A laser beam combiner film laser damage threshold testing device and analysis method for coupling electric field and temperature field
By using an electric push rod and calibration plate to correct the placement of thin film components in a laser beam combiner thin film laser damage threshold testing device, and combining the calibration frame and T-shaped positioning rod to ensure vertical laser irradiation, the test error problem caused by inaccurate limit of thin film components is solved, and higher test accuracy and reliability are achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- YANGZHOU XINYIYANG OPTOELECTRONICS CO LTD
- Filing Date
- 2026-05-11
- Publication Date
- 2026-07-10
AI Technical Summary
Existing laser beam combiner thin film laser damage threshold testing devices have difficulty ensuring the vertical state of thin film elements during the limiting process, resulting in large errors in test results. Furthermore, the center point of thin film elements of different specifications shifts after clamping, affecting the accuracy of the test.
A laser beam combiner for testing the laser damage threshold of thin films using a laser beam combiner coupled with an electric field and a temperature field is employed. The placement of the thin film element is corrected by an electric push rod and a calibration plate. The calibration frame and T-shaped positioning rod ensure vertical laser irradiation. Adjusting bolts and guide columns are used to adjust the position of the light spot, thereby achieving accurate positioning and clamping of the thin film element.
It effectively reduces testing errors, improves the accuracy and precision of test results, ensures uniform laser irradiation on the surface of thin film components, and enhances the reliability of the analysis results of the testing device.
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Figure CN122360894A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the technical field of laser optical element testing, and in particular to a laser damage threshold testing device and analysis method for a laser beam combiner thin film coupled with an electric field and a temperature field. Background Technology
[0002] Laser beam combiners are core optical components in high-power laser systems. The thin film fabricated on their surface directly determines the beam combiner's resistance to laser damage. The laser damage threshold is a key indicator for evaluating the performance of the thin film and ensuring the stable operation of the laser system. As high-power laser systems develop towards higher power and higher energy, the thin film of the laser beam combiner is not only affected by the temperature field generated by laser irradiation during actual operation, but also by the coupling influence of environmental electric fields and laser-induced electric fields. The interaction between the electric field and the temperature field significantly alters the microstructure and mechanical properties of the thin film, leading to changes in the laser damage threshold and even premature film failure, affecting the reliability and lifespan of the entire laser system.
[0003] Currently, existing laser beam combiner thin film laser damage threshold testing devices use clamps to limit the position of thin film elements during use. However, due to manual placement, it is difficult to guarantee that the thin film elements are vertically aligned after each placement, which can easily lead to deviations. In addition, the center points of some thin film elements of different specifications may shift after clamping, resulting in a large offset between the pulsed laser irradiation point and the center point of the thin film element. Overall, this leads to a larger error in the test results, and the accuracy of the analysis results needs to be further improved.
[0004] Therefore, those skilled in the art have provided a laser damage threshold testing device and analysis method for laser beam combiners with coupled electric and temperature fields to solve the problems mentioned in the background art.
[0005] Invention Content To address the problems mentioned in the background art, the present invention provides a laser damage threshold testing device and analysis method for a laser beam combiner thin film coupled with an electric field and a temperature field.
[0006] The present invention provides a laser damage threshold testing device and analysis method for laser beam combiner thin films coupled with electric and temperature fields, which adopts the following technical solution: A laser damage threshold testing device and analysis method for a laser beam combiner thin film coupled with an electric field and a temperature field includes a test platform and support feet installed at four corners below the test platform. Support plates are installed on both sides above the test platform, and a constant temperature control box is installed between the tops of the two support plates. A rectangular rod passes through the top of the constant temperature control box, and two support blocks are symmetrically installed on the bottom wall of the constant temperature control box. Arc-shaped pressure plates are installed opposite each other between the tops of the two support blocks and at the bottom of the rectangular rod. The two ends of the upper arc-shaped pressure plate are flush with the top wall of the constant temperature control box. Springs are installed between the two support plates. A horizontal plate is arranged below the sides of the two support plates. An electric push rod is installed on one side above the horizontal plate. A calibration plate is fixedly connected to the top of the electric push rod. The top of the calibration plate passes through the bottom of the constant temperature control box and through the lower arc-shaped pressure plate. The top of the calibration plate is in contact with the inner arc surface of the upper arc-shaped pressure plate. A pad is installed on the side of the test platform away from the constant temperature control box. A fixing plate is adjustablely installed on the pad. A pulse laser is fixedly fitted in the center of the fixing plate. A calibration component is installed on the outside of the fixing plate.
[0007] Preferably, the calibration assembly includes I-beams sleeved on both sides of the fixed plate, with support shafts fixedly connected to the outer sides of both I-beams, and a calibration frame fixedly connected between the outer ends of the two support shafts. A laser pen is fixedly sleeved in the center of the calibration frame, and the emission points of the pulsed laser and the laser pen are on the same straight line. Extended plates are fixedly connected to both sides of the bottom of the fixed plate, and extended rods are fixedly connected to both sides of the two extended plates. A T-shaped positioning rod is fixedly connected to the outer end of each extended rod.
[0008] Preferably, an adjusting bolt is threadedly connected at the center of the pad, and the top of the adjusting bolt is rotatably connected to the bottom of the fixing plate. Guide posts are fixedly connected at the two corners below the outer extension plates on both sides, and the outside of each guide post penetrates the inside of the pad.
[0009] Preferably, support legs are installed at the four corners below the test platform, and the bottom of each support leg is fixed to the top of the test platform.
[0010] Preferably, the thermostatic control box has transparent doors hinged to both sides of the opening, and the two transparent doors have semi-circular notches on the sides close to each other.
[0011] Preferably, magnets are installed at the upper and lower corners of the two transparent boxes.
[0012] Preferably, the pulsed laser has a laser energy adjustment range of 0-100mJ, a pulse width adjustment range of 1-10ns, and a frequency adjustment range of 1-10Hz.
[0013] Preferably, the clamping adjustment range of the two arc-shaped pressure plates is 5-50mm, and the arc-shaped clamping surface of the arc-shaped pressure plates is provided with an anti-slip pad layer.
[0014] Preferably, the method includes the following steps: S1 Sample preparation: Fix the sample to be tested on the sample fixture and adjust its position so that the laser irradiates the center of the sample perpendicularly; S2 Coupled field parameter setting: Set the target electric field strength and temperature, and keep the parameters stable; S3 Laser irradiation test: Start with low energy and gradually increase the laser energy, irradiating for 10-30 seconds each time, and observe the damage to the sample; S4 Damage threshold recording: When the sample is damaged, record the corresponding parameters and calculate the damage threshold; S5 Multiple tests and analysis: Change the coupled field parameters and repeat steps S2-S4 to analyze the influence of the coupled field on the damage threshold; S6 Result verification: Select typical parameter combinations to repeat the test, calculate the average value to reduce the error.
[0015] In summary, the present invention has the following beneficial technical effects: The electric push rod moves the calibration plate upward, pushing the upper arc-shaped pressure plate upward along the rectangular rod guide path. This ensures that the side of the thin-film element placed on the calibration plate is aligned with the side of the calibration plate, correcting the placement and ensuring that the thin-film element is perpendicular to the pulsed laser, reducing subsequent testing errors. Simultaneously, the calibration plate moves downward out of the temperature control chamber. Under the counterforce of the arc-shaped pressure plate above, applied by springs on both sides, the corrected thin-film element is automatically clamped and limited. At the same time, by flipping the calibration frame in front of the pulsed laser and placing it on two T-shaped positioning rods on the same side, the flipped laser pointer and the pulsed laser's irradiation source are aligned horizontally. This allows the tester to observe the position of the pulsed laser on the thin-film element by analogy with the laser pointer's beam. Furthermore, by rotating the adjusting bolt, the fixing plate and the pulsed laser move up and down along the guide path of the four guide pillars, correcting the beam's alignment with the center of the thin-film element. This better ensures that the laser irradiates the thin-film element surface vertically and uniformly, further reducing errors during testing and improving the accuracy of the test results. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of the main body of the testing device of the present invention; Figure 2 This is the invention Figure 1 A structural diagram from a first-person perspective on the other side; Figure 3 This is a schematic diagram showing the details of the pulsed laser side component of the present invention; Figure 4 This is a structural schematic diagram of the internal cross-section of the constant temperature control box of the present invention; Figure 5 This is a structural schematic diagram showing the vertical cross-sectional details of the fixing plate of the present invention.
[0017] Explanation of reference numerals in the attached diagram: 1. Temperature control box; 2. Rectangular rod; 3. Support plate; 4. Horizontal plate; 5. Support leg; 6. Test platform; 7. Support foot; 8. Fixing plate; 9. Pulsed laser; 10. Calibration frame; 11. Support block; 12. Pad; 13. T-shaped positioning rod; 14. Extension plate; 15. Electric push rod; 16. I-beam shaft; 17. Extension rod; 18. Guide column; 19. Adjusting bolt; 20. Spring; 21. Arc-shaped pressure plate; 22. Calibration plate; 23. Magnet piece; 24. Support shaft; 25. Transparent door; 26. Laser pointer. Detailed Implementation
[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0019] refer to Figures 1-5 As shown, this invention discloses a laser damage threshold testing device for a laser beam combiner thin film coupled with an electric field and a temperature field. It includes a test platform 6 and support feet 7 installed at the four corners below the test platform 6. Support plates 3 are installed on both sides above the test platform 6. A constant temperature control box 1 is installed between the tops of the two support plates 3. A rectangular rod 2 passes through the top of the constant temperature control box 1. Two support blocks 11 are symmetrically installed on the bottom wall of the constant temperature control box 1. Arc-shaped pressure plates 21 are installed between the tops of the two support blocks 11 and at the bottom of the rectangular rod 2. The two ends of the upper arc-shaped pressure plate 21 are positioned between the top and bottom walls of the constant temperature control box 1. Springs 20 are installed on both sides. A horizontal plate 4 is set on the lower side of the two support plates 3. An electric push rod 15 is installed on one side above the horizontal plate 4. A calibration plate 22 is fixedly connected to the top of the electric push rod 15. The top of the calibration plate 22 passes through the bottom of the constant temperature control box 1 and passes through the lower arc-shaped pressure plate 21. The top of the calibration plate 22 is in contact with the inner arc surface of the upper arc-shaped pressure plate 21. A pad 12 is installed on the side of the test platform 6 away from the constant temperature control box 1. A fixed plate 8 is adjustablely installed on the top of the pad 12. A pulse laser 9 is fixedly sleeved in the center of the fixed plate 8. A calibration component is installed on the outside of the fixed plate 8. By activating the electric push rod 15, the calibration plate 22 is moved upward. Then, the top of the calibration plate 22 overcomes the opposing forces of the two springs 20 and pushes the upper arc-shaped pressure plate 21 upward along the guide path of the rectangular rod 2. Next, the thin film element to be tested is placed vertically between the two arc-shaped pressure plates 21, while the side of the thin film element is placed against the side of the calibration plate 22 to correct the placement state and ensure that the placed thin film element is perpendicular to the pulse laser 9, reducing subsequent test errors. Then, the electric push rod 15 can move the calibration plate 22 downward out of the constant temperature control box 1. Under the opposing forces of the two springs 20 on the upper arc-shaped pressure plate 21, the corrected thin film element is automatically clamped and limited.
[0020] refer to Figures 1-5 As shown, the calibration assembly includes I-beams 16 sleeved on both sides of the fixed plate 8. Support shafts 24 are fixedly connected to the outer sides of both I-beams 16. A calibration frame 10 is fixedly connected between the outer ends of the two support shafts 24. A laser pen 26 is fixedly sleeved in the center of the calibration frame 10. The emission points of the pulsed laser 9 and the laser pen 26 are on the same straight line. Extension plates 14 are fixedly connected to both sides of the bottom of the fixed plate 8. Extension rods 17 are fixedly connected to both sides of the two extension plates 14. A T-shaped positioning rod 13 is fixedly connected to the outer end of each extension rod 17. By flipping the calibration frame 10 in front of the pulsed laser 9 and making the bottom of the calibration frame 10 overlap the two T-shaped positioning rods 13 on the same side, support is provided for the bottom of the calibration frame 10. The flipped laser pen 26 and the irradiation source of the pulsed laser 9 are on the same horizontal straight line, so that the irradiation position of the pulsed laser 9 beam source on the thin film element can be observed by analogy through the position of the laser pen 26.
[0021] refer to Figure 1 and Figure 2 as well as Figure 3 As shown, an adjusting bolt 19 is threadedly connected at the center of the pad 12, and the top of the adjusting bolt 19 is rotatably connected to the bottom of the fixing plate 8. Guide posts 18 are fixedly connected at the two corners below the outer extension plates 14 on both sides, and the exterior of each guide post 18 penetrates the interior of the pad 12. By rotating the adjusting bolt 19, the fixing plate 8 and the pulse laser 9 are controlled to move up and down along the guide path of the four guide posts 18, so as to facilitate the adjustment of the height position of the beam source of the pulse laser 9.
[0022] refer to Figure 1 and Figure 2 As shown, support legs 5 are installed at the four corners below the pad 12, and the bottom of each support leg 5 is fixed to the top of the test platform 6 to provide support for the pad 12 below and ensure the stability of the components above the pad 12 during use.
[0023] refer to Figure 1 and Figure 2 as well as Figure 4 As shown, transparent doors 25 are hinged on both sides of the opening of the constant temperature control box 1, and semi-circular notches are opened on the sides of the two transparent doors 25 that are close to each other to avoid affecting the propagation path of the pulse laser 9.
[0024] refer to Figure 4 As shown, magnets 23 are installed at the upper and lower corners of the two transparent boxes 25, and the two magnets 23 on the left and right sides attract each other with opposite polarities, which makes it easy to control the closing of the transparent boxes 25 on both sides.
[0025] refer to Figures 1-5 As shown, the pulsed laser 9 has a laser energy adjustment range of 0-100mJ, a pulse width adjustment range of 1-10ns, and a frequency adjustment range of 1-10Hz. It can emit laser light with a wavelength of 1064nm, simulating the laser irradiation environment of the laser beam combiner in an actual high-power laser system.
[0026] refer to Figures 1-5 As shown, the clamping adjustment range of the two arc-shaped pressure plates 21 is 5-50mm, and the arc-shaped clamping surface of the arc-shaped pressure plates 21 is provided with an anti-slip pad layer, which can adapt to laser beam combiner thin film samples of different sizes within the specification range. The clamping surfaces of the two arc-shaped pressure plates 21 are provided with a silicone anti-slip pad layer with a thickness of 1mm to prevent the sample from sliding during the test and to prevent damage to the thin film on the sample surface.
[0027] All standard parts used in this invention can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here.
[0028] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.
[0029] The implementation principle of the laser damage threshold testing device for a laser beam combiner thin film coupled with an electric field and a temperature field according to an embodiment of the present invention is as follows: During testing, the electric push rod 15 is activated to move the calibration plate 22 upward. Then, the top of the calibration plate 22 overcomes the opposing forces of the two springs 20 and pushes the upper arc-shaped pressure plate 21 upward along the guide path of the rectangular rod 2. Next, the thin film element to be tested is placed vertically between the two arc-shaped pressure plates 21, while the side of the thin film element is placed against the side of the calibration plate 22 to correct the placement state and ensure that the placed thin film element is perpendicular to the pulse laser 9, thereby reducing subsequent testing errors. Immediately afterwards, the electric push rod 15 can move the calibration plate 22 downward out of the constant temperature control box 1. Under the opposing forces of the two springs 20 on the upper arc-shaped pressure plate 21, the corrected thin film element is automatically clamped and limited. Next, by flipping the calibration frame 10 in front of the pulsed laser 9 and placing it on the two T-shaped positioning rods 13 on the same side, support is provided for the lower part of the calibration frame 10. At the same time, the flipped laser pointer 26 is aligned with the irradiation source of the pulsed laser 9 on the same horizontal line. Then, the laser pointer 26 is turned on to observe the position of the light spot on the thin film element. At this time, the operator can rotate the adjusting bolt 19 to control the fixed plate 8 and the pulsed laser 9 to move up and down along the guide path of the four guide posts 18, correcting the light spot to correspond with the center of the thin film element. This better ensures that the laser is vertically and uniformly irradiated on the surface of the thin film element, further reducing errors in the testing process and improving the accuracy of the test results of the testing device.
[0030] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.
Claims
1. A laser damage threshold testing device for a laser beam combiner thin film coupled with an electric field and a temperature field, comprising a test stage (6) and support feet (7) installed at four corners below the test stage (6), characterized in that, Support plates (3) are installed on both sides above the test platform (6). A constant temperature control box (1) is installed between the tops of the two support plates (3). A rectangular rod (2) is inserted through the top of the constant temperature control box (1). Two support blocks (11) are symmetrically installed on the bottom wall of the constant temperature control box (1). Arc-shaped pressure plates (21) are installed between the tops of the two support blocks (11) and at the bottom of the rectangular rod (2). Springs (20) are installed between the two ends of the upper arc-shaped pressure plate (21) and the top wall of the constant temperature control box (1). A horizontal plate (4) is arranged below the sides of the two support plates (3). (4) An electric push rod (15) is installed on the upper side. A calibration plate (22) is fixedly connected to the top of the electric push rod (15). The top of the calibration plate (22) passes through the bottom of the constant temperature control box (1) and through the lower arc-shaped pressure plate (21). The top of the calibration plate (22) is in contact with the inner arc surface of the upper arc-shaped pressure plate (21). A pad (12) is installed on the side of the test platform (6) away from the constant temperature control box (1). A fixing plate (8) is adjustablely installed on the pad (12). A pulse laser (9) is fixedly sleeved in the center of the fixing plate (8). A calibration component is installed on the outside of the fixing plate (8).
2. The laser damage threshold testing device for a laser beam combiner thin film coupled with an electric field and a temperature field according to claim 1, characterized in that: The calibration assembly includes I-beams (16) sleeved on both sides of the fixed plate (8). Support shafts (24) are fixedly connected to the outer sides of both I-beams (16). A calibration frame (10) is fixedly connected between the outer ends of the two support shafts (24). A laser pen (26) is fixedly sleeved in the center of the calibration frame (10). The emission points of the pulsed laser (9) and the laser pen (26) are on the same straight line. Extension plates (14) are fixedly connected to both sides of the bottom of the fixed plate (8). Extension rods (17) are fixedly connected to both sides of the two extension plates (14). A T-shaped positioning rod (13) is fixedly connected to the outer end of each extension rod (17).
3. The laser damage threshold testing device and analysis method for a laser beam combiner thin film coupled with an electric field and a temperature field as described in claim 2, characterized in that: The pad (12) is threaded with an adjusting bolt (19) at the center, and the top of the adjusting bolt (19) is rotatably connected to the bottom of the fixing plate (8). Guide posts (18) are fixedly connected at the two corners below the outer extension plates (14) on both sides, and the outside of each guide post (18) penetrates the inside of the pad (12).
4. The laser damage threshold testing device for a laser beam combiner thin film coupled with an electric field and a temperature field according to claim 3, characterized in that: Support legs (5) are installed at the four corners below the pad (12), and the bottom of each support leg (5) is fixed to the top of the test platform (6).
5. The laser damage threshold testing device for a laser beam combiner thin film coupled with an electric field and a temperature field according to claim 1, characterized in that: The thermostatic control box (1) has transparent doors (25) hinged on both sides of the opening, and the two transparent doors (25) have semi-circular notches on the sides close to each other.
6. The laser damage threshold testing device for a laser beam combiner thin film coupled with an electric field and a temperature field according to claim 5, characterized in that: Magnets (23) are installed at the upper and lower corners of the two transparent boxes (25) near each other.
7. The laser damage threshold testing device for a laser beam combiner thin film coupled with an electric field and a temperature field according to claim 1, characterized in that: The pulsed laser (9) has a laser energy adjustment range of 0-100mJ, a pulse width adjustment range of 1-10ns, and a frequency adjustment range of 1-10Hz.
8. The laser damage threshold testing device for a laser beam combiner thin film coupled with an electric field and a temperature field according to claim 1, characterized in that: The clamping adjustment range of the two arc-shaped pressure plates (21) is 5-50mm, and the arc-shaped clamping surface of the arc-shaped pressure plate (21) is provided with an anti-slip pad layer.
9. The analytical method for a laser beam combiner thin film laser damage threshold testing device coupled with electric and temperature fields according to any one of claims 1-8, characterized in that: Includes the following steps: S1 Sample preparation: Fix the sample to be tested on the sample fixture and adjust the position so that the laser irradiates the center of the sample perpendicularly; S2 Coupled Field Parameter Setting: Set the target electric field strength and temperature, and keep the parameters stable; S3 Laser Irradiation Test: Start with low energy and gradually increase the laser energy, irradiating for 10-30 seconds each time, and observe the sample damage; S4 Damage Threshold Recording: When the sample is damaged, record the corresponding parameters and calculate the damage threshold; S5 Multiple Tests and Analysis: Change the coupled field parameters and repeat steps S2-S4 to analyze the influence of the coupled field on the damage threshold; S6 Result Verification: Select typical parameter combinations and repeat the test to calculate the average value to reduce the error.