Gas trace particle optical detection instrument calibration sample supply device and apparatus

Abstract

The present application relates to the field of trace gas detection, especially to a device for calibrating a gas trace particle optical detection instrument, which comprises: a cabinet, including a cabinet shell and a cabinet hatch; a mounting platform installed inside the cabinet shell; an air compression assembly installed on the mounting platform, with an output end outputting high-pressure air through a first pipeline; a filtering assembly connected to the first pipeline at an input end and connected to a second pipeline at an output end to output high-pressure clean air; and an atomization assembly including an atomization cup mounting portion and a standard sample atomization cup, connected to the second pipeline at an input end and connected to a third pipeline at an output end to output aerosol. Each component of the sample supply device is arranged inside the cabinet, and the standard sample bottle is installed and replaced through the atomization assembly, so that aerosol with different sizes of particles can be quickly and flexibly transported for calibration by the rear-end detection instrument accordingly, and the cabinet can be closed for carrying and placing after the test is completed.

Description

Technical Field

[0001] This invention relates to the field of gas trace detection, and in particular to a calibration sample supply device and equipment for optical detection instruments for gas trace particles. Background Technology

[0002] Optical particle counters are key equipment in industries with low pollution levels and are widely used in semiconductor manufacturing, pharmaceuticals, and other fields. International standards clearly require that such equipment be calibrated regularly to maintain the accuracy of the optical particle counter's test results.

[0003] Existing optical particle counters are typically calibrated by introducing standard, known-sized aerosol particles into the test chamber of the instrument, generating corresponding pulse signals to calibrate the detection signal. Such existing detection systems usually consist of multiple interconnected devices, such as condensation nuclei generators and differential electromigration analyzers, or other necessary components like air compressors and nebulizers. This results in low system integration and limited flexibility in adjusting the sample supply system and replacing components when generating aerosol particles of various sizes. Summary of the Invention

[0004] Firstly, in order to address the problems of low integration and low flexibility in the calibration sample supply of existing gas trace particle optical detection instruments, embodiments of this application provide a calibration sample supply device for gas trace particle optical detection instruments.

[0005] The device includes: The chassis includes a chassis shell and a chassis door, wherein the chassis door is closably connected to the chassis shell; The mounting platform is installed inside the chassis housing; An air compressor assembly is installed on the mounting platform, and the output end of the air compressor assembly outputs high-pressure air through a first pipeline. A filter assembly is disposed in the housing, the input end of the filter assembly is connected to the first pipeline, and the output end of the filter assembly is connected to the second pipeline to output high-pressure clean air; The atomizing component is located inside the chassis door. The atomizing component includes an atomizing cup mounting part and a standard sample atomizing cup. The input end of the atomizing component is connected to the second pipeline, and the output end of the atomizing component is connected to the third pipeline to output aerosol.

[0006] The second and third pipes are flexible hoses.

[0007] Because of the above-mentioned solution, the sample supply device of this application embodiment sets all the components for generating and transporting aerosols inside the chassis, and installs and replaces standard sample bottles through the atomizing component, thereby quickly and flexibly transporting aerosols with particles of different sizes for the downstream detection instruments to be calibrated accordingly. After the test is completed, the chassis can be closed and the whole device can be carried and placed away. It can be used directly when needed. The device has a high degree of integration and does not require the connection of components and pipelines.

[0008] In one possible implementation, the second pipeline includes a first pipeline segment and a second pipeline segment, which are connected by a first tee pipe, and the other port of the first tee pipe is connected to a gas split pipe.

[0009] In one possible implementation, throttling needle valves are provided on the second pipeline section and the shunt pipe, respectively.

[0010] In one possible implementation, the third pipeline includes a third pipeline segment and a fourth pipeline segment, and the third pipeline segment, the fourth pipeline segment and the gas split pipe are connected by a second tee pipe.

[0011] In one possible implementation, the outlet of the third pipeline is connected to a gas storage tank having an aerosol mixed gas outlet.

[0012] In one possible implementation, the mounting platform has a bottom space below it for accommodating electrical components, and the mounting platform has a vertical end face facing the chassis door, on which a power interface, a switch, and an indicator light are provided.

[0013] In one possible implementation, a mounting bracket is provided above the mounting platform, and the filter assembly is mounted on the mounting bracket. The mounting bracket includes a support column with its bottom on the mounting platform and a platform support plate with its top on the support column.

[0014] In one possible implementation, the mounting bracket includes a support column with its bottom disposed on the mounting platform and a mounting plate disposed on top of the support column.

[0015] Secondly, embodiments of this application also provide a calibration device for a gas trace particle optical detection instrument, the device including the sample supply device described in the first aspect.

[0016] In one possible implementation, the sample supply device is connected to a gas drying device. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the first embodiment of the present invention; Figure 2This is a schematic diagram of the internal structure of the first embodiment of the present invention. Detailed Implementation

[0018] The following detailed description, in conjunction with specific embodiments and accompanying drawings, clarifies that the described embodiments are only a portion, not all, of the embodiments. All other embodiments obtained by those skilled in the art based on the following embodiments without inventive effort are also within the scope of protection of this invention.

[0019] It should be understood that if the controllers or control circuits involved in the embodiments are conventional control technologies or units for those skilled in the art, such as the control circuits of the controllers, they can be implemented by those skilled in the art using existing technologies.

[0020] The disclosure of the embodiments provides many different implementations or examples for different ways of implementing the present invention. To simplify the disclosure of the present invention, the embodiments describe components and arrangements of specific examples. Of course, these are merely examples and are not intended to limit the present invention. Furthermore, reference numerals and / or reference letters may be repeated in different examples in the embodiments; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed. Moreover, if examples of various specific processes and materials are provided in the embodiments, those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0021] The first embodiment of this application provides a calibration sample supply device for a gas trace particle optical detection instrument.

[0022] like Figure 1 and Figure 2 As shown, the device includes: The chassis 1 includes a chassis shell 101 and a chassis door 102, wherein the chassis door 102 is openably and closably connected to the chassis shell 101; Mounting platform 2, which is installed inside the chassis housing 101; Air compressor assembly 3 is installed on the mounting platform 2, and the output end of the air compressor assembly 3 outputs high-pressure air through the first pipeline 4. The filter assembly 5 is disposed in the housing 101. The input end of the filter assembly 5 is connected to the first pipeline 4, and the output end of the filter assembly 5 is connected to the second pipeline 6 to output high-pressure clean air. The atomizing component 7 is located inside the chassis door 102. The atomizing component 7 includes an atomizing cup mounting part 701 and a standard sample atomizing cup 702. The input end of the atomizing component is connected to the second pipeline 6, and the output end of the atomizing component is connected to the third pipeline 8 to output aerosol.

[0023] The second pipe 6 and the third pipe 8 are flexible hoses.

[0024] The chassis 1 is the structural basis for all components to function as a whole device. Since the same device is needed to transport aerosols containing particles of different sizes, the chassis needs to have a certain degree of openness in order to facilitate the replacement of suspensions containing particles of different standard sizes. In order to balance the requirements of openness and the structural integrity of the device, the chassis door 102 is connected to the chassis shell 101 in an openable and closable manner. The chassis door 102 can be opened when the suspension needs to be replaced, and the chassis door 102 can be closed during operation or when idle to maintain the cleanliness of the internal environment.

[0025] The air compressor assembly 3 is a typical air pump, air compressor, or other air compressor device capable of outputting high-pressure gas. The gas can be air or a specific gas used for special detection requirements, such as nitrogen or carbon dioxide. In this embodiment, the air compressor assembly 3 is a diaphragm pump.

[0026] The filter assembly 5 is used to filter the high-pressure gas generated by the air compressor assembly 3 to obtain clean high-pressure gas and avoid the interference of impurities contained in the high-pressure gas itself with the measurement results.

[0027] The atomizing component 7 is primarily used to hold standard particle size particles (polystyrene: particle size distribution error < ±2%) and distilled water. It internally features liquid injection channels and gas shear channels, allowing the liquid to form micron-sized droplets under the action of a high-speed carrier gas. These particles are monodisperse. For example, they can be formed by atomizing a monodisperse distribution of NIST-traceable polystyrene latex spheres with a predetermined size distribution, suspended in water, allowing water to evaporate from the formed aerosol particles. By changing the suspension containing particles of different sizes in the atomizing cup (e.g., 0.1µm, 0.2µm, 0.3µm, 0.5µm, 1µm standard particles), or by changing the atomizing cup itself to include a suspension of particles of different sizes, sample supply for calibration of different particle sizes can be achieved.

[0028] In this embodiment, the atomizing component 7 is installed on the chassis door 102. After opening the door, the suspension in the standard liquid atomizing cup 702 can be easily replaced, or an atomizing cup containing particles of different sizes can be directly replaced. The atomizing cup is a suspension container, which generally includes a cup body and a cup lid. The cup body and the cup lid are respectively provided with pipe interfaces. An atomizing nozzle is provided inside the pipe interface of the cup body. When the high-pressure gas passes through the atomizing nozzle, it atomizes the suspension into an aerosol and outputs it from the pipe interface on the cup lid.

[0029] The chassis door 102 is closable and connected to the chassis housing 101. An atomizing component 7 is installed inside the chassis door 102 and connected via pipes. In this embodiment, the second pipe 6 and the third pipe 8 are flexible hoses to ensure smooth opening and closing of the chassis door 102. Whether other pipes that do not interfere with the opening and closing of the chassis door 102 are flexible hoses depends on the needs; rigid pipes can also be used.

[0030] The first embodiment aims to provide a highly integrated sample supply device for calibrating trace particle optical detection instruments that does not require temporary assembly and can flexibly provide calibration samples of multiple sizes. The overall principle involves atomizing a suspension containing standard particle size particles in an atomizing cup into an aerosol using clean gas. This aerosol is then input into the detection instrument, and the drift between the instrument's measured values ​​and the size of the standard particle size is analyzed. By repeatedly replacing the suspension with particles of different sizes, the instrument's measurement results are calibrated multiple times to achieve the desired calibration effect.

[0031] The working principle of the calibration sample supply device in this embodiment is the reverse process of the particle optical detection instrument. Usually, when an optical detection instrument detects particle size, the particle size is unknown. A pulse signal is obtained through the optical detection cavity, and the size of the particle is determined by the magnitude of the pulse signal. However, the calibration sample supply device in this embodiment inputs a standard particle sample of known size into the optical detection cavity of the optical detection instrument to test whether the magnitude of the pulse signal generated by the optical detection instrument is consistent with the size of the standard particle, or the amount of drift when they are inconsistent.

[0032] After calibration by this sample supply device, particle optics detection instruments typically fall into the following categories: 1. Working normally The relationship between the amplitude and quantity of the amplified pulse follows a normal distribution. The pulse amplitude distribution indicates that its resolution falls within a set reference threshold range.

[0033] 2. Insufficient gain When the overall pulse amplitude distribution is too small, it indicates insufficient signal gain. This will cause a large number of real particle signals close to the resolution critical range to be ignored during digital quantization, resulting in an underestimation of particle count. It will also cause distortion of particle electrical signal characteristics, leading to misjudgment of particle size. In this case, the gain of the signal gain converter can be appropriately increased, or the digital quantization threshold can be decreased to compensate for the insufficient signal amplitude.

[0034] 3. Case of excessive gain When the overall pulse amplitude distribution is too large, it indicates that the signal gain is too high, which will lead to a larger resolution range, resulting in an inflated number of particles and an overly large particle size distribution. In this case, the gain of the signal gain converter can be appropriately reduced, or the digital quantization threshold can be increased to ensure that the pulse amplitude does not exceed the maximum quantization adjustment range.

[0035] 4. Noise and Interference Identification If a pulse signal is detected even when no particles are introduced, it indicates the presence of noise or electromagnetic interference. Noise and interference can increase the sensor's output amplitude, but their distribution characteristics differ from those of real particle signals. They can be distinguished by statistically analyzing the background noise distribution and pulse pattern, thereby guiding the design of shielding, filtering, or grounding optimization.

[0036] By employing the aforementioned signal gain and noise optimization strategies, we can ensure that the output pulse signal has a stable amplitude distribution, a good signal-to-noise ratio, and an accurate particle size correspondence.

[0037] The sample supply device of the first embodiment houses all components that generate and transport aerosols inside the chassis. By installing and replacing standard sample bottles through the atomizing component, it can quickly and flexibly transport aerosols with particles of different sizes for the downstream detection instruments to calibrate accordingly. After the test is completed, the chassis can be closed and the whole device can be carried and stored. It can be used directly when needed. The device has a high degree of integration and does not require the connection of components and pipelines.

[0038] When high-pressure gas passes through the atomizing cup to generate aerosol, the airflow generated by atomization in the pipeline usually has a high speed and random swirling, and the airflow is relatively turbulent. Under the action of turbulent airflow, particles are prone to violent collisions that cause them to coalesce or hit the pipe wall, resulting in particle size increasing or decreasing, which affects the measurement accuracy.

[0039] Therefore, in some embodiments, the second pipeline 6 includes a first pipeline segment 601 and a second pipeline segment 602, which are connected by a first tee pipe 9, and the other port of the first tee pipe 9 is connected to a gas split pipe 10.

[0040] Meanwhile, the third pipeline 8 includes a third pipeline section 801 and a fourth pipeline section 802, and the third pipeline section 801, the fourth pipeline section 802 and the gas split pipe 10 are connected by a second tee pipe 11.

[0041] By merging the uniform airflow in the gas splitter 10 with the turbulent airflow in the third pipe section 801, the airflow in the third pipe section 801 can be rectified and then output.

[0042] In order to further precisely control the airflow in the gas split pipe 10 and the airflow in the second pipeline section 602, in this embodiment, the second pipeline section 602 and the gas split pipe 10 are respectively provided with throttling needle valves 12.

[0043] In addition, the outlet of the third pipeline is connected to a gas storage tank 13, which has an aerosol mixed gas outlet.

[0044] The above is a detailed description of the functional components and pipeline connections. In other structural aspects, since the operation of the device also requires corresponding electrical components such as working power supply and control circuit of air compressor components, in order to further improve the integration of the device, in some embodiments, the mounting platform 2 is provided with a bottom space for accommodating electrical components. The mounting platform 2 is provided with a vertical end face on the side facing the chassis door, and the vertical end face is provided with a power interface, switch and indicator light.

[0045] In order to further reduce the planar space occupied by the device and effectively utilize the internal storage space of the box, in some embodiments, a mounting bracket is provided above the mounting platform, and the filter assembly is mounted on the mounting bracket. The mounting bracket includes a support column with its bottom on the mounting platform and a platform plate with its top on the support column.

[0046] Specifically, in some embodiments, the mounting bracket includes a support column 14 with its bottom disposed on the mounting platform 2 and a mounting plate 15 disposed on the top of the support column.

[0047] The second embodiment provides a calibration device for a gas trace particle optical detection instrument, which includes the sample supply device described in the first embodiment.

[0048] In particular, in some embodiments, the sample supply device is connected to a gas drying device. The drying device can evaporate part of the liquid contained in the aerosol, retaining pure sample particles and avoiding contamination and false counts caused by liquid residue and gas condensation.

[0049] The above description is merely a preferred embodiment of the present application and does not limit the scope of disclosure of the embodiments of the present application. Any equivalent structural or procedural transformations made using the description and drawings of the embodiments of the present application, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection supported by the embodiments of the present application.

Claims

1. A calibration sample supply device for a gas trace particle optical detection instrument, characterized in that, The device includes: The chassis includes a chassis shell and a chassis door, wherein the chassis door is closably connected to the chassis shell; The mounting platform is installed inside the chassis housing; An air compressor assembly is installed on the mounting platform, and the output end of the air compressor assembly outputs high-pressure air through a first pipeline. A filter assembly is disposed in the housing, the input end of the filter assembly is connected to the first pipeline, and the output end of the filter assembly is connected to the second pipeline to output high-pressure clean air; The atomizing component is located inside the chassis door. The atomizing component includes an atomizing cup mounting part and a standard sample atomizing cup. The input end of the atomizing component is connected to the second pipeline, and the output end of the atomizing component is connected to the third pipeline to output aerosol.

2. The calibration sample supply device for a gas trace particle optical detection instrument as described in claim 1, characterized in that, The second pipeline includes a first pipeline section and a second pipeline section, which are connected by a first tee pipe. The other port of the first tee pipe is connected to a gas split pipe.

3. The calibration sample supply device for a gas trace particle optical detection instrument as described in claim 2, characterized in that, The second pipeline section and the branch pipe are respectively equipped with throttling needle valves.

4. The calibration sample supply device for a gas trace particle optical detection instrument as described in claim 1, characterized in that, The third pipeline includes a third pipeline section and a fourth pipeline section, and the third pipeline section, the fourth pipeline section and the gas split pipe are connected by a second tee pipe.

5. The calibration sample supply device for a gas trace particle optical detection instrument as described in claim 4, characterized in that, The outlet of the third pipeline is connected to a gas storage tank, which has an aerosol mixed gas outlet.

6. The calibration sample supply device for a gas trace particle optical detection instrument as described in claim 1, characterized in that, The mounting platform has a bottom space for accommodating electrical components. The mounting platform has a vertical end face facing the chassis door, and the vertical end face is equipped with a power interface, a switch and an indicator light.

7. The calibration sample supply device for a gas trace particle optical detection instrument as described in claim 1, characterized in that, An installation bracket is provided above the installation platform, and the filter assembly is mounted on the installation bracket. The installation bracket includes a support column at the bottom of the installation platform and a platform plate at the top of the support column.

8. The calibration sample supply device for a gas trace particle optical detection instrument as described in claim 7, characterized in that, The mounting bracket includes a support column with its bottom on the mounting platform and a mounting plate with its top on the support column.

9. A calibration device for optical detection instruments for trace particles in gas, characterized in that, The device includes the sample supply device according to any one of claims 1-8.

10. The calibration sample supply device for a gas trace particle optical detection instrument as described in claim 9, characterized in that, The sample supply device is connected to a gas drying device.

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