Double-gradient micro-tapered elastic diaphragm-based piezoelectric pressure sensor and preparation method thereof

CN122360741APending Publication Date: 2026-07-10CHONGQING UNIVERSITY OF SCIENCE AND TECHNOLOGY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
CHONGQING UNIVERSITY OF SCIENCE AND TECHNOLOGY
Filing Date
2026-04-28
Publication Date
2026-07-10

AI Technical Summary

Technical Problem

The existing ionized flexible pressure sensors have a simple microstructure design, which leads to nonlinear changes in contact area, reduced sensitivity in high-pressure areas, and difficulty in achieving both high sensitivity and linear response over a wide range.

Method used

A dual-gradient microconical elastic thin film substrate structure is adopted, and an array of large, medium and small-sized microconical units is constructed on the surface of the dielectric layer. Through size gradation and quantity configuration, a progressive contact mechanism is formed. Combined with a specific material system, the contact area is increased approximately linearly.

Benefits of technology

It achieves near-linear growth of contact area within the range of 100~1000 kPa, with a linearity of 0.99, combining high sensitivity and flexibility, making it suitable for smart wearable devices and health monitoring.

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Abstract

This invention relates to the field of pressure sensor technology, and more particularly to a dual-gradient microcone elastic thin film-based ionized pressure sensor and its fabrication method. The sensor comprises a sequentially stacked encapsulation layer, an electrode layer, and a dielectric layer; both the dielectric layer and the electrode layer are based on a polymer elastomer, respectively composited with a modified ionic liquid / electrolyte and a conductive material; the surface of the dielectric layer has a dual-gradient microcone array: large, medium, and small microcone units are arranged according to a preset rule to form a distribution gradient; the height direction of each microcone unit is formed by multiple layers of concentric cones stacked to form a progressively contracting morphological gradient; under pressure, microcones of different sizes deform and contact sequentially from largest to smallest, and each microcone contacts layer by layer, achieving a gradual increase in the interface contact area. The sensor is fabricated using a 3D printed template combined with soft etching technology, effectively overcoming the nonlinear response defect, achieving a linearity of 0.99 within the 100~1000 kPa range, and possessing both wide range and dual-mode temperature and pressure sensing capabilities.
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