Active vibration isolation control method, system and electronic device

Abstract

This invention relates to the field of vibration control technology, providing an active vibration isolation control method, system, and electronic device. The method includes: determining the displacement change rate and current displacement value based on actuator displacement data; determining the motion trajectory based on load displacement data; when the motion trajectory is a preset trajectory, determining a first control signal based on the displacement change rate and a feedforward control signal; when the motion trajectory is not a preset trajectory and the displacement change rate is ≥ a preset disturbance threshold, determining the first control signal based on the displacement change rate, current PID parameters, and a preset gain control coefficient ratio; when the motion trajectory is not a preset trajectory and the displacement change rate is < the disturbance threshold, determining the first control signal based on the displacement change rate and current PID parameters; determining a second control signal based on the current displacement value and multi-level displacement thresholds; and determining an output signal to control the actuator based on the first and second control signals. This addresses the problem of insufficient vibration isolation effect of related active vibration isolation control methods under high acceleration load conditions.

Description

Technical Field

[0001] This invention relates to the field of vibration control technology, and in particular to an active vibration isolation control method, system and electronic equipment. Background Technology

[0002] The continuous development of precision machining and precision measurement technologies has driven the continuous improvement of the accuracy of related instruments and equipment. However, the requirements for vibration suppression in the working environment are becoming increasingly stringent, and environmental vibration has become an important indicator affecting the working accuracy of equipment.

[0003] Passive vibration isolation technology is difficult to effectively suppress low-frequency vibrations and cannot shield equipment from direct environmental disturbances. Active vibration isolation technology can overcome the shortcomings of passive vibration isolation technology, but its vibration isolation effect is still insufficient under high acceleration load conditions above 3g (three times the acceleration of gravity): the system is prone to saturation failure under large disturbances, with long recovery time or even instability; poor control adaptability; and easy to cause equipment damage under extreme conditions.

[0004] There is currently no effective solution to the problem that active vibration isolation control methods in related technologies are not effective enough under high acceleration load conditions. Summary of the Invention

[0005] The present invention provides an active vibration isolation control method, system, and electronic device, which at least solves the problem of insufficient vibration isolation effect of active vibration isolation control methods under high acceleration load conditions in related technologies.

[0006] An active vibration isolation control method provided by this invention includes: determining the displacement change rate and current displacement value of the actuator based on the actuator's displacement data; determining the motion trajectory of the load based on the load's displacement data, wherein the actuator is used to provide vibration isolation protection for the load; determining a first control signal based on the displacement change rate and a feedforward control signal when the motion trajectory is a preset trajectory, wherein the feedforward control signal is determined based on motion trajectory prediction; determining the first control signal based on the displacement change rate, current PID parameters, and a preset gain control coefficient ratio when the motion trajectory is not a preset trajectory and the displacement change rate is greater than or equal to a preset disturbance threshold; determining the first control signal based on the displacement change rate and current PID parameters when the motion trajectory is not a preset trajectory and the displacement change rate is less than the disturbance threshold; determining a second control signal based on the current displacement value and a multi-level displacement threshold, wherein the multi-level displacement threshold is determined according to a preset maximum stroke; and determining an output signal based on the first and second control signals, wherein the output signal is used to control the actuator.

[0007] Preferably, when the motion trajectory is a preset trajectory, the first control signal is determined based on the displacement change rate and the feedforward control signal, including: predicting the theoretical disturbance force based on the preset trajectory and determining the feedforward control signal, wherein the force corresponding to the feedforward control signal is equal in magnitude and opposite in direction to the theoretical disturbance force; determining the first feedback signal based on the displacement change rate and the PID control algorithm, wherein the integral term of the PID control algorithm adopts an anti-saturation mechanism and the differential term of the PID control algorithm adopts a filtering mechanism; and superimposing the feedforward control signal and the first feedback signal to obtain the first control signal.

[0008] Preferably, the preset trajectory includes a T-shaped acceleration motion trajectory; based on the preset trajectory, the theoretical interference force is predicted, and the feedforward control signal is determined, including: determining the acceleration control signal corresponding to the acceleration phase of the T-shaped acceleration motion trajectory by increasing the proportional gain, decreasing the integral gain, and increasing the differential filter coefficient; determining the uniform speed control signal corresponding to the uniform speed phase of the T-shaped acceleration motion trajectory by maintaining the proportional gain, increasing the integral gain, and maintaining the differential filter coefficient; determining the deceleration control signal corresponding to the deceleration phase of the T-shaped acceleration motion trajectory by increasing the proportional gain, decreasing the integral gain, and decreasing the differential filter coefficient; and determining the feedforward control signal based on the acceleration control signal, the uniform speed control signal, and the deceleration control signal; wherein the percentage increase in the proportional gain of the deceleration control signal is greater than the percentage increase in the proportional gain of the acceleration control signal; and the percentage decrease in the integral gain of the deceleration control signal is greater than the percentage decrease in the integral gain of the acceleration control signal.

[0009] Preferably, when the motion trajectory is not a preset trajectory and the displacement change rate is greater than or equal to a preset disturbance threshold, the first control signal is determined based on the displacement change rate, the current PID parameters, and a preset gain control coefficient ratio, including: calculating the displacement error based on the displacement change rate; determining the second feedback signal based on the displacement error, the current PID parameters, and the PID control algorithm; and adjusting the proportional gain, integral gain, and differential filter coefficient of the second feedback signal based on the preset gain control coefficient ratio to determine the first control signal.

[0010] Preferably, the multi-level displacement threshold includes a first-level displacement threshold, a second-level displacement threshold, and a third-level displacement threshold; before determining the second control signal based on the current displacement value and the multi-level displacement threshold, the method further includes: determining the first-level displacement threshold based on a first proportion of the maximum stroke; determining the second-level displacement threshold based on a second proportion of the maximum stroke, wherein the second proportion is greater than the first proportion; and determining the third-level displacement threshold based on a third proportion of the maximum stroke, wherein the third proportion is greater than the second proportion.

[0011] Preferably, determining the second control signal based on the current displacement value and multi-level displacement thresholds includes: when the current displacement value is less than the first-level displacement threshold, determining the second control signal as a holding signal to keep the first control signal unchanged; when the current displacement value is greater than or equal to the first-level displacement threshold and less than or equal to the second-level displacement threshold, determining the second control signal as a first adjustment signal to adjust the proportional gain and integral gain of the first control signal based on a first adjustment coefficient; when the current displacement value is greater than the second-level displacement threshold and less than the third-level displacement threshold, determining the second control signal as a second adjustment signal to adjust the proportional gain and integral gain of the first control signal based on a second adjustment coefficient, wherein the first adjustment coefficient is less than the second adjustment coefficient, and the values ​​of both the first and second adjustment coefficients increase linearly with the increase of the current displacement value, the minimum value of the first adjustment coefficient corresponds to the first-level displacement threshold, the maximum value of the first adjustment coefficient corresponds to the second-level displacement threshold, and the maximum value of the second adjustment coefficient corresponds to the third-level displacement threshold; when the current displacement value is greater than or equal to the third-level displacement threshold, determining the second control signal as a safety control signal to control the actuator to return to the neutral position, wherein the safety control signal has a higher priority than the first control signal.

[0012] Preferably, before determining the actuator's displacement change rate and current displacement value based on the actuator's displacement data, the above method further includes: collecting initial data of the actuator's displacement; performing verification processing on the initial data to obtain first data; and performing filtering processing on the first data to obtain the actuator's displacement data.

[0013] This invention also provides an active vibration isolation control system, comprising: an input unit, which determines the displacement change rate and current displacement value of the actuator based on the actuator's displacement data, and determines the motion trajectory of the load based on the load's displacement data, wherein the actuator is used to provide vibration isolation protection for the load; a first control unit, which determines a first control signal based on the displacement change rate and a feedforward control signal when the motion trajectory is a preset trajectory, wherein the feedforward control signal is determined based on motion trajectory prediction; determines the first control signal based on the displacement change rate, current PID parameters, and a preset gain control coefficient ratio when the motion trajectory is not a preset trajectory and the displacement change rate is greater than or equal to a preset disturbance threshold; and determines the first control signal based on the displacement change rate and current PID parameters when the motion trajectory is not a preset trajectory and the displacement change rate is less than the disturbance threshold; a second control unit, which determines a second control signal based on the current displacement value and a multi-level displacement threshold, wherein the multi-level displacement threshold is determined according to a preset maximum stroke; and an output unit, which determines an output signal based on the first control signal and the second control signal, wherein the output signal is used to control the actuator.

[0014] Preferably, the system further includes: a self-testing unit for performing a system self-test and obtaining a self-test result; an initialization unit for setting the midpoint position of the actuator and the initial values ​​of the PID parameters if the self-test result meets preset conditions; and a data acquisition unit for acquiring displacement data of the actuator based on sensors.

[0015] The present invention also provides an electronic device, including: a processor, and a memory storing a program, the program including instructions that, when executed by the processor, cause the processor to perform any of the methods described above.

[0016] This invention provides an active vibration isolation control method. Based on actuator displacement data, the method determines the actuator displacement change rate and current displacement value; based on load displacement data, it determines the load's motion trajectory. When the motion trajectory is a preset trajectory, a first control signal is determined based on the displacement change rate and a feedforward control signal. When the motion trajectory is not a preset trajectory and the displacement change rate is greater than or equal to a preset disturbance threshold, the first control signal is determined based on the displacement change rate, current PID parameters, and a preset gain control coefficient ratio. When the motion trajectory is not a preset trajectory and the displacement change rate is less than the disturbance threshold, the first control signal is determined based on the displacement change rate and current PID parameters. A second control signal is determined based on the current displacement value and multi-level displacement thresholds. An output signal is determined based on the first and second control signals to control the actuator. By monitoring the actuator displacement as a feedback signal, the method ensures that the corresponding control system always operates within the actuator's physical travel limits. It enables optimized control of specific motion modes such as T-shaped acceleration, improving system response speed and stability. It can quickly identify and handle high-acceleration disturbance events and provides a comprehensive safety protection mechanism to ensure the safe operation of the system under extreme conditions. This aims to address the issue of insufficient vibration isolation effect of active vibration isolation control methods under high acceleration load conditions in related technologies. Attached Figure Description

[0017] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely some embodiments of the present invention, and those skilled in the art can obtain other embodiments based on these drawings without creative effort.

[0018] Figure 1 This is a flowchart of the steps of an active vibration isolation control method in an embodiment of the present invention.

[0019] Figure 2 This is a schematic diagram of an active vibration isolation control system according to an embodiment of the present invention.

[0020] Figure 3This is an execution architecture diagram of an active vibration isolation control system according to an embodiment of the present invention.

[0021] Figure 4 This is a schematic diagram of the structure of an electronic device according to an embodiment of the present invention.

[0022] The above figures include the following reference numerals: 201. Input unit; 202. First control unit; 203. Second control unit; 204. Output unit; 205. Self-test unit; 206. Initialization unit; 207. Acquisition unit. Detailed Implementation

[0023] Embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While some embodiments of the present invention are shown in the drawings, it should be understood that the present invention can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the present invention. It should be understood that the drawings and embodiments of the present invention are for illustrative purposes only and are not intended to limit the scope of protection of the present invention.

[0024] The continuous development of precision machining and precision measurement technologies has driven the continuous improvement of the accuracy of related instruments and equipment. However, the requirements for vibration suppression in the working environment are becoming increasingly stringent, and environmental vibration has become an important indicator affecting the working accuracy of equipment.

[0025] Passive vibration isolation technology is difficult to effectively suppress low-frequency vibrations and cannot shield equipment from direct environmental disturbances. Active vibration isolation technology can overcome the shortcomings of passive vibration isolation technology, but its vibration isolation effect is still insufficient under high acceleration load conditions above 3g: the system is prone to saturation failure under large disturbances, with long recovery time or even instability; poor control adaptability; and easy to cause equipment damage under extreme conditions.

[0026] Therefore, the present invention provides an active vibration isolation control method, including steps S101 to S104.

[0027] Step S101: Determine the displacement change rate and current displacement value of the actuator based on the displacement data of the actuator, and determine the motion trajectory of the load based on the displacement data of the load, wherein the actuator is used to provide vibration isolation protection for the load.

[0028] Step S102: When the motion trajectory is a preset trajectory, a first control signal is determined based on the displacement change rate and the feedforward control signal, wherein the feedforward control signal is determined based on motion trajectory prediction; when the motion trajectory is not a preset trajectory and the displacement change rate is greater than or equal to a preset disturbance threshold, the first control signal is determined based on the displacement change rate, the current PID parameters, and a preset gain control coefficient ratio; when the motion trajectory is not a preset trajectory and the displacement change rate is less than the disturbance threshold, the first control signal is determined based on the displacement change rate and the current PID parameters. Step S103: A second control signal is determined based on the current displacement value and a multi-level displacement threshold, wherein the multi-level displacement threshold is determined based on a preset maximum stroke.

[0029] Step S104: Determine the output signal based on the first control signal and the second control signal. The output signal is used to control the actuator.

[0030] The method described in this embodiment drives the actuator to generate a counterforce to counteract external vibration interference. It can be used in precision equipment under high acceleration load environments, specifically accelerations of 3g and above. Precision equipment includes, but is not limited to, coordinate measuring machines, scanning electron microscopes, semiconductor lithography equipment, wafer probe stations, and mass spectrometers.

[0031] The method described in this embodiment uses actuator displacement as a feedback signal to ensure that the corresponding control system always operates within the actuator's physical stroke limit. For example, the actuator's physical stroke limit is set to ±50mm.

[0032] The actuator's displacement data includes the actual displacement value (PV) of the actuator. The midpoint of the actuator is set as the control target point (SP=0), and the PID control algorithm is used to ensure that the actuator displacement is always within the specified stroke.

[0033] The method described in this embodiment effectively addresses high acceleration load disturbances above 3g and prevents integral saturation by designing a specialized PID anti-saturation algorithm.

[0034] An anti-saturation mechanism is employed in the integral term, integrating only when the control output is not saturated or the error direction helps to desaturate, effectively preventing integral saturation. A filtering mechanism is used in the derivative term, employing a first-order low-pass filter to reduce the impact of measurement noise on the derivative term and improve system robustness. A dynamic rigidity adjustment mechanism is included, dynamically adjusting the PID parameters based on how close the actuator is to its limit. When approaching the limit, the proportional gain is automatically increased to improve the system's recovery speed. Further details will be provided later.

[0035] The method provided in this embodiment can achieve optimized control of specific motion patterns such as T-shaped acceleration, improving system response speed and stability. When the load's motion trajectory is a known trajectory, such as T-shaped or S-shaped, the feedforward control principle is used to predict the theoretical disturbance force based on the motion trajectory law, such as the T-shaped acceleration motion law, and generate a feedforward control signal that is equal in magnitude and opposite in direction to the disturbance force. The feedforward signal is superimposed with the feedback signal to achieve more precise control.

[0036] The method provided in this embodiment establishes a comprehensive disturbance detection and response mechanism, which can quickly identify and handle high acceleration disturbance events. When the load accelerates too quickly, it generates a large instantaneous disturbance. Therefore, disturbances above the 3g level are identified by monitoring the actuator displacement change rate. After identifying a high acceleration disturbance, the system automatically switches to a high-gain control mode and adjusts the control parameters according to the disturbance characteristics, prioritizing ensuring that the actuator does not overtravel.

[0037] The method described in this embodiment provides a comprehensive safety protection mechanism to ensure the safe operation of the system under extreme conditions.

[0038] The system employs a multi-level protection mechanism based on the actuator's maximum specified stroke. Level 1 protection occurs when the actuator's current displacement is greater than or equal to the first-level displacement threshold and less than or equal to the second-level displacement threshold, triggering a warning and slightly adjusting control parameters. Level 2 protection occurs when the actuator's current displacement is greater than the second-level displacement threshold but less than the third-level displacement threshold, significantly adjusting control parameters and increasing restoring force. Level 3 protection occurs when the actuator's current displacement is greater than or equal to the third-level displacement threshold, triggering a safety mode and prioritizing a return to the neutral position. In safety mode, the system prioritizes actuator stroke limitations, temporarily sacrificing some vibration isolation performance. This embodiment will be further explained later.

[0039] In summary, the method provided in this embodiment can solve the problem of insufficient vibration isolation effect of active vibration isolation control methods in related technologies under high acceleration load conditions, and can ensure that the control system can still operate safely under extreme conditions, reducing the risk of equipment damage.

[0040] Preferably, in step S101, before determining the actuator's displacement change rate and current displacement value based on the actuator's displacement data, the method further includes: acquiring initial data of the actuator's displacement; verifying the initial data to obtain first data; and filtering the first data to obtain the actuator's displacement data.

[0041] Preferably, in step S102, when the motion trajectory is a preset trajectory, determining the first control signal based on the displacement change rate and the feedforward control signal includes: predicting the theoretical disturbance force based on the preset trajectory and determining the feedforward control signal, wherein the force corresponding to the feedforward control signal is equal in magnitude and opposite in direction to the theoretical disturbance force; determining the first feedback signal based on the displacement change rate and the PID control algorithm, wherein the integral term of the PID control algorithm adopts an anti-saturation mechanism, and the differential term of the PID control algorithm adopts a filtering mechanism; and superimposing the feedforward control signal and the first feedback signal to obtain the first control signal.

[0042] Specifically, by predicting the theoretical disturbance force m_laod*a: load mass*load acceleration through stage control, a feedforward control signal with the same magnitude but opposite direction to the disturbance force is generated. The feedforward control signal is superimposed with the first feedback signal to achieve more precise control.

[0043] The PID control algorithm includes: calculating the error e = SP – PV, calculating the proportional term Kp * e, calculating the integral term with anti-saturation (integral + Ki * e * dt), calculating the derivative term with filtering, and comprehensively calculating the control output u = Kp*e + integral + derivative + feedforward. Here, feedforward represents the feedforward control signal.

[0044] For example, the pseudocode for the anti-integral saturation mechanism is as follows.

[0045] IF (u < u_max AND e > 0.0) OR (u > u_min AND e < 0.0) THEN

[0046] integral := integral + Ki * e * dt;

[0047] END_IF;

[0048] Pseudocode explanation: u is the control output; u_min is the minimum control output; u_max is the maximum control output; e is the error; Ki is the integral gain; dt is the time step; and integral is the integral term. Integral is performed only when the control output is not saturated or the error direction helps to exit saturation.

[0049] The pseudocode for the differential filter is as follows.

[0050] derivative := (Kd * N * (e - e_prev)) / (1 + N * dt);

[0051] Pseudocode Explanation: Kd is the differential gain; N is the differential filter coefficient; e is the error; e_prev is the previous error; dt is the time step; and derivative is the differential term. A first-order low-pass filter is used to reduce the impact of measurement noise on the differential term.

[0052] Specifically, the ideal design scenario is that the force corresponding to the feedforward control signal is equal to the theoretical disturbance force. In practical applications, however, there is a certain margin of error between the two. Even with this error, the force corresponding to the feedforward control signal can still reduce the influence of the theoretical disturbance force and enhance the vibration isolation effect.

[0053] Preferably, the preset trajectory includes a T-shaped acceleration motion trajectory.

[0054] Based on the pre-defined trajectory prediction theory interference force, the feedforward control signal is determined, including: determining the acceleration control signal corresponding to the acceleration phase of the T-shaped acceleration trajectory by increasing the proportional gain, decreasing the integral gain, and increasing the differential filter coefficient; determining the uniform speed control signal corresponding to the uniform speed phase of the T-shaped acceleration trajectory by maintaining the proportional gain, increasing the integral gain, and maintaining the differential filter coefficient; and determining the deceleration control signal corresponding to the deceleration phase of the T-shaped acceleration trajectory by increasing the proportional gain, decreasing the integral gain, and decreasing the differential filter coefficient.

[0055] The feedforward control signal is determined based on the acceleration control signal, the constant speed control signal, and the deceleration control signal.

[0056] Specifically, the percentage increase in the proportional gain of the deceleration control signal is greater than the percentage increase in the proportional gain of the acceleration control signal; and the percentage decrease in the integral gain of the deceleration control signal is greater than the percentage decrease in the integral gain of the acceleration control signal.

[0057] For example, during the acceleration phase: the proportional gain Kp is increased by 20% to improve the system response speed and quickly keep up with the acceleration motion; the integral gain Ki is decreased by 20% to avoid integral saturation and prevent excessive accumulation; the differential filter coefficient N is increased by 50% to strengthen the differential filter and suppress high-frequency noise.

[0058] During the constant speed phase: the proportional gain Kp remains unchanged to maintain stable control; the integral gain Ki increases by 20% to eliminate steady-state error and improve accuracy; the differential filter coefficient N remains unchanged to maintain noise suppression capability.

[0059] During the deceleration phase: the proportional gain Kp is increased by 50% to quickly suppress rebound and overshoot; the integral gain Ki is decreased by 30% to avoid excessive integration and prevent overshoot; the differential filter coefficient N is reduced by 20% to improve the differential response speed and quickly suppress oscillation.

[0060] Preferably, in step S102, when the motion trajectory is not a preset trajectory and the displacement change rate is greater than or equal to a preset disturbance threshold, the first control signal is determined based on the displacement change rate, the current PID parameters, and the preset gain control coefficient ratio, including: calculating the displacement error based on the displacement change rate; determining the second feedback signal based on the displacement error, the current PID parameters, and the PID control algorithm; and adjusting the proportional gain, integral gain, and differential filter coefficient of the second feedback signal based on the preset gain control coefficient ratio to determine the first control signal.

[0061] Gain control coefficients include proportional gain, integral gain, and differential filter coefficients.

[0062] The specific preset value of the gain control coefficient ratio can be determined by those skilled in the art through a limited number of experiments, and will not be elaborated here in this embodiment.

[0063] For example, the pseudocode for disturbance detection is as follows.

[0064] IF NOT disturbance_active AND ABS(PV - actuator_mid) > 0.01 THEN

[0065] disturbance_active := TRUE;

[0066] diag.disturbance_start := current_time;

[0067] settling := FALSE;

[0068] END_IF;

[0069] Pseudocode explanation: disturbance_start is the disturbance start time; settling is the steady state. disturbance_active is the disturbance activation flag; actuator_mid is the actuator midpoint position. Read the actuator displacement PV, calculate the displacement change rate d(PV) / dt, and determine whether |d(PV) / dt|> the preset disturbance threshold. If so, proceed to the processing flow: increase Kp, adjust Ki, and increase the differential filter strength.

[0070] Preferably, the multi-level displacement threshold includes a first-level displacement threshold, a second-level displacement threshold, and a third-level displacement threshold.

[0071] Before determining the second control signal based on the current displacement value and the multi-level displacement thresholds, the above method further includes: determining a first-level displacement threshold based on a first proportion of the maximum stroke; determining a second-level displacement threshold based on a second proportion of the maximum stroke, wherein the second proportion is greater than the first proportion; and determining a third-level displacement threshold based on a third proportion of the maximum stroke, wherein the third proportion is greater than the second proportion.

[0072] Preferably, determining the second control signal based on the current displacement value and multi-level displacement thresholds includes: if the current displacement value is less than the first-level displacement threshold, determining the second control signal as a holding signal to keep the first control signal unchanged.

[0073] When the current displacement value is greater than or equal to the first-level displacement threshold and less than or equal to the second-level displacement threshold, the second control signal is determined as the first adjustment signal, which is used to adjust the proportional gain and integral gain of the first control signal based on the first adjustment coefficient.

[0074] If the current displacement value is greater than the second-level displacement threshold and less than the third-level displacement threshold, the second control signal is determined as the second adjustment signal, used to adjust the proportional gain and integral gain of the first control signal based on the second adjustment coefficient. The first adjustment coefficient is less than the second adjustment coefficient, and both the first and second adjustment coefficients increase linearly with the current displacement value. The minimum value of the first adjustment coefficient corresponds to the first-level displacement threshold, the maximum value of the first adjustment coefficient corresponds to the second-level displacement threshold, and the maximum value of the second adjustment coefficient corresponds to the third-level displacement threshold.

[0075] If the current displacement value is greater than or equal to the third-level displacement threshold, the second control signal is determined as a safety control signal and used to control the actuator to return to the neutral position. The safety control signal has a higher priority than the first control signal.

[0076] The neutral position, the actuator midpoint, and the control target point are the same technical positions, and are the reference positions in the above-described method of this embodiment. Taking a maximum stroke of ±50mm as an example, the neutral position is the exact middle of this stroke range, that is, the reference position where the displacement value is 0, which is the natural equilibrium position of the actuator when there is no control command or external force disturbance.

[0077] For example, the first ratio is 90%, that is, the first level displacement threshold is 90% of the maximum displacement; the second ratio is 96%, that is, the second level displacement threshold is 96% of the maximum displacement; and the third ratio is 99%, that is, the third level displacement threshold is 99% of the maximum displacement.

[0078] When the current displacement value of the actuator is within 90% of the maximum displacement, the control parameters remain at their default values, and the adjustment coefficient is in the safe range with an adjustment coefficient of 1.0.

[0079] The parameters begin to adjust when the current displacement value of the actuator reaches 90% of the maximum displacement.

[0080] When the current displacement value of the actuator is greater than or equal to 90% of the maximum displacement and less than or equal to 96% of the maximum displacement, the adjustment coefficient is in the first-level protection zone, and the adjustment coefficient increases linearly from 1.0 to 1.5.

[0081] When the current displacement value of the actuator is greater than 96% of the maximum displacement but less than 99% of the maximum displacement, the control parameters are adjusted significantly. The adjustment coefficient is in the secondary protection zone, and the adjustment coefficient increases linearly from 1.5 to 2.0.

[0082] The adjustment target is set to increase the proportional gain Kp of the first control signal and decrease the integral gain Ki of the first control signal.

[0083] Please refer to Figure 2 As shown, the present invention also provides an active vibration isolation control system, including an input unit 201, a first control unit 202, a second control unit 203 and an output unit 204.

[0084] Input unit 201 determines the displacement change rate and current displacement value of the actuator based on the actuator's displacement data, and determines the motion trajectory of the load based on the load's displacement data. The actuator is used to provide vibration isolation protection for the load.

[0085] The first control unit 202 determines a first control signal based on the displacement change rate and a feedforward control signal when the motion trajectory is a preset trajectory, wherein the feedforward control signal is determined based on motion trajectory prediction; when the motion trajectory is not a preset trajectory and the displacement change rate is greater than or equal to a preset disturbance threshold, the first control signal is determined based on the displacement change rate, the current PID parameters, and a preset gain control coefficient ratio; when the motion trajectory is not a preset trajectory and the displacement change rate is less than the disturbance threshold, the first control signal is determined based on the displacement change rate and the current PID parameters.

[0086] The second control unit 203 determines a second control signal based on the current displacement value and a multi-level displacement threshold, wherein the multi-level displacement threshold is determined according to a preset maximum stroke.

[0087] The output unit 204 determines the output signal based on the first control signal and the second control signal, and the output signal is used to control the actuator.

[0088] The execution architecture of the system provided in this embodiment can be referred to... Figure 3 As shown.

[0089] Specifically, the first control unit 202 checks the parameter configuration, detects whether the motion trajectory is a preset trajectory, i.e., a known load motion plan. If it is a known motion plan, it identifies the motion stage, such as acceleration, deceleration, or constant speed. Based on the current stage, it adjusts the PID control parameters and calculates the feedforward control signal. It also performs disturbance detection, calculates the actuator displacement change rate, and determines whether a disturbance of level 3g or above has occurred. If so, it increases Kp, adjusts Ki, and increases the differential filter strength.

[0090] The second control unit 203 performs stroke limiting processing, dynamically adjusts the control output according to the current displacement position of the actuator, and ensures that the control output will not cause the actuator to exceed the specified range; it also performs safety protection, monitors the degree to which the actuator approaches the limit, and switches to safety mode when necessary to prioritize the safety of the actuator stroke.

[0091] The output unit 204 outputs the calculated control quantity into an actuator drive signal, which is then applied to the actuator to achieve vibration isolation control.

[0092] Preferably, please refer to Figure 2 As shown, the system provided in this embodiment also includes a self-testing unit 205, an initialization unit 206, and a data acquisition unit 207.

[0093] The self-test unit 205 performs a system self-test and obtains the self-test results. The system self-test includes checking the sensor status and actuator status.

[0094] Initialization unit 206 sets the midpoint position of the actuator and the initial values ​​of the PID parameters if the self-test result meets preset conditions. Specifically, it performs a zeroing operation, sets the midpoint position of the actuator, and initializes the PID parameters and state variables.

[0095] The acquisition unit 207 acquires displacement data of the actuator based on sensors. Specifically, it reads the displacement sensor data of the actuator, verifies the validity of the data, and performs necessary filtering processing.

[0096] In summary, the technical solution provided in this embodiment differs from related technologies that use load displacement feedback. Instead, it uses actuator displacement as the primary feedback signal, ensuring a direct correlation between the control objective and the actuator's physical limitations. This embodiment employs a PID control algorithm with anti-integral saturation mechanisms and differential filtering, enabling the system to operate effectively under strict travel limits. By fully considering the actuator's physical travel limitations, the system is less prone to saturation failure even under large disturbances.

[0097] The technical solution provided in this embodiment performs corresponding characteristic adaptation control for specific load motions: during the acceleration phase, the response speed is increased and the integral gain is reduced to prevent saturation; during the constant speed phase, stable control is maintained and the integral gain is increased to eliminate steady-state error; during the deceleration phase, the proportional gain is significantly increased to quickly suppress rebound and overshoot.

[0098] The technical solution provided in this embodiment uses feedforward control based on the known load trajectory to proactively counteract known disturbances. It can quickly identify and handle high-acceleration disturbance events. A multi-level safety protection mechanism is in place to ensure safe operation of the system under extreme conditions, reducing the risk of equipment damage.

[0099] The present invention also provides a non-transitory machine-readable medium storing a computer program, wherein the computer program, when executed by a computer's processor, is used to cause the computer to perform a method according to an embodiment of the present invention.

[0100] The present invention also provides a computer program product, including a computer program, wherein the computer program, when executed by a computer's processor, is used to cause the computer to perform the method of the embodiments of the present invention.

[0101] This invention also provides an electronic device, including: at least one processor; and a memory communicatively connected to the at least one processor. The memory stores a computer program executable by the at least one processor, which, when executed by the at least one processor, causes the electronic device to perform the method of this invention.

[0102] refer to Figure 4 This is a structural block diagram of an electronic device, either a server or a client, according to an embodiment of the present invention. It is an example of a hardware device that can be applied to various aspects of the present invention. The electronic device is intended to represent various forms of digital electronic computer devices, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices, and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the present invention described and / or claimed herein.

[0103] like Figure 4As shown, the electronic device includes a computing unit 401, which can perform various appropriate actions and processes based on a computer program stored in a read-only memory (ROM) 402 or a computer program loaded from a storage unit 408 into a random access memory (RAM) 403. The RAM 403 may also store various programs and data required for the operation of the electronic device. The computing unit 401, the ROM 402, and the RAM 403 are interconnected via a bus 404. An input / output (I / O) interface 405 is also connected to the bus 404.

[0104] Multiple components in the electronic device are connected to I / O interface 405, including: input unit 406, output unit 407, storage unit 408, and communication unit 409. Input unit 406 can be any type of device capable of inputting information into the electronic device. Input unit 406 can receive input digital or character information and generate key signal inputs related to user settings and / or function control of the electronic device. Output unit 407 can be any type of device capable of presenting information and may include, but is not limited to, a display, speaker, video / audio output terminal, vibrator, and / or printer. Storage unit 408 may include, but is not limited to, disks and optical discs. Communication unit 409 allows the electronic device to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks, and may include, but is not limited to, modems, network cards, infrared communication devices, and / or wireless communication transceivers, such as Bluetooth devices, WiFi devices, WiMax devices, cellular communication devices, and / or the like.

[0105] The computing unit 401 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of the computing unit 401 include, but are not limited to, CPUs, graphics processing units (GPUs), various special-purpose artificial intelligence (AI) computing units, various computing units running machine learning model algorithms, digital signal processors (DSPs), and any suitable processor, controller, microcontroller, etc. The computing unit 401 performs the various methods and processes described above. For example, in some embodiments, the method embodiments of the present invention can be implemented as computer programs tangibly contained in a machine-readable medium, such as storage unit 408. In some embodiments, part or all of the computer program can be loaded and / or installed on an electronic device via ROM 402 and / or communication unit 409. In some embodiments, the computing unit 401 can be configured to perform the methods described above by any other suitable means (e.g., by means of firmware).

[0106] Computer programs for implementing the methods of embodiments of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor or controller of a general-purpose computer, special-purpose computer, or other programmable data processing apparatus, such that when executed by the processor or controller, the computer programs cause the functions / operations specified in the flowcharts and / or block diagrams to be performed. The computer programs may be executed entirely on a machine, partially on a machine, or as a standalone software package, partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0107] In the context of embodiments of this invention, a machine-readable medium can be a tangible medium that may contain or store a program for use by or in conjunction with an instruction execution system, apparatus, or device. A machine-readable medium can be a machine-readable signal medium or a machine-readable storage medium. A machine-readable signal medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, or infrared systems, apparatus, or devices, or any suitable combination of the foregoing. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the foregoing.

[0108] It should be noted that the term "comprising" and its variations used in the embodiments of this invention are open-ended, meaning "including but not limited to". The term "based on" means "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". The modifications of "one" and "a plurality" mentioned in the embodiments of this invention are illustrative and not restrictive, and those skilled in the art should understand that unless explicitly indicated otherwise in the context, they should be understood as "one or more". The descriptions of terms such as "first", "second", etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features.

[0109] The user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, stored data, displayed data, etc.) involved in the embodiments of this invention are all information and data authorized by the user or fully authorized by all parties.

[0110] The steps described in the method embodiments provided by the present invention can be performed in different orders and / or in parallel. Furthermore, the method embodiments may include additional steps and / or omit the steps shown. The scope of protection of the present invention is not limited in this respect.

[0111] The term "embodiment" in this specification refers to a specific feature, structure, or characteristic described in connection with an embodiment that may be included in at least one embodiment of the invention. The appearance of this phrase in various places throughout the specification does not necessarily imply the same embodiment, nor does it imply independence or alternativeity from other embodiments. The various embodiments in this specification are described in a related manner, with reference to each other for similar or identical parts. In particular, for apparatus, device, and system embodiments, since they are substantially similar to method embodiments, the description is relatively simple, and relevant details are referred to in the description of the method embodiments.

[0112] The above embodiments merely illustrate several implementation methods of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of protection. It should be noted that those skilled in the art can make various modifications and improvements without departing from the inventive concept of the present invention, and these all fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the appended claims.

Claims

1. An active vibration isolation control method, characterized in that, include: The displacement change rate and current displacement value of the actuator are determined based on the displacement data of the actuator, and the motion trajectory of the load is determined based on the displacement data of the load, wherein the actuator is used to provide vibration isolation protection for the load; When the motion trajectory is a preset trajectory, a first control signal is determined based on the displacement change rate and the feedforward control signal, wherein the feedforward control signal is determined based on the motion trajectory prediction; When the motion trajectory is not a preset trajectory and the displacement change rate is greater than or equal to a preset disturbance threshold, a first control signal is determined based on the displacement change rate, the current PID parameters, and the preset gain control coefficient ratio. If the motion trajectory is not a preset trajectory and the displacement change rate is less than the disturbance threshold, a first control signal is determined based on the displacement change rate and the current PID parameters. The second control signal is determined based on the current displacement value and the multi-level displacement threshold, wherein the multi-level displacement threshold is determined according to the preset maximum stroke; An output signal is determined based on the first control signal and the second control signal, and the output signal is used to control the actuator.

2. The method according to claim 1, characterized in that, When the motion trajectory is a preset trajectory, a first control signal is determined based on the displacement change rate and the feedforward control signal, including: Based on the preset trajectory prediction theoretical interference force, a feedforward control signal is determined, wherein the force corresponding to the feedforward control signal is equal in magnitude and opposite in direction to the theoretical interference force; The first feedback signal is determined based on the displacement change rate and the PID control algorithm, wherein the integral term of the PID control algorithm adopts an anti-saturation mechanism, and the derivative term of the PID control algorithm adopts a filtering mechanism. The feedforward control signal and the first feedback signal are superimposed to obtain the first control signal.

3. The method according to claim 2, characterized in that, The preset trajectory includes a T-shaped acceleration motion trajectory; Based on the preset trajectory prediction theoretical interference force, the feedforward control signal is determined, including: The acceleration control signal corresponding to the acceleration phase of the T-shaped acceleration trajectory is determined by increasing the proportional gain, decreasing the integral gain, and increasing the differential filter coefficient. By maintaining the proportional gain, increasing the integral gain, and maintaining the differential filter coefficient, the uniform speed control signal corresponding to the uniform speed phase of the T-shaped acceleration motion trajectory is determined. By increasing the proportional gain, decreasing the integral gain, and decreasing the differential filter coefficient, the deceleration control signal corresponding to the deceleration phase of the T-shaped acceleration motion trajectory is determined. The feedforward control signal is determined based on the acceleration control signal, the constant speed control signal, and the deceleration control signal; Wherein, the percentage increase in the proportional gain of the deceleration control signal is greater than the percentage increase in the proportional gain of the acceleration control signal; and the percentage decrease in the integral gain of the deceleration control signal is greater than the percentage decrease in the integral gain of the acceleration control signal.

4. The method according to claim 1, characterized in that, When the motion trajectory is not a preset trajectory and the displacement change rate is greater than or equal to a preset disturbance threshold, a first control signal is determined based on the displacement change rate, the current PID parameters, and a preset gain control coefficient ratio, including: The displacement error is calculated based on the displacement change rate. The second feedback signal is determined based on the displacement error, the current PID parameters, and the PID control algorithm. The proportional gain, integral gain, and differential filter coefficient of the second feedback signal are adjusted based on the preset gain control coefficient ratio to determine the first control signal.

5. The method according to claim 1, characterized in that, The multi-level displacement threshold includes a first-level displacement threshold, a second-level displacement threshold, and a third-level displacement threshold; Before determining the second control signal based on the current displacement value and the multi-level displacement threshold, the method further includes: The first-level displacement threshold is determined based on a first proportion of the maximum travel. The second-level displacement threshold is determined based on a second proportion of the maximum stroke, wherein the second proportion is greater than the first proportion; The third-level displacement threshold is determined based on a third proportion of the maximum stroke, wherein the third proportion is greater than the second proportion.

6. The method according to claim 5, characterized in that, Determining the second control signal based on the current displacement value and multi-level displacement thresholds includes: If the current displacement value is less than the first level displacement threshold, the second control signal is determined to be a holding signal to keep the first control signal unchanged. When the current displacement value is greater than or equal to the first-level displacement threshold and less than or equal to the second-level displacement threshold, the second control signal is determined as the first adjustment signal, which is used to adjust the proportional gain and integral gain of the first control signal based on the first adjustment coefficient. When the current displacement value is greater than the second-level displacement threshold and less than the third-level displacement threshold, the second control signal is determined as the second adjustment signal, which is used to adjust the proportional gain and integral gain of the first control signal based on the second adjustment coefficient. The first adjustment coefficient is less than the second adjustment coefficient, and the values ​​of both the first adjustment coefficient and the second adjustment coefficient increase linearly with the increase of the current displacement value. The minimum value of the first adjustment coefficient corresponds to the first-level displacement threshold, the maximum value of the first adjustment coefficient corresponds to the second-level displacement threshold, and the maximum value of the second adjustment coefficient corresponds to the third-level displacement threshold. If the current displacement value is greater than or equal to the third-level displacement threshold, the second control signal is determined as a safety control signal and used to control the actuator to return to the neutral position, wherein the safety control signal has a higher priority than the first control signal.

7. The method according to claim 1, characterized in that, Before determining the displacement change rate and current displacement value of the actuator based on the actuator's displacement data, the method further includes: Acquire initial data on actuator displacement; The initial data is verified to obtain the first data; The first data is filtered to obtain the displacement data of the actuator.

8. An active vibration isolation control system, characterized in that, include: The input unit determines the displacement change rate and current displacement value of the actuator based on the actuator's displacement data, and determines the motion trajectory of the load based on the load's displacement data, wherein the actuator is used to provide vibration isolation protection for the load; The first control unit determines a first control signal based on the displacement change rate and a feedforward control signal when the motion trajectory is a preset trajectory, wherein the feedforward control signal is determined based on the motion trajectory prediction; when the motion trajectory is not a preset trajectory and the displacement change rate is greater than or equal to a preset disturbance threshold, the first control signal is determined based on the displacement change rate, the current PID parameters, and a preset gain control coefficient ratio; when the motion trajectory is not a preset trajectory and the displacement change rate is less than the disturbance threshold, the first control signal is determined based on the displacement change rate and the current PID parameters. The second control unit determines a second control signal based on the current displacement value and a multi-level displacement threshold, wherein the multi-level displacement threshold is determined according to a preset maximum stroke; The output unit determines an output signal based on the first control signal and the second control signal, and the output signal is used to control the actuator.

9. The system according to claim 8, characterized in that, Also includes: The self-test unit performs a system self-test and obtains the self-test results; The initialization unit sets the midpoint position of the actuator and the initial values ​​of the PID parameters if the self-test result meets the preset conditions. The acquisition unit collects displacement data of the actuator based on sensors.

10. An electronic device, comprising: A processor and a memory storing a program, characterized in that the program includes instructions that, when executed by the processor, cause the processor to perform the method according to any one of claims 1 to 7.

Images