Substrate storage container and exterior member

Abstract

The present application provides a substrate storage container and an outer member. A substrate storage container (1) is provided with a fixing member (85) capable of moving between a fixed position and a non-fixed position in a state of being supported by an outer member (8), at the fixed position, a movement preventing member (853) is arranged on the trajectory of relative movement of a component-mounted object (256) with respect to the outer member (8), the component-mounted object (2) abuts against the movement preventing member (853), thereby preventing the outer member (8) from moving with respect to the component-mounted object (256), at the non-fixed position, the movement preventing member (853) is arranged at a position deviated from the trajectory of opposite movement of the component-mounted object (256) with respect to the outer member (8), becoming a state that the component-mounted object (2) does not abut against the movement preventing member (853), thereby allowing the outer member (8) to move with respect to the component-mounted object (2).

Description

Technical Field

[0001] This invention relates to substrate storage containers used for storing, handling, and transporting substrates such as semiconductor wafers, intermediate masks, and printed circuit boards, as well as external components installed on the substrate storage containers. Background Technology

[0002] As substrate storage containers for storing various substrates, structures having a container body and a lid are known in the past (for example, see Patent Documents 1-4).

[0003] One end of the container body has a container body opening. The other end of the container body has a closed cylindrical wall. A substrate storage space is formed inside the container body. The substrate storage space is formed by surrounding the wall and is capable of storing substrates. A cover can be detached from the container body opening and can close the container body opening. Side substrate support portions are provided in pairs on the wall within the substrate storage space. When the container body opening is not closed by the cover, the side substrate support portions can support the edges of the substrates in a state where adjacent substrates are separated from each other at a predetermined interval and arranged.

[0004] A front retaining member (cover-side substrate support) is provided on a portion of the cover, specifically on the part opposite the substrate storage space when the container main body opening is closed. When the container main body opening is closed by the cover, the front retaining member supports the edge of the substrate. Furthermore, a rear substrate support is provided on the wall portion in pair with the front retaining member. The rear substrate support supports the edge of the substrate. When the container main body opening is closed by the cover, the rear substrate support cooperates with the front retaining member to support the substrate, thereby supporting the substrate in a state where adjacent substrates are separated and arranged at a predetermined interval. Existing technical documents Patent documents

[0005] Patent Document 1: Japanese Patent No. 5328627 Patent Document 2: Japanese Patent No. 7333416 Patent Document 3: Japanese Patent Application Publication No. 2006-173331 Patent Document 4: Japanese Patent Publication No. 2022-534394 Summary of the Invention The problem to be solved by the present invention

[0006] In a substrate storage container, an external component such as a handle for holding the container body is installed on the container body or other component mounting object, so that it slides relative to the container body, and a fixing part (hook, etc.) provided on the handle body that constitutes the handle is hooked to the side of the container body for installation.

[0007] In this situation, when the substrate storage container comes into contact with something, when the substrate storage container is loaded or unloaded onto a workbench or shelf, or when force is applied in the direction opposite to the sliding installation direction, the hook serving as the fixing part may sometimes detach, causing the handle to fall off the container body and resulting in damage to the substrate. As a countermeasure to prevent this, there are measures to prevent detachment by using other components (clamps, etc.), but these require installing other components after the handle is installed on the container body, which raises concerns about time commitment or the potential loss of components.

[0008] The purpose of this invention is to provide a substrate storage container that does not require the installation of other components after the outer component is installed onto the component mounting object, and is capable of preventing the outer component from falling off the component mounting object, as well as an outer component installed in the substrate storage container. Methods for solving problems

[0009] This invention relates to a substrate storage container, comprising: a container body having a cylindrical wall portion, the wall portion having an opening periphery at one end forming an opening of the container body and being closed at the other end, a substrate storage space formed by the inner surface of the wall portion for storing substrates and communicating with the opening of the container body; a cover detachable from the opening of the container body and capable of closing the opening of the container body; and an outer mounting member slidably mounted relative to a mounting object, the mounting object being at least one of the container body and the cover, the outer mounting member being provided with a fixing member, the fixing member being capable of preventing the outer mounting member from moving relative to the mounting object while supported by the outer mounting member. The mounting component moves between a fixed position and a non-fixed position that allows the outer component to move relative to the mounted component. The fixed component has a movement-stopping member. In the fixed position, the movement-stopping member is disposed on the trajectory of the relative movement of the mounted component relative to the outer component, and the mounted component abuts against the movement-stopping member, thereby preventing the outer component from moving relative to the mounted component. In the non-fixed position, the movement-stopping member is disposed at a position offset from the trajectory of the relative movement of the mounted component relative to the outer component, so that the mounted component does not abut against the movement-stopping member, thereby allowing the outer component to move relative to the mounted component.

[0010] Furthermore, preferably, the fixing member is supported so as to be rotatable relative to the outer component, and the movement is achieved by rotating the fixing member relative to the outer component. Furthermore, preferably, it has a rotation-stopping part that prevents rotation of the fixing member. Furthermore, preferably, the rotation-stopping part is composed of a hook-shaped portion capable of engaging with the object to which the member is mounted. Furthermore, preferably, the outer component is composed of at least one of a handle, a top flange, a base plate, and an information pad. Furthermore, preferably, the fixing member is made of a crystalline resin of any one of PBT, POM, and PE.

[0011] Furthermore, the present invention relates to an external mounting component that is slidably mounted relative to a component being mounted on, the component being mounted on at least one of a container body and a lid, the container body having a cylindrical wall portion, one end of which has an opening periphery forming an opening of the container body, and the other end being closed, a substrate storage space being formed through the inner surface of the wall portion to accommodate a substrate and communicating with the opening of the container body, the lid being detachable from the opening of the container body and capable of closing the opening of the container body, and a fixing member being provided in the external mounting component, the fixing member being capable of preventing the external mounting component from moving relative to the component being mounted on while being supported by the external mounting component. The outer component moves between a fixed position and a non-fixed position that allows movement of the outer component relative to the component being mounted. The fixed component has a movement-stopping member. In the fixed position, the movement-stopping member is positioned on the trajectory of relative movement of the component being mounted relative to the outer component, and the component being mounted abuts against the movement-stopping member, thereby preventing movement of the outer component relative to the component being mounted. In the non-fixed position, the movement-stopping member is positioned offset from the trajectory of relative movement of the component being mounted relative to the outer component, such that the component being mounted does not abut against the movement-stopping member, thereby allowing movement of the outer component relative to the component being mounted.

[0012] Furthermore, preferably, the fixing member is supported so as to be rotatable relative to the outer component, and the movement is achieved by rotating the fixing member relative to the outer component. Furthermore, preferably, it has a rotation-stopping part that prevents rotation of the fixing member. Furthermore, preferably, the rotation-stopping part is composed of a hook-shaped portion capable of engaging with the object to which the member is mounted. Furthermore, preferably, the outer component is composed of at least one of a handle, a top flange, a base plate, and an information pad. Furthermore, preferably, the fixing member is made of a crystalline resin of any one of PBT, POM, and PE. Invention Effects

[0013] According to the present invention, it is possible to provide a substrate storage container that does not require the installation of other components after the outer component is installed on the component, and is able to prevent the outer component from detaching from the component being mounted, and an outer component installed in the substrate storage container. Attached Figure Description

[0014] Figure 1 This is an exploded perspective view of the substrate storage container 1 according to an embodiment of the present invention. Figure 2 This is a top perspective view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention. Figure 3 This is a lower perspective view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention. Figure 4 This is a side sectional view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention. Figure 5 This is a side perspective view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention. Figure 6 It is along Figure 5 A cross-sectional view of plane AA. Figure 7 This is an enlarged planar cross-sectional view showing the portion of the container body 2 of the substrate storage container 1 in an embodiment of the present invention that has a fixed handle 8. Figure 8 This is an enlarged perspective view showing the appearance of the handle 8 being fixed to the container body 2 of the substrate storage container 1 according to an embodiment of the present invention by means of a fixing member. Figure 9 This is an enlarged perspective view showing the state in which the handle 8, which is fixed to the container body 2 of the substrate storage container 1 according to the embodiment of the present invention, is released by the fixing member. Figure 10 This is an enlarged perspective view showing the state in which the handle 8 is fixed to the container body 2 of the substrate storage container 1 according to the embodiment of the present invention by the fixing member 85 is released, and the fixing member 85 is rotated. Figure 11 This is an enlarged perspective view showing the appearance of the handle 8 being removed from the container body 2 of the substrate storage container 1 according to an embodiment of the present invention. Figure 12 This is a perspective view taken from one direction of the fixing member 85 of the handle 8 of the substrate storage container 1 according to an embodiment of the present invention. Figure 13 This is a perspective view of the fixing member 85 of the handle 8 of the substrate storage container 1 according to an embodiment of the present invention, viewed from another direction. Figure 14This is a perspective view of the handle 8 of the substrate storage container 1 according to an embodiment of the present invention. Figure 15 This is a lower perspective view of the container body 2A of a substrate storage container, representing a first modified example of an embodiment of the present invention. Figure 16 This is a lower perspective view of the container body 2B of a substrate storage container, representing a second modified embodiment of the present invention. Detailed Implementation

[0015] (Overall structure of substrate storage container 1) Hereinafter, the substrate storage container 1 of this embodiment will be described with reference to the accompanying drawings. For ease of explanation, the direction from the container body 2 (described later) toward the cover 3 will be considered (…). Figure 1 The direction from the upper right to the lower left (as described later) is defined as the forward direction D11, and its opposite direction is defined as the backward direction D12. Together, they are defined as the forward-backward direction D1. Furthermore, the direction from the lower wall 24 to the upper wall 23 (described later) is also defined as... Figure 1 The direction above (in the diagram) is defined as the upward direction D21, and its opposite direction is defined as the downward direction D22. Together, they are defined as the vertical direction D2. Furthermore, the direction from the second sidewall 26 towards the first sidewall 25 (described later) Figure 1 The direction from the bottom right to the top left is defined as the left direction D31, its opposite direction as the right direction D32, and together they are defined as the left-right direction D3. Arrows representing these directions are illustrated in the main diagram.

[0016] Furthermore, the substrates stored in the substrate storage container 1 are disc-shaped silicon wafers, glass wafers, sapphire wafers, etc., and are thin substrates used in industry. In this embodiment, the substrate is a silicon wafer with a diameter of 300 mm.

[0017] like Figures 1-4 As shown, the substrate storage container 1 stores substrates made of silicon wafers as described above, and is used as a process container for handling during processes within a factory, or as a shipping container for transporting substrates by land, air, or sea transport. It includes a container body 2 and a cover 3. The container body 2 has a substrate support plate 5 serving as a side substrate support and a rear substrate support 6. The cover 3 has a front retaining member 7 serving as a side substrate support (see reference). Figure 4 wait).

[0018] The container body 2 has a cylindrical wall 20 with a container body opening 21 at one end and closed at the other end. A substrate storage space 27 is formed within the container body 2. The substrate storage space 27 is formed by the wall 20. A substrate support plate 5 is disposed on a portion of the wall 20 that forms the substrate storage space 27. Figure 1 As shown, multiple substrates can be stored in the substrate storage space 27.

[0019] The substrate support plate-shaped portion 5 is a built-in component arranged in pairs within the substrate storage space 27, and is detachably and fixedly mounted to the wall portion 20. When the container main body opening 21 is not closed by the cover 3, the substrate support plate-shaped portion 5 can support the edges of multiple substrates by abutting against the edges of multiple substrates, so that adjacent substrates are separated from each other at a predetermined interval and arranged. A rear substrate support portion 6 is integrally formed with the substrate support plate-shaped portion 5 on its rear side.

[0020] The rear substrate support portion 6 is provided on the wall portion 20 in a pair with the front holding member 7 described later within the substrate storage space 27. The rear substrate support portion 6 can support the rear portions of the edges of multiple substrates by abutting against the edges of multiple substrates.

[0021] The cover 3 is detachable from the periphery 28 of the opening 21 of the container body, and is capable of closing the opening 21 of the container body. The front retaining member 7 is provided on a part of the cover 3 and is the part that faces the substrate storage space 27 when the container body opening 21 is closed by the cover 3. The front retaining member 7 is configured to be paired with the rear substrate support 6 inside the substrate storage space 27.

[0022] When the container body opening 21 is closed by the cover 3, the front retaining member 7 supports the front of the edges of the multiple substrates by abutting against the edges of the multiple substrates. When the container body opening 21 is closed by the cover 3, the front retaining member 7 supports the multiple substrates by cooperating with the rear substrate support 6, and can hold the substrates in a state in which adjacent substrates are separated from each other at a predetermined interval and arranged.

[0023] The substrate storage container 1 is made of resin, such as plastic material. Unless otherwise specified, examples of resins used as this material include thermoplastic resins such as polycarbonate, cyclic olefin polymers, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymers, as well as alloys thereof. To impart conductivity, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added to the resin of these molding materials. Furthermore, to improve rigidity, glass fibers, carbon fibers, etc., may also be added.

[0024] (Container body 2) The following is a detailed explanation of each part. For example... Figures 1-4As shown, the wall portion 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The rear wall 22, upper wall 23, lower wall 24, first side wall 25, and second side wall 26 are made of the aforementioned materials and are integrally formed.

[0025] The first sidewall 25 and the second sidewall 26 are opposite each other, and the upper wall 23 and the lower wall 24 are opposite each other. The rear ends of the upper wall 23, the lower wall 24, the first sidewall 25, and the second sidewall 26 are all connected to the rear wall 22. The front ends of the upper wall 23, the lower wall 24, the first sidewall 25, and the second sidewall 26 form the opening periphery 28, which forms the container body opening 21 in a generally rectangular shape.

[0026] An opening periphery 28 is located at one end of the container body 2, and a rear wall 22 is located at the other end of the container body 2. The container body 2, formed by the outer surface of the wall portion 20, has a box-shaped shape. The inner surfaces of the wall portion 20, namely the inner surfaces of the rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26, form a substrate storage space 27 surrounded by them. The container body opening 21 formed in the opening periphery 28 communicates with the substrate storage space 27 surrounded by the wall portion 20 and formed inside the container body 2. Up to 25 substrates can be stored in the substrate storage space 27.

[0027] A latching recess 231A, 231B, 241A, 241B is formed in a portion of the upper wall 23 and the lower wall 24, near the opening periphery 28, and recesses outward toward the substrate receiving space 27. One latching recess 231A, 231B, 241A, 241B is formed near each of the left and right ends of the upper wall 23 and the lower wall 24, for a total of four.

[0028] A reinforcing rib 235 is integrally formed on the outer surface of the upper wall 23. The reinforcing rib 235 improves the rigidity of the container body 2. In addition, a top flange 236 is fixed to the center of the upper wall 23. The top flange 236 is a component that is hooked and suspended in the substrate storage container 1 when suspended in AMHS (Automatic Wafer Transport System), PGV (Plane Transport Vehicle), etc.

[0029] (Substrate support plate-shaped portion 5) The substrate support plate-shaped portions 5 are respectively disposed on the first sidewall 25 and the second sidewall 26, and are built-in components arranged in pairs in the left-right direction D3 within the substrate storage space 27. Specifically, as Figure 4As shown, the substrate support plate-shaped portion 5 has a plate portion 51 and a support wall 52 that serves as a support for the plate portion. The plate portion 51 and the support wall 52 are integrally formed from resin material, and the plate portion 51 is supported by the support wall 52.

[0030] The plate portion 51 has a generally arc-shaped plate. 25 plate portions 51 are provided on each of the first sidewall 25 and the second sidewall 26 along the vertical direction D2, for a total of 50. Adjacent plate portions 51 are arranged in a parallel position, separated from each other by intervals of 10mm to 12mm in the vertical direction D2. Furthermore, above the uppermost plate portion 51, another plate-shaped component 59 parallel to the plate portion 51 is provided. This component 59 acts as a guide when the substrate located at the uppermost position is inserted into the substrate receiving space 27.

[0031] Furthermore, the 25 plate portions 51 provided on the first sidewall 25 and the 25 plate portions 51 provided on the second sidewall 26 are positioned opposite each other in the left-right direction D3. Additionally, the 50 plate portions 51 and the plate-shaped guide member 59 parallel to the plate portions 51 are positioned parallel to the inner surface of the lower wall 24. Protrusions 511 and 512 are provided on the upper surface of the plate portions 51. The substrate supported on the plate portions 51 only contacts the protruding ends of the protrusions 511 and 512, and does not contact the plate portions 51 in a planar manner.

[0032] The support wall 52 has a plate-like shape extending along the vertical direction D2 and generally the front-to-back direction D1. For example... Figure 4 As shown, the support walls 52 each have a predetermined length in the long side direction of the plate portion 51, and a plurality of them are provided in the front-back direction of the substrate support plate portion 5. The plate-shaped support walls 52 are bent along the outer edge of the plate portion 51 toward the substrate receiving space 27.

[0033] That is, the 25 plate portions 51 provided on the first side wall 25 are connected to the support wall 52 provided on the first side wall 25. Similarly, the 25 plate portions 51 provided on the second side wall 26 are connected to the support wall 52 provided on the second side wall 26. The support wall 52 is fixed to the first side wall 25 and the second side wall 26 respectively.

[0034] The substrate support plate 5 with such a structure can support the edges of multiple substrates in a state in which adjacent substrates are separated from each other at a predetermined interval and are in a parallel position to each other.

[0035] (Rear substrate support part 6) like Figure 4As shown, the rear substrate support portion 6 has a rear edge support portion 60. The rear edge support portion 60 is integrally formed with the plate portion 51 and the support wall 52 at the rear end of the plate portion 51 of the substrate support plate portion 5. Therefore, the substrate support plate portion 5 and the rear substrate support portion 6, which serve as the side substrate support portion, are integrated into a single built-in member fixedly connected to the container body 2 inside the container body 2. Alternatively, the rear substrate support portion 6 can also be separately formed from the substrate support plate portion 5, that is, the rear edge support portion 60 and the plate portion 51 of the substrate support plate portion 5 can be separately formed.

[0036] The rear edge support portion 60 is provided with a number corresponding to each substrate that can be accommodated in the substrate storage space 27, specifically, 25 portions. The rear edge support portions 60 disposed on the first sidewall 25 and the second sidewall 26 have a positional relationship with the front retaining member 7 (described later) in the front-rear direction D1. By accommodating the substrate in the substrate storage space 27 and closing the cover 3, the rear edge support portion 60 clamps and supports the edge of the substrate.

[0037] (Handle 8 and structure for fixing handle 8 to container body 2) like Figure 11 As shown, a pair of guide ribs 255 for guiding the handle 8 (described later) are respectively provided on the first side wall 25 and the second side wall 26 of the container body 2. The pair of guide ribs 255 provided on the first side wall 25 and the second side wall 26 have the same structure, so only the pair of guide ribs 255 of one side will be described, and the description of the guide ribs 255 of the other side will be omitted.

[0038] A pair of guide ribs 255 extend from the midpoint of the first sidewall 25 and the second sidewall 26 in the front-rear direction D1 to the container body opening 21, and have a shape in which the distance between the pair of guide ribs 255 increases in a conical shape as it approaches the front direction D11. In the midpoint of the guide ribs 255, a pair of container body side stop ribs 256 are provided, protruding in the direction in which the pair of guide ribs 255 approach each other.

[0039] Furthermore, a flat plate-like portion 257 is integrally formed on a portion of a pair of guide ribs 255 located D12 rearward from the stop rib 256 on the container body side, in a position orthogonal to the guide ribs 255. Near the opening 21 of the container body, the pair of guide ribs 255 are bent into a crank shape, and the distance between the pair of guide ribs 255 is greater.

[0040] The handle 8, as an external component, is detachably and fixedly mounted to the first side wall 25 and the second side wall 26 of the container body 2. The handles 8 mounted on the first side wall 25 and the second side wall 26 have the same structure; therefore, only one type of handle 8 will be described, and descriptions of the other type will be omitted. Figure 14As shown, the handle 8 has a handle body 81, a gripping part 82, a guided part 83, a component support part 84, and a fixing component 85.

[0041] like Figure 14 As shown, the handle body 81 has a rectangular shape that tapers towards the rear D12 side of the central portion in the long side direction, constituting the central part of the handle 8, and guide portions 83 are integrally formed at both ends in the long side direction. In addition, a central portion of a circular grip portion 82 is fixed to the central portion of the handle body 81 in the long side direction.

[0042] Guided part 83 has the ability to follow from Figure 14 The lower end faces the upper end, and the thickness of the lower part increases towards the upper end. Figure 14 The upper part, which has a constant thickness, is a hollow rectangular shape that is longer in the vertical direction. A component support part 84, which is narrower than the upper part, is integrally formed at the upper end of the upper part.

[0043] A pair of guide ribs 255 on the first sidewall 25 and the second sidewall 26 of the container body 2 are respectively inserted into the guided portion 83 and the component support portion 84. Specifically, by sliding the handle 8 from the rear end of the pair of guide ribs 255 in a forward direction D11 relative to the first sidewall 25 and the second sidewall 26 of the container body, the guide ribs 255 are inserted into the component support portion 84, and then also into the guided portion 83.

[0044] When the guide rib 255 is inserted into the component support portion 84 and the guided portion 83, the guide rib 255 abuts against and slides against the inner surfaces of the guided portion 83 and the component support portion 84, thereby guiding the guided portion 83 and the component support portion 84 to... Figures 1-3 , Figure 5 The handle 8 is shown in the fixed position. When guided in this way, the guide rib 255 restricts the handle 8 from moving in the up-down direction D2, and the plate-like portion 257 restricts the movement of the handle 8 from separating from the first side wall 25 and the second side wall 26.

[0045] like Figures 8-10 As shown, the fixing member 85 is rotatably supported on the member support portion 84. Specifically, as... Figure 12 , Figure 13 As shown, the fixing member 85 has a rectangular plate-shaped main body 851. The corners at both ends of one short side of the plate-shaped main body 851 are chamfered by R, while the corners at both ends of the other short side are not chamfered.

[0046] At both ends of the shorter side of the rectangular plate-shaped main body 851, C-shaped shaft support portions 852 are integrally formed. At the center of the shorter side of the other side of the rectangular plate-shaped main body 851, a component side stop rib 853 is integrally formed. Figure 13 As shown, the side stop rib 853 of the component has a cuboid shape.

[0047] Near the center of one of the shorter sides of the rectangular plate-shaped main body 851, a rotation-stopping part 854 is integrally formed. The rotation-stopping part 854 is composed of a hook-shaped portion capable of engaging with the locking recess 842 of the component support part 84, which will be described later. The fixing component 85 is made of a crystalline resin of any one of PBT (polybutylene terephthalate), POM (polyacetal), and PE (polyethylene).

[0048] A notch 843 is formed in the component support portion 84, giving the component support portion 84 an overall C-shaped form with angles. Cylindrical shaft portions protruding towards each other are provided at both ends of the C-shaped component support portion 84, and these shaft portions are inserted one by one into the shaft support portion 852, such as... Figures 8-10 As shown, the fixing member 85 is supported so that it can rotate.

[0049] In the fixed component 85, such as Figure 10 , Figure 9 Rotate as shown to become Figure 8 In the state shown, the component-side stop rib 853, which serves as the fixing member 85, is inserted into the cutout 843. In this state, the component-side stop rib 853 is located in a fixed position that prevents the handle 8, which is an external component, from moving backward in the direction D12 relative to the container body 2, which is the component to be installed.

[0050] At this time, the component-side stop rib 853 is positioned on the trajectory of the relative movement of the container body-side stop rib 256 of the container body 2 with respect to the handle 8. When this movement is desired, as... Figure 6 and Figure 7 As shown, the stop rib 256 on the container body side abuts against the stop rib 853 on the component side, preventing the handle 8 from moving backward D12 relative to the container body 2.

[0051] The fixed component 85 rotates from Figure 8 The state shown becomes Figure 9 , Figure 10 In the state shown, the component-side stop rib 853, which serves as the fixing member 85, is not inserted into the cutout 843. In this state, the component-side stop rib 853 is located in a non-fixed position that allows the handle 8, which serves as an external component, to move rearward in the direction D12 relative to the container body 2, which is the component to be installed.

[0052] At this time, the component-side stop rib 853 is positioned offset from the trajectory of the relative movement of the container body-side stop rib 256 of the container body 2 relative to the handle 8. When this movement is desired, the handle 8 can move rearward in the direction D12 relative to the container body 2 by making the container body-side stop rib 256 not abut against the component-side stop rib 853. The fixing component 85 can move between a fixed position and a non-fixed position by rotation while supported on the component support portion 84 of the handle 8.

[0053] The central portion of the C-shaped component support 84 has a thin-walled portion 841 with a thin thickness. The fixing component 85 is as follows: Figure 10 , Figure 9 As shown, the plate-shaped main body 851 of the fixing member 85 can be rotated as shown. Figure 8 It fits into the thin-walled portion 841 as shown. In this fitted state, the thickness of the portion of the component support portion 84 other than the thin-walled portion 841 adjacent to the thin-walled portion 841 is the same as the sum of the thicknesses of the thin-walled portion 841 and the plate-shaped main body portion 851, and the plate-shaped main body portion 851 does not protrude beyond the portion of the component support portion 84 other than the thin-walled portion 841 adjacent to the thin-walled portion 841.

[0054] A hook-and-hold recess 842 is formed on the rear side of the thin-walled portion 841 into which the plate-shaped main body portion 851 is fitted. In the fixing member 85, such as... Figure 10 , Figure 9 As shown, the plate-shaped main body 851 rotates as shown. Figure 8 When engaged with the thin-walled portion 841 as shown, the rotation-stopping portion 854 engages with the hook-locking recess 842. Thus, it is configured to prevent rotation of the fixing member 85.

[0055] (Cover 3) like Figure 1 As shown, the lid 3 has a generally rectangular shape that is substantially the same as the shape of the opening periphery 28 of the container body 2. The lid 3 can be attached to and detached from the opening periphery 28 of the container body 2. By attaching the lid 3 to the opening periphery 28, the lid 3 can close the opening 21 of the container body in a positional relationship surrounded by the opening periphery 28.

[0056] On the inner surface of the cover 3 ( Figure 1 The sealing surface 281, which is the surface opposite to the stepped portion (sealing surface 281) formed at the rearward direction D12 of the opening periphery 28 when the lid 3 closes the container body opening 21, is fitted with an annular sealing member 4 around the outer periphery of the lid 3. The sealing member 4 is arranged around the lid 3. The sealing member 4 is made of various thermoplastic elastomers such as polyester and polyolefin, fluororubber, and silicone rubber that can be elastically deformed.

[0057] When the lid 3 is installed on the periphery of the opening 28, the sealing member 4 is elastically deformed by being clamped between the sealing surface 281 of the container body 2 and the inner surface of the lid 3. That is, by clamping the sealing member 4 between the lid 3 and the container body 2, the lid 3 can close the opening 21 of the container body without the lid 3 abutting against the periphery of the opening 28. By removing the lid 3 from the periphery of the opening 28, the substrate can be taken out or placed in relative to the substrate storage space 27 inside the container body 2.

[0058] A latching mechanism is provided on the cover body 3. The latching mechanism is located near the left and right ends of the cover body 3, such as... Figure 1 As shown, the cover 3 includes two upper latching portions 32A, 32A that protrude upwards D21 from the upper edge of the cover 3; and two lower latching portions 32B, 32B that protrude downwards D22 from the lower edge of the cover 3. The two upper latching portions 32A, 32A are located near the left and right ends of the upper edge of the cover 3, and the two lower latching portions 32B, 32B are located near the left and right ends of the lower edge of the cover 3.

[0059] An operating part 33 is provided on the outer surface of the cover 3. By operating the operating part 33 from the front side of the cover 3, the upper latching parts 32A, 32A and the lower latching parts 32B, 32B can be made to protrude from the top and bottom of the cover 3 or not. The upper latching parts 32A, 32A protrude upward D21 from the top of the cover 3 and engage with the latching recesses 231A, 231B of the container body 2, and the lower latching parts 32B, 32B protrude downward D22 from the bottom of the cover 3 and engage with the latching recesses 241A, 241B of the container body 2, thereby fixing the cover 3 to the container body opening 21 of the container body 2.

[0060] A recess (not shown) is formed on the inner side of the cover 3, recessed outwards into the substrate receiving space 27. A front retaining member 7 (see reference) is fixedly provided on the portion of the cover 3 outside the recess (not shown) and the portion outside the recess. Figure 4 ).

[0061] The front retaining member 7 has a front retaining member substrate receiving portion. Two front retaining member substrate receiving portions are arranged in pairs, separated at predetermined intervals in the left-right direction D3. These paired front retaining member substrate receiving portions are arranged in a state where 25 pairs are formed in the up-down direction D2. By storing the substrate in the substrate storage space 27 and closing the cover 3, the front retaining member substrate receiving portion clamps and supports the edge of the substrate.

[0062] (Effects of the implementation method) The substrate storage container 1 of this embodiment with the above structure can achieve the following effects. In the substrate storage container 1 of this embodiment, a fixing member 85 is provided on the handle 8, which is an external component. This fixing member 85 can move between a fixed position that prevents the handle 8 from moving relative to the container body 2, which is the component to be mounted, and a non-fixed position that allows the handle 8 to move relative to the container body 2, while supported on the handle 8. The fixing member 85 has a component-side stop rib 853 as a movement-stopping member. In the fixed position, the component-side stop rib 853 is disposed on the container body-side stop rib 256 of the container body 2 relative to the handle. On the trajectory of the relative movement of the component-side stop rib 853 of the container body 2, the container body-side stop rib 256 of the container body 2 abuts against the component-side stop rib 853, preventing the handle 8 from moving relative to the container body 2. In a non-fixed position, the component-side stop rib 853 is positioned offset from the trajectory of the relative movement of the container body-side stop rib 256 of the container body 2 relative to the component-side stop rib 853 of the handle 8, so that the container body-side stop rib 256 does not abut against the component-side stop rib 853, thereby allowing the handle 8 to move relative to the container body 2.

[0063] Therefore, the component-side stop rib 853 is not hook-shaped, nor is it a hook-like structure for locking. Instead, it forms a structure that prevents the handle 8 from moving relative to the container body 2 by abutting against the container body-side stop rib 256, thus preventing the handle 8 from detaching from the container body 2. Furthermore, since the fixing member 85 can move between a fixed position and a non-fixed position while supported by the handle 8, it is not necessary to install other components after the handle 8 is installed on the container body 2.

[0064] Furthermore, in the substrate storage container 1 of this embodiment, the fixing member 85 is supported so that it can rotate relative to the member support portion 84 of the handle 8, which is an external component, and moves by rotating the fixing member 85 relative to the handle 8. Thus, a structure that can move between a fixed position and a non-fixed position while supported by the handle 8 can be easily realized.

[0065] Furthermore, the substrate storage container 1 of this embodiment includes a rotation prevention part 854 that prevents the fixing member 85 from rotating. This prevents the fixing member 85 from rotating naturally and moving from a fixed position to a non-fixed position.

[0066] Furthermore, in the substrate storage container 1 of this embodiment, the rotation prevention part 854 is composed of a hook-shaped part that can be locked onto the container body 2, which is a component to be mounted. Therefore, it is possible to easily switch between a state that prevents the rotation of the fixing member 85 and a state that does not prevent the rotation of the fixing member 85.

[0067] Furthermore, in the substrate storage container 1 of this embodiment, the external component is a handle 8. Therefore, when the handle 8 detaches from the container body 2, the container body 2 may sometimes fall and cause damage to the substrate, but this situation can be prevented.

[0068] Furthermore, in the substrate storage container 1 of this embodiment, the fixing member 85 is made of a crystalline resin selected from PBT, POM, and PE. This allows for good sliding properties of the fixing member 85.

[0069] (Variation example) The present invention is not limited to the above embodiments, and can be modified within the technical scope described in the claims.

[0070] (First variation) For example, in this embodiment, the handle 8 is described as an external component, but it is not limited to this. For example, as Figure 15 As shown, in a structure where a base plate 244A is provided on the lower wall 24A of the wall portion 20A constituting the container body 2A, and the base plate 244A is slidably mounted relative to the lower wall 24A, the present invention can also be applied to the base plate 244A as an external component. The base plate 244A is fixed to the lower wall 24A. The base plate 244A has a plate shape that faces approximately the entire lower surface of the outer surface constituting the lower wall 24A.

[0071] (Second variation) Similarly, for example, such as Figure 16 As shown, in the case where an information pad 245B is provided on the rear wall 22B of the wall portion 20B constituting the container body 2B, and the information pad 245B is installed by sliding relative to the rear wall 22B, the present invention can also be applied to the information pad 245B as an external component.

[0072] The information pad 245B is an external component that can be freely attached and detached from the lower rear part of the container body 2B for identifying information such as the substrate stored in the substrate storage container. Depending on its shape, the information pad 245B is sometimes positioned at a position D12 further rearward than the ground surface when installed onto the container body 2B. However, if it is desired to place the container body 2B with the rear wall 22B facing down, the information pad 245B should be removed from the container body 2B beforehand.

[0073] (Other variations) Furthermore, in the case of a structure in which the top flange 236 of this embodiment is slidably mounted relative to the upper wall 23, the present invention can be applied to the top flange 236 as an outer component. Similarly, in the case of a structure in which the front retaining member 7 of this embodiment is slidably mounted relative to the cover 3, the present invention can be applied to the front retaining member 7 as an outer component.

[0074] Furthermore, the shape of the container body and the lid, the number of substrates that can be accommodated in the container body, and the size are not limited to the shape of the container body 2 and the lid 3 in this embodiment, nor are they limited to the number of substrates that can be accommodated in the container body 2. For example, the movement of the fixing member 854 between the fixed position and the non-fixed position is performed by rotation, but it is not limited to this, and other movement methods may also be used. Explanation of reference numerals in the attached figures:

[0075] 1: Substrate storage container; 2: Container body (component to be installed); 3: Cover; 8: Handle (external component); 20: Wall; 21: Container body opening; 27: Substrate storage space; 85: Fixing component; 236: Top flange; 244A: Base plate; 245B: Information pad; 256: Container body side stop rib; 853: Component side stop rib (movement prevention component); 854: Rotation prevention part.

Claims

1. A substrate storage container, characterized in that, have: The container body has a cylindrical wall portion, which has an opening periphery portion forming an opening of the container body at one end and is closed at the other end. A substrate storage space is formed through the inner surface of the wall portion, which can accommodate a substrate and communicates with the opening of the container body. The lid is detachable from the opening of the container body and can close the opening of the container body. as well as An external component is installed by sliding relative to a component to be installed, wherein the component to be installed is at least one of the container body and the lid. The outer component is provided with a fixing member, which is capable of moving between a fixed position that prevents the outer component from moving relative to the object being mounted, and a non-fixed position that allows the outer component to move relative to the object being mounted, while being supported by the outer component. The fixing component has a movement-preventing part. At the fixed position, the movement-stopping component is positioned along the trajectory of relative movement of the component to be mounted relative to the outer component, and the component to be mounted abuts against the movement-stopping component, thereby preventing the outer component from moving relative to the component to be mounted. At the non-fixed position, the movement-stopping component is positioned offset from the trajectory of relative movement of the component mount relative to the outer component, such that the component mount does not come into contact with the movement-stopping component, thereby allowing the outer component to move relative to the component mount.

2. The substrate storage container according to claim 1, characterized in that, The fixing member is supported so that it can rotate relative to the outer component. The movement is achieved by rotating the fixing member relative to the outer component.

3. The substrate storage container according to claim 2, characterized in that, It has a rotation-stopping part that prevents the rotation of the fixing member.

4. The substrate storage container according to claim 3, characterized in that, The rotation-stopping part is composed of a hook-shaped part that can be locked onto the object on which the component is installed.

5. The substrate storage container according to any one of claims 1 to 4, characterized in that, The external component consists of at least one of a handle, a top flange, a base plate, and an information pad.

6. The substrate storage container according to claim 5, characterized in that, The fixing component is made of a crystalline resin of any one of PBT, POM and PE.

7. An external component, characterized in that, The external component is installed by sliding relative to the component to be installed, wherein the component to be installed is at least one of the container body and the lid. The container body has a cylindrical wall portion, one end of which has an opening periphery forming the container body opening, and the other end is closed. A substrate storage space is formed through the inner surface of the wall portion, which can accommodate a substrate and communicates with the container body opening. The lid can be detached from the opening of the container body and can close the opening of the container body. The outer component is provided with a fixing member, which is capable of moving between a fixed position that prevents the outer component from moving relative to the object being mounted, and a non-fixed position that allows the outer component to move relative to the object being mounted, while being supported by the outer component. The fixing component has a movement-preventing part. At the fixed position, the movement-stopping component is positioned along the trajectory of relative movement of the component to be mounted relative to the outer component, and the component to be mounted abuts against the movement-stopping component, thereby preventing the outer component from moving relative to the component to be mounted. At the non-fixed position, the movement-stopping component is positioned offset from the trajectory of relative movement of the component mount relative to the outer component, such that the component mount does not come into contact with the movement-stopping component, thereby allowing the outer component to move relative to the component mount.

8. The external component according to claim 7, characterized in that, The fixing member is supported so that it can rotate relative to the outer component. The movement is achieved by rotating the fixing member relative to the outer component.

9. The external component according to claim 8, characterized in that, It has a rotation-stopping part that prevents the rotation of the fixing member.

10. The external component according to claim 9, characterized in that, The rotation-stopping part is composed of a hook-shaped part that can be locked onto the object on which the component is installed.

11. The external component according to any one of claims 7 to 10, characterized in that, The external component consists of at least one of a handle, a top flange, a base plate, and an information pad.

12. The external component according to claim 11, characterized in that, The fixing component is made of a crystalline resin of any one of PBT, POM and PE.

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