An ultra-high purity gas purification device

Abstract

The application discloses an ultra-high purity gas purification device, which comprises a base, an integral column arranged on the top of the base, a plurality of installation grooves arranged in an annular array around the column on the base, a molecular sieve assembly installed in the installation grooves, a first gas channel and a second gas channel arranged in the base, a gas inlet pipe installed at the first end of the first gas channel, a serial gas outlet pipe installed at the tail end of the first gas channel, a parallel gas outlet pipe installed at the tail end of the second gas channel, two connecting gas pipes arranged on the molecular sieve assembly, and the two connecting gas pipes serving as the gas inlet pipe or the gas outlet pipe, and the two connecting gas pipes being communicated with the first gas channel and the second gas channel, wherein one of the two connecting gas pipes serves as the gas inlet pipe, and the other serves as the gas outlet pipe. The application does not need to change any external pipeline, reduces the number of external pipeline joints and valves, has compact structure and high integration degree, reduces the leakage risk, and is simple and quick to switch.

Description

Technical Field

[0001] This invention relates to the field of gas purification technology, and in particular to an ultra-high purity gas purification device. Background Technology

[0002] Gas purification equipment is widely used in semiconductor, photovoltaic, and electronic specialty gases industries. In actual production, different operating conditions place different requirements on gas purification equipment: for deep purification needs, the gas needs to flow through multiple molecular sieves in series to remove impurities to the maximum extent; for high flow rate needs, the gas needs to flow through multiple molecular sieve components in parallel to reduce resistance and increase throughput.

[0003] Existing technologies mostly employ switching valves to achieve series or parallel switching of gas adsors, and all of these solutions involve external piping in conjunction with the switching valves. In other words, mode switching is achieved by changing the external piping connections, without altering the gas path structure of the device itself. This switching method requires a complex external piping and valve system, occupies a large space, has a low degree of equipment integration, and has numerous external piping joints, resulting in a high risk of leakage.

[0004] Therefore, how to provide an ultra-high purity gas purification device is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] One objective of this invention is to provide an ultra-high purity gas purification device. This invention requires no modification to any external pipelines, reduces the number of external pipeline joints and valves, has a compact structure, high integration, reduces the risk of leakage, and allows for simple and quick switching operations.

[0006] According to an embodiment of the present invention, an ultra-high purity gas purification device includes a base, an integrally formed column on the top of the base, and multiple mounting slots arranged in a ring array around the column on the base. A molecular sieve assembly is installed inside the mounting slots. The molecular sieve assembly is used to purify gas. A first gas channel and a second gas channel are provided inside the base. An inlet pipe is installed at the beginning of the first gas channel, and a series outlet pipe is installed at the end of the first gas channel. A parallel outlet pipe is installed at the end of the second gas channel. Two connecting gas pipes are provided on the molecular sieve assembly. Either of the two connecting gas pipes can be used as an inlet pipe or an outlet pipe. The two connecting gas pipes are respectively connected to the first gas channel and the second gas channel. One connecting gas pipe serves as an inlet pipe, and the other serves as an outlet pipe.

[0007] This device has two gas purification modes: a series mode and a parallel mode. In the series mode, gas is introduced through the inlet pipe and discharged through the series outlet pipe. The gas flows alternately between the first and second gas channels, passing through each molecular sieve component step by step. In the parallel mode, gas is introduced through the inlet pipe and discharged through the parallel outlet pipe. The gas flows through all molecular sieve components simultaneously and then converges and is discharged.

[0008] In series mode, filtered and dried gas enters the initial section of the first gas channel from the inlet pipe, flows to the first molecular sieve assembly, and enters the molecular sieve assembly for purification through the connecting pipe in the molecular sieve assembly that connects to the first gas channel. The purified gas exits from another connecting pipe in the molecular sieve assembly that connects to the second gas channel, enters the first section of the second gas channel, and then flows along the second gas channel to the second molecular sieve assembly. The gas enters the second molecular sieve assembly for purification through the connecting pipe in the molecular sieve assembly that connects to the second gas channel. The purified gas exits from another connecting pipe in the molecular sieve assembly that connects to the first gas channel, and returns to the second section of the first gas channel. In this way, the gas alternates between the first and second gas channels, flows through all molecular sieve assemblies step by step, and finally exits from the series outlet pipe installed at the end of the first gas channel.

[0009] Multiple grooves are provided in both the first and second gas channels, and the number of sliding holes on the first and second gas channels is equal. The grooves on the first and second gas channels are arranged in pairs, and each pair of grooves corresponds to two connecting gas pipes of a molecular sieve assembly. The diameter of the groove is larger than the diameter of the connecting gas pipe, and the connecting gas pipe has a perforation. When the molecular sieve assembly is installed in the mounting groove, its two connecting gas pipes are slidably and sealed into the corresponding grooves on the first and second gas channels, respectively. At this time, the perforation on one connecting gas pipe is connected to the first gas channel, and the perforation on the other connecting gas pipe is connected to the second gas channel. Thus, the gas in the first gas channel can enter the interior of the connecting gas pipe through the perforation of one connecting gas pipe, and then enter the interior of the molecular sieve assembly for gas purification; the purified gas is discharged from the perforation of the other connecting gas pipe into the corresponding gas channel.

[0010] A cavity is formed inside the base, and a lifting plate is movably installed inside the cavity. Multiple blocking rods are fixed to the top of the lifting plate, and multiple first springs fixed to the bottom of the cavity are fixed to the bottom. Multiple connection holes communicating with the cavity are formed on the first air passage and the second air passage. The number of connection holes on the first air passage and the second air passage is equal. Multiple blocking rods are slidably inserted into the corresponding connection holes to seal the connection holes and divide the first air passage and the second air passage into multiple segments. At this time, the air circuit of the device is in series mode. When the blocking rods move downward and move out of the first air passage and the second air passage, the air circuit of the entire device is in parallel mode.

[0011] The molecular sieve assembly is also fixed with a fixing rod at the bottom, which is located between two connecting gas pipes. Multiple insertion holes arranged in a ring array are opened at the bottom of the mounting groove. The insertion holes are connected to the cavity, and the fixing rod can be inserted into the insertion holes. The outer wall of the fixing rod is provided with an annular wedge-shaped groove around it. This device realizes the lifting and lowering control of the lifting plate through the cooperation of the locking mechanism, the annular wedge-shaped groove, and the driving boss on the lifting plate, thereby completing the switching between the series and parallel gas path modes of the device.

[0012] A connecting block is installed inside the sliding seal of the chute. The connecting block has a connecting hole. A sleeve is fixed at the bottom of the connecting block, and the sleeve passes through the lifting plate. A limit ring is fixed on the outer wall of the bottom end of the sleeve. A second spring is fixed inside the sleeve, and the bottom end of the second spring is fixed to the bottom of the cavity. An L-shaped hole is also opened on the connecting block, and the top end of the L-shaped hole communicates with the connecting hole. Multiple series channels are opened on the base, and the series channels connect two chutes in the same group. When the two connecting gas pipes on the molecular sieve assembly are inserted into the corresponding chute, the bottom end of the connecting gas pipe will directly abut against the top of the connecting block, pressing the connecting block to move downward. The downward movement of the connecting block causes the sleeve to compress the second spring.

[0013] The locking mechanism includes a fixed plate, connecting rods, an L-shaped plate, and a pressure plate. The fixed plate is fixed inside the connection hole between the base and the column. Multiple connecting rods are rotatably mounted on the fixed plate. The bottom end of the connecting rod is fixed to the L-shaped plate, and the top end is fixed to the pressure plate. Wedges are symmetrically arranged on both sides of the end of the L-shaped plate. The pressure plate has threaded holes and is equipped with locking screws. The L-shaped plate can be driven to swing by the swinging of the pressure plate, so as to realize the engagement and sliding cooperation between the wedges and the annular wedge groove. It works with the drive boss to complete the gas path mode switching. At the same time, the molecular sieve assembly is rigidly locked and fixed by the locking screws.

[0014] An elastic sealing gasket is fixedly embedded at the bottom of the mounting groove. The elastic sealing gasket is made of corrosion-resistant and aging-resistant rubber or polyurethane material. A clearance hole is provided at the corresponding insertion hole and slide groove position. When the molecular sieve assembly is installed into the mounting groove, the bottom end face of its shell abuts against the elastic sealing gasket and needs to overcome the elastic force of the elastic sealing gasket and press down to the predetermined installation position. At this time, the elastic sealing gasket is in a compressed energy storage state, applying a continuous upward elastic thrust to the molecular sieve assembly.

[0015] The beneficial effects of this invention are: 1. This invention integrates the first and second air passages inside the base and changes the on / off state of the air passages through the built-in air passage switching mechanism, enabling the device to switch between series and parallel modes. Compared with the prior art, which requires external pipelines and switching valves to achieve series and parallel switching, this invention does not require any modification to the external pipelines, reduces the number of external pipeline joints and valves, has a compact structure, high integration, reduces the risk of leakage, and makes the switching operation simple and quick.

[0016] 2. This invention controls the on / off state between the first and second gas channels through a gas path switching mechanism, enabling the same device to operate in series mode, where gas flows through all molecular sieve components step by step to achieve deep purification; or in parallel mode, where gas is simultaneously diverted to each molecular sieve component and then discharged, meeting the needs of large flow rates. Users can flexibly choose the operating mode according to actual working conditions without replacing any hardware, improving the applicability and flexibility of the device.

[0017] 3. In series mode, when a molecular sieve component is pulled out for replacement, the connecting block moves upward to its limit position under the action of the second spring. The L-shaped hole is fully connected with the series channel, forming a short-circuit bypass that bypasses the mounting slot. The gas can continue to flow to the next stage through this bypass, maintaining the smooth flow of the entire series gas path. This enables online replacement without stopping the machine in series mode, avoiding production losses caused by the shutdown of the entire machine due to the replacement of molecular sieves.

[0018] 4. In parallel mode, when a molecular sieve component is pulled out, the connecting block moves upward to disconnect the L-shaped hole from the series channel, and the branch is automatically closed, so that gas will not leak from the empty installation slot. At the same time, the other branches continue to supply gas normally. This function allows molecular sieve replacement in parallel mode to be done without stopping the machine, which greatly improves the continuous operation capability of the equipment.

[0019] 5. The molecular sieve assembly of the present invention adopts a bidirectional flow structure in which the molecular sieve housing cavity and the airflow channel are matched. There is no restriction on the installation direction, and the installation can be manually reversed. The direction of gas flow through the molecular sieve can be flexibly switched in series mode and parallel mode. By periodically reversing the installation, the molecular sieves in different areas of the molecular sieve housing cavity are alternately subjected to the impact of high concentration of incoming gas, so that the adsorption capacity of the entire molecular sieve is more uniform and fully utilized. This avoids the uneven phenomenon of premature saturation of the windward side and low utilization rate of the leeward side in the traditional single-direction air intake mode, thereby extending the overall service life of the molecular sieve, reducing the replacement frequency, and reducing operating costs.

[0020] 6. The locking mechanism of this invention has dual functions: locking and fixing the molecular sieve and mechanically switching the gas path mode. On the one hand, the molecular sieve assembly is limited by the pre-positioning of the fixed rod by engaging the double-sided wedge blocks at the end of the L-shaped plate with the annular wedge groove, combined with the rigid locking structure of the pressure plate top screw, thus avoiding the problems of movement and loosening caused by equipment vibration and gas pressure pulsation. Combined with the continuous pre-tightening effect of the elastic sealing gasket at the bottom of the installation groove, the gaps in the structural fit are eliminated, the gaps in the installation groove are sealed, gas leakage is prevented, and the airtightness and stability of the equipment during long-term operation are ensured. On the other hand, the locking mechanism can drive the boss through the swing of the pressure plate and the squeezing of the wedge block inclined surface, and mechanically drive the displacement of the lifting plate, thereby controlling the blocking rod to block or exit the gas passage. There is no need for additional solenoid valves, external switching valves and auxiliary transmission structures. The non-destructive switching of the series and parallel gas path modes of the device can be completed quickly through the mechanical action of the locking mechanism, realizing the integrated linkage of locking positioning and working condition switching, greatly simplifying the equipment structure, reducing the cost of modification and leakage points, and improving the reliability of the device operation. Attached Figure Description

[0021] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the structure of an ultra-high purity gas purification device proposed in this invention; Figure 2 This is a schematic diagram of the structure of an ultra-high purity gas purification device proposed in this invention without the installation of a molecular sieve component.

[0022] Figure 3 This is a cross-sectional structural schematic diagram of an ultra-high purity gas purification device proposed in this invention.

[0023] Figure 4 for Figure 3 Enlarged view of section A.

[0024] Figure 5 This is a schematic diagram of the series gas path in an ultra-high purity gas purification device proposed in this invention.

[0025] Figure 6 This is a schematic diagram showing the distribution of the series channels in an ultra-high purity gas purification device proposed in this invention.

[0026] Figure 7 This is a schematic diagram of the lifting plate in an ultra-high purity gas purification device proposed in this invention; Figure 8 This is a schematic diagram of the locking mechanism and lifting plate of an ultra-high purity gas purification device proposed in this invention.

[0027] Figure 9 This is a schematic diagram of the molecular sieve component in an ultra-high purity gas purification device proposed in this invention.

[0028] Figure 10 This is a cross-sectional schematic diagram of the molecular sieve component in an ultra-high purity gas purification device proposed in this invention.

[0029] In the diagram: 1. Base; 2. Column; 3. Mounting groove; 4. Molecular sieve assembly; 41. Shell; 42. Partition; 43. Molecular sieve receiving cavity; 44. Airflow channel; 45. Air hole; 46. Connecting air pipe; 47. Perforation; 48. Fixing rod; 49. Annular wedge groove; 410. Bayonet; 5. First air passage; 6. Second air passage; 7. Inlet pipe; 8. Series outlet pipe; 9. Parallel outlet pipe; 10. Slide groove; 11. Cavity; 12. Lifting plate; 13. Blocking rod; 14. Connecting hole; 15. First spring; 16. Connecting block; 17. Connecting hole; 18. Sleeve; 19. Second spring; 20. Limiting ring; 21. Fixing plate; 22. Connecting rod; 23. L-shaped plate; 24. Wedge block; 25. Driving boss; 26. Pressure plate; 27. L-shaped hole; 28. Series channel. Detailed Implementation

[0030] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention, and therefore only show the components relevant to the invention.

[0031] Example 1 refer to Figure 1-10 The ultra-high purity gas purification device includes a base 1, with an integrally formed column 2 on the top of the base 1. Multiple mounting slots 3 are arranged in a ring array around the column 2 on the base 1. Molecular sieve components 4 are installed inside the mounting slots 3. The molecular sieve components 4 are used to purify the gas. A first gas channel 5 and a second gas channel 6 are arranged inside the base 1. An inlet pipe 7 is installed at the beginning of the first gas channel 5, and a series outlet pipe 8 is installed at the end of the first gas channel 5. A parallel outlet pipe 9 is installed at the end of the second gas channel 6. Two connecting pipes 46 are provided on the molecular sieve component 4. Either connecting pipe 46 can serve as an inlet or outlet pipe. The two connecting pipes 46 are connected to the first gas channel 5 and the second gas channel 6 respectively, with one connecting pipe 46 serving as the inlet pipe and the other as the outlet pipe.

[0032] This device has two gas purification modes: a series mode and a parallel mode. In the series mode, gas enters through the inlet pipe 7 and exits through the series outlet pipe 8. The gas flows alternately between the first gas channel 5 and the second gas channel 6, passing through each molecular sieve component 4 in stages. The path is as follows: Figure 5 As shown by the dashed line; in parallel mode, air enters through the inlet pipe 7 and exits through the parallel outlet pipe 9. The gas flows through all molecular sieve components 4 simultaneously and then converges and is discharged into the outlet pipe 9.

[0033] In the series mode, the filtered and dried gas enters the initial section of the first gas channel 5 from the inlet pipe 7, flows to the first molecular sieve assembly 4, and enters the molecular sieve assembly 4 for purification through the connecting pipe 46 connected to the first gas channel 5. The purified gas exits from the molecular sieve assembly 4 through another connecting pipe 46 connected to the second gas channel 6, enters the first section of the second gas channel 6, and then flows along the second gas channel 6 to the second molecular sieve assembly 4. The gas enters the second molecular sieve assembly 4 for purification through the connecting pipe 46 connected to the second gas channel 6. The purified gas exits from the molecular sieve assembly 4 through another connecting pipe 46 connected to the first gas channel 5, and returns to the second section of the first gas channel 5. In this way, the gas alternates between the first gas channel 5 and the second gas channel 6, flows through all molecular sieve assemblies 4 in stages, and finally exits from the series outlet pipe 8 installed at the end of the first gas channel 5.

[0034] Multiple sliding grooves 10 are provided in both the first air passage 5 and the second air passage 6, and the number of sliding holes 10 on the first air passage 5 and the second air passage 6 is equal. The sliding grooves 10 on the first air passage 5 and the sliding grooves 10 on the second air passage 6 are arranged in pairs. Each pair of sliding grooves 10 corresponds to the two connecting air pipes 46 of a molecular sieve assembly 4. The diameter of the sliding groove 10 is larger than the diameter of the connecting air pipe 46. The connecting air pipe 46 is provided with a perforation 47. When the molecular sieve assembly is installed in the mounting groove 3, the two connecting air pipes 46 on it slide respectively. The sealed insert is inserted into the corresponding groove 10 on the first airway 5 and the second airway 6. At this time, a perforation 47 on one connecting air tube 46 is connected to the first airway 5, and a perforation 47 on another connecting air tube 46 is connected to the second airway 6. Thus, the gas in the first airway 5 can enter the interior of the connecting air tube 46 through the perforation 47 of one connecting air tube 46, and then enter the interior of the molecular sieve assembly 4 for gas purification. The purified gas is discharged from the perforation 47 of the other connecting air tube 46 into the corresponding airway.

[0035] refer to Figure 4-7 A cavity 11 is provided inside the base 1. A lifting plate 12 is movably arranged inside the cavity 11. Multiple blocking rods 13 are fixed to the top of the lifting plate 12, and multiple first springs 15 fixed to the bottom of the cavity 11 are fixed to the bottom. Multiple connecting holes 14 communicating with the cavity 11 are provided on the first air passage 5 and the second air passage 6. The number of connecting holes 14 on the first air passage 5 and the second air passage 6 is equal. Multiple blocking rods 13 are slidably and sealingly inserted into the corresponding connecting holes 14 to block the connecting holes 14 and divide the first air passage 5 and the second air passage 6 into multiple segments. At this time, the air circuit of the device is in series mode. When the blocking rods 13 move downward and move out of the first air passage 5 and the second air passage 6, the air circuit of the entire device is in parallel mode.

[0036] In parallel mode, all the plug rods 13 move down synchronously and out of the first air passage 5 and the second air passage 6. At this time, the first air passage 5 and the second air passage 6 are a whole section of airflow channel. After the gas enters the first air passage 5 from the inlet pipe 7, it is simultaneously diverted to the connecting pipes 46 in each molecular sieve component 4 that are connected to the first air passage 5, and enters the interior of each molecular sieve component 4 for purification. The purified gas is discharged into the second air passage 6 from the connecting pipes 46 in each molecular sieve component 4 that are connected to the second air passage 6. After converging in the second air passage 6, it is discharged from the parallel outlet pipe 9 installed at the end of the second air passage 6.

[0037] A fixing rod 48 is also fixed at the bottom of the molecular sieve assembly 4. The fixing rod 48 is located between two connecting gas pipes 46. Multiple insertion holes arranged in a ring array are opened at the bottom of the mounting groove 3. The insertion holes are connected to the cavity 11. The fixing rod 48 can be inserted into the insertion holes. The outer wall of the fixing rod 48 is provided with an annular wedge groove 49 around it. The device also includes a locking mechanism. The locking mechanism and the annular wedge groove 49 cooperate to make the lifting plate 12 rise or fall or remain in place. When the gas path needs to be in series mode, the lifting plate 12 remains in the initial position, so that the blocking rod 13 is in the state of blocking the first gas passage 5 and the second gas passage 6. Conversely, when the gas path needs to be in parallel mode, the locking mechanism can push the lifting plate 12 down, so that the blocking rod 13 loses its blocking effect on the first gas passage 5 and the second gas passage 6, and thus the gas path is in parallel mode.

[0038] refer to Figure 4 A connecting block 16 is slidably and sealed inside the slide 10. A connecting hole 17 is provided on the connecting block 16. A sleeve 18 is fixed at the bottom end of the connecting block 16. The sleeve 18 passes through the lifting plate 12. A limit ring 20 is fixed on the outer wall of the bottom end of the sleeve 18. A second spring 19 is fixed inside the sleeve 18. The bottom end of the second spring 19 is fixed to the bottom of the cavity 11. An L-shaped hole 27 is also provided on the connecting block 16. The top end of the L-shaped hole 27 communicates with the connecting hole 17. Multiple series channels 28 are provided on the base 1. The series channels 28 connect two slides 10 in the same group (two slides 10 connecting the same molecular sieve component 4 are a group). When the two connecting gas pipes 46 on the molecular sieve component 4 are inserted into the corresponding slides 10, the bottom end of the connecting gas pipe 46 will directly abut against the top of the connecting block 16, pressing the connecting block 16 to move downward. The downward movement of the connecting block 16 causes the sleeve 18 to compress the second spring 19.

[0039] In parallel mode, when one or more molecular sieve components 4 need to be replaced, the molecular sieve component 4 can be directly moved out of the mounting slot 3. At this time, the second spring 19 releases its elasticity, pushing the sleeve 18 to move upward and driving the connecting block 16 to move upward until the limit ring 20 abuts against the bottom of the lifting plate 12, and the connecting block 16 stops moving upward. At this time, the L-shaped hole 27 and the series channel 28 are disconnected. At the same time, a part of the connecting hole 17 is connected to the first air channel 5 or the second air channel 6 to ensure the normal passage of the air path and avoid the L-shaped hole 27 from docking with the series channel 28, causing a short circuit in the air path. This does not affect the normal parallel air supply of the other molecular sieve components 4. After replacing the new molecular sieve component 4, its connecting air pipe 46 presses against the connecting block 16 again to move downward, and the branch resumes normal operation, realizing online replacement of molecular sieves. The operation is simple and convenient.

[0040] In series mode, when it is necessary to replace one or more molecular sieve components 4, the molecular sieve component 4 can be directly removed from the mounting slot 3. At this time, the second spring 19 releases its elasticity, pushing the sleeve 18 to move upward and driving the connecting block 16 to move upward until the elasticity of the second spring 19 is fully released. In this state, the connecting hole 17 is fully connected to the first gas channel 5 or the second gas channel 6, and the L-shaped hole 27 is fully connected to the series channel 28. This allows the first gas channel 5 and the second gas channel 6 corresponding to the molecular sieve component 4 to form a short-circuit bypass through the connecting hole 17, the L-shaped hole 27 and the series channel 28. The gas flows directly from the first gas channel 5 through this bypass, bypassing the missing molecular sieve component 4 and flowing into the next section of the second gas channel 6, thereby maintaining the physical unobstructed flow of the entire series gas path and avoiding the whole machine from shutting down due to the removal of the molecular sieve component 4. After replacing the new molecular sieve component 4, its connecting gas pipe 46 presses against the connecting block 16 again and moves downward, and the branch resumes normal operation.

[0041] Example 2 refer to Figure 7-8 A common connecting hole is provided on the base 1 and the column 2, which communicates with the cavity 11. The locking mechanism includes a fixing plate 21, which is fixed inside the connecting hole. Multiple connecting rods 22 are rotatably mounted on the fixing plate 21. The bottom end of the connecting rods 22 is located inside the cavity 11, and the top extends to the top of the column 2. An L-shaped plate 23 is fixed to the bottom end of each of the multiple connecting rods 22. Wedges 24 are symmetrically arranged on both sides of the end of the L-shaped plate 23 away from the connecting rod 22. A pressure plate 26 is fixed to the top end of the connecting rod 22. A threaded hole is provided through the plate 26; multiple drive bosses 25 are arranged in an array on the lifting plate 12, and the drive bosses 25 are correspondingly engaged with the wedges 24. The wedges 24 at the end of the L-shaped plate 23 can be engaged with the annular wedge groove 49. The L-shaped plate 23 can be driven to swing by the swing of the pressure plate 26, and the lifting plate 12 is lowered in conjunction with the drive bosses 25, thereby completing the switching of the series and parallel gas path modes of the device; at the same time, the threaded hole of the pressure plate 26 can be fitted with a locking screw to lock and fix the molecular sieve assembly 4.

[0042] Specifically, when installing the molecular sieve assembly 4, first manually move the pressure plate 26 outward, which drives the L-shaped plate 23 to rotate and shift through the connecting rod 22 to avoid the installation position. Then, vertically place the molecular sieve assembly 4 into the installation groove 3 and press it down into place, so that the fixing rod 48 extends into the insertion hole and the bottom compressed elastic sealing gasket stores energy. Then, manually swing the pressure plate 26 back, which drives the L-shaped plate 23 to reset and rotate, so that the wedges 24 on both sides of the end engage in the annular wedge groove 49 of the fixing rod 48, completing the initial alignment. At this time, it is only a clearance fit and cannot guarantee the stability of the equipment operation. Then tighten the locking screw in the threaded hole of the pressure plate 26 to press against the outer wall of the molecular sieve assembly 4, realize the rigid locking and fixing of the molecular sieve assembly 4, and complete the complete positioning operation. At the same time, the elastic sealing gasket at the bottom, which is in a compressed state, continuously provides an upward pressing force to eliminate the gap between the fixing rod 48 and the wedge 24. The fit clearance is adjusted to avoid component movement and loosening caused by equipment vibration and air pressure pulsation, ensuring tight fit and overall airtightness. Two operating modes can be used: When the pressure plate 26 swings slightly, the wedge 24 is only engaged in the annular wedge groove 49 and does not contact the drive boss 25. The lifting plate 12 remains in a high position under the action of the first spring 15, and the device is in series purification mode. When the pressure plate 26 swings in the opposite direction, the L-shaped plate 23 drives the wedge 24 to slide along the annular wedge groove 49. The wedge 24 presses against the drive boss 25, driving the lifting plate 12 to move downwards, and the blocking rod 13 disengages from the air passage. The device switches to parallel purification mode. After the operating mode switch, the top screw can be finely adjusted again to ensure a stable and reliable locking state. During disassembly and maintenance, simply loosen the top screw and move the pressure plate 26 to disengage the wedge 24 from the annular wedge groove 49 to directly remove the molecular sieve assembly 4, making disassembly and assembly convenient.

[0043] Example 3 refer to Figure 10 The molecular sieve assembly 4 includes a housing 41, inside which a partition 42 is fixed. Under the separation effect of the partition 42, the interior of the housing 41 is divided into a molecular sieve receiving cavity 43 and an airflow channel 44. The molecular sieve receiving cavity 43 is used to fill molecular sieve particles, and the airflow channel 44 serves as a gas guiding channel. Two connecting gas pipes 46 are respectively connected to the molecular sieve receiving cavity 43 and the airflow channel 44. The partition 42 is provided with a vent 45, which is located at the end of the partition 42 away from the two connecting gas pipes 46, and is used to connect the molecular sieve receiving cavity 43 and the airflow channel 44. It should be emphasized that the molecular sieve receiving cavity 43 is provided with a mesh at the connection with the vent 45 and the connection with the connecting gas pipe 46 to prevent the molecular sieve from moving out.

[0044] When the molecular sieve assembly 4 is installed in the forward direction, the gas flow direction is as follows: the gas first enters the molecular sieve housing 43 from the connecting gas pipe 46 connected to the molecular sieve housing 43, enters the gas flow channel 44 through the gas hole 45 at the end of the partition 42, then flows in the reverse direction along the gas flow channel 44, and finally exits from another connecting gas pipe 46 connected to the gas flow channel 44. During this process, the gas runs through the entire molecular sieve housing 43 from beginning to end. The flow path is long and the contact with the molecular sieve is sufficient, which can realize the deep purification of the gas and meet the requirements of high-precision purification conditions.

[0045] When the molecular sieve assembly 4 is installed in reverse, the gas flow direction is completely reversed: the gas first enters the gas flow channel 44 through the connecting gas pipe 46 connected to the gas flow channel 44, and then enters the molecular sieve housing cavity 43 in reverse through the gas hole 45 at the end of the partition 42. After being fully purified by passing through the gaps between the molecular sieve particles, the gas is discharged from another connecting gas pipe 46 connected to the molecular sieve housing cavity 43, thus realizing the reverse convection purification operation.

[0046] The core purpose of setting up a bidirectional flow and reversible installation structure is to balance the wear and tear of molecular sieves and extend their service life. If the molecular sieve component 4 is installed and ventilated in a single direction for a long time, the gas always enters from the same side of the molecular sieve housing 43. The molecular sieve on this side is always the windward side and continuously bears the impact of high concentration of gas impurities, resulting in rapid adsorption saturation and severe performance degradation. Meanwhile, the concentration of gas impurities in the leeward area at the end of the cavity is greatly reduced, and the adsorption load of the molecular sieve at the corresponding position is extremely low. It is idle for a long time and is prone to unilateral failure and low overall utilization, resulting in waste of molecular sieve resources.

[0047] Therefore, staff can periodically rotate and reverse the molecular sieve components 4 according to the running time of the device. By manually reversing the installation, the gas flow direction inside the components is changed, so that the molecular sieves in different areas inside the molecular sieve housing 43 can take turns to undertake high-load wind-facing adsorption work. This improves the problem of excessive wear and partial idleness of molecular sieves on one side, and makes the adsorption capacity of the entire molecular sieve uniform and fully utilized. It effectively delays the overall performance degradation of the molecular sieve, greatly reduces the replacement frequency, and saves equipment operation and maintenance costs.

[0048] Furthermore, an elastic sealing gasket (not shown in the figure) is fixedly embedded at the bottom of the mounting groove 3. The elastic sealing gasket is made of corrosion-resistant and aging-resistant rubber or polyurethane material. A clearance hole is provided at the corresponding insertion hole and slide groove 10. When the molecular sieve assembly 4 is installed into the mounting groove 3, the bottom end face of its housing 41 abuts against the elastic sealing gasket and needs to overcome the elastic force of the elastic sealing gasket and press down to the predetermined installation position. At this time, the elastic sealing gasket is in a compressed energy storage state and applies a continuous upward elastic thrust to the molecular sieve assembly 4.

[0049] The elastic thrust has two functions: First, in the vertical direction, it ensures that the latch 410 at the bottom of the fixing rod 48 and the L-shaped plate 23 are always in close contact, eliminating the gap and preventing the molecular sieve assembly 4 from axial movement due to vibration or air pressure pulsation, thereby enhancing the reliability of the locking mechanism in fixing the molecular sieve assembly 4. Second, after the elastic sealing gasket is compressed, it prevents gas leakage in the mounting groove 3 and ensures the airtightness of each branch. When the molecular sieve assembly 4 needs to be disassembled, the elastic sealing gasket releases its elasticity during the upward lifting process, assisting in pushing the molecular sieve assembly 4 out of the mounting groove 3, which facilitates the replacement operation.

[0050] Working Principle: This device has two working modes: series and parallel. The mode switching is achieved through the cooperation of the annular wedge groove 49 of the bottom fixing rod 48 of the molecular sieve assembly 4 with the double wedge blocks 24 at the end of the L-shaped plate 23 and the lifting plate 12. In the series mode, the wedge blocks 24 at the end of the L-shaped plate 23 are only engaged in the annular wedge groove 49 and do not contact the driving boss 25. The lifting plate 12 is maintained at a high position under the action of the first spring 15. The blocking rod 13 divides the first gas channel 5 and the second gas channel 6 into multiple segments. The gas alternately passes between the two gas channels and flows through all molecular sieve assemblies 4 step by step before being discharged from the series outlet pipe 8, achieving deep purification. In the parallel mode, the reverse push plate 26 drives the L-shaped plate 23 to swing. The wedge blocks 24 squeeze the driving boss 25, push the lifting plate 12 down and drive the blocking rod 13 out of the gas channel. The first gas channel 5 and the second gas channel 6 each form a complete channel. The gas is simultaneously diverted to each molecular sieve assembly 4 for purification and then converged and discharged from the parallel outlet pipe 9, achieving high flow rate processing.

[0051] When replacing the molecular sieve assembly 4, in parallel mode, after pulling out the connecting block 16, it moves upward to disconnect the L-shaped hole 27 from the series channel 28. This branch is closed without affecting the gas supply to other branches, thus enabling online replacement. In series mode, after pulling out the connecting block 16, it moves upward to its limit to connect the L-shaped hole 27 with the series channel 28. A temporary bypass is formed through the connecting hole 17 and the series channel 28 to maintain unobstructed gas flow. When installing the molecular sieve assembly 4, the pressure plate 26, combined with the locking structure of the top screw and the tightening action of the elastic sealing gasket, achieves stable locking and fixation of the molecular sieve assembly 4, effectively preventing movement and gas leakage during operation.

[0052] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. An ultra-high purity gas purification device, characterized in that, Includes a base (1), which has a first air passage (5) and a second air passage (6) inside. The base (1) has multiple mounting slots (3), each of which is used to install a molecular sieve assembly (4). Each molecular sieve assembly (4) is provided with two connecting gas tubes (46), which are connected to the first gas channel (5) and the second gas channel (6) respectively in a way that can be switched on and off; The base (1) is also provided with an air path switching mechanism. The air path switching mechanism switches the device between series mode and parallel mode by changing the on / off state of the first air passage (5) and the second air passage (6). In series mode, the gas flows through each molecular sieve component (4) in sequence and is discharged from the series outlet pipe (8); In parallel mode, the gas is simultaneously diverted to each molecular sieve component (4), and after converging, it is discharged from the parallel outlet pipe (9).

2. The ultra-high purity gas purification device according to claim 1, characterized in that, The air path switching mechanism includes: a cavity (11) disposed in the base (1), a lifting plate (12) movably disposed in the cavity (11), a plurality of plug rods (13) fixed on the lifting plate (12), and a plurality of connecting holes (14) disposed on the first air passage (5) and the second air passage (6); the plug rods (13) are slidably and sealingly inserted into the corresponding connecting holes (14) for sealing or opening the inter-segment communication between the first air passage (5) and the second air passage (6).

3. The ultra-high purity gas purification device according to claim 2, characterized in that, It also includes a locking mechanism, which includes a fixed plate (21), a connecting rod (22), an L-shaped plate (23), and a pressure plate (26). The fixed plate (21) is fixed in the connection hole between the base (1) and the column (2). The connecting rod (22) is rotatably mounted on the fixed plate (21). The bottom end of the connecting rod (22) is fixed with the L-shaped plate (23), and the top end is fixed with the pressure plate (26). The L-shaped plate (23) has wedges (24) symmetrically arranged on both sides of the end away from the connecting rod (22). The bottom of the molecular sieve assembly (4) is fixed with a fixed rod (48). The outer wall of the fixed rod (48) is provided with an annular wedge groove (49). The wedges (24) and the annular wedge groove (49) are slidably engaged. The lifting plate (12) is provided with a driving boss (25) adapted to the wedges (24). The pressure plate (26) is provided with a threaded hole. The threaded hole is equipped with a locking screw for locking and fixing the molecular sieve assembly (4).

4. The ultra-high purity gas purification device according to claim 1, characterized in that, The first air passage (5) and the second air passage (6) are respectively provided with a sliding groove (10) corresponding to each molecular sieve component (4). A connecting block (16) is provided in the sliding groove (10) with a sliding seal. A connecting hole (17) and an L-shaped hole (27) are provided on the connecting block (16). The base (1) is also provided with a series channel (28) for connecting the two sliding grooves (10) corresponding to the same molecular sieve component (4).

5. The ultra-high purity gas purification device according to claim 4, characterized in that, In series mode, when the molecular sieve assembly (4) is removed, the connecting block (16) moves upward, causing the L-shaped hole (27) to align with the series channel (28), forming a gas bypass that bypasses the mounting groove (3).

6. The ultra-high purity gas purification device according to claim 4, characterized in that, In parallel mode, when the molecular sieve assembly (4) is removed, the connecting block (16) moves upward, the L-shaped hole (27) is disconnected from the serial channel (28), and the branch is closed.

7. The ultra-high purity gas purification device according to claim 1, characterized in that, The molecular sieve assembly (4) includes a shell (41) and a partition (42). The partition (42) divides the interior of the shell (41) into a molecular sieve receiving cavity (43) and an air flow channel (44). An air hole (45) is provided at the end of the partition (42) away from the connecting air pipe (46). The two connecting air pipes (46) are respectively connected to the same side of the molecular sieve receiving cavity (43) and the air flow channel (44). The molecular sieve assembly (4) can be installed in opposite directions to achieve bidirectional gas flow.

8. The ultra-high purity gas purification device according to claim 3, characterized in that, The bottom of the mounting groove (3) is embedded with an elastic sealing gasket. After the elastic sealing gasket is compressed and stored, it applies an upward elastic thrust to the molecular sieve assembly (4), so that the wedge (24) fits tightly with the annular wedge groove (49), eliminating the gap and ensuring airtightness.

9. The ultra-high purity gas purification device according to claim 1, characterized in that, The series air outlet pipe (8) is installed at the end of the first airway (5), the parallel air outlet pipe (9) is installed at the end of the second airway (6), and the first airway (5) is equipped with an air inlet pipe (7).

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