Multi-dimensional diagnosis device and diagnosis method for laser-driven gas target ultraviolet light source
By using CO2/O2 gas targets and a multi-dimensional diagnostic module, the problems of debris contamination and insufficient diagnostic capabilities of high-power extreme ultraviolet light sources have been solved, achieving cleaner light sources with longer lifespans and greater stability, making them suitable for EUV metrology and testing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
- Filing Date
- 2026-03-30
- Publication Date
- 2026-07-17
AI Technical Summary
Existing high-power extreme ultraviolet light sources use solid or liquid metal targets, which leads to debris contamination, high maintenance costs, and short lifespan. Furthermore, compact gas target light sources lack the ability to perform multi-parameter synchronous diagnosis and feedback control.
Using CO2/O2 as the clean gas target material, it integrates multi-dimensional diagnostic modules such as composite nozzle, synchronous control system, spectrometer, angular distribution EUV energy meter and Faraday cup to achieve in-situ, real-time, multi-parameter monitoring and feedback control of light source performance.
It achieves cleaner and longer-lasting light source operation, reduces the risk of contamination and damage to optical components, provides multi-parameter synchronous diagnostic capabilities, and enhances the stability and applicability of the light source, making it suitable for EUV metrology and testing scenarios.
Smart Images
Figure CN122408952A_ABST