A method and system for separating overlapping peaks in spectral confocal thin film thickness measurement signals

By employing Gaussian curve fitting and iterative optimization, the problem of separating overlapping peak signals in the measurement of ultrathin transparent films was solved, improving the accuracy and reliability of film thickness measurement while reducing resource consumption.

CN122305943APending Publication Date: 2026-06-30东莞市搏信智能控制技术有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
东莞市搏信智能控制技术有限公司
Filing Date
2026-04-16
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

Existing spectral confocal film thickness measurement techniques are limited by the distortion of overlapping double-peak signals when dealing with extremely thin transparent films, making it impossible to accurately separate the center wavelength of a single peak, resulting in poor measurement accuracy.

Method used

The Gaussian curve fitting method is used to process the left and right peak signals respectively. The coupling strength value is calculated for iterative optimization. The original measured intensity sequence is used for differential subtraction to ensure that the initial data is used in each iteration and to avoid error accumulation.

Benefits of technology

This method achieves effective decoupling and separation of overlapping double-peak signals, improving the reliability and accuracy of thin film thickness measurement while reducing resource consumption.

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Abstract

This application provides a method and system for separating overlapping peaks in spectral confocal thin film thickness measurement signals, relating to the field of thin film thickness measurement technology. Gaussian curve fitting is performed on the left and right peak signals respectively. Then, the wavelength sequence of the target peak signal is substituted into the Gaussian curve function obtained by fitting the other peak signal to calculate the coupling strength value generated by the spillover of a single peak to the other side region. Furthermore, the original measured intensity sequence of the double-peak signal is used as the minuend to subtract the calculated coupling strength value, ensuring that each subtraction process includes the initial optical observation data and avoiding additional systematic numerical deviations introduced during iteration due to changes in intermediate data. This overcomes the single-peak separation distortion problem caused by the inherent asymmetry of the actual signal, thereby achieving decoupling and separation of overlapping double-peak signals and improving the reliability of solving the physical thickness of the measured thin film.
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