Indium phosphide polycrystal growth furnace

Abstract

The application discloses an indium phosphide polycrystal growth furnace and relates to the technical field of indium phosphide polycrystal growth. The application adopts a dynamic heat bridge blocking mechanism composed of a double-layer sleeve and a flowable heat transfer medium, when normally growing, the double-layer sleeve is filled with high-thermal-conductivity medium to fill physical gaps, so that heat can be efficiently penetrated and transmitted to a quartz ampoule, when critical working conditions such as out-of-control pressure or temperature in the furnace are sensed, an inductive mechanism triggers a blocking action to rapidly empty the medium in the double-layer sleeve, so that the inside of the double-layer sleeve is instantly restored to a hollow gas or vacuum heat insulation layer, the thermal resistance is greatly increased, the heat transmission from the lower heating unit to the quartz ampoule is instantaneously cut off, and the problem of out-of-control heating of the bottom reaction zone is avoided.

Description

Technical Field

[0001] This invention belongs to the field of indium phosphide polycrystalline growth technology, and specifically relates to an indium phosphide polycrystalline growth furnace. Background Technology

[0002] In the semiconductor equipment industry, indium phosphide polycrystalline growth furnaces are often directly referred to as high-pressure synthesis furnaces. They are special thermal equipment used to synthesize high-purity indium phosphide (InP) polycrystalline bulk materials by reacting high-purity metallic indium (In) and solid red phosphorus (P) in a closed physical environment with extreme high temperature and high pressure through chemical vapor phase or liquid phase reaction.

[0003] For example, Chinese patent document CN222758370U discloses "a high-pressure synthesis furnace for polycrystalline indium phosphide," whose technical solution involves setting a reaction transition device made of quartz between a first quartz boat (containing red phosphorus) and a second quartz boat (containing indium) inside a quartz tube. The pressure change and synthesis process within the quartz tube are controlled by an outer tube with internal baffles having a 180-degree phase angle difference. However, this solution mainly uses static physical baffles to delay the diffusion of red phosphorus, lacking an active and rapid thermal blocking mechanism. When encountering extreme thermal runaway conditions, it still cannot block the conduction of residual heat in the heating zone, and the horizontal furnace structure has limitations in terms of spatial thermal isolation. For example, Chinese patent document CN213013163U discloses "a high-pressure single crystal growth furnace for indium phosphide," whose technical solution is to set up a constant pressure system including an air inlet and an air outlet device (including a pressure relief valve), and to install a temperature-measuring thermocouple wire inside the furnace for temperature control. However, this equipment relies heavily on external electrical sensors and mechanical pressure relief valves to control the furnace state. When a transient temperature spike occurs inside, the external pressure relief at the top cannot instantly cut off the heat conduction from the huge thermal inertia generated by the bottom heating electrode to the ampoule, resulting in a serious physical time lag in heat interruption. For example, Chinese patent document CN116575124A discloses "a growth furnace for indium phosphide production." Its technical solution involves a constant-temperature, constant-pressure gas flowing over the surface of a quartz tube and exiting through gas outlet pipes distributed around it. External thermocouples and flow meters are used to detect the temperature difference across different areas of the quartz tube surface, allowing for adjustment of an external electromagnetic stirrer to control the internal melt flow and temperature distribution. However, this solution relies entirely on a complex gas monitoring network and electromagnetic field regulation. In the high-temperature, high-pressure crystal growth environment filled with strong electromagnetic interference, the external electronic sensors are highly susceptible to distortion. Furthermore, the regulation speed relying on gas convection for heat conduction is slow, making it impossible to instantly achieve physical isolation of the heat source in critical situations where the pressure in the reaction zone suddenly increases. Traditional equipment relies heavily on external electrical sensors and temperature controllers to regulate heating power. Due to the enormous physical thermal inertia of the furnace, insulation layer, and heating elements, when the internal pressure or temperature spikes abnormally, even if the external electrical control system immediately cuts off the power, the massive residual heat at the bottom of the furnace will continue to be conducted to the quartz ampoules. This time lag in heat cut-off often leads to continuous overheating of the phosphorus source area, causing the phosphorus vapor pressure to instantly exceed the critical value, which can easily cause the fragile quartz ampoules to rupture, or even trigger a catastrophic explosion of the entire equipment. Therefore, a new indium phosphide polycrystalline growth furnace is proposed. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of the prior art, solve the technical problem of continuous overheating of the phosphorus source region due to the time lag of the interruption of heat in the prior art, and provide an indium phosphide polycrystalline growth furnace.

[0005] To achieve the above-mentioned objective, the present invention provides an indium phosphide polycrystalline growth furnace, comprising: a base frame, an adjustment structure symmetrically mounted on the top of the base frame, a rotating frame rotatably connected to the top of the base frame, the adjustment structure being used to adjust and limit the angle of the rotating frame, a growth furnace body fixedly mounted on the rotating frame, an installation frame installed inside the top of the growth furnace body, a plurality of upper heating units being vertically and sequentially mounted on the installation frame, a crystallization crucible being inserted into the inner ring of the upper heating unit, a lower heating unit being installed inside the growth furnace body, a blocking mechanism being inserted into the center of the lower heating unit, and the blocking mechanism being installed at the bottom of the inside of the growth furnace body, a quartz ampoule being sleeved in the center of the blocking mechanism, and a sensing mechanism being installed inside the growth furnace body, with the sensing mechanism and the blocking mechanism being linked and coordinated.

[0006] Using the above technical solution, the entire equipment relies on the base frame for stable support during operation. When loading, unloading, or preparing for special crystal growth processes, operators can adjust and limit the angle of the rotating frame by adjusting the structure, thereby tilting or positioning the growth furnace body fixed on the rotating frame. During the polycrystalline growth stage, a closed growth environment is formed inside the growth furnace body. Several upper heating units installed on the mounting frame are activated to heat the crystallization crucible inserted in its inner ring, providing the required high temperature and vertical temperature gradient from top to bottom for the indium melt in the crystallization crucible. At the same time, the lower heating unit located at the bottom of the growth furnace body is activated to provide the required heat for the auxiliary reaction zone (such as the phosphorus source zone) at the bottom. During the crystal growth process, if the physical environment (such as temperature) inside the growth furnace body fluctuates abnormally, the sensing mechanism installed inside can sensitively sense the change in operating conditions in real time and directly transmit the physical signal to the blocking mechanism in the center of the lower heating unit. The sensing mechanism and the blocking mechanism are mechanically linked to trigger the blocking mechanism to act, thereby dynamically blocking and isolating the heat transfer path at the bottom and preventing the bottom area from overheating and becoming uncontrollable.

[0007] A further improvement of the technical solution of the present invention is that: the blocking mechanism includes a base installed at the bottom of the inside of the growth furnace body, a double-layer sleeve installed at the top of the base, a plurality of flow pipes fixedly installed at equal intervals at the bottom of the base, the bottom ends of the plurality of flow pipes are all fixedly connected to the top of the diversion plate, the plurality of flow pipes are connected to each other through a connecting frame, a connecting pipe is fixedly installed at the bottom of the diversion plate, and a liquid storage tank is installed at the end of the connecting pipe away from the diversion plate.

[0008] Using the above technical solution, during operation, the double-layered sleeve is spatially embedded between the lower heating unit and the quartz ampoule. The core purpose of injecting the blocking medium into the double-layered sleeve is to construct a controllable dynamic thermal bridge between the two. When it is necessary to heat the phosphorus source at the bottom of the quartz ampoule at a constant temperature, the blocking medium with high thermal conductivity is provided by the outermost liquid tank. The blocking medium first enters the connecting pipe and then flows into the distribution plate. The distribution plate evenly distributes the concentrated blocking medium into several flow pipes connected above it. The fluid rises vertically upward along the flow pipes and finally passes through the base, evenly injecting into and filling the double-layered sleeve located at the top of the base. At this time, the high thermal conductivity medium contained in the space of the double-layered sleeve instantly fills the physical gaps in the heat conduction path, allowing the heat emitted by the lower heating unit to pass through the blocking medium. The interruption mechanism efficiently and uniformly penetrates and transmits heat to the quartz ampoule, thereby maintaining the precise temperature and saturated vapor pressure required for polycrystalline synthesis or single-crystal growth. Conversely, when a critical situation occurs in the furnace where temperature runaway or gas pressure surges, requiring heat interruption, the interruption medium inside the double-layer sleeve is rapidly emptied through pressure difference. The fluid flows downwards and evenly into several flow pipes through the base, then converges at the distribution plate, and finally flows back through the connecting pipe and is safely stored in the storage tank. After the medium is emptied, the interior of the double-layer sleeve instantly returns to a hollow gas or vacuum insulation layer, and the thermal resistance increases dramatically, thereby physically cutting off the heat transfer from the lower heating unit to the quartz ampoule. During the frequent up-and-down transmission of the interruption medium and the explosion-proof suction process, the flow pipes are kept relatively static and structurally rigid by the connecting frame to prevent the pipes from resonating and breaking due to fluid impact.

[0009] A further improvement of the technical solution of the present invention is that: a number of flow pipes are evenly distributed in a circular array at the bottom of the base, and the interior of the diversion plate is provided with a central radial guide groove corresponding to the number of flow pipes. The radial guide groove is used to break the fluid vortex and maintain the laminar flow state when the liquid metal heat transfer medium is drawn out into the storage tank.

[0010] Using the above technical solution, when the growth is stable and heat transfer medium needs to be injected upward, the central radial guide groove in the distribution plate acts as a flow distributor. After the fluid flows upward from the central main connecting pipe, it is guided evenly, equally, and at the same pressure along the radial groove to the various flow pipes distributed in a circular array on the periphery, ensuring the symmetry and synchronicity of the upward delivery. When encountering a high temperature crisis, when a huge vacuum suction force is generated at the end of the liquid storage tank, a large amount of heat transfer medium is violently rushed downward from multiple flow pipes into the distribution plate at extremely high speed. At this time, the central radial guide groove acts as a fluid isolation zone, which can avoid the possibility of multiple fluids generating rotational tangential force when converging at the center point, ensuring that the heat transfer medium can be instantly emptied without any flow resistance bottleneck, realizing the rapid physical heat insulation function of the blocking mechanism. The forced maintenance of laminar flow avoids violent collisions and disordered crossovers of the heat transfer medium, eliminates the extreme low-pressure zone caused by sudden changes in local flow velocity, avoids cavitation effect (cavitation phenomenon) of high-temperature heat transfer medium, prevents the strong micro water hammer impact generated when vacuum bubbles break from eroding and breaking down the pipe wall, and improves the fatigue life of the distribution plate and the entire pipeline under frequent extreme working conditions. The evenly distributed flow channels in a circular array, combined with corresponding radial guide grooves, ensure consistent backflow resistance in all directions of the base. This ensures that the annular liquid surface of the heat transfer medium inside the double-layer sleeve remains absolutely horizontal and level during rapid backflow, preventing fatal asymmetric thermal stress caused by uneven heating in the quartz ampoule (e.g., one side is still transferring heat while the other side has been emptied and is experiencing sudden cooling), thus avoiding the occurrence of ampoule explosion accidents.

[0011] A further improvement of the technical solution of the present invention is that: the double-layer sleeve has a cylindrical structure with a closed internal cavity, the double-layer sleeve is coaxially sleeved on the outside of the quartz ampoule, and an annular assembly gap is provided radially between the inner peripheral wall of the double-layer sleeve and the outer peripheral wall of the quartz ampoule, and high-purity flexible graphite paper is provided in the annular assembly gap.

[0012] Using the above technical solution, the double-layered sleeve has a closed chamber inside, serving as the core for containing the liquid metal heat transfer medium. It is coaxially sleeved on the outside of the quartz ampoule, ensuring that the heat generated by the lower heating unit must pass through the double-layered sleeve to be transferred to the phosphorus source inside the quartz ampoule. When the closed chamber is filled with liquid metal, the double-layered sleeve exhibits high thermal conductivity. When the sensing mechanism drives the liquid to be extracted, the chamber becomes insulated, physically cutting off the heat transfer. Furthermore, high-purity flexible graphite paper is filled in the annular assembly gap between the inner wall of the double-layered sleeve and the outer wall of the quartz ampoule. The graphite paper acts as a thermal bridge medium within the radial interval, ensuring that heat is transferred from the sleeve wall... The high-purity flexible graphite paper, which is smoothly and evenly permeated into the ampoule, has excellent planar thermal conductivity and flexibility. It can effectively compensate for unevenness of the contact surface caused by machining, eliminate local hot or cold spots, and make the quartz ampoule extremely uniformly heated. At the same time, when the blocking mechanism is activated, the graphite paper can play a certain role in thermal buffering, preventing the impact of drastic temperature jumps on crystal quality. Quartz ampoules are subject to thermal expansion at high temperatures and are extremely brittle. The annular assembly gap provides the necessary physical expansion space for the quartz ampoule, avoiding rigid compression of the quartz ampoule by the double sleeve and reducing the risk of ampoule explosion during high-temperature synthesis.

[0013] A further improvement of the technical solution of the present invention is that: the sensing mechanism includes a thermally sensitive corrugated tube rotatably installed at the bottom of the inside of the growth furnace body, the bottom of the thermally sensitive corrugated tube is provided with a mounting column, and the mounting column is fixedly installed inside the growth furnace body. A pressing piston is slidably connected inside the mounting column, and the bottom of the thermally sensitive corrugated tube is fixedly connected to the top of the pressing piston. A swing arm is rotatably connected inside the growth furnace body. A piston column is fixedly installed at the top of the liquid storage tank. A extraction piston is slidably connected inside the piston column. One end of the swing arm is slidably connected to the bottom of the pressing piston, and the other end of the swing arm is slidably connected to the top of the extraction piston.

[0014] Using the above technical solution, the thermally sensing corrugated pipe is installed at the bottom of the inside of the growth furnace body, directly exposed to the monitoring environment. Its elastic corrugated structure senses pressure or temperature fluctuations within the furnace. When the furnace pressure or heat abnormally increases, the thermally sensing corrugated pipe undergoes axial elongation deformation under pressure, pushing the downward-pressing piston inside the mounting column downwards. The bottom end of the downward-pressing piston presses against one end of the swing arm, causing the swing arm to rotate around its rotational connection point (fulcrum) with the growth furnace body. According to the lever principle, the other end of the swing arm lifts upwards, thereby pulling the extraction piston, which is slidably connected to it, upwards within the piston column. The upward displacement of the extraction piston directly changes the liquid storage... The pressure inside the chamber triggers the subsequent extraction of the liquid metal medium, completing the blocking action. The sensing mechanism is driven entirely by the physical deformation of the thermal bellows and the mechanical transmission of the swing arm, without the need for external power, sensors, or complex control circuits. In the high-temperature, high-pressure, and strongly electromagnetically interfered crystal growth environment, the sensing mechanism has extremely high stability, ensuring that the explosion-proof function can still be reliably triggered under extreme conditions. The swing arm, through its asymmetrical lever arm design, can convert the extremely small sensing displacement of the bellows into a large-amplitude movement of the extraction piston, shortening the response time from the detection of danger to complete heat cut-off and improving explosion-proof safety.

[0015] A further improvement of the technical solution of the present invention is that: the fluid circuit formed by the double-layer sleeve and the liquid storage tank is filled with liquid metal heat transfer medium, and an inert gas buffer layer is sealed between the bottom end of the extraction piston and the liquid surface of the liquid metal heat transfer medium. The extraction piston drives the liquid metal heat transfer medium to be extracted and injected inside the double-layer sleeve by changing the gas pressure and volume of the inert gas buffer layer.

[0016] Using the above technical solution, a high thermal conductivity liquid metal heat transfer medium is filled in a sealed fluid circuit consisting of a double-layer sleeve, flow pipe, distribution plate, connecting pipe, and storage tank. Inside the storage tank, the bottom end of the extraction piston does not directly contact the liquid metal surface, but is isolated by a sealed, high-purity inert gas buffer layer. The compressibility of the gas acts as a "gas spring," buffering the instantaneous pressure change during the rapid extraction or injection of the liquid metal, preventing severe water hammer effects in the pipeline, and thus protecting the brittle quartz ampoule from mechanical stress damage. The sealed inert gas... The gas (such as high-purity argon) completely eliminates the air in the storage tank, preventing the liquid metal from oxidizing when heated and forming a crust or depositing impurities. This ensures that the fluid circuit always maintains extremely low flow resistance and maintains a rapid response to the blocking action. When the sensing mechanism drives the extraction piston to slide upward, the space below the piston in the storage tank increases, causing the volume of the inert gas buffer layer to expand and the gas pressure to drop sharply. This generates a strong suction force to draw the liquid metal from the double-layer sleeve back into the storage tank through the pipeline. When the extraction piston returns to its original position downward, it compresses the inert gas buffer layer, increasing the gas pressure and driving the liquid metal heat transfer medium to be reinjected into the double-layer sleeve.

[0017] A further improvement of the technical solution of the present invention is that: the middle part of the swing arm is hinged to the bottom of the inner part of the growth furnace body through a rotating shaft, and the distance from the end of the swing arm that is slidably connected to the lower piston to the rotating shaft is less than the distance from the end of the swing arm that is slidably connected to the extraction piston to the rotating shaft, so that the swing arm constitutes an asymmetrical stroke amplification lever structure.

[0018] Using the above technical solution, the swing arm is hinged to the bottom of the growth furnace body via a rotating shaft. Essentially, it is a double-armed lever, with the rotating shaft acting as the fulcrum, dividing the swing arm into a power arm and a drive arm. These two arms are proportionally arranged. When an abnormal increase in furnace pressure causes deformation of the thermal bellows, pushing the downward piston to produce a slight downward displacement, the swing arm rotates around the rotating shaft under force. Because the drive arm has a longer lever arm, according to the proportional relationship of similar triangle displacements, the extraction piston will produce an upward displacement proportional to the lever arm. Pressure anomalies during indium phosphide growth often begin with a tiny initial... The fluctuation, through the stroke amplification structure, transforms the initial displacement captured by the sensing mechanism into the amplified upward stroke of the extraction piston, shortening the reaction time from sensing danger to completely blocking heat. After the stroke of the extraction piston is amplified, it can change the gas pressure and volume in the liquid tank in a shorter time, thereby generating a stronger instantaneous negative pressure suction force, enabling the liquid metal heat transfer medium to overcome fluid inertia and achieve near-instantaneous evacuation. In addition, through the physical transmission of the swing arm, the sensing mechanism has extremely high stability in the crystal growth environment with high temperature, high pressure and strong electromagnetic interference.

[0019] A further improvement of the technical solution of the present invention is that the effective driving cross-sectional area of ​​the piston rod is greater than the inner cavity cross-sectional area of ​​the liquid storage tank.

[0020] Using the above technical solution, when the extraction piston moves within the piston rod, according to the law of equal volume change of incompressible fluid (or closed gas chamber), , The change in fluid volume is due to When the extraction piston moves upward a small distance, in order to compensate for the same volume change, the volume of the inert gas buffer layer in the liquid tank will expand dramatically, thereby forcing the liquid metal surface in the fluid circuit to produce a downward displacement magnified by a factor of two. Through the proportional conversion of cross-sectional area, the small mechanical movement of the piston column can be converted into a huge flow velocity of the liquid metal in the fluid circuit, which improves the instantaneous response capability of the blocking mechanism and the sensing mechanism.

[0021] A further improvement of the technical solution of the present invention is that a protective structure is installed inside the connecting pipe. The protective structure includes a mounting plate fixedly installed inside the connecting pipe. The mounting plate has a plurality of damping microholes in a ring shape. A main drain hole is opened in the middle of the mounting plate. A support frame is fixedly installed on one side of the mounting plate. A slide rod is slidably connected to the support frame. An auxiliary spring is sleeved on one end of the slide rod that passes through the support frame. A baffle is installed on the end of the slide rod away from the auxiliary spring, and the baffle is inserted into the main drain hole.

[0022] Using the above technical solution, when the sensing mechanism drives the extraction piston to generate a strong suction negative pressure, the liquid metal heat transfer medium in the connecting pipe flows rapidly from the double-layer sleeve towards the storage tank. At this time, the impact force generated by the liquid metal heat transfer medium overcomes the preload of the auxiliary spring, pushing the baffle and slide rod along the support frame away from the mounting plate. The baffle disengages from the main drain hole, maximizing the pipe cross-sectional area instantly. The liquid metal can then be discharged at full speed through the main drain hole, achieving a rapid blocking response. When the fluid extraction ends and balance is restored, the auxiliary spring, relying on its normal tension, pushes the slide rod to reset, causing the baffle to re-insert into the main drain hole, completely sealing it. When the system needs to re-inject liquid metal for heating, the fluid flows from the storage tank to the double-layer sleeve. Due to the baffle's tight blockage of the main drain hole under the combined action of the auxiliary spring and reverse flow pressure, the liquid metal heat transfer medium is forced to change course. The fluid can only seep back extremely slowly through a series of damping micro-holes arranged in a ring around the periphery of the mounting plate. When heating is restored, the micro-leakage mechanism of the damping micro-holes forces the fluid to be injected slowly. This causes the liquid level in the double-layered sleeve to rise slowly, avoiding the severe thermal stress (i.e., thermal shock) caused by a large amount of high-temperature liquid coming into contact with the quartz ampoule instantly. This solves the problem of quartz containers cracking due to sudden cooling and heating. The protective structure is completely integrated inside the connecting tube and works by combining a purely mechanical spring with fluid dynamics. No electrical control signal intervention is required. It has extremely high operational reliability and anti-interference ability in complex electromagnetic fields and high-temperature environments.

[0023] A further improvement of the technical solution of the present invention is that: the auxiliary spring is in a normally stretched state to provide pre-tightening force for the drive baffle to block the main drain hole; when the extraction piston slides upward in the liquid storage tank to generate suction negative pressure, the fluid in the connecting pipe overcomes the elastic force of the auxiliary spring to push the baffle open so that the main drain hole is fully open; when the extraction piston resets downward to generate injection positive pressure, the auxiliary spring pushes the baffle to reset and block the main drain hole, and the fluid can only flow unidirectionally through the damping micropores.

[0024] Using the above technical solution, under normal assembly or static balance, the auxiliary spring is in a normally stretched state. Utilizing the spring's own physical elasticity, a continuous pre-tightening force is applied to the baffle, causing it to firmly press against and block the main drain hole. When the device experiences abnormal pressure, the extraction piston slides upward within the storage tank, instantly generating a powerful suction negative pressure. At this time, the liquid metal heat transfer medium in the connecting pipe is drawn back towards the storage tank. The kinetic energy of the liquid metal heat transfer medium directly overcomes the elasticity of the auxiliary spring, forcibly pushing open the baffle, completely opening the main drain hole. The liquid metal heat transfer medium can then be discharged instantly and unimpeded at its maximum cross-sectional area. When the crisis is resolved, the extraction piston resets downward and generates injection positive pressure, driving the liquid metal heat transfer medium to flow back to the double-layer sleeve. At this time, the positive thrust of the liquid metal heat transfer medium is in the same direction as the elasticity of the auxiliary spring. The auxiliary spring quickly pushes the baffle back to its original position, completely blocking the main drain hole. The liquid metal heat transfer medium can only flow and leak unidirectionally and extremely slowly through tiny damping micropores on the side.

[0025] Due to the adoption of the above technical solution, the technical progress achieved by this invention compared to the prior art is as follows: 1. This invention employs a dynamic thermal bridge blocking mechanism composed of a double-layered sleeve and a flowable heat transfer medium. During normal growth, the double-layered sleeve is filled with a highly thermally conductive medium to fill physical gaps, ensuring efficient heat penetration and transfer to the quartz ampoule. When a critical condition such as uncontrolled pressure or temperature inside the furnace is detected, the sensing mechanism triggers a blocking action, rapidly emptying the medium inside the double-layered sleeve, instantly restoring its interior to a hollow gas or vacuum insulation layer. This causes a surge in thermal resistance, instantly cutting off the heat transfer from the lower heating unit to the quartz ampoule, thus avoiding the problem of uncontrolled heating in the bottom reaction zone.

[0026] 2. This invention utilizes the difference in length of the asymmetric lever arm and the difference in cross-sectional area of ​​the piston to achieve dual mechanical signal amplification, thereby improving the explosion-proof response speed of the device in case of accidents. The sensing mechanism relies entirely on the thermodynamic deformation of the bellows and the mechanical transmission of the swing arm, without the need for external electronic sensors. It exhibits extremely high stability in a crystal growth environment characterized by high temperature, high pressure, and strong electromagnetic interference. The asymmetric swing arm amplifies the minute abnormal displacement captured by the bellows in the first stage, and then, in conjunction with the difference in cross-sectional area between the piston column and the inner cavity of the liquid storage tank, a second stage of flow rate and velocity amplification is achieved. This enables the device to instantly convert minute displacement fluctuations into a multiplied suction negative pressure and medium evacuation speed, thus realizing a rapid heat shut-off function.

[0027] 3. This invention installs a one-way damping protection structure with damping micropores inside the pipeline. When a suction negative pressure is generated, the heat transfer medium overcomes the spring preload and pushes open the baffle, making the main drain hole fully open and achieving full-speed venting and heat cutoff at the maximum cross-sectional area. When the crisis is resolved and positive pressure is reinjected, the spring pushes the baffle to block the main path, forcing the heat transfer medium to seep back extremely slowly only through the tiny damping micropores. This effectively avoids the violent thermal shock caused by a large amount of high-temperature liquid rushing back into contact with the quartz ampoule, and completely overcomes the problem of quartz containers cracking due to sudden cooling and heating.

[0028] 4. The distribution plate of this invention, through the setting of the central radial guide groove, can eliminate the vortex and cavitation damage during the transient suction process. When facing a high-pressure crisis and rapid emptying, the radial guide groove in the distribution plate acts as a fluid isolation zone, breaking the conditions for the generation of rotational tangential force and fluid vortex when multiple fluids converge. It forces the liquid metal to maintain a laminar flow state, which not only eliminates cavitation and micro water hammer penetration and erosion of the pipe wall, extending the fatigue life of the system, but also ensures that the liquid level in all directions in the sleeve can be kept absolutely horizontal and level, avoiding the fatal asymmetric thermal stress generated by uneven local heating of the quartz ampoule.

[0029] 5. This invention employs a dual flexible protection mechanism consisting of high-purity flexible graphite paper and an inert gas buffer layer to improve the safety of long-term equipment operation. The annular gap between the double-layer sleeve and the ampoule is filled with high-purity flexible graphite paper, which not only effectively eliminates local hot spots and makes the container extremely uniformly heated, but also provides a buffer space for physical expansion, avoiding rigid compression and cracking under high temperature. At the same time, an inert gas buffer layer is introduced at the piston end of the liquid storage tank, which uses its air pressure spring characteristics to buffer the pressure water hammer impact during rapid suction and completely eliminates air, preventing the liquid metal heat transfer medium from oxidizing and forming a scale at high temperature, and ensuring that the fluid circuit always maintains extremely low flow resistance. Attached Figure Description

[0030] The invention will now be further described with reference to the accompanying drawings.

[0031] Figure 1 This is a first-view schematic diagram of the overall device structure of the present invention; Figure 2 This is a second perspective view of the overall device structure of the present invention; Figure 3 This is a schematic diagram of the internal structure of the device of the present invention; Figure 4 This is a schematic diagram of the blocking mechanism of the present invention; Figure 5 This is a first-view schematic diagram of the half-section structure of the blocking mechanism of the present invention; Figure 6 This is a second perspective view of a half-section structural schematic diagram of the blocking mechanism of the present invention; Figure 7 This is a schematic diagram of the sensing mechanism structure of the present invention; Figure 8 This is a first-view schematic diagram of the protective structure of the present invention; Figure 9 This is a second-view schematic diagram of the protective structure of the present invention; Figure 10 This is a schematic cross-sectional view of the distribution plate structure of the present invention.

[0032] In the diagram: 1. Base frame; 2. Adjustment structure; 3. Rotating frame; 4. Growth furnace body; 5. Mounting frame; 6. Upper heating unit; 7. Crystallization crucible; 8. Lower heating unit; 9. Blocking mechanism; 10. Quartz ampoule; 11. Induction mechanism; 12. Base; 13. Double-layer sleeve; 14. Flow pipe; 15. Connecting frame; 16. Diverter plate; 17. Connecting pipe; 18. Storage tank; 19. Thermal corrugated pipe; 20. Mounting column; 21. Downward piston; 22. Swing arm; 23. Piston column; 24. Extraction piston; 25. Mounting plate; 26. Damping micropore; 27. Main drain hole; 28. Support frame; 29. ​​Slide rod; 30. Auxiliary spring; 31. Baffle. Detailed Implementation

[0033] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments and accompanying drawings.

[0034] Example 1 like Figures 1-3 As shown, the present invention provides an indium phosphide polycrystalline growth furnace, comprising: a base frame 1, an adjustment structure 2 symmetrically mounted on the top of the base frame 1, a rotating frame 3 rotatably connected to the top of the base frame 1, the adjustment structure 2 being used to adjust and limit the angle of the rotating frame 3, a growth furnace body 4 fixedly mounted on the rotating frame 3, an installation frame 5 installed inside the top of the growth furnace body 4, a plurality of upper heating units 6 vertically and sequentially mounted on the installation frame 5, a crystallization crucible 7 inserted into the inner ring of the upper heating unit 6, a lower heating unit 8 installed inside the growth furnace body 4, a blocking mechanism 9 inserted into the center of the lower heating unit 8, and the blocking mechanism 9 being installed at the bottom of the inside of the growth furnace body 4, a quartz ampoule 10 sleeved in the center of the blocking mechanism 9, and a sensing mechanism 11 installed inside the growth furnace body 4, and the sensing mechanism 11 and the blocking mechanism 9 being linked and cooperated.

[0035] In this embodiment, during operation, the entire device relies on the base frame 1 for stable support. During loading, unloading, or preparation for special crystal growth processes, the operator can adjust and limit the angle of the rotating frame 3 via the adjustment structure 2, thereby tilting or angulating the growth furnace body 4 fixed on the rotating frame 3. During the polycrystalline growth stage, a sealed growth environment is formed inside the growth furnace body 4. Several upper heating units 6 mounted on the mounting frame 5 are activated to heat the crystallization crucible 7 inserted into its inner ring, providing the required high temperature and vertical temperature from top to bottom to the indium melt within the crystallization crucible 7. Meanwhile, the lower heating unit 8 located at the bottom of the growth furnace body 4 is activated to provide the required heat to the auxiliary reaction zone (such as the phosphorus source zone) at the bottom. During the crystal growth process, if the physical environment (such as temperature) inside the growth furnace body 4 fluctuates abnormally, the sensing mechanism 11 installed inside can sense the change in the working condition in real time and directly transmit the physical signal to the blocking mechanism 9 in the center of the lower heating unit 8. The sensing mechanism 11 and the blocking mechanism 9 are mechanically linked and coordinated to trigger the action of the blocking mechanism 9, thereby dynamically blocking and isolating the heat transfer path at the bottom to prevent the bottom area from becoming uncontrollable due to heat.

[0036] Example 2 like Figures 4-6 As shown, based on Embodiment 1, the present invention provides a technical solution: Preferably, the blocking mechanism 9 includes a base 12 installed at the bottom of the inside of the growth furnace body 4, a double-layer sleeve 13 installed at the top of the base 12, and a plurality of flow pipes 14 fixedly installed at equal intervals at the bottom of the base 12. The bottom ends of the plurality of flow pipes 14 are all fixedly connected to the top of the diversion plate 16. The plurality of flow pipes 14 are connected to each other through a connecting frame 15. A connecting pipe 17 is fixedly installed at the bottom of the diversion plate 16, and a liquid storage tank 18 is installed at the end of the connecting pipe 17 away from the diversion plate 16.

[0037] In this embodiment, during operation, the double-layered sleeve 13 is spatially embedded between the lower heating unit 8 and the quartz ampoule 10. The core purpose of injecting the blocking medium into the double-layered sleeve 13 is to construct a controllable dynamic thermal bridge between the two. When it is necessary to heat the phosphorus source at the bottom of the quartz ampoule 10 at a constant temperature, the blocking medium with high thermal conductivity is provided by the outermost liquid storage tank 18. The blocking medium first enters the connecting pipe 17 and then flows into the distribution plate 16. The distribution plate 16 evenly distributes the concentrated blocking medium into several flow pipes 14 connected above it. The fluid rises vertically upward along the flow pipes 14 and finally passes through the base 12, evenly injecting into and filling the double-layered sleeve 13 located at the top of the base 12. At this time, the high thermal conductivity medium contained in the space of the double-layered sleeve 13 instantly fills the physical gap in the heat conduction path, allowing the heat emitted by the lower heating unit 8 to pass through. Through the blocking mechanism 9, the fluid efficiently and uniformly penetrates and is transmitted to the quartz ampoule 10, thereby maintaining the precise temperature and saturated vapor pressure required for polycrystalline synthesis or single-crystal growth. Conversely, when a critical situation occurs in the furnace where the temperature runs out of control or the gas pressure surges, and heat interruption is required, the blocking medium in the double-layer sleeve 13 is rapidly emptied through the pressure difference. The fluid flows downward through the base 12 and evenly into several flow pipes 14, then converges at the distribution plate 16, and finally flows back through the connecting pipe 17 and is safely stored in the liquid storage tank 18. After the medium is emptied, the interior of the double-layer sleeve 13 instantly returns to a hollow gas or vacuum insulation layer, and the thermal resistance surges, thereby physically cutting off the heat transfer from the lower heating unit 8 to the quartz ampoule 10. During the frequent up-and-down transmission and explosion-proof suction of the blocking medium, the flow pipes 14 are kept relatively stationary and structurally rigid through the connecting frame 15 to prevent the pipes from resonating and breaking due to fluid impact.

[0038] like Figure 4 , Figure 5 , Figure 6 and Figure 10 As shown, preferably, a plurality of flow pipes 14 are evenly distributed in a circular array at the bottom end of the base 12, and the interior of the diversion plate 16 is provided with a central radial guide groove corresponding to the plurality of flow pipes 14. The radial guide groove is used to break the fluid vortex and maintain the laminar flow state when the liquid metal heat transfer medium is drawn out into the liquid storage tank 18.

[0039] In this embodiment, when the heat transfer medium needs to be injected upward during a stable growth state, the central radial guide groove in the distribution plate 16 acts as a flow distributor. After the fluid flows upward from the central main connecting pipe 17, it is guided evenly, equally, and at equal pressure along the radial groove to the various flow pipes 14 distributed in a circular array on the periphery, ensuring the symmetry and synchronicity of the upward delivery. When encountering a high temperature crisis, when a huge vacuum suction force is generated at the end of the liquid storage tank 18, a large amount of heat transfer medium is violently rushed downward from multiple flow pipes 14 into the distribution plate 16 at extremely high speed. At this time, the central radial guide groove acts as a fluid isolation zone, which can avoid the possibility of multiple fluids generating rotational tangential force when converging at the center point, ensuring that the heat transfer medium can be instantly emptied without any flow resistance bottleneck, realizing the rapid physical heat insulation function of the blocking mechanism 9. The forced maintenance of laminar flow avoids violent collisions and disordered crossovers of the heat transfer medium, eliminates the extreme low-pressure zone caused by sudden changes in local flow velocity, avoids cavitation effect (cavitation phenomenon) of high-temperature heat transfer medium, prevents the strong micro water hammer impact generated when vacuum bubbles break from eroding and breaking through the pipe wall, and improves the fatigue life of the distribution plate 16 and the entire pipeline under frequent extreme working conditions. The evenly distributed flow pipes 14 in a circular array, along with corresponding radial guide grooves, ensure consistent backflow resistance in all directions of the base 12. This ensures that the annular liquid surface of the heat transfer medium inside the double-layer sleeve 13 remains absolutely level during rapid backflow, preventing fatal asymmetric thermal stress caused by uneven local heating of the quartz ampoule 10 (e.g., one side of the heat transfer medium is still transferring heat while the other side has been emptied and is suddenly cooled), thus avoiding the occurrence of bottle explosion accidents.

[0040] like Figures 4-6 As shown, preferably, the double-layer sleeve 13 has a cylindrical structure with an internal closed chamber. The double-layer sleeve 13 is coaxially sleeved on the outside of the quartz ampoule 10. A radially spaced annular assembly gap is provided between the inner peripheral wall of the double-layer sleeve 13 and the outer peripheral wall of the quartz ampoule 10, and high-purity flexible graphite paper is provided in the annular assembly gap.

[0041] In this embodiment, the double-layer sleeve 13 has a closed chamber inside, serving as the core for containing the liquid metal heat transfer medium. It is coaxially sleeved on the outside of the quartz ampoule 10, ensuring that the heat generated by the lower heating unit 8 must pass through the double-layer sleeve 13 to be transferred to the phosphorus source inside the quartz ampoule 10. When the closed chamber is filled with liquid metal, the double-layer sleeve 13 exhibits high thermal conductivity. When the sensing mechanism 11 drives the liquid to be extracted, the chamber becomes insulated, physically cutting off the heat. Furthermore, high-purity flexible graphite paper is filled in the annular assembly gap between the inner wall of the double-layer sleeve 13 and the outer wall of the quartz ampoule 10. The graphite paper acts as a thermal bridge medium within the radial interval, ensuring that heat flows from the sleeve... The high-purity flexible graphite paper, which is filled with the high-purity flexible graphite paper, penetrates smoothly and evenly into the ampoule. It has excellent planar thermal conductivity and flexibility, which can effectively compensate for the unevenness of the contact surface caused by machining, eliminate local hot or cold spots, and make the quartz ampoule 10 extremely uniformly heated. At the same time, when the blocking mechanism 9 is activated, the graphite paper can play a certain role in thermal buffering, preventing the impact of drastic temperature changes on crystal quality. The quartz ampoule 10 is thermally expanding at high temperatures and is extremely brittle. The annular assembly gap provides the necessary physical expansion space for the quartz ampoule 10, avoids the rigid compression of the quartz ampoule 10 by the double-layer sleeve 13, and reduces the risk of ampoule explosion during high-temperature synthesis.

[0042] Example 3 like Figure 7 As shown, based on Embodiment 1, the present invention provides a technical solution: Preferably, the sensing mechanism 11 includes a thermal corrugated tube 19 rotatably installed at the bottom of the inside of the growth furnace body 4. The bottom of the thermal corrugated tube 19 is provided with a mounting post 20, and the mounting post 20 is fixedly installed inside the growth furnace body 4. A pressing piston 21 is slidably connected inside the mounting post 20, and the bottom of the thermal corrugated tube 19 is fixedly connected to the top of the pressing piston 21. A swing arm 22 is rotatably connected inside the growth furnace body 4. A piston column 23 is fixedly installed at the top of the liquid storage tank 18. A drawing piston 24 is slidably connected inside the piston column 23. One end of the swing arm 22 is slidably connected to the bottom of the pressing piston 21, and the other end of the swing arm 22 is slidably connected to the top of the drawing piston 24.

[0043] In this embodiment, the thermally sensing bellows 19 is installed at the bottom of the interior of the growth furnace body 4, directly exposed to the monitoring environment. Its elastic bellows structure senses pressure or temperature fluctuations within the furnace. When the furnace pressure or heat abnormally increases, the thermally sensing bellows 19 undergoes axial elongation deformation under pressure, pushing the downward-pressing piston 21 inside the mounting column 20 downwards. The bottom end of the downward-pressing piston 21 presses against one end of the swing arm 22. The swing arm 22 rotates around its rotational connection point (fulcrum) with the growth furnace body 4. According to the lever principle, the other end of the swing arm 22 lifts upwards, thereby pulling the extraction piston 24, which is slidably connected to it, upwards within the piston column 23. The upward displacement of the extraction piston 24 directly changes the... The change in the gas pressure state inside the liquid storage tank 18 triggers the subsequent extraction of the liquid metal medium, completing the blocking action. The sensing mechanism 11 is driven entirely by the physical deformation of the thermal bellows 19 and the mechanical transmission of the swing arm 22, without the need for external power, sensors or complex control circuits. In the crystal growth environment with high temperature, high pressure and strong electromagnetic interference, the sensing mechanism 11 has extremely high stability, ensuring that the explosion-proof function can still be reliably triggered under extreme conditions. The swing arm 22, through its asymmetrical lever arm design, can convert the extremely small sensing displacement of the bellows into a large-amplitude movement of the extraction piston 24, shortening the response time from the detection of danger to complete heat cut-off and improving explosion-proof safety.

[0044] It should be noted that the interior of the thermal corrugated tube 19 is usually a sealed cavity filled with an expansion medium that is extremely sensitive to temperature (such as a specific gas or thermosensitive liquid). When the temperature of the phosphorus source zone at the bottom of the growth furnace rises abnormally (often accompanied by a surge in pressure), the thermal corrugated tube 19 senses the high temperature, and its internal medium expands violently due to the heat. With the top fixed, the huge internal expansion pressure forces the bottom end (free end) of the corrugated tube to overcome the mechanical resistance of the metal folds and produce a strong vertical downward elongation.

[0045] like Figures 4-6 As shown, preferably, the fluid circuit formed by the double-layer sleeve 13 and the liquid storage tank 18 is filled with liquid metal heat transfer medium. An inert gas buffer layer is sealed between the bottom end of the extraction piston 24 and the liquid surface of the liquid metal heat transfer medium. The extraction piston 24 drives the liquid metal heat transfer medium to be extracted and injected inside the double-layer sleeve 13 by changing the gas pressure and volume of the inert gas buffer layer.

[0046] In this embodiment, a high thermal conductivity liquid metal heat transfer medium is filled in the sealed fluid circuit consisting of a double-layer sleeve 13, a flow pipe 14, a distribution plate 16, a connecting pipe 17, and a storage tank 18. Inside the storage tank 18, the bottom end of the extraction piston 24 does not directly contact the liquid metal surface, but is isolated by a sealed high-purity inert gas buffer layer. The compressibility of the gas acts as a "gas spring," buffering the pressure surge during the rapid extraction or injection of the liquid metal, preventing severe water hammer effects in the pipeline, and thus protecting the brittle quartz ampoule 10 from mechanical stress damage. The sealed inert gas... (Such as high-purity argon) completely removes the air from the liquid storage tank 18, preventing the liquid metal from oxidizing when heated and producing a crust or impurity precipitation, ensuring that the fluid circuit always maintains extremely low flow resistance, and maintaining the extremely fast response of the blocking action. When the sensing mechanism 11 drives the extraction piston 24 to slide upward, the space below the piston in the liquid storage tank 18 increases, causing the volume of the inert gas buffer layer to expand and the gas pressure to drop sharply, thereby generating a strong suction force to draw the liquid metal from the double-layer sleeve 13 back into the liquid storage tank 18 through the pipeline. When the extraction piston 24 returns to its original position downward, it compresses the inert gas buffer layer, increasing the gas pressure and driving the liquid metal heat transfer medium to be re-injected into the double-layer sleeve 13.

[0047] like Figure 7 As shown, preferably, the middle part of the swing arm 22 is hinged to the bottom of the inner part of the growth furnace body 4 via a pivot. The distance from the pivot to the end of the swing arm 22 that is slidably connected to the pressing piston 21 is less than the distance from the pivot to the end of the swing arm 22 that is slidably connected to the extraction piston 24, so that the swing arm 22 forms an asymmetrical stroke amplification lever structure.

[0048] In this embodiment, the swing arm 22 is hinged to the bottom of the growth furnace body 4 via a pivot. Essentially, it is a double-armed lever, with the pivot serving as the fulcrum, dividing the swing arm 22 into a power arm and a drive arm. These two arms are proportionally arranged. When an abnormal increase in furnace pressure causes deformation of the thermal bellows 19, pushing the downward piston 21 to produce a slight downward displacement, the swing arm 22 rotates around the pivot under force. Since the drive arm has a longer lever arm, according to the proportional relationship of similar triangle displacements, the extraction piston 24 will produce an upward displacement proportional to the lever arm. Pressure anomalies during indium phosphide growth often begin with a tiny initial wave. The motion, through the stroke amplification structure, transforms the initial displacement captured by the sensing mechanism 11 into the amplified upward stroke of the extraction piston 24, shortening the reaction time from sensing danger to completely blocking heat. After the stroke of the extraction piston 24 is amplified, it can change the gas pressure and volume in the liquid storage tank 18 in a shorter time, thereby generating a stronger instantaneous negative pressure suction force, enabling the liquid metal heat transfer medium to overcome fluid inertia and achieve near-instantaneous evacuation. In addition, through the physical transmission of the swing arm 22, the sensing mechanism 11 has extremely high stability in the crystal growth environment with high temperature, high pressure and strong electromagnetic interference.

[0049] like Figure 6 As shown, preferably, the effective driving cross-sectional area of ​​the piston column 23 is greater than the inner cavity cross-sectional area of ​​the liquid storage tank 18.

[0050] In this embodiment, when the extraction piston 24 moves within the piston rod 23, according to the law of equal volume change of incompressible fluid (or closed air chamber), , This is the change in fluid volume, due to When the extraction piston (24) moves upward a small distance, in order to compensate for the same volume change, the volume of the inert gas buffer layer in the liquid storage tank 18 will expand drastically, thereby forcing the liquid metal surface in the fluid circuit to produce a downward displacement magnified by a factor of two. Through the proportional conversion of the cross-sectional area, the small mechanical motion of the piston column 23 can be converted into a huge flow velocity of the liquid metal in the fluid circuit, which improves the instantaneous response capability of the blocking mechanism 9 and the sensing mechanism 11.

[0051] Example 4 like Figure 8 and Figure 9 As shown, based on Embodiment 1, the present invention provides a technical solution: Preferably, a protective structure is installed inside the connecting pipe 17. The protective structure includes a mounting plate 25 fixedly installed inside the connecting pipe 17. The mounting plate 25 has a plurality of damping microholes 26 arranged in a ring on it. A main drain hole 27 is opened in the middle of the mounting plate 25. A support frame 28 is fixedly installed on one side of the mounting plate 25. A slide rod 29 is slidably connected to the support frame 28. An auxiliary spring 30 is sleeved on one end of the slide rod 29 that passes through the support frame 28. A baffle 31 is installed on the end of the slide rod 29 away from the auxiliary spring 30, and the baffle 31 is inserted into the main drain hole 27.

[0052] In this embodiment, when the sensing mechanism 11 drives the extraction piston 24 to generate a strong suction negative pressure, the liquid metal heat transfer medium in the connecting pipe 17 flows rapidly from the double-layer sleeve 13 towards the storage tank 18. At this time, the impact force generated by the liquid metal heat transfer medium overcomes the preload force of the auxiliary spring 30, pushing the baffle 31 and the slide rod 29 to slide away from the mounting plate 25 along the support frame 28. The baffle 31 disengages from the main drain hole 27, maximizing the pipe cross-sectional area instantly. The liquid metal can then be discharged at full speed through the main drain hole 27, achieving a rapid blocking response. When the fluid extraction ends and balance is restored, the auxiliary spring 30 pushes the slide rod 29 back to its original position using its normal tension, causing the baffle 31 to re-insert and fit into the main drain hole 27, completely sealing it. When the system needs to re-inject liquid metal for heating, the fluid flows from the storage tank 18 to the double-layer sleeve 13. Because the baffle 31 is tightly sealed by the auxiliary spring 30 and the reverse flow pressure, the liquid metal... The metal heat transfer medium is forced to change course, and can only seep back extremely slowly through a number of damping micro-holes 26 arranged in a ring around the mounting plate 25. When heating is restored, the micro-leakage mechanism of the damping micro-holes 26 forces the fluid to be injected slowly. This causes the liquid level in the double-layer sleeve 13 to rise slowly, avoiding the severe thermal stress (i.e., thermal shock) caused by a large amount of high-temperature liquid coming into contact with the quartz ampoule 10 instantly. The micro-leakage mechanism of the damping micro-holes 26 forces the fluid to be injected slowly, causing the liquid level in the double-layer sleeve 13 to rise slowly. This avoids the severe thermal stress caused by a large amount of high-temperature liquid coming into contact with the quartz ampoule 10 instantly, and solves the problem of quartz containers cracking due to sudden cooling and heating. The protective structure is completely integrated inside the connecting pipe 17 and works by cooperating with pure mechanical springs and fluid dynamics. No electrical control signal intervention is required. It has extremely high operational reliability and anti-interference ability in complex electromagnetic fields and high-temperature environments.

[0053] like Figure 8 and Figure 9 As shown, preferably, the auxiliary spring 30 is in a normally extended state to provide pre-tightening force for the drive baffle 31 to block the main drain hole 27. When the extraction piston 24 slides upward in the liquid storage tank 18 to generate a suction negative pressure, the fluid in the connecting pipe 17 overcomes the elastic force of the auxiliary spring 30 to push the baffle 31 open so that the main drain hole 27 is fully open. When the extraction piston 24 returns to its original position downward to generate injection positive pressure, the auxiliary spring 30 pushes the baffle 31 to return to its original position and block the main drain hole 27. The fluid can only flow unidirectionally through the damping micropores 26.

[0054] In this embodiment, under normal assembly or static equilibrium, the auxiliary spring 30 is in a normally extended state. Utilizing its own physical elasticity, the spring applies a continuous preload to the baffle 31, causing it to firmly press against and block the main drain hole 27. When the device experiences abnormal pressure, the extraction piston 24 slides upward within the storage tank 18, instantly generating a strong suction negative pressure. At this time, the liquid metal heat transfer medium in the connecting pipe 17 is drawn back towards the storage tank 18. The kinetic energy of the liquid metal heat transfer medium directly overcomes the elasticity of the auxiliary spring 30, forcibly pushing open the baffle 31, allowing the main drain hole 27 to open. With the drain hole 27 fully open, the liquid metal heat transfer medium can be discharged instantly and unimpeded at its maximum cross-sectional area. When the crisis is over, the extraction piston 24 returns to its original position and generates positive injection pressure, driving the liquid metal heat transfer medium to flow back to the double-layer sleeve 13. At this time, the forward thrust of the liquid metal heat transfer medium is in the same direction as the elastic force of the auxiliary spring 30. The auxiliary spring 30 quickly pushes the baffle 31 to return to its original position, completely blocking the main drain hole 27. The liquid metal heat transfer medium can only flow and leak unidirectionally and extremely slowly through the small damping micro-holes 26 on the side.

[0055] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. An indium phosphide polycrystalline growth furnace, characterized in that, include: The base frame (1) has an adjustment structure (2) symmetrically installed at the top of the base frame (1). The top of the base frame (1) is rotatably connected to a rotating frame (3). The adjustment structure (2) is used to adjust and limit the angle of the rotating frame (3). The growth furnace body (4) is fixedly installed on the rotating frame (3). The top of the growth furnace body (4) is equipped with an installation frame (5). The installation frame (5) is vertically installed with several upper heating units (6). The inner ring of the upper heating unit (6) is inserted with a crystallization crucible (7). The inside of the growth furnace body (4) is equipped with a lower heating unit (8). The center of the lower heating unit (8) is inserted with a blocking mechanism (9). The blocking mechanism (9) is installed at the bottom of the inside of the growth furnace body (4). The center of the blocking mechanism (9) is fitted with a quartz ampoule (10). The inside of the growth furnace body (4) is equipped with a sensing mechanism (11). The sensing mechanism (11) and the blocking mechanism (9) are linked and cooperate with each other.

2. The indium phosphide polycrystalline growth furnace according to claim 1, characterized in that: The blocking mechanism (9) includes a base (12) installed at the bottom of the inside of the growth furnace body (4). A double-layer sleeve (13) is installed at the top of the base (12). A plurality of flow pipes (14) are fixedly installed at equal intervals at the bottom of the base (12). The bottom ends of the plurality of flow pipes (14) are fixedly connected to the top of the diversion plate (16). The plurality of flow pipes (14) are connected to each other through a connecting frame (15). A connecting pipe (17) is fixedly installed at the bottom of the diversion plate (16). A liquid storage tank (18) is installed at the end of the connecting pipe (17) away from the diversion plate (16).

3. The indium phosphide polycrystalline growth furnace according to claim 2, characterized in that: Several of the aforementioned flow pipes (14) are evenly distributed in a circular array at the bottom end of the base (12), and the interior of the diversion plate (16) is provided with a central radial guide groove corresponding to each of the several flow pipes (14). The radial guide groove is used to break the fluid vortex and maintain the laminar flow state when the liquid metal heat transfer medium is drawn out into the storage tank (18).

4. The indium phosphide polycrystalline growth furnace according to claim 3, characterized in that: The double-layer sleeve (13) has a cylindrical structure with a closed internal chamber. The double-layer sleeve (13) is coaxially sleeved on the outside of the quartz ampoule (10). The inner peripheral wall of the double-layer sleeve (13) and the outer peripheral wall of the quartz ampoule (10) are provided with an annular assembly gap at a radial interval, and the annular assembly gap is provided with high-purity flexible graphite paper.

5. The indium phosphide polycrystalline growth furnace according to claim 4, characterized in that: The sensing mechanism (11) includes a heat-sensitive corrugated pipe (19) rotatably installed inside the bottom of the growth furnace body (4). The bottom of the heat-sensitive corrugated pipe (19) is provided with a mounting post (20), and the mounting post (20) is fixedly installed inside the growth furnace body (4). A downward piston (21) is slidably connected inside the mounting post (20), and the bottom of the heat-sensitive corrugated pipe (19) is fixedly connected to the top of the downward piston (21). A swing arm (22) is rotatably connected inside the growth furnace body (4). A piston column (23) is fixedly installed at the top of the liquid storage tank (18). A extraction piston (24) is slidably connected inside the piston column (23). One end of the swing arm (22) is slidably connected to the bottom of the downward piston (21), and the other end of the swing arm (22) is slidably connected to the top of the extraction piston (24).

6. The indium phosphide polycrystalline growth furnace according to claim 5, characterized in that: The fluid circuit formed by the double-layer sleeve (13) and the liquid storage tank (18) is filled with liquid metal heat transfer medium. An inert gas buffer layer is sealed between the bottom end of the extraction piston (24) and the liquid surface of the liquid metal heat transfer medium. The extraction piston (24) drives the liquid metal heat transfer medium to be extracted and injected inside the double-layer sleeve (13) by changing the gas pressure and volume of the inert gas buffer layer.

7. The indium phosphide polycrystalline growth furnace according to claim 6, characterized in that: The middle part of the swing arm (22) is hinged to the bottom of the inside of the growth furnace body (4) via a pivot. The distance from the pivot to the end of the swing arm (22) that is slidably connected to the lower piston (21) is less than the distance from the pivot to the end of the swing arm (22) that is slidably connected to the extraction piston (24), so that the swing arm (22) forms an asymmetrical stroke amplification lever structure.

8. The indium phosphide polycrystalline growth furnace according to claim 7, characterized in that: The effective driving cross-sectional area of ​​the piston rod (23) is greater than the inner cavity cross-sectional area of ​​the liquid storage tank (18).

9. The indium phosphide polycrystalline growth furnace according to claim 8, characterized in that: The connecting pipe (17) is equipped with a protective structure, which includes a mounting plate (25) fixedly installed inside the connecting pipe (17). The mounting plate (25) has a plurality of damping microholes (26) arranged in a ring. The mounting plate (25) has a main drain hole (27) in the middle. A support frame (28) is fixedly installed on one side of the mounting plate (25). A slide rod (29) is slidably connected on the support frame (28). An auxiliary spring (30) is sleeved on one end of the slide rod (29) that passes through the support frame (28). A baffle (31) is installed on the end of the slide rod (29) away from the auxiliary spring (30), and the baffle (31) is inserted into the main drain hole (27).

10. An indium phosphide polycrystalline growth furnace according to claim 9, characterized in that: The auxiliary spring (30) is in a normally stretched state to provide the pre-tightening force for the drive baffle (31) to block the main drain hole (27). When the extraction piston (24) slides upward in the liquid storage tank (18) to generate a suction negative pressure, the fluid in the connecting pipe (17) overcomes the elastic force of the auxiliary spring (30) to push the baffle (31) open so that the main drain hole (27) is fully open. When the extraction piston (24) returns to its original position downward to generate an injection positive pressure, the auxiliary spring (30) pushes the baffle (31) to return to its original position and block the main drain hole (27). The fluid can only flow unidirectionally through the damping micropore (26).

Images