A fatigue-resistant MEMS microvalve based on discrete pulse driving
By using a fatigue-resistant MEMS microvalve based on discrete pulse drive, and utilizing a bistable mechanical valve core and a discrete pulse drive unit, the problems of fatigue and high power consumption of MEMS microvalve under continuous stress are solved, achieving low power consumption and improved durability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 王卫东
- Filing Date
- 2026-05-15
- Publication Date
- 2026-06-30
AI Technical Summary
Existing MEMS microvalves are prone to fatigue due to continuous stress, have high static power consumption, and their electromagnetic thermal effects accelerate device aging.
A fatigue-resistant MEMS microvalve based on discrete pulse drive is adopted. It utilizes a bistable mechanical valve core and a discrete pulse drive unit to drive the valve core to switch to a stable position and self-lock through a single voltage pulse signal, thereby avoiding continuous energy consumption.
This reduces the static power consumption of MEMS microvalves, minimizes material fatigue and thermal effects, and extends device lifespan.
Smart Images
Figure CN122305316A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of microelectromechanical systems (MEMS) technology, specifically relating to a fatigue-resistant MEMS microvalve based on discrete pulse drive. Background Technology
[0002] Existing MEMS microvalves mostly employ continuous analog signal driving or PWM continuous modulation, placing the valve core under continuous stress, which easily leads to material fatigue and creep failure. In existing technologies, voltage or current must be continuously applied to maintain the valve core position, resulting in high static power consumption and accelerated device aging due to electromagnetic thermal effects. Summary of the Invention
[0003] The purpose of this invention is to provide a fatigue-resistant MEMS microvalve based on discrete pulse drive, so as to solve the technical problems of existing microvalves being subjected to continuous force, high static power consumption, and easy fatigue.
[0004] To achieve the above objectives, the present invention adopts the following technical solution: a fatigue-resistant MEMS microvalve based on discrete pulse drive, comprising a microchannel, a bistable mechanical valve core, and a discrete pulse drive unit; the bistable mechanical valve core is disposed within the microchannel, and the bistable mechanical valve core has only two stable mechanical positions: fully open and fully closed; the discrete pulse drive unit is used to receive a single discrete voltage pulse signal and drive the bistable mechanical valve core to switch from one stable position to another stable position.
[0005] Preferably, the bistable mechanical valve core includes an elastic cantilever beam and a sealing plug disposed at the end of the cantilever beam. Preferably, the cantilever beam has two stable bending states, corresponding to the fully open position and the fully closed position, respectively. Preferably, the discrete pulse drive unit includes an electrostatic drive electrode or a piezoelectric drive plate. Preferably, the discrete pulse drive unit has zero power consumption when there is no pulse signal input; the bistable mechanical valve core self-locks by physical structure after reaching any steady-state position, without the need for continuous energy maintenance. Attached Figure Description
[0006] Figure 1 This is a schematic diagram of the overall structure of a MEMS microvalve.
[0007] Figure 2 This is a schematic diagram of the working principle of a bistable mechanical valve core.
[0008] Figure 3 This is a timing diagram for discrete pulse drive. Detailed Implementation
[0009] Example 1: Micro-valve for fuel injection in aerospace engines
[0010] The microchannel has a cross-section of 0.8mm × 0.8mm and a depth of 1.0mm. The bistable valve core is a nickel-titanium alloy cantilever beam (10-20μm thick, 3-5mm long) with a silicone sealing plug at the end. The cantilever beam has two stable bending positions: when bending upwards, the plug disengages from the valve seat, and the flow channel is fully open; when bending downwards, the plug presses against the valve seat, and the flow channel is fully closed. The discrete pulse drive unit is an electrostatic electrode placed below the cantilever beam. Initially, the valve core is closed. When opening is required, a single 15-20V, 0.1-0.3ms voltage pulse is applied. The electrostatic attraction pulls the cantilever beam over the potential energy barrier, and the valve core bounces to the open position and self-locks. Applying the same pulse again switches the valve core back to the closed position. Without a pulse, the power consumption is zero, and the valve core does not heat up.
[0011] Example 2: Medical Microfluidic Chip
[0012] The microchannel cross-section is 0.1mm × 0.1mm. The valve core is a monocrystalline silicon cantilever beam, with a piezoelectric actuator attached to the root of the beam. Switching can be driven by a single 3.3V, 0.2-0.5ms pulse. The bistable characteristic ensures that no continuous power supply is required during drug delivery, avoiding polarization fatigue of the piezoelectric material. The above embodiments are for illustrative purposes only and do not constitute a limitation.
Claims
1. A fatigue-resistant MEMS microvalve based on discrete pulse actuation, characterized in that, It includes a microchannel, a bistable mechanical valve core, and a discrete pulse drive unit; the bistable mechanical valve core is disposed in the microchannel and has only two stable mechanical positions: fully open and fully closed; the discrete pulse drive unit is used to receive a single discrete voltage pulse signal and drive the bistable mechanical valve core to switch from one stable position to another stable position.
2. The MEMS microvalve according to claim 1, characterized in that, The bistable mechanical valve core includes an elastic cantilever beam and a sealing plug disposed at the end of the cantilever beam; the cantilever beam has two stable bending states, corresponding to the fully open position and the fully closed position, respectively.
3. The MEMS microvalve according to claim 1, characterized in that, The discrete pulse driving unit includes an electrostatic driving electrode or a piezoelectric driving plate; when the electrostatic driving electrode receives a single voltage pulse, it generates an electrostatic attraction force, which pulls the bistable mechanical valve core over the potential energy barrier to complete the state switching.
4. The MEMS microvalve according to claim 1, characterized in that, The discrete pulse drive unit consumes zero power when there is no pulse signal input; the bistable mechanical valve core self-locks by physical structure after reaching any steady-state position, without the need for continuous energy maintenance.
5. The MEMS microvalve according to claim 1, characterized in that, The cross-sectional dimensions of the microchannel range from 0.1mm×0.1mm to 1.0mm×1.0mm.
6. The MEMS microvalve according to any one of claims 1-5, characterized in that, The MEMS microvalve is used in aerospace engine fuel injection control, pharmaceutical microfluidic chips, or industrial precision pneumatic systems.