Optical sensing structures and optical detectors

Abstract

This application discloses an optical sensing structure and an optical detector, belonging to the field of integrated optical sensing technology. It aims to achieve on-chip integrated construction and efficient electro-optical control of high-order singular surfaces to improve the signal response intensity and weak signal detection limit of optical sensing. The optical sensing structure includes an optical waveguide, multiple micro-ring resonators, a circular aperture array, and multiple sets of metal electrodes. The optical waveguide and multiple micro-ring resonators are formed by etching optically functional thin films with electro-optic effects. The multiple micro-ring resonators are arranged sequentially along the extension direction of the optical waveguide and are evanescently coupled to it. The circular aperture array is disposed at the end of the optical waveguide to reflect the transmitted optical signal, forming a closed optical loop. Multiple sets of metal electrodes are respectively arranged in pairs on both sides of the optical waveguide and segmented along the waveguide, corresponding to the optical waveguide regions between two adjacent micro-ring resonators and between the micro-ring resonators and the circular aperture array away from the input end of the optical waveguide.

Description

Technical Field

[0001] This application belongs to the field of integrated optical sensing technology, specifically relating to an optical sensing structure and an optical detector. Background Technology

[0002] Currently, traditional optical sensing structures can only realize second-order singular surfaces, making it difficult to construct third-order or higher-order singular surfaces. This makes it difficult to meet the requirements for detecting ultra-weak signals, and there is still considerable room for improvement in signal response intensity and detection limits. Summary of the Invention

[0003] In view of this, this application provides an optical sensing structure and an optical detector, which aim to realize the on-chip integrated construction and efficient electro-optical control of high-order singular surfaces, so as to improve the signal response intensity and weak signal detection limit of optical sensing.

[0004] To achieve the above objectives, this application mainly provides the following technical solutions: One aspect of this application provides an optical sensing structure, including an optical waveguide, multiple micro-ring resonant cavities, a circular aperture array, and multiple sets of metal electrodes; The optical waveguide and the multiple micro-ring resonators are all formed by etching optically functional thin films with electro-optic effects; Multiple micro-ring resonant cavities are arranged sequentially along the extension direction of the optical waveguide and are evanescently coupled to the optical waveguide respectively; The array of circular holes is disposed at the end of the optical waveguide to reflect the transmitted optical signal and form a closed optical loop; Multiple sets of the metal electrodes are respectively arranged in pairs on both sides of the optical waveguide and segmented along the optical waveguide. They are respectively located between two adjacent micro-ring resonators and in the optical waveguide region between the micro-ring resonator and the circular aperture array, which is far from the input end of the optical waveguide.

[0005] Optionally, the coupling spacing between the optical waveguide and each of the microring resonators is 10. -9 m to 10 -3 m.

[0006] Optionally, the optical waveguide is a straight transmission waveguide, including but not limited to rectangular waveguides and ridge waveguides; the height of the optical waveguide is 10. -9 m to 10 -6 m, the width of the optical waveguide is 10 -9 m to 10 -6 m, the length of the optical waveguide is 10 m. -8 m to 1m.

[0007] Optionally, the spacing between two adjacent microring resonators is 10. -7 m to 5×10-2 m.

[0008] Optionally, the perimeter of the microring resonant cavity is 10. -8 m to 10 -1 m, the center wavelength of the beam coupled into the microring resonant cavity is 500nm to 1700nm.

[0009] Optionally, each group of metal electrodes includes a first-side metal electrode and a second-side metal electrode; the first-side metal electrode is disposed on the side of the optical waveguide closer to the micro-ring resonator, and the second-side metal electrode is disposed on the side of the optical waveguide farther from the micro-ring resonator; the distance between the first-side metal electrode and the optical waveguide is 10. -8 m to 10 -4 m, the distance between the second side metal electrode and the optical waveguide is 10. -8 m to 10 -4 m.

[0010] Optionally, the height of both the first side metal electrode and the second side metal electrode is 10. -8 m to 10 -2 m, the width of both the first side metal electrode and the second side metal electrode is 10 m. -8 m to 10 -4 m, the length of both the first side metal electrode and the second side metal electrode is 10. -7 m to 10 -1 m.

[0011] Optionally, the circular aperture array comprises multiple circular apertures etched at the end of the optical waveguide, wherein the multiple circular apertures are arranged sequentially along the extension direction of the optical waveguide; the diameter of the circular apertures is 10. -9 m to 10 -6 m, the distance between two adjacent circular holes is 10. -9 m to 10 -6 m.

[0012] Optionally, the optical functional film is a lead zirconate titanate film.

[0013] In another aspect of this application, an optical detector is provided, comprising the optical sensing structure described in any one of the preceding claims.

[0014] By employing the above technical solution, this application has at least the following beneficial effects: The optical sensing structure and optical detector provided in this application employ an overall structure consisting of an optical waveguide, multiple micro-ring resonators, a circular aperture array, and multiple sets of metal electrodes. Relying on an optically functional thin film with electro-optic effects, it establishes the multi-mode foundation required to form higher-order singular surfaces by cascading multiple micro-ring resonators through the optical waveguide. Efficient coupling and transmission of optical modes are achieved through evanescent coupling between the optical waveguide and multiple micro-ring resonators. The circular aperture array at the end of the optical waveguide reflects and transmits optical signals, forming a closed optical loop, thus achieving directional coupling of optical modes. Multiple sets of metal electrodes arranged segmentally on both sides of the optical waveguide, combined with the electro-optic effect of the optically functional thin film, apply voltage to achieve precise control of the optical phase. This calibrates each optical mode to a state of same frequency, in-phase, synchronization, and energy locking, completing mode degeneracy and stably constructing third-order and higher-order singular surfaces. This enhances the signal response strength of the optical sensing structure to weak external disturbances, effectively improving the sensitivity and minimum detectable limit of optical detection, and meeting the high-precision detection requirements of ultra-weak signals. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the optical sensing structure of an optional embodiment of this application; Figure 2 This is a schematic diagram of the optical sensing structure of another optional embodiment of this application; Figure 3 for Figure 2 The frequency splitting response comparison curves of the optical sensing structure and the second-order singular surface optical sensing structure are shown. Figure 4 for Figure 2 The graph shows the sensitivity enhancement factor of the optical sensing structure compared to the second-order singular surface optical sensing structure.

[0016] The reference numerals in the attached figures are as follows: 1. Optical waveguide; 2. Micro-ring resonator; 3. Circular aperture array; 4. Metal electrode. Detailed Implementation

[0017] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0018] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0019] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0020] The preferred embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application.

[0021] See Figure 1 As shown, an embodiment of the first aspect of this application provides an optical sensing structure, and an embodiment of the second aspect of this application provides an optical detector.

[0022] Among them, the optical sensing structure is used in optical detectors.

[0023] Specifically, the optical detector includes, but is not limited to, the optical sensing structure, light source module, optical detection module, signal processing circuit, control and display components, and a packaging shell. The optical sensing structure is used to sensitively respond to the measured physical or chemical quantity to achieve ultra-high sensitivity optical detection; the light source module is used to provide a stable input light signal to the optical sensing structure; the optical detection module is used to collect the light signal output by the optical sensing structure and convert it into an electrical signal; the signal processing circuit is used to amplify, filter, and perform computational processing on the electrical signal; the control and display components are used to implement parameter control of the optical detector and display the detection results in real time; the packaging shell is used to protect, fix, and optically encapsulate the internal components of the optical detector. It should be noted that... Further, see Figure 1As shown, the optical sensing structure provided by the embodiment of the first aspect of this application includes an optical waveguide 1, a plurality of micro-ring resonators 2, a circular aperture array 3, and a plurality of metal electrodes 4; the optical waveguide 1 and the plurality of micro-ring resonators 2 are formed by etching an optically functional thin film with electro-optic effect; the plurality of micro-ring resonators 2 are arranged sequentially along the extension direction of the optical waveguide 1 and are evanescently coupled to the optical waveguide 1 respectively; the circular aperture array 3 is disposed at the end of the optical waveguide 1 and is used to reflect the transmitted optical signal to form a closed optical circuit; the plurality of metal electrodes 4 are respectively disposed in pairs on both sides of the optical waveguide 1 and are arranged in segments along the optical waveguide 1, respectively disposed between two adjacent micro-ring resonators 2 and between the micro-ring resonators 2 and the circular aperture array 3 in the region of the optical waveguide 1 away from the input end of the optical waveguide 1.

[0024] The optical sensing structure provided in this embodiment employs an overall structure consisting of an optical waveguide 1, multiple micro-ring resonators 2, a circular aperture array 3, and multiple sets of metal electrodes 4. It relies on an optical functional thin film with electro-optic effects to form the multi-mode foundation required for high-order singular surfaces by cascading multiple micro-ring resonators 2 through the optical waveguide 1. Efficient coupling and transmission of optical modes are achieved through the evanescent coupling between the optical waveguide 1 and the multiple micro-ring resonators 2. The circular aperture array 3 at the end of the optical waveguide reflects and transmits optical signals, forming a closed optical loop, thus achieving directional coupling of optical modes. Multiple sets of metal electrodes 4, segmented and arranged on both sides of the optical waveguide 1, are combined with the electro-optic effect of the optical functional thin film to apply voltage, achieving precise control of the optical phase. Each optical mode is calibrated to be in the same frequency, phase, and energy-locked state, completing mode degeneracy and stably constructing third-order or higher-order singular surfaces. This enhances the signal response strength of the optical sensing structure to weak external disturbances, effectively improving the sensitivity and minimum detectable limit of optical detection, and meeting the high-precision detection requirements of ultra-weak signals.

[0025] It should be noted that this optical sensing structure is a monolithic integrated structure, consisting of an optical waveguide 1, multiple micro-ring resonators 2, a circular aperture array 3, and multiple sets of metal electrodes 4. The optical waveguide 1, micro-ring resonators 2, and circular aperture array 3 are integrally formed by etching the same optical functional thin film. The metal electrodes 4 are deposited in pairs on the substrate areas on both sides of the optical waveguide 1, maintaining a preset distance from the optical waveguide 1. The entire process is completed on a single chip, without discrete components or external modulation units, thus improving integration and stability, and making it suitable for miniaturized and portable sensing scenarios.

[0026] Among them, the optical functional thin film is preferably lead zirconate titanate (PZT) film, but materials with high electro-optic coefficients such as lithium niobate and barium titanate can also be used. These materials can achieve efficient control of optical phase through electric field, providing a basis for phase manipulation.

[0027] The optical waveguide 1 has a straight strip structure and can be either a rectangular waveguide or a ridge waveguide; the height of the optical waveguide 1 is 10. -9 m to 10 -6 m, the width of the optical waveguide 1 is 10 -9 m to 10 -6 m, the length of the optical waveguide 1 is 10 m. -8 m to 1m; the optical waveguide 1 is used to transmit optical signals and achieves optical mode coupling with the micro-ring resonator 2 through evanescent wave coupling.

[0028] It is understandable that the optical signal is transmitted directionally along the extension direction of the optical waveguide 1 inside the optical waveguide 1, and can be reflected by the circular aperture array 3 and coupled by the micro-ring resonant cavity 2 to form a beam / light that propagates back and forth.

[0029] Multiple micro-ring resonators 2 are arranged sequentially along the length of the optical waveguide 1, and each micro-ring resonator 2 is kept 10° away from the optical waveguide 1. -9 m to 10 -3 The spacing of m enables efficient exchange of optical signals between optical waveguide 1 and microring resonator 2 via evanescent wave coupling, providing a sufficient number of optical modes for higher-order singular surfaces.

[0030] It should be noted that the number of micro-ring resonators 2 ranges from 2 to 5000, and the parameters of all micro-ring resonators 2 are kept consistent. They are cascaded sequentially through optical waveguide 1.

[0031] Specifically, the spacing between two adjacent microring resonant cavities 2 is 10. -7 m to 5×10 -2 m; the perimeter of the micro-ring resonant cavity 2 is 10 m. -8 m to 10 -1 m; the center wavelength of the beam coupled into the micro-ring resonant cavity 2 is 500nm to 1700nm.

[0032] The circular aperture array 3 consists of multiple circular apertures etched at the end of the optical waveguide 1, arranged sequentially along the extension direction of the optical waveguide 1; the diameter of each circular aperture is 10 mm. -9 m to 10 -6 m, the distance between two adjacent circular holes is 10. -9 m to 10 -6 m; the reflection coefficient of the circular aperture array 3 is 0.001 to 1; the circular aperture array 3 is used to directionally reflect forward-propagating light, so that the forward-propagating light and the reflected light form a closed optical loop, forcing unidirectional directional coupling of the optical mode, and providing structural conditions for the formation of higher-order singular surfaces. In this embodiment, It should be noted that the circular aperture array 3 consists of five circular apertures etched at the end of the optical waveguide.

[0033] The metal electrode 4 can be made of conductive materials such as gold, aluminum, or platinum, and has a straight strip structure. The metal electrodes 4 are distributed in pairs on both sides of the optical waveguide 1 and are deposited and set in segments along the optical waveguide 1, and are subjected to electrical polarization treatment. The metal electrodes 4 are used to apply electric fields in segments, and the continuous phase modulation of the optical signal in the optical waveguide 1 from 0 to 2π is achieved by applying an external voltage.

[0034] Specifically, each group of metal electrodes 4 includes a first-side metal electrode and a second-side metal electrode; the first-side metal electrode is disposed on the side of the optical waveguide 1 closest to the micro-ring resonant cavity 2, and the second-side metal electrode is disposed on the side of the optical waveguide 1 furthest from the micro-ring resonant cavity 2; the distance between the first-side metal electrode and the optical waveguide 1 is 10. -8 m to 10 -4 m, the distance between the second side metal electrode and the optical waveguide 1 is 10. -8 m to 10 -4 m; the height of both the first side metal electrode and the second side metal electrode is 10 m. -8 m to 10 -2 m, the width of both the first side metal electrode and the second side metal electrode is 10 m. -8 m to 10 -4 m, the length of both the first side metal electrode and the second side metal electrode is 10. -7 m to 10 -1 m.

[0035] It should be noted that during operation, the optical signal is input to the optical waveguide 1 and sequentially enters each micro-ring resonator 2 via evanescent coupling, exciting multiple clockwise (CW) optical modes. When the optical signal is transmitted along the optical waveguide 1 to the end circular aperture array 3, it undergoes directional reflection, forming a closed optical loop, which in turn generates a counterclockwise (CCW) optical mode, achieving directional coupling of all optical modes. Relying on the strong electro-optic effect of the PZT thin film, an external voltage is applied through the segmented metal electrodes 4 to precisely control the transmission phase of each segment of light in the optical waveguide 1, calibrating the optical modes of different micro-ring resonators 2 to a state of same frequency, in phase, synchronization, and energy lock, completing mode degeneracy, and enabling the optical sensing structure to operate stably on a third-order or higher singular surface. When a weak external perturbation is applied to the sensing area, the optical sensor generates a violent nonlinear frequency splitting response, and the output optical signal carries a significantly enhanced sensing information, ultimately achieving ultra-high sensitivity detection far exceeding that of a second-order singular surface optical sensing structure.

[0036] For example, see Figure 2 As shown, the optical sensing structure is fabricated from a PZT thin film, with the following specific parameters: the center wavelength of the light beam coupled into the microring resonator 2 is 1550 nm; two microring resonators 2 are provided, and the spacing between adjacent microring resonators 2 is 3 × 10⁻⁶ nm. -4m, the perimeter of micro-ring resonator 2 is 10 -4 m; Optical waveguide 1 is a straight strip waveguide with a height of 2.5 × 10 m. - 7 m, width is 10 -6 m, length 10 -3 m, the coupling spacing between the optical waveguide 1 and each microring resonator 2 is 3×10 m. -9 m; the metal electrode 4 is made of conductive materials such as gold and aluminum. Two metal electrodes are provided on the first side and two on the second side. The height of the first side metal electrode and the second side metal electrode is 6×10 m. -6 m, width is 10 -5 m, length 10 -4 m, the distances between the first-side metal electrode and the second-side metal electrode and the optical waveguide 1 are both 10. -8 m; Circular aperture array 3 consists of five circular apertures etched at the end of the optical waveguide, with a diameter of 6×10⁻⁶. -7 m, the spacing between adjacent circular holes is 3×10 m. -7 The reflectivity of the circular aperture array 3 is 0.6. During operation, an optical signal with a center wavelength of 1550 nm is input to the optical waveguide 1 and sequentially enters the two micro-ring resonators 2 via evanescent wave coupling, exciting a clockwise optical mode. After propagating through one cycle in the micro-ring resonator 2, the clockwise optical mode returns to the optical waveguide 1, undergoes segmented phase modulation by two sets of metal electrodes 4, and continues propagating until it undergoes directional reflection at the circular aperture array 3 at the end of the optical waveguide. The reflected light is again phase-modulated by the metal electrodes 4, propagates in the reverse direction along the closed optical loop, and couples to the two micro-ring resonators 2, exciting a counterclockwise optical mode. After propagating through one cycle in the micro-ring resonator 2, the counterclockwise optical mode returns to the optical waveguide 1, forming a stable unidirectional directional coupling with the clockwise optical mode. This achieves unidirectional coupling of the optical modes in the two micro-ring resonators 2, enabling the optical sensing structure to operate stably on a fourth-order singular surface. At this point, the Hamiltonian of the optical sensing structure can be expressed as: ; In the formula, Let be the intrinsic resonant angular frequency of the micro-ring resonator 2. The optical field loss rate of microring resonator 2. to The coupling coefficient between each optical mode is determined by the evanescent coupling between the optical waveguide 1 and the micro-ring resonator 2, the reflection coupling of the circular aperture array 3, and the electro-optic phase modulation of the metal electrode 4.

[0037] Furthermore, by solving the non-Hermitian Hamiltonian characteristic equation of the optical sensing structure, four eigenvalues ​​are obtained, corresponding to the frequency and loss characteristics of the four optical modes of the optical sensing structure, respectively. By adjusting the voltage of the metal electrode 4, the light phase is changed, thereby changing the coupling coefficient in the matrix, so that the four eigenvalues ​​completely coincide, i.e.: ; In the formula, represents the eigenfrequency of the four optical modes of the optical sensing structure. It can be seen that the four eigenvalues ​​are completely degenerate and consistent with the eigenresonant angular frequency and loss value of the micro-ring resonant cavity 2, indicating that the optical sensing structure has successfully constructed a fourth-order singular surface. At this point, the frequency response sensitivity of the optical sensing structure to weak external disturbances will be significantly improved, enabling high-precision detection of ultra-weak physical or chemical quantities.

[0038] Further, see Figure 3 and Figure 4 As shown, simulation verification is performed on the fourth-order singular surface optical sensing structure of this embodiment: Figure 3 The curves show the frequency splitting response comparison. The horizontal axis represents the nanoparticle perturbation in MHz, and the vertical axis represents the frequency splitting response in MHz. Figure 3 The solid line represents the response curve of the second-order singular surface optical sensing structure, and the dashed line represents the response curve of the fourth-order singular surface optical sensing structure in this embodiment. Figure 3 This indicates that, under the same amount of nanoparticle perturbation, the frequency splitting response of the fourth-order singular surface optical sensing structure in this embodiment is always higher than that of the second-order singular surface optical sensing structure. Furthermore, the smaller the amount of perturbation, the greater the response amplitude of the fourth-order singular surface optical sensing structure to weak perturbations compared to the second-order singular surface optical sensing structure.

[0039] Figure 4 The curve represents the sensitivity enhancement factor. The horizontal axis represents the nanoparticle perturbation amount in MHz, and the vertical axis represents the sensitivity enhancement value, a dimensionless ratio indicating the ratio of the sensitivity of the fourth-order singular surface optical sensing structure to that of the second-order singular surface optical sensing structure in this embodiment. Figure 4 This indicates that, near the degeneracy point, i.e. when the perturbation is close to 0, the sensitivity of the fourth-order singular surface optical sensing structure in this embodiment can reach up to about 18 times that of the second-order singular surface optical sensing structure. As the perturbation increases, the enhancement factor gradually decreases and tends to stabilize. Even under actual perturbation conditions, the sensitivity can be stably maintained at more than 3 times that of the second-order singular surface optical sensing structure.

[0040] It should be noted that, in combination Figure 3 and Figure 4It was found that, compared with the second-order singular surface optical sensing structure, the fourth-order singular surface optical sensing structure of this embodiment has a better response characteristic to weak external disturbances, and can achieve high-precision detection of ultra-weak physical or chemical quantities.

[0041] It will be readily understood by those skilled in the art that the aforementioned advantageous methods can be freely combined and superimposed without conflict.

[0042] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application. The above are merely preferred embodiments of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of this application, and these improvements and modifications should also be considered within the protection scope of this application.

Claims

1. An optical sensing structure, characterized in that, It includes optical waveguides, multiple micro-ring resonators, circular aperture arrays, and multiple sets of metal electrodes; The optical waveguide and the multiple micro-ring resonators are all formed by etching optically functional thin films with electro-optic effects; Multiple micro-ring resonant cavities are arranged sequentially along the extension direction of the optical waveguide and are evanescently coupled to the optical waveguide respectively; The array of circular holes is disposed at the end of the optical waveguide to reflect the transmitted optical signal and form a closed optical loop; Multiple sets of the metal electrodes are respectively arranged in pairs on both sides of the optical waveguide and segmented along the optical waveguide. They are respectively located between two adjacent micro-ring resonators and in the optical waveguide region between the micro-ring resonator and the circular aperture array, which is far from the input end of the optical waveguide.

2. The optical sensing structure according to claim 1, characterized in that, The coupling distance between the optical waveguide and each of the microring resonant cavities is 10. -9 m to 10 -3 m.

3. The optical sensing structure according to claim 1, characterized in that, The optical waveguide is a straight transmission waveguide, including but not limited to rectangular waveguides and ridge waveguides; the height of the optical waveguide is 10. -9 m to 10 -6 m, the width of the optical waveguide is 10 -9 m to 10 -6 m, the length of the optical waveguide is 10 m. -8 m to 1m.

4. The optical sensing structure according to claim 1, characterized in that, The spacing between two adjacent microring resonators is 10. -7 m to 5×10 -2 m.

5. The optical sensing structure according to claim 1, characterized in that, The perimeter of the microring resonant cavity is 10. -8 m to 10 -1 m, the center wavelength of the beam coupled into the microring resonant cavity is 500nm to 1700nm.

6. The optical sensing structure according to claim 1, characterized in that, Each group of metal electrodes includes a first-side metal electrode and a second-side metal electrode; the first-side metal electrode is disposed on the side of the optical waveguide closer to the micro-ring resonant cavity, and the second-side metal electrode is disposed on the side of the optical waveguide farther from the micro-ring resonant cavity; the distance between the first-side metal electrode and the optical waveguide is 10. -8 m to 10 -4 m, the distance between the second side metal electrode and the optical waveguide is 10. -8 m to 10 -4 m.

7. The optical sensing structure according to claim 6, characterized in that, The height of both the first side metal electrode and the second side metal electrode is 10. -8 m to 10 -2 m, the width of both the first side metal electrode and the second side metal electrode is 10. -8 m to 10 -4 m, the length of both the first side metal electrode and the second side metal electrode is 10. -7 m to 10 -1 m.

8. The optical sensing structure according to claim 1, characterized in that, The circular aperture array consists of multiple circular apertures etched at the end of the optical waveguide, arranged sequentially along the extension direction of the optical waveguide; the diameter of each circular aperture is 10. -9 m to 10 -6 m, the distance between two adjacent circular holes is 10. -9 m to 10 -6 m.

9. The optical sensing structure according to claim 1, characterized in that, The optical functional film is a lead zirconate titanate film.

10. An optical detector, characterized in that, Includes the optical sensing structure as described in any one of claims 1-9.

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