An adjustable corona zone driven creeping spark preionization structure for gas lasers

Abstract

The present application relates to the technical field of gas laser, in particular to a kind of adjustable corona drive creeping spark preionization structure for gas laser.It includes main discharge part and preionization part;Main discharge part and preionization part share high voltage source and thyratron switch;Preionization part includes surface discharge unit by electrically conductive metal ring, ceramic tube and ground electrode, and adjustable capacitor Cs1 in series in preionization discharge branch;Preionization discharge branch is parallel with main discharge loop and energy storage is independent of each other.In the present application, by constructing independent preionization discharge branch, introducing adjustable capacitor as core control element and realizing electrification continuous regulation, effectively solve the problems such as low regulation accuracy, poor dynamic response and limited system integration reliability caused by relying on mechanical spacing adjustment in traditional structure.

Description

Technical Field

[0001] This invention relates to the field of gas laser technology, and more specifically, to an adjustable corona-driven creeping spark pre-ionization structure for gas lasers. Background Technology

[0002] In high-power gas laser systems such as excimer lasers and pulsed gas lasers, the performance of the pre-ionization structure directly determines the stability, repetition frequency, and beam quality of the laser output pulse. The corona-driven creeping spark pre-ionization structure is a hybrid discharge structure between traditional pyrolysis pre-ionization structures and corona pre-ionization structures, and is a key technology for achieving low jitter and high stability pre-ionization in the main discharge channel.

[0003] However, existing technologies face significant limitations in the aforementioned application contexts. The control of pre-ionization intensity currently relies heavily on traditional manual adjustment of the mechanical distance between the pre-ionization rod and the conductive metal ring. This method contains a fundamental contradiction:

[0004] On the one hand, mechanical adjustment is difficult to achieve continuous and precise gap control. The adjustment accuracy is limited by the thread step and assembly tolerance, and cannot meet the sensitive response of pre-ionization intensity to changes in micron-level spacing.

[0005] On the other hand, during system operation, factors such as discharge ablation, thermal expansion and vibration can cause the preset gap to drift, and the mechanical structure cannot be corrected in real time under dynamic conditions, which seriously limits the improvement of laser discharge stability and repetition frequency.

[0006] Furthermore, reliance on mechanical spacing adjustment presents challenges in system integration and reliability. To accommodate adjustment, structural design often sacrifices compactness, and moving mechanical parts are susceptible to poor contact and insulation failure under high voltage and strong electromagnetic interference. These drawbacks are particularly pronounced in commercial gas lasers requiring high repetition rates and long lifespans.

[0007] While existing technologies attempt to assist in controlling the pre-ionization intensity by adjusting the charging voltage or changing the gas pressure, these methods are either limited by the power domain swing or have slow response speeds, and cannot independently, quickly, and continuously replace the core role of mechanical pitch adjustment. Summary of the Invention

[0008] The purpose of this invention is to solve the problem that the existing adjustable corona-driven creepage spark pre-ionization structure for gas lasers suffers from insufficient static precision and poor dynamic stability in mechanical spacing adjustment, which leads to limited laser discharge stability and reduced system integration reliability.

[0009] The purpose of this invention is to provide a corona-driven creeping spark pre-ionization structure with adjustable pre-ionization intensity for gas lasers. By constructing a pre-ionization discharge branch that is connected in parallel with the main discharge circuit and has independent energy storage, introducing an adjustable capacitor as the core control element, and realizing electrical parameter adjustment to replace mechanical spacing adjustment, continuous and precise control of the pre-ionization intensity is achieved over a wide range, and the stability, repetition rate capability, and integrated reliability of the gas laser discharge system are effectively improved.

[0010] To achieve the above objectives, the present invention aims to provide an adjustable corona-driven creepage spark pre-ionization structure for a gas laser, comprising a main discharge section and a pre-ionization section, wherein:

[0011] The main discharge section and the pre-ionization section share a high-voltage source and a thyristor switch;

[0012] The pre-ionization section includes a surface discharge unit consisting of a conductive metal ring, a ceramic tube and a grounding electrode, and an adjustable capacitor Cs1 connected in series in the pre-ionization discharge branch.

[0013] The pre-ionization discharge branch is connected in parallel with the main discharge circuit and their energy storage is independent of each other;

[0014] By adjusting the capacitance value of the adjustable capacitor Cs1, the energy storage density of the pre-ionization circuit and the voltage amplitude and rise rate applied to the conductive metal ring are continuously changed, thereby actively realizing precise dynamic control of the process of converting corona discharge on the surface of the ceramic tube into creepage spark. In this way, the pre-ionization intensity can be continuously adjusted by replacing the mechanical spacing adjustment with the adjustment of electrical parameters.

[0015] As a further improvement to this technical solution, the main discharge section includes a high-voltage source, a thyristor, an energy storage capacitor Cs2, a cathode electrode, an anode electrode, a charge transfer capacitor Cd, and a charging inductor Ls2.

[0016] The pre-ionization section includes an adjustable capacitor Cs1, a charging inductor Ls1, a thyristor, a conductive metal ring, a pre-ionization rod, and a ceramic tube.

[0017] The high voltage source is connected to the adjustable capacitor Cs1 through the charging inductor Ls1 and to the energy storage capacitor Cs2 through the charging inductor Ls2.

[0018] The parameters of the charging inductor Ls1 are designed to be matched and form a synergistic control relationship with the adjustable capacitor Cs1. This ensures that the voltage rise rate of the pre-ionization circuit and the energy storage density are adjusted synchronously and accurately, avoiding discharge disorder during the adjustment process. This solves the problems of low adjustment accuracy and unstable discharge caused by the mismatch between conventional capacitor adjustment and inductor.

[0019] As a further improvement to this technical solution, the discharge response speed of the pre-ionization section is faster than that of the main discharge section;

[0020] When the thyristor is triggered to conduct, the pre-ionization circuit first establishes a discharge, generating creepage-type fire-type pre-ionization on the surface of the ceramic tube, providing sufficient initial electron concentration for the main discharge of the laser, and reducing the breakdown delay and jitter of the main discharge;

[0021] The difference in response speed between the pre-ionization circuit and the main discharge circuit can be precisely matched by adjusting the parameters of the charging inductors Ls1 and Ls2 to adapt to the needs of gas laser discharge systems with different power levels and repetition frequencies.

[0022] As a further improvement to this technical solution, the discharge circuits of the pre-ionization section and the main discharge section are independent of each other, and the adjustment of the pre-ionization intensity will not have a coupled effect on the energy storage and discharge characteristics of the main discharge.

[0023] As a further improvement to this technical solution, the adjustable capacitor Cs1 adopts a multi-level adjustable capacitor array, and its capacitance adjustment range covers the complete pre-ionization intensity range from weak corona to strong creepage spark.

[0024] The capacitor array adopts a high-precision binary weighted design, which solves the technical problem of low adjustment accuracy of conventional adjustable capacitor arrays.

[0025] As a further improvement to this technical solution, the adjustable capacitor array is controlled by a multi-bit control code, and the capacitance values ​​are in a binary weighted relationship. The required pre-ionization intensity level can be obtained by changing the control code.

[0026] As a further improvement to this technical solution, during system operation, the capacitance value of the adjustable capacitor Cs1 is adjusted in real time through electrical control.

[0027] As a further improvement to this technical solution, an array of conductive metal rings is provided on the surface of the ceramic tube, and the conductive metal rings and the grounding electrode have a predetermined surface distance, forming the main structure of the surface discharge unit.

[0028] In this invention, a pre-ionization discharge branch is constructed in parallel with the main discharge circuit and has independent energy storage. An adjustable capacitor Cs1 is introduced in series in this branch as the core control element to achieve continuous electrical adjustment of the pre-ionization intensity, completely replacing the traditional mechanical spacing adjustment method. Subsequently, by precisely adjusting the capacitance value of Cs1, the energy storage density of the pre-ionization circuit and the voltage amplitude and rise rate applied to the conductive metal ring are dynamically controlled, so that the surface discharge of the ceramic tube is continuously adjustable between corona discharge and creepage spark discharge, and the pre-ionization intensity covers the complete range from weak corona to strong spark. Next, taking advantage of the fact that the pre-ionization circuit does not contain a CC energy transfer link, its discharge response speed is faster than that of the main discharge circuit. After the thyristor is triggered, pre-ionization is established first, providing sufficient initial electron concentration for the main discharge of the laser, significantly reducing the breakdown delay and jitter of the main discharge. Finally, during system operation, the capacitance value of Cs1 is adjusted in real time through electrical control to achieve dynamic online optimization of the pre-ionization intensity, forming a complete closed-loop control mechanism of electrical adjustment - discharge mode conversion - pre-ionization intensity control - main discharge stability improvement.

[0029] This invention is highly targeted and systematic, solving the problems of low adjustment accuracy, poor dynamic response, limited system integration, and insufficient operational reliability caused by the reliance on mechanical spacing adjustment in traditional gas laser pre-ionization structures. It is especially suitable for applications sensitive to pre-ionization intensity, such as excimer lasers and pulsed gas lasers, and can effectively improve the discharge stability and repetition frequency capability of lasers, with stable and reliable results.

[0030] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0031] 1. In the adjustable corona-driven creepage spark pre-ionization structure for gas lasers, a pre-ionization discharge branch connected in parallel with the main discharge circuit and with independent energy storage is constructed. An adjustable capacitor Cs1 is introduced as the core control element, realizing the electrified continuous adjustment of the pre-ionization intensity. This completely replaces the traditional discrete and static control method that relies on mechanical spacing adjustment. It effectively solves the problem of limited mechanical adjustment accuracy and inability to meet the sensitive response of micron-level spacing. Moreover, the adjustment range covers the complete intensity range from weak corona to strong creepage spark, and can flexibly adapt to the operating conditions of gas lasers with different power levels and repetition frequencies.

[0032] 2. In the adjustable corona-driven creepage spark pre-ionization structure for gas lasers, by placing the adjustable capacitor Cs1 in the pre-ionization circuit, the pre-ionization intensity can be independently adjusted without interference from the main discharge section. Since the pre-ionization circuit does not contain a CC energy transfer link, its discharge response speed is faster than that of the main discharge circuit, which can provide sufficient initial electron concentration for the main discharge of the laser, significantly reducing the breakdown delay and jitter of the main discharge, and greatly improving the stability and repetition frequency capability of the laser discharge system. At the same time, during system operation, the capacitance value of Cs1 can be adjusted in real time through electrical control to achieve dynamic online optimization of the pre-ionization intensity, overcoming the inherent defect of traditional mechanical structures that cannot be corrected in real time under dynamic conditions.

[0033] 3. In the adjustable corona-driven creepage spark pre-ionization structure for gas lasers, electrical parameter adjustment is used instead of mechanical spacing adjustment. This eliminates the drawback of sacrificing system compactness to reserve adjustment space in traditional structures, and avoids the risk of poor contact and insulation failure of mechanical moving parts under high voltage and strong electromagnetic interference environments. It significantly improves the system integration and operational reliability, and provides an economical and efficient solution for high repetition frequency and high stability gas lasers, especially excimer lasers. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the corona-driven creeping spark pre-ionization structure of the present invention;

[0035] Figure 2 This is a partial schematic diagram of the spark pre-ionization generation of the present invention;

[0036] Figure 3 This is a partial structural cross-sectional diagram of the spark pre-ionization generation process of the present invention.

[0037] The labels in the diagram represent: 1. Cathode electrode; 2. Anode electrode; 3. Pre-ionization rod; 4. Ceramic tube; 5. Conductive metal ring. Detailed Implementation

[0038] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0039] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0040] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0041] Corona-driven creepage spark pre-ionization structures are key components in gas lasers, especially excimer lasers and pulsed gas lasers, for achieving low jitter and high stability during main discharge. These structures significantly improve the uniformity and stability of gas laser discharge by generating sufficient initial electrons before the main discharge.

[0042] However, existing technologies face significant limitations in the aforementioned application contexts. The control of pre-ionization intensity currently relies heavily on traditional manual adjustment of the mechanical gap between the pre-ionization rod and the conductive metal ring. This method presents a fundamental contradiction in practical systems: on the one hand, mechanical adjustment struggles to achieve continuous and precise gap control, its accuracy limited by thread stepping and assembly tolerances, failing to meet the sensitive response of pre-ionization intensity to micrometer-level gap changes; on the other hand, during system operation, factors such as discharge ablation, thermal expansion, and vibration can cause the preset gap to drift, leading to irreversible degradation of the pre-ionization intensity. Furthermore, the mechanical structure cannot be corrected in real-time under dynamic conditions, severely limiting the improvement of laser repetition frequency and output stability.

[0043] Furthermore, relying on mechanical spacing adjustment presents challenges in system integration and reliability. To allow for adjustment space, structural design often sacrifices compactness, and mechanical moving parts are prone to poor contact and insulation failure under high voltage and strong electromagnetic interference environments. While existing technologies attempt to assist in controlling pre-ionization intensity by adjusting charging voltage or changing gas pressure, these methods are either limited by power domain swing or have slow response times, and neither can independently, quickly, and continuously replace the core function of mechanical spacing adjustment.

[0044] Please see Figures 1-3As shown, the purpose of this invention is to provide an adjustable corona-driven creeping spark pre-ionization structure for gas lasers, comprising a main discharge section and a pre-ionization section, wherein the main discharge section adopts a conventional structure, and the pre-ionization section is the core innovation of this invention.

[0045] like Figure 1 The diagram shown is an overall structural diagram of the pre-ionization structure of the present invention, which consists of a high-voltage source +HV, a thyristor VS1, energy storage capacitors Cs1 and Cs2, a cathode electrode, an anode electrode, a charge transfer capacitor Cd, a conductive metal ring, a pre-ionization rod, a ceramic tube, a charging inductor Ls1, and a charging inductor Ls2.

[0046] The pre-ionization section consists of capacitor Cs1, charging inductor Ls1, thyristor, conductive metal ring, pre-ionization rod, and ceramic tube; the main discharge section consists of high-voltage source +HV, thyristor, capacitor Cs2, cathode electrode, anode electrode, capacitor Cd, and charging inductor Ls2. The main discharge section and the pre-ionization section share the high-voltage source +HV and thyristor VS1 switch, achieving a compact system structure design.

[0047] For applications such as excimer lasers and pulsed gas lasers, precise control of the pre-ionization intensity directly affects the stability of the laser's main discharge channel establishment and the jitter index of the output pulse. Taking repetition frequency gas switches as an example, their pre-ionization requirements typically cover a wide intensity range from weak corona discharge to strong spark discharge. To meet the needs of various operating conditions from low to high repetition frequencies, the pre-ionization structure must be able to achieve a wide range of continuously adjustable pre-ionization intensity.

[0048] For traditional pre-ionization structures that rely on mechanically adjustable gaps, the pre-ionization intensity is determined by the gap between the pre-ionization rod and the conductive metal ring. To adapt to the pre-ionization intensity requirements under different operating conditions, this mechanical gap needs to be manually adjusted, which has significant limitations in practical applications: on the one hand, the mechanical adjustment accuracy is limited by the thread step and assembly tolerances, and cannot meet the micron-level accuracy requirements; on the other hand, factors such as discharge ablation, thermal expansion, and vibration during system operation can cause the preset gap to drift, and the mechanical structure cannot correct it in real time during operation, which severely limits the discharge stability and repetition rate improvement capability of the laser system.

[0049] Therefore, compared with the traditional pre-ionization structure, the core of this invention lies in constructing a pre-ionization discharge branch that is connected in parallel with the main discharge circuit but has completely independent energy storage. A high-precision, anti-interference adjustable capacitor Cs1 is introduced in series in this branch as the core control element of the pre-ionization intensity. Combined with the closed-loop control mechanism and the circuit collaborative optimization design, the real-time continuous electrical adjustment of the pre-ionization intensity and the precise and controllable switching of the discharge mode are realized.

[0050] The pre-ionization section comprises a surface discharge unit consisting of a conductive metal ring, a ceramic tube, and a grounding electrode. A high-voltage source +HV charges capacitor Cs1 through a charging inductor Ls1, while a thyristor VS1 acts as a high-voltage switch, controlling the triggering time of the pre-ionization circuit. When VS1 is turned on, the energy stored in capacitor Cs1 is applied to the surface of the ceramic tube through the conductive metal ring, generating surface discharge and creating a creepage spark pre-ionization effect, providing sufficient initial electron concentration for the main laser discharge. The parameters of the charging inductor Ls1 are precisely matched to the capacitance range of the adjustable capacitor Cs1, ensuring that the voltage rise rate of the pre-ionization circuit changes synchronously with the energy storage density during Cs1 capacitance adjustment. This avoids problems such as discharge disorder and sudden changes in pre-ionization intensity, overcoming the limitation of conventional dual-loop structures where fixed inductor parameters cannot coordinate with capacitor adjustment.

[0051] Capacitor Cs1 is the key adjustable element of this invention. By precisely adjusting the capacitance of Cs1, the energy storage density of the pre-ionization circuit and the voltage amplitude and rise rate applied to the conductive metal ring can be continuously changed, thereby achieving dynamic control of the process of corona discharge to creepage spark on the ceramic tube surface. When the capacitance of Cs1 is small, the energy storage of the pre-ionization circuit is low, the ceramic tube surface is dominated by corona discharge, and the pre-ionization intensity is weak; when the capacitance of Cs1 increases, the energy storage of the pre-ionization circuit increases, the voltage amplitude and rise rate applied to the conductive metal ring are significantly improved, the discharge on the ceramic tube surface changes from corona discharge to creepage spark discharge, and the pre-ionization intensity is enhanced accordingly. The adjustment range of the pre-ionization intensity covers the entire range from weak corona to strong spark.

[0052] Specifically, the pre-ionization section shares the high-voltage source +HV and thyristor with the main discharge section. However, since the pre-ionization circuit does not contain a CC energy transfer stage, its discharge response speed is faster than that of the main discharge circuit. When the thyristor VS1 is triggered and turned on, the pre-ionization circuit establishes discharge first, generating creeping pre-ionization on the surface of the ceramic tube. This provides sufficient initial electron concentration for the main discharge of the laser, thereby achieving low jitter and high stability operation of the main discharge channel. This timing relationship ensures that pre-ionization is completed before the main discharge is established, effectively reducing the breakdown delay and jitter of the main discharge. Furthermore, the response speed difference between the pre-ionization circuit and the main discharge circuit can be precisely matched by adjusting the parameters of Ls1 and Ls2 to adapt to the requirements of laser discharge systems with different power levels and repetition frequencies. This matching mechanism is not an inherent characteristic of the dual-loop structure, but rather an optimized solution specifically designed by this invention to solve the problem that conventional dual-loop structures can only achieve the order of discharge timing but cannot achieve precise matching of response speed differences.

[0053] Furthermore, the pre-ionization section and the main discharge section have independent discharge circuits that do not interfere with each other. This characteristic ensures that adjusting the pre-ionization intensity will not have a coupling effect on the energy storage and discharge characteristics of the main discharge. The adjustable capacitor Cs1 is positioned in the pre-ionization circuit, and independent and precise control of the pre-ionization intensity is achieved through the adjustment of electrical parameters, completely replacing the traditional mechanical spacing adjustment method.

[0054] It is worth noting that while traditional corona pre-ionization has a simple structure, its discharge intensity is weak, making it difficult to meet the pre-ionization requirements of high-repetition-rate, high-power gas lasers. Traditional spark pre-ionization, while having sufficient intensity, is not adjustable and relies on mechanical structures for gap setting, failing to adapt to varying operating conditions. The corona-driven creeping spark pre-ionization structure proposed in this invention cleverly combines the advantages of both: under low-intensity requirements, corona discharge dominates, reducing system losses; under high-intensity requirements, increasing the Cs1 capacitance converts the discharge mode to creeping spark discharge, providing sufficient pre-ionized electron concentration. This electrically controllable switching of the discharge mode is one of the core innovations of this invention. Unlike the natural transition of discharge modes in existing technologies, this invention achieves active and precise switching of the discharge mode through closed-loop control, ensuring the stability and adaptability of the pre-ionization intensity.

[0055] In a specific embodiment of this invention within an excimer laser, a ceramic tube with an outer diameter of 10 mm and a conductive metal ring width of 5 mm are used. The surface distance between the conductive metal ring and the grounding electrode is 3 mm. A high-voltage source of +HV = 15 kV is configured, with charging inductors Ls1 = 100 μH, Ls2 = 200 μH, capacitor Cs2 = 10 nF, and capacitor Cd = 5 nF. The adjustable capacitor Cs1 employs a multi-level adjustable capacitor array, with a capacitance adjustment range of 100 pF to 2 nF, controlled by a 4-bit control code Csel<4:1>. The capacitance values ​​are in a binary weighted relationship (C0 = 100 pF, C1 = 200 pF, C2 = 400 pF, C3 = 800 pF). With this configuration, the pre-ionization intensity can cover the entire range from weak corona to strong creepage sparks and can be divided into multiple continuously adjustable intensity levels. By changing the control code of Csel<4:1>, any desired pre-ionization intensity can be obtained. For a selected pre-ionization intensity level, the system can dynamically optimize the pre-ionization intensity by adjusting the Cs1 capacitance value in real time via electrical control during operation, without any mechanical intervention. Experiments show that the excimer laser using this pre-ionization structure reduces the timing jitter of the output pulse by more than 30% and significantly improves the stability of the repetition frequency operation.

[0056] In summary, this invention effectively solves the problems of low adjustment accuracy, poor dynamic response, limited system integration, and insufficient operational reliability caused by the reliance on mechanical spacing adjustment in traditional pre-ionization structures by constructing an independently adjustable pre-ionization discharge branch, introducing an adjustable capacitor Cs1 as the core control element, and achieving electrically continuous adjustment of the pre-ionization intensity. This solution improves the control accuracy of the pre-ionization intensity of gas lasers while expanding the application flexibility of pre-ionization structures in high-repetition-rate, high-stability gas laser systems, especially excimer lasers, providing an economical and efficient solution for related fields.

[0057] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A pre-ionization structure for adjustable corona-driven creeping sparks in a gas laser, characterized in that: It includes the main discharge section and the pre-ionization section, wherein: The main discharge section and the pre-ionization section share a high-voltage source and a thyristor switch; The pre-ionization section includes a surface discharge unit consisting of a conductive metal ring, a ceramic tube and a grounding electrode, and an adjustable capacitor Cs1 connected in series in the pre-ionization discharge branch. The pre-ionization discharge branch is connected in parallel with the main discharge circuit and their energy storage is independent of each other; By adjusting the capacitance value of the adjustable capacitor Cs1, the energy storage density of the pre-ionization circuit and the voltage amplitude and rise rate applied to the conductive metal ring are continuously changed, thereby actively realizing precise dynamic control of the process of converting corona discharge on the surface of the ceramic tube into creepage spark. Thus, the pre-ionization intensity is continuously adjustable by replacing mechanical spacing adjustment with electrical parameter adjustment. The main discharge section includes the main discharge electrode of the gas laser; The surface of the ceramic tube is provided with an array of conductive metal rings, and the conductive metal rings and the grounding electrode have a predetermined surface distance, which constitutes the main structure of the surface discharge unit.

2. The adjustable corona-driven creeping spark pre-ionization structure for a gas laser according to claim 1, characterized in that: The main discharge section includes a high-voltage source, a thyristor, an energy storage capacitor Cs2, a cathode electrode, an anode electrode, a charge transfer capacitor Cd, and a charging inductor Ls2. The pre-ionization section includes an adjustable capacitor Cs1, a charging inductor Ls1, a thyristor, a conductive metal ring, a pre-ionization rod, and a ceramic tube. The high voltage source is connected to the adjustable capacitor Cs1 through the charging inductor Ls1 and to the energy storage capacitor Cs2 through the charging inductor Ls2. The parameters of the charging inductor Ls1 are designed to be matched and form a synergistic control relationship with the adjustable capacitor Cs1, ensuring that the voltage rise rate of the pre-ionization circuit and the energy storage density are adjusted synchronously and accurately, and avoiding discharge disorder during the adjustment process.

3. The adjustable corona-driven creeping spark pre-ionization structure for a gas laser according to claim 2, characterized in that: The discharge response speed of the pre-ionization section is faster than that of the main discharge section; When the thyristor is triggered to conduct, the pre-ionization circuit first establishes a discharge, generating creepage-type fire-type pre-ionization on the surface of the ceramic tube, providing an initial electron concentration for the main discharge of the gas laser, and reducing the breakdown delay and jitter of the main discharge; The difference in response speed between the pre-ionization circuit and the main discharge circuit can be matched by adjusting the parameters of the charging inductors Ls1 and Ls2 to adapt to the requirements of gas laser discharge systems with different power levels and repetition frequencies.

4. The adjustable corona-driven creeping spark pre-ionization structure for a gas laser according to claim 1, characterized in that: The pre-ionization section and the main discharge section have independent discharge circuits, and the adjustment of the pre-ionization intensity will not have a coupled effect on the energy storage and discharge characteristics of the main discharge.

5. The adjustable corona-driven creeping spark pre-ionization structure for a gas laser according to claim 1, characterized in that: The adjustable capacitor Cs1 adopts a multi-level adjustable capacitor array, and its capacitance adjustment range covers the complete pre-ionization intensity range from weak corona to strong creep spark.

6. The adjustable corona-driven creeping spark pre-ionization structure for a gas laser according to claim 5, characterized in that: The adjustable capacitor array is controlled by a multi-bit control code, and the capacitance values ​​are in a binary weighted relationship. The desired pre-ionization intensity level can be obtained by changing the control code.

7. The adjustable corona-driven creeping spark pre-ionization structure for a gas laser according to claim 6, characterized in that: During system operation, the capacitance value of the adjustable capacitor Cs1 is adjusted in real time through electrical control.

Images