A double-vision guiding micro-manipulation device and a sample manipulation method

Abstract

The application discloses a double-vision guiding micro-manipulation device and a sample preparation method. The hardware structure comprises a high-stability base, a multi-axis precision bearing displacement platform for locking a sample holder, and an independent tool end displacement platform carrying a capillary vacuum suction pen and a precision dispensing system. In view of the Z-axis cumulative error and sliding tilt problem caused by the stacking of multi-layer heterogeneous micro samples and fluid substrates, an orthogonal cross-section double-vision cooperative strategy of "top view to determine XY plane + oblique view to determine Z-axis depth" is adopted to realize real-time monitoring of spatial coordinates and physical critical contact state. At the same time, high-frequency electromagnetic valves are used to realize pneumatic balance, which fundamentally overcomes the disturbance under the micro force field. The zero lateral force vertical compression and micron-level precision mounting are realized, and the high success rate and high standardization of the whole process automation are provided for the preparation of micro samples for ultra-high vacuum ARPES experiments.

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