A method of generating an ion beam array

Abstract

The present disclosure provides a method for generating an ion beam array. The present disclosure relates to the field of micro-nano processing. The method for generating an ion beam array comprises: performing phase modulation on incident light emitted by an incident light source through a spatial light modulator loaded with a preset phase pattern to obtain excitation light; irradiating a cold atom group using the excitation light to cause a plurality of target cold atoms of a plurality of cold atoms in the cold atom group located at a target spatial position to produce atomic transition, so as to obtain an array of excited-state atom groups, the target spatial position being determined based on the preset phase pattern; and sequentially applying ionization light and a guiding electric field to the array of excited-state atom groups, so that the array of excited-state atom groups emits a plurality of target ion beams to form an ion beam array.

Description

Technical Field

[0001] This disclosure relates to the field of micro / nano fabrication, and more specifically, to a method for generating an ion beam array. Background Technology

[0002] Focused ion beam (FIP) is a technique that accelerates ions generated by an ion source using an electric field and focuses them through an electromagnetic lens to form a high-energy ion beam on the nanometer to micrometer scale. It is widely used in micro / nano fabrication, microscopic imaging, and elemental composition analysis. Commonly used ion sources in ion beam systems include liquid metal ion sources, gas field emission ion sources, and inductively coupled plasma ion sources.

[0003] Traditional focused ion beam technology achieves processing, imaging, and analysis through single-beam scanning, which is relatively inefficient. Specifically, related technologies often rely on apertures, beam gate arrays, and emitter arrays to generate ion beam arrays. Summary of the Invention

[0004] In view of this, the present disclosure provides a method for generating an ion beam array.

[0005] One aspect of this disclosure provides a method for generating an ion beam array, comprising: phase-modulating incident light emitted from an incident light source using a spatial light modulator loaded with a preset phase diagram to obtain excitation light; irradiating a cold atom cluster with the excitation light to induce atomic transitions in multiple target cold atoms located at target spatial positions within the cold atom cluster, thereby obtaining an excited-state atom cluster array, wherein the target spatial positions are determined based on the preset phase diagram; and sequentially applying ionizing light and a guiding electric field to the excited-state atom cluster array to cause the excited-state atom cluster array to emit multiple target ion beams, thereby forming an ion beam array.

[0006] According to embodiments of this disclosure, ionizing light and a guiding electric field are sequentially applied to an excited-state atomic cluster array to cause the excited-state atomic cluster array to emit multiple target ion beams to form an ion beam array. This includes: irradiating the excited-state atomic cluster array with ionizing light to cause multiple target atomic clusters in the excited-state atomic cluster array to undergo ionization reactions to generate multiple target ion beams; and applying a guiding electric field to the multiple target ion beams to move the multiple target ion beams along a target direction to form an ion beam array.

[0007] According to embodiments of this disclosure, the method for generating an ion beam array further includes: acquiring preset light intensity distribution information and an initial phase map; using the initial phase map as an initial value, optimizing the initial phase map using a nonlinear optimization method with the goal of minimizing the deviation between the preset light intensity distribution information and the initial light intensity distribution information corresponding to the initial phase map, to obtain the preset phase map.

[0008] According to embodiments of this disclosure, an initial phase map is optimized using a nonlinear optimization method to obtain a preset phase map, including: performing an inverse Fourier transform on the adjusted initial phase map to obtain adjusted light intensity distribution information; determining the light intensity distribution deviation based on the adjusted light intensity distribution information and the preset light intensity distribution information; and adjusting the phase map based on the light intensity distribution deviation to obtain the preset phase map.

[0009] According to embodiments of this disclosure, the method for generating an ion beam array further includes: using a magneto-optical trap to cool and confine a portion of the target atoms released from the atomic source within the magneto-optical trap, forming a cold atom cluster.

[0010] According to embodiments of this disclosure, a magneto-optical trap includes multiple cooling laser beams and a gradient magnetic field; the magneto-optical trap is used to cool and confine some target atoms released from an atomic source to form a cold atom cluster, comprising: irradiating the atomic beams released from the atomic source from multiple directions with multiple cooling laser beams to obtain multiple target atoms after deceleration; and using a gradient magnetic field to spatially confine the multiple target atoms after deceleration to form a cold atom cluster.

[0011] According to embodiments of this disclosure, the cold atoms in the cold atom group include rubidium atoms.

[0012] According to an embodiment of this disclosure, the wavelength of the incident light is 780 nm.

[0013] According to embodiments of this disclosure, the wavelength of the ionizing light is 475 nm to 480 nm.

[0014] According to embodiments of this disclosure, by loading a preset phase map using a spatial light modulator, the phase of the incident light wave can be precisely modulated, thereby generating excitation light with a specific spatial distribution. This excitation light can be used to irradiate cold atom clusters, where only cold atoms located at target spatial positions determined by the preset phase map will undergo atomic transitions, transforming into excited states and forming an array of excited-state atom clusters. The above process can selectively excite atoms according to a predetermined spatial pattern. Next, an ion beam array is formed by sequentially applying ionizing light and a guiding electric field. Compared with aperture-based ion beam array generation methods of related technologies, the ion beam array generated using the above method improves the controllability and flexibility of the ion source. The programmability of the ion beam array can be achieved through the design of the phase map, and the direct generation of ion beams using cold atom ion sources results in ion beam arrays with higher purity, higher brightness, stronger stability, and lower energy dissipation. This improves the quality and usability of the ion beam array in multiple ways. Attached Figure Description

[0015] The above and other objects, features and advantages of this disclosure will become clearer from the following description of embodiments with reference to the accompanying drawings, in which:

[0016] Figure 1 An exemplary system architecture for generating ion beam arrays can be applied according to embodiments of this disclosure is illustrated.

[0017] Figure 2 A flowchart illustrating a method for generating an ion beam array according to an embodiment of the present disclosure is shown schematically.

[0018] Figure 3(a) schematically illustrates preset light intensity distribution information according to an embodiment of the present disclosure.

[0019] Figure 3(b) schematically illustrates a holographic phase map obtained based on preset light intensity distribution information according to an embodiment of the present disclosure.

[0020] Figure 3(c) schematically illustrates the light intensity distribution of excitation light obtained based on a holographic phase map according to an embodiment of the present disclosure.

[0021] Figure 4 An image of an ion beam array according to an embodiment of the present disclosure is shown schematically. Detailed Implementation

[0022] The embodiments of the present disclosure will now be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the disclosure. In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the embodiments of the present disclosure for ease of explanation. However, it will be apparent that one or more embodiments may be practiced without these specific details. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concepts of the present disclosure.

[0023] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this disclosure. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0024] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0025] When using expressions such as "at least one of A, B and C", they should generally be interpreted in accordance with the meaning that is commonly understood by those skilled in the art (e.g., "a system having at least one of A, B and C" should include, but is not limited to, a system having A alone, a system having B alone, a system having C alone, a system having A and B, a system having A and C, a system having B and C, and / or a system having A, B and C, etc.).

[0026] Currently, in related technologies, a certain nanotechnology company uses an inductively coupled plasma ion source to generate different types of ion beams and utilizes a programmable aperture plate to generate ion beam arrays; while Tohoku University in Japan uses a liquid metal ion source to generate ion beams and utilizes an emitter array to generate ion beam arrays. However, both of these methods for generating multiple ion beams rely on apertures, beam gate arrays, and emitter arrays that depend on micro- and nano-fabrication processes.

[0027] However, ion beam arrays generated using the methods described above have several drawbacks. For example, these components require highly precise micro- and nano-fabrication techniques to manufacture, which may increase manufacturing costs and complexity. Furthermore, due to limitations in physical size and fabrication technology, large-scale ion beam arrays may be difficult to fabricate. Once the components are fabricated, the array configuration is fixed and not easily adjusted or reconfigured as needed. Certain specific ion beam applications may require specific ion beam characteristics, which traditional micro- and nano-fabrication methods may struggle to meet. More importantly, these delicate components may be highly sensitive to environmental conditions (such as temperature, humidity, and vibration), requiring operation in a controlled environment.

[0028] In view of this, embodiments of the present disclosure provide a method for generating an ion beam array, comprising: performing phase modulation on incident light emitted by an incident light source using a spatial light modulator loaded with a preset phase map to obtain excitation light; irradiating a cold atom cluster with the excitation light to induce atomic transitions in multiple target cold atoms located at target spatial positions within the cold atom cluster, thereby obtaining an excited-state atom cluster array, wherein the target spatial positions are determined based on the preset phase map; and sequentially applying ionizing light and a guiding electric field to the excited-state atom cluster array to cause the excited-state atom cluster array to emit multiple target ion beams, thereby forming an ion beam array.

[0029] Figure 1 An exemplary system architecture 100 for generating ion beam arrays according to embodiments of this disclosure is illustrated schematically. It should be noted that... Figure 1 The examples shown are merely examples of system architectures that can be applied to the embodiments of this disclosure, in order to help those skilled in the art understand the technical content of this disclosure, but do not mean that the embodiments of this disclosure cannot be used in other devices, systems, environments or scenarios.

[0030] like Figure 1As shown, the system architecture 100 according to this embodiment may include: a cold atom cluster 101, a magneto-optical trap 102, an ionization light source 103, an incident light source 104, and a guiding electric field 105.

[0031] The magneto-optical trap 102 can use magnetic fields and laser cooling technology to capture and trap cold atom clusters 101. Cold atom clusters 101 can serve as the basis for subsequent generation of ion beam arrays.

[0032] Researchers can apply an ionization light source 103, an incident light source 104, and a guiding electric field 105 to the cold atom cluster 101 to generate an ion beam array in the cold atom cluster 101.

[0033] The incident light source 104 can be used to emit incident light, which can be a laser with a wavelength of 780 nanometers (nm).

[0034] The ionization light source 103 can be used to emit ionized light, which can be a laser with a wavelength of 475 nanometers (nm) to 480 nanometers (nm).

[0035] The guiding electric field 105 can guide the generated target ions to move in order to form an ion beam array.

[0036] Figure 2 A flowchart illustrating a method for generating an ion beam array according to an embodiment of the present disclosure is shown schematically.

[0037] like Figure 2 As shown, the method includes operations S210~S230.

[0038] In operation S210, the incident light emitted by the incident light source is phase-modulated by a spatial light modulator loaded with a preset phase diagram to obtain excitation light.

[0039] According to embodiments of this disclosure, the aforementioned preset phase map can be a holographic phase map, which has important applications in the fields of optics and light field manipulation. It is a pre-designed pattern that can be loaded using a spatial light modulator (SLM) to precisely control the phase distribution of light waves. The purpose of designing a holographic phase map is to form the desired light intensity distribution on a specific plane, thereby achieving precise manipulation of the light field. This specific plane can be the spatial plane containing cold atomic clusters. Furthermore, the holographic phase map utilizes the principle of light wave interference to record and reproduce the three-dimensional information of the desired spatial distribution of light waves.

[0040] According to embodiments of this disclosure, when incident light passes through a phase map, its phase is modulated to obtain excitation light. The excitation light can be formed on a target plane to achieve the intensity distribution required for generating an ion beam array. The intensity distribution of the modulated excitation light contains amplitude and phase information of the desired spatial distribution of light waves.

[0041] In operation S220, the cold atom cluster is irradiated with excitation light, causing multiple target cold atoms located at the target spatial position within the cold atom cluster to undergo atomic transitions, thereby obtaining an excited state atom cluster array. The target spatial position is determined based on a preset phase diagram.

[0042] According to embodiments of this disclosure, after obtaining excitation light, the excitation light can be used to irradiate cold atom clusters, wherein the light intensity at the target spatial location indicated by the excitation light is stronger than that at other locations. Then, multiple target cold atoms at the target spatial location will undergo atomic transitions, for example, transitioning from the ground state to the excited state. At this time, these multiple target cold atoms at the target spatial location will form an array of excited-state atom clusters.

[0043] In operation S230, ionizing light and guiding electric field are sequentially applied to the excited-state atomic cluster array, causing the excited-state atomic cluster array to emit multiple target ions to form an ion beam array.

[0044] According to embodiments of this disclosure, the excited-state atomic cluster array obtained in the above steps can be irradiated with ionized light emitted from an ionization source. This ionizes the excited-state target cold atoms, generating multiple target ions and multiple free electrons. A guiding electric field can then be applied to this spatial region to push / pull the target ions out of the region. Correspondingly, these target ions are emitted from the excited-state atomic cluster array, thereby forming the ion beam array required by this method.

[0045] According to embodiments of this disclosure, by loading a preset phase map using a spatial light modulator, the phase of the incident light wave can be precisely modulated, thereby generating excitation light with a specific spatial distribution. This excitation light can be used to irradiate cold atom clusters, where only cold atoms located at target spatial positions determined by the preset phase map will undergo atomic transitions, transforming into excited states and forming an array of excited-state atom clusters. The above process can selectively excite atoms according to a predetermined spatial pattern. Next, an ion beam array is formed by sequentially applying ionizing light and a guiding electric field. Compared with aperture-based ion beam array generation methods of related technologies, the ion beam array generated using the above method improves the controllability and flexibility of the ion source. By designing the phase map, the particle number array can be programmable. Directly generating ion beams using ion sources generated from cold atoms results in ion beam arrays with higher purity, higher brightness, stronger stability, and lower energy dissipation. This improves the quality and usability of the ion beam array in multiple ways.

[0046] According to embodiments of this disclosure, ionizing light and a guiding electric field are sequentially applied to an excited-state atomic cluster array to cause the excited-state atomic cluster array to emit multiple target ions to form an ion beam array. This includes: irradiating the excited-state atomic cluster array with ionizing light to cause multiple target atoms in the excited-state atomic cluster array to undergo ionization reactions to generate multiple target ions; and applying a guiding electric field to the multiple target ions to cause the multiple target ions to move along a target direction to form an ion beam array.

[0047] According to embodiments of this disclosure, after obtaining an array of excited-state atomic clusters, the target atoms are ionized by irradiating the array with ionizing light, thereby generating multiple target ion beams. The ionizing light can have higher energies to ionize atoms, thus ensuring that atoms can effectively lose electrons and form target ion beams.

[0048] Finally, in order to form an ion beam array, a guiding electric field needs to be applied to these newly generated target ions. The guiding electric field causes the target ions to move along a predetermined target direction. By controlling the strength and direction of the guiding electric field, the target ions can be made to form an ion beam. Moreover, these target ions are generated at their respective target spatial positions in an array form, so the formed ion beam naturally becomes an ion beam array.

[0049] According to embodiments of this disclosure, ion optical elements can be further used to further adjust or optimize the shape and orientation of the ion beam array. After completing these steps, an ordered ion beam array is obtained, which lays the foundation for subsequent experimental or application steps.

[0050] According to embodiments of this disclosure, for the obtained excited-state atomic cluster array, ionizing light is first used to make the excited-state atomic clusters into target ion beams, and then a guiding electric field is used to move the target ions along the target direction, thereby forming an ion beam array. Through the above method, a large number of target ions can be directly generated from the excited-state atomic cluster array, improving the working efficiency and yield of the ion source. For applications requiring a large number of ions, the array ion source provided by this method has low attenuation and high purity. In the field of nanofabrication, this enables more precise etching or surface modification of materials.

[0051] According to embodiments of this disclosure, the method for generating an ion beam array further includes: acquiring preset light intensity distribution information and an initial phase map; using the initial phase map as an initial value, optimizing the initial phase map using a nonlinear optimization method with the goal of minimizing the deviation between the preset light intensity distribution information and the initial light intensity distribution information corresponding to the initial phase map, to obtain the preset phase map.

[0052] Figure 3(a) schematically illustrates preset light intensity distribution information according to an embodiment of the present disclosure.

[0053] Figure 3(b) schematically illustrates a holographic phase map obtained based on preset light intensity distribution information according to an embodiment of the present disclosure.

[0054] Figure 3(c) schematically illustrates the light intensity distribution of excitation light obtained based on a holographic phase map according to an embodiment of the present disclosure.

[0055] According to embodiments of this disclosure, the preset light intensity distribution information can first be determined based on the spatial distribution of the required ion beam array. Referring to Figure 3(a), the preset light intensity distribution can be a 3*3 dot matrix, meaning that the experimenter needs to emit an ion beam array in a 3*3 dot matrix configuration.

[0056] According to embodiments of this disclosure, an iterative Fourier transform algorithm can then be used to iteratively generate a holographic phase map based on preset light intensity distribution information. The iterative Fourier transform algorithm can gradually optimize the solution through multiple Fourier transforms and their inverse transforms to obtain the holographic phase map. For example, the holographic phase map shown in Figure 3(b) is the holographic phase map determined based on the preset light intensity distribution information shown in Figure 3(a) and the iterative Fourier transform algorithm.

[0057] According to embodiments of this disclosure, the holographic phase map obtained above can be loaded with a spatial light modulator to achieve modulation of the incident light. Figure 3(c) shows a schematic diagram of the intensity distribution of the excitation light, which is obtained by loading the holographic phase map shown in Figure 3(b) using a spatial light modulator.

[0058] According to embodiments of this disclosure, an initial phase map is optimized using a nonlinear optimization method to obtain a preset phase map, including: performing a forward Fourier transform on the adjusted initial phase map to obtain adjusted light intensity distribution information; determining the light intensity distribution deviation based on the adjusted light intensity distribution information and the preset light intensity distribution information; and adjusting the phase map based on the light intensity distribution deviation to obtain the preset phase map.

[0059] According to embodiments of this disclosure, the method for determining a preset phase map can be determined through continuous iteration, and may specifically include the following steps.

[0060] S1, Generate an initial phase map with a random phase distribution, and determine the target amplitude distribution based on the preset light intensity distribution information. The amplitude mentioned above refers to the intensity distribution of the light wave on the target plane.

[0061] S2, calculate the complex amplitude distribution of the phase map after it propagates forward to the target plane using inverse Fourier transform. The above steps can transform the phase map from the spatial domain to the frequency domain.

[0062] S3, on the target plane, retain the phase component of the calculated complex amplitude distribution, and replace its amplitude component with the amplitude of the target amplitude distribution to ensure that the intensity distribution of the light wave on the target plane meets the preset requirements. Then, the corrected complex amplitude distribution is propagated back to the initial plane where the phase map is located through inverse Fourier transform.

[0063] S4: Extract the phase component from the complex amplitude distribution obtained from backpropagation, and use it as the intermediate phase map obtained in this iteration. Combine it with the plane wave amplitude to form a new phase map.

[0064] Repeat steps S2 to S4. In each iteration, calculate the root mean square error (RMSE) between the phase map after the new complex amplitude distribution propagates to the target plane and the preset light intensity distribution information. When the RMSE is less than the set threshold, the iteration ends and the preset phase map is obtained.

[0065] The above iterative process ensures that the phase map can be determined by stepwise optimization, and the preset phase map can make the distribution of light waves on the target plane as close as possible to the preset target light intensity distribution.

[0066] According to embodiments of this disclosure, by using an iterative Fourier transform algorithm, a relatively accurate preset phase diagram can be obtained based on preset light intensity distribution information. This allows for control over the light intensity distribution of the incident light, improving the efficiency and quality of ion beam array generation while reducing production time and costs. The preset phase diagram enables programmability and flexible operation of the array ion beam, allowing the ion beam array generation process to quickly adapt to different experimental designs and application requirements. Furthermore, iterative optimization to determine the preset phase diagram helps reduce inhomogeneities and distortions in the beam, thereby improving the overall performance and reliability of the ion beam array generation method.

[0067] According to embodiments of this disclosure, a magneto-optical trap is used to cool and confine a portion of the target atoms released from the atomic source within the trap, forming a cold atom cluster.

[0068] According to embodiments of this disclosure, a magneto-optical trap includes multiple cooling laser beams and a gradient magnetic field; the magneto-optical trap is used to cool and confine some target atoms released from an atomic source to form a cold atom cluster, comprising: irradiating the atomic beams released from the atomic source from multiple directions with multiple cooling laser beams to obtain multiple target atoms after deceleration; and using a gradient magnetic field to spatially confine the multiple target atoms after deceleration to form a cold atom cluster.

[0069] The aforementioned magneto-optical trap (MOT) is a technique that uses the combined action of magnetic and optical fields to trap and cool atoms.

[0070] According to embodiments of this disclosure, specifically, the magneto-optical trap includes a gradient magnetic field that typically generates a quadrupole magnetic field using a pair of coils with opposite current directions. This magnetic field gradient exerts a driving force on the atoms within it, causing them to move towards regions with weaker magnetic fields.

[0071] According to embodiments of this disclosure, the magneto-optical trap includes an optical field composed of multiple cooled laser beams, which can irradiate atoms from different directions using several red-detuned (i.e., frequency slightly lower than the atomic transition frequency) laser beams. As atoms move relative to the laser beams, due to the Doppler effect, they tend to absorb photons in the opposite direction of their motion, thus slowing them down. This is the aforementioned use of an optical field to slow down the atomic beam emitted from the atomic source. Furthermore, due to the continuous absorption and re-emission of the laser, the motion of the atoms in the atomic beam gradually slows down, and the temperature decreases. This cooling method is called Doppler cooling. These slowly moving atoms are then trapped by a gradient magnetic field, forming cold atom clusters.

[0072] According to embodiments of this disclosure, the above steps utilize multiple cooling laser beams and a gradient magnetic field in magneto-optical trap technology to prepare cold atomic clusters. The magneto-optical trap achieves highly efficient cooling of atoms, bringing multiple atoms to an ultra-low temperature state close to absolute zero. Furthermore, the spatial confinement effect of the gradient magnetic field forms high-density cold atomic clusters, efficiently completing the preparation of the atomic clusters required by this scheme.

[0073] According to embodiments of this disclosure, the cold atoms in the cold atom group include rubidium atoms.

[0074] According to embodiments of this disclosure, rubidium atoms possess electronic transition energy levels suitable for laser cooling, enabling rubidium atoms emitted from a rubidium atom source to be effectively cooled to near-absolute zero temperatures using techniques such as Doppler cooling and Zeeman cooling. The cold atom cluster may also include rubidium isotopes. 87 Rb atoms.

[0075] According to embodiments of this disclosure, the following is based on 87 The atomic groups composed of Rb atoms describe the method for generating ion beam arrays.

[0076] Figure 4 An image of an ion beam array according to an embodiment of the present disclosure is shown schematically.

[0077] According to embodiments of this disclosure, a magneto-optical trap is used to cool and trap neutral particles. 87 Rb atoms form cold atomic clusters.

[0078] A preset phase map is loaded using a spatial light modulator, and excitation light is obtained through incident light. Then, irradiating cold atomic clusters with the excitation light allows for the selective generation of the ground-state 5S atoms. 1 / 2 Atom excited to excited state 5P 3 / 2 The preset phase map can be obtained by optimizing the phase mask using an iterative Fourier transform algorithm, generating the target light intensity distribution on the target plane. The incident light can be a laser with a wavelength of 780 nanometers (nm).

[0079] Using ionization light to excite the state 87 The Rb atom array is ionized, producing 87 Rb + An ion array is formed; finally, a guiding electric field is used to pull out the ions, thus forming an ion beam array. The ionizing light can be a laser with a wavelength range of 475 nanometers (nm) to 480 nanometers (nm).

[0080] If a spatial light modulator is used to load the preset phase diagram in Figure 3(b), after processing with ionized light and a guiding electric field, the following can be obtained: Figure 4 The 3 images captured by the CMOS (Complementary Metal-Oxide-Semiconductor) camera shown are 3. Ion beam array image.

[0081] The embodiments of this disclosure have been described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of this disclosure. Although various embodiments have been described above, this does not mean that the measures in the various embodiments cannot be used advantageously in combination. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of this disclosure, and all such substitutions and modifications should fall within the scope of this disclosure.

Claims

1. A method for generating an ion beam array, characterized in that, include: Excitation light is obtained by phase modulation of incident light emitted from an incident light source using a spatial light modulator loaded with a preset phase diagram; The excitation light is used to irradiate the cold atom cluster, causing multiple target cold atoms located at target spatial positions within the cold atom cluster to undergo atomic transitions, thereby obtaining an excited-state atom cluster array. The target spatial positions are determined based on the preset phase diagram. Ionizing light and a guiding electric field are sequentially applied to the excited-state atomic cluster array, causing the excited-state atomic cluster array to emit multiple target ion beams to form an ion beam array.

2. The method for generating an ion beam array according to claim 1, characterized in that: The step of sequentially applying ionizing light and a guiding electric field to the excited-state atomic cluster array, causing the excited-state atomic cluster array to emit multiple target ion beams to form an ion beam array, includes: Irradiating the excited-state atomic cluster array with ionizing light causes multiple target atomic clusters in the excited-state atomic cluster array to undergo ionization reactions, thereby generating multiple target ion beams; A guiding electric field is applied to multiple target ion beams to move them along the target direction, thereby forming an ion beam array.

3. The method for generating an ion beam array according to claim 1, characterized in that, Also includes: Acquire preset light intensity distribution information and initial phase map; Using the initial phase map as the initial value, and with the goal of minimizing the deviation between the preset light intensity distribution information and the initial light intensity distribution information corresponding to the initial phase map, the initial phase map is optimized using a nonlinear optimization method to obtain the preset phase map.

4. The method for generating an ion beam array according to claim 3, characterized in that, The optimization of the initial phase map using a nonlinear optimization method to obtain a preset phase map includes: The adjusted initial phase map is subjected to inverse Fourier transform to obtain the adjusted light intensity distribution information; The light intensity distribution deviation is determined based on the adjusted light intensity distribution information and the preset light intensity distribution information; The phase diagram is adjusted based on the light intensity distribution deviation to obtain the preset phase diagram.

5. The method for generating an ion beam array according to claim 1, characterized in that, Also includes: A magneto-optical trap is used to cool and trap some of the target atoms released from the atomic source, forming a cold atom cluster.

6. The method for generating an ion beam array according to claim 5, characterized in that: The magneto-optical trap includes multiple cooled laser beams and a gradient magnetic field; The method of using a magneto-optical trap to cool and confine a portion of the target atoms released from the atomic source within the magneto-optical trap to form cold atom clusters includes: Multiple cooled laser beams are used to irradiate atomic beams emitted from an atomic source from multiple directions to obtain multiple target atoms after deceleration; A gradient magnetic field is used to spatially confine multiple target atoms after deceleration, in order to form cold atom clusters.

7. The method for generating an ion beam array according to any one of claims 1-6, characterized in that, The cold atoms in the cold atom group include rubidium atoms.

8. The method for generating an ion beam array according to any one of claims 1-6, characterized in that, The wavelength of the incident light is 780 nm.

9. The method for generating an ion beam array according to any one of claims 1-6, characterized in that, The wavelength of the ionizing light is 475nm~480nm.

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