripping path. The X-axis, Y-axis, and Z-axis are perpendicular to each other.

[0026] This spin coating experiment uses a multi-dimensional adjustable antisolvent dripping device. The frame 1 is detachably fixed to the side of the spin coater 100. The drive mechanism 3 is located above the spin coater 100 and is detachably fixed to the frame 1, improving the device's adaptability and ease of maintenance. It is compatible with different specifications of spin coaters 100 and substrates 200. The spraying mechanism 2 has multiple evenly distributed nozzles 22, each with a corresponding valve, allowing flexible adjustment of the discharge state of each nozzle. This enables multi-point synchronous dripping of the antisolvent onto the substrate 200 surface, improving coverage uniformity. The metering pump precisely controls the dripping flow rate and, combined with the drive mechanism 3, drives the entire spraying mechanism 2 along... The X, Y, and Z axes allow for movement and rotation around the Z axis, enabling multi-dimensional adjustment of the dripping path of the split nozzle 22, providing strong adaptability. The speed detector of the status monitoring mechanism provides real-time feedback on the speed data of the spin coater 100, and the pressure detector provides real-time feedback on the pressure data of the liquid guide tube. The control mechanism 5 determines the dripping timing based on the speed data and adaptively adjusts the dripping flow rate of the metering pump and the liquid outlet status based on the pressure data, precisely controlling the dripping timing, dripping amount, and uniformity to meet the dripping requirements at different speed stages, reducing defects in perovskite films, improving the stability of film crystallization quality and the reliability of experimental data, and meeting the precise experimental needs of the laboratory.

[0027] The antisolvent addition method of this embodiment is applied to the multi-dimensional adjustable antisolvent addition device used in the spin coating experiment of this embodiment. The antisolvent addition method includes the following steps: Step S100: Move the frame 1 to the side of the spin coater 100, adjust the frame 1 to be horizontal and fix it to the side of the spin coater 100, and place the substrate 200 on the spin coater 100. Step S200: Install the drive mechanism 3 on the frame 1. The control mechanism 5 controls the drive mechanism 3 to drive the spray mechanism 2 to move along the X-axis, Y-axis and Z-axis and rotate around the Z-axis, so that the split nozzle 22 moves to the initial position and maintains a preset gap with the surface of the substrate 200; inject anti-solvent into the guide tube. Step S300: Using the control mechanism 5, with the center of the substrate 200 as the origin, set the spin coating speed stage parameters. In the low-speed spreading stage, the spin coater 100 drives the substrate 200 to rotate at a first preset speed for a first preset time. In the high-speed film formation stage, the spin coater 100 drives the substrate 200 to rotate at a second preset speed for a second preset time. In the low-speed finishing stage, the spin coater 100 drives the substrate 200 to rotate at a third preset speed for a third preset time. Set the dropping timing to a preset delay time after the start of the high-speed film formation stage, and set the preset dropping amount, preset dropping flow rate, and preset dropping path. Step S400: Start the spin coater 100. The speed detector monitors the speed data of the spin coater 100 in real time. The control mechanism 5 determines the timing of the dripping based on the speed data. When the timing of the dripping is reached, it controls multiple valves to open the corresponding liquid outlets to adapt to the dripping coverage requirements of substrates 200 of different sizes. At the same time, it controls the metering pump to start and deliver the anti-solvent into the liquid guide tube according to the preset dripping flow rate. It also controls the drive mechanism 3 to drive the diversion nozzle 22 to move along the preset dripping path for dripping. Step S500: When the amount of liquid added reaches the preset amount, the control mechanism 5 controls the metering pump to stop and controls the drive mechanism 3 to drive the diverter nozzle 22 back to the initial position; the spin coater 100 stops after completing the low-speed finishing stage, and the single experiment ends; the control mechanism 5 automatically stores the experimental parameters, and the same experimental conditions can be reproduced by calling the parameters without resetting.

[0028] In this antisolvent addition method, the frame 1 is first moved to the side of the spin coater 100, leveled, and fixed. The substrate 200 is placed on the spin coater 100, and then the drive mechanism 3 is installed on the frame 1. The control mechanism 5 controls the drive mechanism 3 to drive the spraying mechanism 2 to move and rotate, so that the split nozzle 22 reaches the initial position and maintains a preset gap with the surface of the substrate 200, and the antisolvent is injected into the guide tube. After the control mechanism 5 sets the spin coating three-stage speed parameters, addition timing, addition amount, addition flow rate, and addition path, the spin coater 100 is started. The speed detector monitors the speed in real time. When the addition timing is reached, the control mechanism 5 controls multiple valves to open the corresponding liquid outlets, the metering pump starts to input the antisolvent into the guide tube, and the drive mechanism 3 drives the split nozzle 22 to move and add liquid according to the preset addition path. After the preset addition amount is reached, the metering pump stops, the split nozzle 22 returns to the initial position, the spin coater 100 finishes and stops, and the control mechanism 5 automatically stores the experimental parameters for recall and reproduction. This antisolvent drop-addition method, through the coordinated action of the spraying mechanism 2, the driving mechanism 3, the state monitoring mechanism, and the control mechanism 5, precisely controls the timing, amount, and uniformity of drop-addition, reducing film quality fluctuations; it achieves multi-dimensional precise control, and the drop-addition path can be adaptively adjusted to accommodate different specifications of substrates 200 and spin coaters 100; it realizes the linkage control of drop-addition timing and spin coating speed, adapting to the drop-addition requirements at different speed stages; it improves the stability of perovskite film crystallization quality and the reliability of experimental data, and can automatically store experimental parameters for reproduction, meeting the needs of precise laboratory experiments and data traceability.

[0029] In this embodiment, the preset droplet path is a ring path. Using a ring path for antisolvent dropleting allows the split nozzle 22 to uniformly dispense liquid around the center of the substrate 200. Combined with the rotation of the spin coater 100, the antisolvent is distributed more evenly on the surface of the substrate 200, effectively improving the flatness of the film, reducing local defects, and further improving the crystallization quality and experimental consistency of the perovskite film.

[0030] In other embodiments, the preset droplet path can also be a triangular path. Using a triangular path for antisolvent dropleting can be combined with the rotation of the substrate 200 to form a uniform coverage of multiple regions, making the film crystallization more uniform; meeting different film formation control requirements, improving the flexibility of liquid coverage of the split nozzle 22, and improving experimental applicability.

[0031] In this embodiment, after step S400 and before step S500, the antisolvent dripping method further includes step S401. In step S401, the pressure detector monitors the pressure data of the liquid guide tube in real time, the control mechanism 5 receives the pressure data, and adaptively controls the dripping flow rate of the metering pump according to the pressure data, while adjusting the opening and closing status and opening degree of multiple valves to match the liquid discharge requirements of the corresponding liquid outlet. The pressure data of the liquid guide tube is monitored in real time by a pressure detector. After receiving the pressure data, the control mechanism 5 can adaptively adjust the dripping flow rate of the metering pump to avoid dosage deviation caused by pipeline blockage. At the same time, the opening and closing status and opening degree of multiple valves are adjusted to control the number of opening holes and the liquid output on the diversion nozzle 22. In conjunction with the drive mechanism 3, the spraying mechanism 2 is driven to move along the X-axis, Y-axis and Z-axis and rotate around the Z-axis, flexibly adjusting the dripping path and coverage area. It can accurately adapt to substrates 200 of different sizes and specifications, meet the anti-solvent dripping requirements of spin coating of various substrates 200, and improve the adaptability of the multi-dimensional adjustable anti-solvent dripping device for spin coating experiments and the versatility of the anti-solvent dripping method.

[0032] It is worth noting that the multi-dimensional adjustable antisolvent dripping device used in the spin coating experiment of this embodiment adopts a dual closed-loop control logic of "rotation speed-timing" and "flow rate-dosage". The dripping action is precisely triggered by the real-time rotation speed signal, and the flow rate and total dosage are dynamically adjusted by the pressure feedback, so as to achieve precise control and coordinated matching of the entire dripping process and greatly improve the experimental stability.

[0033] In this embodiment, the control mechanism 5 can be a PLC or a microcontroller controller. The specific type is not limited here, as long as it can receive instructions and coordinate the movement of various components.

[0034] In this embodiment, the multi-dimensional adjustable antisolvent dispensing device for spin coating experiments also includes a clamping mechanism for fixing the frame 1 to the side of the spin coater 100 body. The clamping mechanism can be a magnetic fixing mechanism or a pneumatic gripper mechanism, which can achieve a stable fixation between the frame 1 and the spin coater 100, and can be adapted to spin coater 100 bodies of different widths. Installation and disassembly can be completed without tools, and no specific limitation is made here.

[0035] like Figure 1As shown in this embodiment, the split nozzle 22 has six liquid outlet holes evenly distributed in a ring array along its circumference. The six liquid outlet holes, evenly distributed in a ring array, can uniformly spray the antisolvent onto the surface of the substrate 200. Combined with the rotational motion, they form a uniform coverage, effectively avoiding excessive or insufficient local dripping, improving film formation consistency, reducing film defects, and improving the overall crystallization quality of the perovskite film.

[0036] In some embodiments, the split nozzle 22 has four liquid outlet holes evenly distributed in a rectangular array. The four liquid outlet holes, evenly arranged in a rectangular array, can uniformly spray the antisolvent onto the surface of the substrate 200, making the droplet distribution even. With different motion trajectories, it can flexibly adapt to substrates 200 of various sizes, effectively improving film uniformity, reducing local liquid accumulation and film defects, and ensuring stable film quality.

[0037] In other embodiments, the number of liquid outlet holes evenly distributed in an array on the diversion nozzle 22 can also be eight, ten, twelve, etc., which can achieve uniform coverage of the antisolvent on the surface of the substrate 200, with the coverage area matching the size of the substrate 200, avoiding excessive or insufficient local dripping, and not affecting the crystallization quality of the thin film. The number of liquid outlet holes is not specifically limited here.

[0038] In this embodiment, the split nozzle 22 is an atomizing nozzle. The atomizing nozzle can disperse the antisolvent into fine droplets, forming a uniform thin layer on the surface of the substrate 200, avoiding droplet aggregation that causes local defects, improving the flatness and density of the film, making the film crystallization more uniform, while reducing solvent waste and improving experimental results and material utilization.

[0039] In this embodiment, the valve can be a solenoid valve, a needle valve, or a throttle valve, and no specific limitation is made here.

[0040] In some embodiments, a main flow nozzle 22 and two secondary flow nozzles 22 are installed on the mounting base 21 to adapt to substrates 200 ranging from 8 inches to 12 inches in size. A triangular moving path is set, and the timing of the drop is adjusted according to the solution diffusion rate in different areas of the substrate 200 to avoid insufficient antisolvent due to excessive diffusion at the edges of the large-size substrate 200. This improves the coverage efficiency of the large-size substrate 200 by 2 times and reduces the thickness deviation of the entire area of ​​the substrate 200 from ±5% to ±3%, meeting the fabrication requirements of large-size perovskite devices.

[0041] In this embodiment, the liquid delivery tube is made of silicone. Silicone liquid delivery tubes are soft, flexible, and less prone to clogging, ensuring stable antisolvent delivery. Furthermore, they exhibit good chemical stability, are less likely to react with reagents, are heat-resistant, and easy to clean, effectively improving the safety and lifespan of the multi-dimensional adjustable antisolvent dispensing device used in spin coating experiments.

[0042] In this embodiment, the metering pump can be a syringe pump or a combination of a solenoid valve and a metering tube, which can achieve precise control of the amount of antisolvent used, with the solvent usage error controlled within ±0.01mL. It can also be linked with the control mechanism 5 to start or stop according to a preset sequence, so as to meet the usage requirements of different experiments. The type of metering pump is not specifically limited here.

[0043] Optionally, the speed detector can be a speed sensor or an encoder, without specific limitations. The pressure detector can be a pressure sensor or a hydraulic sensor, without specific limitations.

[0044] In this embodiment, the status monitoring mechanism also includes an alarm, which is electrically connected to the control mechanism 5. The control mechanism 5 can receive pressure data and determine whether the pressure inside the liquid delivery tube is normal. When the pressure inside the liquid delivery tube is abnormal, the alarm is triggered. A pressure detector is installed at the end of the liquid delivery tube to monitor the pressure data of the antisolvent inside the liquid delivery tube in real time. The control mechanism 5 can receive pressure data and is electrically connected to the alarm. It can trigger the alarm in time when there is pressure abnormality such as pipe blockage or leakage. The alarm sounds to remind the operator to maintain it in time, avoid interruption of dripping and poor film formation, ensure stable operation of the dripping process, improve the safety and reliability of the multi-dimensional adjustable antisolvent dripping device for spin coating experiments, and reduce material and time losses caused by abnormalities.

[0045] In this embodiment, the condition monitoring mechanism also includes a flexible coupling. The speed detector is connected to the main shaft of the spin coater 100 via the flexible coupling, and the speed detector is coaxial with the main shaft, so that the speed detector can monitor the speed data of the spin coater 100 in real time. The flexible coupling can buffer coaxial installation errors, allowing the speed detector to be smoothly coaxially connected with the main shaft of the spin coater 100, avoiding vibration and eccentric interference, ensuring accurate and stable speed data acquisition, providing reliable parameters for closed-loop control, improving the coordination accuracy of dripping and spin coating, and ensuring stable film quality.

[0046] In this embodiment, the status monitoring mechanism also includes a touch screen display 41, which is electrically connected to the control mechanism 5. The control mechanism 5 can dynamically display the rotation speed-time curve of the spin coater 100, the dripping volume-time curve of the metering pump, and the pressure-time curve of the liquid guide tube through the touch screen display 41. The touch screen display 41 can display multiple key operating curves in real time, making it easy for operators to quickly grasp the working status, promptly detect abnormal fluctuations, realize full-process visual monitoring, improve the accuracy of experimental control, ensure stable matching of spin coating and dripping parameters, and improve film quality and experimental efficiency.

[0047] In this embodiment, the status monitoring mechanism also includes an infrared monitor, which is electrically connected to the control mechanism 5. The infrared monitor is used to acquire temperature images of the substrate 200 surface in real time. The control mechanism 5 can receive the temperature images and identify abnormal temperature areas based on the temperature images. After determining the coordinates of the abnormal areas, the control mechanism 5 drives the split nozzle 22 to move along the X-axis and Y-axis and rotate around the Z-axis to the abnormal area, and adds an additional 0.01mL-0.02mL of antisolvent. At the same time, the moving speed of the split nozzle 22 to the abnormal area is adjusted. The dropping position and amount are adjusted according to the temperature distribution of the film surface to ensure that the antisolvent works fully, and the uniformity of the film surface temperature is improved by 40%. The adaptive ability to the fluctuation of the precursor solution concentration is enhanced, and the experimental success rate is increased from 80% to 95%, without the need for pre-calibration of the solution concentration.

[0048] like Figure 1 As shown, the drive mechanism 3 includes an X-axis drive assembly 31, a Y-axis drive assembly 32, a Z-axis drive assembly 33, and a rotary drive assembly 34. The X-axis drive assembly 31 is detachably and fixedly connected to the frame 1. The Y-axis drive assembly 32 is mounted on the output end of the X-axis drive assembly 31, and the X-axis drive assembly 31 can drive the Y-axis drive assembly 32 to move along the X-axis direction. The Z-axis drive assembly 33 is mounted on the output end of the Y-axis drive assembly 32, and the Y-axis drive assembly 32 can drive the Z-axis drive assembly 33 to move along the Y-axis direction. The rotary drive assembly 34 is mounted on the output end of the Z-axis drive assembly 33, and the Z-axis drive assembly 33 can drive the rotary drive assembly 34 to move along the Z-axis direction. The mounting base 21 is mounted on the output end of the rotary drive assembly 34, and the rotary drive assembly 34 can drive the spraying mechanism 2 to rotate around the Z-axis. By moving along the X, Y, and Z axes and rotating around the Z axis, the spray mechanism 2 achieves precise positioning and flexible adjustment of the split nozzle 22, which can adapt to substrates 200 of different specifications and complex droplet trajectories, improve the uniformity of spray coverage, make the film formation more uniform and stable, and meet the needs of various experimental processes, thus broadening the application range of the multi-dimensional adjustable anti-solvent droplet device for spin coating experiments.

[0049] like Figure 1As shown, the X-axis drive assembly 31 includes a first slide rail, a first slider, and a first cylinder. The first slide rail extends along the X-axis and is detachably and fixedly connected to the frame 1. The first slider slides in cooperation with the first slide rail. The Y-axis drive assembly 32 is mounted on the first slider. The piston rod of the first cylinder is connected to the first slider. The first cylinder can drive its piston rod to reciprocate, causing the first slider, the Y-axis drive assembly 32, the Z-axis drive assembly 33, and the rotary drive assembly 34 to move synchronously along the X-axis, thereby driving the entire spraying mechanism 2 to move synchronously along the X-axis to the preset dripping position. The X-axis drive assembly 31 uses a slide rail, slider, and cylinder drive, which has high guiding accuracy and good motion rigidity. It can drive the spraying mechanism 2 to move smoothly back and forth along the X-axis, with accurate positioning and rapid response. It provides a reliable displacement basis for multi-axis linkage, ensures precise and controllable dripping position, and improves the overall spraying uniformity and process stability.

[0050] like Figure 1 As shown, the Y-axis drive assembly 32 includes a second slide rail, a second slider, and a second cylinder. The second slide rail extends along the Y-axis and is fixed to the first slider. The second slider slides in slidable engagement with the second slide rail. The Z-axis drive assembly 33 is mounted on the second slider. The piston rod of the second cylinder is connected to the second slider. The second cylinder can drive its piston rod to reciprocate, causing the second slider, the Z-axis drive assembly 33, and the rotary drive assembly 34 to move synchronously along the Y-axis, thereby driving the entire spraying mechanism 2 to move synchronously along the Y-axis to the preset dripping position. The Y-axis drive assembly 32 uses a slide rail, slider, and cylinder drive, which has high guiding accuracy and good motion rigidity. It can drive the spraying mechanism 2 to move smoothly back and forth along the Y-axis, with accurate positioning and rapid response. It forms a planar linkage with the X-axis adjustment, ensuring precise and controllable dripping position and improving the uniformity of antisolvent coverage and the stability of the experimental process.

[0051] like Figure 1 As shown, the Z-axis drive assembly 33 includes a third slide rail, a third slider, and a third cylinder. The third slide rail extends along the Z-axis and is fixed to the second slider. The third slider slides in slidable engagement with the third slide rail, and the rotary drive assembly 34 is mounted on the third slider. The piston rod of the third cylinder is connected to the third slider, and the third cylinder can drive its piston rod to reciprocate, causing the third slider and the rotary drive assembly 34 to move synchronously along the Z-axis, thereby driving the entire spraying mechanism 2 to move synchronously along the Z-axis to the preset dripping position. The Z-axis drive assembly 33 uses a slide rail, slider, and cylinder drive, which has high guiding accuracy and good motion rigidity. It can drive the spraying mechanism 2 to reciprocate stably along the Z-axis, accurately adjust the distance between the diversion nozzle 22 and the substrate 200, ensure appropriate dripping height, improve film uniformity, achieve three-dimensional precise positioning, and make the antisolvent dripping process more stable and reliable.

[0052] In some embodiments, the X-axis drive assembly 31, Y-axis drive assembly 32, and Z-axis drive assembly 33 can all be electrically driven. The X-axis drive assembly 31 includes a first motor, a first lead screw, a first slide rail, and a first slider. The output end of the first motor is driven by the first lead screw, and the first lead screw is threaded through the first slider. The first slider is slidably engaged with the first slide rail. The first motor drives the first lead screw to rotate, causing the first slider to reciprocate along the X-axis. The Y-axis drive assembly 32 is mounted on the first slider and moves synchronously with it. The Y-axis drive assembly 32 includes a second motor, a second lead screw, a second slide rail, and a second slider. The output end of the second motor is driven by the second lead screw, and the second lead screw is threaded through the second slider. The second slider is slidably engaged with the second slide rail. The second motor drives the second lead screw to rotate, causing the second slider to reciprocate along the Y-axis. The Z-axis drive assembly 33 is mounted on the second slider and moves synchronously with it. Z-axis drive assembly 33 includes a third motor, a third lead screw, a third slide rail, and a third slider. The output end of the third motor is connected to the third lead screw for transmission. The third lead screw is threaded through the third slider, and the third slider is in sliding engagement with the third slide rail. The third motor drives the third lead screw to rotate, causing the third slider to reciprocate along the Z-axis. Rotation drive assembly 34 is mounted on the third slider and moves synchronously with it.

[0053] In other embodiments, the X-axis driving component 31, the Y-axis driving component 32, and the Z-axis driving component 33 can also be manually driven and finely adjusted to ensure that the antisolvent dripping path can be adapted to the size of the substrate 200 and the spin coating centrifugation law, and the three-dimensional positioning error is controlled within ±0.02mm to meet the uniform coverage requirement. The driving method is not specifically limited here.

[0054] like Figure 1 As shown, the rotary drive assembly 34 includes a drive motor 341 and a rotating shaft 342. The drive motor 341 is fixed to the third slider, and the rotating shaft 342 extends along the Z-axis. One end of the rotating shaft 342 is connected to the output end of the drive motor 341, and the other end is connected to the mounting base 21. The drive motor 341 can drive the rotating shaft 342 to rotate around the Z-axis, thereby causing the spraying mechanism 2 to rotate around the Z-axis, so that the splitting nozzle 22 moves to the preset dripping position according to the preset dripping trajectory. The rotary drive assembly 34 uses the rotating shaft 342 in conjunction with the drive motor 341 to drive the spraying mechanism 2 to rotate flexibly around the Z-axis, realizing precise control of the trajectory of the splitting nozzle 22. Combined with the three-axis linear motion, it forms a multi-dimensional composite adjustment, making the dripping position and coverage area more flexible and precise, significantly improving the film uniformity and experimental adaptability.

[0055] In this embodiment, a connector is provided on the first slide rail, and a corresponding connector base is provided on the frame 1. The connector and the connector base are plugged into each other to achieve a detachable and fixed connection between the drive mechanism 3 and the frame 1. The plugging and mating of the connector and the connector base enables quick assembly and disassembly of the drive mechanism 3 and the frame 1. The assembly positioning accuracy is high, the connection is reliable, and the assembly can be firmly assembled without additional fasteners. This facilitates later maintenance, replacement, and debugging, effectively improving assembly efficiency and reducing the difficulty of equipment operation and maintenance.

[0056] In other embodiments, a connector is provided on the first slide rail, and a corresponding connector is provided on the frame 1. The connector and the connector are plugged into each other to achieve a detachable and fixed connection between the drive mechanism 3 and the frame 1. The plugging and mating of the connector and the connector enables quick assembly and disassembly of the drive mechanism 3 and the frame 1. The assembly positioning accuracy is high, the connection is reliable, and the assembly can be firmly assembled without additional fasteners. This facilitates later maintenance, replacement, and debugging, effectively improving assembly efficiency and reducing the difficulty of equipment operation and maintenance.

[0057] In this embodiment, the multi-dimensional adjustable antisolvent dispensing device for spin coating experiments also includes a movable support mechanism. The movable support mechanism includes multiple casters, which are evenly distributed on the lower side of the frame 1 to support the frame 1 and enable the frame 1 to be moved and repositioned. The casters evenly arranged under the frame 1 can not only stably and reliably support the frame 1, but also conveniently move the frame 1, optimizing the device's usability and adaptability to different scenarios.

[0058] In this embodiment, all the electric components in the multi-dimensional adjustable antisolvent dripping device for spin coating experiments are powered by a unified 24V DC safe power supply. This power supply method has stable voltage, strong anti-interference ability, and complies with the laboratory low-voltage safety use specifications. It can effectively avoid the safety hazards caused by high voltage, while ensuring the consistency of operation of each electrical control component.

[0059] Taking the spin-coating of perovskite thin films onto a 4-inch indium tin oxide (ITO) glass substrate as an example, the specific workflow is as follows: (1) Move the frame 1 to the side of the spin coater 100, adjust the frame 1 to a horizontal state, and fix it to the side of the spin coater 100 body by clamping mechanism, and place the substrate 200 on the spin coater 100. (2) The drive mechanism 3 is installed on the frame 1 by interlocking the connector and the socket. The control mechanism 5 controls the drive mechanism 3 to drive the spray mechanism 2 to move along the X-axis, Y-axis and Z-axis and rotate around the Z-axis, so that the split nozzle 22 moves to the initial position and is 50mm away from the surface of the substrate 200. (3) Connect the speed detector to the spin coater 100 main shaft through a flexible coupling to ensure that the speed detector is coaxial with the main shaft, and inject chlorobenzene into the silicone guide tube; (4) Select the 4-inch substrate mode on the touch screen 41, with the center of substrate 200 as the origin, and set the spin coating speed stage parameters. In the low-speed spreading stage, the spin coater 100 drives the substrate 200 to rotate at a speed of 1000 revolutions per minute for 2 seconds; in the high-speed film formation stage, the spin coater 100 drives the substrate 200 to rotate at a speed of 3000 revolutions per minute for 30 seconds; in the low-speed finishing stage, the spin coater 100 drives the substrate 200 to rotate at a speed of 500 revolutions per minute for 5 seconds. (5) Set the antisolvent dropping parameters on the touch screen 41. The dropping time is 1 second after the high-speed film formation stage starts, the dropping volume is 0.08 mL, and the dropping flow rate is 0.24 mL / min. (6) Start the spin coater 100. The speed detector monitors the speed data of the spin coater 100 in real time. The control mechanism 5 determines the timing of the drop addition based on the speed data. When the high-speed film formation stage is reached, the six valves are opened 1 second after the start of the drop addition. Correspondingly, all six liquid outlet holes are opened to meet the drop addition coverage requirements of the 4-inch substrate 200. The metering pump is started to deliver chlorobenzene into the liquid guide tube at a flow rate of 0.24 mL / min. The drive mechanism 3 is controlled to drive the diversion nozzle 22 to move along the X-axis and Y-axis and rotate around the Z-axis to drop the material according to the preset circular path. (7) The pressure detector monitors the pressure of the liquid guide tube in real time. The control mechanism 5 receives the pressure data and adaptively controls the dripping flow of the metering pump according to the pressure data. At the same time, it adjusts the opening of multiple valves to match the liquid discharge requirements of the corresponding liquid outlet. The touch screen 41 dynamically displays the rotation speed-time curve of the spin coater 100, the dripping amount-time curve of the metering pump, and the pressure-time curve of the liquid guide tube. (8) When the amount of liquid added reaches 0.08 mL, the control mechanism 5 controls the metering pump to stop and controls the drive mechanism 3 to drive the split nozzle 22 back to the initial position; the spin coater 100 stops after completing the low-speed finishing stage, and the single experiment ends. (9) The control mechanism 5 automatically stores the experimental parameters. The same experimental conditions can be reproduced with one click through the parameter call function of the touch screen 41 without resetting.

[0060] In summary, the multi-dimensional adjustable antisolvent dispensing device and method used in this embodiment for spin coating experiments can improve the uniformity and quality of the film. Through the split nozzle 22 and dynamic path control, the antisolvent achieves full coverage of the substrate 200. The film grain size deviation can be controlled within ±100nm, the thickness deviation ≤5nm, and the number of pinhole defects per unit area is controlled to no more than 0.5 per square centimeter, corresponding to a maximum of one defect every two square centimeters on average. Control precision is improved by achieving a linkage response between the dispensing timing and the spin coating speed, with a linkage response delay ≤0.1 seconds. The dispensing volume error controlled by the metering pump is ≤0.005mL, and can be dynamically adjusted according to different stages of spin coating. The device's adaptability and ease of operation are enhanced. The detachable design of the universal frame 1 is compatible with various models of spin coaters 100 and adapts to substrates 200 from 2 inches to 8 inches, without the need for reprocessing or replacement of core components. Optimizes ease of operation and repeatability, fully automated control, no need for manual intervention in the timing and path of dripping, eliminates human error, reduces experimental data deviation from ±8% to ±3%, supports storage of 100 sets of parameters, improves the consistency of film performance of different batches under the same experimental conditions by 70%, and significantly reduces the number of invalid experiments.

[0061] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A multi-dimensional adjustable antisolvent dispensing device for spin coating experiments, characterized in that, include: The frame (1) is detachably fixed to the side of the spin coater (100) body. The spin coater (100) can hold the substrate (200) and drive the substrate (200) to rotate around the Z-axis. The spraying mechanism (2) includes a mounting base (21), a diversion nozzle (22), a liquid guide tube, a diversion structure, a metering pump, and multiple valves. The diversion nozzle (22) is mounted on the mounting base (21). The diversion nozzle (22) is provided with multiple liquid outlet holes evenly distributed. One end of the liquid guide tube is connected to the multiple liquid outlet holes through the diversion structure, and the other end is connected to the outlet of the metering pump. The metering pump is configured to deliver the antisolvent into the liquid guide tube according to a preset dripping flow rate. Each liquid outlet hole has a corresponding valve in its flow path. The valve is configured to adjust the opening and closing of the liquid outlet hole and its opening degree. The drive mechanism (3) is located above the spin coater (100) and is detachably and fixedly connected to the frame (1). The mounting base (21) is assembled at the output end of the drive mechanism (3). The condition monitoring mechanism includes a speed detector and a pressure detector, wherein the speed detector is configured to monitor the speed data of the spin coater (100) in real time; The pressure detector is configured to monitor the pressure data of the liquid guide tube in real time. The control mechanism (5) is electrically connected to the spray mechanism (2), the drive mechanism (3), the speed detector, and the pressure detector. The control mechanism (5) can receive the speed data and determine the timing of dripping. The control mechanism (5) can receive the pressure data and adjust the dripping flow rate of the metering pump accordingly at the timing of dripping. It also controls the valves to adjust the opening and closing of each outlet hole and the degree of opening. The drive mechanism (3) drives the spray mechanism (2) to move along the X-axis, Y-axis, and Z-axis and rotate around the Z-axis to drip along a preset dripping path. The X-axis, Y-axis, and Z-axis are perpendicular to each other.

2. The multi-dimensional adjustable antisolvent dispensing device for spin coating experiments according to claim 1, characterized in that, The status monitoring mechanism also includes an alarm, which is electrically connected to the control mechanism (5); the control mechanism (5) can receive the pressure data and determine whether the pressure in the liquid guide tube is normal, and trigger the alarm when the pressure in the liquid guide tube is abnormal.

3. The multi-dimensional adjustable antisolvent dispensing device for spin coating experiments according to claim 1, characterized in that, The condition monitoring mechanism also includes a flexible coupling. The speed detector is connected to the main shaft of the spin coater (100) through the flexible coupling, and the speed detector is coaxial with the main shaft so that the speed detector can monitor the speed data of the spin coater (100) in real time.

4. The multi-dimensional adjustable antisolvent dispensing device for spin coating experiments according to claim 1, characterized in that, The status monitoring mechanism also includes a touch screen (41), which is electrically connected to the control mechanism (5). The control mechanism (5) can dynamically display the rotation speed-time curve of the spin coater (100), the dripping amount-time curve of the metering pump, and the pressure-time curve of the liquid guide tube through the touch screen (41).

5. The multi-dimensional adjustable antisolvent dispensing device for spin coating experiments according to claim 1, characterized in that, The drive mechanism (3) includes: X-axis drive assembly (31), which is detachably and fixedly connected to the frame (1); Y-axis drive assembly (32), which is mounted on the output end of X-axis drive assembly (31), and X-axis drive assembly (31) can drive Y-axis drive assembly (32) to move along the X-axis direction; Z-axis drive assembly (33), which is mounted on the output end of Y-axis drive assembly (32), and Y-axis drive assembly (32) can drive Z-axis drive assembly (33) to move along the Y-axis direction; A rotary drive assembly (34) is mounted on the output end of the Z-axis drive assembly (33), and the Z-axis drive assembly (33) can drive the rotary drive assembly (34) to move along the Z-axis direction; the mounting base (21) is mounted on the output end of the rotary drive assembly (34), and the rotary drive assembly (34) can drive the liquid spraying mechanism (2) to rotate around the Z-axis.

6. The multi-dimensional adjustable antisolvent dispensing device for spin coating experiments according to claim 5, characterized in that, The X-axis drive component (31) includes: The first slide rail extends along the X-axis and is detachably and fixedly connected to the frame (1); The first slider slides in cooperation with the first slide rail, and the Y-axis drive assembly (32) is mounted on the first slider; The first cylinder has a piston rod connected to the first slider. The first cylinder can drive its piston rod to reciprocate, causing the first slider, the Y-axis drive assembly (32), the Z-axis drive assembly (33), and the rotation drive assembly (34) to move synchronously along the X-axis, thereby driving the spraying mechanism (2) to move synchronously along the X-axis to the preset dripping position.

7. The multi-dimensional adjustable antisolvent dispensing device for spin coating experiments according to claim 6, characterized in that, The first slide rail is provided with a connector, and the frame (1) is provided with a corresponding connector seat. The connector and the connector seat are plugged into each other to achieve a detachable and fixed connection between the drive mechanism (3) and the frame (1); or, The first slide rail is provided with a plug seat, and the frame (1) is provided with a corresponding plug connector. The plug connector and the plug seat are plugged into each other to realize the detachable fixed connection between the drive mechanism (3) and the frame (1).

8. The multi-dimensional adjustable antisolvent dispensing device for spin coating experiments according to any one of claims 1-7, characterized in that, The multi-dimensional adjustable antisolvent dripping device for spin coating experiments also includes a movable support mechanism, which includes multiple casters. The multiple casters are evenly distributed on the lower side of the frame (1) to support the frame (1) and realize the movement and repositioning of the frame (1).

9. An antisolvent dropping method, applied to the multi-dimensional adjustable antisolvent dropping apparatus for spin coating experiments as described in any one of claims 1-8, characterized in that, The antisolvent addition method includes the following steps: Step S100: Move the frame (1) to the side of the spin coater (100), adjust the frame (1) to a horizontal state and fix it to the side of the spin coater (100), and place the substrate (200) on the spin coater (100); Step S200: Install the drive mechanism (3) on the frame (1), and the control mechanism (5) controls the drive mechanism (3) to drive the spray mechanism (2) to move along the X-axis, the Y-axis, and the Z-axis and rotate around the Z-axis, so that the split nozzle (22) moves to the initial position and maintains a preset gap with the surface of the substrate (200); inject anti-solvent into the liquid guide tube; Step S300: The control mechanism (5) sets the spin coating speed stage parameters with the center of the substrate (200) as the origin. In the low-speed spreading stage, the spin coater (100) drives the substrate (200) to rotate at the first preset speed for the first preset time. During the high-speed film formation stage, the spin coater (100) drives the substrate (200) to rotate at a second preset speed for a second preset time; During the low-speed finishing stage, the spin coater (100) drives the substrate (200) to rotate at a third preset speed for a third preset time; Set the dropping timing to a preset delay time after the start of the high-speed film formation stage, and set the preset dropping amount, preset dropping flow rate, and preset dropping path; Step S400: Start the spin coater (100), the speed detector monitors the speed data of the spin coater (100) in real time, the control mechanism (5) determines the timing of the dripping according to the speed data, when the timing of the dripping is reached, controls multiple valves to open the corresponding liquid outlet holes to adapt to the dripping coverage requirements of substrates (200) of different sizes; at the same time, controls the metering pump to start and deliver antisolvent into the liquid guide tube according to the preset dripping flow rate; and controls the drive mechanism (3) to drive the diversion nozzle (22) to move according to the preset dripping path for dripping; Step S500: When the amount of dripping reaches the preset amount of dripping, the control mechanism (5) controls the metering pump to stop and controls the drive mechanism (3) to drive the diverter nozzle (22) back to the initial position; the spin coater (100) stops after completing the low-speed finishing stage, and the single experiment ends; the control mechanism (5) automatically stores the experimental parameters, and the same experimental conditions can be reproduced by calling the parameters without resetting.

10. The antisolvent addition method according to claim 9, characterized in that, After step S400 and before step S500, the antisolvent dripping method further includes step S401. In step S401, the pressure detector monitors the pressure data of the liquid guide tube in real time, the control mechanism (5) receives the pressure data, and adaptively controls the dripping flow rate of the metering pump according to the pressure data, while adjusting the opening and closing status and opening degree of multiple valves to match the liquid discharge requirements of the corresponding liquid outlet.

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