Dual sided tape grooved film layer preparation apparatus and method based on sdp

By using the microneedle scribing method of SDP technology in the REBCO high-temperature superconducting tape preparation process, the problems of cutting damage and complex processes in the existing technology have been solved, realizing the preparation of multi-core structures without damage and at low cost, which is suitable for the efficient production of different metal base tapes.

CN122455475APending Publication Date: 2026-07-24UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
UNIV OF ELECTRONICS SCI & TECH OF CHINA
Filing Date
2026-03-10
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

Existing technologies for preparing REBCO high-temperature superconducting tapes suffer from problems such as damage to performance and complex processes during cutting, especially damage caused by laser cutting and mechanical cutting. Chemical etching has insufficient precision and causes environmental pollution, making it difficult to achieve efficient and low-cost multi-core structure preparation.

Method used

A method and apparatus for preparing double-sided grooved films based on SDP is adopted. By using microneedles or cutters to cut the coated film during the coating stage to form grooves, direct cutting damage is avoided. The depth and width of the grooves are controlled by the adjustable parameters of the microneedle array, and continuous production is carried out in combination with the SDP process.

Benefits of technology

It enables the fabrication of multi-core structures without damage, simplifies the process, reduces costs, is applicable to metal substrates of different widths and thicknesses, and improves fabrication efficiency and precision.

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Abstract

The application discloses a preparation device and a preparation method of a double-sided tape groove film layer based on SDP, and relates to superconducting material preparation technology.The preparation device comprises a coating area and a heating area arranged along a tape channel, and a cutting assembly is arranged beside the tape channel after the coating area, a distance D between a cutting head of the cutting assembly and a base tape surface of the tape satisfies 0<D<h, and h is a preset coating film layer thickness.The application cuts in the coating film layer stage, avoids mechanical damage caused by direct cutting of the solid thin film, and can realize accurate control of groove depth, width and quantity through adjustable parameters of the microneedle array, and is low in cost and convenient in production.
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Description

Technical Field

[0001] This invention relates to superconducting material preparation technology. Background Technology

[0002] REBCO (Rare Earth Barium Copper Oxide) high-temperature superconducting tape, as a representative of second-generation high-temperature superconducting materials, boasts excellent comprehensive performance, enabling it to move from the laboratory to various cutting-edge application fields such as energy, medicine, and scientific instruments. Its high current-carrying capacity, high irreversible field, high mechanical strength, and relatively low raw material cost have made it the mainstream high-temperature superconducting material currently widely used. Its tape structure mainly consists of a special metal substrate with an isolation layer, a buffer layer, a superconducting layer, and a metal protective layer attached sequentially. The width of the superconducting tape is generally manufactured in different widths between 2 and 12 mm, while the thickness of the superconducting layer is only 1 to 3 μm. Such a high aspect ratio leads to significant "AC loss," severely limiting its potential in high-efficiency energy transmission and precision instruments. To fundamentally suppress AC loss, the industry-recognized effective technical approach is to divide the superconducting layer in the tape into numerous parallel superconducting filaments using a resistive barrier, thereby cutting off the path of lateral coupling current. The preparation methods are mainly divided into multi-core modification technology, which involves reprocessing commercial strip materials, and direct forming technology, which directly forms the core during the strip deposition process. Among commercial strip multi-core modification technologies, laser cutting has become the most widely studied method due to its high precision and stability. For example, using ultraviolet picosecond lasers can control the groove width to 15-25 μm, enabling multi-core strips to achieve a 61-82% reduction in AC loss while only decreasing the critical current by about 5-7%. However, the heat effect during cutting and excessive etching at the overlap may damage performance. Mechanical cutting, although simple, easily introduces microcracks due to cutting stress, leading to a 4-17% decrease in critical current, and controlling cutting precision is difficult. Chemical etching faces problems such as insufficient groove width control precision (approximately 30-100 μm) and environmental pollution. Inkjet printing technology can directly process the required number and size of core filaments, but it is quite difficult and cannot guarantee the quality of long strips. Therefore, there is an urgent need to develop a novel preparation method that forms multi-core structures in situ during strip preparation, which is simple and low-cost.

[0003] Patent application CN211654416U discloses a superconducting tape characterized by having multiple sets of scratches distributed along the length of the tape, with the scratches parallel to each other and evenly spaced (less than 1 mm). Compared to this invention, the scratches in the latter are created by laser cutting or engraving, which causes additional damage to the superconducting surface and is more complex. This invention, however, is based on SDP (Surface Dioxide Deposition) to scratch the pre-deposited coating layer, forming a grooved in-situ template.

[0004] The patent application with the publication number CN103985479B provides a method for preparing a high-temperature superconducting coated conductor strip, in which a chemical solution planarization method (SDP) is used to prepare an isolation layer or a seed layer on a metal substrate. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a method and device for preparing a double-sided grooved film layer based on SDP, which causes no damage to the metal substrate and has a simpler process.

[0006] The technical solution adopted by the present invention to solve the above technical problem is that a double-sided grooved film layer preparation device based on SDP includes a coating area and a heating area arranged along the strip channel. A cutting component is arranged beside the strip channel after the coating area. The distance D between the cutting head in the cutting component and the surface of the base of the strip satisfies 0 < D < h; the h is the preset thickness of the coated film layer.

[0007] The sharp tool is a micro needle or a cutter, and the material of the sharp tool is stainless steel, tungsten steel or polytetrafluoroethylene.

[0008] The strip channel refers to the space occupied by the strip in the working state, which can be determined by the position of the pulley. The cutting head refers to the sharp part for cutting the coated film layer of the strip, such as the tip of the micro needle and the cutting edge of the cutter.

[0009] Furthermore, the cutting component includes a micro needle installed on a micro needle mounting seat, and the angle between the direction of the micro needle and the movement direction of the strip is less than 90 degrees.

[0010] The micro needles are arranged in an array on the micro needle mounting seat, and the micro needle mounting seat has a micro needle tip position adjustment mechanism, including an inclination angle adjustment structure and a micro needle spacing adjustment structure.

[0011] The present invention also provides a method for preparing a double-sided grooved film layer based on SDP, which is characterized in that after coating a coating layer on the base, a micro needle is used to cut the coating layer.

[0012] The preparation method of the present invention includes the following steps:

[0013] (1) Prepare the precursor solution: Mix yttrium acetate with absolute ethanol, and then add 30 g / L of diethanolamine and diethylenetriamine, with the yttrium ion concentration of 0.4 mol / L;

[0014] (2) Clean the base: Use a mixed solution of acetone and ethanol to ultrasonically clean the base;

[0015] (3) Coat the coated film layer: The metal base passes through the precursor solution tank, and the precursor solution is coated on the surface of the metal base to form a coated film layer;

[0016] (4) Micro-needle scribing: Use a stainless-steel micro-needle with an inclination angle of 45° and a needle pitch of 400 μm to scribe the surface of the coated film layer.

[0017] (5) Heat treatment: Heat at 550 °C to form a Y2O3 thin film.

[0018] Further, step (4) is as follows: When the ethanol on the surface of the film layer has completely evaporated and has not entered the thermal decomposition stage, use a stainless-steel micro-needle with an inclination angle of 45° and a needle pitch of 400 μm to scribe the surface of the coated film layer.

[0019] The beneficial effects of the present invention are as follows: scribing is carried out during the coated film layer stage to avoid mechanical damage caused by directly cutting the solid thin film; the parameters of the micro-needle array are adjustable, enabling precise control of the groove depth, width, and quantity; the process is inherited from the SDP process, without the need for additional equipment and processes, and is suitable for roll-to-roll continuous production; it is applicable to various types of metal base tapes with different widths and thicknesses, with low cost and convenient production. Description of the Drawings

[0020] Figure 1 It is a schematic diagram (3D view) of the device structure of the present invention;

[0021] Figure 2 It is a schematic diagram (front view) of the device structure of the present invention;

[0022] Figure 3 It is a two-dimensional partial enlarged schematic diagram of the micro-needle scribing component

[0023] Figure 4 It is a SEM image of the film layer with grooves after scribing

[0024] Figure 5 It is an AFM image of the surface roughness of the film layer at the non-grooved area after SDP Specific Embodiments

[0025] The present invention provides a method and device for preparing a film layer with grooves on both sides based on SDP (Solution Deposition Planarization), that is, when using SDP to prepare the last layer of the film layer, before the solution is completely deposited into a thin film, use a micro-needle to scribe and divide the relatively viscous coated film layer to prepare a film layer with regular and clear groove morphology.

[0026] The device of the present invention includes a coating area and a heating area arranged along the strip channel. A scribing component is arranged beside the strip channel after the coating area. The distance D between the scribing head in the scribing component and the surface of the base tape of the strip satisfies 0 < D < h; the h is the preset thickness of the coated film layer.

[0027] The sharp tool is a micro-needle or a cutter, and the material of the sharp tool is stainless steel, tungsten steel or polytetrafluoroethylene.

[0028] The strip channel refers to the space occupied by the strip in the working state, which can be determined by the position of the pulley. The dicing head is the sharp part that cuts the coating layer of the strip, such as the tip of a microneedle or the blade tip of a cutting tool. The dicing head is located on both sides of the strip channel. Figure 3 In the middle, the microneedle mounting base is made of stainless steel tube and is mounted on the main body of the device by spring.

[0029] See Figures 1-5 .

[0030] This invention provides a method and apparatus for preparing a double-sided grooved film based on SDP (Self-Propagating Dielectric Deposition), comprising a rapid chemical solution planarization device (SDP device) for flexible metal strip surfaces, a microneedle scribing assembly, a continuous conveyor belt system, and a heat treatment system. The microneedle scribing assembly is inclinedly disposed between the solution tank and the heater of the SDP device, and includes a microneedle array and a fixing frame. The microneedle array forms a certain angle with the strip surface, and the needle tip size and spacing are adjustable.

[0031] The method of the present invention includes the following steps:

[0032] (1) Prepare the precursor solution;

[0033] (2) Clean the metal substrate;

[0034] (3) A precursor solution is coated onto the baseband surface using SDP;

[0035] (4) Microneedle scribing to coat the film;

[0036] (5) Heat treatment forms a grooved film;

[0037] The preparation of the film based on the chemical solution planarization method (publication number CN103985479B) and then the processing by the present invention, when the final film layer is deposited, a large amount of alcohol in the precursor solution will evaporate before the Hastelloy strip enters the heater, and the viscosity of the coated film layer will increase. At this time, the coated film layer can be cut by the present invention to obtain a film template with grooves on both sides, and the process is also simpler.

[0038] Example 1: Hastelloy C-276 was selected as the metal base strip, with a width of 12 mm and a thickness of 70 μm.

[0039] (1) Preparation of precursor solution: Mix yttrium acetate with anhydrous ethanol, and then add 30 g / L of diethanolamine and diethylenetriamine. The yttrium ion concentration is 0.4 mol / L.

[0040] (2) Cleaning the baseband: Ultrasonic cleaning with a mixture of acetone and ethanol 4 times.

[0041] (3) Coating the coating film: The metal substrate passes through the precursor liquid tank at a speed of 24 m / h.

[0042] (4) Microneedle scribing: The baseband coming out of the precursor liquid tank passes through Figure 2 The device uses stainless steel microneedles with a diameter of 10 μm, an inclination angle of 45°, and a needle spacing of 400 μm to lightly touch the surface of the coated film to perform scratching.

[0043] (5) Heat treatment: The film is heated to 550°C in a heater to form a Y2O3 film with a thickness of about 400 nm and a trench depth of about 20 nm.

[0044] The resulting Y2O3 film has a core wire width of approximately 390 μm and a groove width of approximately 5 μm.

[0045] Example 2: This example uses a stainless steel base strip, with microneedles of 5 μm in diameter and 50 μm in spacing, and the rest is the same as in Example 1.

[0046] The resulting Y2O3 thin film has a core wire width of approximately 45 μm and a groove width of approximately 5 μm, making it suitable for high-frequency AC applications.

Claims

1. An apparatus for preparing a double-sided grooved film based on SDP, comprising a coating zone and a heating zone arranged along a strip channel, characterized in that, A slitting component is arranged beside the strip channel after the coating area, and the distance D between the slitting head of the slitting component and the surface of the base strip of the strip satisfies 0 < D < h; where h is the preset thickness of the coating film layer.

2. The apparatus for preparing a double-sided grooved film based on SDP as described in claim 1, characterized in that, The slitting component includes micro needles installed on a mounting seat, and the included angle between the direction of the micro needles and the moving direction of the strip is less than 90 degrees.

3. The SDP-based double-sided grooved film preparation apparatus as described in claim 2, characterized in that, The micro needles are arranged in an array on the micro needle mounting seat, and the micro needle mounting seat has a micro needle head position adjusting mechanism.

4. The SDP-based double-sided grooved film preparation apparatus as described in claim 3, characterized in that, The micro needle head position adjusting mechanism of the micro needles includes an inclination angle adjusting structure and a micro needle spacing adjusting structure.

5. A method for preparing a double-sided grooved film based on SDP, characterized in that, After coating the base strip to form a coating layer, a sharp tool is used to slit the coating layer.

6. The method for preparing a double-sided grooved film based on SDP as described in claim 5, characterized in that, The sharp tool is a micro needle or a cutter, and the material is stainless steel, tungsten steel or polytetrafluoroethylene.

7. The method for preparing a double-sided grooved film based on SDP as described in claim 5, characterized in that, It includes the following steps: (1) Prepare the precursor solution: Mix yttrium acetate with absolute ethanol, then add 30 g / L of diethanolamine and diethylenetriamine, and the yttrium ion concentration is 0.4 mol / L; (2) Clean the base strip: Use a mixed solution of acetone and ethanol to ultrasonically clean the base strip; (3) Coat the coating film layer: The metal base strip passes through the precursor solution tank, and the precursor solution is coated on the surface of the metal base strip to form a coating film layer; (4) Micro needle slitting: Use stainless steel micro needles with an inclination angle of 45° and a needle spacing of 400 μm to slit the surface of the coating film layer; (5) Heat treatment: Heat at 550 °C to form a Y2O3 film.

8. The method for preparing a double-sided grooved film based on SDP as described in claim 6, characterized in that, Step (4) is: When the ethanol on the surface of the film layer has evaporated and has not entered the thermal decomposition stage, use stainless steel micro needles with an inclination angle of 45° and a needle spacing of 400 μm to slit the surface of the coating film layer.