A standard concentration vapor calibration method and system for vaporizing hydrogen peroxide sensors

Abstract

The application discloses a standard concentration vapor calibration method and system for a vaporized hydrogen peroxide sensor. The actual liquid phase concentration of liquid hydrogen peroxide is obtained, the gas-liquid ratio is determined according to the target gas phase concentration, and hydrogen peroxide vapor is generated. After temperature control and delivery, it is distributed to the metering path and the reference path. The actual gas phase concentration of the reference path is detected by optical absorption, and the gas-liquid ratio is corrected. The concentration information of different spatial positions and continuous time periods of the metering path is obtained. After the concentration field uniformity and concentration time stability meet the requirements, the actual gas phase concentration is used as the calibration reference to determine the sensor calibration parameters. According to the effective historical working condition data, the gas distribution model is corrected to determine the subsequent gas-liquid ratio parameters. The application can improve the accuracy and stability of standard concentration vapor control and sensor calibration.

Description

Technical Field

[0001] This invention relates to the field of sensor calibration, specifically to a standard concentration steam calibration method and system for a vaporized hydrogen peroxide sensor. Background Technology

[0002] Vaporized hydrogen peroxide sensors are used to detect the concentration of hydrogen peroxide vapor in the environment and are widely used in scenarios requiring monitoring of vaporized hydrogen peroxide concentration, such as pharmaceutical production, biosafety laboratories, and medical device sterilization. To ensure the accuracy of the sensor's detection results, it needs to be calibrated during sensor production, factory inspection, and periodic use.

[0003] Existing calibration methods for vaporized hydrogen peroxide sensors include using a reference sensor for comparison, and determining the gas phase concentration based on the liquid hydrogen peroxide concentration and the gas-liquid equilibrium relationship, and then calibrating the sensor to be calibrated accordingly. However, the reference sensor itself suffers from issues of accuracy traceability and differences in response characteristics; and when calculating the gas phase concentration based on the liquid phase concentration, the calibration results are easily affected by factors such as changes in the actual liquid hydrogen peroxide concentration, temperature conditions, and gas-liquid equilibrium conditions. In particular, the concentration of liquid hydrogen peroxide may change during storage and use, causing a deviation between the gas phase concentration determined according to the preset liquid phase concentration or fixed gas-liquid correspondence and the actual hydrogen peroxide vapor concentration produced.

[0004] For calibration processes using standard concentration steam as a metrological reference, simply generating hydrogen peroxide vapor or obtaining the gas phase concentration at a specific location does not guarantee that this gas phase concentration can be directly used as an effective calibration reference for the sensor under test. The actual concentration of hydrogen peroxide vapor may change depending on the liquid phase state, vaporization state, and transport conditions during its preparation, vaporization, and delivery. Furthermore, concentration gradients or localized concentration differences may exist between different spatial locations, potentially causing discrepancies between the gas phase concentration obtained at the reference location and the actual vapor concentration encountered by the sensor under test. The current solution further verifies the spatial concentration state within the metrological path.

[0005] Hydrogen peroxide vapor typically undergoes a concentration change process after proportioning adjustment, vaporization, and transportation. Even if the concentration fluctuation is small in a short period, the overall concentration may still be in a state of continuous increase or decrease. If the vapor is judged to be stable based solely on the instantaneous concentration or fluctuations over a local time period, vapor that has not yet truly reached a steady state may be included in sensor calibration, thus affecting the repeatability of the calibration results. Simultaneously, there may be a time difference between the gas phase concentration change in the reference path and the corresponding output generated by the sensor to be calibrated. If the two are directly compared at the same acquisition time, the sensor output may mismatch with its actual gas phase concentration state. Vaporized hydrogen peroxide sensors may exhibit different response states during different concentration changes. Calibration based solely on a single concentration change direction makes it difficult to further distinguish between the sensor's own concentration measurement deviation and the dynamic response deviation caused by the concentration change process. Furthermore, for the generation of standard concentration vapor, the response relationship between different liquid phase concentrations, target gas phase concentrations, and gas-liquid ratios under different operating conditions and the actual gas phase concentration may differ. Using a fixed gas distribution relationship makes it difficult to fully utilize the actual gas phase concentration information obtained during previous calibration processes to make targeted corrections to subsequent gas distribution processes.

[0006] Therefore, in order to solve the problems of existing technologies, such as the difficulty in continuously and accurately controlling the actual concentration of standard concentration steam, the difficulty in effectively confirming the spatial uniformity and temporal stability of the calibration gas field, the possible response mismatch between the reference gas phase concentration and the sensor output, and the difficulty in continuously adapting the gas distribution relationship to the actual concentration response under different calibration conditions, this invention proposes a standard concentration steam calibration method and system for vaporized hydrogen peroxide sensors. Summary of the Invention

[0007] To address the shortcomings of existing technologies, the present invention aims to provide a standard concentration steam calibration method and system for vaporized hydrogen peroxide sensors.

[0008] To achieve the above objectives, the present invention provides the following technical solution: A standard concentration vapor calibration method for a vaporized hydrogen peroxide sensor includes: Obtain the actual liquid phase concentration of liquid hydrogen peroxide, determine the ratio parameter of carrier gas to liquid hydrogen peroxide based on the target gas phase concentration and the actual liquid phase concentration, and adjust the carrier gas flow rate and liquid hydrogen peroxide flow rate according to the ratio parameter. The regulated liquid hydrogen peroxide is vaporized and mixed with carrier gas to generate hydrogen peroxide vapor. The hydrogen peroxide vapor is transported under temperature control, and the hydrogen peroxide vapor from the same source is distributed to the metering path and the reference path. The actual gas concentration in the reference path is directly obtained by a gas phase concentration detection method based on the optical absorption principle. The ratio parameter is corrected according to the deviation between the actual gas phase concentration and the target gas phase concentration, and the hydrogen peroxide vapor concentration is adjusted. The concentration information at different spatial locations within the metering path is obtained and the concentration field uniformity is determined. The gas phase concentration information within a continuous time period is obtained and the concentration time stability is determined. When the concentration field uniformity and the concentration time stability are both within the corresponding preset range, the output value of the vaporized hydrogen peroxide sensor to be calibrated and the actual gas phase concentration are obtained simultaneously. The actual gas phase concentration is used as the calibration benchmark to determine the calibration parameters of the vaporized hydrogen peroxide sensor to be calibrated. The gas mixing model for the specified ratio parameters is determined based on historical operating condition data, and the gas-liquid ratio parameters are determined through the corrected gas mixing model.

[0009] As a further improvement of the present invention, obtaining the output value of the vaporized hydrogen peroxide sensor to be calibrated and the actual gas phase concentration includes, during the process of correcting the ratio parameters, continuously acquiring the actual gas phase concentration change information of the reference path and the output change information of the vaporized hydrogen peroxide sensor to be calibrated. The transition process of hydrogen peroxide vapor concentration caused by the change in ratio parameters is used as a time reference. The time correspondence between the actual gas phase concentration change time sequence and the response time sequence of the vaporized hydrogen peroxide sensor to be calibrated is determined. After the concentration field uniformity and concentration time stability meet the corresponding preset range, an effective calibration data interval is determined according to the time correspondence. The calibration parameters are then determined based on the corresponding actual gas phase concentration and sensor output value within the effective calibration data interval. Through the above settings, using the hydrogen peroxide vapor concentration transition process formed by the ratio parameter adjustment as a common time reference between the actual gas phase concentration and the output of the vaporized hydrogen peroxide sensor to be calibrated, the time difference between the concentration change of hydrogen peroxide vapor in the reference path and the corresponding response of the sensor to be calibrated can be identified, avoiding incorrect correspondence between different vapor concentration states due to directly comparing the two types of data at the same acquisition time. After the concentration field uniformity and concentration-time stability meet the calibration requirements, the effective calibration data interval is selected according to the time correspondence, so that the sensor output involved in the determination of calibration parameters can match the actual gaseous hydrogen peroxide concentration of its response. This reduces the dynamic deviation of the calibration results caused by the steam transmission process and sensor response lag, improves the accuracy of the standard concentration steam quantity value transmitted to the sensor to be calibrated, and provides a reliable data foundation for the subsequent acquisition of calibration parameters under different target gaseous concentrations, identification of dynamic response deviations, and formation of effective historical operating condition data.

[0010] As a further improvement of the present invention, the determination of the concentration field uniformity includes: acquiring concentration information of hydrogen peroxide vapor at different spatial locations along the flow direction of the metering path; determining the spatial distribution state of the concentration field based on the concentration change relationship between each spatial location; adjusting the delivery state and / or temperature control state of hydrogen peroxide vapor when the concentration changes continuously along the flow direction; adjusting the flow state of hydrogen peroxide vapor within the metering path when the concentration at a local spatial location deviates from that at an adjacent spatial location; re-acquiring the concentration information at different spatial locations after adjustment until the concentration field meets the preset uniformity requirements; being able to identify the continuous concentration gradient and local concentration anomalies formed by hydrogen peroxide vapor during delivery based on the concentration change relationship at different spatial locations within the metering path; and adjusting the steam delivery state, temperature control state, or flow state within the metering path for different spatial distribution states, thereby avoiding the use of concentration detection results at a single location to represent the actual concentration state within the entire metering path. Since the calibration result of the vaporized hydrogen peroxide sensor to be calibrated depends on the actual concentration of hydrogen peroxide vapor it comes into contact with, spatial concentration differences within the metering path can cause a deviation between the reference concentration and the actual measured concentration of the sensor to be calibrated, even if the actual gas phase concentration in the reference path reaches the target range. Therefore, by identifying the spatial distribution of the concentration field and cyclically adjusting it to meet the preset uniformity requirements, the consistency of the transmission of the measured concentration from the reference path to the metering path can be improved. This ensures that the sensor to be calibrated is in a representative standard concentration vapor environment and provides a reliable spatial concentration basis for subsequent concentration-time stability assessment and effective correspondence between the sensor output value and the actual gas phase concentration.

[0011] As a further improvement of the present invention, acquiring gas phase concentration information and determining concentration temporal stability over a continuous period includes: after correcting the ratio parameters, continuously acquiring gas phase concentration change information, determining multiple continuous observation intervals in chronological order, determining the concentration fluctuation state within each observation interval and the concentration change trend between adjacent observation intervals, determining that the hydrogen peroxide vapor has reached a stable concentration state for sensor calibration when the concentration fluctuation within each observation interval meets a preset stability requirement and there is no continuous unidirectional concentration shift between adjacent observation intervals, and determining that the hydrogen peroxide vapor has reached a stable concentration state for sensor calibration when the concentration fluctuation meets the preset stability requirement but there is a continuous unidirectional concentration shift, continuing concentration monitoring and ratio parameter correction until the continuous unidirectional concentration shift is eliminated. Through the above settings, the temporal stability of hydrogen peroxide vapor can be determined simultaneously from both short-term fluctuation states and the overall change trend over a continuous period, avoiding the misjudgment of a vapor state that is still in a continuous rising or falling process as a stable state based solely on small concentration fluctuations within a local time range. Because vaporized hydrogen peroxide vapor undergoes a dynamic response process after proportioning adjustment, vaporization, and temperature-controlled delivery, even if the concentration change within a single observation interval is small, there may still be a continuous concentration drift in the same direction between adjacent observation intervals. Therefore, by continuously judging the concentration change trends of adjacent observation intervals, calibration gas states that have not yet truly reached a steady state can be identified and eliminated. Furthermore, proceeding to subsequent calibration steps only after both local fluctuations and overall drift meet the stability requirements ensures that the actual gas phase concentration used for comparison with the vaporized hydrogen peroxide sensor to be calibrated has a continuously stable time reference. This reduces the errors caused by slow concentration drift in sensor output matching and calibration parameter determination, and provides a reliable time stability basis for subsequent gas phase concentration deviation feedback correction and the determination of effective calibration data intervals.

[0012] As a further improvement of the present invention, the correction of the proportioning parameter includes: continuously acquiring the gas phase concentration deviation within multiple feedback cycles; determining the concentration response state corresponding to the previous proportioning parameter correction based on the changing direction of the gas phase concentration deviation in adjacent feedback cycles; when the gas phase concentration deviation continues to change along the direction before correction after the proportioning parameter correction, maintaining the current proportioning parameter and continuing to acquire the actual gas phase concentration until the gas phase concentration deviation produces a change corresponding to the proportioning parameter correction; when the gas phase concentration deviation continuously decreases and approaches the calibration range corresponding to the target gas phase concentration, reducing the correction degree of subsequent proportioning parameters; when the gas phase concentration deviation exceeds the calibration range and reverses direction, correcting the proportioning parameter in the opposite direction based on the reversed deviation direction until the actual gas phase concentration stabilizes within the calibration range. Through the above settings, the changing direction of the gas phase concentration deviation within continuous feedback cycles can be used to determine whether the previous proportioning parameter correction has already produced a corresponding response in the actual gas phase concentration, avoiding excessive adjustment of the actual gas phase concentration due to continuous addition of proportioning corrections while hydrogen peroxide vapor is still in the vaporization, transportation, or concentration response transition stage because the current deviation has not yet been eliminated. Reducing the subsequent correction level as the gas phase concentration gradually approaches the calibration range corresponding to the target gas phase concentration can minimize concentration oscillations after approaching the target state. When the actual gas phase concentration exceeds the calibration range and causes the deviation direction to reverse, a reverse correction is performed based on the new deviation direction, enabling the gas phase concentration to gradually converge and stabilize within the target calibration range. This matches the correction process of the proportioning parameters with the actual concentration response process of hydrogen peroxide vapor, improving the convergence and stability of the standard concentration vapor generation process. It also provides a stable gas phase concentration basis for subsequent concentration-time stability determination, effective calibration data range determination, and accurate acquisition of calibration parameters for the vaporized hydrogen peroxide sensor to be calibrated.

[0013] As a further improvement of the present invention, the acquisition of the calibration parameters includes: forming standard concentration vapors that meet the requirements of concentration field uniformity and concentration-time stability at multiple target gas phase concentrations; acquiring first calibration data in ascending order of target gas phase concentration and second calibration data in descending order of target gas phase concentration; comparing the outputs of the vaporized hydrogen peroxide sensor to be calibrated at the corresponding actual gas phase concentrations in the first and second calibration data to determine the response deviation state of the sensor output as the concentration changes; distinguishing between the concentration measurement deviation of the sensor and the dynamic response deviation caused by the concentration change process based on the correspondence between the actual gas phase concentration and the sensor output at each target gas phase concentration and the response deviation state; and determining the calibration parameters accordingly. Through the above settings, the output response of the vaporized hydrogen peroxide sensor to be calibrated can be acquired under multiple actual gas phase concentration conditions. By comparing the corresponding increase and decrease of the target gas phase concentration, the response differences caused by different directions of concentration change at the same or corresponding actual gas phase concentrations can be identified, thereby avoiding the inclusion of the sensor's own dynamic response characteristics in the concentration measurement error due to relying solely on a single direction of concentration change to form a calibration relationship. By jointly analyzing the response deviations of the sensor during different concentration changes and their correspondence with the actual gas phase concentration, it is possible to distinguish between concentration measurement deviations caused by the sensor's static measurement accuracy and dynamic response deviations caused by concentration increases and decreases. This allows the obtained calibration parameters to not only reflect the sensor's quantitative deviation from standard concentration vapor but also characterize its response consistency under different concentration changes. Consequently, the adaptability of the calibration parameters to the actual operating conditions of the vaporized hydrogen peroxide sensor can be improved, the impact of dynamic response characteristics on subsequent concentration measurement results can be reduced, and a reliable foundation can be provided for establishing more accurate sensor calibration relationships and generating representative historical calibration data.

[0014] As a further improvement of the present invention, the liquid phase concentration of liquid hydrogen peroxide is continuously acquired, and the concentration change trend of liquid hydrogen peroxide is determined based on the changes in liquid phase concentration at different time periods. Based on the concentration change trend and the process state of liquid hydrogen peroxide from concentration acquisition to participation in vaporization, the expected liquid phase concentration corresponding to its participation in subsequent steam generation is determined, and the gas-liquid ratio parameter is determined by replacing the current actual liquid phase concentration with the expected liquid phase concentration. Based on the actual gas phase concentration of hydrogen peroxide vapor generated according to the gas-liquid ratio parameter, the feedforward compensation state corresponding to the expected liquid phase concentration is determined, and the ratio parameter corresponding to the subsequent liquid phase concentration change trend is corrected based on the feedforward compensation state. Through the above settings, before liquid hydrogen peroxide actually participates in steam generation, based on its continuous concentration change trend and the process state from concentration acquisition to participation in vaporization, a liquid phase concentration state closer to the actual vaporization moment can be predetermined, avoiding the lag error in the initial ratio parameter caused by the continued concentration change of liquid hydrogen peroxide during subsequent transportation and waiting when directly using the current detected concentration to determine the gas-liquid ratio. Determining the gas-liquid ratio parameters based on the expected liquid phase concentration allows for compensation of gas phase concentration deviations caused by changes in liquid phase concentration before the generation of standard concentration steam, reducing the initial deviation between the actual and target gas phase concentrations. Simultaneously, the actual gas phase concentration of the generated steam is used to verify the feedforward compensation results and correct subsequent ratio parameters, establishing a continuous correction relationship between the predicted liquid phase concentration trend and the measured gas phase feedback. This improves the adaptability of the gas-liquid ratio parameters to the actual concentration of liquid hydrogen peroxide, shortens the adjustment process required for the standard concentration steam to enter the target calibration range, and reduces repeated adjustments caused by excessive initial ratio deviations during subsequent gas phase feedback correction. This provides a more stable basis for standard steam generation, enabling concentration-time stability determination, effective calibration data acquisition, and subsequent gas mixing model correction.

[0015] As a further improvement of the present invention, the correction of the gas distribution model includes: determining multiple candidate historical operating conditions from the effective historical operating condition data based on the current liquid phase concentration, the target gas phase concentration, and the operating conditions; selecting target historical operating conditions with a corresponding concentration response relationship to the current calibration process based on the change in actual gas phase concentration after adjusting the proportioning parameters in each candidate historical operating condition; correcting the local gas distribution relationship corresponding to the current calibration state based on the correspondence between the proportioning parameters and the actual gas phase concentration deviation in the target historical operating conditions, while keeping the gas distribution relationships corresponding to other calibration states unchanged; determining subsequent gas-liquid proportioning parameters based on the corrected local gas distribution relationship; and updating the correction result of the local gas distribution relationship based on the subsequent actual gas phase concentration. Through the above settings, effective operating conditions with similar concentration response characteristics to the current standard concentration steam generation process can be selected from historical calibration data based on the current liquid phase concentration, the target gas phase concentration, and the operating conditions, avoiding the direct mixing of gas distribution rules formed in different concentration ranges or under different operating conditions in the current calibration process. Because the vaporization, transport, and gas phase concentration response of liquid hydrogen peroxide may differ under different concentration states and operating conditions, uniformly correcting the overall gas distribution model using all historical operating conditions could easily cause the correction result obtained under one operating condition to interfere with other originally stable gas distribution relationships. By correcting only the local gas distribution relationship corresponding to the current calibration state while keeping the gas distribution relationships corresponding to other calibration states unchanged, the specificity of the model correction can be improved, and the mutual influence between different calibration operating conditions can be reduced. The actual gas phase concentration generated after correction is used to continuously verify and update the local gas distribution relationship, allowing the historical operating condition correction results to gradually converge with the actual standard steam generation state. This improves the adaptability and stability of the gas-liquid ratio parameters under different target gas phase concentrations and different operating conditions, and provides a more reliable gas distribution basis for the rapid generation of standard concentration steam, gas phase concentration feedback correction, and repeated calibration of the vaporized hydrogen peroxide sensor to be calibrated.

[0016] A standard concentration vapor calibration system for a vaporized hydrogen peroxide sensor includes: The liquid phase concentration acquisition unit is used to acquire the actual liquid phase concentration of liquid hydrogen peroxide; The gas-liquid preparation unit is connected to the carrier gas flow rate adjustment unit and the liquid hydrogen peroxide flow rate adjustment unit, respectively. It is used to determine the gas-liquid ratio parameters according to the target gas phase concentration and the actual liquid phase concentration, and to adjust the carrier gas flow rate and the liquid hydrogen peroxide flow rate according to the gas-liquid ratio parameters. A steam generation and temperature-controlled delivery unit is used to vaporize the regulated liquid hydrogen peroxide and mix it with a carrier gas to form hydrogen peroxide vapor, and to deliver the hydrogen peroxide vapor at a controlled temperature. A dual-path distribution unit is located downstream of the steam generation and temperature control delivery unit, used to deliver hydrogen peroxide vapor from the same source to the metering path and the reference path respectively. The metering path is connected to the sensor metering cavity for accommodating the vaporized hydrogen peroxide sensor to be calibrated. A gas phase concentration reference measurement unit is set in the reference path and obtains the actual gas phase concentration based on the optical absorption principle. The gas phase concentration reference measurement unit is communicatively connected to the gas-liquid preparation unit to correct the gas-liquid ratio parameter according to the deviation between the actual gas phase concentration and the target gas phase concentration. The concentration field verification unit is used to acquire gas phase concentration information at different spatial locations and in continuous time periods within the metering path, and to determine the concentration field uniformity and concentration time stability respectively. The metrology calibration unit is used to simultaneously acquire the output value of the vaporized hydrogen peroxide sensor to be calibrated and the actual gas phase concentration when the concentration field uniformity and concentration time stability meet the corresponding preset range, and determine the calibration parameters of the vaporized hydrogen peroxide sensor to be calibrated according to the correspondence between the two. The gas distribution model correction unit is used to correct the gas distribution model used to determine the gas-liquid ratio parameters based on the historical operating condition data generated during the calibration process, and to provide the corrected gas distribution model to the gas-liquid preparation unit to determine the gas-liquid ratio parameters in the subsequent standard concentration steam generation process.

[0017] The beneficial effects of this invention are as follows: By combining liquid phase concentration compensation with actual gas phase concentration feedback, this invention improves the accuracy and stability of the standard concentration hydrogen peroxide vapor generation process, and reduces the impact of liquid phase concentration changes and vaporization and transportation processes on the target gas phase concentration. By verifying the spatial uniformity and temporal stability of the calibration gas field, it avoids the participation of local concentration anomalies and pseudo-steady-state vapor in calibration, thus improving the effectiveness of the actual gas phase concentration as a metrological benchmark. Furthermore, this invention establishes a temporal correspondence between the actual gas phase concentration and the sensor output, and determines calibration parameters by combining the response state under different concentration change directions, reducing calibration deviations caused by transmission delay and dynamic response characteristics. Through the dynamic calibration of this invention, the accuracy, stability, and reusability of the vaporized hydrogen peroxide sensor calibration results are improved. Attached Figure Description

[0018] Figure 1 This is a flowchart of a standard concentration steam calibration method for a vaporized hydrogen peroxide sensor according to an embodiment of the present invention.

[0019] Figure 2 This is a schematic diagram of the structure and connection of the calibration system according to an embodiment of the present invention.

[0020] Figure 3 This is a schematic diagram of the gas-liquid ratio and gas phase concentration feedback adjustment in an embodiment of the present invention.

[0021] Figure 4 This is a schematic diagram of the same-source dual-path allocation and metering path concentration field acquisition in an embodiment of the present invention.

[0022] Figure 5 This is a schematic diagram of the gas phase concentration reference measurement unit according to an embodiment of the present invention. Detailed Implementation

[0023] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Identical components are indicated by the same reference numerals. The terms "front," "rear," "left," "right," "upper," and "lower" used in the following description refer to directions in the drawings, and the terms "bottom surface," "top surface," "inner," and "outer" refer to directions toward or away from the geometric center of a specific component, respectively.

[0024] The first embodiment of this invention proposes a standard concentration vapor calibration method for a vaporized hydrogen peroxide sensor, such as... Figure 1 As shown, the process includes the following steps.

[0025] Obtain the actual liquid phase concentration of liquid hydrogen peroxide, determine the ratio parameter of carrier gas to liquid hydrogen peroxide based on the target gas phase concentration and the actual liquid phase concentration, and adjust the carrier gas flow rate and liquid hydrogen peroxide flow rate according to the ratio parameter.

[0026] Specifically, before calibration begins, the current target gas phase concentration is determined based on the range of the vaporized hydrogen peroxide sensor to be calibrated and the concentration point to be calibrated. The actual liquid phase concentration is then obtained before the liquid hydrogen peroxide participates in vaporization. This actual liquid phase concentration is the concentration of the liquid hydrogen peroxide actually measured, not the initial concentration indicated on the storage container. The liquid phase concentration can be obtained using online refractive index detection, or by methods based on density, ultrasonic propagation characteristics, conductivity, or other methods that can reflect the concentration of liquid hydrogen peroxide.

[0027] After obtaining the actual liquid phase concentration, the hydrogen peroxide supply state required for the current standard steam generation process is determined based on the target gas phase concentration. The liquid hydrogen peroxide supply rate and its corresponding carrier gas supply rate are then determined in conjunction with the actual liquid phase concentration, thus forming the gas-liquid ratio parameters. These ratio parameters characterize the correspondence between the carrier gas supply and the liquid hydrogen peroxide supply, and may include control values ​​for adjusting the carrier gas flow rate and the liquid hydrogen peroxide flow rate, respectively. When the actual liquid phase concentration changes, the supply relationship between the liquid hydrogen peroxide and the carrier gas is adjusted accordingly to form an initial gas distribution state corresponding to the current target gas phase concentration.

[0028] The regulated liquid hydrogen peroxide is vaporized and mixed with carrier gas to generate hydrogen peroxide vapor. The hydrogen peroxide vapor is then transported under temperature control, and the hydrogen peroxide vapor from the same source is distributed to the metering path and the reference path.

[0029] Specifically, liquid hydrogen peroxide and carrier gas are supplied according to the specified ratio parameters, causing the liquid hydrogen peroxide to vaporize in the vapor generation area and enter the carrier gas, forming continuously output hydrogen peroxide vapor. In one embodiment, heating vaporization is used, but spray vaporization, flash vaporization, or other methods that can continuously convert liquid hydrogen peroxide into gaseous hydrogen peroxide can also be used.

[0030] The generated hydrogen peroxide vapor is transported downstream via a temperature-controlled conveying path, maintaining a suitable temperature for gas-phase transport during the process to reduce condensation and concentration changes caused by localized temperature variations. Upon reaching the split point, the vapor enters both the metering path and the reference path. The term "co-source hydrogen peroxide vapor" refers to vapors in both paths originating from the same gas-phase mixture before splitting, rather than being generated independently. The metering path provides calibration vapor to the vaporized hydrogen peroxide sensor to be calibrated, while the reference path obtains the actual gas-phase concentration formed during this vapor generation process.

[0031] The same-source allocation is used to ensure that the reference path and the metering path have a common upstream steam generation basis. It does not directly assume that the concentration state in the two paths will always be the same after the split. The actual gas field state in the metering path still needs to be confirmed by subsequent concentration field verification.

[0032] The actual gas concentration in the reference path is directly obtained by a gas phase concentration detection method based on the optical absorption principle. The ratio parameter is corrected according to the deviation between the actual gas phase concentration and the target gas phase concentration, and the hydrogen peroxide vapor concentration is adjusted.

[0033] Specifically, hydrogen peroxide vapor in the reference path is introduced into the gas phase concentration detection area, and the actual gas phase concentration is determined based on the optical absorption characteristics of the gas phase hydrogen peroxide. The actual gas phase concentration is the concentration obtained by gas phase detection of hydrogen peroxide vapor after it has been vaporized, mixed, and transported, rather than the concentration calculated based on the liquid phase concentration or gas-liquid ratio.

[0034] In one embodiment, tunable semiconductor laser absorption spectroscopy can be used for detection, or Fourier transform infrared spectroscopy, ultraviolet differential absorption spectroscopy, or other detection methods that can obtain the concentration based on the optical absorption characteristics of gaseous hydrogen peroxide can be used.

[0035] After obtaining the actual gas phase concentration, it is compared with the target gas phase concentration, and the current proportioning parameters are adjusted based on the deviation between the two. When the actual gas phase concentration is lower than the target gas phase concentration, the gas-liquid supply relationship is adjusted to increase the hydrogen peroxide concentration in the subsequently generated steam; when the actual gas phase concentration is higher than the target gas phase concentration, the adjustment is performed in the opposite direction. The corrected proportioning parameters are reused to adjust the carrier gas flow rate and the liquid hydrogen peroxide flow rate, and hydrogen peroxide steam is generated again to obtain the actual gas phase concentration, thus forming a feedback correction process of the actual gas phase concentration on the upstream gas-liquid proportioning. The specific dynamic correction method will be further explained in subsequent embodiments.

[0036] Concentration information at different spatial locations within the metering path is acquired and the concentration field uniformity is determined. Gas phase concentration information over a continuous time period is also acquired and the concentration temporal stability is determined. When both the concentration field uniformity and the concentration temporal stability are within their respective preset ranges, the output value of the vaporized hydrogen peroxide sensor to be calibrated and the actual gas phase concentration are simultaneously acquired. The actual gas phase concentration is then used as the calibration benchmark to determine the calibration parameters of the vaporized hydrogen peroxide sensor to be calibrated.

[0037] Specifically, after the actual gas phase concentration is adjusted through feedback to enter the calibration range corresponding to the current target gas phase concentration, the gas field state of hydrogen peroxide vapor within the metering path is confirmed. Multiple concentration acquisition locations are set along the metering path, and the spatial concentration distribution state of the current metering path is determined by the concentration information at different spatial locations; at the same time, gas phase concentration information is continuously acquired within a certain time range, and the concentration time stability is determined based on its fluctuation state and changing trend.

[0038] If the uniformity of the concentration field or the temporal stability of the concentration does not meet the corresponding requirements, continue to adjust the steam delivery, temperature control, flow state, or gas-liquid ratio, and reconfirm the gas field state. When both meet the corresponding requirements, the current gas field is determined as the effective calibration gas field for sensor calibration. The specific methods for judging the spatial distribution of the concentration field and determining the temporal stability of the concentration are further explained in subsequent embodiments.

[0039] After an effective calibration gas field is established, the output value of the vaporized hydrogen peroxide sensor to be calibrated and the actual gas phase concentration in the reference path are acquired, and data participating in the same calibration relationship are aligned with the same effective vapor state. The actual gas phase concentration is used as the calibration benchmark, and the calibration result under the current concentration state is determined based on its correspondence with the output of the sensor to be calibrated. For multiple calibration concentration points, the actual gas phase concentration and the corresponding sensor output can be obtained separately, and calibration parameters for the sensor to be calibrated can be formed accordingly.

[0040] Synchronous acquisition does not require that the actual gas phase concentration and sensor output be obtained at exactly the same sampling time. When the vapor transport and sensor response processes cause a time difference between the two, valid calibration data can be determined based on the time correspondence between the actual gas phase concentration change and the sensor output change. The specific method will be further explained in subsequent embodiments.

[0041] The gas mixing model for the specified ratio parameters is determined based on historical operating condition data, and the gas-liquid ratio parameters are determined through the corrected gas mixing model.

[0042] Specifically, during the standard concentration vapor generation and sensor calibration process, data such as liquid hydrogen peroxide concentration, target gas phase concentration, gas-liquid ratio parameters, operating conditions, and corresponding actual gas phase concentration are recorded. When the actual gas phase concentration meets the calibration requirements, and the concentration field uniformity and concentration-time stability meet the corresponding requirements, the data generated during the corresponding calibration process are used as valid historical operating condition data.

[0043] A gas mixing model is established based on the valid historical operating data to determine the gas-liquid ratio parameters. This gas mixing model characterizes the correspondence between liquid hydrogen peroxide concentration, target gas phase concentration, operating conditions, and applicable gas-liquid ratio parameters. When a new calibration process begins, the gas mixing model determines the corresponding initial gas-liquid ratio parameters based on the current liquid phase concentration, target gas phase concentration, and operating conditions.

[0044] After determining the initial mixing parameters using the gas mixing model, the gas phase concentration is still measured actually through the reference path, and the current gas mixing result is verified and corrected based on the actual gas phase concentration. After this calibration meets the valid calibration conditions, the corresponding operating condition and actual concentration response are added to the historical operating condition data and used for subsequent gas mixing model updates. The specific liquid phase concentration trend feedforward and the local correction method of the gas mixing model based on historical operating conditions are further explained in subsequent embodiments.

[0045] Through the above process, the current calibration first determines the initial gas mixing state based on the actual liquid phase concentration and the target gas phase concentration, then corrects the standard steam concentration through feedback of the actual gas phase concentration, and performs sensor calibration after the spatial and temporal states of the calibration gas field meet the requirements. Finally, the effective calibration conditions are used for subsequent gas-liquid ratio determination, thus forming a continuous standard steam generation and sensor calibration process.

[0046] The second embodiment of the present invention proposes a standard concentration vapor calibration system for a vaporized hydrogen peroxide sensor, such as... Figure 2 As shown, it is used to perform the calibration method described in the first embodiment. Figures 1 to 5As shown, the system includes a liquid phase concentration acquisition unit, a gas-liquid preparation unit, a steam generation and temperature-controlled delivery unit, a dual-path distribution unit, a gas phase concentration reference measurement unit, a concentration field verification unit, a metering calibration unit, and a gas mixing model correction unit.

[0047] The system forms liquid delivery paths, carrier gas delivery paths, and steam delivery paths according to the generation direction of standard concentration steam, and forms gas distribution control and calibration data processing paths through corresponding signal connections.

[0048] A liquid phase concentration acquisition unit is positioned along the liquid transport path before the liquid hydrogen peroxide participates in vaporization. It is used to acquire the actual liquid phase concentration of the current liquid hydrogen peroxide and send the detection result to the gas-liquid preparation unit. In one embodiment, the liquid phase concentration acquisition unit employs an online refractive index detection device; alternatively, it may employ a detection device based on density, ultrasonic propagation characteristics, conductivity characteristics, or other methods capable of determining the liquid hydrogen peroxide concentration.

[0049] Liquid hydrogen peroxide is stored in a hydrogen peroxide-compatible storage container and transported to the steam generation and temperature control delivery unit via a liquid delivery pipeline. A liquid hydrogen peroxide flow regulation unit is installed along the liquid delivery path to adjust the supply of liquid hydrogen peroxide based on the control value output from the gas-liquid preparation unit.

[0050] The carrier gas delivery path includes a carrier gas source and a carrier gas flow rate regulation unit. In this embodiment, nitrogen is used as the carrier gas, and the carrier gas flow rate regulation unit can be a mass flow controller, used to adjust the carrier gas supply according to the control value output by the gas-liquid preparation unit.

[0051] The gas-liquid mixing unit is communicatively connected to the liquid phase concentration acquisition unit, the carrier gas flow rate regulation unit, and the liquid hydrogen peroxide flow rate regulation unit, respectively. It receives the target gas phase concentration and the actual liquid phase concentration, determines the gas-liquid ratio parameters accordingly, and then controls the carrier gas and liquid hydrogen peroxide to enter the steam generation process according to their corresponding supply relationships. The gas-liquid mixing unit is mainly used to establish the control relationship between the target gas phase concentration, the actual liquid phase concentration, and the gas-liquid supply state; it is not limited to a physical cavity for direct mixing of gas and liquid.

[0052] The steam generation and temperature-controlled delivery unit includes a steam generation section and a temperature-controlled delivery section. The steam generation section receives liquid hydrogen peroxide and carrier gas supplied according to the current proportioning parameters, and vaporizes the liquid hydrogen peroxide to mix with the carrier gas to form hydrogen peroxide vapor. The steam generation section can employ a heating vaporization structure, or it can employ spray vaporization, flash vaporization, or other structures suitable for the continuous vaporization of liquid hydrogen peroxide.

[0053] The temperature-controlled delivery unit is located downstream of the steam generator and includes a steam delivery pipeline and a corresponding temperature control structure to maintain the hydrogen peroxide vapor at a suitable temperature for gas-phase transport during downstream delivery. The pipeline in contact with the hydrogen peroxide can be made of polytetrafluoroethylene, perfluoroalkoxy materials, or stainless steel resistant to hydrogen peroxide corrosion. The temperature control structure can include a heating element and a temperature sensing element.

[0054] like Figure 4 As shown, the dual-path distribution unit is located downstream of the steam generation and temperature-controlled delivery unit. In one embodiment, the dual-path distribution unit adopts a split structure with one input end and two output ends. Its input end is connected to a common steam delivery path, and the two output ends form a metering path and a reference path, respectively, so that the two paths receive homogeneous hydrogen peroxide vapor generated from the same upstream steam source. The dual-path distribution unit and its adjacent pipe sections can maintain a temperature-controlled state to reduce the impact of temperature changes at the split location on the steam state.

[0055] The metering path is connected to the sensor metering chamber. The sensor metering chamber is equipped with a steam inlet, a sensor mounting area, and a tail gas outlet. The vaporized hydrogen peroxide sensor to be calibrated is installed in the sensor mounting area, so that the hydrogen peroxide vapor entering the metering chamber flows through the sensitive area of ​​the sensor and is discharged from the tail gas outlet. The sensor metering chamber can be equipped with one or more sensor mounting interfaces to accommodate vaporized hydrogen peroxide sensors of different structures.

[0056] The reference path is connected to the gas phase concentration reference measurement unit, which directly obtains the actual gas phase concentration based on the gas phase absorption characteristics of hydrogen peroxide. For example... Figure 5 As shown, in one embodiment, the gas phase concentration reference measurement unit can adopt a TDLAS-type reference measurement structure, where the detection light is emitted by a laser emitter, passes through a gas chamber through which hydrogen peroxide vapor passes via a reference path, and is then received by a receiver. The actual gas phase concentration is determined based on the optical absorption response corresponding to hydrogen peroxide. In another embodiment, an FTIR-type reference measurement structure can be adopted, where the detection light sequentially passes through an interferometer and a gas chamber through which hydrogen peroxide vapor passes before being received by a detector. The actual gas phase concentration is determined based on the obtained spectral information. The gas phase concentration reference measurement unit can also employ ultraviolet differential absorption spectroscopy or other detection methods based on optical absorption principles to obtain the gas phase hydrogen peroxide concentration.

[0057] like Figure 3As shown, the gas-liquid preparation unit determines the initial gas-liquid ratio parameters based on the target gas phase concentration and liquid phase concentration information, and outputs corresponding flow control values ​​to the carrier gas flow rate regulation unit and the liquid hydrogen peroxide flow rate regulation unit, respectively, so that the carrier gas and liquid hydrogen peroxide enter the steam generation process according to the determined supply relationship. After the hydrogen peroxide steam is generated, the gas phase concentration reference measurement unit obtains its actual gas phase concentration and feeds it back to the gas-liquid preparation unit. The gas-liquid preparation unit continues to correct the gas-liquid ratio parameters based on the deviation between the actual gas phase concentration and the target gas phase concentration. The gas distribution relationship formed by the gas distribution model correction unit can also serve as the basis for the gas-liquid preparation unit to determine the subsequent ratio parameters, thus forming a gas-liquid preparation control path that combines liquid phase concentration feedforward, gas phase concentration feedback, and historical gas distribution relationship correction.

[0058] See further Figure 4 A concentration field verification unit is set up corresponding to the metering path to acquire gas phase concentration information at different spatial locations and over continuous time periods within the metering path. In one embodiment, multiple concentration acquisition positions, such as P1, P2, and P3, are set along the flow direction of hydrogen peroxide vapor in the sensor metering chamber. Different concentration acquisition positions correspond to different spatial regions within the metering path to obtain data reflecting the spatial concentration distribution within the metering area. Concentration detection components can be set up separately at different locations, or they can be connected to the same concentration detection component via sampling branches and a multiplexer structure.

[0059] The concentration field verification unit determines the concentration field uniformity and concentration temporal stability based on concentration information at different spatial locations and over continuous time periods, and provides the metrology calibration unit with status information indicating whether the current calibration gas field meets the calibration requirements. If the verification result does not meet the requirements, the system continues with corresponding steam generation and gas field adjustments, without entering the formal calibration data acquisition process. The specific methods for determining spatial uniformity and temporal stability will be further explained in subsequent embodiments.

[0060] The metrology calibration unit is connected to the concentration field verification unit, the gas phase concentration reference measurement unit, and the data output terminal of the vaporized hydrogen peroxide sensor to be calibrated. When the concentration field uniformity and concentration-time stability both meet the corresponding requirements, the metrology calibration unit acquires the actual gas phase concentration and the output of the sensor to be calibrated, and uses the actual gas phase concentration as the calibration benchmark. Based on the effective correspondence between the two, the calibration parameters of the sensor to be calibrated are determined. If there is a response time difference between the actual gas phase concentration and the sensor output, the data to be calibrated can be selected based on their time correspondence; the specific method will be further explained in subsequent embodiments.

[0061] Separate exhaust paths are set for the metering path and the reference path, ensuring that the steam in the two paths is independent before completing the corresponding detection. The two exhaust gases can be discharged separately, or they can enter a unified hydrogen peroxide decomposition or waste gas treatment device in the later stage.

[0062] The gas mixing model correction unit establishes data connections with the gas-liquid mixing unit, the gas phase concentration reference measurement unit, and the storage area for storing historical operating data. It records the correspondence between liquid phase concentration, target gas phase concentration, gas-liquid ratio parameters, operating conditions, and actual gas phase concentration, and corrects the gas mixing model used to determine the gas-liquid ratio parameters based on the valid historical operating data.

[0063] The gas mixing model correction unit can be integrated with the gas-liquid mixing unit in the same control device, or it can be a separate data processing module. When a new calibration process begins, the gas mixing model correction unit provides the corresponding gas mixing relationship to the gas-liquid mixing unit based on the current liquid phase concentration, the target gas phase concentration, and the operating conditions. The gas-liquid mixing unit then determines the initial gas-liquid ratio parameters. Subsequently, the gas phase concentration reference measurement unit obtains the actual gas phase concentration and verifies the initial gas mixing result.

[0064] In one system implementation, the gas-liquid preparation unit, concentration field verification unit, metering calibration unit, and gas mixing model correction unit are implemented by different functional modules within the same control device. The control device is connected to the data interfaces of the liquid phase concentration acquisition unit, carrier gas flow rate regulation unit, liquid hydrogen peroxide flow rate regulation unit, steam generation and temperature-controlled delivery unit, gas phase concentration reference measurement unit, and the sensor to be calibrated, respectively, to complete standard steam generation, actual gas phase concentration feedback, gas field status confirmation, sensor calibration, and gas mixing model updating.

[0065] This embodiment forms a physical structure for generating and transporting standard concentration hydrogen peroxide vapor through a liquid transport path, a carrier gas transport path, and a dual-path steam transport path. The standard concentration steam calibration process of the vaporized hydrogen peroxide sensor described in the first embodiment is realized through signal connection between the actual liquid phase concentration, the actual gas phase concentration, the gas field verification result, the output of the sensor to be calibrated, and historical operating condition data.

[0066] The third embodiment of the present invention, based on the standard concentration steam generation and calibration method described in the first embodiment, further proposes a dynamic adjustment and calibration gas field quality access method for standard concentration hydrogen peroxide steam, which is used to continuously confirm the adjustment state, spatial distribution state and temporal stability state of the gas phase concentration before hydrogen peroxide steam enters the formal sensor calibration.

[0067] In this embodiment, the actual gas phase concentration is directly obtained through a reference path, and the gas-liquid ratio parameter is corrected based on the deviation between the actual and target gas phase concentrations. Since the liquid hydrogen peroxide still needs to undergo supply, vaporization, mixing with the carrier gas, and temperature-controlled delivery processes after the ratio parameter changes, the change in the ratio parameter will not immediately be reflected in the actual gas phase concentration change in the reference path. Therefore, when correcting the ratio parameter, the change in the actual gas phase concentration within the continuous feedback cycle is used to determine whether the previous correction has already generated a corresponding gas phase concentration response.

[0068] Specifically, such as Figures 1 to 5 As shown, the correction of the proportioning parameter includes continuously acquiring the gas phase concentration deviation within multiple feedback cycles, and determining the concentration response state corresponding to the previous proportioning parameter correction based on the direction of change of the gas phase concentration deviation in adjacent feedback cycles. When the gas phase concentration deviation continues to change along the direction before correction after the proportioning parameter correction, the current proportioning parameter is maintained and the actual gas phase concentration is continued to be acquired until the gas phase concentration deviation produces a change corresponding to the proportioning parameter correction; when the gas phase concentration deviation continues to decrease and approaches the calibration range corresponding to the target gas phase concentration, the correction degree of subsequent proportioning parameters is reduced; when the gas phase concentration deviation exceeds the calibration range and the direction reverses, the proportioning parameter is corrected in reverse according to the direction of the reversed deviation until the actual gas phase concentration stabilizes within the calibration range.

[0069] The feedback cycle is a data acquisition cycle used to continuously evaluate the gas phase concentration response state after a single adjustment of the proportioning parameters. Within one feedback cycle, the current proportioning state is maintained and the actual gas phase concentration is acquired. The direction of change in gas phase concentration deviation is compared between adjacent feedback cycles to determine whether the currently detected concentration change has reflected the effect of the previous proportioning adjustment.

[0070] For example, if the actual gas phase concentration is lower than the target gas phase concentration and the mixing ratio parameter is corrected for enrichment direction, and the actual gas phase concentration continues to decrease in subsequent feedback cycles, it indicates that the currently detected gas phase state may still mainly correspond to the steam generation state before the correction. In this case, no further correction in the same direction is added, and the current mixing ratio parameter is maintained for continued detection. When the subsequent actual gas phase concentration turns upward and the gas phase concentration deviation begins to decrease, it is then confirmed that the previous mixing ratio correction has formed a corresponding response on the gas phase side. For cases where the actual gas phase concentration is higher than the target gas phase concentration, the judgment is made according to the opposite change relationship.

[0071] As the actual gas phase concentration gradually approaches the calibration range corresponding to the target gas phase concentration, the impact of a single adjustment of the proportioning parameters on the gas-liquid supply relationship is reduced, thus correspondingly decreasing the amplitude of subsequent gas phase concentration changes. When an adjustment causes the actual gas phase concentration to exceed the calibration range and reverses the gas phase concentration deviation from its original direction, a reverse correction is performed based on the new deviation direction. This ensures that the adjustment frequency and extent of the proportioning parameters correspond to the actual vaporization and transport response process of hydrogen peroxide vapor, reducing the repeated concentration changes caused by continuous adjustments before the previous correction has taken effect.

[0072] After the actual gas phase concentration enters the calibration range corresponding to the target gas phase concentration, the spatial concentration state within the metering path is further confirmed. Since the actual gas phase concentration obtained from the reference path reflects the hydrogen peroxide vapor concentration at the reference measurement location, even if the actual gas phase concentration in the reference path meets the target requirements, it is still necessary to confirm whether the hydrogen peroxide vapor actually contacted by the sensor to be calibrated in the metering path forms a spatial concentration distribution that meets the calibration requirements.

[0073] Specifically, such as Figures 1 to 5 As shown, determining the uniformity of the concentration field includes acquiring concentration information of hydrogen peroxide vapor at different spatial locations along the flow direction of the metering path, and determining the spatial distribution state of the concentration field based on the concentration change relationship between each spatial location. When the concentration changes continuously along the flow direction, the delivery state and / or temperature control state of the hydrogen peroxide vapor are adjusted; when the concentration at a local spatial location deviates from that of an adjacent spatial location, the flow state of the hydrogen peroxide vapor within the metering path is adjusted; after adjustment, the concentration information at different spatial locations is acquired again until the concentration field meets the preset uniformity requirements.

[0074] In this embodiment, concentration data at multiple spatial locations can be acquired sequentially along the steam flow direction of the metering path, and compared according to the order of each spatial location in the flow direction. The spatial distribution state includes at least the continuous concentration change state formed along the flow direction and the concentration deviation state formed at local spatial locations.

[0075] A continuous concentration change state refers to a situation where the concentration at multiple adjacent spatial locations exhibits a continuous increase or decrease along the steam flow direction. This state indicates that the concentration difference in the metering path continues along the transport direction. Therefore, adjustments should be prioritized to states related to the overall transport process, including the transport state of hydrogen peroxide vapor, the temperature control state, or a combination of both, to bring the transport conditions of the steam in the metering path back to uniformity.

[0076] Local concentration deviation refers to a situation where the gas phase concentration at a certain spatial location deviates from its upstream and downstream adjacent locations, while no continuous change relationship consistent with the direction of deviation is formed among other locations. This state indicates that the concentration difference is mainly concentrated in a local area of ​​the metering path. Therefore, the flow state of hydrogen peroxide vapor is adjusted for this local area, allowing the vapor to re-pass through the corresponding spatial area, and the concentration information at each location is obtained again after the adjustment is completed.

[0077] By distinguishing between continuous concentration changes and localized concentration deviations, the same adjustment methods can be avoided for different spatial anomalies. The former mainly adjusts steam delivery and temperature control conditions based on concentration changes along the metering path, while the latter mainly adjusts the flow state within the metering path based on concentration deviations at localized locations. After each adjustment, concentration information for the same or corresponding spatial locations is reacquired, and the spatial distribution is re-evaluated until the concentration differences between different locations meet the preset uniformity requirements.

[0078] The preset uniformity requirement is used to determine whether the spatial concentration difference in the metering path allows the actual gas phase concentration obtained from the current reference path to be used as the calibration benchmark for the sensor to be calibrated. In one embodiment, the uniformity requirement can be determined based on the maximum concentration difference at different spatial locations, the deviation range of the concentration at each location relative to the spatial representative concentration, or the concentration variation range between adjacent locations. The specific allowable range can be preset according to the range and calibration accuracy requirements of the sensor to be calibrated.

[0079] In addition to ensuring that the spatial concentration meets the requirements, it is also necessary to confirm whether the hydrogen peroxide vapor has reached a time-stable state that can be continuously used for sensor calibration. This time-stable state requires not only that the current gas phase concentration be within the calibration range corresponding to the target gas phase concentration, but also that the concentration state no longer exhibits continuous overall drift over a continuous period.

[0080] Specifically, such as Figures 1 to 5 As shown, acquiring gas phase concentration information over a continuous period and determining concentration temporal stability includes, after correcting the ratio parameters, continuously acquiring gas phase concentration change information and determining multiple continuous observation intervals in chronological order, respectively determining the concentration fluctuation state within each observation interval and the concentration change trend between adjacent observation intervals. When the concentration fluctuation within each observation interval meets the preset stability requirements and there is no continuous unidirectional concentration shift between adjacent observation intervals, the hydrogen peroxide vapor is determined to have reached a stable concentration state for sensor calibration; when the concentration fluctuation meets the preset stability requirements but there is a continuous unidirectional concentration shift, concentration monitoring and ratio parameter correction continue until the continuous unidirectional concentration shift is eliminated.

[0081] The continuously acquired gas phase concentration data are divided into multiple consecutive observation intervals according to time sequence. For each observation interval, the concentration fluctuation state is determined based on the degree of change among the multiple gas phase concentration data within that interval. For example, the concentration within the observation interval can be judged to meet the preset stability requirements based on the difference between the maximum and minimum concentration values ​​within the observation interval, or the degree of deviation of each concentration data from the concentration represented by that observation interval.

[0082] A representative concentration is determined for each observation interval. This representative concentration can be determined based on multiple continuously obtained gas phase concentration data within that observation interval. By comparing the representative concentrations of adjacent observation intervals in chronological order, the overall direction of concentration change between different observation intervals can be determined. When the representative concentrations of consecutively adjacent observation intervals continuously increase or continuously decrease, it is determined that there is still a continuous concentration shift in the same direction in the current gas phase concentration.

[0083] Even if the concentration fluctuations within each observation interval have decreased to the preset range, the current vapor state is not considered a stable concentration state as long as there is still continuous unidirectional concentration change between different observation intervals. For example, if there are only small fluctuations within multiple consecutive observation intervals, but the representative concentrations of each observation interval increase sequentially, it indicates that the hydrogen peroxide vapor is still in an overall upward trend; conversely, if the representative concentrations of each observation interval decrease sequentially, it indicates that the vapor is still in an overall downward trend. In this case, the actual gas phase concentration continues to be acquired, and the proportioning parameters are maintained or corrected based on the gas phase concentration deviation.

[0084] When the concentration fluctuations within each observation interval meet the preset stability requirements, and there is no longer a continuous unidirectional concentration shift between adjacent observation intervals, the current hydrogen peroxide vapor is determined to have reached a stable concentration state. Therefore, the concentration fluctuations within each observation interval reflect the degree of concentration stability over a shorter timescale, while the changing trends between adjacent observation intervals reflect whether overall drift still exists over a longer timescale. This avoids using hydrogen peroxide vapor, which is still in the concentration transition phase, for calibration based solely on small short-term concentration fluctuations.

[0085] Concentration field uniformity and concentration time stability can be continuously acquired during the standard concentration steam conditioning process. However, the current steam state is marked as an effective calibration gas field and allowed to enter the subsequent data acquisition process of the vaporized hydrogen peroxide sensor to be calibrated only after the actual gas phase concentration in the reference path reaches the calibration range corresponding to the current target gas phase concentration, and the concentration field uniformity and concentration time stability of the metering path meet the corresponding preset requirements.

[0086] If any condition is not met, the sensor output and reference path concentration for the current time period will not be directly used as formal calibration data. Specifically, if the actual gas phase concentration does not reach the calibration range, the gas-liquid ratio will continue to be corrected according to the aforementioned feedback cycle; if there is continuous spatial concentration change or local spatial concentration deviation, the corresponding delivery, temperature control, or flow state will be adjusted; if there is a continuous unidirectional time concentration shift, the actual gas phase concentration will continue to be monitored and the gas phase response state corresponding to the current ratio parameter will be determined.

[0087] Therefore, this embodiment does not simply use the actual gas phase concentration in the reference path reaching the target range as the starting condition for sensor calibration. Instead, based on the actual gas phase concentration feedback adjustment, it further performs quality acceptance checks on the spatial concentration consistency and continuous time stability of the metering path. Only after the hydrogen peroxide vapor has undergone gas phase concentration feedback adjustment, spatial concentration state confirmation, and time stability state confirmation, does it enter the subsequent sensor calibration process, thereby establishing the calibration relationship between the subsequent actual gas phase concentration and the sensor output under the confirmed standard concentration vapor state.

[0088] Based on the foregoing embodiments, the fourth embodiment of the present invention further proposes a dynamic calibration method based on the correspondence between the gas phase concentration change time sequence and the sensor response time sequence. This method is used to determine the effective correspondence between the actual gas phase concentration in the reference path and the output of the vaporized hydrogen peroxide sensor to be calibrated, and to determine the calibration parameters by combining the sensor response under different concentration change directions.

[0089] After the proportioning parameters of standard concentration hydrogen peroxide vapor are adjusted, the actual gas phase concentration in the reference path needs to undergo a corresponding change after the vapor generation and transportation process. Furthermore, after the hydrogen peroxide vapor in the metering path acts on the sensor to be calibrated, the sensor itself requires a certain response time. Therefore, even if the actual gas phase concentration in the reference path and the output of the sensor to be calibrated are recorded according to a uniform sampling sequence, the two types of data obtained at the same sampling time may not necessarily correspond to the same hydrogen peroxide vapor concentration state.

[0090] Therefore, in this embodiment, instead of directly pairing the actual gas phase concentration with the sensor output according to the same acquisition time, the time correspondence between the two is established by utilizing the transition process of hydrogen peroxide vapor concentration formed after the change of gas-liquid ratio parameters.

[0091] Specifically, such as Figures 1 to 5As shown, obtaining the output value of the vaporized hydrogen peroxide sensor to be calibrated and the actual gas phase concentration includes, during the process of correcting the ratio parameters, continuously acquiring the actual gas phase concentration change information of the reference path and the output change information of the vaporized hydrogen peroxide sensor to be calibrated. The transition process of hydrogen peroxide vapor concentration caused by the change in ratio parameters is used as a time series reference. The time correspondence between the actual gas phase concentration change time series and the response time series of the vaporized hydrogen peroxide sensor to be calibrated is determined. After the concentration field uniformity and concentration time stability meet the corresponding preset range, the effective calibration data interval is determined according to the time correspondence, and the calibration parameters are determined according to the corresponding actual gas phase concentration and sensor output value within the effective calibration data interval.

[0092] The hydrogen peroxide vapor concentration transition process refers to the continuous change in actual gas phase concentration from the pre-adjustment state to the post-adjustment state after the ratio parameters are changed. This process includes at least the stage where the concentration begins to change continuously, the stage where the concentration changes continuously along the corresponding direction, and the stage where it gradually enters a new stable concentration state.

[0093] Since this concentration transition process originates from a predetermined adjustment of the mixing parameters, it can be used as the common event basis for the actual gas phase concentration change in the reference path and the response change of the sensor to be calibrated. After recording the actual gas phase concentration change information and sensor output change information of the reference path in chronological order, the change characteristics corresponding to this concentration transition process in the two types of data are determined respectively.

[0094] In one implementation, the starting position of the gas phase concentration change can be determined based on the time it takes for the actual gas phase concentration to begin continuously deviating from the pre-adjustment steady state, and the starting position of the sensor response can be determined based on the time it takes for the output of the sensor to be calibrated to begin generating a continuous change corresponding to the direction of the concentration change. Furthermore, the temporal relationship between the two types of data can be confirmed by combining the corresponding change characteristics during the continuous concentration change phase and the phase entering a new steady state.

[0095] The time correspondence referred to here is the time correspondence between a certain actual gas phase concentration state in the reference path and the output of the sensor to be calibrated when it responds to that concentration state. This time correspondence can be expressed as a certain time interval between changes in the actual gas phase concentration in the reference path and changes in the sensor output, or it can be determined separately for different stages of concentration change.

[0096] For example, if the actual gas phase concentration in the reference path has already started to rise, but the output of the sensor to be calibrated still remains in the state before adjustment, the actual gas phase concentration at that moment is not directly paired with the sensor output to form calibration data. Instead, the two are matched according to the determined time correspondence after the sensor output shows a response corresponding to the actual gas phase concentration change. The same time correspondence principle is used for the gas phase concentration decrease process.

[0097] The time correspondence determined by the above method is not directly set according to a pre-assumed fixed transmission time, but is determined according to the actual gas phase concentration transition state and sensor response state formed during the current calibration process, so as to adapt to the possible time differences under different flow rates, target concentrations and sensor response characteristics.

[0098] After establishing the time correspondence, not all data from the concentration transition process is directly used as the formal calibration data. The concentration transition process is mainly used to identify the response time sequence between the actual gas phase concentration and the sensor output, while the data used to determine the calibration parameters must also meet the aforementioned calibration gas field quality requirements.

[0099] Specifically, once the uniformity of the concentration field and the stability of the concentration over time in the metering path meet the corresponding preset requirements, the data range that corresponds to the same effective vapor state is selected from the continuously obtained actual gas phase concentration data and sensor output data according to the established time correspondence, and this data range is determined as the effective calibration data interval.

[0100] The effective calibration data range refers to the range of data that can be used to establish an effective calibration relationship between the actual gas phase concentration and the sensor output, assuming the calibration gas field has been confirmed to have spatial uniformity and temporal stability. Therefore, effective calibration data not only requires that the corresponding hydrogen peroxide vapor state meets the calibration gas field requirements, but also requires that the actual gas phase concentration and the sensor output have achieved temporal matching.

[0101] Within the effective calibration data range, multiple actual gas phase concentration data and their corresponding sensor outputs can be continuously acquired, and a representative output of the sensor to be calibrated under the current concentration state can be determined based on the data. The representative output can be determined based on the average state, steady state, or other statistical results that can characterize the sensor response within the effective calibration data range. The corresponding actual gas phase concentration is also determined based on the actual detection results within the effective data range, rather than directly using the target gas phase concentration.

[0102] After completing the time-series matching and effective data acquisition at a target gas phase concentration, the target gas phase concentration can be further changed, and the standard vapor generation, gas field quality confirmation, time correspondence, and effective calibration data acquisition process can be repeated under multiple concentration states to form multi-concentration calibration data covering the calibration range of the sensor to be calibrated.

[0103] Specifically, such as Figures 1 to 5 As shown, the acquisition of the calibration parameters includes: forming standard concentration vapors that meet the requirements of concentration field uniformity and concentration time stability at multiple target gas phase concentrations; acquiring first calibration data in ascending order of target gas phase concentration and second calibration data in descending order of target gas phase concentration; comparing the outputs of the vaporized hydrogen peroxide sensor to be calibrated at the corresponding actual gas phase concentrations in the first and second calibration data to determine the response deviation state of the sensor output as the concentration changes; distinguishing between the concentration measurement deviation of the sensor and the dynamic response deviation caused by the concentration change process based on the correspondence between the actual gas phase concentration and the sensor output at each target gas phase concentration and the response deviation state; and determining the calibration parameters accordingly.

[0104] In this embodiment, calibration is first performed sequentially from lower target gas phase concentration to higher target gas phase concentration. At each target gas phase concentration, the actual gas phase concentration is brought into the corresponding calibration range in the manner described above. After the concentration field uniformity and concentration-time stability meet the requirements, valid calibration data are obtained based on the time correspondence, thereby forming the first calibration data.

[0105] After completing the target gas phase concentration increment process, the calibration is performed sequentially from the higher target gas phase concentration to the lower target gas phase concentration in the opposite direction of concentration change, and valid calibration data is generated in the same way at each concentration state, thereby obtaining the second calibration data.

[0106] The comparison between the first and second calibration data uses the actual gas phase concentration as the basis for concentration matching, rather than directly matching it to the set target gas phase concentration. Since the actual measured gas phase concentration may differ from the target set value, data with the same actual gas phase concentration can be selected for comparison between the first and second calibration data. When there are no completely identical actual concentration values ​​in the two sets of data, corresponding data can be selected within a preset range of adjacent concentrations, or the sensor output at the corresponding concentration state can be determined based on adjacent valid data.

[0107] If there is a difference between the sensor output obtained during the increase of the target gas phase concentration and the sensor output obtained during the decrease of the target gas phase concentration, under the same or corresponding actual gas phase concentration, this difference is characterized as the response deviation state of the sensor output as the concentration changes.

[0108] The term "response deviation" as used here refers to the phenomenon where, under conditions of identical or similar actual gas phase concentrations, the sensor under calibration produces different output states due to the different directions of concentration changes experienced by hydrogen peroxide vapor prior to calibration. This response deviation reflects the difference in the sensor's dynamic response during concentration increases and decreases, rather than the difference in the actual gas phase concentration along the reference path itself.

[0109] Based on the first and second calibration data, the concentration measurement deviation and dynamic response deviation of the sensor can be further distinguished.

[0110] The concentration measurement deviation is used to characterize the deviation between the stable output of the sensor to be calibrated and the actual gas phase concentration after excluding response differences caused by the direction of concentration change. In one embodiment, the effective sensor outputs during the increasing and decreasing processes at the same actual gas phase concentration can be combined to determine a representative output for characterizing the stable measurement relationship of the sensor at that concentration state, and then the concentration measurement deviation can be determined based on the correspondence between the representative output and the actual gas phase concentration.

[0111] The dynamic response deviation is used to characterize the output difference of the sensor under different concentration change directions. For example, at the same actual gas phase concentration, if the sensor output is consistently higher or lower than the corresponding output during the concentration increase process, the degree of dynamic response deviation corresponding to that concentration range can be determined based on the difference between the two.

[0112] Concentration measurement deviation mainly reflects the deviation of the sensor's measurement value when measuring the actual gas phase concentration, while dynamic response deviation mainly reflects the difference in the direction-dependent response of the sensor output caused by the influence of previous concentration increases or decreases. By defining these two separately, we can avoid directly treating the sensor's own dynamic response characteristics as concentration measurement errors when obtaining calibration data based solely on a single direction of concentration change.

[0113] Based on the concentration measurement relationships obtained at multiple actual gas phase concentrations, a static calibration relationship can be established between the actual gas phase concentration and the output of the sensor to be calibrated, and the corresponding concentration calibration parameters can be determined accordingly. Furthermore, based on the response deviations at different concentration ranges, dynamic response parameters characterizing the influence of concentration change direction can be determined. These calibration parameters may include parameters for correcting the sensor's concentration measurement relationship, and may further include parameters characterizing the sensor's response differences during concentration increases and decreases.

[0114] When the sensor to be calibrated is put into subsequent use, the sensor output can be corrected by using only the concentration measurement calibration parameters, depending on the specific calibration purpose. Alternatively, the output state of the sensor during the concentration change process can be evaluated or compensated by combining the determined dynamic response parameters.

[0115] This embodiment first establishes a time correspondence between the actual gas phase concentration of the reference path and the response of the sensor to be calibrated by utilizing the actual concentration transition process of standard concentration steam. After the calibration gas field meets the requirements of spatial uniformity and temporal stability, valid calibration data is screened. Furthermore, calibration data are obtained at multiple actual gas phase concentrations during the concentration increase and decrease processes. By comparing the sensor outputs of different change directions at the same actual gas phase concentration, concentration measurement deviation and dynamic response deviation are distinguished, so that the determined calibration parameters are simultaneously based on the correspondence of effective values ​​and the actual dynamic response characteristics of the sensor.

[0116] Based on the aforementioned embodiments, the fifth embodiment of the present invention further proposes a gas-liquid ratio correction method based on the liquid phase concentration change trend and historical effective operating conditions. This method is used to reduce the state difference between the liquid phase concentration detection time and the actual vaporization time, and to make targeted corrections to the subsequent gas-liquid ratio parameters by utilizing the actual gas phase concentration response obtained in the previous standard steam generation process.

[0117] Specifically, such as Figures 1 to 5 As shown, the liquid phase concentration of liquid hydrogen peroxide is continuously acquired. The concentration change trend of liquid hydrogen peroxide is determined based on the changes in liquid phase concentration at different time periods. Based on the concentration change trend and the process state of liquid hydrogen peroxide from concentration acquisition to participation in vaporization, the expected liquid phase concentration corresponding to its participation in subsequent steam generation is determined. The expected liquid phase concentration is used to replace the current actual liquid phase concentration to determine the gas-liquid ratio parameter. Based on the actual gas phase concentration of hydrogen peroxide vapor generated according to the gas-liquid ratio parameter, the feedforward compensation state corresponding to the expected liquid phase concentration is determined. The ratio parameter corresponding to the subsequent liquid phase concentration change trend is corrected based on the feedforward compensation state.

[0118] The trend of liquid phase concentration change is used to characterize the state of liquid hydrogen peroxide concentration increase, decrease, or relative stability during continuous detection. In one embodiment, multiple liquid phase concentration detection results are continuously acquired in chronological order, and the direction and degree of change of liquid phase concentration in adjacent time periods are compared. When multiple consecutive time periods show the same direction of concentration change, it is taken as the current trend of liquid hydrogen peroxide concentration change; when the concentration change in different time periods remains within a preset allowable range, it is determined to be in a relatively stable state.

[0119] The process state refers to the transport state experienced by liquid hydrogen peroxide from the concentration detection location to its actual participation in vaporization. This state may include at least the liquid transport distance, the current liquid flow rate, and the resulting transport time. Based on the current transport state, the time position corresponding to the liquid hydrogen peroxide entering the steam generation area after completing concentration detection can be determined. Combined with the previously established liquid phase concentration change trend, the expected liquid phase concentration corresponding to the actual participation of this portion of liquid hydrogen peroxide in subsequent steam generation can be determined.

[0120] The expected liquid phase concentration referred to here is a feedforward determination of the concentration state of liquid hydrogen peroxide during actual vaporization, based on the currently measured actual liquid phase concentration, the direction of concentration change over a continuous period, and the process state from the detection position to the vaporization position. It is not a new liquid phase concentration detection value. For example, when continuous detection results indicate that the liquid phase concentration is decreasing, and the liquid being detected still needs to undergo a certain transportation process before entering the vaporization area, an expected liquid phase concentration lower than the current detection value can be determined based on this trend, and the gas-liquid ratio parameters can be determined using the expected liquid phase concentration.

[0121] After determining the gas-liquid ratio using the expected liquid phase concentration, hydrogen peroxide vapor is generated as described in the first embodiment, and the actual gas phase concentration is directly obtained through a reference path. The deviation between the actual and target gas phase concentrations is used to evaluate whether the expected liquid phase concentration has formed a feedforward compensation state adapted to the current liquid phase change trend.

[0122] The feedforward compensation state characterizes whether the gas-liquid ratio determined by the expected liquid concentration has been pre-compensated for gas-phase concentration deviations caused by changes in liquid concentration. When the actual gas-phase concentration is closer to the target gas-phase concentration than when using the current detected concentration for gas mixing, or when the current ratio falls within the target calibration range, the corresponding trend compensation relationship can be maintained. When the actual gas-phase concentration still exhibits a systematic deviation consistent with the predicted direction, the ratio relationship corresponding to the subsequent liquid-phase concentration trend is adjusted based on the actual gas-phase concentration deviation. This ensures that the liquid-phase trend prediction is always verified by the subsequent actual gas-phase concentration, rather than directly using the prediction result as the basis for the final gas-phase concentration.

[0123] While performing the feedforward correction in the above single calibration process, the gas distribution model is also updated based on historical effective operating conditions.

[0124] Specifically, such as Figures 1 to 5As shown, the correction of the gas distribution model includes: determining multiple candidate historical operating conditions from the effective historical operating condition data based on the current liquid phase concentration, target gas phase concentration, and operating conditions; selecting target historical operating conditions that have a corresponding concentration response relationship with the current calibration process based on the change in actual gas phase concentration after adjusting the proportioning parameters in each candidate historical operating condition; correcting the local gas distribution relationship corresponding to the current calibration state based on the correspondence between the proportioning parameters and the actual gas phase concentration deviation in the target historical operating conditions, while keeping the gas distribution relationships corresponding to other calibration states unchanged; determining subsequent gas-liquid proportioning parameters based on the corrected local gas distribution relationship; and updating the correction result of the local gas distribution relationship based on the subsequent actual gas phase concentration.

[0125] The candidate historical operating conditions refer to valid historical operating conditions that fall within the corresponding range of the current calibration state in terms of liquid phase concentration, target gas phase concentration, and main operating conditions. These operating conditions may include carrier gas flow rate, liquid hydrogen peroxide flow rate, steam generation state, and temperature-controlled delivery state. By first filtering historical data according to the above conditions, it is possible to avoid directly using historical gas mixing results that differ significantly from the current steam generation state for the current calibration.

[0126] Among multiple candidate historical operating conditions, the direction of change in actual gas phase concentration, the state of deviation reduction, and the response process into the target concentration range after adjusting the proportioning parameters are further compared. A historical operating condition with a similar concentration response relationship to the current calibration process is selected as the target historical operating condition. This target historical operating condition is not only determined based on the closest input conditions, but also further considers the response state of the actual gas phase concentration to the proportioning adjustment.

[0127] Based on the correspondence between changes in the gas-liquid ratio and actual gas phase concentration deviations in the target historical operating conditions, the local gas distribution relationship near the current calibration state is corrected. The local gas distribution relationship refers to a portion of the gas-liquid ratio mapping relationship in the gas distribution model corresponding to the current liquid phase concentration, target gas phase concentration, and operating condition, rather than the entire gas distribution model. Therefore, the correction result formed under one operating condition only applies to the gas distribution region corresponding to that condition, without directly changing the gas distribution relationships already formed under other target concentrations or other operating conditions.

[0128] Based on the corrected local gas distribution relationship, the subsequent gas-liquid ratio parameters are determined, and hydrogen peroxide vapor is generated again. The new actual gas phase concentration is obtained through the reference path. When the new actual gas phase concentration changes towards the calibration range corresponding to the target gas phase concentration, the result of this local correction is used as the new gas distribution basis for this operating condition. When the actual gas phase concentration indicates that the correction result still has deviations, the current local gas distribution relationship is updated again based on the new gas phase response.

[0129] Therefore, this embodiment forms two interconnected gas distribution correction levels: during a single standard steam generation process, the expected liquid phase concentration when liquid hydrogen peroxide actually participates in vaporization is determined based on the liquid phase concentration change trend, and the feedforward compensation result is verified using the actual gas phase concentration; during multiple calibration processes, historical gas distribution relationships corresponding to the current response state are screened using valid historical operating conditions that have been confirmed through gas field quality, and only the local gas distribution relationship corresponding to the current operating condition is updated. By combining the two, the subsequent gas-liquid ratio parameters simultaneously consider the time change of the current liquid phase concentration and the actual gas phase concentration response verified under different calibration operating conditions.

[0130] The foregoing has illustrated and described the basic features, principles, and advantages of the present invention. It should be noted that the present invention is not limited to the above embodiments, but only to some embodiments. Any improvements and additions made without departing from the spirit and scope of the present invention are considered to be within the scope of protection of the present invention.

Claims

1. A standard concentration vapor calibration method for a vaporized hydrogen peroxide sensor, characterized in that, include: Obtain the actual liquid phase concentration of liquid hydrogen peroxide, determine the ratio parameter of carrier gas to liquid hydrogen peroxide based on the target gas phase concentration and the actual liquid phase concentration, and adjust the carrier gas flow rate and liquid hydrogen peroxide flow rate according to the ratio parameter. The regulated liquid hydrogen peroxide is vaporized and mixed with carrier gas to generate hydrogen peroxide vapor. The hydrogen peroxide vapor is transported under temperature control, and the hydrogen peroxide vapor from the same source is distributed to the metering path and the reference path. The actual gas concentration in the reference path is directly obtained by a gas phase concentration detection method based on the optical absorption principle. The ratio parameter is corrected according to the deviation between the actual gas phase concentration and the target gas phase concentration, and the hydrogen peroxide vapor concentration is adjusted. The concentration information at different spatial locations within the metering path is obtained and the concentration field uniformity is determined. The gas phase concentration information within a continuous time period is obtained and the concentration time stability is determined. When the concentration field uniformity and the concentration time stability are both within the corresponding preset range, the output value of the vaporized hydrogen peroxide sensor to be calibrated and the actual gas phase concentration are obtained simultaneously. The actual gas phase concentration is used as the calibration benchmark to determine the calibration parameters of the vaporized hydrogen peroxide sensor to be calibrated. The gas mixing model for the specified ratio parameters is determined based on historical operating condition data, and the gas-liquid ratio parameters are determined through the corrected gas mixing model.

2. The standard concentration vapor calibration method for a vaporized hydrogen peroxide sensor according to claim 1, characterized in that, Acquiring the output value of the vaporized hydrogen peroxide sensor to be calibrated and the actual gas phase concentration includes, during the process of correcting the ratio parameters, continuously acquiring the actual gas phase concentration change information of the reference path and the output change information of the vaporized hydrogen peroxide sensor to be calibrated, using the hydrogen peroxide vapor concentration transition process caused by the ratio parameter change as a time series reference, determining the time correspondence between the actual gas phase concentration change time series and the response time series of the vaporized hydrogen peroxide sensor to be calibrated, and after the concentration field uniformity and concentration time stability meet the corresponding preset range, determining the effective calibration data interval according to the time correspondence, and determining the calibration parameters according to the corresponding actual gas phase concentration and sensor output value within the effective calibration data interval.

3. The standard concentration vapor calibration method for a vaporized hydrogen peroxide sensor according to claim 1, characterized in that, The determination of the concentration field uniformity includes: acquiring concentration information of hydrogen peroxide vapor at different spatial locations along the flow direction of the metering path; determining the spatial distribution state of the concentration field based on the concentration change relationship between each spatial location; adjusting the delivery state and / or temperature control state of hydrogen peroxide vapor when the concentration changes continuously along the flow direction; adjusting the flow state of hydrogen peroxide vapor within the metering path when the concentration at a local spatial location deviates from that at an adjacent spatial location; and reacquiring the concentration information at different spatial locations after adjustment until the concentration field meets the preset uniformity requirements.

4. The standard concentration vapor calibration method for a vaporized hydrogen peroxide sensor according to claim 1, characterized in that, Acquiring gas phase concentration information over a continuous period and determining concentration time stability includes: after correcting the ratio parameters, continuously acquiring gas phase concentration change information, determining multiple continuous observation intervals in chronological order, determining the concentration fluctuation state within each observation interval and the concentration change trend between adjacent observation intervals, determining that the hydrogen peroxide vapor has reached a stable concentration state for sensor calibration when the concentration fluctuation within each observation interval meets the preset stability requirements and there is no continuous unidirectional concentration shift between adjacent observation intervals, and when the concentration fluctuation meets the preset stability requirements but there is a continuous unidirectional concentration shift, continuing concentration monitoring and ratio parameter correction until the continuous unidirectional concentration shift is eliminated.

5. The standard concentration steam calibration method for a vaporized hydrogen peroxide sensor according to claim 1, characterized in that, The correction of the proportioning parameters includes: continuously acquiring the gas phase concentration deviation within multiple feedback cycles; determining the concentration response state corresponding to the previous proportioning parameter correction based on the direction of change of the gas phase concentration deviation in adjacent feedback cycles; when the gas phase concentration deviation continues to change along the direction before correction after the proportioning parameter correction, maintaining the current proportioning parameter and continuing to acquire the actual gas phase concentration until the gas phase concentration deviation produces a change corresponding to the proportioning parameter correction; when the gas phase concentration deviation continues to decrease and approaches the calibration range corresponding to the target gas phase concentration, reducing the correction degree of subsequent proportioning parameters; when the gas phase concentration deviation exceeds the calibration range and reverses direction, correcting the proportioning parameter in the opposite direction based on the reversed deviation direction until the actual gas phase concentration stabilizes within the calibration range.

6. The standard concentration vapor calibration method for a vaporized hydrogen peroxide sensor according to claim 1, characterized in that, The acquisition of the calibration parameters includes: forming standard concentration vapors that meet the requirements of concentration field uniformity and concentration-time stability at multiple target gas phase concentrations; acquiring first calibration data in ascending order of target gas phase concentration and second calibration data in descending order of target gas phase concentration; comparing the outputs of the vaporized hydrogen peroxide sensor to be calibrated at the corresponding actual gas phase concentrations in the first and second calibration data to determine the response deviation state of the sensor output as the concentration changes; distinguishing between the concentration measurement deviation of the sensor and the dynamic response deviation caused by the concentration change process based on the correspondence between the actual gas phase concentration and the sensor output at each target gas phase concentration and the response deviation state; and determining the calibration parameters accordingly.

7. The standard concentration vapor calibration method for a vaporized hydrogen peroxide sensor according to claim 1, characterized in that, The method includes: continuously acquiring the liquid phase concentration of liquid hydrogen peroxide; determining the concentration change trend of liquid hydrogen peroxide based on the changes in liquid phase concentration at different time periods; determining the expected liquid phase concentration corresponding to its participation in subsequent steam generation based on the concentration change trend and the process state of liquid hydrogen peroxide from concentration acquisition to participation in vaporization; determining the gas-liquid ratio parameter by replacing the current actual liquid phase concentration with the expected liquid phase concentration; determining the feedforward compensation state corresponding to the expected liquid phase concentration based on the actual gas phase concentration of hydrogen peroxide vapor generated according to the gas-liquid ratio parameter; and correcting the ratio parameter corresponding to the subsequent liquid phase concentration change trend based on the feedforward compensation state.

8. The standard concentration vapor calibration method for a vaporized hydrogen peroxide sensor according to claim 1, characterized in that, The correction of the gas distribution model includes: determining multiple candidate historical operating conditions from the effective historical operating condition data based on the current liquid phase concentration, target gas phase concentration, and operating conditions; selecting target historical operating conditions that have a corresponding concentration response relationship with the current calibration process based on the change in actual gas phase concentration after adjusting the proportioning parameters in each candidate historical operating condition; correcting the local gas distribution relationship corresponding to the current calibration state based on the correspondence between the proportioning parameters and the actual gas phase concentration deviation in the target historical operating conditions, while keeping the gas distribution relationships corresponding to other calibration states unchanged; determining subsequent gas-liquid proportioning parameters based on the corrected local gas distribution relationship; and updating the correction result of the local gas distribution relationship based on the subsequent actual gas phase concentration.

9. A standard concentration steam calibration system for a vaporized hydrogen peroxide sensor, applicable to the standard concentration steam calibration method for a vaporized hydrogen peroxide sensor as described in any one of claims 1 to 8, characterized in that, include: The liquid phase concentration acquisition unit is used to acquire the actual liquid phase concentration of liquid hydrogen peroxide; The gas-liquid preparation unit is connected to the carrier gas flow rate adjustment unit and the liquid hydrogen peroxide flow rate adjustment unit, respectively. It is used to determine the gas-liquid ratio parameters according to the target gas phase concentration and the actual liquid phase concentration, and to adjust the carrier gas flow rate and the liquid hydrogen peroxide flow rate according to the gas-liquid ratio parameters. A steam generation and temperature-controlled delivery unit is used to vaporize the regulated liquid hydrogen peroxide and mix it with a carrier gas to form hydrogen peroxide vapor, and to deliver the hydrogen peroxide vapor at a controlled temperature. A dual-path distribution unit is located downstream of the steam generation and temperature control delivery unit, used to deliver hydrogen peroxide vapor from the same source to the metering path and the reference path respectively. The metering path is connected to the sensor metering cavity for accommodating the vaporized hydrogen peroxide sensor to be calibrated. A gas phase concentration reference measurement unit is set in the reference path and obtains the actual gas phase concentration based on the optical absorption principle. The gas phase concentration reference measurement unit is communicatively connected to the gas-liquid preparation unit to correct the gas-liquid ratio parameter according to the deviation between the actual gas phase concentration and the target gas phase concentration. The concentration field verification unit is used to acquire gas phase concentration information at different spatial locations and in continuous time periods within the metering path, and to determine the concentration field uniformity and concentration time stability respectively. The metrology calibration unit is used to simultaneously acquire the output value of the vaporized hydrogen peroxide sensor to be calibrated and the actual gas phase concentration when the concentration field uniformity and concentration time stability meet the corresponding preset range, and determine the calibration parameters of the vaporized hydrogen peroxide sensor to be calibrated according to the correspondence between the two. The gas distribution model correction unit is used to correct the gas distribution model used to determine the gas-liquid ratio parameters based on the historical operating condition data generated during the calibration process, and to provide the corrected gas distribution model to the gas-liquid preparation unit to determine the gas-liquid ratio parameters in the subsequent standard concentration steam generation process.

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