Multi-head automatic pitch varying adsorption device and calibration method thereof

Abstract

This invention discloses a multi-head automatic variable-distance adsorption device, comprising a support, multiple adsorption mechanisms, a displacement mechanism, a calibration component, and a controller. Each adsorption mechanism includes a cylinder, a suction tube, and a suction nozzle. The displacement mechanism connects to and drives the multiple adsorption mechanisms to move closer to or further away from each other. The calibration component, including a positioning column and a calibration plate, is used to calibrate the distance between the adsorption mechanisms. The controller stores multiple sets of operating data for the displacement mechanism and controls the displacement mechanism to operate accordingly based on different operating data. This multi-head automatic variable-distance adsorption device only requires one calibration before use. During subsequent operations, if a different sized chip is replaced, only the displacement mechanism needs to be adjusted to the corresponding operating parameters, and the adsorption mechanism automatically moves to the corresponding position. This eliminates the need for repeated position adjustments or calibrations, ensuring production rhythm and improving production efficiency.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor equipment technology, and specifically relates to a multi-head automatic variable-distance adsorption device. Background Technology

[0002] In the field of semiconductor chip testing, due to significant differences in tray and product dimensions, the distance between adjacent vacuum adsorption structures needs to be adjusted according to different products. When the product is small, the distance between adjacent vacuum adsorption structures needs to be adjusted to be very small to meet the requirements. Existing vacuum adsorption structures are bulky, have low structural compactness, a small spacing adjustment range, low adjustment accuracy, and low product adaptability. Furthermore, existing spacing adjustment structures are cumbersome and the adjustment actions are complex.

[0003] The information disclosed in this background section is intended only to enhance the understanding of the overall background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0004] The purpose of this invention is to provide a multi-head automatic variable-distance adsorption device to solve the adsorption problem of chips of different sizes.

[0005] To achieve the above objectives, a specific embodiment of the present invention provides a multi-head automatic variable-distance adsorption device, including a support, multiple adsorption mechanisms, a displacement mechanism, a calibration component, and a controller. Each adsorption mechanism includes a cylinder, a suction tube, and a suction nozzle. The cylinder is movably supported on the support, the suction tube is connected to the output shaft of the cylinder and is used to connect to an external negative pressure device, and the suction nozzle is detachably fixed to the suction tube. The displacement mechanism is fixed on the support and connects to and drives the multiple adsorption mechanisms to move closer or further apart from each other. The calibration component is used to calibrate the distance of the adsorption mechanisms. The calibration component includes a positioning post and a calibration plate. The positioning post is detachably fixed to the suction tube, and the calibration plate has multiple calibration holes for the positioning post to be inserted. The controller stores multiple sets of operating data of the displacement mechanism, and the controller is used to control the displacement mechanism to operate accordingly based on different operating data.

[0006] In one or more embodiments of the present invention, the bracket includes a base plate, a first guide rail fixed to the base plate, and a plurality of first sliders supported on the first guide rail. The first guide rail extends along the pitch direction of the adsorption mechanism, and at least a portion of the cylinders are respectively fixed on the plurality of first sliders.

[0007] In one or more embodiments of the present invention, the base plate is provided with a plurality of first guide rails, and each first guide rail is supported by a plurality of first sliders for fixing the cylinder.

[0008] In one or more embodiments of the present invention, the adsorption mechanism is distributed on the base plate along the length direction of the base plate, including a fixed adsorption mechanism in the middle position and a movable adsorption mechanism disposed on both sides of the fixed adsorption mechanism. The cylinder of the fixed adsorption mechanism is directly fixed to the base plate, and the cylinder of the movable adsorption mechanism is fixed to the first slider.

[0009] In one or more embodiments of the present invention, the adsorption mechanism further includes a transfer block fixed to the cylinder output shaft, and the transfer block in the movable adsorption mechanism includes a fixed part connected to the cylinder output shaft, and a protrusion connected to the fixed part and protruding towards the fixed adsorption mechanism, and the suction tube is fixed to the protrusion.

[0010] In one or more embodiments of the present invention, an elongated hole extending along its own length is provided on the base plate. The adsorption mechanism and the displacement mechanism are disposed on two opposite surfaces of the base plate. The displacement mechanism includes a driving component and a variable pitch guide plate. The driving component is fixed on the base plate and is connected to and drives the variable pitch guide plate to move in the vertical direction. The variable pitch guide plate has a plurality of inclined elongated guide holes with different inclination angles. The number of guide holes is the same as that of the moving adsorption mechanism and they correspond one-to-one. A convex shaft is fixed on the cylinder of the moving adsorption mechanism. The convex shaft passes through the elongated hole and is inserted into the corresponding guide hole.

[0011] In one or more embodiments of the present invention, a second guide rail extending in a vertical direction is provided on the base plate, a second slider is supported on the second guide rail, and the variable pitch guide plate is supported on the second slider.

[0012] In one or more embodiments of the present invention, the drive assembly includes a motor, a lead screw, and a fixed block. The motor is fixed to a base plate and is connected to and drives the lead screw to rotate. The fixed block is fixed to a variable pitch guide plate, and the lead screw is connected to and threadedly engaged with the fixed block.

[0013] In one or more embodiments of the present invention, the displacement mechanism further includes an upper limit sensor and a lower limit sensor fixed to the base plate, and an upper limit plate and a lower limit plate fixed to the variable pitch guide plate. The upper limit plate moves to the upper limit sensor when the convex shaft moves to the bottom of the guide hole, and the lower limit plate moves to the lower limit sensor when the convex shaft moves to the top of the guide hole.

[0014] This invention also provides a calibration method for the above-mentioned multi-head automatic variable-gap adsorption device, comprising the following steps:

[0015] S1. Install positioning posts on all straws and place the calibration plate under the positioning posts;

[0016] S2. The controller controls the displacement mechanism to drive the adsorption mechanism to move above a calibration hole. The cylinder drives the suction tube to move down, causing the positioning post to insert into the calibration hole. The controller records the operation data of the displacement mechanism corresponding to the calibration hole. The cylinder drives the suction tube to move up, and the positioning post disengages from the positioning hole.

[0017] S3. Repeat step S2 until the controller records the displacement mechanism operation data corresponding to all calibration holes.

[0018] Compared with the prior art, the multi-head automatic variable-distance adsorption device of the present invention only needs to be calibrated once before being put into use. In subsequent operations, if chips of different sizes are replaced, the displacement mechanism only needs to be adjusted to the corresponding operating parameters, and the adsorption mechanism will automatically move to the corresponding position. There is no need to repeatedly adjust the position or repeat the calibration, which ensures the production rhythm and improves the production efficiency. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of a multi-head automatic variable-distance adsorption device in one embodiment of the present invention;

[0021] Figure 2 for Figure 1 A magnified view of a portion of the image;

[0022] Figure 3 This is a view of a multi-head variable-gap adsorption device according to an embodiment of the present invention;

[0023] Figure 4 This is a rear view of a multi-head variable-distance adsorption device according to an embodiment of the present invention;

[0024] Figure 5 This is a schematic diagram of a variable pitch guide plate in one embodiment of the present invention;

[0025] Figure 6 This is a schematic diagram of the base plate in one embodiment of the present invention.

[0026] Explanation of key figure labels:

[0027] 100-Multi-head automatic variable-pitch adsorption device, 10-Bracket, 11-Base plate, 111-Elongated hole, 12-First guide rail, 13-First slider, 14-Second guide rail, 15-Second slider, 16-Top plate, 161-Through hole, 20-Adsorption mechanism, 201-Fixed adsorption mechanism, 202-Moving adsorption mechanism, 21-Cylinder, 22-Suction tube, 23-Suction nozzle, 24-Adapter block, 241-Fixed part, 242-Protrusion, 25-Protruding shaft, 30-Displacement mechanism, 31-Variable pitch guide plate, 311-Guide hole, 32-Motor, 33-Screw, 34-Fixed block, 35-Upper limit sensor, 36-Lower limit sensor, 37-Upper limit plate, 38-Lower limit plate, 41-Positioning column, 42-Calibration plate, 43-Calibration hole. Detailed Implementation

[0028] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0029] like Figure 1-6 As shown, a multi-head automatic variable-distance adsorption device 100 according to an embodiment of the present invention includes a support 10, multiple adsorption mechanisms 20, a displacement mechanism 30, a controller (not shown), and a calibration assembly. Each adsorption mechanism 20 includes a cylinder 21, a suction tube 22, and a suction nozzle 23. The cylinder 21 is movably supported on the support 10, the suction tube 22 is connected to the output shaft of the cylinder 21 for connecting to an external negative pressure device, and the suction nozzle 23 is detachably fixed to the suction tube 22. The displacement mechanism 30 is fixed on the support 10 and is used to connect and drive at least some of the adsorption mechanisms 20 to move closer or further apart from each other. The calibration assembly includes a positioning post 41 and a calibration plate 42. The positioning post 41 is detachably fixed to the suction tube 22, and the calibration plate 42 has multiple calibration holes 43 for the positioning post 41 to be inserted into. The controller stores multiple sets of operating data for the displacement mechanism 30 corresponding to chips of different sizes, and controls the displacement mechanism 30 to perform corresponding operating actions according to different operating data.

[0030] In this embodiment, the multi-head automatic variable-distance adsorption device 100 connects a negative pressure device to the suction tube 22. After the cylinder 21 drives the suction tube 22 and the nozzle 23 to move down and adsorb the chip, the multi-head automatic variable-distance adsorption device 100 is moved to the target position, and the cylinder 21 drives the suction tube 22 and the nozzle 23 to move down and release the chip. Since the chips are of different sizes, the distance between the two nozzles 23 needs to be adjusted for adaptation when changing the target chip. To achieve precise variable distance, the adsorption mechanism 20 in this embodiment is calibrated by a calibration component before being put into use. The calibration plate 42 has multiple sets of calibration holes 43. The number of sets of calibration holes 43 is the same as the number of adsorption mechanisms 20 and corresponds one-to-one. Each set of calibration holes 43 contains multiple calibration holes 43, which correspond to the nozzle 23 positions corresponding to chips of different sizes.

[0031] In this embodiment, the multi-head automatic variable-distance adsorption device 100 only needs to be calibrated once before being put into use. During subsequent operations, if chips of different sizes are replaced, the displacement mechanism 30 only needs to be adjusted to the corresponding operating parameters, and the adsorption mechanism 20 will automatically move to the corresponding position. There is no need to repeatedly adjust the position or repeat the calibration, which ensures the production rhythm and improves production efficiency.

[0032] The calibration method for the multi-head automatic variable-gap adsorption device 100 in this embodiment includes the following steps:

[0033] S1. Install positioning posts on all straws and place the calibration plate under the positioning posts.

[0034] Specifically, before the multi-head automatic variable-gap adsorption device 100 is put into operation, the suction nozzle 23 is removed from the suction tube 22 and replaced with the positioning post 41, and then the calibration plate 42 is placed under the positioning post 41.

[0035] S2. The controller controls the displacement mechanism to drive the adsorption mechanism to move above a calibration hole. The cylinder controls the suction tube to move down, causing the positioning post to be inserted into the calibration hole. The controller records the operation data of the displacement mechanism corresponding to the calibration hole.

[0036] Specifically, the controller controls the displacement mechanism 30 to drive the adsorption mechanism 20 to move above the calibration hole 43, and the cylinder 21 drives the positioning column 41 to move down and insert into the calibration hole 43. The controller records the operating parameters of the displacement mechanism 30 corresponding to the calibration hole 43 at this time. Subsequently, the cylinder 21 drives the suction tube 22 to move up, and the positioning column 41 disengages from the calibration hole 43.

[0037] S3. Repeat step S2 until the controller records the displacement mechanism operation data corresponding to all calibration holes.

[0038] Specifically, the controller, displacement mechanism 30 and adsorption mechanism 20 repeat the above operations, all positioning posts 41 complete the position calibration of all calibration holes 43 in the corresponding group, and the controller records the operation data of the displacement mechanism 30 corresponding to all calibration holes 43, that is, the operation parameters of the displacement mechanism 30 corresponding to chips of different sizes.

[0039] After completing the calibration process using the above method, the multi-head automatic variable-distance adsorption device 100 completes its initial calibration. The positioning column 41 is then removed from the suction tube 22 and replaced with the suction nozzle 23, allowing it to be put into normal operation. In subsequent operations, the corresponding controller data can be selected based on the chip size, eliminating the need for recalibration.

[0040] In one embodiment, the support 10 includes a base plate 11, a first guide rail 12, and a plurality of first sliders 13. The first guide rail 12 is fixed to the base plate 11 and extends along the pitch direction of the adsorption mechanism 20. The first sliders 13 are supported on the first guide rail 12 and are movable on the first guide rail 12. At least a portion of the cylinder 21 is fixed to the first slider 13, and the adsorption mechanism 20 can move stably on the base plate 11 under the drive of the displacement mechanism 30.

[0041] Preferably, multiple first guide rails 12 are provided on the base plate 11, and multiple first sliders 13 are provided on each first guide rail 12. This arrangement increases the number of first sliders 13 supporting and fixing the adsorption mechanism 20, thereby further improving the stability of the adsorption mechanism 20 when it moves and avoiding jamming.

[0042] In one embodiment, not all adsorption mechanisms 20 need to move to achieve the change in distance. (See reference...) Figure 3 As shown, the adsorption mechanisms 20 are distributed along the length of the base plate 11, with the fixed adsorption mechanism 201 in the middle and the movable adsorption mechanisms 202 on both sides. The cylinder 21 in the fixed adsorption mechanism 201 is directly fixed to the base plate 11 and therefore cannot move, while the cylinders 21 in the movable adsorption mechanisms 202 on both sides are fixed to the first slider 13 and are driven by the displacement mechanism 30 to move closer to or away from the fixed adsorption mechanism 201.

[0043] Because the cylinder 21 is relatively large, while the straw 22 and the nozzle 23 are relatively small, directly fixing the straw 22 to the output shaft of the cylinder 21 might result in adjacent cylinders 21 touching, but the distance between the two straws 22 would still be too large, making it impossible to adsorb smaller chips. Therefore, preferably, the adsorption mechanism 20 also includes a connector block 24 fixed to the output shaft of the cylinder 21. The connector block 24 in the movable adsorption mechanism 202 includes a fixing part 241 fixedly connected to the output shaft of the cylinder 21, and a protrusion 242 connected to the fixing part 241 and protruding towards the centrally fixed adsorption mechanism 201. The straw 22 is fixed to the protrusion 242. This connector block 24 is used to eliminate the influence of the cylinder 21's volume on the distance between adjacent straws 22, that is, to ensure that adjacent straws 22 can move to the closest distance.

[0044] In one embodiment, an elongated hole 111 is provided on the base plate 11, extending along the length of the base plate 11. The adsorption mechanism 20 and the displacement mechanism 30 are respectively disposed on two opposite surfaces of the base plate 11. The displacement mechanism 30 includes a driving assembly and a variable-pitch guide plate 31. The driving assembly is fixed to the base plate 11 and connects to and drives the variable-pitch guide plate 31 to move in the vertical direction. The variable-pitch guide plate 31 has multiple inclined elongated guide holes 311 with different inclination angles. The number of guide holes 311 is the same as that of the moving adsorption mechanism 202 and they correspond one-to-one. A convex shaft 25 is fixed on the cylinder 21 in the moving adsorption mechanism 202. The convex shaft 25 passes through the elongated hole 311 and extends into the corresponding guide hole 311. Therefore, the vertical movement of the variable-pitch guide plate 311 driven by the driving assembly is converted into the horizontal movement of the moving adsorption mechanism 202, thereby completing the variable-pitch action. Furthermore, due to the different tilt angles, the moving speeds of the different moving adsorption mechanisms 202 are also different, ensuring that the distance between adjacent suction nozzles 23 remains the same.

[0045] Preferably, a second guide rail 14 extending vertically is provided on the base plate 11, and a second slider 15 is formed on the second guide rail 14 accordingly. The variable pitch guide plate 31 is fixed on the second slider 15 to improve the stability of the variable pitch guide plate 31 when it moves and to avoid displacement in other directions.

[0046] In one embodiment, the drive assembly includes a motor 32, a lead screw 33, and a fixing block 34. The motor 32 is fixed to the base plate 11, and the fixing block 34 is fixed to the variable pitch guide plate 31. One end of the lead screw 33 is connected to the output shaft of the motor 32, and the other end is connected to the fixing block 34 and engaged with it by threads. The motor 32 drives the lead screw 33 to rotate, and under the action of the threads, the rotation of the lead screw 33 is converted into the up-and-down movement of the fixing block 34 and the variable pitch guide plate 31.

[0047] Preferably, the displacement mechanism 30 further includes an upper limit sensor 35 and a lower limit sensor 36 fixed to the base plate 11, and an upper limit plate 37 and a lower limit plate 38 fixed to the variable pitch guide plate 31. The two sets of limit sensors and limit plates are used to limit the moving distance of the variable pitch guide plate 31. That is, when the convex shaft 25 moves to the top of the guide hole 311, the lower limit plate 38 moves to the lower limit sensor 36, and conversely, when the convex shaft 25 moves to the bottom of the guide hole 311, the upper limit plate 37 moves to the upper limit sensor 35. When the limit sensor senses the limit plate, the variable pitch guide plate 31 moves to the maximum displacement position, that is, the distance between adjacent suction nozzles 23 reaches the maximum, at which time the motor 32 stops.

[0048] In one embodiment, the bracket 10 further includes a top plate 16 fixed to the top of the base plate 11, and an upper limit sensor 35 fixed to the top plate 16. The top plate 16 has a through hole 161 for the conduit connecting the suction tube 22 and the cylinder 21 to pass through, making the entire multi-head automatic variable distance adsorption device 100 simpler and preventing the wiring harness from getting messy.

[0049] It will be apparent to those skilled in the art that this disclosure is not limited to the details of the exemplary embodiments described above, and that this disclosure can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of this disclosure is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this disclosure. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0050] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A multiple head automatic variable pitch suction device, characterized by, include: support; Multiple adsorption mechanisms are provided, each including a cylinder, a suction tube, and a suction nozzle. The cylinder is movably supported on the bracket, the suction tube is connected to the output shaft of the cylinder and is used to connect to an external negative pressure device, and the suction nozzle is detachably fixed to the suction tube. A displacement mechanism, fixed to the bracket, connects to and drives the plurality of adsorption mechanisms to move closer or further apart from each other; A calibration component is used to calibrate the distance of the adsorption mechanism. The calibration component includes a positioning post and a calibration plate. The positioning post is detachably fixed to the suction tube, and the calibration plate has a plurality of calibration holes for the positioning post to be inserted. as well as The controller stores multiple sets of operating data of the displacement mechanism, and the controller is used to control the displacement mechanism to perform corresponding operations according to different operating data.

2. The multiple head automatic variable pitch suction device of claim 1, wherein, The support includes a base plate, a first guide rail fixed to the base plate, and a plurality of first sliders supported on the first guide rail. The first guide rail extends along the pitch direction of the adsorption mechanism, and at least a portion of the cylinders are respectively fixed on the plurality of first sliders.

3. The multiple head automatic variable pitch suction device of claim 2, wherein, The base plate is provided with multiple first guide rails, and each first guide rail supports multiple first sliders for fixing the cylinder.

4. The multiple head automatic variable distance adsorbing apparatus according to claim 2, wherein The adsorption mechanism is distributed on the base plate along the length of the base plate, including a fixed adsorption mechanism in the middle position and movable adsorption mechanisms on both sides of the fixed adsorption mechanism. The cylinder of the fixed adsorption mechanism is directly fixed to the base plate, and the cylinder of the movable adsorption mechanism is fixed to the first slider.

5. The multiple head automatic variable pitch suction device of claim 4, wherein, The adsorption mechanism further includes a transfer block fixed to the cylinder output shaft, and the transfer block in the movable adsorption mechanism includes a fixed part connected to the cylinder output shaft, and a protruding part connected to the fixed part and protruding towards the fixed adsorption mechanism, and the suction tube is fixed to the protruding part.

6. The multiple head automatic variable pitch suction device of claim 2, wherein, The base plate has elongated holes extending along its length. The adsorption mechanism and the displacement mechanism are disposed on two opposite surfaces of the base plate. The displacement mechanism includes a drive assembly and a variable-pitch guide plate. The drive assembly is fixed to the base plate and connects to and drives the variable-pitch guide plate to move in the vertical direction. The variable-pitch guide plate has multiple inclined elongated guide holes with different inclination angles. The number of guide holes is the same as that of the moving adsorption mechanism and they correspond one-to-one. A convex shaft is fixed on the cylinder of the moving adsorption mechanism. The convex shaft passes through the elongated holes and is inserted into the corresponding guide holes.

7. The multiple head automatic variable distance adsorbing apparatus according to claim 6, wherein The base plate is provided with a second guide rail extending in the vertical direction, and a second slider is supported on the second guide rail. The variable pitch guide plate is supported on the second slider.

8. The multi-head automatic variable-gap adsorption device according to claim 6, characterized in that, The drive assembly includes a motor, a lead screw, and a fixed block. The motor is fixed to the base plate and is connected to and drives the lead screw to rotate. The fixed block is fixed to the variable pitch guide plate, and the lead screw is connected to the fixed block and threadedly engages with it.

9. The multi-head automatic variable-gap adsorption device according to claim 2, characterized in that, The displacement mechanism further includes an upper limit sensor and a lower limit sensor fixed to the base plate, and an upper limit plate and a lower limit plate fixed to the variable pitch guide plate. The upper limit plate moves to the upper limit sensor when the convex shaft moves to the bottom of the guide hole, and the lower limit plate moves to the lower limit sensor when the convex shaft moves to the top of the guide hole.

10. The calibration method for the multi-head automatic variable-gap adsorption device according to any one of claims 1-9, characterized in that, Includes the following steps: S1. Install positioning posts on all straws and place the calibration plate under the positioning posts; S2. The controller controls the displacement mechanism to drive the adsorption mechanism to move above a calibration hole. The cylinder drives the suction tube to move down, causing the positioning post to insert into the calibration hole. The controller records the operation data of the displacement mechanism corresponding to the calibration hole. The cylinder drives the suction tube to move up, and the positioning post disengages from the positioning hole. S3. Repeat step S2 until the controller records the displacement mechanism operation data corresponding to all calibration holes.

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