A deposition furnace subzone independent heating power compensation control system, method and readable storage medium

Abstract

The application discloses a deposition furnace partition independent heating power compensation control system and method and a readable storage medium, belongs to the deposition furnace temperature control field, and solves the problems of unstable heating and slow temperature rising speed of an existing deposition furnace heating system; in order to solve the technical problem, the technical scheme is that the system comprises a furnace body, two heating structures are independently arranged in the furnace body, one heating power output module is electrically connected to each of the two heating structures, the two heating structures correspond to two heating zones distributed along the axial direction of the furnace body, respectively, temperature acquisition units are arranged in the two heating zones, respectively, the two temperature acquisition units and the two heating power output modules are electrically connected to a controller, the controller is used for judging based on a preset logic and a preset power compensation logic module, and the output heating power of the heating power output module is dynamically adjusted; the application is applied to the deposition furnace.

Description

Technical Field

[0001] This invention relates to the field of deposition furnace temperature control technology, specifically to a zoned independent heating power compensation control system, method, and readable storage medium for a deposition furnace. Background Technology

[0002] In practical industrial applications, the second heating zone of a deposition furnace suffers from significant heat loss and thermal inertia due to the characteristics of its equipment structure and process layout. First, the second heating zone is usually equipped with insulation structures such as insulation cotton. Its thermal conductivity characteristics result in the lower zone having a much greater thermal inertia than the first heating zone, and the heating response rate is significantly lagging behind. Second, the bottom air intake structure of the deposition furnace continuously carries away heat from the second heating zone during the process, causing the heat loss rate in the lower zone to be much faster than that in the first heating zone. In existing technologies, when using fixed power heating in power or power-temperature mode, there is no differentiated power control based on the structural and thermal characteristics differences of the upper second heating zone. This directly results in the heating rate of the second heating zone being much slower than that of the first heating zone, creating a significant and continuous temperature difference between the two zones of the deposition furnace.

[0003] Regarding power regulation and compensation in chemical vapor deposition (CVD) equipment, existing Chinese patent (CN111270224B) discloses some power compensation schemes, such as time-based power compensation for radio frequency signals and fuzzy control combined with PID power regulation for furnace temperature. However, these schemes are mostly general-purpose power compensation strategies, designed only for general issues such as plasma transient stability and overall furnace heating rate. They do not consider the special thermal conditions in the lower zone of the deposition furnace caused by insulation and bottom air intake, and cannot specifically solve the temperature difference problem caused by differences in thermal inertia and heat loss in the independent heating mode of the deposition furnace zones. To date, there is no power compensation scheme adapted to the special thermal characteristics of the deposition furnace zones in the existing technology, and there is a lack of effective technical means to specifically solve the problem of excessive temperature difference between deposition furnace zones and ensure temperature consistency in zones under a given power heating mode.

[0004] Therefore, there is an urgent need to develop a dedicated power compensation scheme for the independent heating of the deposition furnace zones, in order to solve the problem of excessive temperature difference between zones caused by the large thermal inertia and rapid heat loss in the lower zone under fixed power heating, to ensure temperature consistency during the zone heating stage, to avoid excessive power deviation during the subsequent isothermal stage, to maintain furnace temperature stability, and to meet the stringent requirements of precision deposition processes. This has become a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0005] To address the technical problems of unstable heating and slow temperature rise in existing deposition furnace heating systems, this invention proposes a zoned independent heating power compensation control system, method, and readable storage medium for deposition furnaces.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: a zoned independent heating power compensation control system for a deposition furnace, including a furnace body, a first heating structure and a second heating structure are provided in the furnace body, the first heating structure is electrically connected to a first heating power output module, and the second heating structure is electrically connected to a second heating power output module. The first heating structure corresponds to the first heating zone arranged along the axial direction of the furnace body, and the second heating structure corresponds to the second heating zone arranged along the axial direction of the furnace body. The first heating zone and the second heating zone are interconnected, and the air inlet on the furnace body is located in the second heating zone. The first heating zone is equipped with a first temperature acquisition unit, and the second heating zone is equipped with a second temperature acquisition unit. The first temperature acquisition unit, the second temperature acquisition unit, the first heating power output module, and the second heating power output module are all electrically connected to the controller. The controller is configured as follows: The logic determines whether the temperature data collected by the first and second temperature acquisition units in real time both reach the preset temperature threshold. If either the temperature data collected by the first and second temperature acquisition units fails to reach the preset temperature threshold, the logic controls the first and second heating power output modules to output heating power according to their corresponding first given heating power. When the temperature data collected by both the first and second temperature acquisition units reach the preset temperature threshold, the system enters the constant temperature stage. The signal that the temperature data collected by both the first and second temperature acquisition units have reached the preset temperature threshold is input to the preset power compensation logic module, which dynamically adjusts the output heating power of the second heating power output module.

[0007] Furthermore, the first given heating power of both the first heating power output module and the second heating power output module is 30% to 45% of the preset initial given heating power.

[0008] Furthermore, the power compensation logic module is configured as follows: It receives temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit in real time, and logically determines the real-time temperature difference between the temperature data collected by the first temperature acquisition unit and the temperature data collected by the second temperature acquisition unit. When the real-time temperature difference is less than the preset critical temperature difference threshold, the output heating power of the second heating power output module is controlled to be the sum of the first given heating power and the real-time temperature difference. The summation operation is a purely numerical operation and does not involve dimensional calculations. The unit of the first given heating power of the second heating power output module is the same as the unit of the output heating power of the second heating power output module. The output heating power of the first heating power output module is its first given heating power. When the real-time temperature difference is not less than the preset critical temperature difference threshold, the output heating power of the second heating power output module is controlled to be 50% to 80% of its first given heating power value; the output heating power of the first heating power output module is its first given heating power.

[0009] Furthermore, both the first heating structure and the second heating structure are hollow columnar structures with openwork.

[0010] Furthermore, the preset temperature threshold is 300-800℃.

[0011] Furthermore, the preset critical temperature difference threshold is 5–20℃.

[0012] A method for independent heating power compensation control of a deposition furnace zone, employing the aforementioned independent heating power compensation control system for a deposition furnace zone, includes the following steps: Step S1: Start the first heating power output module and the second heating power output module of the deposition furnace to enter the heating stage; Step S2: The first temperature acquisition unit and the second temperature acquisition unit acquire the temperature data of their corresponding heating zones in real time and input them to the controller; Step S3: The controller logic determines whether the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit in real time both reach the preset temperature threshold. When one of the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit fails to reach the preset temperature threshold, the controller controls the first heating power output module and the second heating power output module to output heating power according to their corresponding first given heating power. When the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit both reach the preset temperature threshold, the controller enters the constant temperature stage and inputs the signal that the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit both reach the preset temperature threshold to the preset power compensation logic module. Step S4: The power compensation logic module dynamically adjusts the output heating power of the second heating power output module based on its preset compensation logic; Step S5: Repeat steps S4 to S5 until the heating process of the deposition furnace is completed.

[0013] A readable storage medium storing a computer program that, when executed by a processor, implements the steps of the method described above.

[0014] The advantages of this invention over the prior art are as follows: 1. The system of the present invention divides the heating zone inside the furnace into a first heating zone and a second heating zone. The first heating structure corresponds to the first heating zone, and the second heating structure corresponds to the second heating zone. Both the first heating structure and the second heating structure are electrically connected to a heating power output module, which can realize independent zone heating. Through the collaboration of the first temperature acquisition unit, the second temperature acquisition unit, the first heating power output module, the second heating power output module and the controller, synchronous heating is achieved, and the output heating power of the second heating power output module is dynamically adjusted, that is, the temperature of the first heating zone and the second heating zone is dynamically adjusted. This avoids the process hazards caused by excessive temperature difference between the first heating zone and the second heating zone, ensures uniform and stable temperature inside the furnace, and meets the temperature control requirements of precision processes such as chemical vapor deposition.

[0015] 2. The first heating zone and the second heating zone of the system of the present invention are interconnected, and the air inlet on the furnace body is located in the second heating zone. Through the power compensation logic module of the system of the present invention, the slow heating problem caused by the insulation cotton and air intake heat dissipation in the second heating zone of the furnace body can be specifically compensated, and the temperature difference between the first heating zone and the second heating zone of the furnace body can be controlled within a reasonable range, effectively avoiding process risks caused by excessive temperature difference between the first heating zone and the second heating zone. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the system structure of the present invention; Figure 2 This is a flowchart of an embodiment of the method of the present invention. Detailed Implementation

[0017] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate relative orientations or positional relationships and are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0018] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0019] like Figures 1 to 2 As shown, this invention provides a zoned independent heating power compensation control system for a deposition furnace, including a furnace body. A first heating structure and a second heating structure are fixedly assembled inside the furnace body. The first heating structure is electrically connected to a first heating power output module, and the second heating structure is electrically connected to a second heating power output module. Both the first and second heating structures are hollow columnar structures with openwork. The heating zone inside the furnace body is divided into a first heating zone and a second heating zone along the axial direction of the furnace body. The first heating structure corresponds to the first heating zone distributed along the axial direction of the furnace body, and the second heating structure corresponds to the second heating zone distributed along the axial direction of the furnace body. The first heating zone and the second heating zone are interconnected and continuous without interruption. The air inlet on the furnace body is located in the second heating zone. The first heating structure and the second heating structure are connected end to end and cover the first heating zone and the second heating zone inside the furnace body.

[0020] The first heating zone is fixedly equipped with a first temperature acquisition unit, and the second heating zone is fixedly equipped with a second temperature acquisition unit. Both the first and second temperature acquisition units use thermocouples.

[0021] The first temperature acquisition unit, the second temperature acquisition unit, the first heating power output module, and the second heating power output module are all electrically connected to the controller, which is configured as follows: The logic determines whether the temperature data collected by the first and second temperature acquisition units in real time both reach the preset temperature threshold. If either the temperature data collected by the first and second temperature acquisition units fails to reach the preset temperature threshold, the logic controls the first and second heating power output modules to output heating power according to their corresponding first given heating power. When the temperature data collected by both the first and second temperature acquisition units reach the preset temperature threshold, the system enters the constant temperature stage. The signal that the temperature data collected by both the first and second temperature acquisition units have reached the preset temperature threshold is input to the preset power compensation logic module, which dynamically adjusts the output heating power of the second heating power output module.

[0022] Specifically, the first given heating power of both the first heating power output module and the second heating power output module is 30% to 45% of the preset initial given heating power. The first given heating power can be flexibly adjusted according to the deposition process requirements. Preferably, the first given heating power of both the first heating power output module and the second heating power output module is 30% of the preset initial given heating power, which is suitable for chemical vapor deposition.

[0023] In one embodiment, the power compensation logic module is configured as follows: It receives temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit in real time, and logically determines the real-time temperature difference between the temperature data collected by the first temperature acquisition unit and the temperature data collected by the second temperature acquisition unit. When the real-time temperature difference is less than the preset critical temperature difference threshold, the output heating power of the second heating power output module is controlled to be the sum of the first given heating power and the real-time temperature difference. The sum operation is only a pure numerical operation and does not involve dimensional operations. The unit of the first given heating power of the second heating power output module is the same as the unit of the output heating power of the second heating power output module. The output heating power of the first heating power output module is its first given heating power.

[0024] When the real-time temperature difference is not less than the preset critical temperature difference threshold, the output heating power of the second heating power output module is controlled to be 50% to 80% of its first given heating power value; the output heating power of the first heating power output module is its first given heating power.

[0025] The upper limit of the output heating power of the second heating power output module is 80% of the first given heating power value. This can effectively prevent local overheating caused by excessive second power. It not only makes up for the slow heating of the second heating zone, but also avoids the wear and tear on the heating elements caused by excessive power, thus extending the service life of the equipment. At the same time, it ensures the stringent requirements of temperature consistency in the deposition process and improves the quality of the deposited products.

[0026] Specifically, the preset temperature threshold is 300-800℃, which can be flexibly adjusted according to the actual deposition process requirements. In this embodiment, the preset temperature threshold is preferably 300℃, which is suitable for chemical vapor deposition.

[0027] Specifically, the preset critical temperature difference threshold is 5 to 20°C, which can be flexibly adjusted according to the actual deposition process requirements. In this embodiment, the preset critical temperature difference threshold is preferably 10°C, which is suitable for chemical vapor deposition.

[0028] In this embodiment, the first heating zone is located in the upper region of the furnace body, and the second heating zone is located in the lower region of the furnace body. The upper and lower regions are continuous and interconnected. Through the logic control of the system of the present invention, the slow heating problem caused by the insulation cotton and bottom air intake heat dissipation in the lower region of the furnace body can be specifically compensated, and the temperature difference between the upper and lower regions of the furnace body can be controlled within a reasonable range, effectively avoiding process risks caused by excessive temperature difference between the upper and lower regions. By dynamically adjusting the output heating power of the second heating power output module, the output heating power deviation between the corresponding heating structures in the upper and lower regions during the subsequent constant temperature stage can be suppressed, ensuring uniform and stable temperature in the furnace body and meeting the temperature control requirements of precision processes such as chemical vapor deposition.

[0029] The present invention provides a method for independent heating power compensation control of a deposition furnace zone, which employs the aforementioned independent heating power compensation control system for a deposition furnace zone, and includes the following steps: Step S1: Start the first heating power output module and the second heating power output module of the deposition furnace to enter the heating stage; Step S2: The first temperature acquisition unit and the second temperature acquisition unit acquire the temperature data of their corresponding heating zones in real time and input them to the controller; Step S3: The controller logic determines whether the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit in real time both reach the preset temperature threshold. When one of the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit fails to reach the preset temperature threshold, the controller controls the first heating power output module and the second heating power output module to output heating power according to their corresponding first given heating power. When the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit both reach the preset temperature threshold, the controller enters the constant temperature stage and inputs the signal that the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit both reach the preset temperature threshold to the preset power compensation logic module. Step S4: The power compensation logic module dynamically adjusts the output heating power of the second heating power output module based on its preset compensation logic; Step S5: Repeat steps S4-S5 until the heating process of the deposition furnace is completed.

[0030] The present invention provides a readable storage medium storing a computer program, which, when executed by a processor, implements the steps of the method described above.

[0031] Regarding the specific structure of this invention, it should be noted that the connection relationships between the various component modules used in this invention are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this invention without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this invention, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A zoned independent heating power compensation control system for a deposition furnace, characterized in that, It includes a furnace body, and a first heating structure and a second heating structure are provided inside the furnace body. The first heating structure is electrically connected to a first heating power output module, and the second heating structure is electrically connected to a second heating power output module. The first heating structure corresponds to the first heating zone arranged along the axial direction of the furnace body, and the second heating structure corresponds to the second heating zone arranged along the axial direction of the furnace body. The first heating zone and the second heating zone are interconnected, and the air inlet on the furnace body is located in the second heating zone. The first heating zone is equipped with a first temperature acquisition unit, and the second heating zone is equipped with a second temperature acquisition unit. The first temperature acquisition unit, the second temperature acquisition unit, the first heating power output module, and the second heating power output module are all electrically connected to the controller. The controller is configured as follows: The logic determines whether the temperature data collected by the first and second temperature acquisition units in real time both reach the preset temperature threshold. If either the temperature data collected by the first and second temperature acquisition units fails to reach the preset temperature threshold, the logic controls the first and second heating power output modules to output heating power according to their corresponding first given heating power. When the temperature data collected by both the first and second temperature acquisition units reach the preset temperature threshold, the system enters the constant temperature stage. The signal that the temperature data collected by both the first and second temperature acquisition units have reached the preset temperature threshold is input to the preset power compensation logic module, which dynamically adjusts the output heating power of the second heating power output module.

2. The independent heating power compensation control system for a deposition furnace according to claim 1, characterized in that, The first given heating power of both the first heating power output module and the second heating power output module is 30% to 45% of the preset initial given heating power.

3. The independent heating power compensation control system for a deposition furnace according to claim 2, characterized in that, The power compensation logic module is configured as follows: It receives temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit in real time, and logically determines the real-time temperature difference between the temperature data collected by the first temperature acquisition unit and the temperature data collected by the second temperature acquisition unit. When the real-time temperature difference is less than the preset critical temperature difference threshold, the output heating power of the second heating power output module is controlled to be the sum of the first given heating power and the real-time temperature difference. The summation operation is a purely numerical operation and does not involve dimensional calculations. The unit of the first given heating power of the second heating power output module is the same as the unit of the output heating power of the second heating power output module. The output heating power of the first heating power output module is its first given heating power. When the real-time temperature difference is not less than the preset critical temperature difference threshold, the output heating power of the second heating power output module is controlled to be 50% to 80% of its first given heating power value; the output heating power of the first heating power output module is its first given heating power.

4. The independent heating power compensation control system for a deposition furnace according to claim 1, characterized in that, Both the first and second heating structures are hollow columnar structures with openwork designs.

5. The independent heating power compensation control system for a deposition furnace according to claim 1, characterized in that, The preset temperature threshold is 300-800℃.

6. The independent heating power compensation control system for a deposition furnace according to claim 3, characterized in that, The preset critical temperature difference threshold is 5 to 20℃.

7. A method for independent heating power compensation control of a deposition furnace zone, employing the independent heating power compensation control system for a deposition furnace zone as described in any one of claims 1-6, comprising the following steps: Step S1: Start the first heating power output module and the second heating power output module of the deposition furnace to enter the heating stage; Step S2: The first temperature acquisition unit and the second temperature acquisition unit acquire the temperature data of their corresponding heating zones in real time and input them to the controller; Step S3: The controller logic determines whether the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit in real time both reach the preset temperature threshold. When one of the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit fails to reach the preset temperature threshold, the controller controls the first heating power output module and the second heating power output module to output heating power according to their corresponding first given heating power. When the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit both reach the preset temperature threshold, the controller enters the constant temperature stage and inputs the signal that the temperature data collected by the first temperature acquisition unit and the second temperature acquisition unit both reach the preset temperature threshold to the preset power compensation logic module. Step S4: The power compensation logic module dynamically adjusts the output heating power of the second heating power output module based on its preset compensation logic; Step S5: Repeat steps S4 to S5 until the heating process of the deposition furnace is completed.

8. A readable storage medium, characterized in that, The readable storage medium stores a computer program that, when executed by a processor, implements the steps of the method as described in claim 7.

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