Excimer laser control system and method incorporating control, detection and alarm

Abstract

The application relates to a control system and method of an excimer laser integrating control, detection and alarm, wherein an industrial computer is connected with an ACS master station and connected with an RS232 communication interface of an excimer laser; the ACS master station is in communication connection with an ACS-UDMxa driving module; the ACS-UDMxa driving module is connected with an EtherCAT circuit of a 6-axis PEG laser control module, and connected with an X-axis linear motor of an X-axis motion unit through an X-axis driving interface; the X-axis motion unit is provided with an X-axis grating ruler reading head, and differential A / B / Z grating ruler signals output by the X-axis grating ruler reading head are connected with an X-axis grating ruler input interface; the excimer laser is connected with a laser synchronization signal input interface and a Trig control signal interface of the 6-axis PEG laser control module through a laser synchronization signal interface and a laser Trig signal interface respectively. Submicron laser-motion synchronization is realized, and control, detection and alarm are integrated.

Description

Technical Field

[0001] This invention relates to an excimer laser control system and method that integrates control, detection, and alarm functions. Background Technology

[0002] In the mass transfer process of Micro-LEDs, excimer lasers are the core tool for achieving precise chip transfer, but this scenario further amplifies the control challenges of excimer lasers:

[0003] Mass transfer equipment requires the transfer of millions of Micro-LED chips one by one. Even minute fluctuations in laser pulse energy (>±1%) can cause chip breakage or incomplete peeling, directly reducing the transfer yield by 15%–20%. Furthermore, the cycle time of mass transfer can reach hundreds of times per second, requiring laser triggering to achieve sub-microsecond synchronization with the micrometer-level positioning and visual recognition system of the motion platform. Current control schemes suffer from delay jitter (>2μs), leading to chip alignment deviations and significantly reducing production efficiency. In addition, process stability is crucial: Micro-LED production lines need to operate continuously for thousands of hours. Existing excimer laser systems lack multi-dimensional status monitoring and early warning systems; sudden failures can cause complete line shutdowns, resulting in losses of hundreds of thousands of yuan per hour.

[0004] Currently, there is no dedicated excimer laser control solution for Micro-LED applications. Existing systems are unable to meet the high stability, high synchronization, and high safety requirements of the process, which has become one of the key bottlenecks restricting the large-scale implementation of the Micro-LED industry.

[0005] Excimer lasers are significantly more difficult to control than conventional industrial lasers due to their high output power, complex pulse characteristics, and sensitive working environment. This is mainly reflected in the following characteristics: complex dynamic characteristics, stringent timing synchronization requirements, high safety risks, and low integration. In most existing control systems, the control unit, detection module, and alarm device are independent devices that rely on external wiring for interconnection. Signal transmission is easily interfered with, the system response speed is slow, and the maintenance cost is high.

[0006] Therefore, it is necessary to develop an excimer laser control system that integrates control, detection, and alarm functions. Summary of the Invention

[0007] The purpose of this invention is to overcome the shortcomings of the existing technology and provide an excimer laser control system and method that integrates control, detection and alarm functions.

[0008] The objective of this invention is achieved through the following technical solution:

[0009] The excimer laser control system, which integrates control, detection, and alarm functions, is characterized by: including an ACS-UDMxa drive module and a 6-axis PEG laser control module. The 6-axis PEG laser control module includes a CPU, FPGA, differential-to-single-ended signal circuit, EtherCAT circuit, TTL-IN input interface, X-axis grating ruler input interface, X-axis grating ruler output interface, laser synchronization signal input interface, and Trig control signal interface.

[0010] The industrial control computer communicates with the ACS master station and is also connected to the RS232 communication interface of the excimer laser;

[0011] The ACS master station communicates with the ACS-UDMxa driver module;

[0012] The ACS-UDMxa drive module communicates with the EtherCAT circuit of the 6-axis PEG laser control module and is connected to the X-axis linear motor of the X-axis motion unit through its X-axis drive interface.

[0013] The X-axis motion unit is equipped with an X-axis grating ruler reading head, and the differential A / B / Z grating ruler signal output by the X-axis grating ruler reading head is connected to the X-axis grating ruler input interface;

[0014] The excimer laser is connected to the laser synchronization signal input interface and the Trig control signal interface of the 6-axis PEG laser control module through its laser synchronization signal interface and laser Trig signal interface, respectively.

[0015] Furthermore, in the aforementioned excimer laser control system that integrates control, detection, and alarm functions, the industrial control computer communicates with the ACS master station via TCP / IP protocol, and simultaneously communicates with the excimer laser's RS232 communication interface via RS232 protocol.

[0016] Furthermore, in the aforementioned excimer laser control system that integrates control, detection, and alarm functions, the ACS master station communicates with the ACS-UDMxa driver module via an EtherCAT bus.

[0017] Furthermore, in the aforementioned excimer laser control system that integrates control, detection, and alarm functions, the ACS-UDMxa drive module is connected to the EtherCAT circuit of the 6-axis PEG laser control module via an EtherCAT bus.

[0018] Furthermore, in the aforementioned excimer laser control system that integrates control, detection, and alarm functions, the differential-to-single-ended signal circuit converts the differential signal received by the X-axis grating ruler input interface into a single-ended TTL signal and inputs it to the FPGA. The grating ruler signal is then fed back to the X-axis grating ruler feedback interface of the ACS-UDMxa driver module through the X-axis grating ruler output interface.

[0019] The TTL-IN input interface receives the TTL pulse signal output from the PEG pulse signal interface of the ACS-UDMxa driver module and inputs it to the FPGA. The FPGA generates a laser trigger signal and outputs it to the laser Trig signal interface of the excimer laser through the Trig control signal interface.

[0020] The laser synchronization signal input interface receives the laser synchronization signal output from the laser synchronization signal interface of the excimer laser and inputs it to the FPGA;

[0021] The FPGA communicates bidirectionally with the CPU, and the CPU is connected to the EtherCAT circuit.

[0022] Furthermore, in the aforementioned excimer laser control system that integrates control, detection, and alarm functions, the FPGA communicates bidirectionally with the CPU via the SPI bus, and the CPU is connected to the EtherCAT circuit via the SPI bus.

[0023] This invention relates to an excimer laser control method integrating control, detection, and alarm functions, comprising the following steps:

[0024] a) Laser control during processing

[0025] 1a. Data preprocessing: The industrial control computer obtains the processing start and end coordinates of the current chip array through image recognition or preset parameter analysis. Combined with the effective exposure size of the mask and the chip spacing process parameters, it calculates and determines the laser beam spacing so that the laser spot matches the position of the chip array to meet the alignment requirements of mass transfer.

[0026] 2a. Pulse sequence generation: The industrial control computer sends the starting point coordinates, ending point coordinates, and laser dot spacing parameters to the ACS master station via TCP / IP protocol. The ACS master station generates an equally spaced PEG pulse sequence. The output frequency and total number of pulses of this PEG pulse sequence are matched one-to-one with the laser dot spacing and the total processing stroke, respectively. The ACS master station outputs this PEG pulse sequence by controlling the PEG pulse signal interface of its slave station ACS-UDMxa drive module.

[0027] 3a. Real-time coordinate comparison and laser triggering: When the ACS-UDMxa drive module drives the X-axis linear motor to move the motion platform, it collects the position signal fed back by the X-axis grating ruler reading head in real time and compares the actual motion coordinates with the preset laser output coordinates in real time. When the X-axis moves to the preset output coordinates, the ACS-UDMxa drive module immediately triggers the PEG pulse output. The 6-axis PEG laser control module receives the PEG pulse through the TTL-IN input interface and transmits the signal to the input pin of the FPGA. After logic judgment, the FPGA outputs a trigger pulse from the output pin through the Trig control signal interface to control the excimer laser to turn the laser on or off, so that the laser output and the motion platform are synchronized and linked to ensure that each preset coordinate point can be accurately exposed.

[0028] b) Laser monitoring and control during processing

[0029] 1b. Synchronization signal acquisition: After each emission of light from the excimer laser, a laser synchronization feedback signal is output through its laser synchronization signal interface. The laser synchronization feedback signal is transmitted to the laser synchronization signal input interface of the 6-axis PEG laser control module and connected to the corresponding input pin of the FPGA as valid proof of successful laser emission.

[0030] 2b. Position coordinate recording: When the FPGA receives the laser synchronization signal, it simultaneously captures the real-time position coordinates transmitted by the X-axis grating ruler reading head, binds the coordinate data with the corresponding PEG pulse trigger time and trigger sequence number, and temporarily stores it in the internal buffer.

[0031] 3b. Data comparison and judgment: FPGA (13) transmits the bound trigger position-synchronization signal-coordinate data to the CPU via the SPI bus. The CPU calculates the difference between the preset coordinates when the PEG pulse is triggered and the actual coordinates corresponding to the laser synchronization signal. At the same time, it counts the consistency between the number of PEG pulses and the number of laser synchronization signals. If the number does not match, the corresponding synchronization signal is missing, or the coordinate difference exceeds the preset threshold, it is determined that the laser is leaking pulses or the light output is abnormal.

[0032] 4b. Real-time data upload: The CPU transmits the detection results and corresponding position data to the EtherCAT circuit via the SPI bus. The data is then fed back to the industrial control computer via the EtherCAT bus and the ACS master station. The industrial control computer updates the monitoring interface data in real time to keep track of the excimer laser's output status and processing accuracy.

[0033] Furthermore, the above-mentioned excimer laser control method also includes alarm control during the processing, the steps of which are as follows:

[0034] 1c. Data storage and traceability: The industrial control computer receives and stores the laser processing data for each pass in real time, including the PEG pulse trigger timing, laser synchronization signal feedback timing, corresponding X-axis position coordinates, and detection results. The data is categorized and organized by pass and processing time, and exported to an Excel file for archiving. This data serves as the basis for processing quality traceability, facilitating subsequent investigation of abnormal causes and optimization of process parameters.

[0035] 2c. Abnormal signal transmission: When the CPU determines that there is an abnormal situation such as laser pulse leakage or light output deviation, it immediately generates an alarm signal and transmits it to the industrial control computer through the EtherCAT circuit, EtherCAT bus, and ACS master station. At the same time, the abnormality mark is left in the 6-axis PEG laser control module for easy troubleshooting.

[0036] 3c. Alarm Response and Emergency Handling: After receiving the alarm signal, the industrial control computer immediately triggers an audible and visual alarm and displays the anomaly type, corresponding track number, and anomaly location coordinates in a pop-up window on the monitoring interface to remind users to handle the situation promptly. At the same time, it executes emergency operations according to the preset strategy, sending an emergency stop command to the ACS-UDMxa drive module through the ACS master station to stop the X-axis motion platform and controlling the excimer laser to shut down the laser via the RS232 interface.

[0037] Compared with the prior art, the present invention has significant advantages and beneficial effects, specifically reflected in the following aspects:

[0038] ① This invention features high control precision and excellent synchronization. It dynamically compares the coordinates of the grating ruler with the preset position through the ACS-UDMxa drive module, and generates trigger pulses in conjunction with the FPGA. Combined with the low latency characteristics of the EtherCAT bus, it achieves submicron-level laser-motion synchronization, improving the transfer yield. Furthermore, it can adaptively calculate the laser dot spacing, adapt to the processing of chips of various specifications, and has strong versatility, avoiding the drawbacks of the current discrete architecture that lacks real-time coordinate comparison.

[0039] ②Comprehensive detection and timely response: It constructs a full-process system of "signal acquisition-coordinate binding-data comparison", which can simultaneously identify leakage pulses and abnormal light emission offset. The detection results are fed back to the host computer in real time, which buys time for alarm emergency response, prevents quality risks in advance, and solves the limitations of the current single light emission monitoring.

[0040] ③ The alarm system is comprehensive and highly secure. It adopts a "data traceability-abnormal transmission-emergency linkage" system, which can accurately alert to abnormalities and automatically trigger an emergency stop, simultaneously shutting down the platform and laser. Processing data is archived and exported in accordance with regulations, enabling traceability of abnormalities, facilitating process optimization, and overcoming the shortcomings of the current single alarm system.

[0041] ④ High integration and convenient operation and maintenance: Utilizing a 6-axis PEG laser control module, the control, detection and alarm functions are integrated through the collaborative scheduling of CPU and FPGA, reducing line interference and debugging complexity, supporting unified parameter configuration and centralized status monitoring, adapting to large-scale industrial production, and eliminating the shortcomings of the current independent module design.

[0042] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing specific embodiments of the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures particularly pointed out in the written description and the accompanying drawings. Attached Figure Description

[0043] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 : A schematic diagram of the structure of the present invention. Detailed Implementation

[0045] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0046] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this invention, directional and ordinal terms are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0047] like Figure 1As shown, the excimer laser control system, which integrates control, detection, and alarm functions, includes an ACS-UDMxa drive module 3 and a 6-axis PEG laser control module 18. The 6-axis PEG laser control module 18 includes a CPU 15, an FPGA 13, a differential-to-single-ended signal circuit 12, an EtherCAT circuit 17, a TTL-IN input interface 16, an X-axis grating ruler input interface 10, an X-axis grating ruler output interface 11, a laser synchronization signal input interface 22, and a Trig control signal interface 14.

[0048] The industrial control computer 1 communicates with the ACS master station 2 via TCP / IP protocol, and at the same time communicates with the RS232 communication interface 23 of the excimer laser 19 via RS232 protocol;

[0049] ACS Master Station 2 communicates with ACS-UDMxa Driver Module 3 via EtherCAT bus;

[0050] The ACS-UDMxa drive module 3 communicates with the EtherCAT circuit 17 of the 6-axis PEG laser control module 18 via the EtherCAT bus, and is connected to the X-axis linear motor 8 of the X-axis motion unit 7 via its X-axis drive interface 4.

[0051] The X-axis motion unit 7 is equipped with an X-axis grating ruler reading head 9, and the differential A / B / Z grating ruler signal output by the X-axis grating ruler reading head 9 is connected to the X-axis grating ruler input interface 10;

[0052] The excimer laser 19 is connected to the laser synchronization signal input interface 22 and the Trig control signal interface 14 of the 6-axis PEG laser control module (18) through its laser synchronization signal interface 20 and laser Trig signal interface 21, respectively.

[0053] The differential-to-single-ended signal circuit 12 converts the differential signal received by the X-axis grating ruler input interface 10 into a single-ended TTL signal and inputs it to the FPGA 13.

[0054] The X-axis grating ruler output interface 11 and the X-axis grating ruler input interface 10 are connected in parallel with each other, and the grating ruler signal is fed back to the X-axis grating ruler feedback interface 5 of the ACS-UDMxa drive module 3.

[0055] The TTL-IN input interface 16 receives the TTL pulse signal output from the PEG pulse signal interface 6 of the ACS-UDMxa driver module 3 and inputs it to the FPGA 13. The FPGA 13 generates a laser trigger signal and outputs it to the laser Trig signal interface 21 of the excimer laser 19 through the Trig control signal interface 14.

[0056] The laser synchronization signal input interface 22 receives the laser synchronization signal output from the laser synchronization signal interface 20 of the excimer laser 19 and inputs it to the FPGA 13;

[0057] FPGA13 communicates bidirectionally with CPU15 via SPI bus, and CPU15 is connected to EtherCAT circuit 17 via SPI bus.

[0058] The ACS-UDMxa drive module 3 is an ACS motion control servo system driver of model UDMxa2B00NYNNNN, used to control the X-axis motion unit 7; the X-axis grating feedback interface 5 of the UDMxa drive module 3 collects the position signal fed back by the X-axis grating ruler reading head 9 in real time, and performs full closed-loop control of the X-axis motion platform; the PEG pulse signal interface 6 of the UDMxa drive module 3 outputs the PEG pulse sequence.

[0059] The six-axis PEG laser control module 18 includes an FPGA 13, a CPU 15, and an EtherCAT circuit 17. The CPU 15 is connected to the EtherCAT circuit 17. The FPGA 13 is connected to the CPU 15, the TTL-IN1 interface 16, the laser synchronization signal input interface 22, the Trig control signal interface 14, and the differential-to-single-ended signal circuit 12.

[0060] In practical applications, the following steps are included:

[0061] a) Laser control during the mass transfer process of Micro-LEDs

[0062] 1a. Data preprocessing: The industrial computer 1 obtains the processing start and end coordinates of the current chip array through image recognition or preset parameter analysis. Combined with the effective exposure size of the mask and the chip spacing process parameters, it calculates and determines the laser beam spacing so that the laser spot matches the position of the chip array and meets the alignment requirements of mass transfer.

[0063] The pulse sequence is generated, and the industrial control computer sends the starting point coordinates, ending point coordinates, and laser dot spacing parameters to the ACS master station via TCP / IP protocol.

[0064] 2a. Pulse sequence generation: The industrial control computer 1 sends the starting point coordinates, ending point coordinates, and laser dot spacing parameters to the ACS master station 2 via TCP / IP protocol. The ACS master station 2 can generate an equally spaced PEG pulse sequence through its built-in PEG control algorithm. The output frequency and total number of pulses of this PEG pulse sequence are matched one-to-one with the laser dot spacing and the total processing stroke, respectively. The ACS master station 2 controls the PEG pulse signal interface 6 of its slave station UDMxa 3 to output the PEG pulse sequence via EtherCAT protocol.

[0065] 3a. Real-time coordinate comparison and laser triggering: When the ACS-UDMxa drive module 3 drives the X-axis linear motor 8 to move the motion platform, it collects the position signal fed back by the X-axis grating ruler reading head 9 in real time and compares the actual motion coordinates with the preset laser output coordinates in real time. When the X-axis moves to the preset output coordinates, the ACS-UDMxa drive module 3 immediately triggers the PEG pulse output. After receiving the PEG pulse through the TTL-IN input interface 16, the 6-axis PEG laser control module 18 transmits the signal to the input pin of the FPGA 13. After logic judgment, the FPGA 13 outputs a trigger pulse from the output pin through the Trig control signal interface 14 to control the excimer laser 19 to turn the laser on or off, so that the laser output and the motion platform are synchronized and linked to ensure that each preset coordinate point can be accurately exposed.

[0066] b) Laser monitoring and control during the Micro-LED mass transfer process

[0067] 1b. Synchronous signal acquisition: After each emission of light, the excimer laser 19 outputs a laser synchronization feedback signal through its laser synchronization signal interface 20. The laser synchronization feedback signal is transmitted to the laser synchronization signal input interface 22 of the 6-axis PEG laser control module 18 and connected to the corresponding input pin of the FPGA 13 as valid proof of successful laser emission.

[0068] 2b. Position coordinate recording: When the FPGA13 receives the laser synchronization signal, it simultaneously captures the real-time position coordinates transmitted by the X-axis grating ruler reading head 9. After the position coordinates are converted by the differential to single-ended signal circuit, the coordinate data is bound to the corresponding PEG pulse trigger time and trigger sequence number and temporarily stored in the internal buffer.

[0069] 3b. Data comparison and judgment: FPGA13 transmits the bound trigger position-synchronization signal-coordinate data to CPU15 via SPI bus. CPU15 can use its built-in threshold interval comparison algorithm to calculate the difference between the preset coordinates when the PEG pulse is triggered and the actual coordinates corresponding to the laser synchronization signal. At the same time, it counts the consistency between the number of PEG pulses and the number of laser synchronization signals. If the number does not match, the corresponding synchronization signal is missing, or the coordinate difference exceeds the preset threshold, it is determined that the laser is leaking pulses or the light output is abnormal.

[0070] 4b. Real-time data upload: CPU15 uploads detection data in real time via SPI bus, sending the three types of detection results (normal, leaking pulse, coordinate offset) and corresponding position data to EtherCAT circuit 17. The data is then fed back to industrial computer 1 via EtherCAT bus and ACS master station 2. Industrial computer 1 updates the monitoring interface data in real time to keep track of the excimer laser's output status and processing accuracy.

[0071] c) Alarm control during processing

[0072] 1c. Data storage and traceability: The industrial computer 1 receives and stores the laser processing data for each pass in real time, including the PEG pulse trigger timing, laser synchronization signal feedback timing, corresponding X-axis position coordinates, and detection results. The data is categorized and organized by pass and processing time, and exported to an Excel file for archiving. This data serves as the basis for processing quality traceability, facilitating subsequent investigation of abnormal causes and optimization of process parameters.

[0073] 2c. Abnormal signal transmission: When the CPU15 determines that there is an abnormal situation such as laser pulse leakage or light output deviation, it immediately generates an alarm signal and transmits it to the industrial control computer 1 through the EtherCAT circuit 17, EtherCAT bus, and ACS master station 2. At the same time, the abnormality mark is stored in the 6-axis PEG laser control module 18 for easy troubleshooting.

[0074] 3c. Alarm Response and Emergency Handling: After receiving the alarm signal, the industrial control computer 1 immediately triggers an audible and visual alarm. A pop-up window can be displayed on the monitoring interface, showing the abnormal types such as pulse leakage and coordinate offset, as well as the corresponding pass number and abnormal position coordinates, reminding users to handle the situation promptly. At the same time, emergency operations are executed according to the preset strategy. An emergency stop command is sent to the ACS-UDMxa drive module 3 through the ACS master station 2 to stop the X-axis motion platform. The excimer laser 19 is controlled to shut down via the RS232 interface to prevent abnormal processing from causing chip damage or equipment failure. After handling the abnormality, the alarm is reset through the host computer, and the processing flow is restored.

[0075] In summary, this invention offers high control precision and excellent synchronization. By dynamically comparing the coordinates of the grating ruler with the preset position through the ACS-UDMxa drive module, it triggers the FPGA to generate a trigger pulse. Combined with the low latency characteristics of the EtherCAT bus, it achieves sub-micron level laser-motion synchronization, improving transfer yield. Furthermore, it can adaptively calculate the laser dot spacing, making it suitable for processing chips of various specifications. It is highly versatile and avoids the drawbacks of current discrete architectures that lack real-time coordinate comparison.

[0076] With comprehensive detection and timely response, it constructs a complete process system of "signal acquisition-coordinate binding-data comparison", which can simultaneously identify leakage pulses and abnormal light emission offset. The detection results are fed back to the host computer in real time, which buys time for alarm emergency response, prevents quality risks in advance, and solves the limitations of the current single light emission monitoring.

[0077] The alarm system is comprehensive and highly secure, employing a "data traceability-abnormal transmission-emergency linkage" system. It can accurately alert to anomalies and automatically trigger an emergency stop, simultaneously shutting down the platform and laser. Processing data is archived and exported according to regulations, enabling anomaly traceability and facilitating process optimization, thus overcoming the shortcomings of the current single alarm system.

[0078] With high integration and convenient operation and maintenance, the 6-axis PEG laser control module integrates control, detection and alarm through CPU and FPGA collaborative scheduling, reducing line interference and debugging complexity, supporting unified parameter configuration and centralized status monitoring, adapting to large-scale industrial production, and overcoming the shortcomings of the current independent module design.

[0079] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the invention should be included within the scope of protection of the invention. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0080] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

[0081] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. An excimer laser control system integrating control, detection, and alarm functions, characterized in that: It includes an ACS-UDMxa drive module (3) and a 6-axis PEG laser control module (18). The 6-axis PEG laser control module (18) includes a CPU (15), an FPGA (13), a differential-to-single-ended signal circuit (12), an EtherCAT circuit (17), a TTL-IN input interface (16), an X-axis grating ruler input interface (10), an X-axis grating ruler output interface (11), a laser synchronization signal input interface (22), and a Trig control signal interface (14). The industrial control computer (1) is connected to the ACS master station (2) for communication, and is also connected to the RS232 communication interface (23) of the excimer laser (19); The ACS master station (2) communicates with the ACS-UDMxa driver module (3); The ACS-UDMxa drive module (3) is connected to the EtherCAT circuit (17) of the 6-axis PEG laser control module (18) and is connected to the X-axis linear motor (8) of the X-axis motion unit (7) through its X-axis drive interface (4); The X-axis motion unit (7) is equipped with an X-axis grating ruler reading head (9), and the differential A / B / Z grating ruler signal output by the X-axis grating ruler reading head (9) is connected to the X-axis grating ruler input interface (10). The excimer laser (19) is connected to the laser synchronization signal input interface (22) and the Trig control signal interface (14) of the 6-axis PEG laser control module (18) through its laser synchronization signal interface (20) and laser Trig signal interface (21), respectively.

2. The excimer laser control system integrating control, detection, and alarm functions according to claim 1, characterized in that: The industrial computer (1) communicates with the ACS master station (2) via TCP / IP protocol, and communicates with the RS232 communication interface (23) of the excimer laser (19) via RS232 protocol.

3. The excimer laser control system integrating control, detection, and alarm functions according to claim 1, characterized in that: The ACS master station (2) communicates with the ACS-UDMxa driver module (3) via the EtherCAT bus.

4. The excimer laser control system integrating control, detection, and alarm functions according to claim 1, characterized in that: The ACS-UDMxa drive module (3) communicates with the EtherCAT circuit (17) of the 6-axis PEG laser control module (18) via the EtherCAT bus.

5. The excimer laser control system integrating control, detection, and alarm functions according to claim 1, characterized in that: The differential-to-single-ended signal circuit (12) converts the differential signal received by the X-axis grating ruler input interface (10) into a single-ended TTL signal and inputs it to the FPGA (13); the X-axis grating ruler output interface (11) and the X-axis grating ruler input interface (10) are connected in parallel to each other to feed back the grating ruler signal to the X-axis grating ruler feedback interface (5) of the ACS-UDMxa driver module (3); The TTL-IN input interface (16) receives the TTL pulse signal output from the PEG pulse signal interface (6) of the ACS-UDMxa driver module (3) and inputs it to the FPGA (13). The FPGA (13) generates a laser trigger signal and outputs it to the laser Trig signal interface (21) of the excimer laser (19) through the Trig control signal interface (14). The laser synchronization signal input interface (22) receives the laser synchronization signal output from the laser synchronization signal interface (20) of the excimer laser (19) and inputs it to the FPGA (13). The FPGA (13) communicates bidirectionally with the CPU (15), and the CPU (15) is connected to the EtherCAT circuit (17).

6. The excimer laser control system integrating control, detection, and alarm functions according to claim 5, characterized in that: The FPGA (13) communicates bidirectionally with the CPU (15) via the SPI bus, and the CPU (15) is connected to the EtherCAT circuit (17) via the SPI bus.

7. A method for controlling excimer lasers using the system described in claim 1, characterized in that: Includes the following steps: a) Laser control during processing 1a. Data preprocessing: The industrial computer (1) obtains the processing start point and end point coordinates of the current chip array through image recognition or preset parameter analysis. Combined with the effective exposure size of the mask and the chip spacing process parameters, it calculates and determines the laser beam spacing so that the laser spot matches the position of the chip array and meets the alignment requirements of mass transfer. 2a. Pulse sequence generation: The industrial control computer (1) sends the coordinates of the processing start point, the coordinates of the processing end point, and the laser dot spacing parameters to the ACS master station (2) through the TCP / IP communication protocol; the ACS master station (2) generates an equally spaced PEG pulse sequence; the output frequency and total number of pulses of the PEG pulse sequence are matched one by one with the laser dot spacing and the total processing stroke, respectively; the ACS master station (2) outputs the PEG pulse sequence by controlling the PEG pulse signal interface (6) of its slave station ACS-UDMxa drive module (3); 3a. Real-time coordinate comparison and laser triggering: When the ACS-UDMxa drive module (3) drives the X-axis linear motor (8) to move the motion platform, it collects the position signal fed back by the X-axis grating ruler reading head (9) in real time and compares the actual motion coordinates with the preset laser output coordinates in real time. When the X-axis moves to the preset output coordinates, the ACS-UDMxa drive module (3) immediately triggers the PEG pulse output. After receiving the PEG pulse through the TTL-IN input interface (16), the 6-axis PEG laser control module (18) transmits the signal to the input pin of the FPGA (13). After logical judgment, the FPGA (13) outputs the trigger pulse from the output pin through the Trig control signal interface (14) to control the excimer laser (19) to turn the laser on or off, so that the laser output is synchronized with the motion platform and ensures that each preset coordinate point can be accurately exposed. b) Laser monitoring and control during processing 1b. Synchronous signal acquisition: After each emission of light, the excimer laser (19) outputs a laser synchronization feedback signal through its laser synchronization signal interface (20). The laser synchronization feedback signal is transmitted to the laser synchronization signal input interface (22) of the 6-axis PEG laser control module (18) and connected to the corresponding input pin of the FPGA (13) as valid proof of successful laser emission. 2b. Position coordinate recording: When the FPGA (13) receives the laser synchronization signal, it simultaneously captures the real-time position coordinates transmitted by the X-axis grating ruler reading head (9), binds the coordinate data with the corresponding PEG pulse trigger time and trigger sequence number, and temporarily stores it in the internal buffer area; 3b. Data comparison and judgment: FPGA (13) transmits the bound trigger position-synchronization signal-coordinate data to CPU (15) via SPI bus. CPU (15) calculates the difference between the preset coordinates when the PEG pulse is triggered and the actual coordinates corresponding to the laser synchronization signal. At the same time, it counts the consistency between the number of PEG pulses and the number of laser synchronization signals. If the number does not match, the corresponding synchronization signal is missing, or the coordinate difference exceeds the preset threshold, it is determined that the laser is leaking pulses or the light output is abnormal. 4b. Real-time data upload: The CPU (15) transmits the detection results and corresponding position data to the EtherCAT circuit (17) via the SPI bus. The data is then fed back to the industrial control computer (1) via the EtherCAT bus and the ACS master station (2). The industrial control computer (1) updates the monitoring interface data in real time and keeps track of the excimer laser's output status and processing accuracy.

8. The excimer laser control method according to claim 7, characterized in that: It also includes alarm control during the processing, the steps of which are as follows: 1c. Data storage traceability: The industrial control computer (1) receives and stores the laser processing data of each pass in real time, including the PEG pulse trigger timing, laser synchronization signal feedback timing, corresponding X-axis position coordinates, and detection results. The data is sorted by pass and processing time and exported to an Excel file for archiving. 2c. Abnormal signal transmission: When the CPU (15) determines that there is an abnormal situation of laser leakage pulse or light output deviation, it immediately generates an alarm signal and transmits it to the industrial control computer (1) through the EtherCAT circuit (17), EtherCAT bus, and ACS master station (2). At the same time, the abnormal mark is stored in the 6-axis PEG laser control module (18). 3c. Alarm response and emergency handling: After receiving the alarm signal, the industrial control computer (1) immediately triggers the sound and light alarm and displays the abnormal type, corresponding track number, and abnormal location coordinate information in the monitoring interface pop-up window to remind timely handling; at the same time, it performs emergency operation according to the preset strategy, sends an emergency stop command to the ACS-UDMxa drive module (3) through the ACS master station (2) to stop the operation of the X-axis motion platform, and controls the excimer laser (19) to turn off the laser through the RS232 interface.

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