Semiconductor grade ultra-clean check valve

Abstract

The application discloses a semiconductor-grade ultra-clean check valve, which comprises a first valve body, a second valve body threadedly connected with the first valve body and a lift core; the first valve body is provided with a guide rail and a supporting rod; the supporting rod is fixed on the first valve body, and the guide rail is fixedly connected with the supporting rod; the lift core is arranged in the first valve body and is provided with a guide hole; the guide hole comprises a first opening and a guide cavity which are communicated; the supporting rod passes through the first opening, and the guide rail is accommodated in the guide cavity; the lift core moves unidirectionally along the guide rail; wherein the lift core is provided with a bellows and a spring; the bellows is sealingly arranged on the outer side of the lift core, and one end of the spring is overlapped with the lift core; the lift core realizes the opening and closing of the check valve through the guide rail and the spring. The application completely isolates the friction structure through the bellows, meets the semiconductor-grade clean requirement, can improve the system integration and control flexibility, realizes the anti-misoperation and anti-loosening, and is stable and reliable in switching.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically to a semiconductor-grade ultra-clean one-way valve. Background Technology

[0002] In semiconductor manufacturing processes, ultra-high purity gas or liquid (collectively referred to as fluid) delivery systems have extremely stringent cleanliness requirements. Even the smallest particulate contaminant can lead to wafer defects, causing yield reductions or even batch rejection. As a critical control component in fluid pipelines, the frictional debris generated during the operation of a check valve is a potential source of contamination.

[0003] Traditional check valves, such as CN116857402B, have a relatively simple structure, achieving their check valve function through the guidance of the first valve body and the lifting core. However, during the reciprocating motion of the valve core, the direct friction between the first valve body and the lifting core inevitably generates tiny particles, increasing particulate matter in the pipeline and affecting the cleanliness of the semiconductor ultrapure gas and liquid circuits.

[0004] Furthermore, traditional check valves have a single function, typically only allowing flow in one direction, lacking the ability to flexibly switch flow paths in complex pipelines. This makes them unsuitable for meeting the demands of modern semiconductor equipment for fluid control flexibility and integration. Therefore, there is an urgent need for a check valve structure that can ensure ultra-high cleanliness while enabling flexible flow path control. Summary of the Invention

[0005] To address the aforementioned issues, this invention provides a semiconductor-grade ultra-clean one-way valve that ensures the fluid meets semiconductor-grade ultra-clean standards while enabling independent one-way control of pipelines in two different directions.

[0006] To achieve the above objectives, the present invention provides the following technical solution: A semiconductor-grade ultra-clean one-way valve, the one-way valve comprising a first valve body, a second valve body threadedly connected to the first valve body, and a lifting core; The first valve body is provided with a guide rail and a support rod. The support rod is fixed on the first valve body, and the guide rail is fixedly connected to the support rod. The lifting core is disposed in the first valve body. The lifting core has a guide hole, which includes a first opening and a guide cavity. The support rod passes through the first opening, and the guide rail is accommodated in the guide cavity. The lifting core moves unidirectionally along the guide rail. The lifting core is equipped with a bellows and a spring. The bellows is sealed on the outside of the lifting core, and one end of the spring overlaps with the lifting core. The lifting core opens and closes the one-way valve via a guide rail and a spring.

[0007] In an alternative embodiment, the lifting core is further provided with a support cylinder and an outer edge, the outer edge being respectively arranged around both ends of the lifting core, the support cylinder being fixed to the first valve body, the lifting core being disposed inside the support cylinder, the support cylinder surrounding the outer side wall of the lifting core and being disposed between the two outer edges; The corrugated pipe includes a first corrugated pipe and a second corrugated pipe, which are symmetrically arranged on both sides of the support cylinder. One end of the first corrugated pipe and the second corrugated pipe are respectively sealed and fixed to the outer edge, and the other end is respectively sealed and fixed to the support cylinder.

[0008] In an alternative embodiment, the lifting core is further provided with a first locking pin, which is located on the inner side of the first opening away from the first sealing ring, and the outer side of the first locking pin does not exceed the center line of the first opening. The spring includes a first spring, one end of which overlaps with a first locking pin, and the other end is fixed to a support cylinder.

[0009] In an alternative embodiment, the one-way valve further includes a handle portion fixed in the second threaded through hole and the first threaded through hole; The lifting core is also provided with a second locking pin, which is positioned opposite to the first locking pin, and the outer side of the second locking pin does not exceed the center line of the first opening; The spring also includes a second spring, one end of which overlaps with the second locking pin, and the other end is fixed to the support cylinder; The handle compresses the first or second spring, causing the core to move along the guide rail, thus switching the one-way valve.

[0010] In an alternative embodiment, the handle portion includes a handle and a rotating shaft. The handle has an internal spline, and the rotating shaft has an external spline. The handle and the rotating shaft are engaged by the internal and external splines. The rotating shaft is located at the center of the handle, and its bottom end is located between a first locking pin and a second locking pin. The handle drives the rotating shaft to rotate in a specific direction. The handle has a first step, the pivot has a second step, and a third spring is fixed between the first and second steps. The handle is opened and locked by rotating the third spring.

[0011] In an alternative embodiment, a hook is also provided at the bottom end of the rotating shaft, with the end of the hook being eccentrically positioned; after the rotating shaft rotates, the end of the hook compresses the first spring or the second spring, causing the end of the first spring or the second spring to separate from the corresponding first pin or the second pin, and not to contact the lifting core.

[0012] In an alternative embodiment, the first and second locking pins are inclined, and when the rotating shaft rotates to compress the first or second spring, the locking hook does not contact the first or second locking pin.

[0013] In an alternative embodiment, the handle portion further includes a base located below the handle, with the pivot extending through the base into the support cylinder; The base includes a first threaded sleeve and a second threaded sleeve, the second threaded sleeve being threadedly connected to the first threaded sleeve or integrally formed; the base is fixedly connected to the first valve body and the second valve body.

[0014] In an alternative embodiment, the support cylinder has a second opening, and a guide hole is formed in the second opening; an external thread is provided on the outside of the second opening, and concentric first threaded through holes and second threaded through holes are respectively formed on the outer periphery of the first valve body and the second valve body; a first threaded sleeve is threadedly connected to the first threaded through hole and the second opening, and a second threaded sleeve is threadedly connected to the second threaded through hole. The upper end of the second threaded sleeve is symmetrically provided with two limiting blocks; the lower end of the handle is provided with two locking holes, and the limiting blocks can be respectively accommodated in the locking holes.

[0015] In an alternative embodiment, the one-way valve further includes a first sealing ring disposed within the second valve body, located at the end of the first valve body and positioned between the first and second valve bodies; a spring causes one end of the lifting core to seal against the first sealing ring, thereby closing the passage of the second valve body.

[0016] In an alternative embodiment, the check valve further includes a second sealing ring located inside the first valve body, with the first and second sealing rings located on opposite sides of the lifting core, respectively. When the check valve is in operation, the lifting core moves along the guide rail and seals against the first or second sealing ring.

[0017] The beneficial effects of this invention are: The corrugated pipe completely isolates the friction structure from the flow path, preventing particulate matter from entering the fluid and meeting semiconductor-grade cleanliness requirements; it can switch between multiple working states, improving system integration and control flexibility; and the self-locking mechanism prevents accidental contact and loosening, ensuring stable and reliable switching. Attached Figure Description

[0018] Figure 1 This is a front view of the first motion state of the semiconductor-grade ultra-clean one-way valve of the present invention; Figure 2 This is a top view of the first motion state of the semiconductor-grade ultra-clean one-way valve of the present invention; Figure 3 This is a front view of the second motion state of the semiconductor-grade ultra-clean check valve of the present invention; Figure 4 This is a top view of the second motion state of the semiconductor-grade ultra-clean one-way valve of the present invention; Figure 5 This is an exploded perspective view of the semiconductor-grade ultra-clean one-way valve of the present invention. Figure 6This is a partial magnification of the first motion state of the semiconductor-grade ultra-clean one-way valve of the present invention. Figure 1 ; Figure 7 This is a partial magnification of the second motion state of the semiconductor-grade ultra-clean one-way valve of the present invention. Figure 1 ; Figure 8 This is a partial magnification of the second motion state of the semiconductor-grade ultra-clean one-way valve of the present invention. Figure 2 ; Figure 9 This is a partial magnification of the second motion state of the semiconductor-grade ultra-clean one-way valve of the present invention. Figure 2 ; Figure 10 This is a partial perspective view of the first motion state of the semiconductor-grade ultra-clean one-way valve of the present invention.

[0019] Reference numerals: First valve body - 100; Guide rail - 110; Support rod - 111; First threaded through hole - 120; Second sealing ring - 130; Second valve body - 200; First sealing ring - 210; Second threaded through hole - 220; Lifting core - 300; Guide hole - 310; First opening - 311; Guide cavity - 312; First bellows - 321; Second bellows - 322; First spring - 331; Second spring - 332; Support cylinder - 34 0; Second opening - 341; Outer edge - 350; First locking pin - 361; Second locking pin - 362; Sealing block - 370; Handle part - 400; Handle - 410; Internal spline - 411; First step - 412; Locking hole - 413; Rotating shaft - 420; External spline - 421; Second step - 422; Locking hook - 423; Base - 430; First threaded sleeve - 431; Second threaded sleeve - 432; Limiting block - 433; Third spring - 440. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the figures. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Embodiments of the present invention, examples of which are shown in the figures, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The terms "first," "second," "third," etc., in the specification, claims, and figures of the present invention, are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the objects described in this way can be interchanged where appropriate. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. Directional terms used in the present invention, such as: up, down, left, right, front, back, inside, outside, side, etc., are only for reference to the figures. The embodiments described below with reference to the figures are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention. Furthermore, the present invention repeats reference numerals and / or reference letters in different examples; this repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, the present invention provides examples of various specific processes and materials, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0022] like Figures 1-10 As shown, the present invention provides a semiconductor-grade ultra-clean one-way valve.

[0023] refer to Figure 1 The one-way valve includes a first valve body 100, a second valve body 200 threadedly connected to the first valve body 100, and a lifting core 300. The first valve body 100 is threadedly connected to the second valve body 200 via an external thread. The first valve body 100 is configured with a chamber for accommodating the lifting core 300. The lifting core 300 is accommodated in the chamber and can move back and forth within the chamber, thereby closing the passage of the first valve body 100 or the passage of the second valve body 200.

[0024] Specifically, refer to Figure 8 The first valve body 100 is provided with a guide rail 110 and a support rod 111. The support rod 111 is fixed on the first valve body 100, and the guide rail 110 is fixedly connected to the support rod 111.

[0025] Alternatively, the support rod 111 can also be fixed to the second valve body 200.

[0026] refer to Figure 5 and Figure 8 The lifting core 300 is disposed inside the first valve body 100, and the lifting core 300 has a guide hole 310. The guide hole 310 includes a first opening 311 and a guide cavity 312 that are connected. The support rod 111 passes through the first opening 311, and the guide rail 110 is accommodated in the guide cavity 312. The lifting core 300 can move unidirectionally along the guide rail 110 through the guide cavity 312, thereby achieving guidance of the lifting core 300.

[0027] To prevent the lifting core 300 from generating debris during movement, the lifting core 300 is also equipped with a bellows. The bellows seal is set on the outside of the lifting core 300 to wrap the lifting core 300.

[0028] refer to Figure 5 and Figure 8 Specifically, the lifting core 300 is also equipped with a support cylinder 340 and an outer edge 350. The outer edge 350 is respectively set at both ends of the lifting core 300. The support cylinder 340 is a cylinder fixed on the first valve body 100. The lifting core 300 is disposed inside the support cylinder 340. The support cylinder 340 surrounds the outer side wall of the lifting core 300, and the lifting core 300 moves inside the support cylinder 340.

[0029] Optionally, the support cylinder 340 also includes a fixing rod, and the support cylinder 340 is directly fixedly connected to the first valve body 100 through the fixing rod.

[0030] Furthermore, the support cylinder 340 is positioned between the two outer edges 350, and the support cylinder 340 can both support the spring and fix the bellows.

[0031] Preferably, the outer edge 350 can also contact the first sealing ring 210 or the second sealing ring 130 to achieve a seal and close the passage of the corresponding valve body.

[0032] Preferably, a sealing block 370 is further provided at the end of the lifting core 300 that contacts the first sealing ring 210 or the second sealing ring 130. One side of the outer edge 350 is used to connect one end of the bellows, and the other side is provided with the sealing block 370. The outer edge 350 is only used to connect with the bellows, and the sealing block 370 is used to contact the sealing ring and realize the closure of the corresponding valve body passage.

[0033] Further, refer to Figure 8 The corrugated pipe includes a first corrugated pipe 321 and a second corrugated pipe 322. The first corrugated pipe 321 and the second corrugated pipe 322 are symmetrically arranged on both sides of the support cylinder 340. The first corrugated pipe 321 and the second corrugated pipe 322 are respectively arranged between the outer edge 350 and the support cylinder 340. One end of the first corrugated pipe 321 and the second corrugated pipe 322 are respectively sealed and fixed to the outer edge 350, and the other end is respectively sealed and fixed to the support cylinder 340.

[0034] The above structure allows the friction that was originally on the outer circumference of the lifting core 300 to be transformed into friction inside the lifting core 300. Furthermore, the two bellows encapsulate the debris generated by the friction, so that the fluid outside the bellows is free of friction debris, thus increasing the cleanliness of the fluid channel.

[0035] In order to achieve the one-way closing function of the lifting core 300, the lifting core 300 is also equipped with a spring. The lifting core 300 opens the one-way valve through the guide rail 110 and the elastic force of the spring.

[0036] Specifically, the spring includes a first spring 331, which is disposed on the outside of the lifting core 300. Due to the elasticity of the first spring 331, when the first spring 331 is not compressed, the elastic force of the first spring 331 drives the lifting core 300 to move forward along the guide rail 110 in the direction of the elastic force. The continuous elastic force of the first spring 331 allows the lifting core 300 to close the passage of the first valve body 100 or the second valve body 200 and prevents the lifting core 300 from retracting. At this time, the one-way valve is working. When the first spring 331 is compressed, since the lifting core 300 loses the elastic force of the first spring 331, when fluid passes through, the lifting core 300 will retract along the guide rail 110 to the initial position, and at the same time, the passage of the first valve body 100 or the second valve body 200 will open, and the one-way valve becomes open.

[0037] refer to Figure 1 Preferably, the one-way valve further includes a first sealing ring 210, which is disposed at the end of the first valve body 100 and between the first valve body 100 and the second valve body 200; the spring force causes one end of the lifting core 300 to seal against the first sealing ring 210 and close the passage of the second valve body 200.

[0038] refer to Figure 5 and Figure 8 Furthermore, the lifting core 300 is also provided with a first locking pin 361, which is located on the first opening 311 and is used to fix the first spring 331.

[0039] Preferably, refer to Figure 5 and Figure 8 The first locking pin 361 is located on the inner side of the first opening 311 away from the first sealing ring 210, and the outer side of the first locking pin 361 does not exceed the center line of the first opening 311.

[0040] One end of the first spring 331 overlaps with the first locking pin 361, and the other end is fixed to the support cylinder 340. Since the first spring 331 is positioned between the first locking pin 361 and the support cylinder 340, the elastic force of the first spring 331 acts on the first locking pin 361, causing the lifting core 300 to move along the direction of the guide rail 110. The end of the lifting core 300 is tightly fitted with the first sealing ring 210, thereby closing the passage of the second valve body 200.

[0041] Optionally, when the first locking pin 361 is located on the inner side of the first opening 311 near the first sealing ring 210, the first spring 311 can cause the lifting core 300 to close the passage from the first valve body 100.

[0042] refer to Figure 5 and Figure 8 The support cylinder 340 has a second opening 341, and a guide hole 310 is formed inside the second opening 341. An external thread is provided on the outer side of the second opening 341. Concentric first threaded through holes 120 and 220 are respectively formed on the outer periphery of the first valve body 100 and the second valve body 200. A first threaded sleeve 431 is threadedly connected to both the first threaded through hole 120 and the opening 341. The first threaded sleeve 431 is fixed to both the first valve body 100 and the support cylinder 340 via threaded connections, thereby fixing the support cylinder 340 to the first valve body 100.

[0043] Alternatively, the support rod 111 can also be fixed on the first threaded sleeve 431. Since the first threaded sleeve 431 is fixed to the first valve body 100 by a threaded connection, the support rod 111 is fixed on the first valve body 100.

[0044] The first threaded sleeve 431 is threadedly fixed to the first valve body 100 and the support cylinder 340. Since the threads are all inside the bellows, it can prevent the particles generated by the threads from contaminating the ultra-clean fluid outside the bellows.

[0045] Furthermore, in order to achieve a unidirectional switching effect between the first valve body 100 and the second valve body 200 by selection, refer to Figure 1 The one-way valve also includes a second sealing ring 130, which is located inside the first valve body 100. The first sealing ring 210 and the second sealing ring 130 are located on both sides of the lifting core 300, respectively. When the one-way valve switches working states, the lifting core 300 moves along the guide rail 110 and seals against the first sealing ring 210 or the second sealing ring 110.

[0046] Because guide rail 110 can guide the direction of lifting core 300, lifting core 300 can be selected for a unidirectional path. (Reference) Figure 3 When the end of the lifting core 300 is sealed and fitted with the first sealing ring 210, the second valve body 200 is closed; when the end of the lifting core 300 is sealed and fitted with the second sealing ring 130, the first valve body 100 is closed.

[0047] To facilitate the selection of the passage in the one-way valve, the one-way valve of the present invention further includes a handle portion 400, which is threadedly connected to the second threaded through hole 220 of the second valve body 200.

[0048] Meanwhile, in order to enable the lifting core 300 to close valve bodies in different directions through the spring force, the spring of the present invention also includes a second spring 332. The second spring 332 can provide spring force to close the lifting core 300 to another valve body, and can also counteract the spring force of the first spring 331. (Refer to...) Figure 1When the one-way valve is in its initial state, the lifting core 300 is located in the middle, and its end is not in contact with the first sealing ring 210 or the second sealing ring 110, that is, both the first valve body 100 and the second valve body 200 are in the open state.

[0049] In order to secure the second spring 332, refer to... Figure 8 The lifting core 300 is also provided with a second locking pin 362, which is arranged opposite to the first locking pin 361, and the outer side of the second locking pin 362 does not exceed the center line of the first opening 311.

[0050] The purpose of this arrangement is that when neither the first spring 331 nor the second spring 332 is compressed, the lifting core 300 is exactly in its initial position. (Refer to...) Figure 1 Both the first valve body 100 and the second valve body 200 are in the open state.

[0051] Specifically, one end of the second spring 332 overlaps with the second locking pin 362, and the other end is fixed to the support cylinder 340. This makes the connection between the second spring 332 and the second locking pin 362 a movable connection, not a fixed connection. Therefore, the second spring 332 can be compressed. When the second spring 332 is compressed, the elastic force of the first spring 331 causes the lifting core 300 to move towards the first sealing ring 210 and seal against it, thereby allowing the lifting core 300 to block the passage of the second valve body 200. Similarly, since the first spring 331 and the first locking pin 361 are also movable, when the first spring 331 is compressed, the elastic force of the second spring 332 causes the lifting core 300 to move towards the second sealing ring 120 and seal against it, thereby allowing the lifting core 300 to block the passage of the first valve body 100.

[0052] Preferably, refer to Figure 5 Both the first locking pin 361 and the second locking pin 362 are inclined. After the rotating shaft 420 rotates, the hook 423 does not contact the first locking pin 361 or the second locking pin 362, but can contact the first spring 331 or the second spring 332 to compress it.

[0053] Further, refer to Figure 3 The handle 400 can be used to control the compression of the first spring 331 or the second spring 332, and the lifting core 300 can be moved along the guide rail 110 and in the compression direction to realize different connections of the one-way valve. That is, to switch the one-way conduction direction of the one-way valve.

[0054] Specifically, refer to Figure 6The handle portion 400 includes a handle 410 and a rotating shaft 420. The handle 410 has an internal spline 411, and the rotating shaft 420 has an external spline 421. The handle 410 and the rotating shaft 420 are engaged by the internal spline 411 and the external spline 421. The rotating shaft 420 is located at the center of the handle 410 and its bottom end extends into the first threaded sleeve 431. The handle 410 drives the rotating shaft 420 to rotate in a specific direction.

[0055] By using internal and external splines, the handle 410 and the rotating shaft 420 will not rotate relative to each other, thus allowing the rotating shaft 420 to rotate in the same direction as the handle 410. Simultaneously, the internal and external splines also allow the handle 410 to move vertically up and down within the vertical position of the rotating shaft 420, and only the handle 410 moves without causing the rotating shaft 420 to move vertically.

[0056] refer to Figure 5 and Figure 6 The handle portion 400 also includes a second threaded sleeve 432, which is threadedly connected to the first threaded sleeve 431 or integrally formed to form the base 430. Simultaneously, the second threaded sleeve 432 can also be threadedly connected to the second threaded through hole 220 of the second valve body 200. Therefore, the base 430 is fixedly connected to both the first valve body 100 and the second valve body 200.

[0057] Since the base 430 can be fixed to the first valve body 100 and the second valve body 200, and the threads are all inside the bellows, it can effectively prevent the particles generated by the threads from contaminating the ultra-clean fluid outside the bellows.

[0058] Optionally, the pivot 420 is connected to the second threaded sleeve 432 bearing, so that the handle 410 and the pivot 420 can rotate synchronously no matter how high the handle 410 is raised or lowered.

[0059] In order to lock the handle 400, a limit block 433 is provided on the upper end surface of the second screw sleeve 432, and a locking hole 413 is provided on the lower end of the handle 410. The limit block 433 and the locking hole 413 cooperate with each other to lock or return the handle 410 to a rotatable state.

[0060] Preferably, the upper end face of the second threaded sleeve 432 is symmetrically provided with two limiting blocks 433, and the lower end of the handle 410 is provided with two locking holes 413, and the limiting blocks 433 can be respectively accommodated in the locking holes 413.

[0061] Furthermore, in order to enable the handle 410 to have a locking force, a third spring 440 that provides elastic force can be provided inside the handle portion 400.

[0062] Specifically, refer to Figure 6The handle 410 has a first step 412 inside, the rotating shaft 420 has a second step 422, and the third spring 440 is fixed between the first step 412 and the second step 422. The handle 410 is opened by compressing the third spring 440 or locked by releasing the third spring 440.

[0063] Therefore, the rotation of the handle 410 and the direction of the shaft 420 can be restricted by the cooperation between the limiting block 433, the locking hole 413 and the third spring 440.

[0064] When the handle 400 needs to rotate, i.e., when a path needs to be switched, the handle 410 is lifted upwards. Under the action of the step 412, the third spring 430 is compressed. At this time, the handle 410 can drive the rotating shaft 420 to rotate. When the handle 410 rotates to a specified angle, i.e., the rotating shaft 420 also rotates to a specified angle, the limiting block 433 and the locking hole 413 correspond. After releasing the handle 410, the handle 410 moves downwards under the rebound force of the third spring, so that the locking hole 413 accommodates the limiting block 433, allowing the limiting block 433 to function. At this time, the handle 400 is locked and cannot be rotated.

[0065] refer to Figure 5 A hook 423 is also provided at the bottom end of the rotating shaft 420, with the end of the hook 423 eccentrically positioned. The function of the hook 423 is to engage with the first spring 331 or the second spring 332, compressing the first spring 331 or the second spring 332, thereby releasing the elastic force of the uncompressed spring. Under the action of the elastic force of the uncompressed spring, the lifting core 300 is controlled to close the passage of the valve body at its end. At this time, the spring engaged by the hook 423 does not contact the lifting core 300, thus not affecting the movement of the lifting core 310, making the other spring the power source for driving the lifting core 300 to achieve unidirectional blocking.

[0066] To better ensure the selection and locking effect of the handle 400, the locking hook 423 needs to be angled to the left or right, i.e., 0 degrees and 180 degrees. Therefore, there are two symmetrical limit blocks 433 and corresponding locking holes 413. In addition, locking is not required at 90 degrees and 270 degrees, i.e., both valve bodies are in the open state at this time, and the one-way valve does not work.

[0067] refer to Figure 3 and Figure 9 After the handle 410 drives the rotating shaft 420 to rotate, if the end of the hook 423 compresses the first spring 331, the end of the first spring 331 will separate from the first locking pin 361, thereby releasing the elastic force of the second spring 332, and then the end of the lifting core 300 can close the passage of the second valve body 200.

[0068] If the end of the hook 423 compresses the second spring 332, the end of the second spring 332 separates from the second latch 362, thereby releasing the elastic force of the first spring 331, and thus the end of the lifting core 300 can close the passage of the first valve body 100.

[0069] refer to Figure 1 and Figure 8 When the end of the hook 423 is not engaged with the first spring 331 and the second spring 332, the elastic forces of the two springs cancel each other out, and the lifting core 300 is in the middle equilibrium position. Its end neither closes the first valve body 100 nor closes the second valve body 200. At this time, the passages of both valve bodies are in the open state.

[0070] Optionally, refer to Figure 2 and Figure 4 The handle 410 has an elliptical cross-section. That is, the bottom cross-section of the handle 410 is elliptical. At the same time, the direction of the eccentric portion extending outward from the hook 423 is consistent with the major axis direction of the bottom cross-section of the handle 410.

[0071] When the check valve is in the open state in both valve body passages, refer to Figure 6 At this time, the third spring 440 is in a compressed state, the bottom surface of the handle 410 is in contact with the upper surface of the limit block 433, and the limit block 433 does not correspond to the card hole 413.

[0072] When the check valve is in a closed state in one valve body passage, refer to Figure 7 At this time, the third spring 440 releases its elastic force, driving the handle 410 so that the locking hole 413 on its bottom surface corresponds to the limiting block 433 and accommodates the limiting block 433, thereby locking the handle part 400 and preventing it from rotating.

[0073] The present invention will be demonstrated below through specific embodiments. Specific Implementation Example 1 This embodiment discloses a semiconductor-grade ultra-clean one-way valve, referencing... Figure 1 and Figure 8 The one-way valve includes a first valve body 100, a guide rail 110, a support rod 111, a first threaded through hole 120, a second valve body 200, a first sealing ring 210, a second threaded through hole 220, a lifting core 300, a guide hole 310, a first bellows 321, a second bellows 322, a first spring 331, a support cylinder 340, an outer edge 350, and a first locking pin 361.

[0075] The first valve body 100 is threadedly connected to the second valve body 200 via an external thread.

[0076] The first valve body 100 is provided with a guide rail 110 and a support rod 111. The support rod 111 is fixed on the first valve body 100, and the guide rail 110 is fixedly connected to the support rod 111.

[0077] The first threaded through hole 120 and the second threaded through hole 220 are respectively opened on the first valve body 100 and the second valve body 200.

[0078] The lifting core 300 is disposed in the chamber of the first valve body 100, and the guide rail 110 is accommodated in the guide hole 310 of the lifting core 300. The lifting core 300 can move along the guide rail 110, thereby achieving guidance of the lifting core 300.

[0079] A support cylinder 340 is provided around the guide hole 310 of the lifting core 300. Both ends of the lifting core 300 are provided with outer edges 350, and the support cylinder 340 is located in the middle of the two outer edges 350. The first bellows 321 and the second bellows 322 are respectively provided on both sides of the support cylinder 340, and one end of the first bellows 321 and the second bellows 322 are respectively sealed and fixed to the outer edges 350, and the other end is respectively sealed and fixed to the support cylinder 340.

[0080] The guide hole 310 of the lifting core 300 is also provided with a first locking pin 361, and the first spring 331 is provided on the outside of the lifting core 300, with one end overlapping with the first locking pin 361 and the other end fixed to the support cylinder 340.

[0081] The first sealing ring 210 is disposed at the end of the first valve body 100 and is positioned between the first valve body 100 and the second valve body 200.

[0082] The working method of the semiconductor-grade ultra-clean one-way valve in this embodiment is as follows: Due to the elasticity of the first spring 331, when the first spring 331 engages with the first latch 361, the elastic force of the first spring 331 drives the lifting core 300 to move forward along the guide rail 110 in the direction of the elastic force. The continuous elastic force of the first spring 331 allows the lifting core 300 to close the passage of the second valve body 200, forming a one-way passage.

[0083] In this embodiment, by providing first and second bellows on the outside of the lifting core, the friction area between the lifting core and the guide component of the first valve body is completely enclosed inside the bellows. All particles that may be generated due to relative motion are confined within the sealed chamber formed by the bellows, preventing them from entering the main flow path. This fundamentally solves the particle contamination problem caused by internal friction in traditional one-way valves, meeting the requirements of ultra-high purity fluid systems in semiconductor manufacturing. Simultaneously, the spring force drives the lifting core to tightly fit against the first or second sealing ring, ensuring absolute sealing of the valve in the closed state and preventing fluid backflow. Specific Implementation Example 2 Based on the first specific embodiment, this embodiment discloses a semiconductor-grade ultra-clean one-way valve, which further includes: a second sealing ring 130, a second spring 332, a second locking pin 362, a handle part 400, a handle 410, an internal spline 411, a first step 412, a locking hole 413, a rotating shaft 420, an external spline 421, a second step 422, a locking hook 423, a base 430, a first threaded sleeve 431, a second threaded sleeve 432, a limiting block 433, and a third spring 440.

[0085] The second locking pin 362 is fixed on the lifting core 300, and the second locking pin 362 is set opposite to the first locking pin 361.

[0086] The second spring 332 is symmetrically arranged with the first spring 331, and is located on both sides of the guide hole 310. One end of the second spring 332 is connected to the second locking pin 362, and the other end is fixed to the support cylinder 340.

[0087] The second sealing ring 130 is located inside the first valve body 100, and the first sealing ring 210 and the second sealing ring 130 are located at both ends of the lifting core 300, respectively.

[0088] The handle 400 is connected to the first threaded through hole 120 and the second threaded through hole 220. The handle 410 has an internal spline 411, and the rotating shaft 420 has an external spline 421. The handle 410 and the rotating shaft 420 are engaged by the internal spline 411 and the external spline 421. The first step 412 and the second step 422 are respectively provided on the handle 410 and the rotating shaft 422, and the third spring 440 is fixed between the first step 412 and the second step 422.

[0089] refer to Figure 2 and Figure 4 The handle 410 has an elliptical cross-section. Specifically, the bottom cross-section of the handle 410 is elliptical. This elliptical shape facilitates differentiation of the rotation angle and locking state of the handle portion 400. Furthermore, the eccentric portion extending outward from the hook 423 is aligned with the major axis of the bottom cross-section of the handle 410.

[0090] refer to Figure 6 The base of the handle part 400 is composed of a first threaded sleeve 431 and a second threaded sleeve 432 connected by threads. The first threaded sleeve 431 is fixed to the first valve body 100 through the first threaded through hole 120, and the second threaded sleeve 432 is fixed to the second valve body 200 through the second threaded through hole 220.

[0091] The rotating shaft 420 is located at the center of the handle 410 and its bottom end extends into the first threaded sleeve 431. At the same time, the rotating shaft 420 is connected to the second threaded sleeve 432 by a bearing. The handle 410 can drive the rotating shaft 420 to rotate in a specific direction.

[0092] Two symmetrical limiting blocks 433 are provided on the upper end face of the second threaded sleeve 432, and corresponding locking holes 413 are provided at the lower end of the handle 410. The limiting blocks 433 can be accommodated in the locking holes 413 respectively.

[0093] An eccentric hook 423 is provided at the bottom end of the rotating shaft 420. When the rotating shaft 420 switches its rotation angle, the hook 423 can prevent the first spring 331 or the second spring 332 from contacting the lifting core 300.

[0094] When both the first valve body 100 and the second valve body 200 are in the open state, the handle 410 is in the unlocked state, the third spring 440 is compressed, and the bottom surface of the handle 410 contacts the upper surface of the limiting block 433. At the same time, the limiting block 433 does not correspond to the locking hole 413. At this time, the end of the hook 423 is perpendicular to the lifting core 300, that is, it does not engage with the first spring 331 or the second spring 332, and the handle part 400 is in a 90-degree or 270-degree state.

[0095] When one passage in the first valve body 100 and the second valve body 200 is closed and the other passage is open, the third spring 440 releases its elastic force, the limiting block 433 enters the locking hole 413, and the handle 410 is in a locked state. At this time, the end of the hook 423 is parallel to the lifting core 300. When the handle 400 is in a 0-degree state, the hook 423 engages with the first spring 331, disengaging it from the first locking pin 361 and preventing it from contacting the lifting core 300, thus closing the passage of the first valve body 100. When the handle 400 is in a 180-degree state, the hook 423 engages with the second spring 332, disengaging it from the second locking pin 362 and preventing it from contacting the lifting core 300, thus closing the passage of the second valve body 200.

[0096] The working method of the semiconductor-grade ultra-clean one-way valve in this embodiment is as follows: When the one-way valve needs to be in operation, the handle 410 is rotated 90 degrees or 270 degrees so that the limit block 433 is below the locking hole 413. Under the rebound force of the third spring 440, the handle 410 moves downward, so that the locking hole 413 accommodates the limit block 433, allowing the limit block 433 to function. At this time, the handle part 400 is locked and cannot be rotated. At the same time, the hook 423 of the rotating shaft 420 engages with the first spring 331 or the second spring 332, releasing the elastic force of the uncompressed spring. Then, under the elastic force of the uncompressed spring, the lifting core 300 is controlled to close the passage of the valve body at its end.

[0097] When it is necessary to switch the passage of different valve bodies of the one-way valve, lift the handle 410 upwards to compress the third spring 430, rotate the handle 410 180 degrees so that the limit block 433 is below the locking hole 413. Under the rebound force of the third spring 440, the handle 410 moves downwards, so that the locking hole 413 accommodates the limit block 433, allowing the limit block 433 to function. At this time, the handle part 400 is locked and cannot be rotated. At the same time, the hook 423 of the rotating shaft 420 engages with another spring, controlling the lifting core 300 to close the passage of the valve body at its other end, completing the passage switching.

[0098] When the one-way valve needs to be closed, lift the handle 410 upwards to compress the third spring 430, and rotate the handle 410 90 degrees or 270 degrees so that the handle 410 is perpendicular to the first valve body 100 and the second valve body 200. At this time, the bottom surface of the handle 410 is located on the surface of the limit block 433, and the hook 423 of the rotating shaft 420 is at 90 degrees or 270 degrees and does not contact the first spring 331 or the second spring 332. The elastic forces of the first spring 331 and the second spring 332 cancel each other out, so that the lifting core 300 is in a balanced state and its ends do not contact the first valve body 100 or the second valve body 200. Both valve bodies are in a pass state.

[0099] In this embodiment, a design employing dual springs, dual locking pins, and a hook, along with a rotatable handle, drives an eccentric hook at the bottom of the rotating shaft. This preferably compresses one of the springs, causing it to separate from its corresponding locking pin. This releases the force of the other spring, driving the lifting core and achieving independent closure of the passages in either the first or second valve body. When the handle is in the middle position, the forces of the two springs are balanced, the lifting core is centered, and the passages in both valve bodies remain open. This allows for flexible switching between multiple operating states, improving the flexibility of fluid control and the system's integration.

[0100] Meanwhile, the third spring inside the handle, together with the limiting block and the locking hole, forms a reliable locking structure. Rotation can only be performed after actively lifting the handle to compress the third spring; once rotated to the correct position and the handle released, the restoring force of the third spring automatically engages the limiting block in the locking hole, locking the handle position. This effectively prevents the valve from accidentally switching due to vibration or other reasons during operation, ensuring operational safety and stability.

[0101] The semiconductor-grade ultra-clean check valve of the present invention, through innovative internal structural design and the use of bellows, completely isolates components that may generate friction debris from the main flow path, thereby ensuring that the medium flowing through the valve meets the semiconductor-grade ultra-clean standard; at the same time, through a unique double spring combined with a handle switching mechanism, the check valve can flexibly select the flow path, realizing independent unidirectional control or simultaneous opening of two pipelines in different directions.

[0102] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

Claims

1. A semiconductor-grade ultra-clean one-way valve, characterized in that, The one-way valve includes a first valve body (100), a second valve body (200) threadedly connected to the first valve body (100), and a lifting core (300). The first valve body (100) is provided with a guide rail (110) and a support rod (111). The support rod (111) is fixed on the first valve body (100), and the guide rail (110) is fixedly connected to the support rod (111). The lifting core (300) is disposed inside the first valve body (100). The lifting core (300) has a guide hole (310). The guide hole (310) includes a first opening (311) and a guide cavity (312) that are connected. The support rod (111) passes through the first opening (311), and the guide rail (110) is accommodated in the guide cavity (312). The lifting core (300) moves unidirectionally along the guide rail (110). The lifting core (300) is equipped with a bellows and a spring. The bellows is sealed on the outside of the lifting core (300), and one end of the spring overlaps with the lifting core (300). The lifting core (300) opens and closes the one-way valve through the guide rail (110) and the spring.

2. The semiconductor-grade ultra-clean one-way valve according to claim 1, characterized in that, The lifting core (300) is also provided with a support cylinder (340) and an outer edge (350). The outer edge (350) is respectively arranged around both ends of the lifting core (300). The support cylinder (340) is fixed on the first valve body (100). The lifting core (300) is arranged inside the support cylinder (340). The support cylinder (340) surrounds the outer side wall of the lifting core (300) and is arranged between the two outer edges (350). The corrugated pipe includes a first corrugated pipe (321) and a second corrugated pipe (322). The first corrugated pipe (321) and the second corrugated pipe (322) are symmetrically arranged on both sides of the support cylinder (340). One end of the first corrugated pipe (321) and the second corrugated pipe (322) are respectively sealed and fixed to the outer edge (350), and the other end is respectively sealed and fixed to the support cylinder (340).

3. The semiconductor-grade ultra-clean one-way valve according to claim 2, characterized in that, The lifting core (300) is also provided with a first locking pin (361), which is located on the inner side of the first opening (311) away from the first sealing ring (210), and the outer side of the first locking pin (361) does not exceed the center line of the first opening (311). The spring includes a first spring (331), one end of which overlaps with a first locking pin (361), and the other end is fixed to a support cylinder (340).

4. The semiconductor-grade ultra-clean one-way valve according to claim 3, characterized in that, The one-way valve also includes a handle (400) which is fixed in a second threaded through hole (220) and a first threaded through hole (120); The lifting core (300) is also provided with a second locking pin (362), which is disposed opposite to the first locking pin (361), and the outer side of the second locking pin (362) does not exceed the center line of the first opening (311); The spring also includes a second spring (332), one end of which overlaps with the second locking pin (362), and the other end is fixed to the support cylinder (340); The handle (400) compresses the first spring (331) or the second spring (332), and the lifting core (300) moves along the guide rail (110) to realize the switching of the one-way valve.

5. The semiconductor-grade ultra-clean one-way valve according to claim 4, characterized in that, The handle (400) includes a handle (410) and a rotating shaft (420). The handle (410) has an internal spline (411), and the rotating shaft (420) has an external spline (421). The handle (410) and the rotating shaft (420) are engaged by the internal spline (411) and the external spline (421). The rotating shaft (420) is located at the center of the handle (410) and its bottom end is located between the first locking pin (361) and the second locking pin (362). The handle (410) drives the rotating shaft (420) to rotate in a specific direction. The handle (410) has a first step (412) inside, the rotating shaft (420) has a second step (422), and the third spring (440) is fixed between the first step (412) and the second step (422). The handle (410) is opened and locked by rotating through the third spring (440).

6. The semiconductor-grade ultra-clean one-way valve according to claim 5, characterized in that, The bottom end of the rotating shaft (420) is also provided with a hook (423), the end of the hook (423) is eccentrically set; after the rotating shaft (420) rotates, the end of the hook (423) compresses the first spring (331) or the second spring (332), so that the end of the first spring (331) or the second spring (332) is separated from the corresponding first locking pin (361) or the second locking pin (362) and does not contact the lifting core (300).

7. The semiconductor-grade ultra-clean one-way valve according to claim 6, characterized in that, The first locking pin (361) and the second locking pin (362) are inclined. When the rotating shaft (420) rotates to compress the first spring (331) or the second spring (332) with the hook (423), the hook (423) does not contact the first locking pin (361) or the second locking pin (362).

8. The semiconductor-grade ultra-clean one-way valve according to claim 7, characterized in that, The handle (400) also includes a base (430) located below the handle (410), and the pivot (420) extends through the base (430) into the support cylinder (340). The base (430) includes a first threaded sleeve (431) and a second threaded sleeve (432), the second threaded sleeve (432) being threadedly connected to the first threaded sleeve (431) or integrally formed; the base (430) is fixedly connected to the first valve body (100) and the second valve body (200); The upper end of the second threaded sleeve (432) is symmetrically provided with two limiting blocks (433); the lower end of the handle (410) is provided with two locking holes (413), and the limiting blocks (433) can be respectively accommodated in the locking holes (413).

9. The semiconductor-grade ultra-clean check valve according to claim 1, characterized in that, The one-way valve also includes a first sealing ring (210), which is disposed inside the second valve body (200), located at the end of the first valve body (100), and positioned between the first valve body (100) and the second valve body (200); the spring causes one end of the lifting core (300) to seal against the first sealing ring (210), thereby closing the passage of the second valve body (200).

10. The semiconductor-grade ultra-clean one-way valve according to claim 9, characterized in that, The one-way valve also includes a second sealing ring (130), which is located inside the first valve body (100). The first sealing ring (210) and the second sealing ring (130) are located on both sides of the lifting core (300). When the one-way valve is working, the lifting core (300) moves along the guide rail (110) and seals against the first sealing ring (210) or the second sealing ring (110).

Images