Leveling landing method and apparatus for an active isolation system

By using the leveling and lowering method of the active vibration isolation system, and through the coordinated control of the pneumatic circuit and the motor position circuit, the high-precision equipment can be smoothly lowered when it stops or is powered off, protecting precision components, ensuring the horizontal accuracy and coaxiality of the equipment, and extending the life of the vibration damper.

CN123029987APending Publication Date: 2026-11-03BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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Patent Information

Application Number
CN202611202943.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-08-10
Publication Date
2026-11-03

AI Technical Summary

Technical Problem

In traditional methods, the passive descent of high-precision equipment during shutdown or power outage can cause impact and vibration damage to precision components. Furthermore, the asynchronous descent of multiple shock absorbers can cause the equipment to tilt or shift, compromising its horizontal accuracy and coaxiality.

Method used

The leveling and landing method using an active vibration isolation system maintains the horizontal stability of the internal world and descends slowly through the coordinated control of the pneumatic circuit and the motor position circuit. Vertical position sensors detect changes in vertical position to terminate horizontal control and pneumatic circuit pressure, ensuring a smooth landing.

Benefits of technology

It enables a slow, controlled descent, protecting precision components, ensuring the equipment's horizontal accuracy and coaxiality, extending the life of the shock absorber, and preventing impact damage.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application provides a leveling landing method and device for an active vibration isolation system, which comprises the following steps: maintaining an inner world of the active vibration isolation system in a horizontal stable position and a vertical stable position for a first preset time period; after the first preset time period ends, terminating vertical control of a motor position loop, reducing pressure of a pneumatic loop to a set value at a set rate, and maintaining the horizontal control in a working state, so that the inner world performs landing under the action of the horizontal control; and when a vertical position sensor of the pneumatic loop detects that a vertical position change amount of the inner world in a second preset time period is less than a first preset threshold, the horizontal control is terminated. Through the application, the inner world can be stably and slowly landed in a controlled state in a parallel manner of vertical release and horizontal holding during the landing process of the inner world, so as to reduce impact damage of precise parts in the landing process.
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Description

Technical Field

[0001] This application relates to the field of precision manufacturing technology, and more specifically, to a leveling and lowering method and apparatus for an active vibration isolation system. Background Technology

[0002] In high-precision equipment, active vibration isolation systems separate the internal and external environments using vibration dampers to suppress vibrations and improve equipment accuracy. The internal environment is heavy and contains precision components. In scenarios requiring descent, such as shutdowns or power outages, traditional passive descent methods directly terminate the pneumatic and motor position circuits, allowing the internal environment to fall freely without control. The resulting impact vibrations can easily damage precision components, and asynchronous descent of multiple dampers can cause the equipment to tilt horizontally, compromising overall horizontal accuracy and coaxiality. Summary of the Invention

[0003] In view of this, the purpose of this application is to provide a leveling and lowering method and apparatus for an active vibration isolation system, which aims to overcome at least one of the above-mentioned defects.

[0004] In a first aspect, this application provides a leveling and lowering method for an active vibration isolation system, comprising: (A) The internal world of the active vibration isolation system is maintained in a horizontal and vertical stable position for a first preset period of time, wherein the internal world is supported by the pneumatic circuit and the motor position circuit of the active vibration isolation system, and the motor position circuit has horizontal control and vertical control. (B) After the first preset time period ends, the vertical control of the motor position circuit is terminated, and the pressure of the pneumatic circuit is reduced to a set value at a set rate, while the horizontal control is kept in operation so that the inner world can descend under the action of the horizontal control. (C) When the vertical position sensor of the pneumatic circuit detects that the vertical position change of the inner world is less than the first preset threshold during the second preset time period, the horizontal control is terminated and the pressure of the pneumatic circuit is set to zero to complete the descent of the inner world. (D) After the landing is completed, wait for a third preset period of time, obtain the error value between the actual horizontal position of the internal world and the stable horizontal position, and return to step (A) when the error value is greater than a second preset threshold.

[0005] In one possible implementation, step (B) includes: (B1) Terminate the vertical control; (B2) The pressure of the pneumatic circuit is reduced to the set value at a fixed descent rate within a first preset time period of 30 seconds.

[0006] In one possible implementation, step (A) includes: (A1) Obtain the current horizontal and vertical positions of the internal world; (A2) The current horizontal position is adjusted to the horizontally stable position by the horizontal control, and the current vertical position is adjusted to the vertically stable position by the vertical control; (A3) Maintain the horizontal and vertical stable positions and continue for the first preset time period.

[0007] In one possible implementation, when returning to step (A) in step (D), the method further includes: (D1) Change the set value; (D2) Change the duration of at least one of the first preset time period, the second preset time period, and the third preset time period.

[0008] In one possible implementation, it also includes: (E) If the error value is not greater than the second preset threshold, then the leveling and landing process ends.

[0009] In one possible implementation, the active vibration isolation system includes three vibration dampers, the pneumatic circuit includes three vertical pneumatic circuits corresponding to the three vibration dampers, and the motor position circuit includes three vertical motors and three horizontal motors corresponding to the three vibration dampers. The vertical control terminated in step (B) is the control of the three vertical motors; The vertical position sensors mentioned in step (C) are three vertical position sensors corresponding to the three vibration dampers respectively.

[0010] Secondly, this application provides a leveling and lowering device for an active vibration isolation system, comprising: The first maintenance module is used to maintain the internal world of the active vibration isolation system in a horizontal and vertical stable position for a first preset period of time. The internal world is supported by the pneumatic circuit and the motor position circuit of the active vibration isolation system. The motor position circuit has horizontal control and vertical control. The second maintenance module is used to terminate the vertical control of the motor position circuit after the first preset time period ends, reduce the pressure of the pneumatic circuit to a set value at a set rate, and maintain the horizontal control in the working state so that the internal world can perform descent under the action of the horizontal control. The first detection module is used to terminate the horizontal control and set the pressure of the pneumatic circuit to zero when the vertical position sensor of the pneumatic circuit detects that the vertical position change of the internal world is less than the first preset threshold during the second preset time period, so as to complete the descent of the internal world. The second detection module is used to wait for a third preset period after the landing is completed, obtain the error value between the actual horizontal position and the stable horizontal position of the internal world, and return to the first maintenance module when the error value is greater than a second preset threshold.

[0011] In one possible implementation, the second maintenance module is further configured to: Terminate the vertical control; The pressure of the pneumatic circuit is reduced to the set value at a fixed descent rate within a first preset time period, which is 30 seconds.

[0012] Thirdly, this application also provides an electronic device, including: a processor, a memory, and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor communicates with the memory via the bus, and when the machine-readable instructions are executed by the processor, the steps of the method described above are performed.

[0013] Fourthly, this application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, performs the steps of the method described above.

[0014] This application provides a leveling and landing method and apparatus for an active vibration isolation system. The method includes: maintaining the internal structure of the active vibration isolation system in a horizontally stable position and a vertically stable position for a first preset time period; after the first preset time period ends, terminating the vertical control of the motor position circuit and reducing the pressure of the pneumatic circuit to a set value at a set rate, while maintaining the horizontal control in operation, so that the internal structure can land under the action of the horizontal control; when the vertical position sensor of the pneumatic circuit detects that the change in the vertical position of the internal structure is less than a first preset threshold during a second preset time period, terminating the horizontal control and setting the pressure of the pneumatic circuit to zero, thereby completing the landing of the internal structure. This application enables the internal structure to land smoothly and slowly under controlled conditions by simultaneously releasing vertically and maintaining horizontal position during landing, thereby reducing impact damage to precision components during landing and ensuring the overall horizontal accuracy and coaxiality of the system after landing.

[0015] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A flowchart of a leveling and landing method for an active vibration isolation system provided in this application embodiment; Figure 2 This is a schematic diagram of the leveling and lowering device for an active vibration isolation system provided in an embodiment of this application; Figure 3 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. Based on the embodiments of this application, every other embodiment obtained by those skilled in the art without inventive effort falls within the scope of protection of this application.

[0019] First, the applicable scenarios for this application will be introduced. This application can be applied to the technical field of precision manufacturing.

[0020] Research has revealed that high-precision equipment primarily consists of an internal world and an external world. The active vibration isolation system separates the internal world from the external world via vibration dampers. The internal world is supported by the pneumatic and motor positioning circuits of the active vibration isolation system. The internal world itself is extremely heavy; rapid descent can easily generate impact vibrations, damaging precision components and incurring extremely high repair costs. Furthermore, asynchronous descent of multiple vibration dampers can cause equipment tilting, shifting, and uneven stress, compromising the overall horizontal accuracy and coaxiality of the machine. Traditional solutions employ a passive descent method, directly terminating the pneumatic and motor positioning circuits of the active vibration isolation system, resulting in zero output from the corresponding actuators. This termination process is uncontrollable and lacks buffering for the descent of the internal world. This method causes significant impact on the internal world, reducing the lifespan of the vibration damper airbags or rubber components, potentially generating impact vibrations and stresses that damage precision parts. Moreover, asynchronous descent can lead to misalignment of the equipment.

[0021] Based on this, the present application provides a leveling and lowering method and device for an active vibration isolation system. By slowly lowering the pneumatic circuit while maintaining horizontal accuracy, the vibration of the internal world is reduced to protect precision components. In addition, multiple sets of vibration dampers fall synchronously to ensure the horizontal accuracy and coaxiality of the whole machine.

[0022] Please see Figure 1 , Figure 1 This application provides a flowchart of a leveling and lowering method for an active vibration isolation system. Taking an active vibration isolation system composed of three dampers as an example, the system includes a pneumatic circuit and a motor position circuit. The motor position circuit provides horizontal and vertical control. The active vibration isolation system includes three dampers. The pneumatic circuit includes three vertical pneumatic circuits corresponding to the three dampers, namely Z1, Z2, and Z3 in the vertical directions. These three vertical pneumatic circuits provide the main vertical support force. The motor position circuit includes three vertical motors and three horizontal motors corresponding to the three dampers. The three vertical motors control the vertical stability of Z, Rx, and Ry, and the three horizontal motors control the horizontal stability of X, Y, and Rz. The following uses three dampers as an example, combined with... Figure 1 Each step is explained in detail.

[0023] In step S101, the internal world of the active vibration isolation system is maintained in a horizontally stable position and a vertically stable position for a first preset period of time.

[0024] The internal world is supported by the pneumatic circuit of the active vibration isolation system and the motor position circuit.

[0025] Specifically, before initiating the leveling and landing, the landing time and target control pressure are set, and the pneumatic circuit and motor position circuit are initialized. After initialization, the pneumatic circuit and motor position circuit enter a closed-loop control state, jointly adjusting the internal world to a horizontally stable position and a vertically stable position. The process of maintaining the internal world in the horizontally stable position and vertically stable position in step (A) includes: obtaining the current horizontal and vertical positions of the internal world, adjusting the current horizontal position to the horizontally stable position through horizontal control, adjusting the current vertical position to the vertically stable position through vertical control, and maintaining the horizontally stable position for a first preset period of time. During this process, the horizontal control is executed by three horizontal motors, the three vertical pneumatic circuits of the pneumatic circuit provide vertical support force for the internal world and perform basic control of the vertical position, and the three vertical motors perform high-precision correction of the vertical position based on the vertical support provided by the pneumatic circuits. The three vertical pneumatic circuits are the Z1, Z2, and Z3 pneumatic circuits corresponding to the three vibration dampers. After the active vibration isolation system has been running stably for the first preset period, the interior world has reached a stable horizontal and vertical attitude, meeting the initial conditions for subsequent landing operations.

[0026] In step S102, after the first preset time period ends, the vertical control of the motor position circuit is terminated, and the pressure of the pneumatic circuit is reduced to a set value at a set rate, while the horizontal control is kept in operation so that the interior world can descend under the action of the horizontal control.

[0027] Step S102 can be broken down into two sub-steps: first, terminating vertical control, and then reducing the pressure of the pneumatic circuit to a set value within a first preset time period at a fixed descent rate. The first preset time period is 30 seconds, and the set rate is a fixed descent rate, meaning that the closed-loop control pressure of the pneumatic circuit decreases uniformly at a fixed descent rate within 30 seconds. The terminated vertical control specifically refers to the control of the three vertical motors, i.e., terminating the motor position loop control in the Z, Rx, and Ry directions. Simultaneously, horizontal control remains operational, meaning the three horizontal motors in the X, Y, and Rz directions continue to maintain horizontal closed-loop control, ensuring the internal world remains horizontal and untilted throughout its descent. The set value is the target value to which the pneumatic circuit pressure is to decrease during descent. This set value is less than the pressure value when the internal world maintains a stable horizontal position; that is, the pneumatic circuit pressure gradually decreases from the initial closed-loop control pressure to this set value within 30 seconds. During this process, the internal world begins to descend slowly under the guidance of the pneumatic circuit, while simultaneously being continuously locked in the horizontal direction by the horizontal control.

[0028] In step S103, when the vertical position sensor of the pneumatic circuit detects that the change in the vertical position of the inner world is less than the first preset threshold during the second preset time period, the horizontal control is terminated and the pressure of the pneumatic circuit is set to zero to complete the descent of the inner world.

[0029] The vertical position sensors are three sensors corresponding to the three vibration dampers, used to detect the positions in the three vertical directions Z1, Z2, and Z3 in real time. The second preset time period is 60 seconds, and the first preset threshold is 5 micrometers. After the pressure drop process in step S102 ends, the system enters the vertical stability detection stage. If the three vertical position sensors detect that the vertical position changes in the three directions Z1, Z2, and Z3 do not exceed 5 micrometers within a continuous 60-second period, it indicates that the internal world has basically stopped vertical movement, the landing impact has been eliminated, and the internal world has landed safely. At this time, the horizontal control is terminated, that is, the control of the three horizontal motors in the X, Y, and Rz directions is terminated, and then the closed-loop control pressure of the pneumatic circuit is set to zero, and the internal world completes its descent.

[0030] In step S104, after landing, wait for a third preset time period, obtain the error value between the actual horizontal position and the stable horizontal position in the internal world, and determine whether the error value is greater than a second preset threshold. If it is greater than the second preset threshold, return to step S101.

[0031] The third preset time period is 180 seconds, and the second preset threshold is ±30 micrometers. After landing in step S103, the system waits for 180 seconds to allow the internal world to settle completely. After 180 seconds, the actual horizontal position of the internal world is measured and compared with the stable horizontal position maintained in step S101, and the error value between the two is calculated. If the error value is greater than ±30 micrometers, it indicates that the landing process did not meet the horizontal accuracy requirements. At this time, the active vibration isolation system needs to be reinitialized, the closed-loop control pressure value of the pneumatic loop after landing (i.e., the set value) needs to be changed, and the duration of at least one of the first, second, and third preset time periods needs to be changed. Then, the process returns to step S101 and the entire leveling and landing process is re-executed.

[0032] If the value is not greater than the second preset threshold, then step S105 is executed to end the leveling and landing.

[0033] If the error value is no greater than ±30 micrometers, that is, the change in horizontal position is within ±30 micrometers, it indicates that the internal world horizontal offset after landing is within a controllable range, and the overall horizontal accuracy and coaxiality of the aircraft meet the requirements, then the leveling and landing is terminated.

[0034] It should be noted that in the above embodiments, the active vibration isolation system is illustrated using a layout containing three vibration dampers as an example, but the scope of protection of this application is not limited to this, and active vibration isolation systems with other layouts are equally applicable. The specific numerical parameters involved in the embodiments, including the first preset time period of 30 seconds, the second preset time period of 60 seconds, the first preset threshold of 5 micrometers, the third preset time period of 180 seconds, and the second preset threshold of ±30 micrometers, are all adjustable parameters and can be adjusted accordingly based on the actual weight of the equipment, the characteristics of the pneumatic circuit, and the accuracy requirements.

[0035] Compared with existing technologies, this application divides the descent process of the internal world into a step-by-step control sequence of vertical release and horizontal maintenance in parallel. After terminating vertical control, the pneumatic circuit pressure is reduced at a set rate to allow the internal world to descend slowly, while horizontal control continues to operate to lock the horizontal attitude. The vertical position change detected by the vertical position sensor within a preset time period is less than a preset threshold as the trigger condition for terminating horizontal control and setting the pneumatic circuit pressure to zero. This achieves a smooth and slow descent of the internal world, avoids impact damage to precision components during the descent process, ensures the synchronization of the descent process of multiple shock absorbers, and maintains the horizontal accuracy and coaxiality of the entire machine after descent. It also extends the service life of the shock absorber airbags or rubber parts. Furthermore, the closed-loop mechanism of detecting horizontal position error after descent and re-initializing and retrying ensures that the horizontal offset of the internal world after descent is always within a controllable range.

[0036] Based on the same inventive concept, this application also provides a leveling and landing device for an active vibration isolation system, which corresponds to the leveling and landing method for an active vibration isolation system. Since the principle of the device in this application is similar to the leveling and landing method for an active vibration isolation system described above, the implementation of the device can refer to the implementation of the method, and the repeated parts will not be described again.

[0037] Please see Figure 2 , Figure 2 This is a schematic diagram of the leveling and lowering device for an active vibration isolation system provided in an embodiment of this application. Figure 2 As shown, the leveling and lowering device 200 for the active vibration isolation system includes: The first maintenance module 201 is used to maintain the internal world of the active vibration isolation system in a horizontal and vertical stable position for a first preset period of time. The internal world is supported by the pneumatic circuit and the motor position circuit of the active vibration isolation system. The motor position circuit has horizontal control and vertical control.

[0038] The second maintenance module 202 is used to terminate the vertical control of the motor position circuit after the first preset time period ends, reduce the pressure of the pneumatic circuit to a set value at a set rate, and maintain the horizontal control in the working state so that the internal world can perform descent under the action of the horizontal control.

[0039] The first detection module 203 is used to terminate the horizontal control and set the pressure of the pneumatic circuit to zero when the vertical position sensor of the pneumatic circuit detects that the vertical position change of the inner world is less than the first preset threshold during the second preset time period, so as to complete the descent of the inner world.

[0040] The second detection module 204 is used to wait for a third preset period after the landing is completed, obtain the error value between the actual horizontal position and the stable horizontal position of the internal world, and return to the first maintenance module when the error value is greater than a second preset threshold.

[0041] Please see Figure 3 , Figure 3 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Figure 3 As shown, the electronic device 300 includes a processor 310, a memory 320, and a bus 330.

[0042] The memory 320 stores machine-readable instructions that can be executed by the processor 310. When the electronic device 300 is running, the processor 310 and the memory 320 communicate via the bus 330. When the machine-readable instructions are executed by the processor 310, the steps of the method described above can be performed. For specific implementation details, please refer to the method embodiment, which will not be repeated here.

[0043] This application also provides a computer-readable storage medium storing a computer program. When the computer program is run by a processor, it can execute the steps of the method described above. For specific implementation details, please refer to the method embodiments, which will not be repeated here.

[0044] Those skilled in the art will understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0045] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the shown or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0046] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0047] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0048] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0049] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The scope of protection of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A leveling and lowering method for an active vibration isolation system, characterized in that, include: (A) The internal world of the active vibration isolation system is maintained in a horizontal and vertical stable position for a first preset period of time, wherein the internal world is supported by the pneumatic circuit and the motor position circuit of the active vibration isolation system, and the motor position circuit has horizontal control and vertical control. (B) After the first preset time period ends, the vertical control of the motor position circuit is terminated, and the pressure of the pneumatic circuit is reduced to a set value at a set rate, while the horizontal control is kept in operation so that the inner world can descend under the action of the horizontal control. (C) When the vertical position sensor of the pneumatic circuit detects that the vertical position change of the inner world is less than the first preset threshold during the second preset time period, the horizontal control is terminated and the pressure of the pneumatic circuit is set to zero to complete the descent of the inner world. (D) After the landing is completed, wait for a third preset period of time, obtain the error value between the actual horizontal position of the internal world and the stable horizontal position, and return to step (A) when the error value is greater than a second preset threshold.

2. The leveling and landing method according to claim 1, characterized in that, Step (B) includes: (B1) Terminate the vertical control; (B2) The pressure of the pneumatic circuit is reduced to the set value at a fixed descent rate within a first preset time period of 30 seconds.

3. The leveling and landing method according to claim 1, characterized in that, Step (A) includes: (A1) Obtain the current horizontal and vertical positions of the internal world; (A2) The current horizontal position is adjusted to the horizontally stable position by the horizontal control, and the current vertical position is adjusted to the vertically stable position by the vertical control; (A3) Maintain the horizontal and vertical stable positions and continue for the first preset time period.

4. The leveling and landing method according to claim 1, characterized in that, When returning to step (A) in step (D), the process also includes: (D1) Change the set value; (D2) Change the duration of at least one of the first preset time period, the second preset time period, and the third preset time period.

5. The leveling and landing method according to claim 1, characterized in that, Also includes: (E) If the error value is not greater than the second preset threshold, then the leveling and landing process ends.

6. The leveling and landing method according to claim 1, characterized in that, The active vibration isolation system includes three vibration dampers, the pneumatic circuit includes three vertical pneumatic circuits corresponding to the three vibration dampers, and the motor position circuit includes three vertical motors and three horizontal motors corresponding to the three vibration dampers. The vertical control terminated in step (B) is the control of the three vertical motors; The vertical position sensor mentioned in step (C) is a vertical position sensor corresponding to each of the three vibration dampers.

7. A leveling and lowering device for an active vibration isolation system, characterized in that, include: The first maintenance module is used to maintain the internal world of the active vibration isolation system in a horizontal and vertical stable position for a first preset period of time. The internal world is supported by the pneumatic circuit and the motor position circuit of the active vibration isolation system. The motor position circuit has horizontal control and vertical control. The second maintenance module is used to terminate the vertical control of the motor position circuit after the first preset time period ends, reduce the pressure of the pneumatic circuit to a set value at a set rate, and maintain the horizontal control in the working state so that the internal world can perform descent under the action of the horizontal control. The first detection module is used to terminate the horizontal control and set the pressure of the pneumatic circuit to zero when the vertical position sensor of the pneumatic circuit detects that the vertical position change of the internal world is less than the first preset threshold during the second preset time period, so as to complete the descent of the internal world. The second detection module is used to wait for a third preset period after the landing is completed, obtain the error value between the actual horizontal position and the stable horizontal position of the internal world, and return to the first maintenance module when the error value is greater than a second preset threshold.

8. The leveling and landing device according to claim 7, characterized in that, The second maintenance module is also used for: Terminate the vertical control; The pressure of the pneumatic circuit is reduced to the set value at a fixed descent rate within a first preset time period, which is 30 seconds.

9. An electronic device, characterized in that, include: The device includes a processor, a memory, and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is in operation, the processor communicates with the memory via the bus, and the processor executes the machine-readable instructions to perform the steps of the method as described in any one of claims 1 to 6.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, performs the steps of the method as described in any one of claims 1 to 6.