Dual cavity pressure sensor with flexible corrugated diaphragm

Abstract

This invention relates to the field of dual-cavity pressure sensors, and discloses a dual-cavity pressure sensor with a flexible corrugated diaphragm, comprising: a corrugated diaphragm, a pressure-sensing layer, and a substrate; the corrugated diaphragm is disposed on the upper side of the pressure-sensing layer; the pressure-sensing layer is sealed on the upper side of the substrate; a first pressure-sensing cavity and a second pressure-sensing cavity are spaced apart on the side of the pressure-sensing layer near the substrate; deformation sensing components are disposed inside and / or outside the first and second pressure-sensing cavities; the deformation sensing components include a resistance sensing part or a capacitance sensing part; the resistance sensing part is disposed inside the corrugated diaphragm; the capacitance sensing part is disposed inside the first and second pressure-sensing cavities. The flexible corrugated diaphragm effectively alleviates the fatigue fracture problem caused by stress concentration in the pressure-sensing layer, extending the service life of the sensor; the combined resistance and capacitance measurement improves detection sensitivity.

Description

Technical Field

[0001] This invention relates to the field of dual-chamber pressure sensors, and in particular to dual-chamber pressure sensors with flexible corrugated diaphragms. Background Technology

[0002] Pressure sensors, as important sensor devices, have extremely wide applications in many fields such as industrial automation, medical equipment, and environmental monitoring. However, traditional single-chamber pressure sensors have some limitations in design and performance, which to some extent restrict their application range and service life. Limitations of Traditional Single-Cavity Pressure Sensors: Most traditional single-chamber pressure sensors employ a single sensing mechanism, with its core component being a pressure-sensing diaphragm. This diaphragm withstands pressure and deforms during operation, thereby converting the pressure signal. However, this structure has a significant drawback: stress concentration easily occurs at the center and connection points of the pressure-sensing diaphragm. This stress concentration leads to gradual fatigue damage to the diaphragm during long-term use, especially under cyclic dynamic loads, significantly increasing the risk of fatigue fracture.

[0003] Generally, the thinner the diaphragm, the greater the deformation under the same pressure, and therefore the higher its sensitivity. However, this high sensitivity comes at the cost of mechanical strength. Reducing the diaphragm thickness significantly decreases its ability to withstand pressure, thus reducing its mechanical strength. This means that under high-intensity or high-frequency pressure, the diaphragm is more prone to breakage or damage. Conversely, increasing the diaphragm thickness to improve its mechanical strength enhances its pressure resistance and fatigue resistance, but at the same time reduces its sensitivity. Traditional single-chamber pressure sensors struggle to simultaneously achieve high sensitivity and high reliability in practical applications. Summary of the Invention

[0004] To address the aforementioned technical problems, the present invention provides a dual-cavity pressure sensor with a flexible corrugated diaphragm, comprising: a corrugated diaphragm, a pressure-sensing layer, and a substrate; the corrugated diaphragm is disposed on the upper side of the pressure-sensing layer; the pressure-sensing layer is sealed on the upper side of the substrate; a first pressure-sensing cavity and a second pressure-sensing cavity are provided on the side of the pressure-sensing layer near the substrate, which are spaced apart; deformation sensing components are disposed inside and / or outside the first pressure-sensing cavity and the second pressure-sensing cavity.

[0005] Optionally, the deformation sensing component includes a resistance sensing part or a capacitance sensing part; the resistance sensing part is disposed inside the corrugated diaphragm; the capacitance sensing part is disposed inside the first pressure sensing chamber and the second pressure sensing chamber.

[0006] Optionally, the resistance sensing unit and the capacitance sensing unit can operate simultaneously or independently; when the sensed pressure is less than or equal to the set threshold, the simultaneous operation mode is adopted; when the sensed pressure is greater than the set threshold, the independent operation mode is adopted.

[0007] Optionally, the corrugated diaphragm includes an integrally formed first corrugated portion, a second corrugated portion, and a flat portion; the first corrugated portion and the second corrugated portion are pressure-sensing portions, used to sense external pressure and transmit the pressure to the flat portion; the cross-sectional curve of the corrugated portion is a periodic curve; the flat portion is a joint portion, which is attached to the upper side of the pressure-sensing layer and transmits pressure thereto; the first corrugated portion is located directly above the first pressure-sensing cavity; the second corrugated portion is located directly above the second pressure-sensing cavity.

[0008] Optionally, the resistance sensing part is disposed inside the flat part; the resistance sensing part is used to sense the deformation of the corrugated part in the radial direction; the resistance sensing part includes a first strain resistor and a second strain resistor; the first strain resistor is located directly below the first corrugated part, and the second strain resistor is located directly below the second corrugated part.

[0009] Optionally, the first strain gauge includes a first input terminal, a first output terminal, a second input terminal, and a second output terminal.

[0010] Optionally, the operating modes of the resistance sensing unit include: a dual-cavity independent operating mode, in which the first input terminal and the first output terminal form a first test resistor, and the second input terminal and the second output terminal form a second test resistor, wherein the first test resistor and the second test resistor operate independently; and a dual-cavity combined operating mode, in which the first output terminal and the second input terminal are connected, and in this case, the first strain gauge and the second strain gauge are connected in series.

[0011] Optionally, a first upper electrode and a second upper electrode are respectively provided on the top of the first pressure-sensing cavity and the second pressure-sensing cavity; a first lower electrode and a second lower electrode are respectively provided on the upper side of the substrate corresponding to the positions of the first pressure-sensing cavity and the second pressure-sensing cavity; and a through hole for communicating with the outside is provided on the substrate.

[0012] Optionally, the substrate is provided with a first lead through-hole, a second lead through-hole, a third lead through-hole, and a fourth lead through-hole; the first lead through-hole and the second lead through-hole are connected to a first pressure-sensing cavity; the third lead through-hole and the fourth lead through-hole are connected to a second pressure-sensing cavity; the first lead through-hole, the second lead through-hole, the third lead through-hole, and the fourth lead through-hole are respectively connected to an external first terminal, a second terminal, a third terminal, and a fourth terminal; the first upper electrode is connected to the second terminal, the first lower electrode is connected to the first terminal, the second upper electrode is connected to the third terminal, and the second lower electrode is connected to the fourth terminal.

[0013] Optionally, the capacitance sensing unit can operate in the following modes: a dual-cavity independent operating mode, where the positive and negative terminals of the sensing end are connected to the first and second terminals respectively to measure the first capacitance; and the positive and negative terminals of the sensing end are connected to the third and fourth terminals respectively to measure the second capacitance; and a dual-cavity combined operating mode, where the first and fourth terminals are connected, and the second and third terminals are connected to measure the composite capacitance.

[0014] Compared with the prior art, the present invention achieves the following technical effects: 1. By attaching a flexible corrugated diaphragm to the upper side of the pressure-sensitive layer, the problem of fatigue fracture caused by stress concentration is effectively alleviated, thereby extending the service life of the sensor.

[0015] 2. The application of a flexible corrugated diaphragm can affect the detection sensitivity of the pressure sensor. Adopting a dual-cavity structure can improve the detection sensitivity and compensate for the impact of the application of the flexible corrugated diaphragm.

[0016] 3. The four independently configured measurement structures—dual resistors and dual capacitors—provide redundancy and enhance system reliability. The resistance mode is sensitive to diaphragm radial deformation, making it suitable for measuring static or slowly varying pressures, and it exhibits strong resistance to electromagnetic interference. The capacitance mode is sensitive to changes in electrode spacing, offering a fast response and making it suitable for dynamic or micro-pressure measurements. Simultaneous operation improves the overall system detection sensitivity and expands the measurement range. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of a dual-chamber pressure sensor with a flexible corrugated diaphragm according to an embodiment of the present invention; Figure 2 This is an exploded structural diagram of a dual-cavity pressure sensor with a flexible corrugated diaphragm according to an embodiment of the present invention. Figure 3 This is a cross-sectional schematic diagram of a dual-chamber pressure sensor with a flexible corrugated diaphragm provided in an embodiment of the present invention. Figure 4 This is a schematic diagram of the structure of the corrugated diaphragm in a dual-cavity pressure sensor with a flexible corrugated diaphragm according to an embodiment of the present invention. Figure 5 This is an internal schematic diagram of a dual-chamber pressure sensor with a flexible corrugated diaphragm provided in an embodiment of the present invention. Figure 6 Stress distribution diagram of a dual-cavity pressure sensor with a flexible corrugated diaphragm before and after bonding to the corrugated diaphragm, according to an embodiment of the present invention. Figure 7 This is a cross-sectional schematic diagram of the corrugated portion and the flat portion of the corrugated diaphragm in a dual-chamber pressure sensor with a flexible corrugated diaphragm provided in an embodiment of the present invention. Figure 8Schematic cross-section of the corrugated portion and the flat portion of the improved corrugated diaphragm in the dual-chamber pressure sensor with a flexible corrugated diaphragm provided by an embodiment of the present invention.

[0018] The realization of the object of the present invention, its functional characteristics and advantages will be further described in conjunction with embodiments and with reference to the accompanying drawings. Detailed Embodiments

[0019] It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0020] As Figures 1-8 shown, an embodiment of the present invention provides a dual-chamber pressure sensor with a flexible corrugated diaphragm, including: a corrugated diaphragm 1, a pressure-sensing layer 2, and a substrate 3; the corrugated diaphragm 1 is arranged on the upper side of the pressure-sensing layer 2; the pressure-sensing layer 2 is hermetically arranged on the upper side of the substrate 3; a first pressure-sensing chamber 21 and a second pressure-sensing chamber 22 are arranged at intervals on the side of the pressure-sensing layer 2 close to the substrate 3; a deformation sensing component is arranged inside and / or outside the first pressure-sensing chamber 21 and the second pressure-sensing chamber 22.

[0021] Optionally, the deformation sensing component includes a resistance sensing part or a capacitance sensing part; the resistance sensing part is arranged inside the corrugated diaphragm 1; the capacitance sensing part is arranged inside the first pressure-sensing chamber 21 and the second pressure-sensing chamber 22.

[0022] Optionally, as Figure 4 shown, the corrugated diaphragm 1 includes a first corrugated portion 11, a second corrugated portion 12, and a flat portion 13 integrally formed; the first corrugated portion 11 and the second corrugated portion 12 are pressure-sensing portions for sensing external pressure and conducting the pressure to the flat portion 13; the cross-sectional curve of the corrugated portion is a periodic curve; the flat portion 13 is a joint portion, and the flat portion 13 is attached to the upper side of the pressure-sensing layer 2 and conducts pressure to it; the first corrugated portion 11 is located directly above the first pressure-sensing chamber 21; the second corrugated portion 12 is located directly above the second pressure-sensing chamber 22.

[0023] Optionally, the resistance sensing part is arranged inside the flat portion 13; the resistance sensing part is used to sense the deformation of the corrugated portion in the radial direction; the resistance sensing part includes a first strain resistor 14 and a second strain resistor 15; the first strain resistor 14 is located directly below the first corrugated portion 11, and the second strain resistor 15 is located directly below the second corrugated portion 12.

[0024] Optionally, both the first strain resistor 14 and the second strain resistor 15 are composed of a plurality of "J"-shaped bent portions connected in series, and the "J"-shaped bent portions are distributed at different positions (up, down, left, right) on the lower side of the corrugated portion; when the first strain resistor 14 and the second strain resistor 15 undergo tensile deformation, the resistance increases; their materials are carbon nanotubes, graphene composite materials, etc.

[0025] Optionally, the first strain gauge 14 includes a first input terminal 141, a first output terminal 142, a second input terminal 151, and a second output terminal 152.

[0026] Optionally, the operating modes of the resistance sensing unit include: Dual-cavity independent working mode: The first output terminal 142 is connected to the second input terminal 151. At this time, the first strain resistor 14 and the second strain resistor 15 are connected in series, and the resistance change is more obvious, thus improving the sensing sensitivity.

[0027] Dual-cavity combined working mode: the first input terminal 141 and the first output terminal 142 form the first test resistor, and the second input terminal 151 and the second output terminal 152 form the second test resistor. The first test resistor and the second test resistor work independently; the measurement accuracy is improved by averaging the measured values.

[0028] Optionally, the periodic curve may be a sine curve, a periodic triangular wave, a periodic rectangular wave, etc.

[0029] Optionally, the corrugations in the corrugated section can be concentric corrugated rings (circular, elliptical, rectangular, etc.) that spread outwards from the inside, or parallel corrugations that extend in one direction.

[0030] Optionally, the outer contour of the corrugated diaphragm 1 matches the outer contour of the pressure-sensitive layer 2; the projected area of ​​the first corrugated portion 11 is larger than that of the first pressure-sensitive cavity 21; and the projected area of ​​the second corrugated portion 12 is larger than that of the second pressure-sensitive cavity 22.

[0031] Optionally, the thickness of the corrugated portion is 25μm-200μm, and the thickness of the flat portion 13 is 10-50μm.

[0032] Optionally, a first upper electrode 41 and a second upper electrode 42 are respectively provided on the top of the first pressure-sensing cavity 21 and the second pressure-sensing cavity 22; a first lower electrode 43 and a second lower electrode 44 are respectively provided on the upper side of the substrate 3 at positions corresponding to the first pressure-sensing cavity 21 and the second pressure-sensing cavity 22; and a through hole for communicating with the outside is provided on the substrate 3.

[0033] Optionally, a first concave cavity 23 and a second concave cavity 24 are respectively provided on the top of the first pressure-sensing cavity 21 and the second pressure-sensing cavity 22; the diameter of the first pressure-sensing cavity 21 is larger than the diameter of the first concave cavity 23, and the diameter of the second pressure-sensing cavity 22 is larger than the diameter of the second concave cavity 24; a first upper electrode 41 and a second upper electrode 42 are respectively provided on the top of the first concave cavity 23 and the second concave cavity 24.

[0034] Optionally, the thickness of the pressure-sensitive layer 2 is 200-300 μm; the thickness of the substrate 3 is 300-600 μm; the depth of the first pressure-sensitive cavity 21 and the second pressure-sensitive cavity 22 is 100-200 μm; the depth of the first recess 23 and the second recess 24 is 50-100 μm; and the thickness between the first recess 23, the second recess 24 and the pressure-sensitive layer 2 is 5-50 μm.

[0035] Optionally, the first pressure-sensing cavity 21 is a cylindrical structure, a rectangular structure, etc.; the second pressure-sensing cavity 22 is a cylindrical structure, a rectangular structure, etc.; the first concave cavity 23 is a cylindrical structure, a rectangular structure, etc.; and the second concave cavity 24 is a cylindrical structure, a rectangular structure, etc.

[0036] Optionally, the first pressure-sensing cavity 21 and the second pressure-sensing cavity 22 have the same structure and size, and the first concave cavity 23 and the second concave cavity 24 have the same structure and size; the first pressure-sensing cavity 21 and the first concave cavity 23 are arranged longitudinally coaxially; the second pressure-sensing cavity 22 and the second concave cavity 24 are arranged longitudinally coaxially. Based on the first pressure-sensing cavity 21 and the second pressure-sensing cavity 22, the first concave cavity 23 and the second concave cavity 24 are respectively provided thereon to ensure that under pressure, the deformation of the cavity can be effectively transmitted to the change in resistance and / or capacitance, thereby improving the sensitivity of the sensor.

[0037] Optionally, the first upper electrode 41 and the second upper electrode 42 are circular thin sheet electrodes of the same size; the first lower electrode 43 and the second lower electrode 44 are circular thin sheet electrodes of the same size; the diameter of the first upper electrode 41 is smaller than the diameter of the first lower electrode 43; the diameter of the first lower electrode 43 is larger than the diameter of the first cavity 23 and smaller than the diameter of the first pressure-sensing cavity 21.

[0038] Optionally, the pressure-sensitive layer 2 and the substrate 3 are rectangular entities with the same shape, and the first pressure-sensitive cavity 21 and the second pressure-sensitive cavity 22 are symmetrically arranged on both sides of the bottom of the pressure-sensitive layer 2.

[0039] Optionally, the substrate 3 is provided with a first lead through hole 31, a second lead through hole 32, a third lead through hole 33, and a fourth lead through hole 34; the first lead through hole 31 and the second lead through hole 32 are connected to the first pressure sensing cavity 21; the third lead through hole 33 and the fourth lead through hole 34 are connected to the second pressure sensing cavity 22; the first lead through hole 31, the second lead through hole 32, the third lead through hole 33, and the fourth lead through hole 34 are respectively connected to the external first terminal, the second terminal, the third terminal, and the fourth terminal; the first upper electrode 41 is connected to the second terminal, the first lower electrode 43 is connected to the first terminal, the second upper electrode 42 is connected to the third terminal, and the second lower electrode 44 is connected to the fourth terminal.

[0040] Optionally, the first upper electrode 41 is connected to the second upper electrode 42, and the first lower electrode 43 is connected to the second lower electrode 44; in this case, the electrodes in the two pressure-sensing chambers combine to form a large capacitor, improving sensing sensitivity. Alternatively, the first upper electrode 41 and the first lower electrode 43 form a first capacitor, and the second upper electrode 42 and the second lower electrode 44 form a second capacitor, with the first and second capacitors operating independently; by averaging the measured values, measurement accuracy is improved.

[0041] Optionally, the capacitive sensing unit can operate in the following ways: Dual-chamber independent working mode: When the positive and negative terminals of the detection end are connected to the first and second terminals respectively, the first capacitance is measured (the measured value is the pressure of the first pressure-sensing chamber); when the positive and negative terminals of the detection end are connected to the third and fourth terminals respectively, the second capacitance is measured (the measured value is the pressure of the second pressure-sensing chamber). Dual-cavity combined working mode: the first terminal is connected to the fourth terminal, the second terminal is connected to the third terminal, the positive / negative terminal of the detection end is connected to the first / fourth terminal, and the negative / positive terminal of the detection end is connected to the second / third terminal to measure the composite capacitance (the measured value is the composite pressure of the first and second pressure-sensing cavities).

[0042] Optionally, the resistance sensing unit and the capacitance sensing unit can operate simultaneously or independently; when the sensed pressure is less than or equal to the set threshold, the simultaneous operation mode is adopted; when the sensed pressure is greater than the set threshold, the independent operation mode is adopted.

[0043] Optionally, a self-test function (two-resistance self-test or two-capacitor self-test) is also included before measurement. The pressure of the first pressure sensing chamber and the pressure of the second pressure sensing chamber can be measured separately and the measurement results can be compared. When the difference is within the specified range, the two pressure sensing chambers are in a qualified state. The independent working mode or combined working mode of the resistance sensing unit (or, capacitance sensing unit) can be selected as needed. If the difference exceeds the specified range, the two measured values ​​are averaged and the pressure sensing chamber that is close to the average value is selected as the measuring chamber.

[0044] Optionally, the corrugated diaphragm 1 is made of silicone, PDMS, hydrogel, parylene-C, etc.; the pressure-sensitive layer 2 is made of monocrystalline silicon; and the substrate 3 is made of glass (such as BF33 or Pyrex).

[0045] Optionally, the periodic curve is a sine curve, and the corrugations are concentric corrugated rings spreading outwards. The thickness of the corrugated portions (11, 12) is *a* (distance between crests and troughs), the wave pitch is *b* (distance between two crests / troughs), the thickness of the flat portions is *h*, where *a* = *b* = 3*h*, and the thickness at the thinnest point of the pressure-sensitive layer is *a* (i.e., the thickness corresponding to the cavity). After attaching the corrugated diaphragm 1, the stress at the pressure-sensitive deformation point of the pressure-sensitive layer 2 is significantly reduced, and the stress distribution in the middle of the pressure-sensitive layer 2 is also improved.

[0046] Optionally, the structure of the corrugated diaphragm is optimized using methods such as finite element analysis. The periodic curve is a sine curve, and the corrugations are concentric corrugated rings spreading from the inside out. A concentric array of annular grooves is provided on the flat portion, with a depth of h and a width of h / 2. Each annular groove is positioned directly below each wave crest. The resistance sensing part is located in the middle (through the annular grooves) or at the top of the flat portion (fitting the lower curve of the corrugated portion but not in contact with the annular grooves). In this embodiment, a=b=3h, and the thickness of the thinnest part of the pressure-sensing layer is a (i.e., the thickness corresponding to the cavity). After attaching the corrugated diaphragm 1 with the annular grooves, the stress distribution in the middle of the pressure-sensing layer 2 and the stress distribution at the pressure-sensing deformation point are more uniform than when the original corrugated diaphragm 1 was attached, which helps improve the linearity of the pressure sensor and eliminates high-stress points to increase the damage threshold.

[0047] The dual-cavity pressure sensor employs a dual-cavity structure, comprising two pressure-sensing cavities sharing a single pressure-sensing layer 2. When pressure is applied to the pressure-sensing layer 2, its deformation causes a change in the electrode spacing within the two cavities, resulting in changes in resistance and / or capacitance. During pressure measurement, the two cavities can work collaboratively, and two testing mechanisms can also work in tandem, thereby improving the sensor's accuracy and response speed. A single testing mechanism can be used to reduce system power consumption; alternatively, both testing mechanisms can be employed simultaneously to enhance detection accuracy. The dual-cavity design increases the sensor's effective sensing area, improving the resistance and / or capacitance response sensitivity to pressure changes. The dual-cavity structure enables precise capture of minute pressure changes, making it suitable for high-precision measurement applications.

[0048] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.

Claims

1. A dual-chamber pressure sensor with a flexible corrugated diaphragm, comprising: A corrugated diaphragm, a pressure-sensitive layer, and a substrate; the corrugated diaphragm is disposed on the upper side of the pressure-sensitive layer; the pressure-sensitive layer is sealed on the upper side of the substrate; the pressure-sensitive layer has a first pressure-sensitive cavity and a second pressure-sensitive cavity spaced apart on the side near the substrate; Deformation sensing components are provided inside and / or outside the first pressure-sensing cavity and the second pressure-sensing cavity.

2. The dual-chamber pressure sensor with a flexible corrugated diaphragm as described in claim 1, characterized in that, in, The deformation sensing component includes a resistance sensing part or a capacitance sensing part; the resistance sensing part is disposed inside the corrugated diaphragm; the capacitance sensing part is disposed inside the first pressure sensing chamber and the second pressure sensing chamber.

3. The dual-chamber pressure sensor with a flexible corrugated diaphragm as described in claim 2, characterized in that, in, The resistance sensing unit and the capacitance sensing unit can operate simultaneously or independently; when the sensed pressure is less than or equal to the set threshold, the simultaneous operation mode is adopted; when the sensed pressure is greater than the set threshold, the independent operation mode is adopted.

4. The dual-chamber pressure sensor with a flexible corrugated diaphragm as described in claim 3, characterized in that, in, The corrugated diaphragm includes an integrally formed first corrugated portion, a second corrugated portion, and a flat portion; the first corrugated portion and the second corrugated portion are pressure-sensing portions, used to sense external pressure and transmit the pressure to the flat portion; the cross-sectional curve of the corrugated portion is a periodic curve; the flat portion is a joint portion, which is attached to the upper side of the pressure-sensing layer and transmits pressure thereto; the first corrugated portion is located directly above the first pressure-sensing cavity; The second corrugated section is located directly above the second pressure-sensing chamber.

5. The dual-chamber pressure sensor with a flexible corrugated diaphragm as described in claim 4, characterized in that, in, A resistance sensing unit is disposed inside the flat portion; the resistance sensing unit is used to sense the radial deformation of the corrugated portion; the resistance sensing unit includes a first strain resistor and a second strain resistor; the first strain resistor is located directly below the first corrugated portion, and the second strain resistor is located directly below the second corrugated portion.

6. The dual-chamber pressure sensor with a flexible corrugated diaphragm as described in claim 5, characterized in that, in, The first strain gauge includes a first input terminal, a first output terminal, a second input terminal, and a second output terminal.

7. The dual-chamber pressure sensor with a flexible corrugated diaphragm as described in claim 6, characterized in that, in, The resistance sensing unit operates in two modes: a dual-cavity independent operating mode, in which the first input terminal and the first output terminal form a first test resistor, and the second input terminal and the second output terminal form a second test resistor, with the first test resistor and the second test resistor operating independently; and a dual-cavity combined operating mode, in which the first output terminal and the second input terminal are connected, and the first strain gauge and the second strain gauge are connected in series.

8. The dual-chamber pressure sensor with a flexible corrugated diaphragm as described in claim 3, characterized in that, in, A first upper electrode and a second upper electrode are respectively provided on the top of the first pressure-sensing cavity and the second pressure-sensing cavity; a first lower electrode and a second lower electrode are respectively provided on the upper side of the substrate corresponding to the positions of the first pressure-sensing cavity and the second pressure-sensing cavity; and a through hole for connecting to the outside is provided on the substrate.

9. The dual-chamber pressure sensor with a flexible corrugated diaphragm as described in claim 8, characterized in that, in, The substrate is provided with a first lead through hole, a second lead through hole, a third lead through hole, and a fourth lead through hole; the first lead through hole and the second lead through hole are connected to the first pressure sensing cavity; the third lead through hole and the fourth lead through hole are connected to the second pressure sensing cavity; the first lead through hole, the second lead through hole, the third lead through hole, and the fourth lead through hole are respectively connected to the external first terminal, the second terminal, the third terminal, and the fourth terminal; the first upper electrode is connected to the second terminal, the first lower electrode is connected to the first terminal, the second upper electrode is connected to the third terminal, and the second lower electrode is connected to the fourth terminal.

10. The dual-chamber pressure sensor with a flexible corrugated diaphragm as described in claim 9, characterized in that, in, The capacitive sensing unit operates in the following modes: a dual-cavity independent operating mode, in which the positive and negative terminals of the sensing end are connected to the first terminal and the second terminal respectively to measure the first capacitance; and a dual-cavity combined operating mode, in which the first terminal and the fourth terminal are connected, and the second terminal and the third terminal are connected to measure the combined capacitance.

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