Micro-lens fixing clamp and clamping method

Abstract

The present application relates to a kind of micro lens fixing clamp and clamping method, belong to optical element clamping technical field.The clamp includes multiple groups of horizontal moving plate slidably installed on containing disc, and drive structure for driving multiple groups of horizontal moving plate to approach or move away from each other is provided on containing disc.A plurality of let-position slots and fixing slots are provided on each horizontal moving plate, and elastic positioning wire guided by wiring slot and fixed by locking member is provided in let-position slot, and protective layer is provided in let-position slot and / or fixing slot.After adjacent horizontal moving plate approaches, micro lens is clamped between let-position slot and fixing slot, and flexible bonding interface is formed by elastic positioning wire bonding micro lens outer surface, and protective layer forms composite clamping interface together.The scheme can adapt to ultra-small size and different shape micro lens, reduce damage caused by rigid contact, inhibit the slip, rotation or fall position deviation of micro lens in clamped state, and improve stability, consistency and plating processing yield in batch clamped state.

Description

Technical Field

[0001] This invention relates to the field of optical component clamping technology, and in particular to a microlens fixing clamp and clamping method. Background Technology

[0002] Microlenses are widely used in optical communication devices, precision imaging devices, and other miniature optical systems. During microlens fabrication, specialized fixtures are typically used to clamp the microlenses for cleaning, handling, and coating processes. For the coating process, the fixtures not only need to reliably secure the microlenses but also minimize the risk of damage to their surfaces during clamping, and ensure that the clamping posture and stress state of each microlens are as consistent as possible in multi-station configurations, thereby improving subsequent coating quality and processing yield.

[0003] Existing microlens clamping fixtures typically employ structures such as rigid slots, limiting recesses, protrusions, and spring-loaded clamping parts to position and hold microlenses. For example, existing solutions use limiting recesses and clearance recesses on the transverse plate, along with spring-loaded clamping pieces and protrusions, to hold rectangular lenses, reducing the risk of edge chipping and enabling batch clamping. This type of solution is well-suited for microlenses of fixed sizes and shapes, and can, to a certain extent, balance clamping stability and edge protection.

[0004] However, as micromirrors continue to shrink in size, their diameter and length decrease, leading to a reduction in the effective contact area between the clamp and the micromirror. In this situation, existing structures relying on rigid groove walls or locally rigid clamping sections to form the clamping interface are more prone to localized contact stress concentration, resulting in a significantly narrower clamping tolerance. In other words, rigid contact methods that were acceptable for larger micromirrors are more likely to cause localized indentations, edge damage, and even internal stress damage on the micromirror surface as the size decreases further.

[0005] With the contact tolerance already narrowed, the shape of the microlenses to be clamped is no longer limited to a single regular shape. In addition to regular cylindrical lenses, there may also be angular lenses, elliptical lenses, and other irregularly shaped lenses. At this point, the existing rigid slots or limiting structures designed with fixed shapes further reduce their ability to match microlenses with different outer contours, easily leading to problems such as unstable clamping, excessive local pressure, insufficient fit, or the need for frequent replacement of the clamping body. In other words, the problem of narrowing clamping tolerance caused by the continuous reduction in microlens size will further amplify the shortcomings of existing fixed slot structures in adapting to multiple shapes.

[0006] Building upon this, when multiple micromirrors need to be batch-clamped on the same fixture and enter the cleaning, handling, and coating processes, the aforementioned problems of rigid contact stress concentration and insufficient shape adaptation will further manifest as inconsistencies in clamping states between workstations. Specifically, some micromirrors may experience slight slippage, rotation, or misalignment during clamping. Micromirrors in different workstations may also exhibit inconsistent stress states and postures, thus affecting the stability and yield of subsequent coating processes. In other words, the instability and inconsistency in posture at batch workstations are not isolated problems, but rather the result of the continuous accumulation of mismatches at the existing rigid clamping interfaces as the size of micromirrors continues to decrease.

[0007] Therefore, for microlenses whose size continues to decrease and whose shapes become increasingly diverse, existing fixtures that rely on rigid groove walls, local rigid pressing parts, or fixed shape limiting structures are difficult to simultaneously achieve low-damage clamping, multi-shape adaptation, and consistent clamping control in batch processing. There is an urgent need to provide a new microlens coating clamping structure that, while maintaining the transverse plate batch clamping frame, constructs a composite clamping interface that is different from direct contact with rigid groove walls, so as to achieve stable clamping of ultra-small and various-shaped microlenses. Summary of the Invention

[0008] The purpose of this invention is to provide a microlens fixing fixture and clamping method to solve the problem that existing fixing fixtures that rely on rigid groove walls or local rigid pressing parts to form a clamping interface are difficult to simultaneously achieve low-damage clamping, multi-shape adaptation, and consistent clamping control in batch processing when the size of microlenses continues to decrease and their shapes become increasingly diverse. This invention aims to achieve stable clamping of ultra-small microlenses and microlenses with different shapes.

[0009] To achieve the above-mentioned technical objectives, the present invention adopts the following technical solution: A microlens fixing fixture includes a holding tray on which multiple sets of transverse sliding plates are slidably mounted; Each of the transverse plates is provided with multiple sets of clamping stations at intervals along the length direction. Each set of clamping stations includes a clearance groove provided on one side of the transverse plate and a fixing groove provided on the other side of the transverse plate. After two adjacent sets of transverse plates approach each other, the clearance groove on one set of transverse plates is positioned opposite to the fixing groove on the other set of transverse plates, so as to clamp the microlens between the clearance groove and the fixing groove. An elastic positioning line is provided in the clearance groove, and a wiring groove communicating with multiple clearance grooves is provided in the transverse plate. The elastic positioning line is laid in each clearance groove through the wiring groove. The diameter of the elastic positioning line is smaller than the width of the wiring groove, and the width of the wiring groove is smaller than the thickness of the transverse plate. The transverse plate is provided with a locking member connected to the elastic positioning line, and the elastic positioning line is tensioned and fixed by the locking member. A protective layer is provided inside the fixing groove; In this configuration, the elastic positioning line forms a flexible bonding interface with the outer surface of the microlens within the relief groove when under tension, and together with the protective layer, constitutes a composite clamping interface for fixing and holding the microlens.

[0010] Optionally, the wiring groove is located at the center of the thickness of the transverse plate and extends along the length of the transverse plate to connect multiple clearance grooves.

[0011] Optionally, when the fixing groove is used to fix an irregular rhomboid cross-section micromirror with sharp edges, the fixing groove is also provided with a clearance groove.

[0012] Optionally, the serving tray is provided with a side pressure plate for limiting the sliding posture of the transverse plate.

[0013] Optionally, the holding tray is provided with a driving structure for driving multiple sets of transverse plates to move closer or further apart. The driving structure includes a push plate that is in contact with the outermost set of transverse plates and a bolt corresponding to the push plate. When the bolt rotates, it pushes the push plate to drive multiple sets of transverse plates to move closer or further apart synchronously.

[0014] Optionally, the elastic positioning line is a linear flexible component with tensile strength, toughness, and tension retention capability; and / or, the elastic positioning line includes at least one of fishing line, polymer monofilament, and composite fiber filament.

[0015] To achieve the above-mentioned technical objectives, the present invention also adopts the following technical solution: A method for holding a microlens, wherein the microlens fixing fixture described in any one of the above claims comprises the following steps: S1. The elastic positioning line is laid in each clearance groove through the wiring groove, and the elastic positioning line is tensioned and fixed by the locking member. S2. Place the micro-mirrors to be coated at the corresponding clamping positions between adjacent transverse plates. S3. Drive adjacent transverse plates to move closer to each other, so that the clearance groove on one set of transverse plates is opposite to the fixing groove on another set of transverse plates, and clamp the microlens between the clearance groove and the fixing groove. S4. During the clamping process, the elastic positioning line in the relief groove contacts and elastically adheres to the outer surface of the microlens to form a flexible bonding interface on the outer surface of the microlens. S5. The protective layer in the fixing groove contacts the microlens and provides buffering, fixing and protection for the microlens. The protective layer and the elastic positioning line stably clamp the microlens. S6. Perform coating, cleaning, or transfer while the microlens is held in a clamped state. The elastic positioning line and the protective layer work together continuously throughout the entire process of entering the clamping station along the microlens, forming a close fit and maintaining a stable position.

[0016] Optionally, in step S4, the elastic positioning line, under tension, contacts the microlens before or prior to the rigid groove wall of the relief groove.

[0017] Optionally, in steps S3-S5, the clamping state formed by the microlens between the relief groove and the fixing groove is suitable for at least one of a circular lens, a angular lens, an elliptical lens, and an irregularly shaped lens.

[0018] Optionally, in step S5, the protective layer is used to suppress the sliding, rotation, or displacement of the microlens in the clamping state.

[0019] The main advantages of this invention compared to existing technologies are as follows: This invention constructs a clamping station between a clearance groove and a fixing groove formed by adjacent transverse plates. An elastic positioning line, guided by a wiring groove and tensioned by a locking element, is installed within the clearance groove. This allows the elastic positioning line to adhere to the outer surface of the microlens during clamping, forming a flexible contact interface distinct from direct contact with the rigid groove wall. Combined with a protective layer installed within the clearance groove and / or fixing groove, this constitutes a composite clamping interface. This allows for a holistic solution to the chain of continuous technical problems arising from the continuous reduction in microlens size, including localized contact stress concentration, decreased adaptability to various lens shapes, and inconsistent clamping states in batch processing. This achieves low-damage and stable clamping of ultra-small and differently shaped microlenses.

[0020] This invention forms a flexible support boundary within the relief groove using elastic positioning lines, so that the microlens no longer relies primarily on the rigid groove wall for direct positioning during clamping. This effectively reduces the degree of local stress concentration in the clamping contact area, thereby reducing the probability of surface indentation, edge damage, and internal stress damage to the microlens.

[0021] In this invention, the clearance groove and the fixing groove adopt a corresponding groove pair clamping structure, and with the help of the fitting deformation capability of the elastic positioning line, the same clamping station can form a stable clamping of circular lenses, angular lenses, elliptical lenses and other irregularly shaped lenses, thereby improving the adaptability of the fixture to micro-lenses of different shapes and reducing the need to frequently change the fixture body due to changes in lens shape.

[0022] This invention guides the layout of elastic positioning lines through wiring channels and tensions and fixes the elastic positioning lines through locking components. This enables the elastic positioning lines in multiple clamping stations to maintain a relatively stable layout and fit, thereby improving the consistency of the clamping state of each station under batch clamping conditions.

[0023] By providing a protective layer in the clearance groove and / or fixing groove, the present invention can further reduce the risk of rigid contact after the microlens is formed in the clamping state, and suppress the sliding, rotation or displacement of the microlens in the clamping state, thereby improving the posture stability of the microlens in the cleaning, handling and coating processes.

[0024] The invention can still be clamped based on a batch clamping frame with transverse plates close to each other. Therefore, while having low-damage clamping and multi-shape adaptation capabilities, it can also take into account batch clamping efficiency, which is conducive to improving the stability and yield of micro-lens coating processing. Attached Figure Description

[0025] Figure 1 This is a perspective view of the microlens fixing clamp of the present invention; Figure 2 This is an exploded view of the microlens fixing clamp of the present invention; Figure 3 This is a schematic diagram of the transverse sliding plate of the present invention; Figure 4 for Figure 3 Enlarged image; Figure 5 This is a side view of the transverse sliding plate of the present invention; Figure 6 This is a schematic diagram of the microlens fixing clamp of the present invention in use; Figure 7 for Figure 6 Enlarged view of the lens with an irregular rhomboid cross-section; Figure 8 This is a flowchart illustrating the steps of the microlens clamping method of the present invention.

[0026] In the attached diagram: 1. Placing tray; 2. Horizontal sliding plate; 21. Clearance groove; 22. Elastic positioning line; 23. Fixing groove; 24. Protective layer; 25. Locking element; 26. Cable routing groove; 27. Clearance groove; 28. Threaded hole; 3. Central pressure plate; 4. Side pressure plate; 5. Push plate; 6. Bolt. Detailed Implementation

[0027] The following provides further details on specific embodiments of the present invention: The following is in conjunction with the appendix Figures 1 to 7The following describes the specific embodiments of the present invention in further detail. It should be noted that the following embodiments are only used to explain the technical solutions of the present invention and are not intended to limit the scope of protection of the present invention. Any structural adjustments, positional substitutions, material substitutions, or process changes made by those skilled in the art based on this specification without departing from the concept of the present invention should fall within the scope of protection of the present invention.

[0028] It should be noted that in the description of this invention, terms such as "upper," "lower," "inner," "outer," "one side," "the other side," "length direction," and "thickness center position," etc., are all based on the structural relationships shown in the accompanying drawings. They are only for the purpose of facilitating the explanation of this invention and simplifying the description, and are not intended to indicate or imply that the device or component must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0029] This invention provides a microlens fixing fixture and clamping method. Its core lies not in simply using rigid groove walls to limit the microlens' position, but in: within the batch clamping frame formed by the transverse plate 2, a flexible contact interface is constructed within the clearance groove 21 using elastic positioning lines 22 to conform to the outer surface of the microlens. This, combined with the fixing groove 23 and the protective layer 24, forms a composite clamping interface. This allows the ultra-small microlens to no longer rely primarily on direct contact with the rigid groove walls for positioning and clamping, but instead undergoes a continuous clamping process of "flexible contact—opposing limit—stable placement." Thus, under the conditions of continuously decreasing microlens size and increasingly diverse shapes, it simultaneously achieves low-damage clamping, multi-shape adaptation, and consistency control in batch processing. The microlenses of this invention can include a series of micro-sized lenses such as microlenses, microprisms, and microwindows.

[0030] Example 1: As Figures 1 to 7 As shown, a microlens fixing fixture includes a holding tray 1, which serves as the load-bearing base, guiding mounting base, and external driving force-bearing component for multiple sets of transverse sliding plates 2. The holding tray 1 can be a plate-type or frame-type structure, with a central mounting area for accommodating the multiple sets of transverse sliding plates 2, and structural boundaries on both sides or around the perimeter for limiting and guiding the transverse sliding plates 2. The material of the holding tray 1 can be selected according to the coating process environment, cleaning process conditions, and clamping stability requirements. For example, a metal material with high rigidity and high dimensional stability or other materials suitable for precision fixtures can be selected to ensure that no significant deformation occurs during multiple clamping and coating processes.

[0031] like Figure 1 , Figure 2As shown, multiple sets of transverse sliding plates 2 are slidably mounted on the holding tray 1. Each transverse sliding plate 2 is arranged side-by-side along the width direction of the holding tray 1 and can move relative to each other, either approaching or moving away. Here, "sliding mounting" means that the transverse sliding plates 2 have limited translational freedom relative to the holding tray 1; that is, the transverse sliding plates 2 can slide stably in a predetermined direction without significant tilting, skewing, or wobbling during the sliding process. To achieve the above-mentioned sliding mounting relationship, a sliding support surface can be formed on the holding tray 1 for the bottom or side of the transverse sliding plates 2 to engage with. The bottom, sidewall, or corresponding engaging part of the transverse sliding plate 2 forms a guiding engagement with the holding tray 1, thereby ensuring good synchronization and stability of the multiple sets of transverse sliding plates 2 as they approach or move away from each other.

[0032] In this embodiment, each transverse plate 2 is provided with multiple sets of clamping stations at intervals along its length. In other words, instead of forming a single slot for clamping microlenses along the length of a transverse plate 2, multiple clamping stations are arranged in an array along the length, so that a single transverse plate 2 can correspond to multiple microlenses in one clamping operation, thus achieving batch clamping. Figure 3 and Figure 4 The array-type station structure on the transverse plate 2 has been shown. By arranging multiple sets of clamping stations along the length direction, the present invention can simultaneously introduce flexible bonding interfaces into multiple stations while retaining the overall pushing and clamping mode of the transverse plate 2, thereby balancing clamping efficiency and clamping consistency.

[0033] In each clamping station, a clearance groove 21 is provided on one side of the transverse plate 2, and a fixing groove 23 is provided on the other side. Specifically, the clearance groove 21 and the fixing groove 23 are formed on opposite edge areas of the transverse plate 2, respectively, to form a clamping space together with the corresponding groove on the other transverse plate 2 after adjacent transverse plates 2 approach each other. The clearance groove 21 and the fixing groove 23 are preferably groove-shaped structures that can maintain the consistency of the product's aesthetic structure (of course, in other embodiments, they can be inconsistent structures, depending on the specific operational requirements). That is, the two can adopt the same or corresponding matching groove shapes in terms of groove width, groove depth, groove opening shape, and contour form, so as to form a relatively regular, symmetrical, and repeatable clamping station after adjacent transverse plates 2 approach each other. The so-called "structural consistency" does not absolutely limit all the dimensional parameters of the two to be exactly the same. As long as the two can form a counter-cooperative relationship and jointly achieve stable clamping of the microlens, they are within the scope of this invention.

[0034] like Figure 3 , Figure 4 and Figure 6As shown, when two adjacent sets of transverse plates 2 approach each other, the clearance groove 21 on one set of transverse plates 2 is positioned opposite to the fixing groove 23 on the other set of transverse plates 2, so as to clamp the microlens between the clearance groove 21 and the fixing groove 23. The clamping here is not a simple rigid compression, but rather a flexible bonding interface is first constructed on one side of the clearance groove 21, and then the fixing groove 23 provides a limiting function on the opposite side. In other words, the clearance groove 21 side plays the role of "flexible bonding—support and positioning," while the fixing groove 23 side plays the role of "opposing limiting—forming a clamping space." Together, they form a composite clamping interface suitable for microlenses.

[0035] In this embodiment, an elastic positioning line 22 is provided within the clearance groove 21. The elastic positioning line 22 is a key component in this invention, distinguishing it from existing rigid groove wall direct contact structures. It is not simply placed in the groove as a gasket or spacer, but rather, after being laid out along a specific wiring path, it forms a flexible contact boundary within the clearance groove 21 that can conform to the outer surface of the microlens. Therefore, when the transverse plates 2 approach each other to clamp the microlens, the microlens preferentially contacts the elastic positioning line 22, or at least initially forms partial contact with it, before being further restrained by the fixing groove 23 in opposite directions. The elastic positioning line 22 thus establishes a flexible transition interface between the microlens and the rigid groove wall, reducing localized stress concentration caused by rigid direct contact.

[0036] Furthermore, such as Figure 5 As shown, a wiring groove 26 is provided inside the transverse plate 2, which communicates with multiple clearance slots 21. The wiring groove 26 is located at the center of the thickness of the transverse plate 2 and extends along the length of the transverse plate 2. The main function of the wiring groove 26 is not simply to provide a "wire passage", but to provide a unified guiding path and spatial basis for the continuous layout of the elastic positioning line 22 among multiple clearance slots 21. Since the wiring groove 26 is located at the center of the thickness of the transverse plate 2, the elastic positioning line 22 can obtain relatively stable guiding support inside the transverse plate 2, and is not prone to significant displacement, tangling, or partial detachment during the mutual movement of the transverse plates 2. In addition, the wiring groove 26 connects multiple clearance slots 21, which also allows the elastic positioning line 22 to form a continuous distribution among multiple workstations on a transverse plate 2, thereby improving the uniformity of the flexible bonding interface in different workstations.

[0037] Specifically, in some embodiments, the length of the transverse plate 2 can be approximately 40 mm, the width of each clearance groove 21 and fixing groove 23 is approximately 4 mm, and the thickness is approximately 0.5 mm. The axial length of each microlens is approximately 0.9 mm, which is an ultra-small microlens. The minimum preferred diameter of the elastic positioning line 22, such as a fishing line, is approximately 0.1-0.15 mm, which is less than the thickness of the transverse plate 2 (0.5 mm). Therefore, it can be reasonably positioned in the line groove 26 located at the center of the thickness direction of the transverse plate 2. The processing dimensions of the line groove 26 can match the dimensions of the elastic positioning line 22. The maximum diameter of the fishing line is approximately 0.35-0.4 mm, and the dimensions of the line groove 26 are adapted to the diameter of the fishing line. The width of the line groove 26 does not exceed the thickness of the transverse plate 2.

[0038] In other embodiments, the specific dimensions and parameters of the transverse plate 2, the clearance groove 21, the fixing groove 23, the microlens, and the elastic positioning line 22 can be adaptively adjusted according to the specific circumstances.

[0039] The flexible positioning line 22 is laid in each clearance groove 21 via the wiring groove 26. For example... Figure 5 As shown, the elastic positioning line 22 can enter the interior of the transverse plate 2 from one end along its length, extend along its length through the wiring groove 26, and be partially exposed or span across each relief groove 21, forming a flexible fitting boundary inside the relief groove 21 for contacting the outer surface of the microlens. This boundary can be close to the opening area of ​​the relief groove 21, or located in the middle area or above the bottom of the relief groove 21, as long as it can form a fitting contact with the outer surface of the microlens when it enters the clamping station and is clamped. Since the elastic positioning line 22 itself is flexible, when different outer contours of the microlens enter the relief groove 21, the elastic positioning line 22 can deform and fit along the local contour of the outer surface of the microlens, thereby achieving conformal adaptation for microlenses with different shapes.

[0040] To ensure the stable operation of the elastic positioning line 22 in each clearance groove 21, the transverse plate 2 is provided with a locking member 25 connected to the elastic positioning line 22. Preferably, the locking member 25 can be a winding locking screw, but in other embodiments it can also be a structural component such as a plug bar. Figure 4 As shown, the corresponding transverse plate 2 is provided with threaded holes 28 or mounting holes for installing the locking element 25, which can be determined according to specific circumstances and process requirements. The locking element 25 is located at the end of the transverse plate 2, and its function is not only to "hook" the elastic positioning line 22, but more importantly, to provide a tensionable and fixed end for the elastic positioning line 22. Figure 5As shown, the elastic positioning line 22 can be wound around the locking member 25, which is then inserted into the transverse plate 2 for fixation, thereby maintaining the elastic positioning line 22 in a predetermined tension state. With this structure, the elastic positioning line 22 is not loosely suspended in the relief grooves 21, but rather spans across each relief groove 21 under a certain tension force. This tension state ensures that the elastic positioning line 22 is in a stable, ready-to-work state before the microlens enters the clamping position. When the microlens contacts the elastic positioning line 22, the elastic positioning line 22 can undergo local displacement and local deformation while maintaining basic tension, thus forming a bonding interface that is both flexible and has restorative force.

[0041] See Figure 4 and Figure 5 As shown, the specific cooperation method between the elastic positioning line 22, the locking member 25, and the wiring groove 26 is as follows: the elastic positioning line 22 is passed through the wiring groove 26, and the portion of the elastic positioning line 22 protruding from both ends of the transverse plate 2 is wrapped around the locking member 25. When the elastic positioning line 22 is sufficiently tensioned (this can be checked by gently moving the elastic positioning line 22 with a finger to determine if the tension requirement is met), the locking member 25 is screwed into the threaded hole 28 of the transverse plate 2. When the tension of the elastic positioning line 22 becomes loose after multiple uses, the locking member 25 is removed, the elastic positioning line 22 is rewound tightly around the locking member 25, and then the locking member 25 is reconnected to the transverse plate 2 to re-tension the elastic positioning line 22.

[0042] In this embodiment, the elastic positioning line 22 can be formed from a high-strength, high-toughness, and tension-retaining linear flexible component, such as fishing line, polymer monofilament, or composite fiber filament. Using these materials to construct the elastic positioning line 22 ensures that it does not easily loosen rapidly due to its own plastic deformation after being tensioned by the locking member 25. Furthermore, it allows for a good linear fit on the surface of the microlens, adapting to local differences in the microlens' shape. In addition, this type of linear flexible component is generally slender and has a moderate contact area, unlike large-area elastic pads that significantly obstruct the area of ​​the microlens to be coated, making it more suitable for processes requiring the exposure of specific microlens surfaces for coating.

[0043] In some embodiments, the elastic positioning line 22 may be formed of a linear material with high tensile strength, high toughness, low stress relaxation, temperature resistance, resistance to cleaning media corrosion, and low gas evolution characteristics to adapt to the microlens cleaning and coating processing environment. The elastic positioning line 22 may be selected from at least one of fluorocarbon monofilament, polyimide monofilament, polyetheretherketone monofilament, and composite fiber filament; wherein, as a verified embodiment, the elastic positioning line 22 may be a fluorocarbon filament with a diameter of 0.3 mm.

[0044] The diameter of the elastic positioning line 22 can be selected based on the width and depth of the relief groove 21 and the equivalent outer diameter of the microlens to be clamped. The selection principle is that after the locking member 25 is tensioned, the elastic positioning line 22 can remain continuously taut at each relief groove 21 and form a fit along the outer surface of the microlens when adjacent transverse plates 2 are close, without significant loosening, local detachment, or pressing the microlens into the bottom of the relief groove 21 due to excessive tension. Preferably, the elastic positioning line 22 remains basically taut between two adjacent grooves when the microlens is not placed, and after the microlens is placed and clamped, the elastic positioning line 22 forms a stable fit along the outer surface of the microlens without skipping lines.

[0045] Correspondingly, the tension applied by the locking element 25 to the elastic positioning line 22 shall meet the following conditions: first, the microlens shall not slip or rotate during cleaning, handling and coating; second, the elastic positioning line 22 shall not undergo permanent plastic stretching or significant loosening; and third, the surface of the microlens shall not form visible indentations due to the pressure of the elastic positioning line 22.

[0046] With the above-mentioned material and parameter settings, the elastic positioning line 22 can form a stable flexible bonding interface while meeting the requirements of the coating process environment.

[0047] In this embodiment, a protective layer 24 is provided inside the fixing groove 23. In other embodiments, a protective layer 24 may also be optionally provided inside the relief groove 21. This can prevent the microlens from directly contacting the groove wall of the relief groove 21 after being clamped, especially when the microlens is an irregular prism with sharp edges, which could directly and rigidly contact the groove wall and damage the elastic positioning line 22. The protective layer 24 can prevent the microlens from directly contacting the groove wall of the relief groove 21 and protect the elastic positioning line 22 from damage during processing. The protective layer 24 is preferably provided at the bottom of the relief groove 21, the bottom of the fixing groove 23, or the bottom of both the relief groove 21 and the fixing groove 23. The function of the protective layer 24 is not limited to simple buffering, but as a component of the composite clamping interface, after the elastic positioning line 22 and the fixing groove 23 form a clamping state, it further buffers the contact of the microlens, reduces rigid collisions, and inhibits slippage. Especially after the micromirror is clamped, its local area may approach the bottom of the relief groove 21 or the fixing groove 23. At this time, the protective layer 24 can provide a softer contact base at this position, so that the micromirror will not suffer obvious hard impact or local pressure damage at the bottom of the groove. At the same time, the protective layer 24 can also improve the friction characteristics of the bottom surface of the groove, thereby reducing the possibility of the micromirror sliding, rotating or shifting in position along the bottom of the groove when clamped.

[0048] In some embodiments, the protective layer 24 may be formed of a polymer material layer with wear resistance, temperature resistance, resistance to cleaning media corrosion, and low gas evolution characteristics, such as at least one of a polyimide layer, a polytetrafluoroethylene layer, a perfluoroalkoxy resin layer, a fluorinated ethylene propylene copolymer layer, and a polyether ether ketone layer; preferably, the protective layer 24 may be formed of a polyimide layer or a polytetrafluoroethylene layer. The protective layer 24 may be disposed on the bottom surface of the relief groove 21 and / or the fixing groove 23 by means of spraying, dip coating, lamination, hot pressing, or prefabricated thin layer embedding, and its thickness may be selected according to the size of the microlens being held and the required buffering degree, for example, 5μm to 50μm, preferably 10μm to 30μm. The protective layer 24 formed by the above materials can, on the one hand, provide buffer protection when the microlens contacts the bottom of the tank, reducing local damage to the microlens caused by rigid collisions, and on the other hand, improve the frictional stability of the contact surface of the bottom of the tank, thereby suppressing the sliding, rotation or displacement of the microlens in the clamping state, and can meet the requirements of repeated use in the cleaning and coating process environment.

[0049] like Figure 1 and Figure 2 As shown, the tray 1 is also equipped with a drive structure for driving multiple sets of transverse plates 2 to move closer or further apart. In this embodiment, the drive structure includes a push plate 5 that is attached to the outermost set of transverse plates 2 and a bolt 6 corresponding to the push plate 5. The bolt 6 is located on one side of the tray 1. When the bolt 6 rotates, its end pushes the push plate 5 to move in a predetermined direction. The push plate 5 then transmits the thrust to the outermost transverse plate 2, thereby causing the multiple sets of transverse plates 2 to move closer or further apart synchronously as a whole in the tray 1. This structure enables centralized driving of multiple sets of transverse plates 2. It is simple in structure, easy to operate, and suitable for use in batch clamping scenarios.

[0050] To ensure the stability of the transverse plates 2 as they approach and move away from each other, the holding tray 1 is also equipped with a central pressure plate 3 and a side pressure plate 4 to limit the sliding posture of the transverse plates 2. The central pressure plate 3 is used to limit the upward floating or swaying of the transverse plates 2 in the middle area, and the side pressure plate 4 is used to limit the sliding posture of the transverse plates 2 in the edge area. When the two work together, multiple sets of transverse plates 2 can maintain a good planar sliding state when pushed by the push plate 5, preventing local transverse plates 2 from tilting or skewing due to uneven force, thereby ensuring the matching accuracy of each clamping station after adjacent transverse plates 2 come close together.

[0051] The working process in this embodiment is as follows: Before clamping begins, the elastic positioning line 22 is laid in each clearance groove 21 of the transverse plate 2 via the wiring groove 26, and the elastic positioning line 22 is wound and tensioned by the locking member 25. At this time, the elastic positioning line 22 is in a pre-tensioned state in each clearance groove 21, forming a flexible fitting boundary to be clamped.

[0052] Subsequently, the microlenses to be coated are placed at corresponding clamping positions between adjacent transverse plates 2. At this time, the microlenses are in the open space formed before the adjacent transverse plates 2 are fully close, which facilitates manual placement or placement with the help of a loading fixture. The shape of the microlenses can be a regular cylinder, an irregular lens with edges, or even an ellipse or other irregularly shaped lens.

[0053] Once all the microlenses are in place, rotate bolt 6 to push push plate 5 to move. Push plate 5 then pushes multiple sets of transverse plates 2 to move towards the center simultaneously. During this approach, the clearance grooves 21 and fixing grooves 23 on adjacent transverse plates 2 gradually converge, and the microlenses gradually enter the clamping area formed by the clearance grooves 21 and fixing grooves 23.

[0054] As the transverse plate 2 continues to approach, the elastic positioning line 22 within the clearance groove 21 first or preferentially contacts the outer surface of the microlens. Because the elastic positioning line 22 is under tension, it can locally adhere to the outer contour of the microlens after contact, thus forming a flexible interface tailored to the actual shape of the microlens. At this stage, the microlens does not yet rely primarily on the rigid groove wall for direct positioning; instead, it first achieves flexible contact and initial support through the elastic positioning line 22. Compared to existing methods where rigid groove walls or local protrusions directly act on the microlens, this process of establishing a clamping interface is smoother, gentler, and more suitable for ultra-small microlenses.

[0055] As the transverse plate 2 moves closer, the microlens gradually forms a stable clamping state between the relief groove 21 and the fixing groove 23. The elastic positioning line 22 on one side continues to adhere to the outer surface of the microlens, while the fixing groove 23 on the other side provides opposing limiting, thereby stably clamping the microlens between the relief groove 21 and the fixing groove 23. At this time, the elastic positioning line 22 does not lose its function, but continues to exist as a flexible support boundary on one side of the relief groove 21, so that the microlens can still maintain contact with the flexible interface in the clamping state, thereby reducing the damage caused by local rigid pressing.

[0056] After the microlens is clamped, the protective layer 24 disposed in the clearance groove 21 and / or fixing groove 23 further participates in the process. The protective layer 24 can provide buffer contact for the surface of the microlens near the bottom of the groove and suppress the sliding, rotation or displacement of the microlens in subsequent processes. Since the elastic positioning line 22 and the protective layer 24 are located at different positions on the composite clamping interface and perform different functions, they do not exist in isolation, but rather act continuously throughout the entire process of the microlens from entering the clamping station, forming the clamp, to maintaining a stable position, thus constituting the core composite clamping interface of the present invention.

[0057] Once all micromirrors in the clamping stations have reached the set clamping state, the entire holding tray 1, along with the transverse plate 2 and the clamped micromirrors, can be transferred to the cleaning or coating station for further processing. During cleaning, handling, and coating, because each micromirror is clamped between the relief groove 21 and the fixing groove 23, and simultaneously subjected to the combined action of the elastic positioning line 22 and the protective layer 24, the micromirrors at each station can maintain a relatively consistent clamping state and posture, thereby improving stability under batch processing conditions.

[0058] In this embodiment, since the clearance groove 21 and the fixing groove 23 are preferably groove-shaped structures with the same structure, and the elastic positioning line 22 has a certain degree of flexibility and tension fitting ability, the same set of clamping stations is not only suitable for regular cylindrical microlenses, but also for lenses with angular edges, elliptical lenses and other irregularly shaped lenses. Figure 6 As shown, lenses of different shapes can be firmly clamped between the relief groove 21 and the fixing groove 23, while the elastic positioning line 22 is tightly attached to the lens surface on the relief groove 21 side. Because the elastic positioning line 22 can partially conform to the outer contour of the lens, the rigid clamping method that originally relied solely on the fixing groove is transformed into a flexible conformal clamping method with a certain shape-accommodating ability, thereby improving the adaptability of the present invention to different microlens shapes.

[0059] Example 2: Based on Example 1, this example further illustrates the variable implementation of the elastic positioning line 22 and the protective layer 24.

[0060] In some embodiments, the elastic positioning line 22 can be formed from a single continuous wire, that is, the same elastic positioning line 22 passes through multiple relief grooves 21 in sequence and is tensioned by locking members 25 at both ends. With this structure, the elastic positioning lines 22 in multiple clamping stations can be formed by the same tensioning system, thus obtaining a more consistent tension and fit state in different stations, which is beneficial to improving the clamping consistency in batch processing stations.

[0061] In other embodiments, the elastic positioning lines 22 can also be segmented, meaning that the elastic positioning lines 22 in different clearance grooves 21 are set separately and then connected and fixed to the corresponding locking members 25. With this structure, the elastic positioning lines 22 at each station can be independently replaced or adjusted according to local lens specifications, making it more suitable for more targeted clamping configurations for different batches and specifications of microlenses. Both the continuous and segmented arrangement methods described above fall within the scope of this invention.

[0062] In some embodiments, the protective layer 24 can be disposed at the bottom of the relief groove 21 to primarily address the bottom contact buffering issue when the microlens approaches the relief groove 21. In other embodiments, the protective layer 24 can also be disposed at the bottom of the fixing groove 23 to primarily enhance the buffering and anti-slip effect on the fixing groove 23 side. Alternatively, the protective layer 24 can be disposed at the bottom of both the relief groove 21 and the fixing groove 23 to construct a double-sided buffering base. The protective layer 24 can be formed at the bottom of the groove by means of plating, spraying, adhesion, embedding, etc., as long as it can provide buffering and anti-slip effects.

[0063] Example 3: Figure 8 As shown in the figure, this embodiment further illustrates the microlens clamping method of the present invention.

[0064] A method for holding microlenses, applied to the microlens fixing fixture in the above embodiments, includes the following steps: Step S1: Pre-install the elastic positioning line 22.

[0065] Based on the arrangement of the clearance grooves 21 on the transverse plate 2, the elastic positioning lines 22 are laid in each clearance groove 21 through the wiring groove 26, and the elastic positioning lines 22 are wound and tensioned and fixed by the locking member 25 at the end of the transverse plate 2. Through this step, a preset flexible fitting boundary is formed inside the clearance groove 21.

[0066] Step S2: Place the microlens to be coated.

[0067] The microlenses to be coated are placed in the corresponding clamping positions between adjacent transverse plates 2, so that each microlens is in the clamping area between a set of clearance grooves 21 and the corresponding fixing grooves 23.

[0068] Step S3: Drive the transverse plate 2 closer.

[0069] Rotate bolt 6 to push push plate 5 and drive multiple sets of transverse plates 2 to move closer simultaneously, so that the clearance groove 21 on one set of transverse plates 2 is set opposite to the fixing groove 23 on another set of transverse plates 2, and the microlens gradually enters the clamping space formed between the two.

[0070] Step S4: Form a flexible bonding interface.

[0071] As the transverse plates 2 approach each other, the elastic positioning line 22 within the clearance groove 21 contacts the microlens before or prior to the rigid groove wall of the clearance groove 21. The elastic positioning line 22 partially adheres to the outer surface of the microlens and forms a flexible bonding interface. This interface can locally change according to the differences in the outer contour of the microlens, thereby achieving adaptation to microlenses of different shapes.

[0072] Step S5: Form a stable clamp and maintain the position.

[0073] As the transverse plate 2 continues to approach, the micromirror is clamped between the relief groove 21 and the fixing groove 23. During this process, the protective layer 24 provides cushioning protection for the micromirror and inhibits its slippage, rotation, or displacement. At this point, the micromirror enters a stable clamping state under the combined action of the relief groove 21, the elastic positioning line 22, the fixing groove 23, and the protective layer 24.

[0074] Step S6: Perform coating, cleaning, or transfer.

[0075] While the micromirrors are held in place, the tray 1, along with the transverse plate 2 and the micromirrors, is transferred to a coating station, cleaning station, or transfer station for coating, cleaning, or transfer. Because each micromirror exhibits good stability and consistency while held in place, this improves the stability and yield of the coating process.

[0076] In this method, the elastic positioning line 22 and the protective layer 24 do not function in isolation, but rather work continuously throughout the entire process of "entering the clamping station—forming a close-fitting clamp—maintaining stable positioning." Therefore, this method does not simply rely on the static existence of the structural components to achieve clamping, but rather continuously reconstructs the clamping interface through the elastic positioning line 22 and the protective layer 24, thereby achieving stable clamping of ultra-small and differently shaped micromirrors.

[0077] To further explain, the core advantage of this invention lies in the fact that it does not completely abandon the existing batch clamping frame where the transverse plates 2 are close to each other. Instead, it transforms the clamping interface, which traditionally relies mainly on rigid groove walls or local rigid pressing parts, into a composite clamping interface consisting of "elastic positioning line 22 for close support + fixed groove 23 for opposing limiting + protective layer 24 for stable contact". Through this modification, while maintaining batch clamping efficiency, it can significantly improve the adaptability to ultra-small micromirrors and micromirrors of various shapes, and reduce the risk of damage from rigid contact.

[0078] Especially for micromirrors whose size is continuously decreasing, traditional rigid clamping structures are prone to localized stress concentration due to the reduced contact area. However, the elastic positioning line 22 in this invention can contact the micromirror before the rigid groove wall, forming a flexible linear fit on the micromirror surface, thereby reducing the risk of direct rigid pressure. Figure 6 and Figure 7As shown, for microlenses with irregular or angular shapes, the elastic positioning line 22 can conform to their local contours, allowing the same slot to accommodate lenses of different shapes without frequent changes to the clamping body. For multiple stations under batch clamping conditions, the wiring groove 26 and the locking element 25 ensure that the elastic positioning line 22 maintains a relatively consistent tension and distribution in multiple clearance grooves 21, thus helping to maintain the consistency of the clamping state at multiple stations. Furthermore, when the fixing groove 23 is used to fix microlenses with irregular rhomboid cross-sections and angular shapes, the fixing groove 23 also has a clearance groove 27. One end of the irregular rhomboid cross-section microlens is located in the clearance groove 27, and the other end is tensioned by the elastic positioning line 22, such as a fishing line. The two adjacent surfaces located in the clearance groove 27 are in close contact with the transition wall between the fixing groove 23 and the clearance groove 27.

[0079] The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments. For those skilled in the art, any equivalent changes or substitutions made to the specific material of the elastic positioning line, the specific cross-sectional shape of the wiring groove, the fixing method of the locking member, the specific groove shape structure of the clearance groove and the fixing groove, the setting position and forming method of the protective layer, etc., without departing from the concept of the present invention, should be considered as falling within the protection scope of the present invention.

Claims

1. A microlens fixing clamp, characterized in that, Includes a holding tray (1), on which multiple sets of transverse sliding plates (2) are slidably installed; Each of the transverse plates (2) is provided with multiple sets of clamping stations at intervals along the length direction. Each set of clamping stations includes a clearance groove (21) provided on one side of the transverse plate (2) and a fixing groove (23) provided on the other side of the transverse plate (2). After two adjacent sets of transverse plates (2) approach each other, the clearance groove (21) on one set of transverse plates (2) is arranged opposite to the fixing groove (23) on the other set of transverse plates (2) to clamp the microlens between the clearance groove (21) and the fixing groove (23). The clearance groove (21) is provided with an elastic positioning line (22), and the transverse plate (2) is provided with a wiring groove (26) that communicates with the multiple clearance grooves (21). The elastic positioning line (22) is laid in each clearance groove (21) through the wiring groove (26). The diameter of the elastic positioning line (22) is smaller than the width of the wiring groove (26), and the width of the wiring groove (26) is smaller than the thickness of the transverse plate (2); The transverse plate (2) is provided with a locking member (25) connected to the elastic positioning line (22), and the elastic positioning line (22) is tensioned and fixed by the locking member (25); A protective layer (24) is provided inside the fixing groove (23); In this context, the elastic positioning line (22) forms a flexible bonding interface with the outer surface of the microlens in the relief groove (21) under tension, and together with the protective layer (24), constitutes a composite clamping interface for fixing and holding the microlens.

2. The microlens fixing clamp according to claim 1, characterized in that, The wiring groove (26) is located at the center of the thickness of the transverse plate (2) and extends along the length of the transverse plate (2) to connect the plurality of the clearance grooves (21).

3. The microlens fixing fixture according to claim 1, characterized in that, When the fixing groove (23) is used to fix an irregular rhomboid cross-section micro mirror with sharp edges, the fixing groove (23) is also provided with a clearance groove (27).

4. The microlens fixing fixture according to claim 1, characterized in that, The holding tray (1) is provided with a side pressure plate (4) for limiting the sliding posture of the transverse plate (2).

5. The microlens fixing fixture according to claim 1, characterized in that, The holding tray (1) is provided with a driving structure for driving multiple sets of transverse plates (2) to move closer or further away from each other. The driving structure includes a push plate (5) that is in contact with the outermost set of transverse plates (2) and a bolt (6) corresponding to the push plate (5). When the bolt (6) rotates, it pushes the push plate (5) to drive multiple sets of transverse plates (2) to move closer or further away synchronously.

6. The microlens fixing fixture according to claim 1, characterized in that, The elastic positioning line (22) is a linear flexible component with tensile strength, toughness and tension retention capability; and / or, the elastic positioning line (22) includes at least one of fishing line, polymer monofilament, and composite fiber filament.

7. A method for holding microlenses, characterized in that, The microlens fixing fixture according to any one of claims 1-6 comprises the following steps: S1. The elastic positioning line (22) is laid in each clearance groove (21) through the wiring groove (26), and the elastic positioning line (22) is tensioned and fixed by the locking member (25); S2. Place the micro-mirror to be coated at the corresponding clamping position between adjacent transverse plates (2); S3. Drive the adjacent transverse plates (2) to move closer to each other, so that the clearance groove (21) on one set of transverse plates (2) is opposite to the fixing groove (23) on another set of transverse plates (2), and clamp the microlens between the clearance groove (21) and the fixing groove (23); S4. During the clamping process, the elastic positioning line (22) in the relief groove (21) contacts and elastically adheres to the outer surface of the microlens to form a flexible bonding interface on the outer surface of the microlens. S5. The protective layer (24) in the fixing groove (23) contacts the microlens and provides buffering, fixing and protection for the microlens. The protective layer (24) and the elastic positioning line (22) stably clamp the microlens. S6. Perform coating, cleaning, or transfer while the microlens is held in a clamped state. The elastic positioning line (22) and the protective layer (24) work together continuously throughout the entire process of entering the clamping station along the microlens to form a close clamping and maintain a stable position.

8. The microlens clamping method according to claim 7, characterized in that, In step S4, the elastic positioning line (22) in the tensioned state contacts the microlens before or prior to the rigid groove wall of the relief groove (21).

9. The microlens clamping method according to claim 7, characterized in that, In steps S3-S5, the clamping state formed between the relief groove (21) and the fixing groove (23) of the microlens is suitable for at least one of circular lenses, angular lenses, elliptical lenses and irregularly shaped lenses.

10. The microlens clamping method according to claim 7, characterized in that, In step S5, the protective layer (24) is used to suppress the sliding, rotation or displacement of the microlens in the clamping state.

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