A low-frequency vibration test method and system for an environment cabinet fan of a photoetching machine

CN122360985APending Publication Date: 2026-07-10BEIJING IC-EAST SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
BEIJING IC-EAST SEMICONDUCTOR TECHNOLOGY CO LTD
Filing Date
2026-05-12
Publication Date
2026-07-10

AI Technical Summary

Technical Problem

Existing technologies lack testing for the micro-vibration characteristics of fans in specific low-frequency bands in lithography machine environment cabinets. This makes it easy for fans to generate low-frequency resonance or couple with other components after installation in the lithography machine environment cabinet, affecting the stability of the lithography process and increasing debugging costs.

Method used

A method and system for testing low-frequency vibration of fans in lithography machine environment cabinets are designed. By constructing a test platform that simulates the installation stiffness of the lithography machine environment cabinet, the vibration signals of the fans are collected and analyzed to determine whether the low-frequency vibration components near the 20Hz frequency point exceed the preset threshold. Combined with a high-rigidity test platform and a low-frequency vibration isolation foundation, interference signals are filtered out to achieve accurate screening.

Benefits of technology

By accurately selecting low-vibration fans suitable for ultra-precision manufacturing environments, the overall integration success rate of lithography machines can be improved, debugging costs can be reduced, delivery cycles can be shortened, and low-frequency resonance and coupling problems can be avoided.

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Abstract

This invention provides a method and system for testing low-frequency vibration of fans in lithography machine environment cabinets. The testing method includes: constructing a test platform to simulate the installation stiffness of the lithography machine environment cabinet; installing the fan under test on the test platform; controlling the operation of the fan under test and collecting vibration signals from the fan during operation; performing frequency domain analysis on the vibration signals to extract low-frequency vibration components near the 20Hz frequency point; determining whether the low-frequency vibration components exceed a preset threshold; if so, the fan under test is deemed unqualified. The testing system includes a test platform, a frequency converter, several low-frequency acceleration sensors, a data acquisition module, and a host computer analysis system. According to this invention, the problem that existing technology cannot effectively detect weak vibration interference of fans under specific operating conditions and specific low-frequency bands during factory testing of fans can be solved, thereby enabling the selection of low-vibration fans suitable for ultra-precision manufacturing environments, significantly reducing the overall debugging cycle and cost of lithography machines.
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