Sealed vacuum camera

Abstract

This invention provides a sealed vacuum camera, relating to the field of vacuum camera technology. The sealed vacuum camera includes a camera housing, a sealing assembly, an imaging assembly, and a suction assembly. The camera housing includes a sealing shell. The sealing assembly is disposed at the window and sealing opening, and is sealed to the sealing shell. The sealing shell and the sealing assembly together form a vacuum chamber. The imaging assembly is disposed within the vacuum chamber. The suction assembly is disposed within the camera housing and includes a suction chamber. A suction pipe at one end of the suction chamber connects to the vacuum chamber and is sealed to the sealing assembly or the sealing shell. Compared to existing technologies, this invention uses sealed connections for the components constituting the vacuum chamber to ensure a sealing effect, while the sealed connection between the suction pipe and the sealing assembly or the sealing shell ensures reliable sealing.

Description

Technical Field

[0001] This invention relates to the field of vacuum camera technology, and more specifically, to a sealed vacuum camera. Background Technology

[0002] Vacuum cameras are widely used in aerospace remote sensing, high vacuum environment detection, precision optical experiments and other fields. Their core requirement is to maintain a high vacuum state inside the cavity for a long time, so as to achieve a lower operating temperature of the image sensor, reduce the dark current of the image sensor, and at the same time ensure the stability and sealing of the optical components.

[0003] Currently, the cavity sealing of existing vacuum cameras is difficult to guarantee, especially when an external suction structure is required for suction, the connection is difficult to seal, and air leakage is likely to occur. Summary of the Invention

[0004] The purpose of this invention is to provide a sealed vacuum camera with a high sealing level and strong vacuum maintenance capability, which can effectively prevent air leakage.

[0005] This invention provides a sealed vacuum camera, comprising: A camera housing, including a sealed housing, wherein windows and sealing openings are respectively provided on opposite sides of the sealed housing; A sealing assembly is disposed at the window and the sealing opening, and is sealed to the sealing housing, wherein the sealing housing and the sealing assembly together enclose a vacuum chamber; An imaging assembly is disposed within the vacuum chamber; An air intake assembly is disposed inside the camera housing. The air intake assembly includes an air intake chamber containing an air intake agent. One end of the air intake chamber is provided with an air intake pipe that connects to the vacuum chamber and is sealed to the sealing assembly or the sealing housing.

[0006] In an optional embodiment, the suction assembly further includes a suction flange and a suction electrode. The end of the suction chamber away from the suction pipe is provided with a suction opening. The suction flange is detachably sealed at the suction opening and sealed with the suction chamber. The suction electrode is embedded in the suction flange.

[0007] In an optional embodiment, the suction flange and the suction chamber are press-sealed by a first metal component, the material of which is selected from at least one of indium, copper, silver, and gold; and / or The intake electrode is sintered and sealed with the intake flange.

[0008] In an optional embodiment, the intake assembly further includes an exhaust pipe, one end of which is welded and sealed to the intake flange and connected to the intake chamber, and the other end of the exhaust pipe is welded and sealed.

[0009] In an optional embodiment, the sealing assembly includes a sealing plate that is detachably disposed at the sealing opening and sealed to the sealing housing. The sealing vacuum camera also includes a window that is detachably disposed at the window and sealed to the sealing housing. The window, the sealing plate, and the sealing housing enclose the vacuum chamber, and the suction pipe is sealed to the sealing plate.

[0010] In an optional embodiment, the sealing plate and the sealing housing are press-sealed by a second metal component, the material of which is selected from at least one of indium, copper, silver, and gold; and / or The window and the sealing housing are press-sealed together by a third metal component, the material of which is selected from at least one of indium, copper, silver, and gold; and / or The air intake pipe is welded and sealed to the sealing plate.

[0011] In an optional embodiment, the imaging assembly includes an image sensor and a vacuum feedthrough, the vacuum feedthrough being embedded through the sealing plate and welded to the sealing plate for sealing, the image sensor being disposed in the vacuum chamber and corresponding to the window, and the image sensor being electrically connected to the vacuum feedthrough.

[0012] In an optional embodiment, the camera housing further includes an interface housing, a carrier housing, and an interface panel. The interface housing is disposed on one side of the sealed housing and is provided with an optical interface corresponding to the window. The carrier housing is disposed on the other side of the sealed housing. The interface panel is disposed on the side of the carrier housing away from the interface housing. The air intake chamber is disposed between the interface panel and the sealing plate.

[0013] In an optional embodiment, the sealed vacuum camera further includes a heat dissipation assembly, which includes a heat-conducting block and a semiconductor cooler. The heat-conducting block and the semiconductor cooler are disposed in the vacuum chamber. The hot surface of the semiconductor cooler is in contact with the inner surface of the sealing plate, one side surface of the heat-conducting block is in contact with the cold surface of the semiconductor cooler, and the image sensor is disposed on the other side surface of the heat-conducting block.

[0014] In an optional embodiment, the heat dissipation assembly further includes a heat sink disposed on the outer surface of the sealing plate. The heat sink includes a heat dissipation fin array and a fan. The heat dissipation fin array is attached to the outer surface of the sealing plate and has multiple airflow channels. The fan is disposed on one side of the heat dissipation fin array and corresponds to the opening side of the airflow channels.

[0015] The beneficial effects of the embodiments of the present invention include: This invention provides a sealed vacuum camera. A sealing component is installed at the sealing opening and window of a sealed housing, thereby forming a vacuum chamber. The imaging component is disposed within the vacuum chamber. The suction chamber of the suction component contains a getter, and the suction pipe of the suction chamber is connected to the vacuum chamber and welded to the sealing component or the sealed housing for sealing.

[0016] Compared with the prior art, the embodiments of the present invention construct a sealed vacuum chamber by using an air suction pipe to seal the connection with the sealing component or sealing shell, which ensures the sealing reliability of the vacuum chamber. It has a high sealing level and strong vacuum maintenance capability, and can effectively avoid air leakage. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall cross-sectional structure of the sealed vacuum camera provided in an embodiment of the present invention; Figure 2 This is a partial cross-sectional structural diagram of a sealed vacuum camera provided in an embodiment of the present invention; Figure 3 This is a schematic diagram of the overall structure of the sealed vacuum camera provided in an embodiment of the present invention.

[0019] Icons: 100-Sealed vacuum camera; 110-Camera housing; 111-Sealed shell; 112-Interface shell; 113-Carrier shell; 114-Interface panel; 120-Sealing assembly; 121-Sealing plate; 122-Window; 123-Receiving groove; 124-Pressure ring; 130-Imaging assembly; 131-Image sensor; 132-Vacuum feedthrough; 133-Flexible circuit board; 140-Suction assembly; 141-Suction chamber; 142-Suction pipe; 143-Suction flange; 144-Suction electrode; 145-Exhaust pipe; 150-Third metal component; 160-Second metal component; 180-Heat dissipation assembly; 181-Heat conduction block; 182-Semiconductor cooler; 183-Radiator; 184-Fan; 185-Heat dissipation fin array. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0022] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0023] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0024] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0025] As disclosed in the background section, the cavity sealing of existing vacuum cameras is difficult to meet the requirements, especially when an external suction structure is required for suction, the connection is difficult to seal and leakage is likely to occur.

[0026] The existing vacuum camera cavity and window sealing technologies can be mainly divided into the following three categories: 1. Welding Sealing Technology: This technology was the mainstream sealing method for early vacuum cameras and some specialized applications. Specifically, it involves using laser welding, brazing, or other processes to directly fuse and seal the camera window to the cavity, as well as the joints between various cavity components, creating a unified, inseparable structure for the entire camera. The core idea is to utilize the tightness of the metal weld to achieve a vacuum seal. It is often used in specialized vacuum cameras with zero maintenance requirements and where short-term sealing reliability is paramount, such as disposable on-orbit exploration vacuum cameras.

[0027] 2. Adhesive Sealing Technology: For low- to mid-range vacuum cameras or experimental equipment, a high-viscosity sealant (such as epoxy sealant) is used to achieve a seal. During operation, the sealant is evenly applied to the contact gaps between the window and the cavity, as well as the joints between the cavities. After the sealant cures, it fills the gaps to form a sealing layer. The vacuum is maintained by the adhesion between the sealant and the metal and window materials, as well as its own density. This technology is commonly used for short-term experimental vacuum cameras on the ground due to its low cost and ease of operation.

[0028] 3. Rubber O-ring sealing technology: This technology involves machining sealing grooves on the contact surfaces between the camera window and the cavity, as well as on the mating surfaces of the cavity components. Rubber O-rings (such as fluororubber or nitrile rubber O-rings) are then embedded in these grooves, and bolts are tightened to cause the O-rings to elastically deform, filling tiny gaps in the contact surfaces to achieve a seal. Due to its relatively convenient assembly and disassembly, this technology is widely used in civilian vacuum cameras and general experimental equipment with lower vacuum requirements and shorter service life.

[0029] However, considering the core requirements of vacuum cameras for sealing leakage rate, vacuum maintenance stability, ease of maintenance, and long lifespan, the aforementioned existing technologies have the following inherent drawbacks, making it difficult to meet the usage requirements of high-end vacuum cameras (such as aerospace-grade and high-precision inspection-grade cameras): 1. Poor disassembly and assembly, high maintenance costs, and insufficient adaptability: Welded sealing technology makes the camera cavity and window plate an inseparable whole. If the internal optical components fail, the window plate is worn, or the cavity is contaminated, it cannot be disassembled and repaired separately. The whole equipment must be replaced, which leads to a significant increase in maintenance costs and cannot be adapted to scenarios that require regular calibration and maintenance. In glue sealing technology, the sealant is tightly bonded to the metal cavity and window plate after curing. Disassembly can easily cause damage to the cavity interface and window plate. Moreover, cleaning, reapplying and curing the glue is time-consuming, resulting in extremely low maintenance efficiency. At the same time, the adhesive properties of the glue limit the need for multiple disassembly and assembly of the equipment.

[0030] 2. Low sealing reliability, unable to meet long life and high vacuum requirements: Rubber sealing ring technology is limited by the characteristics of rubber materials, and is prone to aging, elasticity decay, deformation and other problems during long-term use. Especially in high vacuum and high and low temperature cycling environments, the sealing performance of the sealing ring will degrade rapidly, leading to an increase in cavity leakage rate and making it impossible to maintain a stable high vacuum state for a long time. In adhesive sealing technology, the adhesive is prone to releasing small molecule gases (gas release phenomenon) in high vacuum environments, which will not only contaminate the internal optical components of the camera and affect imaging accuracy, but also directly destroy the cavity vacuum. Moreover, the sealing performance of the adhesive itself will gradually decrease over time, making it difficult to meet the long lifespan requirements of vacuum cameras of more than 5 years. In addition, both rubber and adhesive are polymer materials, which are prone to performance failure under extreme environments (such as high temperature and strong radiation), further reducing sealing reliability.

[0031] 3. Limited sealing accuracy and narrow application range: Welded sealing technology requires extremely high processing precision. If there are slight dimensional deviations in the cavity or window, weld defects such as pores and cracks are easily generated during welding, leading to sealing failure. It is also unsuitable for optical components that require flexible assembly and adjustment. The sealing effect of rubber O-rings depends on the compression of the O-ring. When the camera cavity is subjected to thermal expansion and contraction due to temperature changes, the compression of the O-ring is prone to abnormality, which can lead to sealing leakage. It is unsuitable for complex working conditions with frequent high and low temperature fluctuations. In addition, the sealing capacity of rubber O-rings is limited and cannot meet the requirements of high-end vacuum cameras for extremely low leakage rates.

[0032] Therefore, the existing vacuum camera sealing technology cannot effectively balance sealing reliability and ease of disassembly and assembly, and its adaptability is also poor.

[0033] To address the above problems, embodiments of the present invention provide a novel sealed vacuum camera. It should be noted that, unless otherwise specified, the features in the embodiments of the present invention can be combined with each other.

[0034] The sealed vacuum camera provided in this invention has a high sealing rating, strong vacuum maintenance capability, is easy to assemble and disassemble, and has low maintenance costs, thus balancing sealing reliability and ease of assembly and disassembly. It also has a long service life, excellent adaptability to extreme environments, high production and assembly efficiency, and strong versatility.

[0035] See Figures 1 to 3The sealed vacuum camera 100 provided in this embodiment of the invention includes a camera housing 110, a sealing assembly 120, an imaging assembly 130, and a suction assembly 140. The camera housing 110 includes a sealing shell 111, with windows and sealing openings respectively provided on opposite sides of the sealing shell 111. The sealing assembly 120 is disposed at the windows and sealing openings and is sealed to the sealing shell 111, and the sealing shell 111 and the sealing assembly 120 together form a vacuum chamber. The imaging assembly 130 is disposed within the vacuum chamber. The suction assembly 140 is disposed inside the camera housing and outside the vacuum chamber. The suction assembly includes a suction chamber 141, which contains a getter, and a suction pipe 142 is provided at one end of the suction chamber 141. The suction pipe 142 connects to the vacuum chamber and is sealed to the sealing assembly 120 or the sealing shell 111.

[0036] In some embodiments, the suction assembly 140 further includes a suction flange 143 and a suction electrode 144. The suction chamber 141, at the end furthest from the suction pipe 142, has a suction opening. The suction flange 143 is detachably sealed at the suction opening and is press-sealed with the suction chamber 141 using a first metal component. The suction electrode 144 is embedded in the suction flange 143 and sintered-sealed with it. Specifically, the suction flange 143 and the suction chamber 141 are designed as a CF flange structure (ConFlatFlange), and the suction flange 143 is fixed with bolts. The suction flange 143 and the suction chamber 141 can form a sealed cavity containing a getter. That is, the getter is placed inside the suction chamber 141. The suction electrode 144 and the suction flange 143 are sealed together by glass sintering. The power supply for the getter is connected to an external main control circuit board through the suction electrode 144, ensuring power supply to the getter while maintaining a sealed environment.

[0037] Of course, in other preferred embodiments of the present invention, the suction chamber 141 can also be an integral structure, without the need for assembly by flange. That is, the suction chamber 141 is manufactured with internal getter and electrode installed at the factory and is assembled into an integral structure by welding or other processes.

[0038] In some embodiments, the intake flange 143 and the intake chamber 141 are sealed by pressure bonding using a first metal element, wherein the material of the first metal element is selected from at least one of indium, copper, silver, and gold. Meanwhile, the intake electrode 144 and the intake flange 143 can be sintered to form a seal, for example, by glass sintering.

[0039] In some embodiments, the sealing assembly 120 includes a sealing plate 121, which is detachably disposed at the sealing opening and seals against the sealing housing 111, preferably by metal compression. The sealing vacuum camera 100 also includes a window 122, which is detachably disposed at the window and seals against the sealing housing 111, preferably by metal compression. The window 122, sealing plate 121, and sealing housing 111 form a vacuum chamber, and the suction pipe 142 is welded to the sealing plate 121 for sealing. Alternatively, in other preferred embodiments of the invention, the suction pipe 142 may directly penetrate the sealing housing 111 and seal against it, preferably by welding.

[0040] The imaging assembly 130 includes an image sensor 131 and a vacuum feedthrough 132. The vacuum feedthrough 132 is embedded through a sealing plate 121 and welded to the sealing plate 121 for sealing. The image sensor 131 is disposed in the vacuum chamber and corresponds to the window. The image sensor 131 is electrically connected to the vacuum feedthrough 132.

[0041] It should be noted that the metal-part press-fit sealing mentioned in the embodiments of the present invention refers to using metal parts to hold and seal the press-fit surface, as described below. In the embodiments of the present invention, the sealing plate 121 is detachably installed at the sealing port of the sealing housing 111, and the sealing plate 121 and the sealing housing 111 are press-fitted and sealed by metal parts. At the same time, the window slat 122 is detachably installed at the window and is press-fitted and sealed with the sealing housing 111 by metal parts, thereby forming a vacuum chamber. The metal-part press-fit sealing ensures the sealing reliability of the vacuum chamber. The image sensor 131 is installed in the vacuum chamber, and the vacuum feedthrough 132 can be embedded through the sealing plate 121 and welded and sealed to the sealing plate 121. The suction chamber 141 of the suction assembly 140 is provided with a getter, and the suction pipe 142 of the suction chamber 141 is connected to the vacuum chamber and welded and sealed to the sealing plate 121. By adopting a partitioned design, maintenance-free parts are sealed with welded seals to ensure reliability, while maintenance-required parts are sealed with detachable metal seals. This design breaks the limitation that "sealing and disassembly cannot be achieved simultaneously." The metal parts and interfaces are mechanically bonded without adhesive force, so the cavity and components will not be damaged during disassembly and assembly. Furthermore, the seals can be reused or replaced at low cost, fundamentally solving the maintenance problem and reducing maintenance costs.

[0042] Furthermore, the imaging assembly 130 also includes a flexible circuit board 133, which is connected to the image sensor 131 and extends to the vacuum feedthrough 132. The image signal from the image sensor 131 is connected to the vacuum feedthrough 132 via the flexible circuit board 133. The vacuum feedthrough 132 and the sealing plate 121 are sealed together by welding, thereby transmitting the electrical signal from the image sensor 131 from the vacuum chamber to the signal processing circuit on the outside while ensuring a vacuum seal.

[0043] In some embodiments, the camera housing further includes an interface housing 112, a support housing 113, and an interface panel 114. The interface housing 112 is disposed on one side of the sealing housing 111 and has an optical interface corresponding to the window. The support housing 113 is disposed on the other side of the sealing housing 111. The interface panel 114 is disposed on the side of the support housing 113 away from the interface housing 112. The suction chamber 141 is disposed between the interface panel 114 and the sealing plate 121. Specifically, the interface housing 112, the sealing housing 111, the support housing 113, and the interface panel 114 are connected in sequence and are all made of metal, thus forming the outer shell to protect components such as the sealing assembly 120 and the suction assembly 140. The interface panel 114 is provided with multiple electrical interfaces to realize functions such as power supply and signal transmission. For specific examples, refer to existing vacuum cameras. It should also be noted that the camera housing in this embodiment of the invention is generally rectangular columnar, and the maximum width of the interface housing 112, sealing housing 111, bearing housing 113 and interface panel 114 is basically the same. The bearing housing 113 is also engaged with the edge of the sealing plate 121, and the air intake component 140 can be placed in the area between the sealing plate 121 and the interface panel 114, making the overall structure more compact and contributing to the miniaturization of the camera.

[0044] In some embodiments, a second metal part 160 is pressed between the sealing plate 121 and the end face of the sealing port, and the sealing plate 121 and the sealing housing 111 are sealed together by the second metal part 160. A third metal part 150 is pressed between the window slat 122 and the end face of the window, and the window slat 122 and the sealing housing 111 are sealed together by the third metal part 150. A first metal part is pressed between the suction flange 143 and the end face of the suction opening, and the suction flange 143 and the suction chamber 141 are sealed together by the first metal part. It should be noted that the first metal part, the second metal part 160, and the third metal part 150 are all metal wires or gaskets, which can achieve a full metal seal. The metal parts are stable in high vacuum, high and low temperature cycling (-60℃ to 80℃), and strong radiation environments, with no risk of aging or deformation. They can meet the service life requirements of high-end vacuum cameras for more than 5 years and are suitable for complex working conditions such as aerospace and polar exploration.

[0045] Furthermore, the materials of the first metal component, the second metal component 160, and the third metal component 150 include at least one of indium, copper, silver, and gold. For example, the third metal component 150 and the second metal component 160 can be indium wire or silver wire, preferably indium wire, while the first metal component can be an oxygen-free copper gasket. The window 122, the sealing housing 111, and the sealing plate 121 are connected together by metal compression sealing to form a vacuum chamber, wherein the sealing housing 111 and the sealing plate 121 can be connected by bolts, the window 122 and the sealing housing 111 are sealed by indium wire, and the sealing housing 111 and the sealing plate 121 are sealed by indium wire. Of course, the types and shapes of metal components described here are merely illustrative and do not constitute any limitation. Any structure that achieves sealing through metal components is within the scope of protection of this invention.

[0046] In some embodiments, the suction assembly 140 further includes an exhaust pipe 145. One end of the exhaust pipe 145 is welded and sealed to the suction flange 143 and connected to the suction chamber 141. The other end of the exhaust pipe 145 is welded and sealed. Specifically, the exhaust pipe 145 may be a copper pipe. The end of the exhaust pipe 145 away from the suction flange 143 is connected to the interface panel 114, and an exhaust hole is correspondingly provided on the interface panel 114. The exhaust hole can be connected to an external exhaust device, and the exhaust hole can be cold-pressed and welded after the camera completes vacuum exhaust, thereby achieving the sealed separation of the vacuum camera from the exhaust device.

[0047] It is worth noting that the exhaust pipe 145 and the intake flange 143 can be sealed together by vacuum brazing (welding the weld seam). The intake pipe 142 and the intake chamber 141 are integrally set, and the intake pipe 142 and the sealing plate 121 can be sealed together by laser welding (welding the weld seam). In addition, the vacuum feeder 132 and the sealing plate 121 are laser welded to ensure the reliability of the seal.

[0048] It should be noted that different parts of the vacuum camera employ indium wire sealing, copper gasket sealing, and welded sealing. Specifically, indium wire sealing is used between the window 122 and the sealing housing 111, and between the sealing plate 121 and the sealing housing 111. Copper gasket sealing is used between the suction chamber 141 and the suction flange 143. This allows for repeated disassembly and reassembly of the vacuum chamber and suction chamber 141 for maintenance purposes depending on production conditions. Laser welding is used between the vacuum feedthrough 132 and the sealing plate 121, and between the suction pipe 142 and the sealing plate 121. Vacuum brazing is used between the exhaust pipe 145 and the suction flange 143. Areas that require minimal maintenance utilize more reliable welded sealing. Through this combination of different sealing methods, an all-metal seal is achieved for the camera, improving its sealing level and reliability while retaining a degree of maintainability.

[0049] In some embodiments, the sealed vacuum camera 100 further includes a heat dissipation assembly 180, which includes a heat-conducting block 181, a thermoelectric cooler 182, and a heat sink 183. The heat-conducting block 181 and the thermoelectric cooler 182 are disposed within the vacuum chamber. The hot surface of the thermoelectric cooler 182 is in contact with the inner surface of the sealing plate 121, and one side surface of the heat-conducting block 181 is in contact with the cold surface of the thermoelectric cooler 182. The image sensor 131 is disposed on the other side surface of the heat-conducting block 181, and the heat sink 183 is disposed on the outer surface of the sealing plate 121. Specifically, the thermoelectric cooler 182 is a thermoelectric cooler (TEC), a solid-state heat pump that utilizes the Peltier effect, and has opposing cold and hot surfaces. The hot side of the thermoelectric cooler 182 is in thermal contact with the outer surface of the sealing plate 121 through the thermally conductive filler, while the cold side of the thermoelectric cooler 182 is in thermal contact with the thermally conductive block 181 through the thermally conductive filler. The thermally conductive block 181 is in thermal contact with the back of the image sensor 131 (the front of the image sensor 131 faces the window). The heat from the image sensor 131 is transferred to the thermoelectric cooler 182 through the thermally conductive block 181 and to the heat sink 183 through the sealing plate 121, thereby ensuring the low-temperature operating conditions in the vacuum chamber.

[0050] Furthermore, the heat sink 183 includes a heat sink fin array 185 and a fan 184. The heat sink fin array 185 is attached to the outer surface of the sealing plate 121 and has multiple airflow channels. The fan 184 is disposed on one side of the heat sink fin array 185 and corresponds to the opening side of the airflow channel. Specifically, the heat sink fin array 185 is disposed between the sealing plate 121 and the interface panel 114, preferably mounted on the interface panel 114 and attached to the sealing plate 121 by thermally conductive materials such as thermal grease. The fan 184 is also disposed between the sealing plate 121 and the interface panel 114. The heat sink fin array 185 can be a copper busbar and has multiple parallel fin bodies. An airflow channel is formed between adjacent fin bodies. The fan 184 targets the opening side of the airflow channel and forces air onto the fin bodies of the heat sink fin array 185, thereby removing the heat conducted from the thermoelectric cooler 182 to the heat sink 183 and providing a good operating temperature for the thermoelectric cooler 182.

[0051] It should be noted that the fan 184 and the heat sink fin array 185 are both located inside the housing 113, and the camera housing 110 can enclose the heat sink 180, the imaging assembly 130, and the intake assembly 140. Openings can be formed on both sides of the housing 113 along the airflow channel extension direction to facilitate airflow in and out. The fan 184 can control the airflow direction within the airflow channel, allowing hot air to flow to the external space, achieving air cooling.

[0052] In some embodiments, a receiving groove 123 is provided on the inner surface of the sealing plate 121. The receiving groove 123 is spaced apart from the vacuum feeder 132. The thermoelectric cooler 182 is assembled in the receiving groove 123, and the thickness of the thermoelectric cooler 182 is greater than or equal to the depth of the receiving groove 123. Specifically, the thickness of the thermoelectric cooler 182 can be greater than the depth of the receiving groove 123, so that the thermoelectric cooler 182 protrudes from the sealing plate 121, which facilitates the heat-conducting block 181 to fit against the cold surface of the thermoelectric cooler 182. The width of the heat-conducting block 181 can be greater than that of the thermoelectric cooler 182 to ensure heat conduction effect. Furthermore, by providing the receiving groove 123, the thermoelectric cooler 182 can be fixed to ensure assembly effect, and the sealing plate 121 can be thinned to shorten the heat conduction path, making heat transfer more efficient.

[0053] In some embodiments, the sealing assembly 120 further includes a pressure ring 124. A first stepped groove and a second stepped groove are provided on the side of the sealing housing 111 away from the sealing opening. The first stepped groove communicates with the window, and the second stepped groove communicates with the first stepped groove. The window slab 122 is installed in the first stepped groove, and the pressure ring 124 is installed in the second stepped groove and detachably connected to the sealing housing 111, so that the pressure ring 124 is detachably installed on the sealing housing 111 and pressed against the surface edge of the window slab 122. Specifically, the pressure ring 124 is annular and pressed against the edge region of the window slab 122. The second stepped groove, the first stepped groove, and the window are sequentially and concentrically arranged, forming a stepped structure. The first stepped groove is adjacent to the window, and the size of the second stepped groove is larger than the size of the first stepped groove, which is larger than the size of the window. The bottom wall of the first stepped groove can support the window slab 122 and is provided with an indium wire as a sealing element, while the side wall can limit the movement of the window slab 122. The bottom wall of the second-step groove can support the pressure ring 124, and the side wall can limit the position of the pressure ring 124. The pressure ring 124 can be fixed to the sealing housing 111 with screws, thereby ensuring the pressing and fixing effect of the window slat 122.

[0054] The sealed vacuum camera 100 provided in this embodiment of the invention has the following advantages: 1. High sealing rating and strong vacuum maintenance capability: The welded seals of fixed parts rely on the tightness of metal fusion, eliminating defects such as pores and cracks; the indium wire, silver wire, and oxygen-free copper gaskets in detachable parts are all made of metal. The high ductility of the indium and silver wires can fully fill the tiny gaps at the mating surfaces, and the plastic deformation capability of the oxygen-free copper gaskets can adapt to changes in interface stress. Helium mass spectrometry leak detector testing shows that the cavity leakage rate can be stably controlled at ≤1×10⁻⁶. -12 Pa·m³ / s, which is significantly better than the sealing accuracy of rubber seals and glue seals, and can maintain a high vacuum state for a long time.

[0055] 2. Convenient disassembly and assembly, significantly reducing maintenance costs: The maintenance parts adopt a detachable metal sealing structure, which can replace the window 122 and optical components and perform internal cavity maintenance by removing bolts without damaging the overall structure. The disassembly and assembly time is reduced by more than 80% compared with glue sealing. The sealing components (indium wire, silver wire, oxygen-free copper gasket) are low cost and easy to replace, avoiding the high cost of scrapping the entire welded seal and repeatedly cleaning and curing glue seal, significantly reducing the maintenance cost of the entire equipment life cycle.

[0056] 3. Long service life and excellent adaptability to extreme environments: The all-metal sealed structure contains no polymer materials (glue, rubber), completely avoiding the problems of glue aging, rubber gas release and performance failure under extreme environments; the metal parts (indium wire, silver wire, oxygen-free copper) have stable performance under high vacuum, high and low temperature cycling (-60℃~80℃), and strong radiation environments, with no risk of aging or deformation, which can meet the long service life requirements of high-end vacuum cameras for more than 5 years and is suitable for complex working conditions such as aerospace and polar exploration.

[0057] 4. Highly efficient production and assembly with strong versatility: The partitioned sealing design simplifies the production process, allowing welding of fixed parts and assembly of maintenance parts to be carried out in parallel without the need for complicated glue curing time; different types of metal parts can be adapted to interface requirements with different precision and disassembly frequencies, and can be widely used in various vacuum cameras and similar vacuum optical equipment, with strong versatility and broad industrialization prospects.

[0058] This invention provides a sealed vacuum camera 100. A sealing plate 121 is detachably installed at the sealing opening of a sealing housing 111, and the sealing plate 121 and the sealing housing 111 are sealed together by pressing with a metal component. Simultaneously, a window 122 is detachably installed at the window opening and is also sealed to the sealing housing 111 by pressing with a metal component, thereby forming a vacuum chamber. An image sensor 131 is disposed within the vacuum chamber, and a vacuum feedthrough 132 can be embedded through the sealing plate 121 and welded to it for sealing. The suction chamber 141 of the suction assembly 140 contains a getter, and the suction pipe 142 of the suction chamber 141 connects to the vacuum chamber and is welded to the sealing plate 121 for sealing.

[0059] In this embodiment of the invention, the components constituting the vacuum chamber are sealed by pressing together with metal parts, which ensures the sealing effect while facilitating disassembly and assembly and reducing maintenance costs. The vacuum feeder 132 and the suction pipe 142 are welded and sealed with the sealing plate 121, which ensures the reliability of the seal.

[0060] Because existing sealing methods are incompatible with maintenance needs (welding is not removable, and adhesive bonding is difficult to remove), this invention adopts a partitioned design. Maintenance-free parts are sealed with welded seals to ensure reliability, while maintenance-required parts use detachable metal seals. This structural design breaks the limitation that "sealing and disassembly cannot be achieved simultaneously." The metal parts and interfaces are mechanically bonded without adhesive force, preventing damage to the cavity and components during disassembly. Furthermore, the seals can be reused or replaced at low cost, fundamentally solving the maintenance problem and reducing maintenance costs.

[0061] Meanwhile, the failure of seals in existing technologies is due to inherent defects in polymer materials (adhesive gas release, rubber aging) and poor adaptability of the sealing structure. This solution adopts an all-metal sealing system, completely eliminating polymer materials and preventing adhesive gas release pollution and rubber aging problems at the source. The physical properties of metal components (high ductility, plasticity, corrosion resistance) can adapt to interface deformation under high and low temperature cycling, avoiding the formation of sealing gaps. At the same time, the dual protection of welded seals and metal components ensures long-term stable sealing performance. Comparative tests have verified that the sealing life of this solution under the same working conditions (high vacuum, high and low temperature cycling) is more than 5 times that of rubber seals, and its vacuum maintenance stability is superior to adhesive seals and rubber seals.

[0062] Furthermore, the insufficient sealing accuracy in existing technologies is due to poor compatibility with the sealing medium. This solution adapts dedicated metal components to different interface requirements: the 122 window seal uses indium / silver wire to achieve a detachable, high-level seal; the high-frequency disassembly interface uses an oxygen-free copper gasket, whose plasticity can adapt to the stress changes of repeated tightening; at the same time, the thermal expansion coefficient of the all-metal structure is consistent with the cavity metal material, which can avoid abnormal sealing gaps caused by temperature changes, adapt to complex working conditions with high and low temperature fluctuations, and greatly broaden the application scenarios of the equipment.

[0063] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A sealed vacuum camera, characterized in that, include: The camera housing (110) includes a sealed housing (111), wherein windows and sealing openings are respectively provided on opposite sides of the sealed housing (111); A sealing assembly (120) is disposed at the window and the sealing port and is sealed to the sealing housing (111), and the sealing assembly (120) and the sealing housing (111) together form a vacuum chamber; Imaging assembly (130) is disposed within the vacuum chamber; A suction assembly (140) is disposed inside the camera housing (110). The suction assembly (140) includes a suction chamber (141) containing a suction agent. A suction pipe (142) is provided at one end of the suction chamber (141). The suction pipe (142) is connected to the vacuum chamber and is sealed to the sealing assembly (120) or the sealing housing (111).

2. The sealed vacuum camera of claim 1, wherein, The suction assembly (140) further includes a suction flange (143) and a suction electrode (144). The suction chamber (141) is provided with a suction opening at one end away from the suction pipe (142). The suction flange (143) is detachably sealed at the suction opening and sealed with the suction chamber (141). The suction electrode (144) is embedded in the suction flange (143).

3. The sealed vacuum camera of claim 2, wherein, The suction flange (143) and the suction chamber (141) are sealed by pressure bonding through a first metal component, the material of which is selected from at least one of indium, copper, silver, and gold; and / or The intake electrode (144) and the intake flange (143) are sintered and sealed.

4. The sealed vacuum camera of claim 2, wherein, The intake assembly (140) also includes an exhaust pipe (145), one end of which is welded and sealed to the intake flange (143) and connected to the intake chamber (141), and the other end of which is welded and sealed.

5. The sealed vacuum camera of claim 1, wherein, The sealing assembly (120) includes a sealing plate (121) which is detachably disposed at the sealing opening and sealed with the sealing housing (111). The sealing vacuum camera also includes a window (122) which is detachably disposed at the window and sealed with the sealing housing (111). The window (122), the sealing plate (121), and the sealing housing (111) together form the vacuum chamber. The suction pipe (142) is sealed with the sealing plate (121).

6. The sealed vacuum camera of claim 5, wherein, The sealing plate (121) and the sealing housing (111) are sealed by a second metal component, the material of which is selected from at least one of indium, copper, silver, and gold; and / or The window (122) and the sealing housing (111) are sealed by a third metal component, the material of which is selected from at least one of indium, copper, silver, and gold; and / or The air intake pipe (142) is welded and sealed to the sealing plate (121).

7. The sealed vacuum camera of claim 5, wherein, The imaging assembly (130) includes an image sensor (131) and a vacuum feedthrough (132). The vacuum feedthrough (132) is embedded through the sealing plate (121) and welded and sealed to the sealing plate (121). The image sensor (131) is disposed in the vacuum chamber and corresponds to the window. The image sensor (131) is electrically connected to the vacuum feedthrough (132).

8. The sealed vacuum camera of claim 5, wherein, The camera housing also includes an interface housing (112), a support housing (113), and an interface panel (114). The interface housing (112) is disposed on one side of the sealing housing (111) and has an optical interface corresponding to the window. The support housing (113) is disposed on the other side of the sealing housing (111). The interface panel (114) is disposed on the side of the support housing (113) away from the interface housing (112). The air intake chamber (141) is disposed between the interface panel (114) and the sealing plate (121).

9. The sealed vacuum camera of claim 5, wherein, The sealed vacuum camera also includes a heat dissipation assembly (180), which includes a heat-conducting block (181) and a semiconductor cooler (182). The heat-conducting block (181) and the semiconductor cooler (182) are disposed in the vacuum chamber. The hot surface of the semiconductor cooler (182) is in contact with the inner surface of the sealing plate (121), and one side surface of the heat-conducting block (181) is in contact with the cold surface of the semiconductor cooler (182). The imaging assembly (130) is disposed on the other side surface of the heat-conducting block (181).

10. The sealed vacuum camera according to claim 9, characterized in that, The heat dissipation assembly (180) further includes a radiator (183), which is disposed on the outer surface of the sealing plate (121). The radiator (183) includes a heat dissipation fin array (185) and a fan (184). The heat dissipation fin array (185) is attached to the outer surface of the sealing plate (121) and has multiple airflow channels. The fan (184) is disposed on one side of the heat dissipation fin array (185) and corresponds to the opening side of the airflow channels.

Images