A pulse-triggered cluster powder preparation system
By using high-voltage IGBT electronic switches and signal detection circuits in the cluster powder preparation system, the problem of pulse energy dilution caused by increased discharge frequency in existing technologies has been solved, achieving stable generation and high-efficiency production of cluster powder at high frequencies.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- NANJING INSTITUTE OF ATOMIC MANUFACTURING
- Filing Date
- 2026-05-15
- Publication Date
- 2026-06-26
AI Technical Summary
In the prior art, free discharge devices based on RC circuits cannot achieve feedback control of the charging path, which leads to the degradation of the discharge form when the discharge frequency increases, the pulse energy is diluted, and the agglomerate powder cannot be effectively generated, resulting in powder generation interruption and reduced production.
High-voltage IGBTs are used as electronic switches, and a signal detection circuit monitors the discharge current. The IGBTs are controlled to turn off to eliminate low-voltage continuous discharge, ensuring high-energy pulse output under high-frequency conditions. The pulse triggering module realizes real-time monitoring of the discharge current and linkage with the IGBT to turn off, forming a stable closed-loop control.
It achieves stable high-energy output under high-frequency conditions, avoids continuous low-voltage discharge, ensures continuous generation and increased yield of cluster powder, and improves preparation efficiency and quality.
Smart Images
Figure CN122279489A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of atomic-level manufacturing technology, specifically to a pulse-triggered cluster powder preparation system. Background Technology
[0002] The preparation of cluster powders relies on a single high-energy pulsed discharge. High-temperature plasma is formed through instantaneous breakdown between electrodes, ablating and vaporizing the target material. The resulting particles then condense and nucleate in a carrier gas to form cluster powders. Existing technologies mostly employ free-discharge devices based on RC circuits, lacking effective and controllable electronic switches and failing to provide feedback control over the charging path. As the discharge frequency increases, the discharge form degenerates from pulsed spark / arc to low-voltage continuous glow / arc, diluting the pulse energy and resulting in insufficient energy for a single discharge. This inadequate energy fails to effectively generate cluster powders, leading to interrupted powder generation, reduced yield, and limiting the improvement of cluster powder preparation efficiency. Summary of the Invention
[0003] To address the aforementioned technical problems, this invention provides a pulse-triggered cluster powder preparation system. It uses a high-voltage IGBT (Insulated Gate Bipolar Transistor) as the electronic switch for the cluster powder discharge device. A signal detection circuit monitors the discharge current, controlling the IGBT to turn off and eliminate low-voltage continuous discharge, thereby increasing the yield of cluster powder.
[0004] The pulse-triggered cluster powder preparation system of this invention includes a gas path system, a cluster powder generating device, a pulse-triggered cluster powder discharge device, and a cluster powder collecting device. The gas path system introduces an inert carrier gas into the cluster powder generating device for rapid condensation and nucleation of evaporating atoms to form cluster powder, and simultaneously transports the powder to the collecting device. The cluster powder generating device contains a cluster material target, and the pulse-triggered cluster powder discharge device is directly connected to the cluster material target through an internal discharge electrode. The inlet of the cluster powder collecting device is connected to the outlet of the cluster powder generating device. The discharge device includes a charging module, a pulse triggering module, a signal input module, and a discharge module. The discharge electrode of the discharge module extends into the discharge chamber of the cluster powder generating device, forming a controllable discharge gap with the cluster material target. It outputs a stable high-voltage pulse to the cluster powder generating device, causing instantaneous breakdown discharge between the electrode and the material target, forming high-temperature plasma to ablate and evaporate the target atoms. The pulse triggering module detects the discharge current in real time and shuts off the charging path in conjunction with the discharge module to eliminate low-voltage continuous discharge and ensure that high-energy pulses are still output under high-frequency conditions. The signal input module receives switching signals and pulse triggering signals to generate a control voltage.
[0005] Preferably, the charging module includes a power supply, a buffer capacitor, a current-limiting resistor, an insulated-gate bipolar transistor (IGBT) electronic switch, and an absorption circuit. The buffer capacitor is connected to both ends of the power supply. The IGBT electronic switch is used to switch the entire circuit of the charging module. The absorption circuit is composed of a capacitor and a resistor connected in series and is used to absorb the reverse electromotive force generated in the circuit after discharge.
[0006] Preferably, the current-limiting resistor is a high-power aluminum-cased resistor.
[0007] Preferably, the insulated gate bipolar transistor electronic switch has a withstand voltage greater than 3600V and a maximum current greater than 100A.
[0008] Preferably, the buffer capacitor has a capacitance greater than 10uF.
[0009] Preferably, the pulse triggering module includes a current sensor, a weak signal amplification circuit, and a signal conditioning circuit; the current sensor uses a mutual inductance coil to monitor transient current changes on the line; the weak signal amplification circuit includes a high-speed operational amplifier and a feedback resistor; the signal conditioning circuit includes a high-speed comparator, a Schmitt trigger, and a monostable multivibrator.
[0010] Preferably, the signal input module includes a signal generator, a digital isolation circuit, and an insulated gate bipolar transistor (IGBT) driver circuit; the signal generator is used to generate the original signal controlling the IGBT electronic switch; the digital isolation is used to isolate the discharge device and the signal generator; the IGBT driver circuit consists of a logic operation circuit and a gate drive circuit, and receives the switch signal and the pulse trigger signal.
[0011] Preferably, the digital isolation circuit is composed of a chip and peripheral components, and the insulated gate bipolar transistor driving circuit is composed of a chip and peripheral components.
[0012] Preferably, the discharge module includes an energy storage capacitor and a discharge electrode; the energy storage capacitor is used to store the energy of a single discharge and is connected to both ends of the discharge electrode.
[0013] The pulse-triggered cluster powder discharge device of the present invention has the following specific working steps: S1: The high-voltage power supply is connected to the charging module. The buffer capacitor is at high voltage. Through the insulated gate bipolar transistor electronic switch, it can withstand the high voltage pulse and transient large current during the preparation of cluster powder. S2: The discharge module's discharge electrode searches for a suitable discharge distance on the cluster material target. S3: The discharge electrode discharges, generating a high-voltage pulse, which produces powder inside the cluster powder generating device; S4: The pulse trigger module detects the high-voltage pulse generated by the discharge and outputs a conditioning signal to the signal input module; S5: The signal input module receives the conditioning signal and generates a low gate control voltage for the IGBT for a fixed duration. S6: The charging module receives a low gate control voltage from the IGBT, shuts off the charging path, and stops discharging; S7: After the fixed time is completed, the low voltage is switched to high voltage, and the charging path of the charging module is opened; S8: Repeat steps S2-S7 above.
[0014] Preferably, the discharge waveform of the discharge electrode is a stable 1500–2000V standard sawtooth wave.
[0015] This invention sets up a pulse-triggered cluster powder discharge device as four independent yet interconnected functional modules: a charging module, a pulse triggering module, a signal input module, and a discharge module. This effectively separates the high-voltage circuit from the low-voltage signal circuit, avoiding electromagnetic interference from high-voltage discharge from affecting the triggering and control signals, ensuring accurate detection and stable switching. It also forms a stable closed-loop control of discharge, detection, shutdown, and restart, ensuring high synchronization between the IGBT switching sequence and the discharge sequence. Furthermore, the parameters of the corresponding modules can be adjusted individually according to different target materials, discharge voltages, and frequency requirements without overall reconstruction, making it suitable for various cluster powder preparation scenarios.
[0016] Moreover, this invention uses a high-voltage IGBT to replace the uncontrolled switch structure of the traditional RC circuit, realizing the transformation from passive free discharge to active controllable discharge. It can cut off the charging circuit in real time according to the discharge state, solving the defect of the traditional RC circuit that cannot be closed-loop controlled, completely eliminating low-voltage continuous discharge, ensuring stable high-energy output at high frequency, and maintaining sufficient single-pulse energy when the discharge frequency is increased. The discharge waveform is regular, so that powder generation is uninterrupted and production is greatly improved.
[0017] Meanwhile, this invention achieves real-time monitoring of discharge current and linkage shutdown of IGBT through a pulse trigger module. It can quickly and accurately determine whether there are invalid discharge states such as low-voltage continuous discharge, glow discharge, and arc discharge. Once an abnormal discharge is detected, a trigger signal is immediately output to control the IGBT to turn off quickly, forcibly cutting off the charging circuit and preventing continuous energy input, thus avoiding the dilution of pulse energy from the source. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of the overall structure of the pulse-triggered cluster powder discharge device described in this invention; Figure 2 This is a schematic diagram of the charging module of the pulse-triggered cluster powder discharge device of the present invention; Figure 3 This is a schematic diagram of the signal input module of the pulse-triggered cluster powder discharge device of the present invention; Figure 4 This is a schematic diagram of the pulse triggering module of the pulse-triggered cluster powder discharge device of the present invention; Figure 5 This is a schematic diagram of the discharge module of the pulse-triggered cluster powder discharge device of the present invention; Figure 6 This is a structural diagram of the overall device of the pulse-triggered cluster powder preparation system described in this invention. Detailed Implementation
[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
[0020] The pulse-triggered cluster powder discharge device of this invention is applicable to cluster powder preparation systems. The cluster powder preparation system includes a gas path system, a cluster powder generation device, a pulse-triggered cluster powder discharge device, and a cluster powder collection device, such as... Figure 6 As shown.
[0021] The gas path system is not directly connected to the discharge device. Through strong functional coupling, it introduces inert carrier gas into the powder generation device to cool the high-temperature plasma, promote the rapid condensation of evaporated atoms into nuclei to form clustered powder, and simultaneously transport the powder to the collection device and stabilize the chamber pressure to ensure discharge consistency and prevent oxidation of the electrodes and target materials.
[0022] The cluster powder generating device is equipped with a cluster material target. The pulse-triggered cluster powder discharge device is directly connected to the cluster material target through the discharge electrode inside the cluster powder generating device. The discharge device outputs a high-voltage pulse, which is applied to both ends of the material target to cause it to break down, ablate, and evaporate atoms.
[0023] The pulse-triggered cluster powder discharge device includes a charging module, a pulse triggering module, a signal input module, and a discharge module. These four functional modules are independently configured but functionally linked. The discharge electrode of the discharge module extends into the discharge chamber of the cluster powder generation device, forming a controllable discharge gap with the cluster material target, achieving a fixed structural assembly. During operation, the discharge device outputs a stable high-voltage pulse to the cluster powder generation device, causing a momentary breakdown discharge between the electrode and the material target, forming a high-temperature plasma to ablate and evaporate the target atoms. Simultaneously, the pulse triggering module monitors the discharge current in real time and switches off the charging path to eliminate low-voltage continuous discharge, ensuring that high-energy pulses are still output under high-frequency conditions. This allows the target atoms to condense and nucleate under inert carrier gas cooling, achieving continuous, efficient, and stable generation of cluster powder.
[0024] The air inlet of the cluster powder collecting device is directly connected to the air outlet of the cluster powder generating device. The gas path system introduces inert carrier gas into the generating device and transports the cluster powder generated by the discharge device to the collecting device. The collecting device realizes gas-solid separation and powder capture and enrichment. Together with the gas path system, the cluster powder generating device, and the pulse-triggered cluster powder discharge device, it constitutes a complete cluster powder preparation system, completing the generation, transportation and continuous collection of powder.
[0025] The cluster powder preparation system uses a pulse-triggered discharge device as its core, working in conjunction with a gas path system, a cluster powder generation device, and a collection device. It can maintain high-energy pulse discharge under high-frequency conditions, eliminate low-pressure continuous discharge, and achieve continuous and stable generation and efficient collection of cluster powder. It has advantages such as high yield, uniform powder quality, stable and reliable system, and strong adaptability. It effectively solves the problem of powder generation interruption after the discharge frequency is increased in traditional technology, and significantly improves the preparation efficiency and quality of cluster materials in the field of atomic-level manufacturing.
[0026] The charging module of the pulse-triggered cluster powder discharge device includes a power supply, a buffer capacitor (with a capacity greater than 10uF), a current-limiting resistor, an insulated-gate bipolar transistor (IGBT) electronic switch, and an absorption circuit. The IGBT electronic switch has a withstand voltage greater than 3600V and a maximum current greater than 100A to withstand high-voltage pulses and transient high currents during the cluster powder preparation process, enabling rapid and reliable switching of the charging path, effectively eliminating low-voltage continuous discharge, ensuring stable high-energy pulse output even under high-frequency conditions, and improving the device's operational safety and service life. Specifically, the buffer capacitor is connected to both ends of the power supply, serving as the energy source for the entire device and determining the upper limit of the discharge voltage; the buffer capacitor responds to rapid load changes, accelerating the charging speed; the current-limiting resistor uses a high-power aluminum-cased resistor to limit the charging current and protect the electronic switch; the IGBT electronic switch switches the entire charging module circuit and is a key component for eliminating low-voltage continuous discharge; the absorption circuit consists of a capacitor and a resistor connected in series, used to absorb the back electromotive force generated in the circuit after discharge.
[0027] The pulse triggering module of the pulse-triggered cluster powder discharge device includes a current sensor, a weak signal amplification circuit, and a signal conditioning circuit. The current sensor uses a mutual inductance coil to monitor transient current changes on the circuit and proportionally converts them into a measurable voltage value. The weak signal amplification circuit includes a high-speed operational amplifier and a feedback resistor; the amplification ratio is designed by adjusting the resistance value. The signal conditioning circuit includes a high-speed comparator, a Schmitt trigger, and a monostable multivibrator. The high-speed comparator converts a linear analog voltage into a 0 / 5V digital pulse signal. The Schmitt trigger is used for signal stabilization to prevent oscillation, and the monostable multivibrator is used to control the duration of the pulse signal and output a conditioning signal.
[0028] The signal input module of the pulse-triggered cluster powder discharge device includes a signal generator, digital isolation, and an IGBT driver circuit. The signal generator is used to generate the original signal for controlling the IGBT electronic switch; the digital isolation is used to isolate the discharge device and the signal generator, protecting the signal generator module; the IGBT driver circuit consists of a logic operation circuit and a gate drive circuit, receiving the switch signal and the pulse trigger signal, and is used to generate a control voltage acting on the IGBT gate.
[0029] The discharge module of the pulse-triggered cluster powder discharge device includes an energy storage capacitor and a discharge electrode. The energy storage capacitor is used to store the energy of a single discharge and is connected to both ends of the discharge electrode. When a high-voltage pulse is generated, the material on the discharge electrode is knocked off and forms powder.
[0030] The working process of the above-mentioned pulse-triggered cluster powder discharge device is as follows: S1: The high-voltage power supply is connected to the charging module. The buffer capacitor is at high voltage. Through the insulated gate bipolar transistor electronic switch, it can withstand the high voltage pulse and transient large current during the preparation of cluster powder. S2: The discharge module's discharge electrode searches for a suitable discharge distance on the cluster material target. S3: The discharge electrode discharges, generating a high-voltage pulse, which produces powder inside the cluster powder generating device; S4: The pulse trigger module detects the high-voltage pulse generated by the discharge and outputs a conditioning signal to the signal input module; S5: The signal input module receives the conditioning signal and generates a low gate control voltage for the IGBT for a fixed duration. S6: The charging module receives a low gate control voltage from the IGBT, shuts off the charging path, and stops discharging; S7: After the fixed time is completed, the low voltage is switched to high voltage, and the charging path of the charging module is opened; S8: Repeat steps S2-S7 above.
[0031] The criteria for judging low-voltage discharge are: the maximum value of the discharge voltage waveform at the acquisition device is below 1000V, and the waveform is irregular. The specific state after eliminating continuous low-voltage discharge is that the maximum value of the discharge voltage waveform at the acquisition device is 1500V-2000V, the waveform is a standard sawtooth wave, and there is a fixed period of low level between each sawtooth wave. In the working process of this invention, each high-voltage pulse output by the discharge device causes the powder generation device to produce one atomic cluster, while the powder is blown towards the collection device by the carrier gas through the gas path system. The discharge frequency in this process is equal to the powder generation frequency, thereby achieving efficient and high-quality preparation of clustered powder.
[0032] Example
[0033] like Figure 1 As shown, the pulse-triggered cluster powder discharge device of the present invention includes a charging module 100, a pulse triggering module 300, a signal input module 200, and a discharge module 400. One end of the charging module 100 is electrically connected to one end of the signal input module 200; one end of the signal input module 200 is electrically connected to one end of the pulse triggering module 300; one end of the pulse triggering module 300 is electrically connected to one end of the discharge module 400; and one end of the discharge module 400 is electrically connected to one end of the charging module 100, thereby realizing the linkage of the four functional modules of charging, triggering, signaling, and discharging, providing stable and controllable high-voltage pulse energy for the generation of cluster powder.
[0034] Furthermore, a wiring diagram of the charging module 100 is provided in the attached diagram. Figure 2 As shown. The charging module includes: a power supply, a buffer capacitor, a current-limiting resistor, an IGBT electronic switch, and an absorption circuit. The positive terminal of the power supply is connected to one end of the buffer capacitor C2 and one end of the current-limiting resistor R4; the other end of the current-limiting resistor R4 is connected to one end of the absorption circuit and pin 1 of the electronic switch; the other end of the absorption circuit is connected to pin 2 of the electronic switch; inside the absorption circuit, resistors R1, R2, and R3 and capacitor C1 are connected in series; pin 2 of the electronic switch is connected to signal V1, and pin 3 of the switch is connected to signal V3; the other end of the buffer capacitor C2 is connected to the negative terminal of the power supply and signal V2.
[0035] Furthermore, a wiring diagram of the signal input module 200 is provided in the attached diagram. Figure 3 As shown. The signal input module includes: a signal generator, a digital isolation circuit, and an IGBT driver circuit. One end of the signal generator is connected to resistor R13; the other end of resistor R13 is connected to pin 2 of chip U7. The digital isolation circuit consists of chips U6 and U7 and peripheral components. In chip U7: pin 3 is connected to the other end of the signal generator; pin 5 is connected to ground; pin 6 is connected to one end of resistor R14 and pin 1 of chip U6; pin 7 is connected to the other end of resistor R14; pin 8 is connected to +5V level, and the +5V level is connected to ground through capacitors C15 and C17 before being connected to the chip. In chip U6: pin 2 is connected to signal V7; pin 3 is connected to ground; pin 5 is connected to ground; pin 7 is connected to ground; pin 9 is connected to ground; pin 11 is connected to ground; pin 13 is connected to ground; pin 14 is connected to +5V level, and the +5V level is connected to ground through capacitors C12 and C14 before being connected to the chip.
[0036] The IGBT driver circuit consists of chips U5 and U8 and peripheral components. In chip U5: pin 1 connects to signal V6; pin 2 connects to signal V7; pin 3 connects to pins 2 and 4 of chip U8; pin 4 is connected to ground; pin 5 is connected to ground; pin 7 is connected to ground; pin 9 is connected to ground; pin 10 is connected to ground; pin 12 is connected to ground; pin 13 is connected to ground; pin 14 is connected to a +5V level, which is connected to ground via capacitors C13 and C16 before being connected to the chip. In chip U8: pin 3 is connected to ground; pin 5 connects to one end of resistor R20, the other end of which is connected to signal V3; pin 6 connects to a +5V level, which is connected to ground via capacitors C20 and C21 before being connected to the chip; pin 7 connects to one end of resistor R21, the other end of which is connected to signal V3.
[0037] Furthermore, for details of the wiring diagram of the pulse trigger module 300, please refer to [link / reference needed]. Figure 4 As shown. The pulse triggering module includes: a current sensor, a weak signal amplification circuit, and a signal conditioning circuit. One end of the current sensor receives the test wire harness, and the other end is connected to resistor R8; one end of resistor R8 is connected to pin 3 of chip U1.
[0038] The weak signal amplification circuit consists of chip U1 and peripheral components. In chip U1: pin 1 is connected to signal V4 and one end of resistor R6. The other end of resistor R6 is connected to pin 2 of chip U1 and resistor R5. The other end of resistor R5 is connected to ground; pin 4 is connected to ground; pin 8 is connected to +5V level. The +5V level is connected to ground through capacitor C3 and capacitor C6 before being connected to the chip.
[0039] The signal conditioning circuit consists of chips U2, U3, and U4, and peripheral components. In chip U2: pin 1 is connected to ground; pin 2 is connected to signal V4; pin 3 is connected to one end of resistors R11 and R12, with the other end of R11 connected to +5V and the other end of R12 connected to ground; pin 4 is connected to ground; pin 7 is connected to one end of resistor R7 and pin 1 of chip U3, with the other end of R7 connected to +5V; pin 8 is connected to +5V, and the +5V level is connected to ground via capacitors C4 and C7 before being connected to the chip. In chip U3: pin 1 is connected to pin 7 of chip U2; pin 2 is connected to signal V5; pin 3 is connected to ground; pin 5 is connected to ground; pin 7 is connected to ground; pin 9 is connected to ground; pin 11 is connected to ground; pin 13 is connected to ground; pin 14 is connected to +5V, and the +5V level is connected to ground via capacitors C5 and C9 before being connected to the chip. In chip U4: pin 1 is connected to signal V5; pin 2 is connected to +5V level; pin 3 is connected to +5V level; pin 4 is connected to ground; pin 5 is connected to signal V6; pin 6 is connected to one end of capacitor C11; pin 7 is connected to the other end of capacitor C11, one end of R10 and one end of R9; pin 8 is connected to +5V level, and the +5V level is connected to ground through capacitor C8 and capacitor C10 before being connected to the chip.
[0040] Furthermore, for a detailed wiring diagram of the discharge module 400, please refer to [link / reference needed]. Figure 5 As shown. The discharge module includes an energy storage capacitor and discharge electrodes. One end of the energy storage capacitor C18 is connected to signal V1, and the other end is connected to signal V2. The positive discharge electrode is connected to signal V1, and the negative discharge electrode is connected to signal V2.
[0041] This invention utilizes a pulse-triggered cluster powder discharge device, replacing the traditional uncontrolled switch of an RC circuit with a high-voltage IGBT, to achieve controllable shutdown of the charging path and fundamentally solve the problem of low-voltage continuous discharge. Simultaneously, through real-time current detection, signal conditioning, and IGBT-linked shutdown, an automatic closed loop of discharge, detection, shutdown, and restart is formed. This ensures automatic restart charging after a fixed shutdown duration, guaranteeing stable energy for each discharge and achieving high-frequency, high-energy pulse output, thereby precisely controlling powder generation.
[0042] The memristor array and its fabrication method provided in this application have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make several improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.
Claims
1. A pulsed triggered cluster powder production system, characterized by, The device includes a gas path system, a cluster powder generating device, a pulse-triggered cluster powder discharge device, and a cluster powder collecting device. The gas path system introduces an inert carrier gas into the cluster powder generating device to rapidly condense and nucleate evaporating atoms to form cluster powder, and simultaneously transports the powder to the collecting device. The cluster powder generating device contains a cluster material target, and the pulse-triggered cluster powder discharge device is directly connected to the cluster material target through an internal discharge electrode. The inlet of the cluster powder collecting device is connected to the outlet of the cluster powder generating device. The pulse-triggered cluster powder discharge device includes a charging module, a pulse triggering module, a signal input module, and a discharge module. The discharge electrode of the discharge module extends into the discharge chamber of the cluster powder generating device, forming a controllable discharge gap with the cluster material target. It outputs a stable high-voltage pulse to the cluster powder generating device, causing instantaneous breakdown discharge between the electrode and the material target, forming high-temperature plasma to ablate and evaporate the target atoms. The pulse triggering module detects the discharge current in real time and shuts off the charging path in conjunction with the discharge module to eliminate low-voltage continuous discharge and ensure that high-energy pulses are still output under high-frequency conditions. The signal input module receives switch signals and pulse trigger signals to generate control voltage.
2. The pulsed-triggered cluster powder production system of claim 1, wherein, The charging module includes a power supply, a buffer capacitor, a current-limiting resistor, an insulated-gate bipolar transistor (IGBT) electronic switch, and an absorption circuit. The buffer capacitor is connected to both ends of the power supply. The IGBT electronic switch is used to switch the entire circuit of the charging module. The absorption circuit consists of a capacitor and a resistor connected in series and is used to absorb the reverse electromotive force generated in the circuit after discharge.
3. The pulsed-triggered cluster powder production system of claim 2, wherein, The current-limiting resistor is a high-power aluminum-cased resistor.
4. The pulsed-triggered cluster powder production system of claim 2, wherein, The insulated gate bipolar transistor electronic switch has a withstand voltage greater than 3600V and a maximum current greater than 100A.
5. The pulsed-triggered cluster powder production system of claim 2, wherein, The buffer capacitor has a capacitance greater than 10uF.
6. The pulsed-triggered cluster powder production system of claim 1, wherein, The pulse triggering module includes a current sensor, a weak signal amplification circuit, and a signal conditioning circuit. The current sensor uses a mutual inductance coil to monitor transient current changes on the line. The weak signal amplification circuit includes a high-speed operational amplifier and a feedback resistor. The signal conditioning circuit includes a high-speed comparator, a Schmitt trigger, and a monostable multivibrator.
7. The pulsed-triggered cluster powder production system of claim 1, wherein, The signal input module includes a signal generator, a digital isolation circuit, and an insulated-gate bipolar transistor (IGBT) driver circuit. The signal generator is used to generate the original signal that controls the IGBT electronic switch. The digital isolation circuit is used to isolate the discharge device and the signal generator. The IGBT driver circuit consists of a logic operation circuit and a gate drive circuit, and receives the switch signal and the pulse trigger signal.
8. The pulsed-triggered cluster powder production system of claim 7, wherein, The digital isolation circuit consists of a chip and peripheral components, and the insulated gate bipolar transistor driving circuit consists of a chip and peripheral components.
9. The pulsed-triggered cluster powder production system of claim 1, wherein, The discharge module includes an energy storage capacitor and a discharge electrode; the energy storage capacitor is used to store the energy of a single discharge and is connected to both ends of the discharge electrode.
10. The pulsed-triggered cluster powder production system of claim 1, wherein, The pulse-triggered cluster powder discharge device has the following specific operating procedures: S1: The high-voltage power supply is connected to the charging module. The buffer capacitor is at high voltage. Through the insulated gate bipolar transistor electronic switch, it can withstand the high voltage pulse and transient large current during the preparation of cluster powder. S2: The discharge module's discharge electrode searches for a suitable discharge distance on the cluster material target. S3: The discharge electrode discharges, generating a high-voltage pulse, which produces powder inside the cluster powder generating device; S4: The pulse trigger module detects the high-voltage pulse generated by the discharge and outputs a conditioning signal to the signal input module; S5: The signal input module receives the conditioning signal and generates a low gate control voltage for the IGBT for a fixed duration. S6: The charging module receives a low gate control voltage from the IGBT, shuts off the charging path, and stops discharging; S7: After the fixed time is completed, the low voltage is switched to high voltage, and the charging path of the charging module is opened; S8: Repeat steps S2-S7 above.
11. The pulsed-triggered cluster powder production system of claim 10, wherein, The discharge waveform of the discharge electrode is stable at 1500–2000V standard sawtooth wave.