An ultra-high precision displacement adjustment mechanism for optical elements

Abstract

This application relates to the field of precision adjustment technology, and particularly to an ultra-high precision displacement adjustment mechanism for optical elements. It includes an optical element fixing assembly and two adjustment assemblies. The optical element fixing assembly includes an outer support, an endoscope mount, an upper aperture assembly, and a lower aperture assembly. The upper aperture assembly includes an upper aperture spring group formed by stacked and arranged aperture springs, fixed to the upper surface of the endoscope mount. An upper guide plate is disposed above the upper aperture spring group, fixedly connected to the upper surface of the outer support, and clamps the upper aperture spring group in an inwardly recessed state between the outer support and the upper guide plate. An upper locking clamp ring can fix the upper guide plate to the upper aperture spring group. The lower aperture assembly has a similar structure to the upper aperture assembly. By pushing and pulling the two adjustment assemblies, the endoscope mount relative to the outer support can achieve decoupled adjustment in the X, Y, Rx, and Ry directions, enabling small linear displacement adjustment of the optical element within 0.2 μm and small angular adjustment within 25 μrad.

Description

Technical Field

[0001] This application relates to the field of precision adjustment technology for optical components, and in particular to an ultra-high precision displacement adjustment mechanism for optical components. Background Technology

[0002] Precision optical systems serve as the cornerstone of high-end manufacturing, cutting-edge technology, and advanced information industries, finding wide applications in semiconductor manufacturing, life sciences and medical instruments, defense and aerospace, basic science, and extreme detection. However, precision optical systems require extremely high positioning accuracy for each optical component, with high-sensitivity optical components requiring accuracy as low as <1μm. Machining precision is insufficient to guarantee such high positioning accuracy, necessitating the use of adjustment mechanisms.

[0003] Most existing optical component adjustment solutions employ prefabricated displacement stages or precision threaded pairs, such as the structures disclosed in patent applications CN114994851A and CN106226885A. However, these two types of adjustment mechanisms have the following objective drawbacks: 1) The existing adjustment structure has an adjustment accuracy of approximately 2μm to 10μm, which cannot achieve an adjustment accuracy within 1μm; 2) After the external adjustment mechanism is adjusted to the correct position, there may be a deviation during locking due to stress. Overshoot compensation may be required to meet the adjustment requirements. When using adjustment mechanisms such as threaded pairs / set screws, the point contact form results in insufficient locking stability. External vibrations may cause changes in the position and orientation of the optical components in the optical path. 3) The existing adjustment mechanism can only adjust the deflection and pitch of the optical elements, and there is no degree of freedom to adjust the eccentric direction, and it cannot be completely decoupled; 4) Complex structure, large size, and high cost.

[0004] Therefore, existing technologies are insufficient to meet the ultra-high precision debugging requirements of optical components. Summary of the Invention

[0005] The purpose of this application is to provide an ultra-high precision displacement adjustment mechanism for optical components to meet the requirements for multi-directional high adjustment precision of optical components.

[0006] The ultra-high precision displacement adjustment mechanism for optical components provided in this application includes an optical component fixing assembly, a first adjustment assembly, and a second adjustment assembly; The optical element fixing assembly includes an outer bracket, an endoscope mount, an upper aperture assembly, and a lower aperture assembly; the endoscope mount is used to mount the optical element. The upper aperture assembly includes an upper aperture spring group formed by stacking and arranging several upper aperture springs. The two sides of the upper aperture spring group are respectively clamped and fixed by an upper hub and an upper hub clamp, and the upper hub is fixedly connected to the upper surface of the endoscope mount. An upper guide plate is disposed above the upper aperture spring group and is fixedly connected to the upper surface of the outer bracket. It also includes an upper locking clamp ring that can fix the upper guide plate to the upper aperture spring group. The lower aperture assembly includes a lower aperture spring group formed by stacking and arranging several lower aperture springs. The two sides of the lower aperture spring group are respectively clamped and fixed by a lower hub and a lower hub clamp, and the lower hub is fixedly connected to the lower surface of the endoscope mount. A lower guide plate is disposed below the lower aperture spring group and is fixedly connected to the lower surface of the outer bracket. It also includes a lower locking clamp ring that can fix the lower guide plate to the lower aperture spring group. The outer support is sleeved on the outside of the endoscope seat. The upper hub and the lower hub pass through the upper and lower surfaces of the outer support, respectively, so that the lower surface of the upper aperture spring group and the upper surface of the lower aperture spring group are respectively pressed against the upper and lower surfaces of the outer support in a concave state. The first adjustment component and the second adjustment component can be fixedly connected to the upper hub clamp and the lower hub clamp, respectively; by driving the first adjustment component and the second adjustment component, the driving force is transmitted to the upper aperture spring group and the lower aperture spring group, and the endoscope mount is driven to achieve decoupled adjustment in the X, Y, Rx and Ry directions relative to the outer support.

[0007] In a preferred embodiment, the total length of the outer bracket and the bearing sliders on the upper and lower sides is greater than the total length from the upper hub clamp to the lower hub clamp, with a length difference between 1mm and 3mm, so that both the upper aperture spring group and the lower aperture spring group are in a slightly deformed state of inward concavity.

[0008] In a preferred embodiment, the upper guide plate, the lower guide plate, and the outer support are all rectangular, and the corners of the upper guide plate and the lower guide plate are connected to the corners of the outer support through the bearing slider.

[0009] In a preferred embodiment, both the upper aperture spring and the lower aperture spring are made of stainless steel.

[0010] In a preferred embodiment, the first adjusting assembly includes: a first connecting rod, a second connecting rod, a third connecting rod, and a sleeve; One end of the first connecting rod is fixedly connected to the upper hub caliper via a brake pin, and the other end is rotatably connected to one end of the second connecting rod via a first connecting pin. The sleeve is fitted onto the first connecting rod, and the third connecting rod is rotatably connected to the sleeve via a second connecting pin; The structure of the second adjustment component is the same as that of the first adjustment component.

[0011] In a preferred embodiment, a stop pin is further provided on the first connecting rod to limit the sliding position of the sleeve on the first connecting rod.

[0012] In a preferred embodiment, the first connecting rods of the first adjustment component and the second adjustment component are both arranged along the X direction. By simultaneously pushing or pulling the first connecting rods of the first adjustment component and the second adjustment component along the X direction, the position of the optical element in the X direction can be adjusted.

[0013] In a preferred embodiment, the first connecting rods of the first adjustment component and the second adjustment component are both arranged along the X direction. Applying opposing pulling and pushing forces to the first connecting rods of the first adjustment component and the second adjustment component achieves position adjustment of the optical element in the Ry direction.

[0014] In a preferred embodiment, the first connecting rods of the first adjustment component and the second adjustment component are both arranged along the Y direction. By simultaneously pushing or pulling the first connecting rods of the first adjustment component and the second adjustment component along the Y direction, the position of the optical element in the Y direction can be adjusted.

[0015] In a preferred embodiment, the first connecting rods of the first adjustment component and the second adjustment component are both arranged along the Y direction. Applying opposing pulling and pushing forces to the first connecting rods of the first adjustment component and the second adjustment component enables the position adjustment of the optical element in the Rx direction.

[0016] This application has the following beneficial effects: This application features aperture spring assemblies at both the upper and lower ends of the endoscope mount. Their inherent flexibility provides a preload relative to the external support, preventing displacement during locking. The adjustment assembly allows for quick and convenient application of external force to the endoscope mount, achieving ultra-high precision linear adjustment within 0.2 μm and ultra-high precision small-angle adjustment within 25 μrad, rapidly adjusting the optical elements to the target position. The two adjustment assemblies, used in combination, achieve completely decoupled adjustment of the four degrees of freedom (X / Y / Rx / Ry). The endoscope mount and the upper aperture assembly, as well as the endoscope mount and the lower aperture assembly, of this application adopt a surface contact method, which effectively improves structural stability and reduces the difficulty of operation, labor costs, and operation time while ensuring the ultra-high adjustment accuracy of optical components. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is an overall schematic diagram of the displacement adjustment mechanism provided in the embodiments of this application; Figure 2 This is a schematic diagram of the external structure of the optical fixing assembly; Figure 3 This is a schematic diagram of the internal structure of the optical fixing assembly; Figure 4 A schematic diagram illustrating the use of this displacement adjustment mechanism for X / Ry adjustment; Figure 5 A schematic diagram illustrating the use of this displacement adjustment mechanism for Y / Rx adjustment; Numbering on the map: 1-Brake pin; 2-First connecting rod; 3-Stop pin; 4-First connecting pin; 5-Second connecting rod; 6-Sleeve; 7-Third connecting rod; 8-Second connecting pin; 9-Optical element fixing assembly; 91-Outer bracket; 92-Lens mount base plate; 93-Inner lens mount; 94-Upper hub; 95-Upper guide plate; 96-Lower guide plate; 97-Upper locking clamp ring; 98-Lower locking clamp ring; 99-Upper hub clamp; 910-Bearing slider; 911-Upper aperture spring assembly; 912-Lower aperture spring assembly; 10-Optical components. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and labeled in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0023] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0024] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0025] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0026] like Figures 1-3 As shown, this embodiment provides an ultra-high precision displacement adjustment mechanism for optical elements, including an optical element fixing assembly 9, a first adjustment assembly, and a second adjustment assembly; The optical element fixing assembly 9 includes an outer bracket 91, an inner lens mount 93, an upper aperture assembly, and a lower aperture assembly; the inner lens mount 93 is disposed on the lens mount base plate 92, and a mounting position is provided on its side for mounting the optical element 10.

[0027] The upper aperture assembly includes an upper aperture spring group 911 formed by stacking and arranging several upper aperture springs. The two sides of the upper aperture spring group 911 are clamped and fixed by an upper hub 94 and an upper hub clamp 99, respectively, and the other side of the upper hub 94 is fixedly connected to the upper surface of the endoscope base 93. The outer bracket 91 is sleeved on the outside of the endoscope base 93, and its upper surface has a hole. The hole is larger than the maximum size of the upper hub 94 and smaller than the maximum size of the upper aperture spring group 911. Therefore, the lower edge of the upper aperture spring group 911 presses against the upper surface of the outer bracket 91. The upper guide plate 95 is disposed above the upper aperture spring group 911, and bearing sliders 910 are respectively disposed at its corners. The upper guide plate 95 is fixedly connected to the upper surface of the outer bracket 91 through the bearing sliders 910.

[0028] The upper aperture spring assembly 911 and the upper guide plate 95 can move relative to each other; the upper guide plate 95 and the upper aperture spring assembly 911 can be kept relatively fixed or unlocked by adjusting the locking state of the upper locking clamp ring 97.

[0029] The structure of the lower aperture assembly is similar to that of the upper aperture assembly, including a lower aperture spring group 912 formed by stacking several lower aperture springs. The two sides of the lower aperture spring group 912 are clamped and fixed by a lower hub (not shown in the figure) and a lower hub clamp (not shown in the figure), and the lower hub is fixedly connected to the lower surface of the mirror base plate 92. The lower surface of the outer bracket 91 also has a hole, which is larger than the maximum size of the lower hub and smaller than the maximum size of the lower aperture spring group 912. Therefore, the upper edge of the lower aperture spring group 912 is pressed against the lower surface of the outer bracket 91. The lower guide plate 96 is located below the lower aperture spring group 912, and bearing sliders 910 are respectively set at its corners. The lower guide plate 96 is fixedly connected to the lower surface of the outer bracket 91 through the bearing sliders 910.

[0030] The lower aperture spring assembly 912 and the lower guide plate 96 can move relative to each other; the lower guide plate 96 and the lower aperture spring assembly 912 can be kept relatively fixed or unlocked by adjusting the locking state of the lower locking clamp ring 98.

[0031] The total length of the outer bracket 91 and the upper and lower bearing sliders 910 is slightly greater than the total length from the upper hub clamp to the lower hub clamp, with a length difference of 1mm to 3mm. Therefore, in the initial state, both the upper aperture spring group 911 and the lower aperture spring group 912 are in a slightly deformed state of inward concavity.

[0032] The first adjustment component and the second adjustment component can be fixedly connected to the upper hub clamp 99 and the lower hub clamp, respectively. By driving the first adjustment component and the second adjustment component, the driving force is transmitted to the upper aperture spring group 911 and the lower aperture spring group 912, and the endoscope mount 93 is driven to slide between the outer bracket 91, the upper guide plate 95 and the lower guide plate 96, so as to achieve decoupled adjustment in the X, Y, Rx and Ry directions relative to the outer bracket 91.

[0033] Both the upper and lower aperture springs are made of stainless steel.

[0034] Specifically, the upper guide plate 95, the lower guide plate 96, and the outer bracket 91 are all rectangular. The corners of the upper guide plate 95 and the lower guide plate 96 are connected to the corners of the outer bracket 91 through bearing sliders 910.

[0035] The first adjustment component and the second adjustment component have the same structure. The structure of the first adjustment component will be described below as an example.

[0036] The first adjustment assembly includes: a first connecting rod 2, a second connecting rod 5, a third connecting rod 7, and a sleeve 6; One end of the first link 5 is fixedly connected to the upper hub caliper 99 via the brake pin 1, and the other end is rotatably connected to one end of the second link 5 via the first connecting pin 4; the first link 5 serves as a guide.

[0037] The sleeve 6 is fitted onto the first connecting rod 2 and can slide along the first connecting rod 2; the third connecting rod 7 is rotatably connected to the sleeve 6 through the second connecting pin 8; a stop pin 3 is also provided on the first connecting rod 2 to limit the sliding range of the sleeve 6 on the first connecting rod 2.

[0038] The third link 7 is a force-applying sliding rod. Under the preload of the upper aperture spring group 911 and the lower aperture spring group 912, pushing or pulling the third link 7 can cause the first link 2 and the brake pin 1 to move slightly, thereby causing the endoscope mount 93 to produce a relative displacement of 0.2μm relative to the outer support 91, realizing ultra-high precision adjustment of the optical element 10. The second link 5 is used to adjust the direction of the first link 2, thereby controlling the adjustment direction of the endoscope mount 93.

[0039] When adjusting the optical element 10 in the X and Ry directions using the first and second adjustment components, such as Figure 4 As shown.

[0040] The first connecting rods 2 of the first adjustment component and the second adjustment component are both arranged along the X direction. By simultaneously pushing or pulling the first connecting rods of the first adjustment component and the second adjustment component along the X direction, the position of the optical element in the X direction can be adjusted with an adjustment accuracy of <0.2μm.

[0041] The first connecting rods 2 of the first adjustment assembly and the second adjustment assembly are both arranged along the X direction. The first connecting rods of the first adjustment assembly and the second adjustment assembly are subjected to opposite pulling and pushing forces to realize the position adjustment of the optical element in the Ry direction with an adjustment accuracy of <25μrad.

[0042] When adjusting the optical element 10 in the Y and Rx directions using the first and second adjustment components, such as Figure 5 As shown.

[0043] The first connecting rods 2 of the first adjustment component and the second adjustment component are both arranged along the Y direction. By simultaneously pushing or pulling the first connecting rods of the first adjustment component and the second adjustment component along the Y direction, the position of the optical element in the Y direction can be adjusted with an adjustment accuracy of <0.2μm.

[0044] The first connecting rods 2 of the first adjustment assembly and the second adjustment assembly are both arranged along the Y direction. The first connecting rods of the first adjustment assembly and the second adjustment assembly are subjected to opposite pulling and pushing forces to realize the position adjustment of the optical element in the Rx direction with an adjustment accuracy of <25μrad.

[0045] After adjustment, tighten the screws at the upper locking clamp ring 97 and the lower locking clamp ring 98 to fix the overall structure, thereby clamping the upper aperture spring assembly 911 and the lower aperture spring assembly 912 onto the outer support 91. This process is relatively free of rebound, and the clamping occurs perpendicular to the direction of adjustment, enhancing the structural locking stability. In the structure, both the upper aperture spring assembly 911 and the lower aperture spring assembly 912 are composed of several layers of stainless steel sheets, achieving a higher resonant frequency. In the initial state, both the upper aperture spring assembly 911 and the lower aperture spring assembly 912 are in a state of slight deformation, exhibiting characteristics similar to leaf springs, providing preloaded deflection. The stress generated by their deformation provides a preload to fix the endoscope mount 93 relative to the outer support 91. When the adjustment mechanism applies a pushing / pulling force to the endoscope mount 93, the endoscope mount 93 produces a small relative displacement relative to the outer support 91 under the action of friction. Through this design, the optical element achieves each desired degree of adjustment freedom in a unidirectional manner.

[0046] The adjustment mechanism functions based on inertia and friction. When the third link 7 of the adjustment mechanism is pulled, the third link 7 stops moving when it reaches the position of the stop pin 3 under the action of the stop pin 3. In order to ensure momentum balance, the first link 2 drives the endoscope seat 92 to move relative to the outer bracket 91 in the direction of movement of the third link 7 through the brake pin 1.

[0047] This application features high adjustment precision, a compact overall structure, and simple operation, making it suitable for the debugging and integration of large-scale precision optical systems and possessing significant practical value.

[0048] The above are merely preferred embodiments of the present invention and are not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A high-precision displacement adjustment mechanism for optical components, characterized in that, Includes an optical element fixing assembly, a first adjustment assembly, and a second adjustment assembly; The optical element fixing assembly includes an outer bracket, an endoscope mount, an upper aperture assembly, and a lower aperture assembly; the endoscope mount is used to mount the optical element. The upper aperture assembly includes an upper aperture spring group formed by stacking and arranging several upper aperture springs. The two sides of the upper aperture spring group are respectively clamped and fixed by an upper hub and an upper hub clamp, and the upper hub is fixedly connected to the upper surface of the endoscope mount. An upper guide plate is disposed above the upper aperture spring group and is fixedly connected to the upper surface of the outer bracket. It also includes an upper locking clamp ring that can fix the upper guide plate to the upper aperture spring group. The lower aperture assembly includes a lower aperture spring group formed by stacking and arranging several lower aperture springs. The two sides of the lower aperture spring group are respectively clamped and fixed by a lower hub and a lower hub clamp, and the lower hub is fixedly connected to the lower surface of the endoscope mount. A lower guide plate is disposed below the lower aperture spring group and is fixedly connected to the lower surface of the outer bracket. It also includes a lower locking clamp ring that can fix the lower guide plate to the lower aperture spring group. The outer support is sleeved on the outside of the endoscope seat. The upper hub and the lower hub pass through the upper and lower surfaces of the outer support, respectively, so that the lower surface of the upper aperture spring group and the upper surface of the lower aperture spring group are respectively pressed against the upper and lower surfaces of the outer support in a concave state. The first adjustment component and the second adjustment component can be fixedly connected to the upper hub clamp and the lower hub clamp, respectively; by driving the first adjustment component and the second adjustment component, the driving force is transmitted to the upper aperture spring group and the lower aperture spring group, and the endoscope mount is driven to achieve decoupled adjustment in the X, Y, Rx and Ry directions relative to the outer support.

2. The ultra-high precision displacement adjustment mechanism for optical components according to claim 1, characterized in that, The total length of the outer bracket and the bearing sliders on the upper and lower sides is greater than the total length from the upper hub clamp to the lower hub clamp, with a length difference between 1mm and 3mm, so that both the upper aperture spring group and the lower aperture spring group are in a slightly deformed state of inward concavity.

3. The ultra-high precision displacement adjustment mechanism for optical components according to claim 1, characterized in that, The upper guide plate, the lower guide plate, and the outer bracket are all rectangular, and the corners of the upper guide plate and the lower guide plate are connected to the corners of the outer bracket through the bearing slider.

4. The ultra-high precision displacement adjustment mechanism for optical components according to claim 1, characterized in that, Both the upper aperture spring and the lower aperture spring are made of stainless steel.

5. The ultra-high precision displacement adjustment mechanism for optical components according to claim 1, characterized in that, The first adjustment assembly includes: a first connecting rod, a second connecting rod, a third connecting rod, and a sleeve; One end of the first connecting rod is fixedly connected to the upper hub caliper via a brake pin, and the other end is rotatably connected to one end of the second connecting rod via a first connecting pin. The sleeve is fitted onto the first connecting rod, and the third connecting rod is rotatably connected to the sleeve via a second connecting pin; The structure of the second adjustment component is the same as that of the first adjustment component.

6. The ultra-high precision displacement adjustment mechanism for optical components according to claim 5, characterized in that, A stop pin is also provided on the first connecting rod to limit the sliding position of the sleeve on the first connecting rod.

7. The ultra-high precision displacement adjustment mechanism for optical components according to claim 6, characterized in that, The first connecting rods of the first adjustment component and the second adjustment component are both arranged along the X direction. By simultaneously pushing or pulling the first connecting rods of the first adjustment component and the second adjustment component along the X direction, the position of the optical element in the X direction can be adjusted.

8. The ultra-high precision displacement adjustment mechanism for optical components according to claim 6, characterized in that, The first connecting rods of the first adjustment component and the second adjustment component are both arranged along the X direction. Applying opposing pulling and pushing forces to the first connecting rods of the first adjustment component and the second adjustment component enables the position adjustment of the optical element in the Ry direction.

9. The ultra-high precision displacement adjustment mechanism for optical components according to claim 6, characterized in that, The first connecting rods of the first adjustment component and the second adjustment component are both arranged along the Y direction. By simultaneously pushing or pulling the first connecting rods of the first adjustment component and the second adjustment component along the Y direction, the position of the optical element in the Y direction can be adjusted.

10. The ultra-high precision displacement adjustment mechanism for optical elements according to claim 6, characterized in that, The first connecting rods of the first adjustment component and the second adjustment component are both arranged along the Y direction. Applying opposing pulling and pushing forces to the first connecting rods of the first adjustment component and the second adjustment component enables the position adjustment of the optical element in the Rx direction.

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