A semiconductor carrier vehicle speed control method, device, equipment and storage medium

Abstract

The application provides a semiconductor carrier vehicle speed control method, device, equipment and storage medium, including: according to the road condition characteristics of the carrier transport path and the equipment vibration conduction characteristics, the path is divided into first type and second type intervals and the preset maximum speed limit is set respectively;Obtain real-time running parameters when the carrier is running, including first real-time vibration data representing storage position vibration and second real-time vibration data representing wafer vibration;Establish and maintain a database to store the corresponding historical running data of each interval, at least including historical vibration data;When the carrier enters any interval, the safety motion constraint parameters of the current interval are dynamically calculated according to the preset maximum speed limit of the interval, the first and second real-time vibration data and the corresponding interval historical running data retrieved;The running speed of the carrier in the current interval is controlled based on the safety motion constraint parameters. By using the above method, the rationality, accuracy and reliability of speed control can be improved.

Description

Technical Field

[0001] This application relates to the field of intelligent semiconductor manufacturing, and more specifically, to a method, apparatus, equipment, and storage medium for controlling the speed of a semiconductor carrier transport vehicle. Background Technology

[0002] In the semiconductor wafer manufacturing and process flow, the carrier transport vehicle, as the core intelligent logistics equipment that connects various process equipment and completes wafer storage and high-precision transfer, needs to operate in a production environment with high cleanliness, high precision requirements and strong vibration sensitivity for a long time. The vibration control level and transfer efficiency of its operation are directly related to the wafer processing yield, equipment operation stability and the logistics throughput of the entire production line.

[0003] Currently, the semiconductor industry generally uses traditional motion control technology for transport vehicles, which combines a fixed speed with fixed acceleration and deceleration parameters throughout the entire transport path. The transport vehicle executes the operation command according to the uniform preset speed and acceleration and deceleration parameters without segmented or differentiated parameter adjustments.

[0004] This uniform control method cannot adapt to the differences in road conditions and equipment vibration transmission characteristics on different sections of the transport path. It is difficult to achieve precise vibration reduction and protection on vibration-sensitive sections, and it is also difficult to improve operating efficiency on sections with good road conditions. It cannot balance the safety of wafer handling with the transfer efficiency of production line logistics, and it is difficult to meet the needs of large-scale and efficient production of advanced semiconductor processes. Summary of the Invention

[0005] In view of this, the purpose of this application is to provide a method, apparatus, device and storage medium for controlling the speed of a semiconductor carrier transport vehicle, which can improve the rationality, accuracy and reliability of speed control.

[0006] In a first aspect, embodiments of this application provide a method for controlling the speed of a semiconductor carrier transport vehicle, the method comprising: Based on the road condition characteristics and equipment vibration transmission characteristics of the vehicle transport path, the vehicle transport path is pre-divided into a first type of interval and a second type of interval, and a preset maximum speed limit is set for each interval, wherein the preset maximum speed limit of the first type of interval is less than the preset maximum speed limit of the second type of interval. The real-time operating parameters of the carrier transport vehicle during operation are obtained. The real-time operating parameters include at least a first real-time vibration data for characterizing storage vibration and a second real-time vibration data for characterizing wafer vibration. Establish and maintain a database for storing historical operational data for each corresponding interval, the historical operational data including at least historical vibration data; When the transport vehicle enters any section, the safe movement constraint parameters of the transport vehicle in the current section are dynamically calculated based on the preset maximum speed limit of the section, the first real-time vibration data, the second real-time vibration data, and the historical operation data of the corresponding section retrieved from the database. The speed of the transport vehicle within the current section is controlled based on the aforementioned safe motion constraint parameters.

[0007] Optionally, the step of pre-dividing the vehicle transport path into a first type of interval and a second type of interval includes: A full-area pre-test was conducted on the vehicle transport path, and vibration data of each section was collected during the operation of the vehicle transport vehicle. The target road segment whose vibration data exceeds the preset vibration threshold, and the adjacent road segments within the preset range before and after the target road segment, are jointly defined as the first type of interval; The remaining sections of the vehicle transport path, excluding the first type of section, are designated as the second type of section.

[0008] Optionally, acquiring real-time operating parameters during the operation of the transport vehicle includes: The first real-time vibration data is obtained by a first vibration sensor installed in the storage space of the vehicle transporter. Equipment status data is acquired by means of at least one of temperature sensor, noise sensor, current sensor or voltage sensor installed on the carrier transport vehicle. The equipment status data is used to characterize at least one of motor temperature, moving mechanism current, moving mechanism voltage or environmental noise of the carrier transport vehicle. The real-time operating parameters also include the equipment status data. Auxiliary vibration data is acquired by a second vibration sensor installed on the chassis of the transport vehicle and / or a third vibration sensor installed on the transmission assembly. The auxiliary vibration data is used to verify the validity of the first real-time vibration data acquired by the first vibration sensor, or to detect the vehicle body condition of the transport vehicle.

[0009] Optionally, the safe motion constraint parameters include the maximum permissible acceleration; the dynamic calculation of the safe motion constraint parameters of the transport vehicle within the current interval includes: The first acceleration constraint value is determined based on the second real-time vibration data and a preset wafer vibration safety threshold. The motor operating parameters of the vehicle transporter are obtained, including the motor torque, and a second acceleration constraint value is determined based on the motor operating parameters. The smaller of the first acceleration constraint value and the second acceleration constraint value is determined as the maximum allowable acceleration.

[0010] Optionally, the dynamic calculation of the safe movement constraint parameters of the transport vehicle within the current interval further includes: When the motor torque is detected to exceed the preset torque threshold and the second real-time vibration data does not exceed the wafer vibration safety threshold, it is determined that the transmission structure of the carrier transport vehicle is in a state of obstruction or abnormal lubrication.

[0011] Optionally, the dynamic calculation of the safe movement constraint parameters of the transport vehicle within the current interval includes: Based on the current value of the first real-time vibration data and the historical vibration data of the corresponding interval retrieved from the database, the predicted vibration value of the road section ahead is calculated by a filtering algorithm. The proportional, integral, and / or derivative coefficients of the PID controller are adaptively adjusted based on the predicted vibration value to adjust the speed or acceleration of the vehicle transporter; wherein, the larger the predicted vibration value, the smaller the speed or acceleration of the vehicle transporter is due to the adjustment of the proportional, integral, and / or derivative coefficients.

[0012] Optionally, the method further includes: Generate one of a smooth trapezoidal velocity curve, a triangular velocity curve, or a sinusoidal velocity curve to control the vehicle transport vehicle to run according to the generated velocity curve within the current interval, thereby achieving shock-free switching of motion parameters between different intervals; After the transport vehicle leaves the current section, the historical operating data of the corresponding section in the database is updated using the real-time operating parameters collected during this operation. When the device status data in the real-time operating parameters exceeds the preset device safety threshold, the operation of reducing the preset maximum speed limit of the current interval or reducing the maximum allowable acceleration in the safety motion constraint parameters is triggered, and a warning signal is issued.

[0013] Secondly, embodiments of this application provide a semiconductor carrier transport vehicle speed control device, the device comprising: The interval division module is used to pre-divide the vehicle transport path into a first type of interval and a second type of interval based on the road condition characteristics and equipment vibration transmission characteristics of the vehicle transport path, and to set a preset maximum speed limit for each interval, wherein the preset maximum speed limit of the first type of interval is less than the preset maximum speed limit of the second type of interval. The operating parameter acquisition module is used to acquire real-time operating parameters during the operation of the carrier transport vehicle. The real-time operating parameters include at least first real-time vibration data for characterizing storage vibration and second real-time vibration data for characterizing wafer vibration. A database construction module is used to establish and maintain a database, which stores historical operating data for each corresponding interval, and the historical operating data includes at least historical vibration data. The constraint parameter determination module is used to dynamically calculate the safe movement constraint parameters of the vehicle in the current interval when the vehicle enters any interval, based on the preset maximum speed limit of the interval, the first real-time vibration data, the second real-time vibration data, and the historical operation data of the corresponding interval retrieved from the database. The operating speed control module is used to control the operating speed of the transport vehicle within the current interval based on the safety motion constraint parameters.

[0014] Optionally, the step of pre-dividing the vehicle transport path into a first type of interval and a second type of interval includes: A full-area pre-test was conducted on the vehicle transport path, and vibration data of each section was collected during the operation of the vehicle transport vehicle. The target road segment whose vibration data exceeds the preset vibration threshold, and the adjacent road segments within the preset range before and after the target road segment, are jointly defined as the first type of interval; The remaining sections of the vehicle transport path, excluding the first type of section, are designated as the second type of section.

[0015] Optionally, acquiring real-time operating parameters during the operation of the transport vehicle includes: The first real-time vibration data is obtained by a first vibration sensor installed in the storage space of the vehicle transporter. Equipment status data is acquired by means of at least one of temperature sensor, noise sensor, current sensor or voltage sensor installed on the carrier transport vehicle. The equipment status data is used to characterize at least one of motor temperature, moving mechanism current, moving mechanism voltage or environmental noise of the carrier transport vehicle. The real-time operating parameters also include the equipment status data. Auxiliary vibration data is acquired by a second vibration sensor installed on the chassis of the transport vehicle and / or a third vibration sensor installed on the transmission assembly. The auxiliary vibration data is used to verify the validity of the first real-time vibration data acquired by the first vibration sensor, or to detect the vehicle body condition of the transport vehicle.

[0016] Optionally, the safe motion constraint parameters include the maximum permissible acceleration; the dynamic calculation of the safe motion constraint parameters of the transport vehicle within the current interval includes: The first acceleration constraint value is determined based on the second real-time vibration data and a preset wafer vibration safety threshold. The motor operating parameters of the vehicle transporter are obtained, including the motor torque, and a second acceleration constraint value is determined based on the motor operating parameters. The smaller of the first acceleration constraint value and the second acceleration constraint value is determined as the maximum allowable acceleration.

[0017] Optionally, the dynamic calculation of the safe movement constraint parameters of the transport vehicle within the current interval further includes: When the motor torque is detected to exceed the preset torque threshold and the second real-time vibration data does not exceed the wafer vibration safety threshold, it is determined that the transmission structure of the carrier transport vehicle is in a state of obstruction or abnormal lubrication.

[0018] Optionally, the dynamic calculation of the safe movement constraint parameters of the transport vehicle within the current interval includes: Based on the current value of the first real-time vibration data and the historical vibration data of the corresponding interval retrieved from the database, the predicted vibration value of the road section ahead is calculated by a filtering algorithm. The proportional, integral, and / or derivative coefficients of the PID controller are adaptively adjusted based on the predicted vibration value to adjust the speed or acceleration of the vehicle transporter; wherein, the larger the predicted vibration value, the smaller the speed or acceleration of the vehicle transporter is due to the adjustment of the proportional, integral, and / or derivative coefficients.

[0019] Optionally, the device further includes a real-time operating parameter monitoring module, used for: Generate one of a smooth trapezoidal velocity curve, a triangular velocity curve, or a sinusoidal velocity curve to control the vehicle transport vehicle to run according to the generated velocity curve within the current interval, thereby achieving shock-free switching of motion parameters between different intervals; After the transport vehicle leaves the current section, the historical operating data of the corresponding section in the database is updated using the real-time operating parameters collected during this operation. When the device status data in the real-time operating parameters exceeds the preset device safety threshold, the operation of reducing the preset maximum speed limit of the current interval or reducing the maximum allowable acceleration in the safety motion constraint parameters is triggered, and a warning signal is issued.

[0020] Thirdly, embodiments of this application provide a computer device, including: a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the computer device is running, the processor communicates with the memory via the bus. When the machine-readable instructions are executed by the processor, the steps of the semiconductor carrier transport vehicle speed control method described in any of the optional embodiments of the first aspect are performed.

[0021] Fourthly, embodiments of this application provide a computer-readable storage medium storing a computer program that, when executed by a processor, performs the steps of the semiconductor carrier transport vehicle speed control method described in any of the optional embodiments of the first aspect.

[0022] The technical solution provided in this application includes, but is not limited to, the following beneficial effects: Based on the road conditions and vibration transmission characteristics of the transport path, the transport path is divided into Class I and Class II sections, and different preset maximum speed limits are set for each. This enables precise speed control for different road conditions and vibration transmission characteristics, abandoning the crude control method of uniform speed throughout the entire process. It allows vibration-sensitive sections to suppress vibration risks with a more suitable speed, and sections with good road conditions to improve operating efficiency with a more reasonable speed. This ensures that the speed limit is highly matched with the actual working conditions of the path, significantly improving the pertinence and rationality of speed control.

[0023] Real-time operating parameters of the transport vehicle during operation are acquired. These parameters include at least first real-time vibration data characterizing the vibration of the storage location and second real-time vibration data characterizing the vibration of the wafer. This allows for real-time perception of the actual vibration state of the storage location and wafer during transport, and the operating status is fed back to the control logic in real-time as data. This provides real-time and accurate operating condition data for speed regulation, enabling speed adjustments to respond promptly to changes in the actual operating state, avoiding blind control without data support, and significantly improving the real-time performance and effectiveness of speed control.

[0024] Establishing and maintaining a database for storing historical operating data for each section, with historical vibration data as the core storage content, can continuously accumulate long-term operating characteristics and vibration patterns of different sections, enabling effective retention and reuse of historical operating data. This provides a stable and reliable historical reference for speed control, allowing control logic to operate based on the historical patterns of the road segment, avoiding parameter deviations in single operations, and effectively improving the stability and accuracy of speed control.

[0025] When the transport vehicle enters any section, the safety movement constraint parameters of the transport vehicle in the current section are dynamically calculated based on the preset maximum speed limit of the section, the first real-time vibration data, the second real-time vibration data, and the historical operation data of the corresponding section retrieved from the database. This allows the constraint parameters to simultaneously match the fixed limit values ​​of the section, the real-time vibration state of the storage location and the wafer, and the historical operation patterns. Through multi-dimensional data coupling calculation, a safety constraint that fits the actual working conditions is formed, replacing the fixed preset parameters and greatly improving the adaptability, scientificity, and safety of the constraint parameters.

[0026] By controlling the operating speed of the carrier transport vehicle within the current range based on the safety motion constraint parameters obtained by dynamic calculation, the speed regulation can be strictly limited within a safe and compliant range. With safety constraints as the core, precise speed adjustment is carried out to ensure that the transport process is always in a safe and stable operating state, effectively avoiding risks such as excessive vibration and loss of control, fully guaranteeing the transport safety of the carrier and wafer, and improving the stability and controllability of the entire transport process.

[0027] In summary, this application achieves comprehensive, adaptable, and safe speed control for the semiconductor carrier by implementing a complete control logic that includes path-zone differentiated speed limiting, collaborative sensing of storage location and wafer vibration, reuse of historical operating data, dynamic calculation of safety constraint parameters, and safety-oriented precise speed adjustment. This comprehensively improves the rationality, accuracy, and reliability of speed control and optimizes the overall control effect of semiconductor carrier handling.

[0028] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0029] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 A flowchart of a semiconductor carrier transport vehicle speed control method provided in Embodiment 1 of this application is shown; Figure 2 This paper shows a schematic diagram of the vibration sensor arrangement structure of the semiconductor carrier transport vehicle provided in Embodiment 1 of this application; Figure 3 A flowchart of an interval division method provided in Embodiment 1 of this application is shown; Figure 4This paper shows a schematic diagram of the wafer sensor arrangement structure in the pre-testing stage of the semiconductor carrier transport vehicle provided in Embodiment 1 of this application; Figure 5 A flowchart of the real-time running parameter acquisition method provided in Embodiment 1 of this application is shown; Figure 6 This paper shows a schematic diagram of the equipment status monitoring component of the semiconductor carrier transport vehicle provided in Embodiment 1 of this application; Figure 7 A flowchart of the method for calculating safe motion constraint parameters provided in Embodiment 1 of this application is shown; Figure 8 A flowchart of the second method for calculating safe motion constraint parameters provided in Embodiment 1 of this application is shown; Figure 9 A flowchart of the real-time operating parameter monitoring method provided in Embodiment 1 of this application is shown; Figure 10 This diagram illustrates the structure of a semiconductor carrier transport vehicle speed control device according to Embodiment 2 of this application; Figure 11 A schematic diagram of the structure of a computer device provided in Embodiment 3 of this application is shown. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0032] Example 1 To facilitate understanding of this application, the following is combined with... Figure 1 The flowchart illustrating the speed control method for a semiconductor carrier provided in Embodiment 1 of this application will be used to describe Embodiment 1 of this application in detail.

[0033] See Figure 1 As shown, Figure 1 A flowchart of a semiconductor carrier transport vehicle speed control method provided in Embodiment 1 of this application is shown, wherein the method includes steps S101 to S105.

[0034] S101: Based on the road condition characteristics and equipment vibration transmission characteristics of the vehicle transport path, the vehicle transport path is pre-divided into a first type of interval and a second type of interval, and a preset maximum speed limit is set for each interval, wherein the preset maximum speed limit of the first type of interval is less than the preset maximum speed limit of the second type of interval.

[0035] Specifically, by conducting on-site testing and data calibration of the ground flatness, equipment vibration transmission attenuation coefficient, and storage density of the semiconductor production line handling path, the path is divided into a first type of vibration-sensitive zone and a second type of good road condition zone. The first type of zone includes the vibration transmission zone around the equipment, the floor vibration response zone, the densely arranged storage zone of the carrier, and the loose ground structure section. This type of section is prone to vibration superposition and transmission amplification, and the impact of vibration on the wafer needs to be suppressed by low-speed operation.

[0036] The preset maximum speed limit for the first type of zone is set by comprehensively considering the wafer's vibration tolerance characteristics and the equipment's vibration sensitivity threshold, using a low speed limit to avoid wafer displacement and positioning deviation caused by vibration. The second type of zone consists of dedicated cleanroom transfer channels and open passageways without vibration transmission from production equipment. These passageways have high ground flatness and are free from external vibration interference, supporting stable high-speed operation. The preset maximum speed limit for the second type of zone is set by comprehensively considering path conditions and logistics efficiency requirements, using a high-speed limit to improve handling efficiency.

[0037] The interval division adopts the whole-domain vibration test calibration method, and the only criterion is whether the real-time vibration control value of the road segment exceeds the wafer safety threshold. A single test road segment belongs to only one type of interval. If the vibration of a single point road segment exceeds the standard, the preset extension range before and after that point will be included in the first type of interval, so as to achieve full coverage of vibration sensitive areas.

[0038] S102: Obtain real-time operating parameters during the operation of the carrier transport vehicle, wherein the real-time operating parameters include at least first real-time vibration data for characterizing storage vibration and second real-time vibration data for characterizing wafer vibration.

[0039] Specifically, real-time operating parameters are acquired through a multi-dimensional acquisition module, covering five categories: path basic parameters, vibration constraint parameters, motor equipment parameters, multi-sensor monitoring parameters, and historical data parameters. All types of parameters are synchronously acquired and integrated through the onboard controller. The first real-time vibration data is the storage location vibration value, and the second real-time vibration data is the wafer vibration value.

[0040] Real-time vibration data is collected collaboratively by three sets of onboard vibration sensors. The sensors are rigidly mounted to their corresponding positions on the vehicle body. For details of the arrangement, please refer to [link / reference needed]. Figure 2 As shown, Figure 2This diagram illustrates the vibration sensor arrangement of a semiconductor carrier transport vehicle according to Embodiment 1 of this application. The diagram shows the installation positions of multiple sets of vibration sensors on the carrier transport vehicle, including four sets of storage space sensors installed in the storage space to acquire the first real-time vibration data, serving as the core vibration basis for speed control; chassis base sensors installed on the chassis of the carrier transport vehicle to acquire auxiliary vibration data to verify the validity of the first real-time vibration data acquired by the storage space sensors, or to detect the vehicle body status; and two sets of transmission component sensors installed on the transmission components to acquire auxiliary vibration data to verify the validity of the first real-time vibration data acquired by the storage space sensors, or to detect the transmission structure status of the carrier transport vehicle. The vibration sensors at the storage space positions are the core acquisition units, and the acquired first real-time vibration data is directly used for speed control logic calculations.

[0041] In actual working conditions, due to the limitations of the wafer box packaging structure, it is not possible to directly deploy vibration sensors on the wafer carrier. Therefore, the second real-time vibration data is obtained by equivalent estimation through the arithmetic mapping model between the first real-time vibration data and the wafer vibration value. The mapping model is established through pre-test calibration and is periodically calibrated and corrected using standard sensors to ensure the accuracy of vibration estimation.

[0042] S103: Establish and maintain a database for storing historical operating data for each corresponding interval, wherein the historical operating data includes at least historical vibration data.

[0043] Specifically, this database is a dedicated parameter database for semiconductor carrier handling. It adopts a structured data storage mode with fixed storage levels including interval identifier, interval type, carrier storage location list, vibration safety threshold, historical optimal motion parameters, historical equipment operating parameters, and equipment vibration transmission coefficient. Each level of data is stored in a one-to-one correspondence.

[0044] Historical operating data includes historical vibration monitoring data for each section, historical best speed and acceleration parameters, turning motion parameters, acceleration and deceleration parameters, equipment operating status parameters, and vibration transmission coefficients, comprehensively covering the historical reference data required for speed control.

[0045] The database employs exponential smoothing for iterative data updates. It uses real-time running data to weighted correct historical data, automatically adapting to dynamic scenarios such as aging production line equipment, path structure adjustments, and changes in handling loads, without requiring manual intervention. The initial dataset for the database is obtained through full-domain path pre-testing at the beginning of the project. After pre-testing, data entry and calibration are completed, providing fundamental data support for end-to-end speed control.

[0046] S104: When the vehicle transporter enters any section, the safety motion constraint parameters of the vehicle transporter in the current section are dynamically calculated based on the preset maximum speed limit of the section, the first real-time vibration data, the second real-time vibration data, and the historical operation data of the corresponding section retrieved from the database.

[0047] Specifically, the safety motion constraint parameters are calculated in real time by the on-board controller, covering the maximum safe operating speed, maximum allowable acceleration, acceleration and deceleration duration, constant speed duration, and total running time of the interval. All parameters are calculated synchronously and coupled to ensure the consistency of the control logic.

[0048] Total running time calculation formula: .

[0049] This represents the total travel time of the transport vehicle within the current section. This refers to the acceleration and deceleration time of the transport vehicle within the current section. This is the time it takes for the transport vehicle to maintain a constant speed within the current section.

[0050] During parameter calculation, historical average vibration data for the current interval are retrieved from the database. Combined with the current real-time vibration value collected by the vehicle-mounted sensors The system uses feedforward computational logic to predict road segment vibration trends and adjust constraint parameters in advance.

[0051] The safety motion constraint parameters adopt a three-dimensional coupled constraint mechanism, which synchronously matches wafer vibration safety constraints, motor torque output constraints, and semiconductor production line equipment status constraints. Through optimization calculation of multiple constraints, wafer safety, equipment safety, and handling efficiency are balanced.

[0052] S105: Control the running speed of the transport vehicle within the current section based on safe motion constraint parameters.

[0053] Specifically, the vehicle-mounted motion controller uses a curve fitting algorithm to generate smooth motion curves suitable for semiconductor carrier handling based on safety motion constraint parameters. Optional types include trapezoidal velocity curves, triangular velocity curves, and sinusoidal velocity curves. All curves are free from acceleration abrupt changes and vibration shocks, making them suitable for the precision handling requirements of wafers.

[0054] When the transport vehicle traverses different types of sections, a parameter smooth transition control logic is adopted. By gradually adjusting the acceleration and deceleration parameters, the motion parameters are switched without impact, avoiding vibration and impact caused by sudden parameter changes, and ensuring the positioning accuracy of the wafer.

[0055] Positioning accuracy is calibrated in real time via the vehicle-mounted navigation system, and the calibration results are fed back to the speed controller to ensure that the handling positioning meets the precision handling requirements of the semiconductor production line. The control logic adopts a priority control mechanism, prioritizing ensuring that wafer vibration does not exceed the safety threshold, and maximizing the operating speed under the premise of vibration safety, achieving a dynamic balance between safety and efficiency.

[0056] In an optional implementation, see Figure 3 As shown, Figure 3 The flowchart of an interval division method provided in Embodiment 1 of this application is shown, wherein the step of pre-dividing the vehicle transport path into a first type of interval and a second type of interval includes steps S301 to S303: S301: Conduct a full-area pre-test of the vehicle transport path and collect vibration data for each section during the operation of the vehicle transport vehicle.

[0057] Specifically, the full-area pre-test was conducted offline before the production line was put into operation. A standard transport vehicle was used to run back and forth along the transport path, and multiple sets of operating conditions were set with a fixed speed gradient. Vibration data from four types of sensors were collected simultaneously. The sensor deployment locations are detailed in [reference needed]. Figure 4 As shown. Figure 4 The diagram shows a schematic of the wafer sensor arrangement structure in the pre-testing stage of the semiconductor carrier transport vehicle provided in Embodiment 1 of this application. The diagram shows four sets of wafer sensors installed in the wafer box. These sensors are used to collect real vibration data of the wafers during the full-area pre-testing of the carrier transport path at the beginning of the project. This establishes an arithmetic progression mapping relationship between the storage sensor values ​​and the wafer sensor values. As a result, the wafer vibration value can be estimated equivalently through the storage sensor data in actual working conditions, without the need to install vibration sensors in the wafer box.

[0058] After the pre-test data collection is completed, invalid values ​​such as abnormal fluctuations and signal interference are removed by the data processing module, and the valid data are processed by weighted averaging to obtain the vibration benchmark dataset for each road section and each operating speed.

[0059] Analysis and verification of the pre-test data showed that the vibration values ​​collected by the storage level sensor and the vibration values ​​collected by the wafer sensor have a stable arithmetic progression relationship. This mapping relationship provides a data basis for vibration estimation under actual working conditions.

[0060] The maximum acceleration and deceleration limits of the transport vehicle are calculated by fitting pre-test data. This value serves as the basis for the calibration of subsequent safety motion constraint parameters. The pre-test data is used simultaneously for vibration thresholds for calibration interval division and for initializing historical data in the database, providing complete basic data support for the entire process control.

[0061] S302: The target road segment whose vibration data exceeds the preset vibration threshold, and the adjacent road segments within the preset range before and after the target road segment, are jointly defined as the first type of interval.

[0062] Specifically, the preset vibration threshold is the wafer vibration safety threshold, which is calibrated through a wafer vibration tolerance test and is the upper limit of vibration that prevents the wafer from shifting, deviating, or breaking during handling.

[0063] The interval division adopts the vibration exceeding standard extension calibration rule. If the vibration data of a single road segment exceeds the threshold, the road segments before and after the preset extension range of that point are included in the first type interval, so as to fully cover the vibration sensitive area and eliminate the risk of local vibration exceeding the standard.

[0064] S303: Designate the remaining sections of the vehicle transport path, excluding the first type of section, as the second type of section.

[0065] Specifically, the second category is clean and open road sections where vibration data are consistently below the wafer safety threshold, there is no vibration transmission interference from production equipment, and the ground structure is flat. These road sections have no external vibration excitation and can support high-speed and stable operation.

[0066] The second type of section has no vibration transmission from the surrounding equipment and no vibration interference caused by the dense arrangement of storage sites, which meets the vibration control and environmental adaptation requirements for high-speed operation and can operate stably according to the high-speed limit.

[0067] In an optional implementation, see Figure 5 As shown, Figure 5 The flowchart of the real-time operating parameter acquisition method provided in Embodiment 1 of this application is shown, wherein the acquisition of real-time operating parameters during the operation of the transport vehicle includes steps S501 to S505: S501: The first real-time vibration data is obtained by the first vibration sensor installed in the storage position of the vehicle transport vehicle.

[0068] Specifically, the first vibration sensor is a storage space vibration sensor, with a total of 4 sets deployed, each corresponding to the bearing base of one of the 4 storage spaces. The sensor is rigidly fixed with threads. For the specific layout structure, please refer to [link / reference needed]. Figure 2 As shown, the collected data is marked as to .

[0069] Based on the pre-tested and calibrated storage location-wafer vibration arithmetic mapping model, the second real-time vibration data is obtained by equivalent estimation of the first real-time vibration data, eliminating the need to deploy sensors inside the wafer cassette and adapting to the packaging and handling requirements of semiconductor production lines.

[0070] Wafer vibration estimation formula: .

[0071] For the first The estimated vibration acceleration value for each storage location corresponds to the wafer. For the first The measured vibration acceleration values ​​of each storage location. For the first The wafer vibration compensation coefficient for each storage location is obtained by fitting pre-test data and is a fixed constant.

[0072] The compensation coefficient is periodically calibrated and corrected on-site using standard wafer sensors to eliminate errors caused by equipment aging and load changes, ensuring the accuracy of vibration estimation. The first real-time vibration data, i.e., the storage vibration value, is the core input parameter for speed control, directly participating in the entire process of wafer vibration safety determination, forward vibration prediction, and adaptive adjustment of PID parameters.

[0073] S502: Obtain equipment status data by means of at least one of a temperature sensor, a noise sensor, a current sensor, or a voltage sensor installed on the carrier transport vehicle. The equipment status data is used to characterize at least one of the motor temperature, moving mechanism current, moving mechanism voltage, or ambient noise of the carrier transport vehicle. The real-time operating parameters also include the equipment status data.

[0074] Specifically, the equipment status monitoring components are deployed in a distributed manner; for details on their structure and installation locations, please refer to [link / reference needed]. Figure 6 As shown, Figure 6 The diagram shows a schematic of the equipment status monitoring component structure of the semiconductor carrier transport vehicle provided in Embodiment 1 of this application. The diagram shows multiple sets of equipment status monitoring components for the carrier transport vehicle, including a noise acquisition card for collecting environmental noise data in a clean environment, a motor current, voltage, and torque encoding monitoring component for collecting motor operating parameters of the carrier transport vehicle, covering motor current, voltage, torque, and encoder data, and four sets of temperature sensors for collecting real-time temperature data of the motor and motion mechanism. The above components are used together to obtain equipment status data of the carrier transport vehicle, providing data support for speed control, equipment fault prediction, and predictive maintenance.

[0075] Temperature sensors are mounted on the surfaces of the motor and moving parts to collect temperature data in real time. The noise collection card is fixed to the top of the vehicle to collect noise data in a clean environment. .

[0076] The current sensor and voltage sensor are connected in series in the power supply circuit of the motion mechanism to collect current data in real time. With voltage data The motor monitoring module integrates the acquisition of motor current, voltage, output torque, and encoder pulse signals.

[0077] All equipment status data is uploaded to the predictive maintenance system in real time. The system monitors abnormal conditions such as motor overload, overheating, and excessive noise in cleanrooms through data comparison and analysis, ensuring the safety of equipment and the production environment.

[0078] S503: Auxiliary vibration data is obtained by a second vibration sensor installed on the chassis of the vehicle transporter and / or a third vibration sensor installed on the transmission assembly. The auxiliary vibration data is used to verify the validity of the first real-time vibration data obtained by the first vibration sensor, or to detect the vehicle body status of the vehicle transporter.

[0079] Specifically, the second vibration sensor is a chassis base sensor, rigidly mounted on the main beam of the vehicle chassis. The third vibration sensor is a transmission component sensor, with two sets deployed, installed at the input and output ends of the transmission mechanism respectively. See [link to specific layout structure] for details. Figure 2 As shown, the collected data are respectively , .

[0080] The data collected by the two sets of auxiliary sensors are not directly involved in the speed control calculation, but are only used for the validity verification of the storage vibration value and the status detection of the vehicle body structure and transmission mechanism.

[0081] A dual-sensor data comparison and verification mechanism is adopted. When the deviation between the chassis base vibration data and the storage vibration value exceeds the safety limit, that is, when the proportion of low frequency data exceeds the preset ratio and the maximum amplitude of low frequency exceeds the preset multiple, it is determined that the vehicle body structural component is loose, and the system automatically issues a maintenance prompt.

[0082] The auxiliary vibration data is synchronously uploaded to the predictive maintenance system for fault prediction of transmission mechanism and vehicle body structure, and to identify potential abnormal conditions in advance.

[0083] In an optional implementation, see Figure 7 As shown, Figure 7 The flowchart of the method for calculating safe motion constraint parameters provided in Embodiment 1 of this application is shown. The safe motion constraint parameters include the maximum permissible acceleration. The dynamic calculation of the safe motion constraint parameters of the transport vehicle in the current interval includes steps S701 to S703: S701: Determine the first acceleration constraint value based on the second real-time vibration data and a preset wafer vibration safety threshold.

[0084] Specifically, the second real-time vibration data, i.e., the wafer vibration value, is obtained by estimating the first real-time vibration data collected by the first vibration sensor installed in the storage space of the transport vehicle, using an equivalent estimation method based on the storage space-wafer vibration arithmetic progression model calibrated during the pre-testing phase. This mapping model was established through full-domain pre-testing at the beginning of the project. During the pre-testing phase, a standard wafer sensor was temporarily installed inside the wafer cassette to synchronously collect vibration data under multiple speed conditions with the storage space sensor. After data cleaning and averaging, the mapping relationship and compensation coefficient between the storage space vibration value and the wafer vibration value were fitted. The compensation coefficient is periodically calibrated and corrected on-site using the standard wafer sensor to eliminate accumulated errors caused by equipment aging, load changes, and structural loosening, ensuring the long-term accuracy of the wafer vibration estimation.

[0085] During operation, the vehicle controller acquires the second real-time vibration data in real time and continuously compares it with a preset wafer vibration safety threshold. The wafer vibration safety threshold, calibrated through a wafer vibration tolerance test, is the upper limit of vibration at which the wafer will not shift, deviate, or break during handling. When the second real-time vibration data exceeds the wafer vibration safety threshold, the vehicle controller immediately triggers deceleration and acceleration reduction control commands, prioritizing wafer safety over motor torque constraints and logistics efficiency requirements. When the second real-time vibration data is within the wafer vibration safety threshold range, the operating speed is maximized based on the current maximum speed limit and motor torque constraints, ensuring wafer safety and achieving a dynamic balance between safety and efficiency.

[0086] S702: Obtain the motor operating parameters of the transport vehicle, the motor operating parameters including motor torque, and determine the second acceleration constraint value based on the motor operating parameters.

[0087] Specifically, the motor operating parameters are determined by... Figure 6 The motor monitoring module shown collects data in real time, covering the motor's rated torque. Real-time output speed Theoretical radius of a wheel Motor rated temperature .

[0088] Formula for assigning constrained acceleration to motor: .

[0089] This is the maximum allowable constrained acceleration of the motor. 1.2 represents the maximum acceleration value under the same working conditions that ensures the vibration does not exceed the tolerance. 1.2 is the safety redundancy coefficient for motor acceleration.

[0090] The second acceleration constraint value is the maximum safe acceleration to match the motor output torque. It is used to limit the motor overload output and avoid equipment failure caused by motor overheating or excessive torque.

[0091] S703: The smaller of the first acceleration constraint value and the second acceleration constraint value is determined as the maximum permissible acceleration.

[0092] Specifically, the maximum allowable acceleration adopts a dual-constraint lower-value mechanism to simultaneously satisfy wafer vibration safety and motor operation safety, avoiding wafer damage or equipment failure caused by a single constraint failure.

[0093] The maximum allowable acceleration is a dynamically adjustable parameter. The on-board controller adapts to changes in operating conditions by combining real-time sensor data and operating conditions, thus meeting the operational requirements of different handling loads and different road sections.

[0094] In an optional implementation, the dynamic calculation of the safe motion constraint parameters of the carrier transport vehicle within the current interval further includes: when the motor torque is detected to exceed a preset torque threshold and the second real-time vibration data does not exceed the wafer vibration safety threshold, determining that the transmission structure of the carrier transport vehicle is in a state of obstruction or abnormal lubrication.

[0095] Specifically, this judgment logic is the core technical means of predictive maintenance. Through the linkage analysis of motor torque and vibration data, it can identify hidden faults such as transmission mechanism jamming, insufficient lubrication, and component blockage in advance, so as to avoid the fault from escalating.

[0096] Once the system detects an anomaly, it immediately issues an audible and visual warning signal and uploads the anomaly information to the production line control system, reminding maintenance personnel to perform timely repairs and ensure continuous operation of the production line.

[0097] In an optional implementation, see Figure 8 As shown, Figure 8 The flowchart of the second method for calculating safety motion constraint parameters provided in Embodiment 1 of this application is shown. The dynamic calculation of the safety motion constraint parameters of the transport vehicle within the current interval includes steps S801-S802: S801: Based on the current value of the first real-time vibration data and the historical vibration data of the corresponding interval retrieved from the database, the predicted vibration value of the road section ahead is calculated using a filtering algorithm.

[0098] Specifically, the variables in this step are uniformly calibrated through the vehicle controller, and each variable uniquely corresponds to a definition: The current real-time vibration acceleration of the storage space is determined by... Figure 2 The storage level sensor shown collects data in real time. The historical average vibration of the same road segment or section is obtained by retrieving historical operational data for the corresponding section from the database. Predict the vibration acceleration value for the road section ahead. For vibration prediction weighting coefficients, The predicted vibration acceleration value for the previous cycle. These are the coefficients for the exponential smoothing filter.

[0099] Weighted coefficient constraint formula: .

[0100] These are the weighting coefficients for real-time vibration data. 1 represents the weighting coefficients for historical vibration data, and 1 is a fixed value for the sum of the weighting coefficients.

[0101] Core formula for predicting vibrations on the road ahead: .

[0102] Predict the vibration acceleration value for the road section ahead. These are the coefficients for the exponential smoothing filter, and their values ​​range from [value range missing]. , This represents the current real-time vibration acceleration value of the storage location. The predicted vibration acceleration value for the previous cycle.

[0103] This formula uses an exponential smoothing filtering algorithm to integrate real-time vibration data with historical vibration data, eliminate signal noise and instantaneous fluctuations, and achieve accurate feedforward prediction of the vibration trend of the road section ahead.

[0104] S802: The proportional coefficient, integral coefficient, and / or derivative coefficient of the PID controller are adaptively adjusted according to the predicted vibration value to adjust the speed or acceleration of the vehicle transporter; wherein, the larger the predicted vibration value, the smaller the speed or acceleration of the vehicle transporter is due to the adjustment of the proportional coefficient, the integral coefficient, and / or the derivative coefficient.

[0105] Specifically, this step is the core control technology, which adopts a combined control logic of predictive vibration feedforward and PID parameter adaptation. When the predicted vibration value increases, the response intensity of the PID controller is automatically reduced, and the trolley is controlled to decelerate gently and accelerate and decelerate smoothly, thus suppressing the generation of vibration from the source.

[0106] The core formula for basic PID control: .

[0107] The output of the PID controller is the target acceleration or velocity correction. This is the PID proportional coefficient. For PID integral coefficients, These are the PID differential coefficients. For speed error, For the integral term of speed error, This is the differential term for the velocity error.

[0108] Formula for calculating speed error: .

[0109] Set the speed for the vehicle transporter target. This refers to the real-time actual speed of the transport vehicle.

[0110] PID parameter adaptive adjustment formula:

[0111]

[0112]

[0113] This is the initial proportional coefficient for the PID controller. These are the initial integral coefficients for the PID controller. These are the initial derivative coefficients of the PID controller. This is an adaptive adjustment function for the scaling factor. For the adaptive adjustment function of the integral coefficients, This is an adaptive adjustment function for the differential coefficients.

[0114] General PID parameter tuning functions: .

[0115] This is a general adaptive adjustment function for PID parameters. This is the proportional coefficient for adjusting the vibration effect.

[0116] Final output speed limiting formula: .

[0117] This refers to the final output speed of the vehicle transporter. The reference target speed for the vehicle transporter. This is the vibration adaptive damping coefficient.

[0118] Piecewise function formula for vibration reduction coefficient:

[0119]

[0120]

[0121] For the safe vibration threshold of the wafer, The wafer over-vibration threshold, The velocity attenuation coefficient, This is the minimum speed limit ratio.

[0122] In an optional implementation, see Figure 9 As shown, Figure 9 A flowchart of the real-time operating parameter monitoring method provided in Embodiment 1 of this application is shown, wherein the method further includes steps S901-S903: S901: Generate a smooth trapezoidal velocity curve, a triangular velocity curve, or a sinusoidal velocity curve to control the transport vehicle to run according to the generated velocity curve within the current interval, thereby achieving shock-free switching of motion parameters between different intervals.

[0123] Specifically, the smooth speed curve is generated using a continuous curve fitting algorithm, eliminating the vibration impact caused by sudden acceleration changes, and fully adapting to the low vibration, high cleanliness, and high precision wafer handling technology requirements of semiconductor production lines.

[0124] The generated speed curve command is sent to the trolley motor driver in real time. The driver drives the motor to run through closed-loop control, achieving precise and stable carrier handling and avoiding vibration from affecting the wafer positioning accuracy.

[0125] S902: After the transport vehicle leaves the current section, the historical operating data of the corresponding section in the database is updated using the real-time operating parameters collected during this operation.

[0126] Specifically, the data update uses an exponential smoothing iterative algorithm to write the vibration data, equipment status parameters, and adjusted motion control parameters of the current operation into the database in a weighted manner, overwriting the original historical data.

[0127] The database is continuously optimized with each run, and the accuracy of control parameters gradually improves, eliminating the need for frequent manual adjustments and reducing production line maintenance costs and operational complexity. Data updates are synchronized with equipment operation logs, providing comprehensive data support for subsequent predictive maintenance analysis and control parameter optimization.

[0128] S903: When the device status data in the real-time operating parameters exceeds the preset device safety threshold, the operation of reducing the preset maximum speed limit of the current interval or reducing the maximum allowable acceleration in the safety motion constraint parameters is triggered, and a warning signal is issued.

[0129] For details regarding the structure and installation location of the equipment condition monitoring components, please refer to [link / reference]. Figure 6 As shown, the equipment safety thresholds cover the maximum allowable temperature of the motor, the upper limit of cleanroom noise, the normal fluctuation range of current and voltage, and the upper limit of the rated torque of the motor. All thresholds are determined through equipment calibration and production line requirements.

[0130] When the system triggers an anomaly, it will automatically reduce the upper limit of speed and acceleration parameters within a reasonable range to avoid equipment overload, overheating, and excessive noise, thereby extending the service life of the equipment.

[0131] Motor encoder speed compensation formula: .

[0132] The real-time speed of the motor is collected by the motor encoder. Let be the theoretical radius of the wheel.

[0133] The system monitors the motor encoder pulse signal in real time. If regular peaks appear, it automatically determines that the wheel is at risk of damage or deformation and issues a maintenance prompt to avoid abnormal wheel vibration.

[0134] Early warning signals are simultaneously uploaded to the production line management platform to enable real-time early warning and rapid investigation of abnormal conditions, ensuring the continuous and stable operation of the semiconductor production line.

[0135] This embodiment selects a typical material handling path in a semiconductor production line. The path passes sequentially through vibration-sensitive section A and section B with good road conditions. Section A is a densely populated storage area, with the maximum speed limit set according to the standards for vibration-sensitive sections, and the wafer vibration safety threshold set as a preset safety value. Section B is a clean transport channel, with the maximum speed limit set according to the standards for sections with good road conditions, and the wafer vibration safety threshold consistent with that of section A. The motor parameters of the transport vehicle are set according to the equipment's rated specifications, the initial PID parameters are configured according to the system baseline value, the vibration impact adjustment ratio coefficient is a preset debugging value, the prediction parameters are set according to the requirements of the exponential smoothing algorithm, and the vibration reduction-related parameters are configured according to the wafer safety protection requirements.

[0136] After the transport vehicle enters section A, the real-time vibration acceleration of the storage space is collected by the storage space sensor. The data collected by the chassis base sensor matches the storage space data, and the vehicle body structure is in normal condition. The motor temperature, ambient noise, current and voltage parameters are collected by the equipment status monitoring component. All parameters are within the normal operating range. Combined with the vibration mapping relationship established by the pre-test, the wafer vibration value is estimated to have reached the wafer safety vibration threshold.

[0137] The predicted vibration acceleration value of the road section ahead is calculated based on the core formula for predicting vibration of the road section ahead. Combined with the wafer vibration safety constraint and the motor torque constraint, the first acceleration constraint value and the second acceleration constraint value are calculated respectively. The smaller value of the two constraints is taken as the maximum allowable acceleration of the current section. Then, the adjustment function value is calculated through the general adjustment function of PID parameters. Based on the function value, the PID proportional coefficient, integral coefficient and derivative coefficient are adaptively adjusted to reduce the controller response intensity to suppress vibration.

[0138] Since the predicted vibration value did not exceed the wafer's safe vibration threshold, the vibration reduction coefficient remained at the baseline value. The final output speed was executed according to the preset upper limit of section A. The onboard controller generated a smooth trapezoidal speed curve and completed the operation within the section according to the calibrated acceleration / deceleration time and constant speed time. The total running time within section A was obtained according to the total running time calculation formula. After the transport vehicle left section A and entered section B, the motion parameters switched using a smooth transition logic. The predicted vibration value in section B was far below the safe threshold, so the PID parameters were restored to the baseline configuration, and the maximum speed was increased to the preset upper limit of section B. There were no sudden acceleration changes or vibration impacts during the operation, ensuring stable wafer handling.

[0139] After the transport vehicle leaves the section, the system uses exponential smoothing to iteratively update the vibration data, equipment parameters, and control parameters of this operation to the database. The historical vibration data of the corresponding section is synchronously corrected. The equipment status is normal throughout the operation and no warning signals are triggered. If the motor torque exceeds the standard but the vibration data is normal, the system will immediately determine that there is obstruction in the transmission structure or abnormal lubrication through linkage analysis and issue a warning. The wafer vibration did not exceed the safety threshold during this transport operation, the positioning accuracy meets the precision transport requirements of the semiconductor production line, the overall logistics efficiency is significantly improved after the speed increase on the road section with good road conditions, and the equipment does not have overload or heat generation. It fully meets the high precision and high cleanliness transport technology requirements of the semiconductor production line.

[0140] Example 2 See Figure 10 As shown, Figure 10 This illustration shows a schematic diagram of a semiconductor carrier transport vehicle speed control device according to Embodiment 2 of this application, wherein the device includes: The interval division module 1001 is used to pre-divide the vehicle transport path into a first type of interval and a second type of interval based on the road condition characteristics and equipment vibration transmission characteristics of the vehicle transport path, and to set a preset maximum speed limit for each interval, wherein the preset maximum speed limit of the first type of interval is less than the preset maximum speed limit of the second type of interval. The operating parameter acquisition module 1002 is used to acquire real-time operating parameters during the operation of the carrier transport vehicle. The real-time operating parameters include at least first real-time vibration data for characterizing storage vibration and second real-time vibration data for characterizing wafer vibration. The database construction module 1003 is used to establish and maintain a database, which is used to store historical operating data for each corresponding interval, and the historical operating data includes at least historical vibration data. The constraint parameter determination module 1004 is used to dynamically calculate the safe movement constraint parameters of the vehicle in the current interval when the vehicle enters any interval, based on the preset maximum speed limit of the interval, the first real-time vibration data, the second real-time vibration data, and the historical operation data of the corresponding interval retrieved from the database. The running speed control module 1005 is used to control the running speed of the transport vehicle within the current interval based on the safety motion constraint parameters.

[0141] In an optional implementation, the step of pre-dividing the vehicle transport path into a first type of interval and a second type of interval includes: A full-area pre-test was conducted on the vehicle transport path, and vibration data of each section was collected during the operation of the vehicle transport vehicle. The target road segment whose vibration data exceeds the preset vibration threshold, and the adjacent road segments within the preset range before and after the target road segment, are jointly defined as the first type of interval; The remaining sections of the vehicle transport path, excluding the first type of section, are designated as the second type of section.

[0142] In an optional implementation, acquiring real-time operating parameters during the operation of the transport vehicle includes: The first real-time vibration data is obtained by a first vibration sensor installed in the storage space of the vehicle transporter. Equipment status data is acquired by means of at least one of temperature sensor, noise sensor, current sensor or voltage sensor installed on the carrier transport vehicle. The equipment status data is used to characterize at least one of motor temperature, moving mechanism current, moving mechanism voltage or environmental noise of the carrier transport vehicle. The real-time operating parameters also include the equipment status data. Auxiliary vibration data is acquired by a second vibration sensor installed on the chassis of the transport vehicle and / or a third vibration sensor installed on the transmission assembly. The auxiliary vibration data is used to verify the validity of the first real-time vibration data acquired by the first vibration sensor, or to detect the vehicle body condition of the transport vehicle.

[0143] In an optional implementation, the safe motion constraint parameters include the maximum permissible acceleration; the dynamic calculation of the safe motion constraint parameters of the transport vehicle within the current interval includes: The first acceleration constraint value is determined based on the second real-time vibration data and a preset wafer vibration safety threshold. The motor operating parameters of the vehicle transporter are obtained, including the motor torque, and a second acceleration constraint value is determined based on the motor operating parameters. The smaller of the first acceleration constraint value and the second acceleration constraint value is determined as the maximum allowable acceleration.

[0144] In an optional implementation, the dynamic calculation of the safe motion constraint parameters of the transport vehicle within the current interval further includes: When the motor torque is detected to exceed the preset torque threshold and the second real-time vibration data does not exceed the wafer vibration safety threshold, it is determined that the transmission structure of the carrier transport vehicle is in a state of obstruction or abnormal lubrication.

[0145] In an optional implementation, the dynamic calculation of the safe movement constraint parameters of the transport vehicle within the current interval includes: Based on the current value of the first real-time vibration data and the historical vibration data of the corresponding interval retrieved from the database, the predicted vibration value of the road section ahead is calculated by a filtering algorithm. The proportional, integral, and / or derivative coefficients of the PID controller are adaptively adjusted based on the predicted vibration value to adjust the speed or acceleration of the vehicle transporter; wherein, the larger the predicted vibration value, the smaller the speed or acceleration of the vehicle transporter is due to the adjustment of the proportional, integral, and / or derivative coefficients.

[0146] In an optional implementation, the device further includes a real-time operating parameter monitoring module for: Generate one of a smooth trapezoidal velocity curve, a triangular velocity curve, or a sinusoidal velocity curve to control the vehicle transport vehicle to run according to the generated velocity curve within the current interval, thereby achieving shock-free switching of motion parameters between different intervals; After the transport vehicle leaves the current section, the historical operating data of the corresponding section in the database is updated using the real-time operating parameters collected during this operation. When the device status data in the real-time operating parameters exceeds the preset device safety threshold, the operation of reducing the preset maximum speed limit of the current interval or reducing the maximum allowable acceleration in the safety motion constraint parameters is triggered, and a warning signal is issued.

[0147] Example 3 Based on the same application concept, see [link / reference] Figure 11 As shown, Figure 11 This illustration shows a structural schematic diagram of a computer device provided in Embodiment 3 of this application, wherein, as shown... Figure 11 As shown, the computer device 1100 provided in Embodiment 3 of this application includes: The computer device 1100 includes a processor 1101, a memory 1102, and a bus 1103. The memory 1102 stores machine-readable instructions executable by the processor 1101. When the computer device 1100 is running, the processor 1101 and the memory 1102 communicate via the bus 1103. When the machine-readable instructions are executed by the processor 1101, they perform the steps of the semiconductor carrier transport vehicle speed control method shown in Embodiment 1 above.

[0148] Example 4 Based on the same concept, this application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, performs the steps of the semiconductor carrier transport vehicle speed control method described in any of the above embodiments.

[0149] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working process of the system and apparatus described above can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0150] The computer program product for controlling the speed of a semiconductor carrier transport vehicle provided in this application includes a computer-readable storage medium storing program code. The instructions included in the program code can be used to execute the methods described in the preceding method embodiments. For specific implementation details, please refer to the method embodiments, which will not be repeated here.

[0151] The semiconductor carrier transport vehicle speed control device provided in this application embodiment can be specific hardware on the device or software or firmware installed on the device. The device provided in this application embodiment has the same implementation principle and technical effects as the aforementioned method embodiment. For the sake of brevity, any parts not mentioned in the device embodiment can be referred to the corresponding content in the aforementioned method embodiment. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can all be referred to the corresponding processes in the above method embodiments, and will not be repeated here.

[0152] In the embodiments provided in this application, it should be understood that the disclosed apparatus and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the displayed or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0153] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0154] In addition, the functional units in the embodiments provided in this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0155] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0156] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. In addition, the terms "first", "second", "third", etc. are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0157] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application; and these modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application. All should be covered within the protection scope of this application. Therefore, the protection scope of this application should be determined by the protection scope of the claims.

Claims

1. A method for controlling the speed of a semiconductor carrier transport vehicle, characterized in that, Includes the following steps: Based on the road condition characteristics and equipment vibration transmission characteristics of the vehicle transport path, the vehicle transport path is pre-divided into a first type of interval and a second type of interval, and a preset maximum speed limit is set for each interval, wherein the preset maximum speed limit of the first type of interval is less than the preset maximum speed limit of the second type of interval. The real-time operating parameters of the carrier transport vehicle during operation are obtained. The real-time operating parameters include at least a first real-time vibration data for characterizing storage vibration and a second real-time vibration data for characterizing wafer vibration. Establish and maintain a database for storing historical operational data for each corresponding interval, the historical operational data including at least historical vibration data; When the transport vehicle enters any section, the safe movement constraint parameters of the transport vehicle in the current section are dynamically calculated based on the preset maximum speed limit of the section, the first real-time vibration data, the second real-time vibration data, and the historical operation data of the corresponding section retrieved from the database. The speed of the transport vehicle within the current section is controlled based on the aforementioned safe motion constraint parameters.

2. The method according to claim 1, characterized in that, The step of pre-dividing the vehicle transport path into a first type of interval and a second type of interval includes: A full-area pre-test was conducted on the vehicle transport path, and vibration data of each section was collected during the operation of the vehicle transport vehicle. The target road segment whose vibration data exceeds the preset vibration threshold, and the adjacent road segments within the preset range before and after the target road segment, are jointly defined as the first type of interval; The remaining sections of the vehicle transport path, excluding the first type of section, are designated as the second type of section.

3. The method according to claim 1, characterized in that, The acquisition of real-time operating parameters during the operation of the transport vehicle includes: The first real-time vibration data is obtained by a first vibration sensor installed in the storage space of the vehicle transporter. Equipment status data is acquired by means of at least one of temperature sensor, noise sensor, current sensor or voltage sensor installed on the carrier transport vehicle. The equipment status data is used to characterize at least one of motor temperature, moving mechanism current, moving mechanism voltage or environmental noise of the carrier transport vehicle. The real-time operating parameters also include the equipment status data. Auxiliary vibration data is acquired by a second vibration sensor installed on the chassis of the transport vehicle and / or a third vibration sensor installed on the transmission assembly. The auxiliary vibration data is used to verify the validity of the first real-time vibration data acquired by the first vibration sensor, or to detect the vehicle body condition of the transport vehicle.

4. The method according to claim 1, characterized in that, The safe motion constraint parameters include the maximum permissible acceleration; the dynamic calculation of the safe motion constraint parameters of the transport vehicle within the current interval includes: The first acceleration constraint value is determined based on the second real-time vibration data and a preset wafer vibration safety threshold. The motor operating parameters of the vehicle transporter are obtained, including the motor torque, and a second acceleration constraint value is determined based on the motor operating parameters. The smaller of the first acceleration constraint value and the second acceleration constraint value is determined as the maximum allowable acceleration.

5. The method according to claim 4, characterized in that, The dynamic calculation of the safe movement constraint parameters of the transport vehicle within the current interval also includes: When the motor torque is detected to exceed the preset torque threshold and the second real-time vibration data does not exceed the wafer vibration safety threshold, it is determined that the transmission structure of the carrier transport vehicle is in a state of obstruction or abnormal lubrication.

6. The method according to claim 1, characterized in that, The dynamic calculation of the safe movement constraint parameters of the transport vehicle within the current interval includes: Based on the current value of the first real-time vibration data and the historical vibration data of the corresponding interval retrieved from the database, the predicted vibration value of the road section ahead is calculated by a filtering algorithm. The proportional, integral, and / or derivative coefficients of the PID controller are adaptively adjusted based on the predicted vibration value to adjust the speed or acceleration of the vehicle transporter; wherein, the larger the predicted vibration value, the smaller the speed or acceleration of the vehicle transporter is due to the adjustment of the proportional, integral, and / or derivative coefficients.

7. The method according to claim 1, characterized in that, The method further includes: Generate one of a smooth trapezoidal velocity curve, a triangular velocity curve, or a sinusoidal velocity curve to control the vehicle transport vehicle to run according to the generated velocity curve within the current interval, thereby achieving shock-free switching of motion parameters between different intervals; After the transport vehicle leaves the current section, the historical operating data of the corresponding section in the database is updated using the real-time operating parameters collected during this operation. When the device status data in the real-time operating parameters exceeds the preset device safety threshold, the operation of reducing the preset maximum speed limit of the current interval or reducing the maximum allowable acceleration in the safety motion constraint parameters is triggered, and a warning signal is issued.

8. A speed control device for a semiconductor carrier transport vehicle, characterized in that, The device includes: The interval division module is used to pre-divide the vehicle transport path into a first type of interval and a second type of interval based on the road condition characteristics and equipment vibration transmission characteristics of the vehicle transport path, and to set a preset maximum speed limit for each interval, wherein the preset maximum speed limit of the first type of interval is less than the preset maximum speed limit of the second type of interval. The operating parameter acquisition module is used to acquire real-time operating parameters during the operation of the carrier transport vehicle. The real-time operating parameters include at least first real-time vibration data for characterizing storage vibration and second real-time vibration data for characterizing wafer vibration. A database construction module is used to establish and maintain a database, which stores historical operating data for each corresponding interval, and the historical operating data includes at least historical vibration data. The constraint parameter determination module is used to dynamically calculate the safe movement constraint parameters of the vehicle in the current interval when the vehicle enters any interval, based on the preset maximum speed limit of the interval, the first real-time vibration data, the second real-time vibration data, and the historical operation data of the corresponding interval retrieved from the database. The operating speed control module is used to control the operating speed of the transport vehicle within the current interval based on the safety motion constraint parameters.

9. A computer device, characterized in that, include: The system includes a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the computer device is running, the processor communicates with the memory via the bus. When the machine-readable instructions are executed by the processor, they perform the steps of the semiconductor carrier transport vehicle speed control method as described in any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, performs the steps of the semiconductor carrier transport vehicle speed control method as described in any one of claims 1 to 7.

Images