A dynamic self-adaptive compensation method and system for evaporation boat heat attenuation

Abstract

The application discloses a kind of dynamic self-adapting compensation method and system of evaporation boat heat attenuation, and the application belongs to vacuum coating technical field.The method comprises: real-time acquisition evaporation boat operating voltage and feed data is integrated to obtain operating load cumulative value in whole cycle, and the physical loss of body is obtained by dynamically evaluating aluminum liquid corrosion and material sublimation effect.Combining with the analysis of thermodynamic attenuation of electrothermal quality physical model, the data of loss is obtained, and the compensation mapping data is generated by relying on initial mapping to perform incremental linear correction.Fusion standard process and physical loss complete the dynamic adaptive reconstruction of bottom voltage to obtain dynamic compensation voltage, and accordingly drive evaporation boat to implement heat power closed-loop control, and output dense aluminized film finished product.The scheme compensates the heat attenuation caused by evaporation boat loss in real time, dynamically maintains constant evaporation rate, effectively eliminates crystallization defects caused by heat fluctuation, and significantly improves the density and gas barrier performance of aluminized film microstructure.

Description

Technical Field

[0001] This application belongs to the field of vacuum coating technology, specifically relating to a dynamic adaptive compensation method and system for the heat attenuation of an evaporation boat. Background Technology

[0002] In large-scale continuous production scenarios of vacuum metallization, the evaporation boat, as the core heat carrier for the melting and vaporization of aluminum wire, is continuously affected by the combined effects of aluminum liquid corrosion and high-temperature material sublimation during long-term operation, which causes the heating performance to gradually decline and ultimately directly affects the density and uniformity of the metallized film. Therefore, it is necessary to establish a precise control mechanism that adapts to the entire life cycle of the evaporation boat to ensure long-term stable evaporation quality.

[0003] The current conventional vacuum metallization production process for evaporation boats generally adopts a pre-set fixed process voltage parameter operation mode. During the production process, the real-time operating voltage and aluminum wire feed speed data of each evaporation boat are collected first. Then, based on the pre-set fixed cycle time statistics rules, the cumulative running time value of each channel is generated. Subsequently, based on this cumulative value, a pre-set fixed loss empirical coefficient is matched to obtain the estimated loss data of the evaporation boat. Then, by comparing it with the initial factory voltage and temperature correspondence, the pre-set fixed voltage compensation parameters are directly retrieved. Finally, the power output of the evaporation boat is completed according to the pre-set constant drive parameters, and the established standard evaporation process is executed to produce metallized film products.

[0004] Traditional control methods cannot achieve dynamic time integration calculations throughout the entire evaporation boat cycle, making it difficult to accurately quantify the real-time loss difference between aluminum melt corrosion and material sublimation. They also cannot dynamically correct the voltage-temperature mapping relationship based on thermodynamic decay characteristics. Ultimately, this leads to the inability to accurately compensate for the evaporation boat's heat generation capacity deficit. After long-term operation, quality problems such as uneven film thickness and localized incomplete plating are likely to occur, making them unsuitable for the production requirements of high-precision continuous vacuum aluminum plating. Summary of the Invention

[0005] To overcome the above-mentioned shortcomings, this invention is proposed to provide a solution or at least a partial solution to the technical problems of existing technologies that cannot achieve dynamic time integration calculation of the entire evaporation boat cycle, are difficult to accurately quantify the real-time loss difference between aluminum liquid corrosion and material sublimation, and cannot complete the dynamic correction of voltage-temperature mapping relationship based on thermodynamic decay characteristics. Ultimately, this will lead to the inability to accurately compensate for the heat loss of the evaporation boat, and after long-term operation, quality problems such as uneven film thickness and local incomplete plating will easily occur, making it unsuitable for the production requirements of high-precision continuous vacuum aluminum plating.

[0006] In a first aspect, the present invention provides a dynamic adaptive compensation method for the heat attenuation of an evaporation boat, the method comprising: During the vacuum aluminizing process, the operating voltage data and aluminum wire feed speed data of each independent channel of the multi-channel evaporation boat are acquired in real time. Based on the operating voltage data and aluminum wire feed speed data, the underlying hardware performs full-cycle dynamic time integration processing to obtain the cumulative operating load data of each independent channel of the multi-channel evaporation boat. Dynamic quantitative evaluation of aluminum liquid corrosion and material sublimation effect was conducted based on cumulative operating load data to obtain physical loss data of each independent channel of the multi-channel evaporation boat. Obtain the preset electrothermal physical model, input the physical loss data of the body into the preset electrothermal physical model, perform dynamic analysis of thermodynamic decay distribution, and obtain the heat capacity deficit data of each independent channel of the multi-channel evaporation boat. The initial voltage-temperature mapping data of each independent channel of the multi-channel evaporator is obtained. Based on the heat capacity deficit data and the initial voltage-temperature mapping data, incremental linear upward correction is performed to obtain the voltage-temperature compensation mapping data of each independent channel of the multi-channel evaporator. Obtain standard vapor deposition process data, and based on voltage and temperature compensation mapping data, standard vapor deposition process data, and physical loss data of the body, perform dynamic adaptive reconstruction of the underlying voltage to obtain dynamic compensation voltage data for each independent channel of the multi-channel evaporation boat. Based on dynamic compensation voltage data and physical loss data of the body, dynamic drive updates and closed-loop control of heating power of each independent channel of the multi-channel evaporation boat are carried out to obtain a dense aluminum-coated film product.

[0007] In a second aspect, the present invention provides a dynamic adaptive compensation system for the heat attenuation of an evaporation boat, the system comprising: The load accumulation module is used to acquire the operating voltage data and aluminum wire feed speed data of each independent channel of the multi-channel evaporation boat in real time during the vacuum aluminizing process. Based on the operating voltage data and aluminum wire feed speed data, the underlying hardware performs full-cycle dynamic time integration processing to obtain the operating load accumulation data of each independent channel of the multi-channel evaporation boat. The loss assessment module is used to dynamically and quantitatively assess the corrosion of aluminum liquid and the sublimation effect of materials based on the cumulative data of operating load, and obtain the physical loss data of each independent channel of the multi-channel evaporation boat. The deficit analysis module is used to obtain the preset electrothermal physical model, input the physical loss data of the body into the preset electrothermal physical model, perform dynamic analysis of thermodynamic decay distribution, and obtain the deficit data of the heating capacity of each independent channel of the multi-channel evaporation boat. The mapping compensation module is used to obtain the initial voltage and temperature mapping data of each independent channel of the multi-channel evaporator. Based on the heat capacity deficit data and the initial voltage and temperature mapping data, it performs incremental linear upward correction to obtain the voltage and temperature compensation mapping data of each independent channel of the multi-channel evaporator. The voltage reconstruction module is used to acquire standard vapor deposition process data. Based on voltage-temperature compensation mapping data, standard vapor deposition process data, and physical loss data of the body, it performs dynamic adaptive reconstruction of the underlying voltage to obtain dynamic compensation voltage data for each independent channel of the multi-channel evaporation boat. The power regulation module is used to dynamically drive and update the independent channels of the multi-channel evaporation boat and control the heating power in a closed loop based on dynamic compensation voltage data and physical loss data of the vessel itself, so as to obtain a dense aluminum-coated film product.

[0008] In a third aspect, an electronic device is provided, comprising a processor, a memory, and a program or instructions stored in the memory and executable on the processor, the program or instructions being loaded and run by the processor to perform the steps of the above-described dynamic adaptive compensation method for the thermal decay of an evaporating boat.

[0009] In a fourth aspect, a computer-readable storage medium is provided, wherein a plurality of program codes are stored therein, the program codes being adapted to be loaded and run by a processor to perform the steps of the above-described dynamic adaptive compensation method for the thermal decay of an evaporating boat.

[0010] The above-described technical solutions of the present invention have at least one or more of the following beneficial effects: In implementing the technical solution of the present invention, the heat attenuation caused by the loss of the evaporation boat is compensated in real time, a constant evaporation rate is dynamically maintained, crystallization defects caused by heat fluctuations are effectively eliminated, and the microstructure density and gas barrier performance of the aluminum-coated film are significantly improved. Attached Figure Description

[0011] The disclosure of this invention will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this invention. Furthermore, similar numbers in the drawings are used to denote similar components, wherein: Figure 1 This is a schematic flowchart of the first main steps of a dynamic adaptive compensation method for heat attenuation of an evaporation boat according to an embodiment of the present invention. Figure 2 This is a schematic flowchart of the second main step of a dynamic adaptive compensation method for the heat attenuation of an evaporation boat according to an embodiment of the present invention. Figure 3 This is a schematic diagram of the main structure of a dynamic adaptive compensation system for heat attenuation of an evaporation boat according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of an electronic device according to an embodiment of the present invention. Detailed Implementation

[0012] Some embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0013] In the description of this invention, "module" and "processor" can include hardware, software, or a combination of both. A module can include hardware circuitry, various suitable sensors, communication ports, memory, and may also include software components, such as program code, or a combination of software and hardware. A processor can be a central processing unit, microprocessor, image processor, digital signal processor, or any other suitable processor. The processor has data and / or signal processing capabilities. The processor can be implemented in software, in hardware, or a combination of both. Non-transitory computer-readable storage media includes any suitable medium capable of storing program code, such as magnetic disks, hard disks, optical disks, flash memory, read-only memory, random access memory, etc. The term "A and / or B" means all possible combinations of A and B, such as only A, only B, or A and B. The terms "at least one A or B" or "at least one of A and B" have a similar meaning to "A and / or B" and can include only A, only B, or A and B. The singular terms "a" or "this" can also include plural forms.

[0014] See appendix Figure 1 , Figure 1 This is a schematic flowchart of the first main steps of a dynamic adaptive compensation method for heat attenuation in an evaporation boat according to an embodiment of the present invention. Figure 1 As shown, the dynamic adaptive compensation method for the heat attenuation of an evaporation boat in an embodiment of the present invention mainly includes the following steps S101-S106.

[0015] Step S101: During the vacuum aluminizing process, the operating voltage data and aluminum wire feed speed data of each independent channel of the multi-channel evaporation boat are acquired in real time. Based on the operating voltage data and aluminum wire feed speed data, the underlying hardware performs full-cycle dynamic time integration processing to obtain the cumulative operating load data of each independent channel of the multi-channel evaporation boat.

[0016] A multi-channel evaporation boat is an electrothermal evaporation hardware array component used in vacuum aluminizing equipment to heat, melt, and sublimate aluminum wires for deposition. It mainly consists of multiple sets of individual conductive ceramic evaporation boats arranged in parallel along the vacuum chamber, water-cooled electrode clamps, conductive connectors, and vacuum mounting and holding brackets.

[0017] An independent channel is a physical and logical control unit in the control system that is set up for a specific evaporator in a multi-channel evaporator boat and has independent control capabilities and feedback loops. It mainly includes an independent power drive module, a signal sampling unit, an aluminum wire feeding drive mechanism, and the corresponding individual heating entity.

[0018] The operating voltage data is the real-time potential difference applied to both ends of a specific independent channel evaporation boat during the aluminum plating process.

[0019] The aluminum wire feed rate data is the unit time displacement rate of the aluminum wire raw material continuously conveyed to the evaporation boat in a specific independent channel during the aluminum plating process. It is used to reflect the material supply intensity of the evaporation boat in real time to absorb and melt metallic aluminum.

[0020] The cumulative operating load data represents the overall fatigue and degradation state of a specific independent channel evaporator boat during its operating cycle, encompassing thermal stress, electrical shocks, and material consumption. It primarily includes the total cumulative electrothermal energy consumed by the channel, the high-temperature thermal cycle stress index, and the comprehensive load assessment value of material erosion loss.

[0021] During vacuum aluminizing, for each independent channel of the multi-channel evaporation boat, a high-attenuation-ratio resistive voltage divider network and an isolation amplifier are used to collect the potential difference signal across the water-cooled electrode fixture. The potential difference signal is sampled at high frequency and equal intervals by an analog-to-digital converter and converted into a digital sequence. A moving average filter is then used to filter out high-frequency electromagnetic interference, generating operating voltage data reflecting the electrothermal excitation intensity of the individual conductive ceramic evaporation boat in that independent channel. This sampling and filtering process runs continuously at a fixed millisecond cycle, outputting time-sequential operating voltage data.

[0022] For the aluminum wire feeding drive mechanism of each independent channel, a high-resolution rotary photoelectric encoder is used to capture orthogonal pulse signals by measuring the rotation angle of the drive shaft. Based on the capture interrupt of a general-purpose timer, the number of pulses per unit time is counted and the period is measured to calculate the aluminum wire pulse frequency. The linear velocity is then calculated by combining this with the physical circumference of the drive roller. After the linear velocity is processed by a first-order low-pass digital filter, the aluminum wire feeding speed data reflecting the material supply intensity is obtained and continuously output using a time base that is completely synchronized with the voltage sampling.

[0023] Based on the acquired operating voltage and aluminum wire feed rate data, multidimensional physical quantity data correlation and solution are performed within the microprocessor. The operating voltage data is squared and combined with the calibration resistance constant to calculate instantaneous electrical power data. The first-order time-domain difference of the operating voltage data is cross-producted with the aluminum wire feed rate data to calculate the real-time thermal stress change rate reflecting alternating hot and cold impacts. The operating voltage data and the aluminum wire feed rate data are directly multiplied to calculate the real-time erosion rate reflecting the scouring effect of molten aluminum. These generated instantaneous electrical power, real-time thermal stress change rate, and real-time erosion rate data serve as the basic inputs for subsequent time integration.

[0024] Using a hardware timer as the trigger source, the aforementioned instantaneous electrical power data, real-time thermal stress change rate data, and real-time erosion rate data are integrated over the entire hardware cycle. A trapezoidal numerical integration algorithm is used to accumulate the instantaneous electrical power data in the hardware floating-point accumulation register according to the sampling period to obtain accumulated electrothermal energy data; the real-time thermal stress change rate data is accumulated to obtain high-temperature thermal cycle stress index data; and the real-time erosion rate data is accumulated to obtain material erosion loss assessment data. The entire integration process is continuously executed at the hardware level as the aluminum plating cycle progresses, ensuring no data loss or accumulation throughout the entire cycle.

[0025] Throughout the entire aluminum plating process, the latest calculated cumulative electrothermal energy data, high-temperature thermal cycle stress index data, and material erosion loss assessment data are periodically read from the hardware floating-point accumulator register. These three data points are structured and encapsulated according to the physical index of independent channels, forming cumulative operating load data that reflects the overall fatigue and attenuation state of a single conductive ceramic evaporation boat in a specific independent channel. This cumulative operating load data is refreshed in real time during the processing, completing a closed loop from underlying physical signal acquisition, dynamic conversion, time integration to load status output.

[0026] Based on the above technical solution, optionally, dynamic time integration processing of the underlying hardware throughout the entire cycle can be performed based on the operating voltage data and aluminum wire feed speed data to obtain the cumulative operating load data of each independent channel of the multi-channel evaporation boat, including: Based on the operating voltage data and aluminum wire feed speed data, real-time electrical power and wire feeding mass flux are coupled to obtain real-time instantaneous load data for each independent channel of the multi-channel evaporation boat. The sampling period data of the underlying hardware is obtained. Based on the real-time instantaneous load data and the sampling period data of the underlying hardware, dynamic time micro-element discretization processing is performed to obtain the micro-element incremental load data of each independent channel of the multi-channel evaporation boat. Based on the incremental load data of the micro-element, the underlying hardware registers are continuously accumulated throughout the entire cycle to obtain the cumulative operating load data of each independent channel of the multi-channel evaporation boat.

[0027] In this scheme, real-time instantaneous load data is a real-time physical state quantity characterizing the intensity of thermoelectric shock and material consumption experienced by a specific independent channel evaporation boat at the current moment. It mainly includes the current real-time electrothermal power component and the aluminum melting endothermic load component of that channel.

[0028] The underlying hardware sampling period data is a fixed time interval reference value for the discrete data acquisition and micro-element processing of the signal sampling unit and the underlying timer in the control system.

[0029] Incremental load data for micro-elements refers to the discrete load increment physical state quantities generated by a specific independent channel evaporator boat within a single underlying hardware sampling period. It mainly includes the increment of micro-element electrothermal energy and the increment of micro-element material loss assessment within that sampling period.

[0030] The system collects operating voltage data and aluminum wire feed speed data from each independent channel of the multi-channel evaporation boat. The operating voltage data is multiplied in the time domain with the equivalent impedance of the circuit loop to calculate the real-time electrothermal power component of a specific independent channel. The aluminum wire feed speed data is then converted in the time domain using preset aluminum wire cross-sectional area and enthalpy constant of melting to calculate the heat absorption rate of the aluminum wire during the melting phase change process, yielding the aluminum melting endothermic load component. Using a multi-source signal time-domain coupling algorithm, the real-time electrothermal power component and the aluminum melting endothermic load component are weighted and vector-summed to generate real-time instantaneous load data characterizing the thermoelectric shock and material consumption intensity of a specific independent channel at the current moment.

[0031] The control system retrieves the underlying hardware sampling period data latched by the underlying timer and extracts the real-time electrothermal power component and the aluminum melting endothermic load component from the real-time instantaneous load data. Using zero-order hold numerical integration technology, the real-time electrothermal power component is discretely integrated within a discrete time window determined by the underlying hardware sampling period data to obtain the incremental electrothermal energy of the micro-element within that sampling interval. Simultaneously, high-frequency sampling quantization technology is invoked, combining the aluminum melting endothermic load component and the physical loss coefficient to calculate the incremental material loss assessment of the micro-element within a single sampling period. The incremental electrothermal energy and the incremental material loss assessment of the micro-element are then encapsulated in a data structure to generate incremental load data for each independent channel of the multi-channel evaporation boat.

[0032] The system continuously writes incremental load data of micro-elements into a circular buffer queue in the underlying hardware registers, performing full-cycle pipelined accumulation operations. It continuously sums the incremental electrothermal energy of micro-elements within the incremental load data to calculate the total accumulated electrothermal energy consumed by the independent channel during the operating cycle. A rainflow counting algorithm is used to extract the stress amplitude of power fluctuations caused by the incremental electrothermal energy of micro-elements, calculating the high-temperature thermal cycle stress index borne by the channel. The incremental material loss assessment of micro-elements is continuously accumulated in the discrete time domain to generate a comprehensive load assessment value for material erosion loss. The total accumulated electrothermal energy consumed, the high-temperature thermal cycle stress index borne, and the comprehensive load assessment value for material erosion loss are then structurally integrated to generate the cumulative operating load data for each independent channel of the multi-channel evaporation boat.

[0033] Step S102: Based on the cumulative operating load data, perform a dynamic quantitative evaluation of aluminum liquid corrosion and material sublimation effects to obtain the physical loss data of each independent channel of the multi-channel evaporation boat.

[0034] Physical loss data refers to the physical state quantities of the macroscopic geometric degradation and microscopic material deterioration caused by high-temperature aluminum melt erosion and substrate material sublimation during vacuum aluminum plating of a specific independent channel single conductive ceramic evaporation boat. It mainly includes data on the reduction of the effective conductive cross-sectional area of ​​the single conductive ceramic evaporation boat in that channel, data on the evolution of material porosity, data on the depth of aluminum melt erosion, and data on sublimation volume loss.

[0035] The comprehensive load assessment value of material erosion loss and the high-temperature thermal cycle stress index are extracted from the cumulative operating load data. Using a physicochemical corrosion rate parameter table in the microprocessor, combined with an iterative boundary solution algorithm based on Arrhenius dynamics, the comprehensive load assessment value of material erosion loss is converted into the chemical reaction interface migration rate between molten aluminum and the surface of the monomer conductive ceramic evaporation boat. Combining the microcrack propagation coefficient induced by the high-temperature thermal cycle stress index, a one-dimensional finite difference erosion front advancement solution is used to numerically integrate the interface migration rate in the spatial depth dimension, calculating the current molten aluminum erosion depth as it penetrates and scours the substrate along the inner tank of the monomer conductive ceramic evaporation boat.

[0036] The total cumulative electrical and thermal energy consumption and the high-temperature thermal cycle stress index are extracted from the cumulative operating load data. Using a volatilization pressure mapping algorithm based on the Hertz-Knudsen equation, the total cumulative electrical and thermal energy consumption is converted into the sublimation phase transition mass loss rate of the surface ceramic matrix of the single conductive ceramic evaporation boat under vacuum high-temperature environment. Using finite element thermal degradation numerical integration calculations, combined with the modulation effect of the high-temperature thermal cycle stress index on the grain boundary volatilization rate, the sublimation phase transition mass loss rate is converted into a volumetric mass value using three-dimensional mesh nodes. This allows for the calculation of the current high-temperature sublimation vaporization loss volume of the single conductive ceramic evaporation boat due to high-temperature vaporization and volatilization.

[0037] The calculated depth of molten aluminum erosion and the volume loss from high-temperature sublimation and vaporization are superimposed using a two-dimensional physical boundary degradation method. The initial geometric coordinates of the single conductive ceramic evaporation boat are retrieved, and a two-dimensional Boolean slice difference algorithm is used to apply the depth of molten aluminum erosion to the inner tank boundary for geometric concave shrinkage mapping. Simultaneously, the volume loss from high-temperature sublimation and vaporization is applied to the outer wall coordinates using an isotropic outer surface spalling model for geometric boundary contraction mapping. Combined with quadratic polynomial boundary interpolation, conductive path integration is performed on the shrunken geometric contour to calculate the attenuation of the current conductive substrate cross-section of the single conductive ceramic evaporation boat compared to its initial effective cross-section. The parameter training and identification process of this isotropic outer surface spalling model is based on offline multiphysics experimental data. By collecting physical loss samples of multiple evaporation boats under different operating cycles, extreme operating loads, and temperature conditions, the actual outer wall thickness reduction is obtained using three-dimensional laser scanning or cross-sectional measurement. The total cumulative electrothermal energy consumed in the corresponding channels and the high-temperature thermal cycling stress index were used as input features. The least squares method was employed to perform curve fitting and iterative optimization of the matrix sublimation rate constant and isotropic spalling coefficient in the model. The prediction residuals of the model were evaluated through cross-validation, and the weight parameters of the spatial boundary shrinkage rate were continuously adjusted to ensure the accuracy of the model's calculation of the spalling loss of the outer wall of the monolithic conductive ceramic evaporation boat under vacuum high-temperature conditions.

[0038] The microstructural damage is co-evolved by combining the depth of molten aluminum erosion, the volume loss due to high-temperature sublimation and vaporization, and the high-temperature thermal cycle stress index from the accumulated operating load data. Using a porous media damage mechanics microcrack evolution algorithm, the liquid aluminum grain boundary penetration caused by the depth of molten aluminum erosion and the lattice vacancy diffusion caused by the volume loss due to high-temperature sublimation and vaporization are superimposed as the input to the internal damage source. The high-temperature thermal cycle stress index is introduced as an alternating thermal stress tensor, and an implicit strain localization iterative solution is employed to solve for the dynamic changes in the porosity ratio and microcrack opening within the ceramic matrix. This yields the ceramic matrix porosity damage evolution value, representing the degree of porousness within the monolithic conductive ceramic evaporation boat.

[0039] The effective cross-sectional attenuation of the conductive substrate, the evolution value of ceramic substrate porosity damage, the depth of molten aluminum erosion, and the volume loss of high-temperature sublimation vaporization, calculated from the previous steps, are subjected to multi-dimensional physical loss feature extraction. A data structure is established in the microprocessor memory area according to the physical index of each independent channel of the multi-channel evaporation boat. The effective cross-sectional attenuation of the conductive substrate, the evolution value of ceramic substrate porosity damage, the depth of molten aluminum erosion, and the volume loss of high-temperature sublimation vaporization are filled into the storage nodes of the corresponding channels to complete structured data encapsulation, generating bulk physical loss data reflecting the degree of macroscopic geometric degradation and microscopic material deterioration of a single conductive ceramic evaporation boat in a specific independent channel.

[0040] Based on the above technical solution, optionally, a dynamic quantitative evaluation of aluminum melt corrosion and material sublimation effects can be performed based on cumulative operating load data to obtain the physical loss data of each independent channel of the multi-channel evaporation boat, including: Thermochemical stress distribution was analyzed based on cumulative operating load data to obtain cumulative thermochemical stress data for each independent channel of the multi-channel evaporation boat; The corrosion rate kinetic parameters of aluminum liquid in each independent channel of the multi-channel evaporation boat were obtained. Based on the accumulated thermochemical stress data and the corrosion rate kinetic parameters of aluminum liquid, the advance of the melting front was calculated to obtain the erosion depth data of aluminum liquid in each independent channel of the multi-channel evaporation boat. The sublimation vapor pressure parameters of the ceramic matrix in each independent channel of the multi-channel evaporator were obtained. Based on the accumulated thermochemical stress data and the sublimation vapor pressure parameters, the high-temperature volatilization quality was evaluated, and the sublimation volume loss data of the ceramic matrix in each independent channel of the multi-channel evaporator was obtained. Based on the data of aluminum melt erosion depth and sublimation volume loss, geometric contour degradation superposition is performed to obtain the effective cross-sectional area reduction data of each independent channel of the multi-channel evaporation boat. Based on the data of aluminum liquid erosion depth and sublimation volume loss, the co-evolution calculation of ceramic matrix porosity and internal gap expansion was carried out to obtain the material porosity evolution data of each independent channel of the multi-channel evaporation boat. The initial geometric structure parameter data of each independent channel of the multi-channel evaporation boat are obtained. Based on the effective cross-sectional area reduction data of the conductive material, the evolution data of the material porosity, and the initial geometric structure parameter data, a comprehensive mapping of three-dimensional deformation and the degradation of the conductive matrix of each independent channel of the multi-channel evaporation boat is performed to obtain the bulk physical loss data of each independent channel of the multi-channel evaporation boat.

[0041] In this scheme, the accumulated thermochemical stress data characterizes the residual state quantities of thermal and chemical stress accumulated by a specific independent channel evaporator boat during its working cycle due to the synergistic effect of high-temperature thermal cycling and electrochemical reactions. It mainly includes the local thermal stress distribution component and the chemical corrosion-induced stress component.

[0042] The corrosion rate kinetic parameters of molten aluminum are physicochemical constants that characterize the rate of chemical dissolution and diffusion erosion of the interface of a conductive ceramic evaporation boat by high-temperature molten aluminum.

[0043] Aluminum melt erosion depth data is a physical state quantity characterizing the depth of erosion penetration from the surface of the evaporation tank to the interior caused by the dissolution and erosion of a single conductive ceramic evaporation boat in a specific independent channel under the action of high-temperature aluminum melt.

[0044] The ceramic matrix is ​​a load-bearing and heat-generating solid structure composed of high-temperature resistant, conductive, and insulating multiphase ceramics in a single conductive ceramic evaporation boat.

[0045] Sublimation vapor pressure is a thermodynamic state parameter that characterizes the tendency of ceramic matrix to undergo pyrolysis and sublimation and the rate of phase transformation volatilization under extremely high operating temperatures and vacuum conditions.

[0046] Sublimation volume loss data is a physical state quantity that characterizes the degree of macroscopic volume reduction caused by the sublimation and volatilization of the ceramic matrix in a specific independent channel single conductive ceramic evaporation boat under high temperature and vacuum conditions.

[0047] The effective cross-sectional area reduction data is a physical state quantity characterizing the degree of reduction in the effective cross-sectional area of ​​the main conductive path of a specific independent channel single conductive ceramic evaporation boat due to aluminum liquid erosion and material sublimation.

[0048] Material porosity evolution data is a physical state quantity that characterizes the degree of increase and loosening of micropores caused by thermal chemical erosion and sublimation of the ceramic matrix inside a specific independent channel single conductive ceramic evaporation boat.

[0049] The initial geometric parameters are the three-dimensional geometric dimensions and morphological reference quantities of a specific independent channel single conductive ceramic evaporation boat in its initial, undamaged state. They mainly include the initial nominal length, nominal width, evaporation tank depth, and initial conductive cross-sectional area of ​​the evaporation boat.

[0050] The system extracts the total cumulative electrical and thermal energy consumption and high-temperature thermal cycle stress index from the cumulative operating load data, and uses finite element nonlinear thermal stress solution technology to calculate the temperature field gradient of the heating area of ​​a specific independent channel, thereby obtaining the local thermal stress distribution component. At the same time, it extracts the comprehensive load assessment value of material erosion loss and uses Arrhenius thermochemical stress extrapolation technology to quantify the residual stress induced by interfacial chemical reaction to obtain the chemical corrosion induced stress component. Then, the local thermal stress distribution component and the chemical corrosion induced stress component are vector superimposed and encapsulated to generate the thermochemical stress cumulative data of each independent channel of the multi-channel evaporation boat.

[0051] When acquiring the kinetic parameters of aluminum melt corrosion rate in each independent channel of the multi-channel evaporation boat, the local thermal stress distribution component and chemical corrosion-induced stress component in the accumulated thermochemical stress data are extracted simultaneously. These components, along with the kinetic parameters, are input into the boundary tracking level set algorithm to calculate the chemical dissolution and diffusion erosion rate of the ceramic substrate by the high-temperature molten aluminum melt. This process evolves the boundary movement process of the evaporation tank surface advancing into the interior and yields the aluminum melt erosion depth data for each independent channel of the multi-channel evaporation boat.

[0052] The system acquires the sublimation vapor pressure parameters of the ceramic matrix in each independent channel of the multi-channel evaporation boat, and extracts the local thermal stress distribution component from the accumulated thermochemical stress data to determine the real-time temperature of each node on the surface of the ceramic matrix. The Hertz-Knudsen vacuum volatilization rate estimation technique is used in combination with the sublimation vapor pressure parameters to calculate the pyrolysis volatilization mass flux of the ceramic matrix in a high-temperature vacuum environment. The macroscopic volume loss is calculated by integrating in the time domain to obtain the sublimation volume loss data of the ceramic matrix in each independent channel of the multi-channel evaporation boat.

[0053] By retrieving the generated aluminum melt erosion depth data and sublimation volume loss data, the Boolean geometric topological difference algorithm is used to spatially superimpose the erosion depth on the surface of the evaporation tank and the geometric boundary degradation caused by sublimation erosion on the surface of the ceramic substrate in three dimensions. The geometric contour of the main conductive path is reconstructed and the reduction of the cross-sectional area of ​​the main conductive path after degradation relative to the initial state is calculated. Thus, the effective cross-sectional area reduction data of each independent channel of the multi-channel evaporation boat is obtained.

[0054] Simultaneously extract aluminum melt erosion depth data and sublimation volume loss data, and use micropore network percolation evolution algorithm to calculate the micropore nucleation, crack expansion and structural loosening evolution caused by thermochemical erosion and matrix sublimation inside the ceramic matrix. Quantify the increase in the proportion of internal pore volume to the total matrix volume and obtain the material porosity evolution data of each independent channel of the multi-channel evaporation boat.

[0055] The initial geometric parameters of each independent channel of the multi-channel evaporation boat are obtained and the initial nominal length, nominal width, evaporation tank depth and initial conductive cross-sectional area are extracted. A three-dimensional nonlinear mesh deformation reconstruction algorithm is used as the basis for the initial geometric parameters. The physical deformation and material degradation are comprehensively mapped by combining the conductive effective cross-sectional area reduction data, material porosity evolution data, aluminum melt erosion depth data and sublimation volume loss data to generate the physical loss data of each independent channel of the structured multi-channel evaporation boat.

[0056] Step S103: Obtain the preset electrothermal physical model, input the physical loss data of the body into the preset electrothermal physical model, perform dynamic analysis of thermodynamic decay distribution, and obtain the heat generation capacity deficit data of each independent channel of the multi-channel evaporation boat.

[0057] The pre-defined electrothermal physical model is a system of physical equations and algorithms governing the dynamic evolution of electric field, thermal field, and mass transport in a single conductive ceramic evaporation boat under the combined effects of electrothermal excitation and geometric degradation. It mainly includes an electric field conduction sub-model describing current density and Joule heating, a heat conduction sub-model describing anisotropic heat conduction and radiative heat loss, and a heat capacity and thermal conductivity correction sub-model based on geometric cross-section reduction and porosity evolution.

[0058] Thermal capacity deficit data is a physical state quantity characterizing the degree of degradation in thermal output performance and temperature field distribution of a specific independent channel single conductive ceramic evaporation boat under known physical loss conditions compared to its initial nominal state. It mainly includes the effective thermal power output attenuation value, steady-state surface limit temperature drop, and thermal response time delay increment data of the single channel conductive ceramic evaporation boat.

[0059] The system retrieves a pre-built, preset electrothermal physical model from non-volatile memory and loads it into the microprocessor memory. This model includes a pre-defined computational architecture for electric field conduction describing current density and Joule heating, a computational architecture for heat conduction describing anisotropic heat conduction and radiative heat loss, and algorithms for correcting heat capacity and thermal conductivity based on geometric cross-section reduction and porosity evolution. The microprocessor then uses the initial physical dimensions of the individual conductive ceramic evaporators in each independent channel of the multi-channel evaporation boat to create a three-dimensional discrete mesh and initialize the spatial physical property matrix.

[0060] The acquired bulk physical loss data is input into the preset electrothermal physical model. The effective conductive cross-sectional area reduction data and material porosity evolution data from the bulk physical loss data are used to run heat capacity and thermal conductivity correction algorithms. The equivalent conduction equation of the porous medium dynamically updates the local resistivity, anisotropic thermal conductivity, and volumetric heat capacity of the mesh nodes. Aluminum melt erosion depth data and sublimation volume loss data are combined with the boundary node deformation mapping method to adjust the mesh geometry, completing the correction of physical property parameters caused by the deterioration of the material and geometry of the single conductive ceramic evaporation boat.

[0061] The updated physical property matrix is ​​used to perform dynamic analysis of thermodynamic attenuation distribution based on the electric field conduction calculation framework. The dynamic current density distribution inside the single conductive ceramic evaporation boat is solved using the finite volume method with the rated operating voltage applied to the independent channel. This leads to the calculation of the spatial Joule heating intensity distribution, and the actual thermal power is obtained by performing a global power integration on the three-dimensional mesh. The difference between the actual thermal power and the initial nominal power is calculated to obtain the effective thermal power output attenuation value, reflecting the degree of degradation in the channel's electrothermal conversion capability.

[0062] The calculated Joule heating intensity distribution and the updated geometric mesh are injected into the heat conduction calculation framework to further advance the dynamic analysis of the thermodynamic attenuation distribution. Stefan-Boltzmann radiation heat loss and the thermal conductivity boundary at the water-cooled electrode fixture are fully considered. An implicit heat conduction iterative algorithm solves the three-dimensional anisotropic heat conduction equation until the temperature field reaches thermal equilibrium, and the steady-state maximum surface temperature value of the main heating zone of the single conductive ceramic evaporation boat is extracted. The difference between the steady-state maximum surface temperature value and the nominal limiting temperature value under the initial state is calculated to obtain the steady-state surface limiting temperature reduction.

[0063] The transient evolution stage of the dynamic analysis of thermodynamic decay distribution applies a step electrothermal excitation to the model. A parabolic unsteady-state heat conduction time-stepping solver tracks the time required for the surface temperature of the single conductive ceramic evaporation boat to rise from the initial temperature to a specific proportion of the steady-state temperature, calculating the thermal time constant under the current physical state. Subtracting the thermal time constant under the initial nominal state from the current thermal time constant yields the thermal response time delay increment data reflecting the degree of intensification of system heat conduction hysteresis.

[0064] The effective thermal power output attenuation value, steady-state surface limit temperature drop, and thermal response time delay increment data are structured and encapsulated according to the physical index of each independent channel of the multi-channel evaporation boat. This generates heat capacity deficit data that reflects the degree of thermal output performance degradation and temperature field distribution deterioration of a specific independent channel of the individual conductive ceramic evaporation boat. The heat capacity deficit data is dynamically refreshed with each calculation cycle, completing the entire process from physical loss input to thermodynamic performance degradation assessment.

[0065] The training and parameter identification of the pre-defined electrothermal physical model are based on a training sample set consisting of historical bulk physical loss data as input features, and historical heating capacity deficit data and historical evaporative heat flux decay data obtained from offline measurements or high-order multiphysics simulations as supervision labels. Data on the reduction of effective conductive cross-sectional area, material porosity evolution, aluminum melt erosion depth, and sublimation volume loss from the historical bulk physical loss data are input into the model for forward mapping. Through dynamic mapping and solution of the grid node parameters of impedance and thermal conductivity, the resistance change distribution data and thermal conductivity decay distribution data under the current parameters are obtained. The electric field conduction sub-model and the thermal conduction sub-model perform dynamic solutions for Joule heating and three-dimensional heat conduction fields, obtaining real-time Joule thermal field distribution data. Combined with the built-in aluminum wire phase change heat flux parameters, the effective heat transferred from the evaporation tank to the aluminum wire for phase change evaporation is analyzed, and the predicted evaporative heat flux decay data is calculated. Combined with the built-in initial heating baseline data, the predicted heating capacity deficit data under the current parameters is obtained through thermodynamic deficit field difference calculation and forward mapping solution. The predicted evaporative heat flux decay data, along with the effective heat power output decay value, steady-state surface limit temperature drop, and thermal response time delay increment from the predicted heating capacity deficit data, are used to calculate the mean square error loss function with historical data serving as supervision labels. The Levenberg-Marquardt nonlinear optimization algorithm is then used to iteratively update the matrix resistivity correction coefficient, anisotropic thermal conductivity decay constant, heat capacity correction factor, aluminum wire phase change endothermic coupling coefficient, and evaporation interface heat transfer impedance factor within the model. When the mean square error of the loss function decreases below the preset convergence threshold, or the parameter update step size between two adjacent iterations is less than the set tolerance, the model reaches its optimal fit and training stops, completing the accurate calibration of the preset electrothermal physical model parameters.

[0066] Based on the above technical solution, optionally, the physical loss data of the body can be input into a preset electrothermal physical model to perform dynamic analysis of the thermodynamic decay distribution, thereby obtaining the heat generation capacity deficit data of each independent channel of the multi-channel evaporation boat, including: The physical loss data of the body is input into the preset electrothermal physical model, and the grid node parameters of impedance and thermal conductivity are dynamically mapped to obtain the resistance change distribution data and thermal conductivity decay distribution data of each independent channel of the multi-channel evaporation boat. Based on the resistance change distribution data and the thermal conductivity decay distribution data, the Joule heat generation and three-dimensional heat conduction field are dynamically calculated in the preset electrothermal physical model to obtain the real-time Joule thermal field distribution data of each independent channel of the multi-channel evaporation boat. Based on real-time Joule thermal field distribution data, the effective heat transfer from the grooves of each independent channel of the multi-channel evaporation boat to the aluminum wire for phase change evaporation is analyzed in the preset electrothermal physical model and combined with the built-in aluminum wire phase change heat flux parameters. The evaporation heat flux attenuation data of each independent channel of the multi-channel evaporation boat is obtained. Based on the evaporation heat flux decay data, the thermodynamic deficit field difference is calculated in the preset electrothermal physical model in combination with the built-in initial heating reference data, so as to obtain the heating capacity deficit data of each independent channel of the multi-channel evaporation boat.

[0067] In this scheme, the resistance variation distribution data is a physical state quantity characterizing the local resistance offset of a specific independent channel single conductive ceramic evaporation boat at discrete grid nodes due to geometric section reduction and material porosity evolution. It mainly includes the conductivity decay component of each grid node and the equivalent resistance increment between nodes.

[0068] Thermal conductivity decay distribution data is a physical state quantity characterizing the spatial degradation of thermal conductivity at discrete grid nodes caused by material degradation and increased porosity in a specific independent channel single-cell conductive ceramic evaporation boat. It mainly includes the anisotropic equivalent thermal conductivity decay components of each grid node in the axial, radial, and normal directions.

[0069] Real-time Joule thermal field distribution data is a physical state quantity characterizing the real-time Joule thermal power intensity generated per unit volume at each grid node under the current electrothermal excitation and physical loss state of a specific independent channel single conductive ceramic evaporation boat. It mainly includes the volumetric thermal power density distribution component of the main heating zone and the edge local heat flux generation component.

[0070] The phase change heat flux parameter of aluminum wire is a thermodynamic boundary parameter built into the preset electrothermal physical model, which characterizes the heat intensity required for aluminum wire to melt from solid to liquid and completely sublimate and vaporize at a specific feed rate.

[0071] Evaporation heat flux decay data is a physical state quantity characterizing the decrease in heat power effectively transferred to aluminum wires for melting and sublimation phase change in the evaporation tank region of a specific independent channel conductive ceramic evaporation boat. It mainly includes the heat flux loss component at the thermal interface of the evaporation tank and the component of the decrease in radiative heat flux in the phase change evaporation zone.

[0072] Initial heating baseline data refers to the performance benchmarks of heat output and temperature field distribution of a specific independent channel single conductive ceramic evaporation boat under initial nominal conditions without loss. It mainly includes the initial nominal heating power density, the nominal effective evaporative heat flux of the tank surface, and the initial steady-state temperature field baseline distribution.

[0073] The system inputs the physical loss data of the body into the preset electrothermal physical model and extracts the effective cross-sectional area reduction data and material porosity evolution data. It uses the finite difference impedance mapping algorithm to discretize and map these data onto the three-dimensional grid nodes of each independent channel of the multi-channel evaporation boat. In the electric field conduction sub-model, the system calculates the microscopic impedance change of the grid nodes using the effective medium approximation technique to solve for the conductivity attenuation component of each grid node and the equivalent resistance increment between nodes. This encapsulates the resistance change distribution data of each independent channel of the multi-channel evaporation boat. At the same time, combined with the aluminum liquid erosion depth data and sublimation volume loss data, the system calls the micropore anisotropic thermal conductivity attenuation algorithm in the heat capacity and thermal conductivity correction sub-model to solve for the anisotropic equivalent thermal conductivity attenuation components of each grid node in the axial, radial and normal directions, generating the thermal conductivity attenuation distribution data of each independent channel of the multi-channel evaporation boat.

[0074] The system imports the generated resistance change distribution data and thermal conductivity decay distribution data into the preset electrothermal physical model. In the electric field conduction sub-model, it combines the current input driving current of a specific independent channel with electromagnetic-thermal coupling finite element solution technology to calculate the real-time electrical energy conversion value generated per unit volume of each grid node. This yields the volumetric heating power density distribution component of the main heating zone and the edge local heat flux generation component. These components are then used as heat source application terms in the heat conduction sub-model to perform dynamic three-dimensional heat conduction solution with the thermal conductivity decay distribution data. The discrete solution yields the real-time Joule thermal field distribution data of each independent channel of the multi-channel evaporation boat, reflecting the current state of electrothermal excitation and physical loss.

[0075] The system imports real-time Joule thermal field distribution data into the preset electrothermal physical model and introduces the built-in aluminum wire phase change heat flux parameters as the thermodynamic boundary conditions of the evaporation tank interface. It uses a coupled convection-radiation heat transfer and interface phase change energy balance solution algorithm to analyze the energy loss of the real-time Joule thermal field distribution data in the process of transferring to the surface of the evaporation tank and acting on the melting and vaporization phase change of the aluminum wire. It calculates the heat flux loss component of the thermal conductivity interface of the evaporation tank caused by substrate degradation and impedance increase, as well as the radiation heat flux reduction component of the phase change evaporation zone caused by the surface temperature drop, and integrates them in a structured manner to obtain the evaporation heat flux attenuation data of each independent channel of the multi-channel evaporation boat.

[0076] The system retrieves the initial heating reference data built into the preset electrothermal physical model and extracts the initial nominal heating power density, nominal effective evaporation heat flux on the tank surface, and initial steady-state temperature field reference distribution. Based on the evaporation heat flux decay data, the system calls the field difference analysis and transient thermal response solution technology in the model to calculate the difference between the heat flux under the current degradation state and the nominal effective evaporation heat flux on the tank surface, thereby obtaining the effective heat power output decay value of a specific independent channel single conductive ceramic evaporation boat. Combined with the initial steady-state temperature field reference distribution, the system calculates the change in the equilibrium temperature on the surface of the evaporation boat to obtain the steady-state surface limit temperature drop. The system also uses the thermal time constant dynamic estimation technology to calculate the heating response delay and obtain the thermal response time delay increment data. The effective heat power output decay value, steady-state surface limit temperature drop, and thermal response time delay increment data are structured and integrated to obtain the heating capacity deficit data of each independent channel of the multi-channel evaporation boat.

[0077] Step S104: Obtain the initial voltage-temperature mapping data of each independent channel of the multi-channel evaporator. Based on the heat capacity deficit data and the initial voltage-temperature mapping data, perform incremental linear upward correction to obtain the voltage-temperature compensation mapping data of each independent channel of the multi-channel evaporator.

[0078] Initial voltage-temperature mapping data is a physical mapping quantity characterizing the electrothermal conversion reference relationship between the input operating voltage and the steady-state heating temperature of a specific independent channel single conductive ceramic evaporation boat under the initial nominal state without physical losses. It mainly includes the nominal voltage-temperature response curve, initial electrothermal conversion coefficient, nominal thermal equilibrium temperature matrix, and reference driving voltage control parameters of the single conductive ceramic evaporation boat in that channel.

[0079] Voltage-temperature compensation mapping data is a physical mapping quantity characterizing the dynamic matching relationship between the corrected driving voltage and the target control temperature required to maintain the target evaporation temperature under the current thermal performance degradation state of a specific independent channel single conductive ceramic evaporator. It mainly includes the compensation driving voltage calibration vector, voltage increment correction coefficient, dynamic temperature offset, and updated voltage-temperature control curve of the single conductive ceramic evaporator in that channel.

[0080] The system retrieves and retrieves the factory-nominal electrothermal dataset bound to the physical index of each independent channel of the multi-channel evaporator from the non-volatile memory area. After parsing the data and loading it into the microprocessor's working memory, the system extracts the recorded nominal voltage-temperature response curve, initial electrothermal conversion coefficient, nominal thermal equilibrium temperature matrix, and reference drive voltage control parameters. It then maps these parameters in memory space according to channel order to establish initial voltage-temperature mapping data under the condition of no physical loss and stores it in the real-time calculation buffer as a reference verification parameter.

[0081] The heat dissipation data obtained from the aforementioned calculations is extracted and input into the microprocessor. The system analyzes the effective thermal power output attenuation value, steady-state surface limit temperature drop, and thermal response time delay increment data from the heat dissipation data. For the steady-state surface limit temperature drop and the effective thermal power output attenuation value, the system combines the initial electrothermal conversion coefficient and the nominal thermal equilibrium temperature matrix from the initial voltage-temperature mapping data, and uses sensitivity matrix calculation and proportional gain amplification techniques to calculate the power difference required to compensate for each target control temperature point, thus calculating the voltage increment correction coefficient characterizing the proportional upward adjustment of the driving voltage. Simultaneously, time-domain hysteresis compensation filtering techniques are used to perform multi-field coupling dynamic weighted superposition of the thermal response time delay increment data and the steady-state surface limit temperature drop, solving for the dynamic temperature offset characterizing the temperature field degradation-induced target control temperature drop.

[0082] Based on the calculated voltage increment correction coefficient and dynamic temperature offset, the initial voltage-temperature mapping data undergoes incremental linear upward correction. A piecewise linear extrapolation algorithm is invoked, using discrete control nodes on the nominal voltage-temperature response curve as a reference. The dynamic temperature offset is injected as a scalar displacement into the control nodes. Simultaneously, the reference drive voltage control parameters corresponding to each node are linearly scaled upward according to the voltage increment correction coefficient, generating a drive voltage correction increment array covering the entire operating temperature range, forming the compensated drive voltage calibration vector for each independent channel. The compensated drive voltage calibration vector is directly superimposed onto the original nominal voltage-temperature response curve according to the node coordinates. Boundary smoothing and amplitude limit constraint processing are performed simultaneously, reconstructing the updated voltage-temperature control curve for each independent channel under the current attenuation state.

[0083] The calculated compensation driving voltage calibration vector, voltage increment correction coefficient, dynamic temperature offset, and updated voltage-temperature control curve are structured, encapsulated, and verified according to the hardware physical index of each independent channel of the multi-channel evaporation boat. This generates voltage-temperature compensation mapping data characterizing the dynamic matching relationship required for maintaining the target evaporation temperature of a specific independent channel's single conductive ceramic evaporation boat under the current thermal performance degradation state. The obtained voltage-temperature compensation mapping data is written to the real-time execution register, thus completing the entire incremental linear upward correction process and providing direct parameter support for the underlying voltage dynamic adaptive reconstruction.

[0084] Step S105: Obtain standard vapor deposition process data. Based on voltage and temperature compensation mapping data, standard vapor deposition process data, and physical loss data of the substrate, perform dynamic adaptive reconstruction of the underlying voltage to obtain dynamic compensation voltage data for each independent channel of the multi-channel evaporation boat.

[0085] Standard vapor deposition process data are physical process settings that characterize the preset target coating quality specifications and equipment baseline operating control parameters in the vacuum metallization process. These mainly include the target film thickness setting, the baseline aluminum wire feed speed, the target evaporation temperature control curve, the substrate running linear velocity, and the vacuum chamber working pressure setting parameters.

[0086] Dynamic compensation voltage data is a real-time adaptive drive voltage control vector characterizing the requirement for a specific independent channel of a single conductive ceramic evaporator to maintain a constant aluminum liquid phase change evaporation rate and target coating thickness under current physical losses and thermal performance degradation. It mainly includes the substrate drive voltage amplitude, dynamic voltage correction offset, high-frequency ripple compensation component, and channel safe power limit value for that channel's single conductive ceramic evaporator.

[0087] The system reads the formula parameter set corresponding to the current production batch from the main control storage area of ​​the vacuum metallization equipment. It parses and extracts the target film thickness setting value, the reference aluminum wire feed speed, the target evaporation temperature control curve, the substrate running linear velocity, and the vacuum chamber working pressure setting parameters from the formula parameter set. The extracted physical parameters are written into the system's real-time main control memory to generate standard evaporation process data, and are simultaneously stored in the underlying control bus buffer for subsequent adaptive reconstruction calculations.

[0088] The system synchronously retrieves voltage-temperature compensation mapping data and physical loss data to perform underlying voltage dynamic adaptive reconstruction. For each time-series control node on the target evaporation temperature control curve, a cubic spline interpolation algorithm is invoked to retrieve the reference driving voltage from the updated voltage-temperature control curve, calculating the base driving voltage amplitude for a specific independent channel at the current operating temperature. Combining the effective cross-sectional area reduction data and material porosity evolution data from the physical loss data, the real-time resistance increment of the channel is calculated using recursive least squares online impedance observation technology. This resistance increment, along with the dynamic temperature offset from the voltage-temperature compensation mapping data and the compensation driving voltage calibration vector, is input into the feedforward adaptive compensation algorithm to calculate the dynamic voltage correction offset used to correct for changes in thermal resistance and cross-sectional shrinkage.

[0089] The underlying voltage dynamic adaptive reconstruction further combines dynamic load disturbances and thermal stress limits for high-frequency and safety boundary calculations. Addressing the melting phase transition fluctuations guided by the reference aluminum wire feed rate and the localized non-uniform conductivity fluctuations caused by aluminum molten erosion depth data in the bulk physical loss data, adaptive harmonic synthesis and high-frequency ripple injection techniques are used to discretize and synthesize high-frequency ripple compensation components to eliminate surface tension fluctuations and electrothermal disturbances in the aluminum molten pool. Based on the sublimation volume loss data in the bulk physical loss data, the mechanical and thermal load-bearing limits of the single conductive ceramic evaporation boat are evaluated. Combining the voltage increment correction coefficient in the voltage-temperature compensation mapping data, the thermal power tolerance upper limit under the current physical decay state is calculated using thermal saturation boundary limiting techniques, thus solving for the channel safety power limit value protecting the independent channel hardware entity.

[0090] The calculated base drive voltage amplitude, dynamic voltage correction offset, high-frequency ripple compensation component, and channel safety power limit value are integrated and verified using structured data based on the hardware physical index of each independent channel of the multi-channel evaporation boat. This generates dynamic compensation voltage data that characterizes the adaptive control vector required to maintain a constant aluminum liquid phase change evaporation rate and target coating thickness for a specific independent channel. This dynamic compensation voltage data is directly loaded into the underlying power drive control register, driving the pulse width modulation generator to output a high-precision drive signal, completing the entire process of underlying voltage dynamic adaptive reconstruction.

[0091] Based on the above technical solution, optionally, dynamic adaptive reconstruction of the underlying voltage can be performed based on voltage-temperature compensation mapping data, standard evaporation process data, and bulk physical loss data to obtain dynamic compensation voltage data for each independent channel of the multi-channel evaporation boat, including: The target parameters of the process were extracted from the standard vapor deposition process data to obtain the target temperature sequence of each independent channel of the multi-channel evaporation boat. Based on the target temperature sequence and voltage-temperature compensation mapping data, the mapping calculation from the target process temperature to the reference control voltage of each independent channel of the multi-channel evaporator is performed to obtain the reference voltage trajectory data of each independent channel of the multi-channel evaporator. Based on the reference voltage trajectory data and the physical loss data of the body, dynamic feedforward compensation of thermal inertia hysteresis and electrothermal response of each independent channel of the multi-channel evaporation boat is performed to obtain the feedforward correction voltage data of each independent channel of the multi-channel evaporation boat. Based on the feedforward correction voltage data, the decoupling matrix operation is performed on the thermal radiation cross-interference between the independent channels of the multi-channel evaporation boat to obtain the spatial decoupling voltage data of the independent channels of the multi-channel evaporation boat. Based on spatially decoupled voltage data, safety limiting filtering of the upper limit of power supply hardware voltage output and voltage change rate is performed to obtain safety limiting voltage data for each independent channel of the multi-channel evaporation boat. Based on the safety-limited voltage data, adaptive reconstruction of the power supply's underlying drive control waveform is performed to obtain the dynamic compensation voltage data for each independent channel of the multi-channel evaporation boat.

[0092] In this scheme, the target temperature sequence is a physical quantity characterizing the target control temperature time series that a specific independent channel single conductive ceramic evaporation boat needs to reach at each time-domain control node throughout the entire cycle of the vacuum aluminizing process. It mainly includes the target evaporation temperature setpoint for each process stage, the temperature change rate during the heating phase, and the steady-state control temperature array.

[0093] The reference voltage trajectory data is a discrete-time reference driving voltage state quantity characterizing the target temperature sequence required for a specific independent channel single conductive ceramic evaporation boat to match its current thermal performance degradation state. It mainly includes the base driving voltage amplitude sequence and the reference driving voltage control vector under each control node.

[0094] Feedforward correction voltage data is a dynamic feedforward control voltage state quantity characterizing a specific independent channel of a single conductive ceramic evaporation boat, used to compensate for thermal inertia hysteresis and material degradation response delay based on a reference voltage trajectory. It mainly includes dynamic voltage correction offset components and thermal hysteresis feedforward compensation vectors.

[0095] Spatial decoupling voltage data characterizes the spatially independent driving voltage state of a specific independent channel in a multi-channel evaporation boat array after eliminating the cross-interference effect of thermal radiation from adjacent channels. It mainly includes the spatially decoupling driving voltage vector and the cross-radiation interference compensation component.

[0096] Safety limiting voltage data is a limited control voltage state quantity characterizing the specific independent channel's single conductive ceramic evaporator boat to meet the power supply hardware output voltage limit and dynamic rise rate safety constraints. It mainly includes the amplitude limiting drive voltage vector, the rate of change constraint voltage component, and the channel safety power limit value.

[0097] The system extracts the target film thickness setting, reference aluminum wire feed speed, target evaporation temperature control curve, substrate running linear velocity, and vacuum chamber working pressure setting parameters from the standard vapor deposition process data. It applies time-domain discrete sampling and process curve segmentation decomposition technology to discretize the target evaporation temperature control curve in the time domain to calculate the target evaporation temperature setting value for each process stage. Simultaneously, it uses a numerical differential algorithm to solve the first derivative of the temperature in the heating section to obtain the temperature change rate in the heating section. Combining the substrate running linear velocity and aluminum wire feed speed, it solves the steady-state temperature setting parameters under each control node in the stable vapor deposition stage to construct a steady-state control temperature array. The structured combination generates the target temperature sequence for each independent channel of the multi-channel evaporation boat.

[0098] The system retrieves the updated voltage-temperature control curve, compensation drive voltage calibration vector, voltage increment correction coefficient, and dynamic temperature offset from the voltage-temperature compensation mapping data. For the target evaporation temperature setpoint and steady-state control temperature array of each process stage in the target temperature sequence, it uses nonlinear lookup table retrieval and high-order spline interpolation algorithm to calculate the base voltage value at the corresponding temperature point. The interpolation result is dynamically compensated and fine-tuned using the voltage increment correction coefficient and dynamic temperature offset. The base drive voltage amplitude sequence is calculated at each control node. Then, it is combined with the compensation drive voltage calibration vector to assemble a discrete time-domain control vector to generate the reference drive voltage control vector. The system then outputs the reference voltage trajectory data of each independent channel of the multi-channel evaporation boat.

[0099] The system extracts data on the reduction of the effective conductive cross-sectional area, the evolution of material porosity, the erosion depth of molten aluminum, and the sublimation volume loss from the physical loss data of the body. It establishes an equivalent resistance-thermal capacity network model and applies a dynamic feedforward compensation algorithm to analyze the dynamic hysteresis of the reference driving voltage control vector and the base driving voltage amplitude sequence under each control node in the reference voltage trajectory data under thermal response hysteresis. It calculates the thermal hysteresis feedforward compensation vector required to offset the thermal inertia hysteresis. At the same time, it calculates the increase in static resistance based on the reduction of the effective conductive cross-sectional area and the change in material porosity and derives the dynamic voltage correction offset component. The two are superimposed to complete the feedforward correction of the electrothermal response and solve the feedforward correction voltage data of each independent channel of the multi-channel evaporation boat.

[0100] The system introduces the physical array spacing and radiation heat transfer coefficient between the independent channels of the multi-channel evaporator to construct a spatial thermal radiation coupling matrix. The dynamic voltage correction offset component and thermal hysteresis feedforward compensation vector in the feedforward correction voltage data are substituted into the matrix decoupling operation. The cross-coupling decoupling algorithm is applied to find the temperature crosstalk caused by the superposition of thermal radiation of adjacent channels to a specific channel and to solve the cross radiation interference compensation component. Then, the interference effect is separated from the feedforward voltage to obtain the spatial decoupling driving voltage vector, thus completing the elimination of thermal interference between channels and generating spatial decoupling voltage data for each independent channel of the multi-channel evaporator.

[0101] The system inputs the spatial decoupling drive voltage vector from the spatial decoupling voltage data to the power safety control interface. It applies dynamic slope limiting and amplitude saturation limiting algorithms to truncate the amplitude based on the upper limit constraint of the power supply hardware output voltage to obtain the amplitude limiting drive voltage vector. At the same time, it applies differential limiting constraints to calculate the rate of change constraint voltage component based on the voltage mutation rate, and determines the channel safe power limiting value in combination with the power supply rated power limit. This completes the filtering and limitation of the physical safety boundary of the power supply hardware, and outputs the safe limiting voltage data of each independent channel of the multi-channel evaporation boat.

[0102] The system extracts the amplitude limiting drive voltage vector, rate-of-change constraint voltage component, and channel safety power limit value from the safety limiting voltage data. It applies PWM duty cycle reconstruction and waveform adaptive shaping algorithms to convert the amplitude limiting drive voltage vector into the base drive voltage amplitude of the power supply's underlying main circuit. It uses the rate-of-change constraint voltage component to fine-tune the rising edge of the drive waveform to generate a dynamic voltage correction offset. It introduces high-frequency ripple suppression technology to synthesize a high-frequency ripple compensation component to eliminate switching noise. Combined with the channel safety power limit value, it completes the adaptive reconstruction of the underlying drive control waveform, generating dynamic compensation voltage data for each independent channel of the multi-channel evaporator, including the base drive voltage amplitude, dynamic voltage correction offset, high-frequency ripple compensation component, and channel safety power limit value.

[0103] Step S106: Based on the dynamic compensation voltage data and the physical loss data of the body, perform dynamic drive updates and closed-loop control of heating power for each independent channel of the multi-channel evaporation boat to obtain a dense aluminum-coated film product.

[0104] Dense aluminized film is a high-quality metallized thin film product characterized by high crystallinity and excellent barrier properties, produced through closed-loop control during vacuum aluminizing. It mainly includes a uniform, dense microcrystalline layer, a nano-microscale pinhole-free barrier structure, a nominal thickness aluminum layer, a high-gloss surface microstructure, and excellent gas barrier performance.

[0105] The system loads the parsed dynamic compensation voltage data into the digital signal processor drive registers of each independent channel of the multi-channel evaporation boat. The processing kernel extracts the base drive voltage amplitude, dynamic voltage correction offset, and high-frequency ripple compensation component from the data packet, and uses a multi-channel signal vector superposition algorithm to perform real-time time-domain discrete synthesis to generate the dynamic drive voltage composite waveform for each independent channel. Combining the conductive effective cross-sectional area reduction data and material porosity evolution data from the physical loss data of the body, the upper limit of the rated power of each channel is calculated. The adaptive saturation limiting protection algorithm is invoked to strictly limit the peak value of the drive voltage after superposition of the high-frequency ripple compensation component within the channel's safe power limit, thus completing the update of the dynamic drive control parameters and the reconstruction of the safety boundary for each independent channel of the multi-channel evaporation boat.

[0106] The reconstructed driving parameters are synchronously injected into the independent channel pulse width modulation generator, driving the power switching devices to output high-precision driving signals at a specified frequency and duty cycle. High-frequency synchronous sampling technology is used to acquire the voltage and current feedback signals of the independent channel electrothermal entity in real time, and to discretely calculate the actual heating power of the current main heating zone. Combining the thermal resistance changes and power drift caused by the aluminum melt erosion depth data and sublimation volume loss data in the physical loss data of the body, the feedforward adaptive adjustment algorithm compares the calculated actual heating power with the target power corrected by the dynamic voltage correction offset. Using fast Kalman filtering and adaptive PID control operators, the output duty cycle of the pulse width modulation generator is finely adjusted online to achieve millisecond-level closed-loop control and disturbance suppression of heating power.

[0107] Closed-loop regulation of heating power eliminates temperature field fluctuations caused by melting phase transitions and material degradation in independent channel electrothermal entities, maintaining high superheat and stable heat flux output on the surface of the single conductive ceramic evaporation boat. Combined with the stable heating of the aluminum wire by multiple horizontally parallel sets of single conductive ceramic evaporation boats, the water-cooled electrode clamps and conductive connectors maintain stable heat sink boundaries and low-loss conductive paths, forming a highly uniform aluminum vapor flow with a constant evaporation rate within the vacuum chamber. The steady-state aluminum vapor flow undergoes controlled deposition and condensation nucleus growth on the substrate surface guided by a vacuum-mounted holding bracket, eliminating crystal coarsening and droplet splashing defects caused by heating fluctuations.

[0108] A highly uniform aluminum vapor flow completes nucleation and epitaxial growth at a constant atomic deposition rate on a high-speed substrate surface, forming a uniform, dense microcrystalline layer with tightly packed micrograins and no impurity phases. As the vapor deposition process continues, the nucleation layer self-assembles to fill micropores and interface defects, constructing a nanoscale, pinhole-free barrier structure that eliminates gas permeation paths. This layer accurately accumulates to the predetermined nominal thickness. Since the target thickness is initially set by the formulation parameters of the standard vapor deposition process data before processing begins, and the system uses closed-loop control to offset evaporation rate fluctuations caused by losses during actual processing, a constant aluminum atomic flow is ensured. This supports the precise accumulation of the aluminum layer to the predetermined thickness throughout the entire cycle. The control system's precise maintenance of vapor pressure and deposition rate throughout the process results in a smooth, high-gloss surface microstructure, achieving excellent gas barrier performance and successfully producing a dense aluminum-coated film with high crystallinity and excellent barrier properties.

[0109] Based on the above steps S101-S106, the heat attenuation caused by the loss of the evaporation boat is compensated in real time, a constant evaporation rate is dynamically maintained, crystallization defects caused by heat fluctuations are effectively eliminated, and the microstructure density and gas barrier performance of the aluminum-coated film are significantly improved.

[0110] Based on the above technical solution, optionally, dynamic driving updates and closed-loop control of heating power for each independent channel of the multi-channel evaporation boat are performed based on dynamic compensation voltage data and physical loss data of the vessel itself, to obtain a dense aluminum-coated film product, including: Based on dynamic compensation voltage data and physical loss data of the body, the reference heating power of each independent channel of the multi-channel evaporation boat is calculated to obtain the reference heating power data of each independent channel of the multi-channel evaporation boat. Evaporation rate monitoring data and film thickness distribution data are obtained during the vacuum aluminum plating process. Based on the reference heating power data, evaporation rate monitoring data and film thickness distribution data, the real-time evaporation state deviation of each independent channel of the multi-channel evaporation boat is calculated to obtain the closed-loop correction voltage data of each independent channel of the multi-channel evaporation boat. Based on the closed-loop corrected voltage data, the spatial thermal field decoupling and coordinated control calculation of the coating lateral thickness distribution between the independent channels of the multi-channel evaporation boat is performed to obtain the coordinated target voltage data of the independent channels of the multi-channel evaporation boat. Based on the collaborative target voltage data, the control commands are loaded and mapped to the power execution interfaces of each independent channel of the multi-channel evaporator to obtain the drive execution signals of each independent channel of the multi-channel evaporator. Based on the drive execution signal, the power supply hardware of each independent channel of the multi-channel evaporation boat is dynamically updated and the heat generation power output is quantitatively applied to obtain a dense aluminum-coated film product.

[0111] In this scheme, the reference heating power data is a physical quantity characterizing the initial heat power required for a specific independent channel single conductive ceramic evaporation boat to maintain its nominal evaporation response under the current electrothermal characteristics and physical loss conditions. It mainly includes the steady-state reference heating power value of the single conductive ceramic evaporation boat in that channel, the heat loss compensation power, and the electrothermal conversion correction coefficient.

[0112] Evaporation rate monitoring data is a real-time dynamic feedback state quantity characterizing the phase transformation and sublimation of aluminum liquid above an evaporation boat in a specific independent channel during vacuum metallization. It mainly includes the instantaneous aluminum vapor deposition rate, vapor density distribution value, and fluctuation of the phase transformation and sublimation rate.

[0113] Film thickness distribution data is a physical state quantity characterizing the thickness state and spatial uniformity of deposited aluminum film in different transverse regions of a substrate during vacuum metallization. It mainly includes the nominal film thickness value at each sampling point in the transverse direction, the film thickness range distribution, and the transverse thickness gradient deviation value.

[0114] Closed-loop correction voltage data characterizes the dynamic feedback adjustment voltage state required by a specific independent channel single-channel conductive ceramic evaporation boat to eliminate the deviation between the actual evaporation state and the target control state. It mainly includes the evaporation rate feedback correction voltage component, the film thickness deviation compensation voltage, and the closed-loop integral adjustment offset value.

[0115] The cooperative target voltage data is a comprehensive driving voltage control vector characterizing a specific independent channel in a multi-channel evaporation boat array after eliminating inter-channel thermal interference and meeting the requirement of uniform lateral coating thickness of the substrate. It mainly includes the spatially decoupled cooperative driving voltage vector, the lateral thickness coordination control voltage component, and the multi-channel power matching output value.

[0116] The drive execution signal is a low-level electrical signal control physical quantity that is mapped to the power drive interface and can be directly recognized and responded to by the power supply hardware. It mainly includes high-frequency PWM drive pulse waveform, voltage amplitude adjustment level signal, and channel drive enable control level.

[0117] The power supply hardware is the hardware entity in the control system that provides controllable high-power electrical drive and physical safety protection for a specific independent channel of conductive ceramic evaporation boat. It mainly includes an independent controllable power supply module, a high-frequency switching inverter circuit, a drive interface circuit, and an output sampling and protection module.

[0118] The system extracts dynamic compensation voltage data and physical loss data of each independent channel of the multi-channel evaporation boat. It uses electrothermal equivalent impedance modeling to analyze the reduction data of the effective cross-sectional area of ​​conductivity and the evolution data of material porosity. It superimposes the influence of aluminum melt erosion depth data and sublimation volume loss data on the electrothermal boundary characteristics of the channel. It combines the base driving voltage amplitude and dynamic voltage correction offset in the dynamic compensation voltage data to synthesize the basic excitation voltage. After high-frequency ripple compensation component filtering and channel safety power limit constraint, it solves the real-time heating power reference value of the evaporation boat. It calculates the steady-state reference heating power value under the nominal response. It uses the high-temperature thermal radiation energy balance equation to calculate the quantitative value of heat loss caused by the structural attenuation of the evaporation boat to obtain the heat loss compensation power. It calibrates the energy conversion efficiency based on the dynamic impedance change ratio to derive the electrothermal conversion correction coefficient. It then uses a structured combination to generate the reference heating power data of each independent channel of the multi-channel evaporation boat.

[0119] The system acquires real-time evaporation rate monitoring data and film thickness distribution data during the vacuum aluminizing process. It applies digital filtering and state estimation algorithms to perform time-domain smoothing and flux deviation calculation on the instantaneous aluminum vapor deposition rate, vapor density distribution, and phase change sublimation rate fluctuations in the evaporation rate monitoring data. A polynomial space fitting algorithm is used to perform two-dimensional distribution analysis on the nominal film thickness value, film thickness range distribution, and lateral thickness gradient deviation values ​​at each sampling point in the film thickness distribution data. The obtained flux deviation and film thickness deviation are substituted into the electrothermal-phase change response relationship constructed based on reference heating power data. The power deviation is converted into a voltage correction value using the steady-state reference heating power value, heat loss compensation power, and electrothermal conversion correction coefficient. A proportional-integral closed-loop control algorithm is applied to solve for the evaporation rate feedback correction voltage component required to eliminate the rate deviation and the film thickness deviation compensation voltage required to eliminate the film thickness range. The closed-loop integral adjustment offset value is calculated by performing time-domain discrete integration on the historical tracking error. Finally, the closed-loop correction voltage data for each independent channel of the multi-channel evaporation boat is comprehensively output.

[0120] The system extracts the evaporation rate feedback correction voltage component, film thickness deviation compensation voltage, and closed-loop integral adjustment offset value from the closed-loop correction voltage data and superimposes them in the time domain to obtain the single-channel uncompensated target voltage. A multi-channel spatial thermal field coupling matrix is ​​established by introducing the spatial array geometric spacing and radiative heat transfer parameters between the independent channels of the multi-channel evaporation boat. Matrix inversion and cross-decoupling algorithms are applied to eliminate temperature interference caused by the superposition of thermal radiation between adjacent channels, and the spatial decoupling collaborative driving voltage vector is calculated. For the target of substrate lateral thickness uniformity, a multivariate collaborative optimization algorithm is applied to calculate the control quantity ratio in the overlapping area of ​​evaporation flux between channels, deriving the lateral thickness coordination control voltage component. Combined with the power supply rated power constraint, the power balance allocation between channels is calculated to obtain the multi-channel power matching output value, and the collaborative target voltage data for each independent channel of the multi-channel evaporation boat is comprehensively generated.

[0121] The system extracts the spatially decoupled collaborative driving voltage vector, the lateral thickness coordinated control voltage component, and the multi-channel power matching output value from the collaborative target voltage data. It calculates the real-time target voltage amplitude of each independent channel by weighted linear combination of the spatially decoupled collaborative driving voltage vector and the lateral thickness coordinated control voltage component according to the multi-channel power matching output value. It applies digital pulse width modulation algorithm and dead-time compensation technology to convert the target voltage control quantity into a high-frequency PWM drive pulse waveform. Through digital-to-analog conversion and level smoothing technology, it converts the voltage amplitude command into a voltage amplitude adjustment level signal that the power supply can recognize. Combined with logic timing control, it generates high and low level logic control commands to obtain the channel drive enable control level, completes the loading and mapping of control commands to the power execution interface, and outputs the drive execution signals of each independent channel of the multi-channel evaporation boat.

[0122] The system directly inputs the high-frequency PWM drive pulse waveform, voltage amplitude adjustment level signal, and channel drive enable control level from the drive execution signal to the drive interface of the power supply hardware. This drives the high-frequency switching inverter circuit and the independent controllable power supply module inside the power supply hardware to operate the power switching transistors according to the specified duty cycle and amplitude. The operating parameters fed back by the output sampling and protection module are used for real-time safety boundary limits, realizing dynamic drive updates and quantitative output of heating power for each independent channel of the multi-channel evaporation boat. This precisely controls the electrothermal power of the conductive ceramic evaporation boat and the phase change rate of the aluminum wire, allowing the evaporated aluminum vapor to deposit on the substrate surface to form a uniform, dense microcrystalline layer and a nano-microscale pinhole-free barrier structure. This ensures that the coating reaches the nominal thickness of the aluminum layer and has a high-gloss surface microstructure, meeting the gas barrier performance indicators and producing a dense aluminum-coated film.

[0123] See appendix Figure 2 , Figure 2 This is a schematic flowchart of the second main step of a dynamic adaptive compensation method for heat attenuation in an evaporation boat according to an embodiment of the present invention. Figure 2 As shown, the dynamic adaptive compensation method for the heat attenuation of an evaporation boat in an embodiment of the present invention mainly includes the following steps S201-S209.

[0124] Step S201: During the vacuum aluminizing process, the operating voltage data and aluminum wire feed speed data of each independent channel of the multi-channel evaporation boat are acquired in real time. Based on the operating voltage data and aluminum wire feed speed data, the underlying hardware performs full-cycle dynamic time integration processing to obtain the cumulative operating load data of each independent channel of the multi-channel evaporation boat.

[0125] Step S202: Based on the cumulative operating load data, perform a dynamic quantitative evaluation of aluminum liquid corrosion and material sublimation effects to obtain the physical loss data of each independent channel of the multi-channel evaporation boat.

[0126] Step S203: Obtain the preset electrothermal physical model, input the physical loss data of the body into the preset electrothermal physical model, perform dynamic analysis of thermodynamic decay distribution, and obtain the heat generation capacity deficit data of each independent channel of the multi-channel evaporation boat.

[0127] Step S204: Obtain the initial voltage-temperature mapping data of each independent channel of the multi-channel evaporator. Based on the heat capacity deficit data, perform reverse analysis of the electrothermal conversion sensitivity of each independent channel of the multi-channel evaporator to obtain the electrothermal sensitivity coefficient of each independent channel of the multi-channel evaporator.

[0128] Step S205: Based on the electrothermal sensitivity coefficient and the initial voltage-temperature mapping data, calculate the slope correction increment and intercept offset increment of the mapping curve for each independent channel of the multi-channel evaporator to obtain the slope correction increment and intercept offset increment of each independent channel of the multi-channel evaporator.

[0129] Step S206: Based on the slope correction increment and the intercept offset increment, perform thermal radiation interference smoothing and hardware voltage upper limit constraint processing between the independent channels of the multi-channel evaporation boat to obtain the safety correction increment of each independent channel of the multi-channel evaporation boat.

[0130] Step S207: Based on the initial voltage-temperature mapping data and the safety correction increment, the initial voltage-temperature mapping curves of each independent channel of the multi-channel evaporator are reconstructed by segmented linear upward superposition to obtain the voltage-temperature compensation mapping data of each independent channel of the multi-channel evaporator.

[0131] Step S208: Obtain standard vapor deposition process data. Based on voltage and temperature compensation mapping data, standard vapor deposition process data, and physical loss data of the substrate, perform dynamic adaptive reconstruction of the underlying voltage to obtain dynamic compensation voltage data for each independent channel of the multi-channel evaporation boat.

[0132] Step S209: Based on the dynamic compensation voltage data and the physical loss data of the body, perform dynamic drive updates and closed-loop control of heating power for each independent channel of the multi-channel evaporation boat to obtain a dense aluminum-coated film product.

[0133] In this embodiment, the electrothermal sensitivity coefficient is a physical state quantity characterizing the intensity of the steady-state surface temperature response change caused by a unit driving voltage change in a specific independent channel single conductive ceramic evaporation boat under the current thermal performance degradation state. It mainly includes the voltage-temperature gain sensitivity component and the thermal response time-delay sensitivity component.

[0134] The slope correction increment is a control correction amount that characterizes the degree of dynamic gain correction of electrothermal conversion at different temperature nodes of the voltage-temperature mapping curve of a specific independent channel single conductive ceramic evaporation boat.

[0135] The intercept offset increment is a characterizing amount of substrate driving voltage bias correction applied to a specific independent channel single conductive ceramic evaporation boat at the reference operating temperature to compensate for the increase in static thermal resistance and cross-sectional shrinkage.

[0136] The safety correction increment characterizes the final safe voltage compensation correction that can be applied to a specific independent channel's single conductive ceramic evaporation boat while taking into account both adjacent channel thermal radiation interference and hardware overvoltage protection constraints. It mainly includes the safety slope correction component and the safety intercept offset component.

[0137] The initial voltage-temperature mapping curve is a physical and control curve reflecting the continuous reference relationship between the input operating voltage and the steady-state surface heating temperature of a specific independent channel single-channel conductive ceramic evaporation boat under the initial nominal state without loss. It mainly includes the nominal voltage-temperature response function trajectory and the initial electrothermal conversion control boundary.

[0138] The system extracts the effective thermal power output attenuation value, steady-state surface limit temperature drop, and thermal response time delay increment data from the data on the thermal capacity deficit. Based on the steady-state thermal balance relationship of each independent channel of the multi-channel evaporator, it uses the inverse solution technique of the system state equation and the electrothermal coupling Jacobian matrix inversion algorithm to discretize the response gradient of the surface temperature change under a specific driving voltage based on the effective thermal power output attenuation value and the steady-state surface limit temperature drop, and calculates the voltage-temperature gain sensitivity component. At the same time, the thermal response time delay increment data is substituted into the time-domain step response solution algorithm of the first-order inertial element to analyze the disturbance weight of the system thermal conduction attenuation on the response delay and obtain the thermal response time delay sensitivity component. Then, the voltage-temperature gain sensitivity component and the thermal response time delay sensitivity component are vector-fused to complete the inverse analysis of the electrothermal conversion sensitivity and output the electrothermal sensitivity coefficient of each independent channel of the multi-channel evaporator.

[0139] The system retrieves the nominal voltage-temperature response curve, initial electrothermal conversion coefficient, nominal thermal equilibrium temperature matrix, and reference driving voltage control parameters from the initial voltage-temperature mapping data. For each preset control temperature node of the nominal voltage-temperature response curve, it applies local differential linearization technology to solve the initial slope gradient at each node and introduces the voltage-temperature gain sensitivity component in the electrothermal sensitivity coefficient to adjust the gain scaling factor and calculate the slope correction increment of each independent channel of the multi-channel evaporator. At the same time, combined with the nominal thermal equilibrium temperature matrix and the reference driving voltage control parameters, it uses static bias mapping and first-order time delay compensation algorithm to calculate the voltage offset required to offset the increase in thermal resistance at the reference operating temperature point based on the thermal response time delay sensitivity component in the electrothermal sensitivity coefficient, and calculates the intercept offset increment of each independent channel of the multi-channel evaporator.

[0140] The system introduces the spatial geometric position and surface emissivity of each independent channel of the multi-channel evaporation boat to establish a multi-channel thermal radiation interference matrix. The slope correction increment and intercept offset increment are input into a spatial convolution smoothing filter. Thermal radiation interference smoothing is performed based on the thermal radiation coupling coefficient between adjacent channels to eliminate the crosstalk effect of adjacent channel thermal radiation superposition on the driving voltage correction of specific channels. The smoothed slope and intercept correction data are input into a dynamic amplitude limiter. Saturation constraints and hard cutoff processing are applied based on the maximum output voltage limit of the hardware power supply to eliminate the risk of over-limit driving. Thus, the safe slope correction component and safe intercept offset component of each independent channel of the multi-channel evaporation boat are calculated and structured and encapsulated to form the safe correction increment of each independent channel of the multi-channel evaporation boat.

[0141] The system extracts the initial voltage-temperature mapping curve and its built-in nominal voltage-temperature response function trajectory and initial electrothermal conversion control boundary from the initial voltage-temperature mapping data. The safety slope correction component and safety intercept offset component in the safety correction increment are applied to the initial voltage-temperature mapping curve. A piecewise linear mapping transformation and curve superposition reconstruction algorithm are used to stretch the slope steepness of the nominal voltage-temperature response function trajectory in each temperature range using the safety slope correction component. At the same time, the safety intercept offset component is used to perform an overall upward parallel translation of the base driving voltage to complete the piecewise linear upward superposition reconstruction. In this way, voltage-temperature compensation mapping data of each independent channel of the multi-channel evaporation boat is generated, which includes the compensation driving voltage calibration vector, voltage increment correction coefficient, dynamic temperature offset, and updated voltage-temperature control curve.

[0142] In this embodiment, temperature deviations caused by thermal decay are precisely compensated, driving voltage is dynamically corrected, and risks of thermal interference and overpressure are eliminated, thereby achieving high-precision closed-loop temperature control through multiple independent channels and ensuring uniform thickness and stable quality of the aluminum-coated film.

[0143] It should be noted that although the steps in the above embodiments are described in a specific order, those skilled in the art will understand that in order to achieve the effects of the present invention, different steps do not necessarily have to be executed in such an order. They can be executed simultaneously (in parallel) or in other orders, and these variations are all within the scope of protection of the present invention.

[0144] Furthermore, the present invention also provides a dynamic adaptive compensation system for the heat attenuation of the evaporation boat.

[0145] See appendix Figure 3 , Figure 3 This is a main structural block diagram of a dynamic adaptive compensation system for heat attenuation in an evaporation boat according to an embodiment of the present invention. Figure 3 As shown, it specifically includes: The load accumulation module 301 is used to acquire the operating voltage data and aluminum wire feed speed data of each independent channel of the multi-channel evaporation boat in real time during the vacuum aluminum plating process. Based on the operating voltage data and aluminum wire feed speed data, the underlying hardware performs full-cycle dynamic time integration processing to obtain the operating load accumulation data of each independent channel of the multi-channel evaporation boat. The loss assessment module 302 is used to perform dynamic quantitative assessment of aluminum liquid corrosion and material sublimation effect based on cumulative operating load data, and obtain the physical loss data of each independent channel of the multi-channel evaporation boat. The deficit analysis module 303 is used to obtain the preset electrothermal physical model, input the physical loss data of the body into the preset electrothermal physical model, perform dynamic analysis of thermodynamic decay distribution, and obtain the deficit data of the heating capacity of each independent channel of the multi-channel evaporation boat. The mapping compensation module 304 is used to acquire the initial voltage and temperature mapping data of each independent channel of the multi-channel evaporator. Based on the heat capacity deficit data and the initial voltage and temperature mapping data, it performs incremental linear upward correction to obtain the voltage and temperature compensation mapping data of each independent channel of the multi-channel evaporator. The voltage reconstruction module 305 is used to acquire standard vapor deposition process data, and based on voltage and temperature compensation mapping data, standard vapor deposition process data and physical loss data of the body, it performs dynamic adaptive reconstruction of the underlying voltage to obtain dynamic compensation voltage data of each independent channel of the multi-channel evaporation boat. The power regulation module 306 is used to dynamically drive and update the independent channels of the multi-channel evaporation boat and control the heating power in a closed loop based on dynamic compensation voltage data and physical loss data of the vessel, so as to obtain a dense aluminum-coated film product.

[0146] The dynamic adaptive compensation system for the heat attenuation of an evaporating boat provided in this application embodiment can achieve... Figure 1 The various processes implemented in the method implementation examples will not be described again here to avoid repetition.

[0147] Those skilled in the art will understand that all or part of the processes in the method of the above embodiment of the present invention can also be implemented by a computer program instructing related hardware. The computer program can be stored in a computer-readable storage medium, and when executed by a processor, it can implement the steps of the various method embodiments described above. The computer program includes computer program code, which can be in the form of source code, object code, executable file, or some intermediate form. The computer-readable storage medium can include any entity or device capable of carrying the computer program code, a medium, a USB flash drive, a portable hard drive, a magnetic disk, an optical disk, a computer memory, a read-only memory, a random access memory, an electrical carrier signal, a telecommunication signal, and a software distribution medium, etc. It should be noted that the content included in the computer-readable storage medium can be appropriately added or removed according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, the computer-readable storage medium does not include electrical carrier signals and telecommunication signals.

[0148] Furthermore, the present invention also provides an electronic device 400, including a processor 401, a memory 402, and a program or instructions stored in the memory 402 and executable on the processor 401. When the program or instructions are executed by the processor 401, they implement the various processes of the above-described embodiment of the dynamic adaptive compensation method for the heat attenuation of an evaporating boat and achieve the same technical effect. To avoid repetition, they will not be described again here.

[0149] It should be noted that the electronic devices in the embodiments of this application include the mobile electronic devices and non-mobile electronic devices described above.

[0150] Furthermore, the present invention also provides a computer-readable storage medium. In one embodiment of the computer-readable storage medium according to the present invention, the computer-readable storage medium can be configured to store a program for performing a dynamic adaptive compensation method for the heat attenuation of an evaporator boat according to the above-described method embodiments. This program can be loaded and run by a processor to implement the above-described dynamic adaptive compensation method for the heat attenuation of an evaporator boat. For ease of explanation, only the parts related to the embodiments of the present invention are shown; for specific technical details not disclosed, please refer to the method section of the embodiments of the present invention. The computer-readable storage medium can be a storage device comprising various electronic devices. Optionally, in the embodiments of the present invention, the computer-readable storage medium is a non-transitory computer-readable storage medium.

[0151] Furthermore, it should be understood that since the various modules are only provided to illustrate the functional units of the device of the present invention, the physical devices corresponding to these modules may be the processor itself, or a part of the processor's software, hardware, or a combination of software and hardware. Therefore, the number of modules shown in the figures is merely illustrative.

[0152] Those skilled in the art will understand that the various modules in the device can be adaptively split or combined. Such splitting or combining of specific modules will not cause the technical solution to deviate from the principles of the present invention; therefore, the technical solutions after splitting or combining will fall within the protection scope of the present invention.

[0153] The technical solution of the present invention has been described above with reference to the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after such changes or substitutions will all fall within the scope of protection of the present invention.

Claims

1. A dynamic adaptive compensation method for the heat attenuation of an evaporation boat, characterized in that, The method includes: During the vacuum aluminizing process, the operating voltage data and aluminum wire feed speed data of each independent channel of the multi-channel evaporation boat are acquired in real time. Based on the operating voltage data and aluminum wire feed speed data, the underlying hardware performs full-cycle dynamic time integration processing to obtain the cumulative operating load data of each independent channel of the multi-channel evaporation boat. Dynamic quantitative evaluation of aluminum liquid corrosion and material sublimation effect was conducted based on cumulative operating load data to obtain physical loss data of each independent channel of the multi-channel evaporation boat. Obtain the preset electrothermal physical model, input the physical loss data of the body into the preset electrothermal physical model, perform dynamic analysis of thermodynamic decay distribution, and obtain the heat capacity deficit data of each independent channel of the multi-channel evaporation boat. The initial voltage-temperature mapping data of each independent channel of the multi-channel evaporator is obtained. Based on the heat capacity deficit data and the initial voltage-temperature mapping data, incremental linear upward correction is performed to obtain the voltage-temperature compensation mapping data of each independent channel of the multi-channel evaporator. Obtain standard vapor deposition process data, and based on voltage and temperature compensation mapping data, standard vapor deposition process data, and physical loss data of the body, perform dynamic adaptive reconstruction of the underlying voltage to obtain dynamic compensation voltage data for each independent channel of the multi-channel evaporation boat. Based on dynamic compensation voltage data and physical loss data of the body, dynamic drive updates and closed-loop control of heating power of each independent channel of the multi-channel evaporation boat are carried out to obtain a dense aluminum-coated film product.

2. The dynamic adaptive compensation method for the heat attenuation of an evaporation boat according to claim 1, characterized in that, in, Based on operating voltage data and aluminum wire feed speed data, dynamic time integration processing is performed at the underlying hardware throughout the entire cycle to obtain the cumulative operating load data of each independent channel of the multi-channel evaporation boat, including: Based on the operating voltage data and aluminum wire feed speed data, real-time electrical power and wire feeding mass flux are coupled to obtain real-time instantaneous load data for each independent channel of the multi-channel evaporation boat. The sampling period data of the underlying hardware is obtained. Based on the real-time instantaneous load data and the sampling period data of the underlying hardware, dynamic time micro-element discretization processing is performed to obtain the micro-element incremental load data of each independent channel of the multi-channel evaporation boat. Based on the incremental load data of the micro-element, the underlying hardware registers are continuously accumulated throughout the entire cycle to obtain the cumulative operating load data of each independent channel of the multi-channel evaporation boat.

3. The dynamic adaptive compensation method for the heat attenuation of an evaporation boat according to claim 1, characterized in that, in, Dynamic quantitative evaluation of aluminum melt corrosion and material sublimation effects was conducted based on cumulative operating load data, yielding physical loss data for each independent channel of the multi-channel evaporation boat, including: Thermochemical stress distribution was analyzed based on cumulative operating load data to obtain cumulative thermochemical stress data for each independent channel of the multi-channel evaporation boat; The corrosion rate kinetic parameters of aluminum liquid in each independent channel of the multi-channel evaporation boat were obtained. Based on the accumulated thermochemical stress data and the corrosion rate kinetic parameters of aluminum liquid, the advance of the melting front was calculated to obtain the erosion depth data of aluminum liquid in each independent channel of the multi-channel evaporation boat. The sublimation vapor pressure parameters of the ceramic matrix in each independent channel of the multi-channel evaporator were obtained. Based on the accumulated thermochemical stress data and the sublimation vapor pressure parameters, the high-temperature volatilization quality was evaluated, and the sublimation volume loss data of the ceramic matrix in each independent channel of the multi-channel evaporator was obtained. Based on the data of aluminum melt erosion depth and sublimation volume loss, geometric contour degradation superposition is performed to obtain the effective cross-sectional area reduction data of each independent channel of the multi-channel evaporation boat. Based on the data of aluminum liquid erosion depth and sublimation volume loss, the co-evolution calculation of ceramic matrix porosity and internal gap expansion was carried out to obtain the material porosity evolution data of each independent channel of the multi-channel evaporation boat. The initial geometric structure parameter data of each independent channel of the multi-channel evaporation boat are obtained. Based on the effective cross-sectional area reduction data of the conductive material, the evolution data of the material porosity, and the initial geometric structure parameter data, a comprehensive mapping of three-dimensional deformation and the degradation of the conductive matrix of each independent channel of the multi-channel evaporation boat is performed to obtain the bulk physical loss data of each independent channel of the multi-channel evaporation boat.

4. The dynamic adaptive compensation method for the heat attenuation of an evaporation boat according to claim 1, characterized in that, in, The physical loss data of the bulk material is input into a preset electrothermal physical model for dynamic analysis of thermodynamic decay distribution, yielding the heat dissipation deficit data for each independent channel of the multi-channel evaporation boat, including: The physical loss data of the body is input into the preset electrothermal physical model, and the grid node parameters of impedance and thermal conductivity are dynamically mapped to obtain the resistance change distribution data and thermal conductivity decay distribution data of each independent channel of the multi-channel evaporation boat. Based on the resistance change distribution data and the thermal conductivity decay distribution data, the Joule heat generation and three-dimensional heat conduction field are dynamically calculated in the preset electrothermal physical model to obtain the real-time Joule thermal field distribution data of each independent channel of the multi-channel evaporation boat. Based on real-time Joule thermal field distribution data, the effective heat transfer from the grooves of each independent channel of the multi-channel evaporation boat to the aluminum wire for phase change evaporation is analyzed in the preset electrothermal physical model and combined with the built-in aluminum wire phase change heat flux parameters. The evaporation heat flux attenuation data of each independent channel of the multi-channel evaporation boat is obtained. Based on the evaporation heat flux decay data, the thermodynamic deficit field difference is calculated in the preset electrothermal physical model in combination with the built-in initial heating reference data, so as to obtain the heating capacity deficit data of each independent channel of the multi-channel evaporation boat.

5. The dynamic adaptive compensation method for the heat attenuation of an evaporation boat according to claim 1, characterized in that, in, Based on the heat dissipation capacity deficit data and the initial voltage-temperature mapping data, incremental linear upward correction is performed to obtain the voltage-temperature compensation mapping data for each independent channel of the multi-channel evaporation boat, including: Based on the data on the deficit in heating capacity, the electrothermal conversion sensitivity of each independent channel of the multi-channel evaporator is analyzed in reverse to obtain the electrothermal sensitivity coefficient of each independent channel of the multi-channel evaporator. Based on the electrothermal sensitivity coefficient and the initial voltage-temperature mapping data, the slope correction increment and intercept offset increment of the mapping curve of each independent channel of the multi-channel evaporator are calculated to obtain the slope correction increment and intercept offset increment of each independent channel of the multi-channel evaporator. Based on the slope correction increment and the intercept offset increment, thermal radiation interference smoothing and hardware voltage upper limit constraint processing are performed between the independent channels of the multi-channel evaporation boat to obtain the safety correction increment of each independent channel of the multi-channel evaporation boat. Based on the initial voltage-temperature mapping data and the safety correction increment, the initial voltage-temperature mapping curves of each independent channel of the multi-channel evaporator are reconstructed by piecewise linear upward superposition to obtain the voltage-temperature compensation mapping data of each independent channel of the multi-channel evaporator.

6. The dynamic adaptive compensation method for the heat attenuation of an evaporation boat according to claim 1, characterized in that, in, Based on voltage-temperature compensation mapping data, standard evaporation process data, and bulk physical loss data, dynamic adaptive reconstruction of the underlying voltage is performed to obtain dynamic compensation voltage data for each independent channel of the multi-channel evaporation boat, including: The target parameters of the process were extracted from the standard vapor deposition process data to obtain the target temperature sequence of each independent channel of the multi-channel evaporation boat. Based on the target temperature sequence and voltage-temperature compensation mapping data, the mapping calculation from the target process temperature to the reference control voltage of each independent channel of the multi-channel evaporator is performed to obtain the reference voltage trajectory data of each independent channel of the multi-channel evaporator. Based on the reference voltage trajectory data and the physical loss data of the body, dynamic feedforward compensation of thermal inertia hysteresis and electrothermal response of each independent channel of the multi-channel evaporation boat is performed to obtain the feedforward correction voltage data of each independent channel of the multi-channel evaporation boat. Based on the feedforward correction voltage data, the decoupling matrix operation is performed on the thermal radiation cross-interference between the independent channels of the multi-channel evaporation boat to obtain the spatial decoupling voltage data of the independent channels of the multi-channel evaporation boat. Based on spatially decoupled voltage data, safety limiting filtering of the upper limit of power supply hardware voltage output and voltage change rate is performed to obtain safety limiting voltage data for each independent channel of the multi-channel evaporation boat. Based on the safety-limited voltage data, adaptive reconstruction of the power supply's underlying drive control waveform is performed to obtain the dynamic compensation voltage data for each independent channel of the multi-channel evaporation boat.

7. The dynamic adaptive compensation method for the heat attenuation of an evaporation boat according to claim 1, characterized in that, in, Based on dynamic compensation voltage data and physical loss data of the substrate, dynamic drive updates and closed-loop control of heating power are performed on each independent channel of the multi-channel evaporation boat to obtain a dense aluminum-coated film, including: Based on dynamic compensation voltage data and physical loss data of the body, the reference heating power of each independent channel of the multi-channel evaporation boat is calculated to obtain the reference heating power data of each independent channel of the multi-channel evaporation boat. Evaporation rate monitoring data and film thickness distribution data are obtained during the vacuum aluminum plating process. Based on the reference heating power data, evaporation rate monitoring data and film thickness distribution data, the real-time evaporation state deviation of each independent channel of the multi-channel evaporation boat is calculated to obtain the closed-loop correction voltage data of each independent channel of the multi-channel evaporation boat. Based on the closed-loop corrected voltage data, the spatial thermal field decoupling and coordinated control calculation of the coating lateral thickness distribution between the independent channels of the multi-channel evaporation boat is performed to obtain the coordinated target voltage data of the independent channels of the multi-channel evaporation boat. Based on the collaborative target voltage data, the control commands are loaded and mapped to the power execution interfaces of each independent channel of the multi-channel evaporator to obtain the drive execution signals of each independent channel of the multi-channel evaporator. Based on the drive execution signal, the power supply hardware of each independent channel of the multi-channel evaporation boat is dynamically updated and the heat generation power output is quantitatively applied to obtain a dense aluminum-coated film product.

8. A dynamic adaptive compensation system for the heat attenuation of an evaporation boat, characterized in that, The system includes: The load accumulation module is used to acquire the operating voltage data and aluminum wire feed speed data of each independent channel of the multi-channel evaporation boat in real time during the vacuum aluminizing process. Based on the operating voltage data and aluminum wire feed speed data, the underlying hardware performs full-cycle dynamic time integration processing to obtain the operating load accumulation data of each independent channel of the multi-channel evaporation boat. The loss assessment module is used to dynamically and quantitatively assess the corrosion of aluminum liquid and the sublimation effect of materials based on the cumulative data of operating load, and obtain the physical loss data of each independent channel of the multi-channel evaporation boat. The deficit analysis module is used to obtain the preset electrothermal physical model, input the physical loss data of the body into the preset electrothermal physical model, perform dynamic analysis of thermodynamic decay distribution, and obtain the deficit data of the heating capacity of each independent channel of the multi-channel evaporation boat. The mapping compensation module is used to obtain the initial voltage and temperature mapping data of each independent channel of the multi-channel evaporator. Based on the heat capacity deficit data and the initial voltage and temperature mapping data, it performs incremental linear upward correction to obtain the voltage and temperature compensation mapping data of each independent channel of the multi-channel evaporator. The voltage reconstruction module is used to acquire standard vapor deposition process data. Based on voltage-temperature compensation mapping data, standard vapor deposition process data, and physical loss data of the body, it performs dynamic adaptive reconstruction of the underlying voltage to obtain dynamic compensation voltage data for each independent channel of the multi-channel evaporation boat. The power regulation module is used to dynamically drive and update the independent channels of the multi-channel evaporation boat and control the heating power in a closed loop based on dynamic compensation voltage data and physical loss data of the vessel, so as to obtain a dense aluminum-coated film product.

9. An electronic device comprising a processor, a memory, and a program or instructions stored in the memory and executable on the processor, characterized in that, The program or instructions are adapted to be loaded and run by the processor to perform a dynamic adaptive compensation method for heat attenuation of an evaporation boat according to any one of claims 1 to 7.

10. A computer-readable storage medium storing a plurality of program codes, characterized in that, The program code is adapted to be loaded and run by a processor to perform a dynamic adaptive compensation method for the heat attenuation of an evaporation boat according to any one of claims 1 to 7.

Images