Apparatus and method for rapid hydrogen absorption and desorption using metal getter and plasma

Abstract

This invention relates to an apparatus and method for rapidly adsorbing and desorbing hydrogen using a metal getter and plasma. The apparatus includes a radio frequency coupling coil inside a vacuum container, with an insulating dielectric layer separating the coil from the gas. One end of the vacuum container has an adsorption / desorption chamber containing a metal getter. A hydrogen connection pipe is located on one side of the chamber, and a vacuum connection pipe is located on the other side. The hydrogen connection pipe, the hydrogen supply pipe in the hydrogen supply system, and the component detection pipe on the gas component detection device are connected to a gas supply tee. The vacuum connection pipe, the vacuum system pipe, and the pressure acquisition pipe in the pressure acquisition system are connected to a vacuum tee. This invention accelerates the hydrogen adsorption / desorption rate by activating the metal getter with plasma, and the temperature and pressure during the hydrogen adsorption / desorption process can be maintained at a relatively low level, which makes it possible to use the metal getter for large-scale hydrogen storage and transportation.

Description

Technical Field

[0001] This invention relates to the field of hydrogen storage and transportation technology, specifically to a device and method for rapidly absorbing and releasing hydrogen using a metal getter and plasma. Background Technology

[0002] As hydrogen energy is one of the most promising energy sources to replace fossil fuels, countries around the world are paying close attention to the development of the hydrogen energy industry. The hydrogen energy industry chain mainly consists of hydrogen production, storage, transportation, and utilization. While hydrogen production and utilization are relatively easy to implement, hydrogen's small molecular weight, low energy density (only 0.04% of gasoline's per unit volume under standard conditions), and flammability and explosiveness make hydrogen storage and transportation a critical challenge in the industry chain. Currently, hydrogen transportation costs account for 30-40% of the total cost of the hydrogen energy industry chain. The main reason for these high transportation costs is the lack of large-capacity, low-loss hydrogen storage methods. Therefore, improving hydrogen storage efficiency is key to breakthroughs in the hydrogen energy industry.

[0003] Currently, the mainstream hydrogen storage modes are divided into three types: gaseous, liquid, and solid. Gaseous hydrogen storage is usually achieved by compressing hydrogen into a high-pressure tank, which is the most common method. However, high-pressure storage places high demands on the safety and stability of the container, and there is a significant risk of loss during transportation. Liquid hydrogen storage involves cooling hydrogen below its boiling point, turning it into a liquid. This method is suitable for large-scale hydrogen storage, but it has high requirements for energy consumption and storage equipment. Solid hydrogen storage stores hydrogen in solid materials through adsorption or compounding. It has high safety and can be carried out at temperatures and pressures close to ambient levels. It has lower requirements for energy consumption and equipment, and is convenient to transport. Therefore, compared with gaseous and liquid hydrogen storage, solid hydrogen storage is more economical, efficient, and safe. It does not require expensive hydrogen storage equipment and is easy to transport.

[0004] Solid-state hydrogen storage refers to the technology of reversibly storing and releasing hydrogen under certain temperature and pressure conditions using solid hydrogen storage materials. Currently, solid-state hydrogen storage is mainly divided into two forms: physical adsorption hydrogen storage and chemical hydrogen storage. Physical adsorption hydrogen storage utilizes the high specific surface area and high micropore volume of hydrogen storage materials to achieve high-density hydrogen storage. Typical adsorbent materials include carbon nanotubes, metal-organic frameworks (MOFs), and covalent organic frameworks (COFs). It mainly achieves reversible hydrogen storage through van der Waals forces. Specific surface area is the main factor affecting the hydrogen storage capacity of adsorbent materials. Porous carbon materials, for example, have high specific surface area and pore volume, good stability, low density, and can be repeatedly stored. Theoretically, the mass hydrogen storage density of carbon materials and other inorganic porous materials can reach 5%–10%, or even higher. MOFs and COFs are another important branch of hydrogen storage materials, possessing advantages such as lower framework density and larger specific surface area, but their low-temperature adsorption mass hydrogen storage density is below 3%. Overall, physical adsorption hydrogen storage is still in the research stage, with the preparation of high-capacity adsorbent materials remaining a research focus.

[0005] Chemical hydrogen storage mainly includes metal hydrides and complex hydrides. Complex hydrides refer to composite hydrides containing coordination bonds, forming a new system that combines physical and chemical adsorption materials. Their hydrogen storage performance is typically improved through nano-sizing or the addition of catalysts. Metal hydrides, on the other hand, are a class of hydrides formed when metals / metal alloys undergo a reversible reaction with hydrogen. They are usually composed of a metal element with a high affinity for hydrogen (mainly Mg, V, La, Zr, Ti, and Ca) and a transition metal element with a lower affinity for hydrogen (mainly Mn, Cr, Fe, Co, Ni, Cu, and Zn). Compared to complex hydride hydrogen storage, metal hydride hydrogen storage materials are simpler to fabricate and also possess higher hydrogen storage capacity and better cycle stability, making them the most commercially promising hydrogen storage method currently available.

[0006] However, metallic hydrogen storage materials are getters that can absorb or release hydrogen through exothermic or endothermic reactions under certain temperatures and pressures. Although these getters exhibit good properties for hydrogen storage and recycling, the absorption and release of hydrogen by these getters often involve high temperatures and high pressures, and the absorption and release rates are relatively slow. This is not conducive to large-scale hydrogen storage and transportation applications, and currently they can only be used in fields with relatively small hydrogen consumption, such as testing and purification. Therefore, how to achieve rapid hydrogen absorption and release of metallic hydrogen storage materials under relatively low temperature and low pressure conditions has become a new technical challenge.

[0007] Patent CN211496940U discloses a hydrogen purification device in a getter measurement system. The device has a metal hydrogen storage material installed in a stainless steel bottle. However, the device utilizes the characteristic of hydrogen forming reversible hydrogen absorption and desorption compounds with the alloy hydrogen storage material to improve the purity of hydrogen, thereby achieving the effect of purifying hydrogen. Summary of the Invention

[0008] The purpose of this invention is to provide an apparatus and method for rapidly absorbing and desorbing hydrogen using a metal getter and plasma. By activating the metal getter with plasma, the absorption and desorption rate of hydrogen can be accelerated. Furthermore, due to the increased absorption and desorption rate and the control of the hydrogen flow rate, the temperature and pressure during the hydrogen absorption and desorption process can be maintained at a relatively low level, which makes it possible to use metal getters for large-scale hydrogen storage and transportation.

[0009] The objective of this invention is achieved through the following technical solution:

[0010] A device for rapidly absorbing and desorbing hydrogen using a metal getter and plasma includes a vacuum tank, a hydrogen supply system, a vacuum pumping system, a gas pressure acquisition system, and a gas composition detection device. The vacuum tank contains a radio frequency coupling coil, with an insulating dielectric layer separating it from the gas. One end of the vacuum tank has an absorption / desorption chamber containing a metal getter. One side of the absorption / desorption chamber has a hydrogen connection pipe, and the other side has a vacuum pumping connection pipe. The hydrogen connection pipe, the hydrogen supply pipe in the hydrogen supply system, and the composition detection pipe on the gas composition detection device are each sealed and connected to a corresponding interface on a gas supply tee. A hydrogen flow meter is installed on the hydrogen supply pipe. The vacuum pumping connection pipe, the vacuum pumping pipe in the vacuum pumping system, and the gas pressure acquisition pipe in the gas pressure acquisition system are each sealed and connected to a corresponding interface on a vacuum pumping tee.

[0011] Both the hydrogen connection pipeline and the vacuum connection pipeline are equipped with pipeline control valves to control the on / off state of the pipeline.

[0012] The vacuum tank is provided with a first socket and a second socket, and both the first socket and the second socket are electrically connected to the radio frequency coupling coil. The first socket is connected to the matching device through the matching device output line. The matching device is connected to the radio frequency power supply. The second socket is connected to the ground wire, and the ground wire is connected to the matching device through the line.

[0013] The hydrogen pipeline in the hydrogen supply system is connected to the hydrogen source, and the hydrogen flow meter is controlled by a flow controller.

[0014] The vacuum system has a vacuum pipeline connected to a vacuum pump, and the vacuum pipeline is equipped with a control valve to control the opening and closing of the pipeline.

[0015] The air pressure acquisition system includes a computer, a digital conversion module, a vacuum gauge display, and a vacuum gauge connected in sequence, wherein the vacuum gauge is connected to the air pressure acquisition pipeline.

[0016] The vacuum tank is provided with a sealing assembly at the end away from the suction and discharge chamber. The sealing assembly includes a sealing cover and a sealing flange. The sealing flange is fixed to the vacuum tank. The sealing cover blocks the opening of the vacuum tank and is fixed to the sealing flange by bolts and nuts. A sealing ring is provided between the sealing cover and the sealing flange.

[0017] A gas storage method according to the device for rapid hydrogen absorption and desorption using a metal getter and plasma includes the following steps:

[0018] Step 1: Evacuate the vacuum tank using a vacuum system;

[0019] Step 2: The hydrogen supply system supplies hydrogen at a set flow rate into the vacuum tank;

[0020] Step 3: Turn on the radio frequency coupling coil to generate plasma to activate the metal getter, and start the gas composition detection device to detect changes in gas composition in real time, and start the gas pressure acquisition system to monitor changes in gas pressure inside the vacuum tank in real time.

[0021] Step 4: The radio frequency coupling coil is turned off according to the change in gas composition to stop plasma generation, and the gas pressure acquisition system obtains the gas absorption rate of the activated metal getter according to the gas pressure change in the vacuum tank.

[0022] Step 5: When the metal getter's absorption rate is zero, the amount of hydrogen adsorbed by the metal getter reaches saturation. The hydrogen supply system stops supplying gas. After closing the control valves on the hydrogen connection pipeline and the vacuum connection pipeline, disconnect them from the gas supply tee and the vacuum tee respectively. Disconnect the plug on the output line of the matching device from the first socket on the vacuum tank, and disconnect the plug on the grounding wire from the second socket on the vacuum tank.

[0023] The advantages and positive effects of this invention are as follows:

[0024] 1. This invention uses plasma to activate a metal getter, which can accelerate the hydrogen absorption and desorption rate. Furthermore, due to the increased absorption and desorption rate and the control of hydrogen flow rate, the temperature and pressure during the hydrogen absorption and desorption process can be maintained at a relatively low level, which makes it possible to use metal getters for large-scale hydrogen storage and transportation.

[0025] 2. This invention utilizes a gas composition detection device to detect the gas composition in the vacuum tank in real time to determine whether the radio frequency coupling coil needs to continue generating plasma. It also utilizes a gas pressure acquisition system to detect the gas pressure changes in the vacuum tank in real time and determine whether the metal getter is saturated, thereby achieving the requirements of automated control. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of the present invention.

[0027] In this system, 1 is a vacuum tank, 101 is an RF coupling coil, 1011 is an RF power supply, 1012 is a matching device, 1013 is a grounding wire, 1014 is the matching device output line, 102 is a gas intake / discharge chamber, 1021 is a hydrogen connection pipeline, 1022 is a vacuum connection pipeline, 2 is a metal getter, 3 is a hydrogen supply system, 301 is a hydrogen source, 302 is a hydrogen pipeline, 3021 is a hydrogen flow meter, 303 is a flow controller, 304 is a gas supply tee connector, and 4 is a vacuum pump. The system consists of the following components: 401 (vacuum line), 402 (control valve), 403 (vacuum pump), 404 (vacuum tee), 5 (gas pressure acquisition system), 501 (gas pressure acquisition line), 502 (vacuum gauge), 503 (vacuum gauge display), 504 (digital conversion module), 505 (computer), 6 (sealing components), 601 (sealing cover), 602 (sealing flange), 603 (bolt), 604 (nut), 605 (sealing ring), 7 (gas composition detection device), and 701 (composition detection line). Detailed Implementation

[0028] The invention will now be described in further detail with reference to the accompanying drawings.

[0029] like Figure 1 As shown, the present invention includes a vacuum tank 1, a hydrogen supply system 3, a vacuum pumping system 4, a gas pressure acquisition system 5, and a gas composition detection device 7. The vacuum tank 1 contains a radio frequency coupling coil 101, and the inner side of the radio frequency coupling coil 101 is provided with an insulating dielectric layer to separate it from the gas. In this embodiment, the insulating dielectric layer can be made of quartz glass or ceramic. One end of the vacuum tank 1 has a gas absorption / desorption chamber 102, and the gas absorption / desorption chamber 102 contains a metal getter 2. One side of the gas absorption / desorption chamber 102 has a hydrogen connection pipe 1021, and the other side has a vacuum pumping connection pipe 1022. The hydrogen connection pipe 1021 and the gas pumping connection pipe 1022 are connected to the vacuum tank 1. The hydrogen supply system 3's hydrogen pipeline 302 and the gas composition detection device 7's composition detection pipeline 701 are respectively sealed and connected to the corresponding interface on a gas supply tee 304. The hydrogen pipeline 302 is equipped with a hydrogen flow meter 3021. The vacuum connection pipeline 1022, the vacuum system 4's vacuum pipeline 401, and the gas pressure acquisition system 5's gas pressure acquisition pipeline 501 are respectively sealed and connected to the corresponding interface on a vacuum tee 404. Both the hydrogen connection pipeline 1021 and the vacuum connection pipeline 1022 are equipped with pipeline control valves to control the on / off state of the pipelines.

[0030] In this invention, during gas storage, the vacuum tank 1 is evacuated by the vacuum system 4, and then gas is supplied by the hydrogen supply system 3. The flow rate of the supplied hydrogen is regulated by the hydrogen flow meter 3021. When the radio frequency coupling coil 101 is turned on, plasma is generated and the metal getter 2 is activated through a reduction reaction. At this time, the gas composition detection device 7 detects the changes in gas composition in real time and shuts off the radio frequency coupling coil 101 to stop the generation of plasma according to the changes in gas composition. The gas pressure acquisition system 5 monitors the changes in gas pressure in the vacuum tank 1 in real time, and the changes in gas pressure in the vacuum tank 1 can be converted into the gas absorption rate after the plasma activates the metal getter 2. When the gas absorption rate is zero, the amount of hydrogen adsorbed by the metal getter 2 reaches saturation. At this time, the hydrogen supply system 3 stops supplying gas, and the pipeline control valves on the hydrogen connection pipeline 1021 and the vacuum connection pipeline 1022 are closed. Then, the hydrogen connection pipeline 1021 and the vacuum connection pipeline 1022 are disconnected from the gas supply tee connector 304 and the vacuum tee connector 404, respectively. In this way, the entire vacuum tank 1 can achieve the purpose of independent storage and transportation. When hydrogen needs to be released, the hydrogen connection pipe 1021 and the vacuum connection pipe 1022 are connected to the gas supply tee connector 304 and the vacuum tee connector 404 respectively, and the pipe control valve is opened. At this time, the hydrogen source 301 in the hydrogen supply system 3 becomes an empty hydrogen storage tank or other equipment. The radio frequency coupling coil 101 is turned on to generate plasma to activate the metal getter 2. The hydrogen released by the metal getter 2 flows back into the hydrogen storage tank through the hydrogen connection pipe 1021. At the same time, the radio frequency coupling coil 101 is turned off according to the detection of the gas composition detection device 7 to stop the generation of plasma. The gas pressure acquisition system 5 monitors the obtained gas pressure changes in real time and converts them into the release rate of the metal getter 2 through calculation. This invention activates the metal getter 2 with plasma, which can accelerate the absorption and desorption rate of hydrogen. Due to the increased absorption and desorption rate, the temperature and pressure during the hydrogen absorption and desorption process can be maintained at a relatively low level. Combined with the control of hydrogen flow rate by the hydrogen flow meter 3021, this can further ensure that the temperature and pressure inside the vacuum tank 1 are maintained at a relatively low level. This makes it possible to use the metal getter for large-scale hydrogen storage and transportation.

[0031] like Figure 1 As shown, in this embodiment, the hydrogen pipeline 302 of the hydrogen supply system 3 is connected to the hydrogen source 301, and the hydrogen flow meter 3021 is controlled by the flow controller 303. Both the hydrogen flow meter 3021 and the flow controller 303 are commercially available products.

[0032] like Figure 1 As shown, in this embodiment, the vacuum system 4 has a vacuum pipeline 401 connected to a vacuum pump 403. The vacuum pipeline 401 is equipped with a control valve 402 that controls the opening and closing of the pipeline. In this embodiment, the control valve 402 is a ball valve.

[0033] like Figure 1 As shown, in this embodiment, the air pressure acquisition system 5 includes a computer 505, a digital conversion module 504, a vacuum gauge display 503, and a vacuum gauge 502 connected in sequence. The vacuum gauge 502 is connected to the air pressure acquisition pipeline 501 and measures the air pressure inside the vacuum tank 1. The measured air pressure value can be displayed in real time on the vacuum gauge display 503. Simultaneously, after being calculated and converted by the digital conversion module 504, it can generate air pressure change curves, gas intake / exhaust rate curves, etc., on the computer 505 for the operator to observe in real time. The computer 505, digital conversion module 504, vacuum gauge display 503, and vacuum gauge 502 are all commercially available products.

[0034] like Figure 1 As shown, in this embodiment, the gas component detection device 7 can be a gas component detection device such as a mass spectrometer or a gas chromatograph, which are commercially available products.

[0035] like Figure 1 As shown, in this embodiment, the vacuum tank 1 is equipped with a first socket and a second socket, both of which are electrically connected to the radio frequency coupling coil 101. The first socket is connected to the matching device 1012 via the matching device output line 1014. The matching device 1012 is connected to the radio frequency power supply 1011. The second socket is connected to the grounding wire 1013, which is also connected to the matching device 1012 via a line. The output signal of the radio frequency power supply 1011, via the matching device 1012, is output to the radio frequency coupling coil 101 and the grounding wire 1013, thereby generating a radio frequency electric field on the radio frequency coupling coil 101. After the vacuum tank 1 has finished storing gas, the plug of the matching device output line 1014 can be directly disconnected from the first socket, and the plug of the grounding wire 1013 can be directly disconnected from the second socket, thus not affecting the storage and transportation of the vacuum tank 1. The radio frequency coupling coil 101, the matching device 1012, and the radio frequency power supply 1011 are all technologies known in the art.

[0036] like Figure 1 As shown in this embodiment, a sealing assembly 6 is provided at the end of the vacuum tank 1 away from the suction and discharge chamber 102. The sealing assembly 6 includes a sealing cover plate 601 and a sealing flange 602. The sealing flange 602 is fixed on the vacuum tank 1. The sealing cover plate 601 blocks the opening of the vacuum tank 1 and is fixed to the sealing flange 602 by bolts 603 and nuts 604. A sealing ring 605 is provided between the sealing cover plate 601 and the sealing flange 602.

[0037] The working principle of this invention is as follows:

[0038] The present invention includes the following steps in gas storage:

[0039] Step 1: Vacuum tank 1 is evacuated using vacuum system 4;

[0040] Step 2: Hydrogen supply system 3 supplies hydrogen at a set flow rate into vacuum tank 1;

[0041] Step 3: Turn on the radio frequency coupling coil 101 to generate plasma to activate the metal getter 2, and start the gas composition detection device 7 to detect changes in gas composition in real time, and start the gas pressure acquisition system 5 to monitor changes in gas pressure inside the vacuum tank 1 in real time.

[0042] Step 4: The radio frequency coupling coil 101 is turned off according to the change in gas composition to stop the generation of plasma, and the gas pressure acquisition system 5 obtains the gas absorption rate of the activated metal getter 2 according to the gas pressure change in the vacuum tank 1.

[0043] Step 5: When the absorption rate of metal getter 2 is zero, the amount of hydrogen adsorbed by metal getter 2 reaches saturation. Hydrogen supply system 3 stops supplying gas. After closing the pipeline control valves on hydrogen connection pipeline 1021 and vacuum connection pipeline 1022, they are disconnected from gas supply tee connector 304 and vacuum tee connector 404 respectively. At this time, vacuum tank 1 can be stored and transported independently.

[0044] In step five above, after the vacuum tank 1 completes gas storage, the connector of the matching terminal line 1014 can be directly disconnected from the first socket on the vacuum tank 1, and the connector of the grounding wire 1013 can be directly disconnected from the second socket on the vacuum tank 1, so as not to affect the storage and transportation of the vacuum tank 1.

[0045] During the venting process of this invention, the hydrogen connection pipe 1021 and the vacuum connection pipe 1022 are first connected to the relevant equipment. Then, the radio frequency coupling coil 101 is turned on to activate the metal getter 2. The hydrogen released by the metal getter 2 flows into the relevant equipment for storage along the hydrogen connection pipe 1021. At the same time, the radio frequency coupling coil 101 is turned off according to the detection of the gas composition detection device 7 to stop the generation of plasma. The gas pressure acquisition system 5 converts the real-time monitored gas pressure changes into the venting rate of the metal getter 2 through calculation.

[0046] This invention activates the metal getter 2 with plasma, which can accelerate the absorption and desorption rate of hydrogen. Furthermore, due to the increased absorption and desorption rate, the temperature and pressure during the hydrogen absorption and desorption process can be maintained at a relatively low level, which makes it possible to use the metal getter for large-scale hydrogen storage and transportation.

Claims

1. A device for rapidly adsorbing and desorbing hydrogen using a metal getter and plasma, characterized in that: The system includes a vacuum tank (1), a hydrogen supply system (3), a vacuuming system (4), a gas pressure acquisition system (5), and a gas composition detection device (7). The vacuum tank (1) contains a radio frequency coupling coil (101), and the inner side of the radio frequency coupling coil (101) is provided with an insulating dielectric layer to separate it from the gas. One end of the vacuum tank (1) has a gas absorption / desorption chamber (102), and the gas absorption / desorption chamber (102) contains a metal getter (2). One side of the gas absorption / desorption chamber (102) has a hydrogen connection pipe (1021), and the other side has a vacuuming connection pipe (1022). The hydrogen connection pipe (1021)... 1021) The hydrogen pipeline (302) in the hydrogen supply system (3) and the component detection pipeline (701) on the gas component detection device (7) are respectively sealed and connected to the corresponding interface on a gas supply tee (304), and a hydrogen flow meter (3021) is provided on the hydrogen pipeline (302). The vacuum connection pipeline (1022), the vacuum pipeline (401) in the vacuum system (4) and the gas pressure acquisition pipeline (501) in the gas pressure acquisition system (5) are respectively sealed and connected to the corresponding interface on a vacuum tee (404).

2. The apparatus for rapid hydrogen absorption and desorption using a metal getter and plasma according to claim 1, characterized in that: Both the hydrogen connection pipeline (1021) and the vacuum connection pipeline (1022) are equipped with pipeline control valves to control the opening and closing of the pipelines.

3. The apparatus for rapidly adsorbing and desorbing hydrogen using a metal getter and plasma according to claim 2, characterized in that: The vacuum tank (1) is provided with a first socket and a second socket, and both the first socket and the second socket are electrically connected to the radio frequency coupling coil (101). The first socket is connected to the matching device (1012) through the matching device output line (1014), and the matching device (1012) is connected to the radio frequency power supply (1011). The second socket is connected to the grounding wire (1013), and the grounding wire (1013) is connected to the matching device (1012) through the line.

4. The apparatus for rapid hydrogen absorption and desorption using a metal getter and plasma according to claim 1, characterized in that: The hydrogen pipeline (302) in the hydrogen supply system (3) is connected to the hydrogen source (301), and the hydrogen flow meter (3021) is controlled by the flow controller (303).

5. The apparatus for rapid hydrogen absorption and desorption using a metal getter and plasma according to claim 1, characterized in that: The vacuum system (4) has a vacuum pipeline (401) connected to a vacuum pump (403), and the vacuum pipeline (401) is equipped with a control valve (402) for controlling the opening and closing of the pipeline.

6. The apparatus for rapid hydrogen adsorption and desorption using a metal getter and plasma according to claim 1, characterized in that: The air pressure acquisition system (5) includes a computer (505), a digital conversion module (504), a vacuum gauge display (503), and a vacuum gauge (502) connected in sequence, wherein the vacuum gauge (502) is connected to the air pressure acquisition pipeline (501).

7. The apparatus for rapid hydrogen absorption and desorption using a metal getter and plasma according to claim 1, characterized in that: The vacuum tank (1) is provided with a sealing assembly (6) at the end away from the suction and discharge chamber (102). The sealing assembly (6) includes a sealing cover plate (601) and a sealing flange (602). The sealing flange (602) is fixed on the vacuum tank (1). The sealing cover plate (601) blocks the opening of the vacuum tank (1) and is fixed to the sealing flange (602) by bolts (603) and nuts (604). A sealing ring (605) is provided between the sealing cover plate (601) and the sealing flange (602).

8. A gas storage method for a device for rapid hydrogen absorption and desorption using a metal getter and plasma as described in claim 3, characterized in that: Includes the following steps: Step 1: Vacuum the vacuum tank (1) using the vacuum system (4); Step 2: The hydrogen supply system (3) supplies hydrogen at a set flow rate into the vacuum tank (1); Step 3: Turn on the radio frequency coupling coil (101) to generate plasma to activate the metal getter (2), and start the gas composition detection device (7) to detect changes in gas composition in real time, and start the gas pressure acquisition system (5) to monitor changes in gas pressure in the vacuum tank (1) in real time. Step 4: The radio frequency coupling coil (101) is turned off according to the change in gas composition to stop the generation of plasma, and the gas pressure acquisition system (5) obtains the gas absorption rate of the activated metal getter (2) according to the gas pressure change in the vacuum tank (1). Step 5: When the absorption rate of the metal getter (2) is zero, the amount of hydrogen adsorbed by the metal getter (2) reaches saturation. The hydrogen supply system (3) stops supplying gas. After closing the pipeline control valves on the hydrogen connection pipeline (1021) and the vacuum connection pipeline (1022), they are disconnected from the gas supply tee connector (304) and the vacuum tee connector (404) respectively. The plug on the output line (1014) of the matching device is disconnected from the first socket on the vacuum tank (1), and the plug on the grounding wire (1013) is disconnected from the second socket on the vacuum tank (1).

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