Optical fiber laser dicing machine

Abstract

The application provides a kind of fiber laser dicing machine;When cutting fragile, brittle materials such as solar semiconductor silicon wafer, battery piece, etc., only need to place the material to be dicing in the carrier, then drive the laser module and / or carrier movement through the drive module, make the light beam relative to the material, let the light beam irradiated by the laser module across the material, thereby completing the dicing, then the unloading module carries the material after the light beam across to the unloading box;Therefore, compared with the traditional manual control of the material to be dicing or the movement of the laser head to make the light beam relative to the material, the fiber laser dicing machine can effectively improve the processing efficiency, and at the same time, use automated equipment to complete the dicing of the material, which can effectively improve the processing precision and processing stability compared with manual dicing;The application belongs to the technical field of laser dicing machine.

Description

Technical Field

[0001] This invention belongs to the technical field of laser scribing machines, and particularly relates to a fiber laser scribing machine. Background Technology

[0002] In the production and processing of materials such as solar semiconductor silicon wafers and solar cells, it is often necessary to "cut" these materials to meet customer needs and the requirements of a specific product model. Because these materials are inherently fragile, they need to be cut using a non-contact laser method. However, if traditional manual processing techniques are used when producing and processing these fragile and brittle materials, operators need to carefully manipulate the movement of the material to be cut or the laser head, resulting in low efficiency during processing. Summary of the Invention

[0003] The purpose of this invention is to provide a fiber laser scribing machine to solve the technical problems described in the background art.

[0004] The fiber laser scribing machine includes: The dicing stage is equipped with a carrier and a drive module. The carrier holds the material to be diced. A laser module is set at a distance from the dicing stage. The laser module is used to irradiate the beam. The drive module is used to drive the laser module and / or the carrier to move, so that the beam and the material can move relative to each other, thereby allowing the beam to slice across the material. The material unloading box is equipped with a material unloading module, which is used to transport the material after the beam passes through to the material unloading box.

[0005] Based on the above technical solution, the present invention achieves the following beneficial effects: When cutting fragile and brittle materials such as solar semiconductor silicon wafers and solar cells, the material to be diced is simply placed in a carrier. Then, a drive module moves the laser module and / or the carrier, allowing the laser beam to move relative to the material. The laser beam then passes over the material, completing the dicing. Subsequently, the unloading module transports the material to the unloading box. Therefore, compared to the traditional method of manually moving the material to be diced or moving the laser head to allow relative movement between the beam and the material, this fiber laser dicing machine can effectively improve processing efficiency. At the same time, by using automated equipment to complete the dicing of materials, it can effectively improve processing accuracy and stability compared to manual dicing.

[0006] To further optimize the above technical solutions, they can be combined with one or more of the following implementation methods without conflict.

[0007] In some embodiments, the drive module may optionally include a laser gantry with a laser screw module for driving the laser module to move so that the beam passes over the material. According to the aforementioned technical solution, since the laser lead screw module can drive the lead screw to rotate via a motor, the laser module can achieve precise movement of the laser module, thereby improving the travel accuracy of the beam as it passes through the material.

[0008] In some embodiments, the unloading module includes an unloading gantry and a suction cup module. The unloading gantry is equipped with a movement drive module, which is used to drive the suction cup module to move laterally and vertically, so that the suction cup module can transport the material after the beam has passed to the unloading box. According to the technical solution, after the beam completes the dicing of the material, compared with manual feeding, the processing and loading efficiency can be further improved, and the risk of damage during feeding can be reduced.

[0009] In some embodiments, the fiber laser scribing machine may optionally include a dicing base, on which a dicing stage, a pusher screw module, and a pneumatic rod are mounted. The pusher screw module drives a movable seat, which is provided with a pusher finger that passes through the dicing stage and can move on the dicing stage. A lower floating plate located below the suction cup module is hinged to one side of the dicing stage. One end of the pneumatic rod is shaft-connected to the dicing base, and the other end is shaft-connected to the outer end of the lower floating plate, so that the lower floating plate is horizontal with the dicing stage. The unloading module also includes a limiting block, and a moving drive module is used to drive the limiting block to move up and down. After the material touched by the beam is transported and placed on the dicing stage, a portion of the material is located on the lower floating plate. The lateral drive module drives the suction cup module to move above the lower floating plate, and then the lifting drive module drives the suction cup module to descend. At this time, the limiting block presses down to fix the portion of the material on the dicing stage, and the suction cup module presses down and adsorbs the portion of the material on the lower floating plate. The lower floating plate is pushed down by the suction cup module to avoid it, thereby breaking the portion of the material on the lower floating plate apart from the other parts. Subsequently, the moving drive module drives the limiting block to rise and reset, drives the suction cup module to rise and transport the broken material to the unloading box, and the pneumatic rod drives the lower floating plate to reset to be horizontal with the dicing stage. The lead screw module drives the pusher to push the other portion of the material on the dicing stage onto the lower floating plate, ready to be broken apart.

[0010] According to the above technical solution, after the beam completes the dicing of the material, it can be transported to the dicing stage by the transport mechanism. Then, without the need for manual labor, the diced material can be diced by the automated mechanism, and the diced material can be transported to the unloading box for centralized storage, thereby further improving processing efficiency, processing stability, processing accuracy, and reducing the risk of material damage during processing.

[0011] In some implementations, the drive module includes: Several magnets are arranged at the bottom of the vehicle; The array is distributed among several first electromagnets on the dicing stage; The control host independently supplies each first electromagnet with electrical energy of a specific pattern to suspend the vehicle and drive it to move horizontally, rotate, lift, tilt, and fix in a certain position, so that the beam of light irradiated by the laser module moves relative to the material.

[0012] Based on the above technical solution, the present invention further achieves the following beneficial effects: 1. Compared to a single lead screw module, it can drive the vehicle to move, rotate, and tilt the material inside in multiple axes. 2. Compared to using multiple lead screw modules to drive multi-axis movement, rotation, and tilting of a vehicle, this method reduces hardware space requirements and improves movement efficiency. 3. When the first electromagnet is powered on or de-powered, the output voltage, current and limit can be controlled accurately and efficiently according to existing technical means. The first electromagnet has an extremely high response speed, thereby achieving accurate and high-speed control of the vehicle movement. 4. Conventional methods use motors as power to drive movement. However, motors rely on pulse signals to rotate and position themselves step by step, resulting in a fixed step angle. Therefore, there will always be a certain error when driving the object to the set position. This invention can further improve the accuracy of object movement by controlling voltage, current, and limit control electromagnets to drive the carrier.

[0013] In some implementations, an air outlet is provided above the dicing table to blow air onto the carrier or material, thereby using airflow and air pressure to assist in fixing the carrier and material.

[0014] Based on the above technical solution, the present invention further achieves the following beneficial effects: 1. Compared with the traditional method of fixing products by using a cylinder to drive the pressure block to press down, it can fix the product without contact. At the same time, when the airflow encounters an obstacle during the flow, it can change the original flow state, thereby reducing the risk of material damage and avoiding indentation when fixing materials on the carrier. 2. Compared to traditional hardware contact product fixing methods, airflow fixing can avoid obstructing the magnetic field and reduce interference with the magnetic field; 3. Compared to traditional hardware contact product fixing methods, fixing materials will not block the light beam, thus allowing the light beam to have a larger scoping range; 4. When fixing materials, that is, before or during the scribing of the material by the beam, the surface of the material can be cleaned by airflow, thereby improving the scribing quality.

[0015] In some implementations, a second electromagnet is installed above the dicing stage, and a laser module is located between the second electromagnet and the dicing stage. The control host independently supplies each second electromagnet with electrical energy of a specific pattern so that the second electromagnet assists in fixing the carrier and assists in driving the carrier to move.

[0016] According to the described technical solution, the present invention further achieves the following beneficial effects: 1. Compared with the traditional method of fixing products or carriers by using cylinders to drive the pressure block to press down, this technical solution will not block the light beam, so that the light beam has a larger slicing range. 2. When the first electromagnet drives the vehicle to move, the second electromagnet can be used to assist in driving the vehicle to move, thereby improving the efficiency and stability of the vehicle movement. In addition, when the vehicle stops at a certain position, the second electromagnet can further fix the vehicle, so that the beam can more stably slice the material inside the vehicle.

[0017] In some embodiments, the carrier consists of several material-supporting modules that can move relative to each other, and each material-supporting module is equipped with several magnets. After the beam passes over the material, the voltage and phase of each first electromagnet are independently controlled by the host machine, thereby driving each material support module and its adjacent material support module to move horizontally, rotate, lift, tilt, and fix in a certain position, so as to break apart different parts of the material at the same time. Then, the unloading module transports the broken material to the unloading box.

[0018] Based on the above technical solution, the present invention further achieves the following beneficial effects: 1. Once the beam has completed the dicing of the material, there is no need to set up a separate dicing station or a power mechanism for dicing, which can complete the dicing of the material, thereby reducing the size of the equipment and the preparation cost; 2. Since the material can be diced on the dicing stage, there is no need to move the material between the dicing stage and the dicing stage, thereby reducing the risk of material damage; 3. Because the material is split open at the same time, the splitting efficiency can be effectively improved compared to traditional splitting modules. 4. When the first electromagnet is powered on or de-powered, the output voltage, current and limit can be precisely and efficiently controlled by existing technology. The first electromagnet has a very high response speed, thereby improving the efficiency and stability of the splitting. 5. Compared with the traditional method of using pressure plates or clamps for splitting, it can effectively reduce the risk of product being crushed or clamped.

[0019] In some implementations, the dicing stage is equipped with at least two carriers, and the control host independently supplies each first electromagnet with electrical energy to deliver a specific pattern, thereby driving the carriers to interchange positions. According to the technical solution, when breaking apart materials within one or more carriers that have been sliced ​​by the laser beam, the laser beam emitted by the laser module can slice another material on another carrier, thereby reducing the waiting time between each process and further improving processing efficiency.

[0020] In some embodiments, alternatively, a fiber laser scribing machine may further include a dicing stage, on which a third electromagnet is disposed, and another carrier is placed on the dicing stage; The control host is used to independently supply each third electromagnet with electrical energy of a specific pattern to drive the carrier on the cleaving stage and each material support module of the carrier and its adjacent material support modules to move horizontally, rotate, lift, tilt and fix in a certain position. At the same time, the control host is also used to control the third electromagnet to work in conjunction with the first electromagnet. After the material in the carrier on the dicing stage is diced by the beam, the carrier on the dicing stage is driven to switch positions with the carrier on the slicing stage. At this time, the carrier on the slicing stage is transferred to the dicing stage for another material to be placed, while the material support module of the carrier on the slicing stage slices the material inside by horizontal movement, rotation, lifting, and tilting, and then the material is taken out by the unloading module.

[0021] According to the above technical solution, the present invention achieves the following beneficial effects: while the beam scribing the material on the scribing stage, the dicing stage can simultaneously dic the material on it, thereby reducing the waiting time when connecting various processes and further improving processing efficiency. Attached Figure Description

[0022] To more clearly illustrate the specific embodiments of the present invention, the following will briefly explain the drawings and reference numerals used in the description of the specific embodiments.

[0023] Figure 1 This is a schematic diagram of the structure of the cover described in this invention; Figure 2 This is a schematic diagram showing the positions of the laser module, dicing table, splitting table, unloading box, loading station, and conveying mechanism described in this invention; Figure 3 This is a schematic diagram showing the positions of the laser module, dicing table, splitting table, unloading box, and loading station described in this invention; Figure 4 This is a schematic diagram of the transport mechanism described in this invention; Figure 5 This is a schematic diagram of the dicing stage and the cleaving stage described in Example 1; Figure 6 This is a schematic diagram of the cleavage stage described in Example 1; Figure 7 This is a schematic diagram of the material feeding module described in Embodiment 1; Figure 8 This is a schematic diagram of the dicing stage described in Example 1; Figure 9 These are schematic diagrams of the dicing stage described in Examples 2 to 4; Figure 10 These are schematic diagrams of the bottom structure of the vehicle described in Examples 2 to 4; Figure 11 Schematic diagrams of the positions of the second electromagnet or air outlet in Examples 2 to 4.

[0024] Figure label: 1. Slicing table; 11. Position adjustment mechanism; 12. First electromagnet; 2. Carrier; 21. Magnet; 22. Material support module; 3. Laser module; 31. Laser gantry; 32. Laser lead screw module; 4. Unloading box; 41. Unloading gantry; 42. Suction cup module; 43. Motion drive module; 44. Limiting block; 5. Slicing table; 51. Pushing lead screw module; 511. Movable seat; 52. Pushing finger; 53. Pneumatic rod; 54. Lower floating plate; 55. Third electromagnet; 6. Transport mechanism; 61. Transport gantry; 62. Transport drive module; 63. Transport suction cup; 64. Loading station; 7. Control host; 81. Second electromagnet; 82. Air outlet; 91. Machine base; 92. Machine cover. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this invention clearer, the following description is provided with reference to the accompanying drawings.

[0026] Laser scribing utilizes a high-energy laser beam to irradiate the surface of a workpiece, causing the irradiated area to locally melt and vaporize, thereby achieving the scribing purpose. Because the laser is focused into a very small spot by a special optical system, it has high energy density, minimal heat-affected zone, and high scribing accuracy, and is widely used in the cutting and scribing of solar panels and thin metal sheets.

[0027] Therefore, as Figures 1 to 11 As shown in the figure, this specific embodiment provides a fiber laser scribing machine, which includes a scribing table 1 and a feeding box 4.

[0028] The dicing stage 1 is equipped with a carrier 2 and a drive module. The carrier 2 holds the material to be diced. A laser module 3 is arranged at a distance from the dicing stage 1. The laser module 3 is used to irradiate the beam. The drive module is used to drive the laser module 3 and / or the carrier 2 to move. The drive module can be a lead screw module, an electric cylinder module, a belt module, or a pneumatic cylinder module, etc., so that the beam and the material can move relative to each other, thereby allowing the beam to slicing across the material.

[0029] The unloading box 4 is equipped with an unloading module, which can drive the suction cup module 42 or the clamp to move by a lead screw module, electric cylinder module, belt module or pneumatic cylinder module, so that the unloading module can be used to transport the material after the beam passes to the unloading box 4.

[0030] When cutting fragile and brittle materials such as solar semiconductor silicon wafers and solar cells, the material to be diced is simply placed in the carrier 2. Then, the drive module drives the laser module 3 and / or the carrier 2 to move, allowing the laser beam to move relative to the material. The laser beam irradiated by the laser module 3 then scribes the material, thus completing the dicing. Subsequently, the unloading module transports the material after the beam has scribe to the unloading box 4. Therefore, compared with the traditional method of manually controlling the movement of the material to be diced or the movement of the laser head to allow the laser beam to move relative to the material, this fiber laser dicing machine can effectively improve processing efficiency. At the same time, by using automated equipment to scribe the material, it can effectively improve processing accuracy and processing stability compared with manual dicing.

[0031] In some embodiments, the drive module includes a laser gantry 31, the laser gantry 31 is provided with a laser lead screw module 32, the laser lead screw module 32 is used to drive the laser module 3 to move so that the beam passes through the material.

[0032] Because the laser lead screw module 32 can drive the lead screw to rotate via a motor, the laser module 3 can be precisely driven to move, thereby improving the travel accuracy of the beam as it passes through the material.

[0033] In some embodiments, the unloading module includes an unloading gantry 41 and a suction cup module 42. The unloading gantry 41 is provided with a movement drive module 43, which is used to drive the suction cup module 42 to move laterally and vertically, so that the suction cup module 42 can transport the material after the beam has passed to the unloading box 4.

[0034] After the beam scribes the material, compared to manual feeding, it can further improve processing and loading efficiency and reduce the risk of damage during feeding.

[0035] In some embodiments, the fiber laser scribing machine further includes a dicing base, on which a dicing stage 5, a pusher screw module 51, and a pneumatic rod 53 are mounted. The pusher screw module 51 drives a movable seat 511, which is provided with a pusher finger 52 that passes through the dicing stage 5 and can move on the dicing stage 5. A lower floating plate 54 located below the suction cup module 42 is hinged to one side of the dicing stage 5. One end of the pneumatic rod 53 is shaft-connected to the dicing base, and the other end is shaft-connected to the outer end of the lower floating plate 54, so that the lower floating plate 54 is horizontal with the dicing stage 5. The unloading module further includes a limiting block 44, and a moving drive module 43 is used to drive the limiting block 44 to move up and down. After the material touched by the beam is transported and placed on the dicing stage 5, a portion of the material is located on the lower floating plate 54. The lateral drive module drives the suction cup module 42 to move above the lower floating plate 54. Then, the lifting drive module drives the suction cup module 42 to descend. At this time, the limiting block 44 presses down to fix the portion of the material on the dicing stage 5. The suction cup module 42 presses down and adsorbs the portion of the material on the lower floating plate 54. The lower floating plate 54 is pushed down and avoided by the suction cup module 42, thereby breaking the portion of the material on the lower floating plate 54 apart from the other parts. Subsequently, the moving drive module 43 drives the limiting block 44 to rise and reset, drives the suction cup module 42 to rise and transport the broken material to the unloading box 4. Meanwhile, the air rod 53 drives the lower floating plate 54 to reset and be horizontal with the dicing stage 5. The screw module drives the pusher finger 52 to push the other portion of the material on the dicing stage 5 onto the lower floating plate 54, ready to be broken apart.

[0036] Therefore, after the beam completes the dicing of the material, the material can be moved from the dicing table to the dicing table 5 by the conveying mechanism 6. Subsequently, without the need for manual labor, the diced material can be diced by an automated mechanism, and the diced material can be moved to the unloading box 4 for centralized storage, thereby further improving processing efficiency, processing stability, processing accuracy, and reducing the risk of material damage during processing.

[0037] In some embodiments, the drive module includes: a plurality of magnets 21 arranged at the bottom of the carrier 2; a plurality of first electromagnets 12 arrayed on the dicing stage 1; and a control host 7, which independently supplies each first electromagnet 12 with electrical energy of a specific spectrum to control the voltage and phase supplied to each first electromagnet, so as to suspend the carrier 2 and drive the carrier 2 to move horizontally, rotate, lift, tilt and fix in a certain position, so that the beam of light irradiated by the laser module 3 moves relative to the material.

[0038] Therefore, compared to a single lead screw module, it is possible to drive the carrier 2 to move, rotate, and tilt the material within it in multiple axes. Furthermore, compared to using multiple lead screw modules to achieve multi-axis movement, rotation, and tilting of the carrier 2, it reduces hardware space requirements and improves movement efficiency. In addition, when the first electromagnet 12 is powered on or off, existing technologies allow for precise and efficient control of the output voltage, current, and limits. The first electromagnet 12 possesses extremely high response speed, thereby achieving precise and high-speed control of the carrier 2's movement. Moreover, the carrier 2 can be positioned using a vision system.

[0039] Conventional methods use electric motors as power to drive movement. However, electric motors rely on pulse signals to rotate and position themselves step by step, resulting in a fixed step angle. Therefore, there will always be a certain error when driving the object to the set position. This invention can further improve the accuracy of object movement by controlling voltage, current, and limit control electromagnets to drive the carrier.

[0040] In some embodiments, an air outlet 82 is provided above the dicing table 1. The air outlet 82 is used to blow air onto the carrier 2 or the material to assist in fixing the carrier 2 and the material using airflow and air pressure.

[0041] Therefore, compared to the traditional method of fixing products by using a cylinder to drive a pressure block to press down, this method achieves contactless product fixing. Furthermore, when the airflow encounters obstacles during its flow, it alters its original flow pattern, thereby reducing the risk of material damage and preventing indentations when fixing materials on the carrier 2. Compared to traditional hardware-contact product fixing methods, airflow fixing avoids blocking and reducing interference with the magnetic field. Additionally, compared to traditional hardware-contact product fixing methods, it does not obstruct the light beam when fixing materials, allowing for a larger scoping range. During material fixing, that is, before or during the scoping process, the airflow can clean the material surface, thereby improving the scoping quality.

[0042] In some embodiments, a second electromagnet 81 is disposed above the dicing stage 1, and a laser module 3 is located between the second electromagnet 81 and the dicing stage 1. The control host 7 independently supplies each second electromagnet 81 with electrical energy of a specific spectrum to independently control the voltage and phase of each second electromagnet 81 so that the second electromagnet 81 assists in fixing the carrier 2 and assists in driving the carrier 2 to move.

[0043] Therefore, compared to the traditional method of using a cylinder to drive a pressure block to press down on the product or carrier 2 for fixation, this technical solution does not obstruct the light beam, thus allowing the light beam to have a larger dicing range. When the first electromagnet 12 drives the carrier 2 to move, the second electromagnet 81 can be used to assist in driving the carrier 2 to move, thereby improving the efficiency and stability of the carrier 2's movement. In addition, when the carrier 2 is stationary at a certain position, the second electromagnet 81 can further fix the carrier 2, thereby allowing the light beam to more stably dice the material inside the carrier 2.

[0044] In some embodiments, the carrier 2 consists of a plurality of material support modules 22, which are capable of moving relative to each other, and each material support module 22 is provided with a plurality of magnets 21.

[0045] After the beam passes over the material, the voltage and phase of each first electromagnet 12 are independently controlled by the host 7, thereby driving each material support module 22 and its adjacent material support module 22 to move horizontally, rotate, lift, tilt, and fix in a certain position, so as to break apart the various parts of the material at the same time. Then, the unloading module transports the broken material to the unloading box 4.

[0046] Therefore, once the beam completes the dicing of the material, there is no need to set up a separate dicing station or a power mechanism for dicing; the material can be diced directly, thus reducing equipment size and manufacturing costs. Since the material can be diced on the dicing stage 1, there is no need to transport the material between the dicing stage 1 and the dicing stage 5, thereby reducing the risk of material damage. Furthermore, because different parts of the material are diced simultaneously, the dicing efficiency is significantly improved compared to traditional dicing modules. When the first electromagnet 12 is powered on or off, existing technology allows for precise and efficient control of the output voltage, current, and limit switches. The first electromagnet 12 possesses extremely high response speed, further improving dicing efficiency and stability. Compared to traditional dicing methods using pressure plates or clamps, this effectively reduces the risk of product damage from pressure or clamping.

[0047] In some embodiments, the dicing stage 1 is provided with at least two carriers 2, and the control host 7 independently supplies each first electromagnet 12 with electrical energy of a specific pattern, thereby driving the carriers 2 to interchange positions.

[0048] When breaking apart material within one or more carriers 2 that has been sliced ​​by the laser beam, the laser beam emitted by the laser module 3 can slice another material on another carrier 2, thereby reducing the waiting time between each process and further improving processing efficiency.

[0049] In some embodiments, the fiber laser scribing machine includes a dicing stage 5, on which a third electromagnet 55 is disposed, and another carrier 2 is placed on the dicing stage 5.

[0050] The control host 7 is used to independently supply each third electromagnet 55 with electrical energy of a specific pattern to drive the carrier 2 on the cleaving stage 5 and each material support module 22 of the carrier 2 and its adjacent material support module 22 to move horizontally, rotate, lift, tilt and fix in a certain position. At the same time, the control host 7 is also used to control the third electromagnet 55 to work in conjunction with the first electromagnet 12.

[0051] After the material in the carrier 2 on the dicing stage 1 is diced by the beam, the carrier 2 on the dicing stage 1 is driven to switch positions with the carrier 2 on the slicing stage 5. At this time, the carrier 2 on the slicing stage 5 is transferred to the dicing stage 1 for another material to be placed, while the material support module 22 of the carrier 2 on the slicing stage 5 slices the material inside by horizontal movement, rotation, lifting, and tilting, and then removes it from the unloading module. Therefore, while the beam is dicing the material on the dicing stage 1, the slicing stage 5 can simultaneously slice the material on it, thereby reducing the waiting time between each process and further improving processing efficiency.

[0052] In some embodiments, a bridge spanning the side of the dicing stage 1 is provided on the side of the dicing stage 5, and a fourth electromagnet 21 cooperating with the magnet 21 is arranged on the bridge. The control host 7 is also used to independently supply electrical energy of a specific pattern to each of the fourth electromagnets 21. Slides are provided on both sides of the top of the carrier 2, and pulleys are provided at the bottom of the carrier 2.

[0053] When the first electromagnet 12 or the third electromagnet 55 drives the carrier 2 to rise to the same height as the bridge, the fourth electromagnet 21 maintains the carrier 2 at this height and moves the carrier 2 from the dicing table 5 to the scouring table 1, or from the scouring table 1 to the dicing table 5. Simultaneously, the third electromagnet 55, working in conjunction with the first electromagnet 12, moves another carrier 2 from the scouring table 1 to the dicing table 5, or from the dicing table 5 to the scouring table 1. At this time, one of the pulleys slides across the track of the other carrier 2, and the carrier 2 below can support the carrier 2 sliding above it, allowing the two carriers 2 to be interchanged at different heights. Therefore, this allows the carrier 2 on the scouring table 1 and the carrier 2 on the dicing table 5 to be interchanged at different heights, thereby reducing the area required for the interchange and optimizing the equipment size.

[0054] All the specific graphs mentioned above are graphs that record information such as current, voltage, phase, time, energy, and frequency of the electrical energy output by the control host 7.

[0055] In some embodiments, a fiber laser scribing machine further includes a machine base 91 and a machine cover 92. The machine cover 92 is fixedly installed on the machine base 91, and the scribing table 1, laser module 3, unloading box 4 and scribing table 1 are fixedly installed on the machine base 91 and located inside the machine cover 92.

[0056] In some embodiments, the conveying mechanism 6 includes a conveying gantry 61, on which a conveying screw module is mounted. A conveying drive module 62 drives a conveying suction cup 63. The conveying drive module 62 can be a screw module, a cylinder module, or a belt module, so that the conveying suction cup 63 can move above the dicing table 1, the dicing table 5, the loading station 64, and the unloading box 4 and be lifted and lowered. The conveying suction cup 63 is used to adsorb the aforementioned materials. The loading station 64 has a stack of several materials to be diced.

[0057] To further illustrate the fiber laser scribing machine described in this specific embodiment, the following examples are provided.

[0058] Example 1 like Figures 1 to 8 As shown, this embodiment provides a fiber laser scribing machine, which includes a scribing table 1, a feeding module, a dicing base, and a feeding box 4.

[0059] The dicing stage 1 is equipped with a carrier 2 and a drive module. The carrier 2 is used to place the material to be cut. The drive module includes a laser gantry 31, on which a laser lead screw module 32 is mounted. The laser lead screw module 32 drives a movable laser module 3. The laser module 3 is spaced a distance from the dicing stage 1. The laser module 3 is used to irradiate the material with a light beam. When the laser lead screw module 32 drives the laser module 3 to move, the light beam and the material can move relative to each other, allowing the light beam to pass over the material.

[0060] The dicing base is equipped with a dicing stage 5, a pusher screw module 51, and a pneumatic rod 53. The pusher screw module 51 drives a movable seat 511, which is equipped with a pusher finger 52. The pusher finger 52 passes through the dicing stage 5 and can move on the dicing stage 5. A lower floating plate 54 located below the suction cup module 42 is hinged to one side of the dicing stage 5. One end of the pneumatic rod 53 is connected to the dicing base shaft, and the other end is connected to the outer end shaft of the lower floating plate 54, so that the lower floating plate 54 is horizontal with the dicing stage 5. After the beam completes the dicing of the material on the dicing stage 1, the material is transported and placed on the dicing stage 5 by the conveying mechanism 6. At this time, the pusher finger 52 is in contact with one side of the material, while a part of the other side of the material is located on the lower floating plate 54.

[0061] The unloading module includes an unloading gantry 41, a suction cup module 42, and a limiting pressure block 44. The unloading gantry 41 is equipped with a moving drive module 43, which is used to drive the suction cup module 42 and the limiting pressure block 44 to move laterally and vertically. The horizontal drive module drives the suction cup module 42 to move above the lower floating plate 54. Then, the lifting drive module drives the suction cup module 42 to descend. At this time, the limiting pressure block 44 presses down to fix the part of the material on the splitting platform 5. The suction cup module 42 presses down and adsorbs the part of the material on the lower floating plate 54. The lower floating plate 54 is pushed down by the suction cup module 42 to avoid it, thereby breaking the part of the material on the lower floating plate 54 apart from other parts. Then, the moving drive module 43 drives the limiting pressure block 44 to rise and reset, drives the suction cup module 42 to rise and transport the broken material to the unloading box 4. The air rod 53 drives the lower floating plate 54 to reset and be horizontal with the splitting platform 5. The screw module drives the pusher finger 52 to push the other part of the material on the splitting platform 5 onto the lower floating plate 54 to be broken apart.

[0062] In addition, the dicing stage 1 is provided with a position adjustment mechanism 11, which can be a lead screw module. The position adjustment mechanism 11 is used to adjust and move the position of the dicing stage 1 to the working range of the laser module 3 so that the laser module 3 can dic the material on the dicing stage 1, and to move the position of the dicing stage 1 out of the working range of the laser module 3 so that the conveying mechanism 6 can convey the material to the dicing stage 1 or convey another material to the dicing stage 1.

[0063] Example 2 like Figures 1 to 4 As shown in Figures 9 to 11, this embodiment provides a fiber laser scribing machine, which includes a scribing table 1, a feeding module, and a feeding box 4.

[0064] The dicing stage 1 is equipped with a laser module 3, a carrier 2, and a drive module. The laser module 3 is used to irradiate the material. There are at least two carriers 2, which are used to hold the material to be cut. Each carrier 2 consists of several material support modules 22, which are capable of relative movement. The drive module includes several magnets 21 arranged at the bottom of each material support module 22, several first electromagnets 12 arrayed on the dicing stage 1, and a control host 7. The control host 7 independently supplies each first electromagnet 12 with electrical energy of a specific pattern to independently suspend the carrier 2 or the material support module 22 and drive the carrier 2 to move horizontally, rotate, lift, tilt, and fix in a certain position, so that the laser beam irradiated by the laser module 3 moves relative to the material.

[0065] A second electromagnet 81 is installed above the dicing stage 1. The laser module 3 is located between the second electromagnet 81 and the dicing stage 1. The control host 7 independently supplies each second electromagnet 81 with electrical energy of a specific pattern so that the second electromagnet 81 assists in fixing the carrier 2 and assists in driving the carrier 2 to move.

[0066] The unloading module includes an unloading gantry 41 and a suction cup module 42. The unloading gantry 41 is equipped with a moving drive module 43, which is used to drive the suction cup module 42 to move laterally and vertically, so that the suction cup module 42 can transport the cleaved material to the unloading box 4.

[0067] The following is a description of the operation of the fiber laser scribing machine described in this embodiment.

[0068] After the material to be diced is placed on the carrier 2 by the feeding mechanism, the control host 7 independently supplies each of the first electromagnets 12 with electrical energy of a specific pattern to suspend the carrier 2 and drive the carrier 2 to move horizontally, rotate, lift, tilt and fix in a certain position, so that the beam of light irradiated by the laser module 3 moves relative to the material, thereby completing the dicing of the material by the beam of light; during this period, the control host 7 independently supplies each of the second electromagnets 81 with electrical energy of a specific pattern, so that the second electromagnets 81 assist in fixing the carrier 2 and assist in driving the carrier 2 to move.

[0069] Subsequently, the control host 7 independently supplies each first electromagnet 12 with electrical energy of a specific pattern, thereby driving each carrier 2 to switch positions. At this time, the feeding mechanism places another material into another carrier 2 for the beam to slit. Simultaneously, the control host 7 independently controls the voltage and phase of each first electromagnet 12, thereby driving each material support module 22 and its adjacent material support module 22 to move horizontally, rotate, lift, tilt, and fix in a certain position, so that the various parts of the slit material are simultaneously broken apart, thereby completing the slicing. At the same time, the moving drive module 43 drives the suction cup module 42 to move laterally and lift, so that the suction cup module 42 can transport the sliced ​​material to the unloading box 4.

[0070] Example 3 like Figures 1 to 4 As shown in Figures 9 to 11, this embodiment provides a fiber laser scribing machine, which includes a scribing table 1, a feeding module, and a feeding box 4.

[0071] The dicing stage 1 is equipped with a laser module 3, a carrier 2, and a drive module. The laser module 3 is used to irradiate the material. There are at least two carriers 2, which are used to hold the material to be cut. Each carrier 2 consists of several material support modules 22, which are capable of relative movement. The drive module includes several magnets 21 arranged at the bottom of each material support module 22, several first electromagnets 12 arrayed on the dicing stage 1, and a control host 7. The control host 7 independently supplies each first electromagnet 12 with electrical energy of a specific pattern to independently suspend the carrier 2 or the material support module 22 and drive the carrier 2 to move horizontally, rotate, lift, tilt, and fix in a certain position, so that the laser beam irradiated by the laser module 3 moves relative to the material.

[0072] An air outlet 82 is provided above the dicing table 1. The air outlet 82 is used to blow air onto the carrier 2 or the material to assist in fixing the carrier 2 and the material using airflow and air pressure.

[0073] The unloading module includes an unloading gantry 41 and a suction cup module 42. The unloading gantry 41 is equipped with a moving drive module 43, which is used to drive the suction cup module 42 to move laterally and vertically, so that the suction cup module 42 can transport the cleaved material to the unloading box 4.

[0074] The following is a description of the operation of the fiber laser scribing machine described in this embodiment.

[0075] After the material to be diced is placed on the carrier 2 by the feeding mechanism, the control host 7 independently supplies each of the first electromagnets 12 with electrical energy of a specific pattern to suspend the carrier 2 and drive the carrier 2 to move horizontally, rotate, lift, tilt and fix in a certain position, so that the beam of light irradiated by the laser module 3 moves relative to the material, thereby completing the dicing of the material by the beam of light; during this period, the air outlet 82 blows air to the carrier 2 or the material to use airflow and air pressure to help fix the carrier 2 and the material.

[0076] Subsequently, the control host 7 independently supplies each first electromagnet 12 with electrical energy of a specific pattern, thereby driving each carrier 2 to switch positions. At this time, the feeding mechanism places another material into another carrier 2 for the beam to slit. Simultaneously, the control host 7 independently controls the voltage and phase of each first electromagnet 12, thereby driving each material support module 22 and its adjacent material support module 22 to move horizontally, rotate, lift, tilt, and fix in a certain position, so that the various parts of the slit material are simultaneously broken apart, thereby completing the slicing. At the same time, the moving drive module 43 drives the suction cup module 42 to move laterally and lift, so that the suction cup module 42 can transport the sliced ​​material to the unloading box 4.

[0077] Example 4 like Figures 1 to 4 As shown in Figures 9 to 11, this embodiment provides a fiber laser scribing machine, which includes a carrier 2, a scribing table 1, a feeding module, and a feeding box 4.

[0078] There are at least two carriers 2, which are used to hold the material to be cut. Each carrier 2 consists of several material support modules 22, which are capable of relative movement. Several magnets 21 are arranged at the bottom of each material support module 22.

[0079] The dicing stage 1 is equipped with a drive module, which includes a plurality of first electromagnets 12 arrayed on the dicing stage 1 and a control host 7. At least one carrier 2 is placed on the dicing stage 1. The control host 7 independently supplies each of the first electromagnets 12 with electrical energy of a specific pattern to independently suspend the carrier 2 or the material support module 22 and drive the carrier 2 to move horizontally, rotate, lift, tilt, and fix in a certain position, so that the beam of light irradiated by the laser module 3 moves relative to the material.

[0080] A third electromagnet 55 is provided on the dicing stage 5, and another carrier 2 is also placed on the dicing stage 5; the control host 7 is used to independently supply each third electromagnet 55 with electrical energy of a specific pattern to drive the carrier 2 on the dicing stage 5, and each material support module 22 of the carrier 2 and its adjacent material support module 22 to move horizontally, rotate, lift, tilt and fix in a certain position. At the same time, the control host 7 is also used to control the third electromagnet 55 to work in conjunction with the first electromagnet 12.

[0081] The unloading module includes an unloading gantry 41 and a suction cup module 42. The unloading gantry 41 is equipped with a movement drive module 43, which is used to drive the suction cup module 42 to move laterally and vertically.

[0082] The following is a description of the operation of the fiber laser scribing machine described in this embodiment.

[0083] After the material to be diced is placed on the carrier 2 by the feeding mechanism, the control host 7 independently supplies each of the first electromagnets 12 with electrical energy of a specific pattern to suspend the carrier 2 and drive the carrier 2 to move horizontally, rotate, lift, tilt and fix in a certain position, so that the beam of light irradiated by the laser module 3 moves relative to the material, thereby completing the dicing of the material by the beam of light.

[0084] Subsequently, the control host 7 independently supplies each of the first electromagnets 12 and the third electromagnet 55 with electrical energy of a specific pattern, so that after the material in the carrier 2 on the dicing stage 1 is diced by the beam, the carrier 2 on the dicing stage 1 is driven to switch positions with the carrier 2 on the slicing stage 5. At this time, the carrier 2 on the slicing stage 5 is transferred to the dicing stage 1 for another material to be placed, while the material support module 22 of the carrier 2 on the slicing stage 5 slices the material inside by horizontal movement, rotation, lifting, and tilting.

[0085] Subsequently, the moving drive module 43 drives the suction cup module 42 to move laterally and vertically, so that the suction cup module 42 can transport the shredded material to the unloading box 4.

Claims

1. A fiber laser scribing machine, characterized in that, include: A dicing stage (1) is provided with a carrier (2) and a drive module. The carrier (2) holds the material to be diced. A laser module (3) is provided at a distance from the dicing stage (1). The laser module (3) is used to irradiate the light beam. The drive module is used to drive the laser module (3) and / or the carrier (2) to move, so that the light beam and the material can move relative to each other, thereby allowing the light beam to slice across the material. The material feeding box (4) is equipped with a material feeding module, which is used to transport the material after the beam passes through to the material feeding box (4).

2. The fiber laser scribing machine according to claim 1, characterized in that: The drive module includes a laser gantry (31), which is equipped with a laser lead screw module (32). The laser lead screw module (32) is used to drive the laser module (3) to move so that the beam passes over the material.

3. The fiber laser scribing machine according to claim 1, characterized in that: The unloading module includes an unloading gantry (41) and a suction cup module (42). The unloading gantry (41) is equipped with a moving drive module (43), which is used to drive the suction cup module (42) to move laterally and vertically, so that the suction cup module (42) can transport the material after the beam has passed to the unloading box (4).

4. A fiber laser scribing machine according to claim 3, characterized in that: It also includes a sharding base, on which a sharding platform (5), a pusher screw module (51), and a pneumatic rod (53) are mounted. The pusher screw module (51) drives a movable seat (511), which is provided with a pusher finger (52). The pusher finger (52) passes through the sharding platform (5) and can move on the sharding platform (5). A lower floating plate (54) located below the suction cup module (42) is hinged to one side of the sharding platform (5). One end of the pneumatic rod (53) is shaft-connected to the sharding base, and the other end is shaft-connected to the outer end of the lower floating plate (54) so ​​that the lower floating plate (54) is horizontal with the sharding platform (5). The unloading module also includes a limiting block (44), and the moving drive module (43) is used to drive the limiting block (44) to move up and down; After the material touched by the beam is transported and placed on the slicing stage (5), a portion of the material is located on the lower floating plate (54). The lateral drive module drives the suction cup module (42) to move above the lower floating plate (54). Subsequently, the lifting drive module drives the suction cup module (42) to descend. At this time, the limiting block (44) presses down to fix the portion of the material on the slicing stage (5), and the suction cup module (42) presses down and adsorbs the portion of the material on the lower floating plate (54). The lower floating plate (54) is held in place by the suction cup module (42). 2) Press down and avoid, thereby breaking the part of the material located on the lower floating plate (54) apart from the other parts. Then, the moving drive module (43) drives the limiting pressure block (44) to rise and reset, drives the suction cup module (42) to rise and transport the broken material to the unloading box (4), while the air rod (53) drives the lower floating plate (54) to reset and be horizontal with the splitting platform (5). The screw module drives the pusher finger (52) to push the other part of the material located on the splitting platform (5) onto the lower floating plate (54) to be broken apart.

5. A fiber laser scribing machine according to claim 1, characterized in that, The drive module includes: A plurality of magnets (21) are arranged at the bottom of the vehicle (2); A plurality of first electromagnets (12) are arrayed on the dicing stage (1); The control host (7) independently supplies each of the first electromagnets (12) with electrical energy of a specific pattern to suspend the vehicle (2) and drive the vehicle (2) to move horizontally, rotate, lift, tilt and fix at a certain position so that the beam of light irradiated by the laser module (3) moves relative to the material.

6. A fiber laser scribing machine according to claim 5, characterized in that: An air outlet (82) is provided above the dicing table (1). The air outlet (82) is used to blow air onto the carrier (2) or the material to assist in fixing the carrier (2) and the material by means of airflow and air pressure.

7. A fiber laser scribing machine according to claim 5, characterized in that: A second electromagnet (81) is installed above the dicing stage (1). The laser module (3) is located between the second electromagnet (81) and the dicing stage (1). The control host (7) independently supplies each of the second electromagnets (81) with electrical energy of a specific spectrum so that the second electromagnets (81) can assist in fixing the carrier (2) and assist in driving the carrier (2) to move.

8. A fiber laser scribing machine according to claim 7, characterized in that: The carrier (2) is composed of several material support modules (22), which are capable of relative movement with each other. Each material support module (22) is equipped with several magnets (21). After the beam passes over the material, the voltage and phase of each of the first electromagnets (12) are independently controlled by the control host (7), thereby driving each of the material support modules (22) and its adjacent material support modules (22) to move horizontally, rotate, lift, tilt and fix in a certain position, so as to break apart each part of the material at the same time. Then, the unloading module transports the broken material to the unloading box (4).

9. A fiber laser scribing machine according to claim 8, characterized in that: The dicing stage (1) is equipped with at least two carriers (2). The control host (7) independently supplies each of the first electromagnets (12) with electrical energy of a specific pattern, thereby driving each of the carriers (2) to switch positions with each other. When the material in one or more of the carriers (2) is broken apart by the beam, the beam emitted by the laser module (3) can dice another material on the other carrier (2).

10. A fiber laser scribing machine according to claim 8, characterized in that: It also includes a slicing stage (5), on which a third electromagnet (55) is provided, and another carrier (2) is placed on the slicing stage (5); The control host (7) is used to independently supply each of the third electromagnets (55) with electrical energy of a specific spectrum to drive the carrier (2) on the cleaving stage (5) and each of the material support modules (22) of the carrier (2) and its adjacent material support modules (22) to move horizontally, rotate, lift, tilt and fix in a certain position. At the same time, the control host (7) is also used to control the third electromagnets (55) to work in conjunction with the first electromagnets (12). After the material in the carrier (2) on the dicing stage (1) is diced by the beam, the carrier (2) on the dicing stage (1) is driven to switch positions with the carrier (2) on the slicing stage (5). At this time, the carrier (2) on the slicing stage (5) is transferred to the dicing stage (1) for another material to be placed, and the material support module (22) of the carrier (2) on the slicing stage (5) slices the material inside by horizontal movement, rotation, lifting and tilting and then allows the unloading module to take it out.

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