A power regulator system and power regulating method for a multi-process integrated doping oxidation apparatus
By using an LC series resonant topology power regulator system and eddy current heating coil, the problems of large size, slow response, uneven heating and power jump of traditional power regulation schemes are solved. This enables efficient production of multi-process integrated doping and oxidation equipment, improves silicon wafer yield and reduces operation and maintenance costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- WENZHOU UNIV
- Filing Date
- 2026-05-22
- Publication Date
- 2026-06-19
AI Technical Summary
Traditional power adjustment schemes suffer from problems such as large size, high weight, slow response speed, uneven heating, and abrupt power adjustment, which cannot meet the high-efficiency production requirements of multi-process integrated doping oxidation equipment.
The power regulator system employing an LC series resonant topology includes an AC/DC converter, a power regulation unit, and a sampling control circuit. It forms an LC series resonant branch through a switched capacitor module and a heating coil load, and achieves electrical isolation by combining a high-frequency isolation transformer. It uses an eddy current heating coil for uniform heating and achieves smooth and stable regulation through power closed-loop control.
It achieves high power, high power density, fast response and uniform heating, improving production efficiency and silicon wafer yield, and reducing equipment size and maintenance costs.
Smart Images
Figure CN122247217A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of temperature control technology for photovoltaic silicon wafer processing equipment, specifically to a power regulator system and power regulation method for a multi-process integrated doping oxidation equipment. Background Technology
[0002] The core processes of photovoltaic silicon wafers, such as doping and oxidation, need to be completed in a reaction chamber with stable furnace temperature and good sealing. The temperature of the reaction chamber is controlled by adjusting the output power of the heater through a power regulator.
[0003] To increase production capacity and reduce costs, the industry is gradually integrating multiple processes such as doping and oxidation into the same equipment and increasing the size of the reaction chamber to increase the processing capacity of a single furnace. This places higher demands on the power controller: it needs to have a high power output of hundreds of kilovolt-amperes, a fast response of milliseconds, and a highly stable uniform heating capability to ensure furnace temperature stability when switching between different processes and improve the yield of silicon wafers.
[0004] Traditional power regulation schemes generally employ a thyristor-based power frequency chopper architecture. Power regulation is achieved by adjusting the thyristor's trigger conduction angle, thereby changing the effective value of the current flowing through the thermal resistance wire. This scheme has the following significant drawbacks: 1) Isolation devices are bulky: Under high power conditions of hundreds of kilovolt-amperes, if electrical isolation is to be achieved, a power frequency transformer must be used. This transformer is large and heavy, resulting in extremely low power density of the equipment and difficulties in installation and transportation.
[0005] 2) Bulky filtering components: The output current of the power frequency chopper has a large power frequency ripple, which requires a large-volume power frequency filter inductor to suppress the ripple, further increasing the size and weight of the equipment.
[0006] 3) Lagging response speed: The adjustment cycle is limited by the 50Hz power frequency, and the response speed is only in the hundreds of milliseconds, which cannot meet the rapid temperature adjustment requirements when switching between multiple processes.
[0007] 4) Poor heating uniformity and short lifespan: The use of thermal resistance wire heating results in obvious local temperature gradients, making it impossible to achieve uniform heating of the large reaction chamber; moreover, the short lifespan of the thermal resistance wire and the frequent replacement increase maintenance costs.
[0008] 5) Power regulation has abrupt changes: Traditional power regulation methods often use stepped regulation methods such as cycle distribution and phase shifting, which have inherent abrupt changes when switching power, resulting in large furnace temperature fluctuations during process switching, which further reduces the yield of silicon wafers.
[0009] Therefore, there is an urgent need for a power regulation scheme that can take into account high power, high power density, fast response, smooth power regulation and uniform heating to meet the application requirements of multi-process integrated doping oxidation equipment. Summary of the Invention
[0010] To address one or more shortcomings of the existing technology, the present invention provides a power regulator system and power regulation method for a multi-process integrated doping oxidation device, which can solve one or more of the technical problems mentioned above.
[0011] To achieve the above objectives, the present invention adopts one or more of the following technical solutions: In a first aspect, a power regulator system for a multi-process integrated doping and oxidation device is provided, comprising: At least one AC / DC converter with adjustable output voltage is used to convert three-phase alternating current into DC bus voltage; Multiple power control units connected in parallel to the DC bus; The sampling control circuit is connected to the AC / DC converter and the power adjustment unit, respectively. The power adjustment unit includes a half-bridge switch, a switched capacitor module, and a heating coil load. The half-bridge switch includes an upper bridge arm switch and a lower bridge arm switch connected in series between the positive and negative terminals of the DC bus. The switched capacitor module and the heating coil load are connected in series to form an LC series resonant branch. One end of the LC series resonant branch is connected to the midpoint of the half-bridge switch, and the other end is connected to the negative terminal of the DC bus. The sampling control circuit is used to acquire the power signal of the heating coil load, and adjust the output voltage of the AC / DC converter in a closed loop according to the power signal, and control the total capacitance value connected to the switched capacitor module. The smooth and stable adjustment of the heating coil load power is achieved through the coordinated control of the output voltage and the total capacitance value.
[0012] As a further implementation, the switched capacitor module is a switched capacitor module including multiple parallel capacitor branches. Each capacitor branch includes at least a capacitor connected in series and a branch switch. By controlling the on / off state of the branch switch, the total capacitance value connected to the switched capacitor module is changed. By changing the resonant frequency and impedance of the capacitor adjustment circuit, the power output to the heating coil load is precisely controlled.
[0013] As a further implementation, the heating coil load is an eddy current heating coil, whose equivalent circuit includes at least parasitic resistance and inductance.
[0014] As a further implementation, at least one of the upper bridge arm switch and the lower bridge arm switch is connected in reverse parallel with a freewheeling diode to enable resonant current freewheeling.
[0015] As a further implementation, there are multiple AC / DC converters, with the input terminals of the multiple AC / DC converters connected to a three-phase power grid and the output terminals connected in parallel to form the DC bus.
[0016] As a further implementation, a high-frequency isolation transformer is also included, which is set after the AC / DC converter or before the power adjustment unit to achieve electrical isolation.
[0017] As a further implementation, a DC bus capacitor is also included, connected in parallel between the positive and negative terminals of the DC bus.
[0018] On the other hand, a power regulation method for a multi-process integrated doping oxidation device is provided, based on a power regulator system for the multi-process integrated doping oxidation device as described in any of the above claims, comprising: The switched capacitor module and the heating coil load are connected in series to form an LC series resonant branch, which is driven by a half-bridge switch at the resonant frequency. The sampling control circuit acquires the power signal of the heating coil load, compares the power signal with the target power, and performs power closed-loop control based on the deviation between the two. When adjusting the power, first adjust the output voltage of the front-end AC / DC converter, then switch the capacitors of the switched capacitor module, and correct the output voltage of the AC / DC converter based on the deviation between the power signal and the target power to achieve smooth and stable adjustment of the heating coil load power.
[0019] As a further implementation, when adjusting the power, the output voltage of the preceding AC / DC converter is first adjusted, then the capacitor switching module is performed, and the output voltage of the AC / DC converter is corrected based on the deviation between the power signal and the target power, thereby achieving smooth and stable adjustment of the heating coil load power. Specifically, this includes: When the actual power indicated by the power signal is lower than the target power, the current resonant frequency is maintained, and the output voltage of the AC / DC converter is gradually increased to a preset threshold. Add one or more sets of capacitors to the switched capacitor module to change the resonant frequency of the LC series resonant branch. Calculate the difference between the actual power and the target power, and reduce the output voltage of the AC / DC converter according to the difference to stabilize the power of the heating coil load to the target power.
[0020] As a further implementation, when adjusting the power, the output voltage of the preceding AC / DC converter is first adjusted, then the capacitor switching module is performed, and the output voltage of the AC / DC converter is corrected based on the deviation between the power signal and the target power, thereby achieving smooth and stable adjustment of the heating coil load power. Specifically, this includes: When the actual power indicated by the power signal is higher than the target power, the current resonant frequency is maintained, and the output voltage of the AC / DC converter is gradually reduced to a preset threshold. Disconnect one or more sets of capacitors in the switched capacitor module to change the resonant frequency of the LC series resonant branch. Calculate the difference between the actual power and the target power, and increase the output voltage of the AC / DC converter based on the difference to stabilize the power of the heating coil load to the target power.
[0021] As a further implementation, the LC series resonant branch corresponds to the minimum output power at the minimum resonant frequency; When the actual power indicated by the power signal and the target power do not exceed the minimum output power, only the output voltage of the AC / DC converter is adjusted to achieve continuous power regulation, and the output power of the LC series resonant branch is kept stable by using an intermittent working mode.
[0022] As a further implementation, the LC series resonant branch is equivalent to a short circuit when it operates in the resonant state, and the branch current is determined by the output voltage of the AC / DC converter and the parasitic resistance of the heating coil load. And / or, the heating coil load is an eddy current heating coil, which uniformly heats the reaction chamber through the eddy current effect.
[0023] By adopting the above technical solution, the beneficial effects of the present invention are as follows: 1. The power adjustment unit of this invention adopts an LC series resonant topology, which constitutes a high-frequency induction heating power supply circuit tuned by a switched capacitor module. The resonant parameters can be dynamically adjusted by changing the total capacitance value added to the switched capacitor module. Under different loads and different heating stages, the circuit can be kept in the optimal resonant state, achieving precise control of the power and temperature of induction heating. Furthermore, electrical isolation under this architecture can be achieved through a small-volume high-frequency isolation transformer, and the filtering devices are also high-frequency small devices. Compared with the traditional power frequency chopper architecture, the size and weight of the equipment are reduced, the power density is greatly improved, and the installation and transportation costs are effectively reduced.
[0024] 2. This invention is based on the high-frequency operating mode of LC resonance. The power adjustment cycle is not limited by the power frequency, and the response speed can reach the millisecond level. It can meet the rapid temperature adjustment requirements of multi-process integrated equipment during process switching and effectively improve production efficiency.
[0025] 3. This invention uses an eddy current heating coil to replace the traditional thermal resistance wire, eliminating local temperature gradients and enabling uniform heating of the large reaction chamber, effectively improving the yield of silicon wafers; at the same time, the lifespan of the eddy current heating coil is much longer than that of the thermal resistance wire, eliminating the need for frequent replacement and significantly reducing maintenance costs.
[0026] 4. This invention adopts a power adjustment strategy of pre-voltage adjustment-capacitor switching-closed-loop correction, which eliminates the power jump of traditional stepped power adjustment in principle, realizes smooth and stable power adjustment across the entire power range, ensures furnace temperature stability during multi-process switching, and further improves silicon wafer yield. Attached Figure Description
[0027] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.
[0028] Figure 1 This is a schematic diagram of the power regulator system structure in one or more embodiments of the present invention; Figure 2 This is a schematic diagram of the power adjustment unit structure in one or more embodiments of the present invention; Figure 3 This is a schematic diagram of the frequency-power of the power adjustment unit in one or more embodiments of the present invention. Detailed Implementation
[0029] It should be noted that the following detailed description is illustrative and intended to provide further explanation of the invention. Unless otherwise specified, all technical and scientific terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.
[0030] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments of the present invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0031] Example 1 In one typical embodiment of this application, a power regulator system for a multi-process integrated doping oxidation device is provided, such as... Figures 1-2 As shown, it includes: At least one AC / DC converter with adjustable output voltage is used to convert three-phase alternating current into DC bus voltage; Multiple power control units connected in parallel to the DC bus; The sampling control circuit is connected to the AC / DC converter and the power adjustment unit, respectively. The power adjustment unit includes a half-bridge switch, a switched capacitor module, and a heating coil load. The half-bridge switch includes an upper bridge arm switch and a lower bridge arm switch connected in series between the positive and negative terminals of the DC bus. The switched capacitor module and the heating coil load are connected in series to form an LC series resonant branch. One end of the LC series resonant branch is connected to the midpoint of the half-bridge switch, and the other end is connected to the negative terminal of the DC bus. The sampling control circuit is used to acquire the power signal of the heating coil load, and adjust the output voltage of the AC / DC converter in a closed loop according to the power signal, as well as control the total capacitance value connected to the switched capacitor module.
[0032] Specifically, such as Figure 1 As shown, the power regulator system in this embodiment includes two AC / DC converters connected in parallel. The input terminals of the two AC / DC converters are connected to a three-phase power grid, and their output terminals are connected in parallel to form a DC bus. Several power regulation units are connected in parallel on the DC bus. In a multi-process integrated doping oxidation device, each power regulation unit can correspond to a heating zone and be independently controlled, thereby meeting the zoned heating requirements of the large reaction chamber and effectively ensuring the uniformity of heating. The sampling control circuit is connected to the AC / DC converter on one hand to adjust the output voltage of the AC / DC converter, and on the other hand to the switched capacitor module. By controlling the switching of the capacitors, the total capacitance value connected to the switched capacitor module can be adjusted, thereby changing the resonant frequency of the LC series resonant branch and controlling the power output to the heating coil load. In other optional embodiments, the AC / DC converter can also be one, three, or other numbers of multiple low-power AC / DC converters connected in parallel, which can achieve a high power output of hundreds of kilovolt-amperes to meet the high power requirements of the large reaction chamber.
[0033] Specifically, the power adjustment unit includes a half-bridge switch, a switched capacitor module, and a heating coil load. The DC bus, the half-bridge switch, the switched capacitor module, and the heating coil load form a closed loop. For example... Figure 2 As shown, the LC series resonant branch formed by the switched capacitor module and the heating coil load is the core hardware topology of the power regulation unit. The switched capacitor module provides the resonant capacitor C, and the heating coil load provides the resonant inductance L. These two components, connected in series, form the resonant branch, enabling high-frequency resonant operation. The half-bridge switch includes an upper arm switch Q1 and a lower arm switch Q2, which are connected in series. The positive terminal of the upper arm switch is connected to the positive terminal of the DC bus, and the midpoint between the negative terminal of the upper arm switch and the positive terminal of the lower arm switch is the half-bridge switch's midpoint. The negative terminal of the lower arm switch is connected to the negative terminal of the DC bus. One end of the LC series resonant branch is connected to the midpoint of the half-bridge switch, and the other end is connected to the negative terminal of the DC bus. Through this structure, the half-bridge switch can drive the LC series resonant branch to operate at a high-frequency resonant frequency, replacing the traditional power frequency chopper. This eliminates power frequency fluctuations in hardware, providing a foundation for smooth power regulation.
[0034] Specifically, the switched capacitor module includes multiple parallel capacitor branches, each of which includes at least a capacitor connected in series and a branch switch. The capacitance value connected to the switched capacitor module is changed by controlling the on / off state of the branch switch. In this embodiment, the switched capacitor module includes two identical capacitor branches, such as... Figure 2 As shown, each capacitor branch includes one capacitor and one branch switch. The capacitors C1 and C2 on the two capacitor branches are of the same model and specifications. Using this structure, the total capacitance value connected to the LC series resonant branch can be flexibly changed by controlling the on / off state of different branch switches, thereby changing the resonant frequency of the LC series resonant branch and achieving coarse power adjustment. It should be noted that the switched capacitor module structure provided by this invention can support the simultaneous switching of single or multiple capacitor groups, adapting to different power regulation requirements.
[0035] Specifically, the heating coil load is an eddy current heating coil, whose equivalent circuit includes at least parasitic resistance and inductance. In this embodiment, as... Figure 2 As shown, in the equivalent circuit of the heating coil load, the parasitic resistance R is the current-limiting resistor for the resonant current, and the resistance R is connected in series with the inductance L. In this embodiment, an eddy current heating coil is used instead of a traditional thermal resistance wire, which can achieve heating through the eddy current effect, without local temperature gradients, and can achieve uniform heating of the large reaction chamber.
[0036] Specifically, at least one of the upper bridge arm switches and the lower bridge arm switches is connected in reverse parallel with a freewheeling diode to enable resonant current freewheeling. In this embodiment, as shown... Figure 2 As shown, diode D1 is connected in reverse parallel to the upper bridge arm switch Q1, and diode D2 is connected in reverse parallel to the lower bridge arm switch Q2. When the upper bridge arm switch is off, diode D1 provides a freewheeling path for the resonant current, maintaining the continuity of the resonant current and preventing the switching transistor from being damaged by reverse high voltage, thus improving the reliability of the circuit. Similarly, when the lower bridge arm switch is off, diode D2 provides a freewheeling path for the resonant current.
[0037] Example 2
[0038] In another typical embodiment of this application, a power adjustment method for a multi-process integrated doping oxidation device is provided. This method is implemented based on the power regulator system in Embodiment 1, such as... Figure 3 As shown, it specifically includes: Step 1: The switched capacitor module and the heating coil load are connected in series to form an LC series resonant branch. The half-bridge switch drives the LC series resonant branch to work at the resonant frequency, so that the branch always operates in the resonant state.
[0039] Specifically, under resonant conditions, the equivalent impedance of the LC series resonant branch is the smallest, and it can be approximated as a short circuit. At this time, the branch current satisfies formula (1): (1) Among them, V bus R is the output voltage of the AC / DC converter, and R is the parasitic resistance of the heating coil load. The branch current in the resonant state is determined only by the DC bus voltage and the parasitic resistance. The current is stable and without fluctuations, which is the basis for the smooth power adjustment method in this embodiment.
[0040] Meanwhile, the resonant frequency of the LC series resonant branch satisfies formula (2): (2) Where L is the inductance of the heating coil load, and C is the total capacitance of the switched capacitor module. Changing the value of the total capacitance C can change the resonant frequency f.
[0041] The output power of the heating coil load is determined by the load current I and the parasitic resistance R, and the relationship is as follows: (3) As can be seen from equation (3), the output power P can be adjusted by changing the load current I; and by controlling the switching on and off of one or more branch switches to change the total capacitance C of the switching capacitor module, the resonant frequency f0 can be changed, thereby changing the equivalent impedance and load current of the resonant branch and realizing power regulation.
[0042] Step 2: Acquire the power signal of the heating coil load, and perform power closed-loop control based on the power signal and the target power.
[0043] Specifically, the sampling control circuit acquires the power signal of the heating coil load in real time to obtain the actual output power P of the heating coil load. act , will P act With the preset target power P set By comparison, the power deviation ΔP is obtained: (4) The sampling control circuit performs closed-loop regulation calculations based on the power deviation ΔP, and the output regulation is used to control the output voltage of the AC / DC converter and the capacitor switching action of the switched capacitor module, thereby forming a complete power closed-loop control.
[0044] Step 3: When adjusting the power, first adjust the output voltage of the front-end AC / DC converter, then switch the capacitors of the switched capacitor module, and correct the output voltage of the AC / DC converter based on the deviation between the power signal and the target power to achieve smooth and stable power adjustment.
[0045] Specifically, in combination Figure 3 The frequency-power characteristic curve of the power adjustment unit shown in this embodiment divides the power adjustment range into two intervals: One is the light-load continuous adjustment range.
[0046] like Figure 3 As shown, the LC series resonant branch at minimum capacitance and minimum resonant frequency f min The minimum output power P1 corresponds to the following, when the actual output power P act With target power P set When the values do not exceed P1, the system enters the light-load continuous adjustment range.
[0047] During the light-load continuous adjustment range, the system does not perform any capacitor switching operations, and only adjusts the output voltage of the front-end AC / DC converter to achieve power regulation.
[0048] In this embodiment, the minimum resonant frequency f min The power at that time is P1. To achieve continuous power adjustment, the output voltage V of the front-end AC / DC converter is adjusted from 0 to P1. bus By changing the load current in this way, continuous and smooth power regulation can be achieved.
[0049] Under extremely light load conditions, an intermittent working mode can be further adopted to ensure that the actual output power of the heating coil under heavy load is stable and without fluctuation.
[0050] The second is the heavy-load combination adjustment range.
[0051] When the target power P set When the voltage is higher than P1, the system achieves coarse power adjustment by changing the resonant frequency through capacitor switching, and fine power adjustment in conjunction with bus voltage regulation. For example... Figure 3 As shown, in LC series resonant operating mode, the higher the resonant frequency, the greater the corresponding output power; the lower the resonant frequency, the smaller the corresponding output power. Therefore, by switching capacitors to change the resonant frequency, a step-wise switching of the power point can be achieved, and the step jump can be eliminated by correcting the bus voltage.
[0052] When the actual power P act Below the target power P set At that time, the power boost control process is executed, which specifically includes: Without changing the current capacitor switching state, gradually increase the output voltage V of the AC / DC converter. bus This allows the actual power to approach the target power until the voltage reaches a preset threshold.
[0053] Reference Figure 3 When the output power is operating at P i Point (P) i >P1), power needs to be adjusted to P i+1 Point (P) i+1 >P iWhen the output voltage V of the AC / DC converter is gradually increased, the output voltage V of the AC / DC converter is gradually increased. bus This allows the actual power to approach the target power until the voltage increase satisfies equation (5), i.e., the preset threshold is reached. Where i = 0, 1, 2, ..., n.
[0054] (5) By opening one or more branch switches to supplement the input of one or more sets of capacitors, the total capacitance increases, and the resonant frequency f0 rises. Combined with... Figure 3 It can be seen that increasing the resonant frequency will cause the actual output power to increase in a step-like manner.
[0055] Calculate the actual power P act With target power P set The power deviation ΔP is controlled by appropriately reducing the output voltage of the AC / DC converter to offset the power overshoot caused by capacitor input, so that the output power can be smoothly stabilized to the target power.
[0056] When the actual power P act Higher than the target power P set At that time, the power reduction control process is executed, which specifically includes: Keeping the current capacitor switching state unchanged, gradually reduce the output voltage V of the AC / DC converter. bus This allows the actual power to approach the target power in advance.
[0057] Reference Figure 3 When the output power is operating at P i+1 Point (P) i+1 >P1), power needs to be adjusted to P i Point (P) i+1 >P i When the AC / DC converter output voltage V is gradually reduced, the output voltage V of the AC / DC converter is gradually decreased. bus This will bring the actual power closer to the target power until the voltage drop satisfies equation (6).
[0058] (6) By controlling the branch switch to disconnect one or more capacitor branches, the total capacitance C is reduced, and the resonant frequency f0 is lowered. Combined with... Figure 3 It can be seen that a decrease in resonant frequency will cause the actual output power to decrease in a step-like manner.
[0059] Calculate the power deviation ΔP, and based on ΔP, appropriately increase the bus voltage to compensate for the power drop caused by capacitor cut-off, so that the output power can be smoothly stabilized to the target value.
[0060] Therefore, within the heavy-load combined adjustment range, the system achieves coarse power adjustment by changing the resonant frequency through capacitor switching, and eliminates power jumps through bus voltage pre-adjustment + closed-loop correction, thus realizing smooth adjustment of the output power of the heating coil load, which can improve the processing quality of photovoltaic silicon wafers in multi-process integrated doping oxidation equipment.
[0061] In this embodiment, when the LC series resonant branch is working in the resonant state, it is equivalent to a short circuit. The branch current is determined only by the bus voltage and the load parasitic resistance. The current waveform is continuous and smooth, with no power frequency ripple, which avoids the current impact of traditional chopper power regulation in principle.
[0062] In this embodiment, the heating coil load is an eddy current heating coil, which heats the reaction chamber uniformly through the eddy current effect. There are no local high temperature zones and temperature gradients like those of traditional resistance wires, which can significantly improve the temperature uniformity of the reaction chamber and the yield of silicon wafers. At the same time, the lifespan of the eddy current coil is much longer than that of the resistance wire, reducing equipment maintenance costs.
[0063] Through the above, this embodiment achieves smooth adjustment of the output power across the entire range, solving problems such as slow response, large size, uneven heating, and obvious power jumps in traditional power regulators.
[0064] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Those skilled in the art should understand that the present invention can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A power regulator system for a multi-process integrated doping oxidation device, characterized in that, include: At least one AC / DC converter with adjustable output voltage is used to convert three-phase alternating current into DC bus voltage; Multiple power control units connected in parallel to the DC bus; The sampling control circuit is connected to the AC / DC converter and the power adjustment unit, respectively. The power adjustment unit includes a half-bridge switch, a switched capacitor module, and a heating coil load. The half-bridge switch includes an upper bridge arm switch and a lower bridge arm switch connected in series between the positive and negative terminals of the DC bus. The switched capacitor module and the heating coil load are connected in series to form an LC series resonant branch. One end of the LC series resonant branch is connected to the midpoint of the half-bridge switch, and the other end is connected to the negative terminal of the DC bus. The sampling control circuit is used to acquire the power signal of the heating coil load, and adjust the output voltage of the AC / DC converter in a closed loop according to the power signal, and control the total capacitance value connected to the switched capacitor module. The smooth and stable adjustment of the heating coil load power is achieved through the coordinated control of the output voltage and the total capacitance value.
2. The power regulator system for a multi-process integrated doping oxidation device as described in claim 1, characterized in that, The switched capacitor module includes multiple parallel capacitor branches, each of which includes at least a capacitor connected in series and a branch switch. The total capacitance value connected to the switched capacitor module is changed by controlling the on / off state of the branch switch.
3. The power regulator system for a multi-process integrated doping oxidation device as described in claim 1, characterized in that, The heating coil load is an eddy current heating coil, and its equivalent circuit includes at least parasitic resistance and inductance.
4. The power regulator system for a multi-process integrated doping oxidation device as described in claim 1, characterized in that, At least one of the upper bridge arm switch and the lower bridge arm switch is connected in reverse parallel with a freewheeling diode to enable resonant current freewheeling.
5. The power regulator system for a multi-process integrated doping oxidation device as described in claim 1, characterized in that, The AC / DC converter consists of multiple units, with the input terminals of the multiple AC / DC converters connected to a three-phase power grid and the output terminals connected in parallel to form the DC bus.
6. A power regulation method for a multi-process integrated doping oxidation device, based on the power regulator system as described in any one of claims 1-5, characterized in that, include: The switched capacitor module and the heating coil load are connected in series to form an LC series resonant branch, which is driven by a half-bridge switch at the resonant frequency. The sampling control circuit acquires the power signal of the heating coil load, compares the power signal with the target power, and performs power closed-loop control based on the deviation between the two. When adjusting the power, first adjust the output voltage of the front-end AC / DC converter, then switch the capacitors of the switched capacitor module, and correct the output voltage of the AC / DC converter based on the deviation between the power signal and the target power to achieve smooth and stable adjustment of the heating coil load power.
7. The power adjustment method for a multi-process integrated doping oxidation device as described in claim 6, characterized in that, When adjusting the power, the output voltage of the preceding AC / DC converter is first adjusted, then the capacitor switching module is switched on and off, and the output voltage of the AC / DC converter is corrected based on the deviation between the power signal and the target power, thereby achieving smooth and stable adjustment of the heating coil load power. Specifically, this includes: When the actual power indicated by the power signal is lower than the target power, the current resonant frequency is maintained, and the output voltage of the AC / DC converter is gradually increased to a preset threshold. Add one or more sets of capacitors to the switched capacitor module to change the resonant frequency of the LC series resonant branch. Calculate the difference between the actual power and the target power, and reduce the output voltage of the AC / DC converter according to the difference to stabilize the power of the heating coil load to the target power.
8. The power adjustment method for a multi-process integrated doping oxidation device as described in claim 6, characterized in that, When adjusting the power, the output voltage of the preceding AC / DC converter is first adjusted, then the capacitor switching module is switched on and off, and the output voltage of the AC / DC converter is corrected based on the deviation between the power signal and the target power, thereby achieving smooth and stable adjustment of the heating coil load power. Specifically, this includes: When the actual power indicated by the power signal is higher than the target power, the current resonant frequency is maintained, and the output voltage of the AC / DC converter is gradually reduced to a preset threshold. Disconnect one or more sets of capacitors in the switched capacitor module to change the resonant frequency of the LC series resonant branch. Calculate the difference between the actual power and the target power, and increase the output voltage of the AC / DC converter based on the difference to stabilize the power of the heating coil load to the target power.
9. The power adjustment method for a multi-process integrated doping oxidation device as described in claim 6, characterized in that, The LC series resonant branch corresponds to the minimum output power at the minimum resonant frequency; When the actual power indicated by the power signal and the target power do not exceed the minimum output power, only the output voltage of the AC / DC converter is adjusted to achieve continuous power regulation, and the output power of the LC series resonant branch is kept stable by using an intermittent working mode.
10. The power adjustment method for a multi-process integrated doping oxidation device as described in claim 6, characterized in that, When the LC series resonant branch operates in the resonant state, it is equivalent to a short circuit. The branch current is determined by the output voltage of the AC / DC converter and the parasitic resistance of the heating coil load. And / or, the heating coil load is an eddy current heating coil, which uniformly heats the reaction chamber through the eddy current effect.