Adaptive variable stiffness bernoulli air floating end effector

Abstract

The present application relates to the technical field of precision substrate transport equipment, and more particularly to a self-adaptive variable stiffness Bernoulli air floating end effector, which has the technical scheme as follows: comprising a mounting base and a framework main body fixed to one side of the mounting base, the framework main body comprises a fixed framework assembly fixed to one end of the mounting base and a plurality of movable framework assemblies connected in series along the length direction; each movable framework assembly comprises a movable framework piece, a driving piece, a Bernoulli chuck and an internal air pipe; the movable framework piece is internally provided with a cavity and is provided with an air path interface at the end; the Bernoulli chuck is embedded on the upper surface of the movable framework piece; the internal air pipe is arranged in the interior of the movable framework piece and is connected with the Bernoulli chuck and the air path interface; the driving piece is fixed to one end of the movable framework piece close to the fixed framework assembly and is hinged to the adjacent previous assembly. The present application has the advantages of strong deformation adaptability, stable air floating posture and reliable air path operation.

Description

Technical Field

[0001] This invention relates to the technical field of precision substrate transport equipment, and more specifically, to an adaptive variable stiffness Bernoulli air-bearing end effector. Background Technology

[0002] As semiconductor manufacturing processes upgrade towards larger sizes and micro-nano dimensions, and the high-generation flat panel display industry develops rapidly, the size of substrates to be transported continues to increase while their thickness decreases, making the sagging deformation caused by the weight of the workpieces increasingly apparent. These ultra-thin precision workpieces have extremely high requirements for cleanliness and non-damage during the transport process. Bernoulli air flotation adsorption technology, with its non-contact and particulate-free characteristics, has become the mainstream transport solution in this scenario.

[0003] Existing conventional Bernoulli air-bearing end effectors mostly adopt an integral rigid frame structure, with the Bernoulli suction cup fixedly mounted on the flat upper surface of the frame. This structure can work stably in small-sized substrate scenarios, but it has inherent limitations when dealing with large-sized ultra-thin substrates: the rigid frame cannot match the natural downward curvature of the substrate, resulting in significant differences in the air-bearing gap between the suction cup and the substrate surface at different positions. Where the gap is too large, the suction force is insufficient, which can easily cause the substrate to shift or even slip; where the gap is too small, there is a risk of contact and scratching the workpiece, making it difficult to simultaneously ensure handling stability and product yield.

[0004] To improve surface adaptability, some solutions employ a segmented, hinged, adjustable frame structure, adjusting the overall curvature by rotating the multiple frame segments relative to each other. However, in these solutions, the suction cups are often separately assembled onto the frame via brackets and fasteners, failing to form a rigid, integrated connection. When the frame deflects around the hinge axis, the suction cups cannot maintain synchronized angular deflection with the frame, causing a shift in the relative orientation of their working surfaces to the substrate. Consequently, a uniform and optimal air gap cannot be maintained, significantly diminishing the effectiveness of adaptive adjustment.

[0005] In addition, existing gas supply systems mostly use external hoses laid along the outer surface of the frame. The hoses at the hinge joints need to be bent repeatedly as the frame deflects. Long-term operation can easily lead to problems such as pipeline fatigue aging, sealing failure, and gas leakage, resulting in high maintenance costs and pollution to the clean production environment. Summary of the Invention

[0006] To address the shortcomings of existing technologies, the present invention aims to provide an adaptive variable stiffness Bernoulli air-float end effector, which has the advantages of strong deformation adaptability, stable air-float attitude, and reliable and clean air circuit operation.

[0007] The above-mentioned technical objective of the present invention is achieved through the following technical solution: an adaptive variable stiffness Bernoulli air-float end effector, comprising a mounting base and at least one skeleton body, the skeleton body being fixedly connected to one side of the mounting base, the skeleton body comprising a fixed skeleton assembly and a plurality of movable skeleton assemblies connected in series along the length direction, one end of the fixed skeleton assembly being fixedly connected to the mounting base; Each of the said movable skeleton components includes a movable skeleton part, a drive part, at least one Bernoulli suction cup, and an internal air tube; The movable frame component has a cavity inside, and its end has an air passage interface for connecting the air supply airflow. The drive component is fixed to one end of the movable skeleton component near the fixed skeleton assembly; The Bernoulli suction cup is embedded in the upper surface of the movable skeleton and can deflect synchronously with the movable skeleton to maintain a stable air-floating posture. The built-in air tube passes through the interior of the movable skeleton and connects the Bernoulli suction cup and the air passage interface. The driving component of the movable skeleton component near the head end of the fixed skeleton component is hinged to the end of the fixed skeleton component away from the mounting base, and is used to drive the corresponding movable skeleton component to deflect upward relative to the fixed skeleton component about the hinge point. The driving components of each of the remaining movable skeleton components are hinged to the end of the movable skeleton component of the adjacent preceding movable skeleton component that is away from the fixed skeleton component, and are used to drive the corresponding movable skeleton component to deflect upward relative to the preceding movable skeleton component around the hinge point.

[0008] In one embodiment, the drive is a miniature piezoelectric actuator, and its hinge with the preceding component is provided with a ball joint or a flexible hinge.

[0009] In one embodiment, the movable skeleton has an electrical channel inside, and the electrical channel is provided with the power supply line and control signal line of the drive component, as well as the signal transmission line of the workpiece detection sensor arranged on the movable skeleton. The electrical channel and the built-in air tube are arranged in parallel, and the two are separated by a solid material partition of the movable skeleton. The inner wall of the electrical channel is provided with an electromagnetic shielding layer.

[0010] In one embodiment, a flexible electrical adapter is provided at the hinge between two adjacent movable skeleton components for connecting the electrical channels between them. The flexible electrical adapter is a flexible ribbon cable, a miniature elastic contact assembly, or a flexible circuit board.

[0011] In one embodiment, a flexible air passage adapter is provided between the air outlet of the air passage interface and the air inlet of the built-in air tube, and between the air outlet of the built-in air tube and the air inlet of the Bernoulli suction cup, to achieve a sealed connection of the air passages.

[0012] In one embodiment, the flexible air passage adapter is a miniature rotary sealing ring, a corrugated hose, or a flexible rubber joint.

[0013] In one embodiment, the movable skeleton includes a base plate and a cover; The cover is placed on the base plate, one side of the base plate is hinged to one side of the cover, and the other side of the base plate is detachably locked to the other side of the cover by a snap-fit ​​structure. The Bernoulli suction cup is embedded in the upper surface of the cover.

[0014] In one embodiment, a through hole is provided on the upper surface of the cover, the Bernoulli suction cup is housed in the cavity, and its working end is embedded and snapped into the through hole; The working surface of the Bernoulli suction cup is exposed through the through hole, and its working surface does not protrude from the upper surface of the cover.

[0015] In one embodiment, multiple skeleton bodies are provided, and the multiple skeleton bodies are fixed side by side in the transverse direction to the same side of the mounting base.

[0016] In one embodiment, the mounting base has a mounting slot on the side facing the main body of the frame that mates with the end of the fixed frame assembly. The fixed frame assembly is embedded in the mounting slot and locked in place by fasteners.

[0017] The aforementioned adaptive variable stiffness Bernoulli air-float end effector has the following beneficial effects: Firstly, a hinged skeleton structure is adopted, in which a fixed skeleton component and several movable skeleton components are connected in series. Each movable skeleton component can independently adjust its deflection angle through its own configured drive component, which can make the skeleton body dynamically bend to form a continuous curved surface that matches the sag curvature of the large-size ultra-thin substrate. This fundamentally breaks through the limitation of insufficient deformation adaptability of traditional rigid skeletons and can accurately adapt to the deformation characteristics of large-size ultra-thin workpieces. Secondly, the Bernoulli suction cup is embedded in the upper surface of the movable skeleton to form a rigid integrated connection. It can deflect synchronously with the movable skeleton. Throughout the entire process of dynamic adjustment of the skeleton curvature, it always maintains the optimal relative posture between the working surface of the suction cup and the substrate surface, ensuring that the air-floating gap of each suction cup in the whole section is uniform and consistent, avoiding insufficient adsorption force or contact scratches caused by posture deviation. The air-floating posture is stable and the handling reliability is high. Third, the integrated gas path design with built-in gas pipes completely lays the gas pipeline inside the movable frame component, replacing the traditional solution of laying external hoses along the outer surface of the frame. This fundamentally eliminates the risk of fatigue aging, sealing failure and gas leakage caused by repeated bending of the pipeline during the hinge deflection process, reduces equipment maintenance costs, and reduces the risk of dust accumulation and particle precipitation on exposed structures, thus better meeting the high cleanliness requirements of semiconductor and flat panel display manufacturing processes. Attached Figure Description

[0018] Figure 1 This is a structural schematic diagram of this embodiment; Figure 2 This is a schematic diagram of the main skeleton structure in this embodiment; Figure 3 This is a schematic diagram showing the connection relationship between two adjacent movable skeleton components in this embodiment; Figure 4 This is a schematic diagram of the internal structure of the active skeleton component in this embodiment; Figure 5 This is a schematic diagram illustrating the working principle of the pre-compensated curved surface formed by the skeleton body in this embodiment.

[0019] In the diagram: 1. Mounting base; 11. Mounting slot; 2. Main frame; 21. Fixed frame assembly; 22. Movable frame assembly; 221. Movable frame component; 2211. Base plate; 2212. Cover; 2213. Through hole; 222. Drive component; 223. Bernoulli suction cup; 224. Built-in air tube; 225. Air passage interface; 226. Electrical passage; 3. Ball joint; 4. Flexible air passage adapter; 5. Snap-fit ​​structure; 6. Fastener. Detailed Implementation

[0020] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0021] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, unless otherwise explicitly specified.

[0023] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0024] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first and second features are in direct contact, or that they are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0025] An adaptive variable stiffness Bernoulli air-floating end effector is mainly designed for non-contact handling of large-size ultra-thin glass substrates of G8.6 generation and above. It can actively match the sag deformation caused by the substrate's own weight, meeting the stringent requirements of semiconductor and flat panel display manufacturing processes for non-destructive and high-cleanliness processes.

[0026] like Figure 1 As shown, the adaptive variable stiffness Bernoulli air-float end effector includes a mounting base 1 and at least one skeleton body 2. All skeleton bodies 2 are fixedly installed on the same side of the mounting base 1. Each skeleton body 2 includes a fixed skeleton assembly 21 and several movable skeleton assemblies 22 connected in series along the length direction. One end of the fixed skeleton assembly 21 is fixedly connected to the mounting base 1.

[0027] like Figures 2-4As shown, each movable frame assembly 22 includes a movable frame member 221, a drive member 222, at least one Bernoulli suction cup 223, and an internal air tube 224. The movable frame member 221 is made of carbon fiber material and has an internal cavity. Its end has an air passage interface 225 for receiving airflow. The drive member 222 is fixedly installed on the end of the movable frame member 221 near the fixed frame assembly 21. The Bernoulli suction cup 223 is embedded in the upper surface of the movable frame member 221 and can deflect synchronously with the movable frame member 221 to maintain a stable air-floating posture. The internal air tube 224 passes through the interior of the movable frame member 221 and connects the Bernoulli suction cup 223 and the air passage interface 225.

[0028] The first movable skeleton assembly 22 near the fixed skeleton assembly 21 has its driving member 222 hinged to the end of the fixed skeleton assembly 21 away from the mounting base 1, which is used to drive the corresponding movable skeleton member 221 to deflect upward relative to the fixed skeleton assembly 21 around the hinge point; the driving members 222 of each of the other movable skeleton assemblies 22 are all hinged to the end of the movable skeleton member 221 of the adjacent preceding movable skeleton assembly 22 away from the fixed skeleton assembly 21, which is used to drive the corresponding movable skeleton member 221 to deflect upward relative to the preceding movable skeleton member 221 around the hinge point, thereby realizing the step-by-step deflection adjustment of multiple skeleton segments.

[0029] In this embodiment, as Figure 5 As shown in (a), when handling large-sized thin glass substrates, the substrates sag due to their own weight. The workpiece detection sensor detects the sag curvature, as follows: Figure 5 As shown in (b), the control system drives each pressure drive component 222 to output different displacements, causing each movable skeleton component 221 to rotate at different angles, forming a pre-compensated curved surface that matches the downward curvature of the substrate. Since the Bernoulli suction cups 223 are embedded and fixed on the movable skeleton component 221, each Bernoulli suction cup 223 maintains a parallel posture to the substrate after deflection with the movable skeleton component 221. Compressed air enters from the air passage interface 225, passes through the built-in air pipe 224 to the Bernoulli suction cups 223, and generates a Bernoulli effect between the Bernoulli suction cups 223 and the substrate, realizing non-contact levitation transport.

[0030] like Figure 1 As shown, in this embodiment, the fixed frame assembly 21 is fixedly connected to the mounting base 1 at one end, serving as a fixed support reference for the entire frame assembly. The fixed frame assembly 21 is also equipped with a fixed frame component, a Bernoulli suction cup 223, and an internal air tube 224. Its suction cup mounting method and air tube connection method are consistent with the corresponding structure of the movable frame assembly 22, and will not be described again here. Unlike the movable frame assembly 22, the fixed frame assembly 21 does not have a driving component 222, and the whole assembly remains relatively fixed to the mounting base 1.

[0031] In practical applications, the Bernoulli suction cups 223 are embedded in a matrix on the upper surface of the movable skeleton 221, forming a rigid integrated connection with the movable skeleton 221. When the skeleton deflects, the suction cups can deflect synchronously, keeping the working surface parallel to the substrate surface throughout the process. In the working state, a stable air film of 0.2mm to 0.5mm can be formed between the suction cups and the substrate, making the substrate completely suspended and eliminating contact scratches, electrostatic adsorption, and particulate contamination. The matrix arrangement can form a continuous and uniform air-bearing support surface on the entire skeleton, avoiding local suspension or uneven stress on large-sized substrates. The built-in air pipes 224 are arranged inside the movable skeleton 221, with both ends connected to the end air passage interface 225 and the air inlet of the Bernoulli suction cups 223, respectively, to supply the suction cups with a constant pressure airflow.

[0032] Specifically, such as Figure 3 As shown, the driving component 222 is a miniature piezoelectric actuator, and a ball joint 3 is provided at its hinge point with the preceding component. A flexible hinge can also be used for rotational connection. The miniature piezoelectric actuator has a response speed of milliseconds and a displacement resolution of nanometers. It can accurately output displacement based on control signals. Its output end is hinged to the end of the preceding skeleton component, and through reaction force, it drives its own movable skeleton component 221 to deflect upwards around the hinge point, independently adjusting the elevation angle of the corresponding skeleton segment. The ball joint 3 or flexible hinge at the hinge position allows for small-range, multi-dimensional deflection, better adapting to the complex drooping curved surface shape of the substrate.

[0033] Furthermore, such as Figure 4 As shown, the movable frame 221 has an electrical channel 226 inside. The electrical channel 226 contains the power supply line and control signal line of the drive unit 222, as well as the signal transmission line of the workpiece detection sensor installed on the movable frame 221. The electrical channel 226 and the built-in air pipe 224 are arranged in parallel along the length of the movable frame 221. The two are completely separated by the solid material partition of the movable frame 221, so the air path and the circuit do not interfere with each other. In addition, the inner wall of the electrical channel 226 is provided with an electromagnetic shielding layer, which can reduce airflow disturbance and external environmental interference to the control signal, and improve the stability of signal transmission and control accuracy.

[0034] Furthermore, flexible electrical adapters are provided at the hinges between two adjacent movable skeleton components 22 to connect the electrical channels 226 between them, ensuring that the electrical circuits remain continuous during skeleton deflection. The flexible electrical adapters can be flexible ribbon cables, miniature elastic contact components or flexible circuit boards, which can bend synchronously with the hinge action and are not prone to fatigue fracture even after long-term reciprocating deflection, resulting in high operational reliability.

[0035] Furthermore, such as Figure 4As shown, flexible air passage adapters 4 are provided between the air outlet of the air passage interface 225 and the air inlet of the built-in air tube 224, and between the air outlet of the built-in air tube 224 and the air inlet of the Bernoulli suction cup 223, to achieve sealed connection of the air passages. The flexible air passage adapter 4 can be a miniature rotating sealing ring, a corrugated hose, or an elastic rubber joint, which can adapt to the slight displacement when the skeleton deflects, avoid the pipe being squeezed and deformed, and maintain stable air passage pressure.

[0036] Specifically, such as Figure 3 and Figure 4 As shown, the movable frame component 221 adopts a split-type opening and closing structure, consisting of a base plate 2211 and a cover 2212. The cover 2212 covers the base plate 2211, and one side of the base plate 2211 is hinged to one side of the cover 2212, allowing for flipping and opening. The other side of the base plate 2211 and the other side of the cover 2212 are detachably locked through a snap-fit ​​structure 5. After snapping, the two components enclose each other to form the aforementioned cavity. The upper surface of the cover 2212 has a through hole 2213 corresponding to the Bernoulli suction cup 223. The Bernoulli suction cup 223 is entirely housed inside the cavity, with its working end embedded and snapped into the through hole 2213. The working surface of the Bernoulli suction cup 223 is exposed through the through hole 2213, and the working surface does not protrude from the upper surface of the cover 2212, ensuring the suction cup is securely installed and preventing the working surface from protruding and scratching the workpiece. This modular structure facilitates the installation of internal pipes and wiring, as well as subsequent maintenance and repair. The internal cavity can be opened for operation without disassembling the overall frame, significantly improving maintenance efficiency.

[0037] Furthermore, such as Figure 1 As shown, multiple sets of frame bodies 2 can be fixed side by side on the mounting base 1. The multiple sets of frame bodies 2 are arranged at equal intervals in the horizontal direction to form a wide air-floating support surface, which can meet the horizontal span requirements of large-size substrates. The mounting base 1 has a mounting slot 11 on the side facing the frame body 2, which matches the end of the fixed frame assembly 21. The end of the fixed frame assembly 21 of each set of frame bodies 2 is embedded in the corresponding mounting slot 11 and locked and fixed by fasteners 6. The installation positioning is accurate and the connection strength is high.

[0038] During actual handling operations, the workpiece detection sensor collects real-time data on the surface morphology and sag curvature of the substrate to be handled and transmits the signals to the external control system. Based on the real-time deformation data, the control system outputs corresponding control signals to the micro-piezoelectric actuators of each movable skeleton component 22, independently driving each movable skeleton component 221 to deflect upwards around the hinge at a corresponding angle. This allows the entire skeleton body 2 to actively form a pre-compensated curved surface that precisely matches the sag curve of the substrate, eliminating stress concentration caused by rigid support at its source and avoiding the risk of substrate micro-cracks and breakage. Airflow is input through the air interface 225 of each skeleton component and delivered to each Bernoulli suction cup 223 via the built-in air tube 224, forming a stable air film between the suction cup and the substrate, completely suspending and lifting the substrate. Because the suction cup and skeleton components are rigidly integrated and deflect synchronously, the air gap remains uniform throughout the skeleton curvature adjustment process, resulting in uniform force distribution across all areas of the substrate and high handling stability. During the handling process, if the amount of substrate sag changes dynamically with position and orientation, the micro piezoelectric actuator can respond in milliseconds and adjust the deflection angle of the corresponding skeleton segment to adapt to the deformation state in real time, adapt to the morphological differences of different batches of substrates, and maintain a stable non-contact suspension state throughout the process.

[0039] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent should be determined by the appended claims.

Claims

1. An adaptive variable stiffness Bernoulli air-float end effector, characterized in that: It includes a mounting base and at least one skeleton body, the skeleton body being fixedly connected to one side of the mounting base, the skeleton body including a fixed skeleton assembly and a plurality of movable skeleton assemblies connected in series along the length direction, one end of the fixed skeleton assembly being fixedly connected to the mounting base; Each of the said movable skeleton components includes a movable skeleton part, a drive part, at least one Bernoulli suction cup, and an internal air tube; The movable frame component has a cavity inside, and its end has an air passage interface for connecting the air supply airflow. The drive component is fixed to one end of the movable skeleton component near the fixed skeleton assembly; The Bernoulli suction cup is embedded in the upper surface of the movable skeleton and can deflect synchronously with the movable skeleton to maintain a stable air-floating posture. The built-in air tube passes through the interior of the movable skeleton and connects the Bernoulli suction cup and the air passage interface. The driving component of the movable skeleton component near the head end of the fixed skeleton component is hinged to the end of the fixed skeleton component away from the mounting base, and is used to drive the corresponding movable skeleton component to deflect upward relative to the fixed skeleton component about the hinge point. The driving components of each of the remaining movable skeleton components are hinged to the end of the movable skeleton component of the adjacent preceding movable skeleton component that is away from the fixed skeleton component, and are used to drive the corresponding movable skeleton component to deflect upward relative to the preceding movable skeleton component around the hinge point.

2. The adaptive variable stiffness Bernoulli air-float end effector according to claim 1, characterized in that: The driving component is a miniature piezoelectric actuator, and its hinge joint with the preceding component is provided with a ball joint or a flexible hinge.

3. The adaptive variable stiffness Bernoulli air-float end effector according to claim 1, characterized in that: The movable skeleton component has an electrical channel inside, in which the power supply line and control signal line of the drive component are arranged, as well as the signal transmission line of the workpiece detection sensor arranged on the movable skeleton component. The electrical channel and the built-in air tube are arranged in parallel, and the two are separated by a solid material partition of the movable skeleton. The inner wall of the electrical channel is provided with an electromagnetic shielding layer.

4. The adaptive variable stiffness Bernoulli air-float end effector according to claim 3, characterized in that: Flexible electrical adapters are provided at the hinges between two adjacent movable skeleton components to connect the electrical channels between them. The flexible electrical adapter is a flexible ribbon cable, a miniature elastic contact assembly, or a flexible circuit board.

5. The adaptive variable stiffness Bernoulli air-float end effector according to claim 1, characterized in that: Flexible air passage adapters are provided between the air outlet of the air passage interface and the air inlet of the built-in air tube, and between the air outlet of the built-in air tube and the air inlet of the Bernoulli suction cup, to achieve sealed connection of the air passages.

6. The adaptive variable stiffness Bernoulli air-float end effector according to claim 5, characterized in that: The flexible air passage adapter is a miniature rotary sealing ring, a corrugated hose, or an elastic rubber joint.

7. The adaptive variable stiffness Bernoulli air-float end effector according to claim 1, characterized in that: The movable frame component includes a base plate and a cover; The cover is placed on the base plate, one side of the base plate is hinged to one side of the cover, and the other side of the base plate is detachably locked to the other side of the cover by a snap-fit ​​structure. The Bernoulli suction cup is embedded in the upper surface of the cover.

8. An adaptive variable stiffness Bernoulli air-float end effector according to claim 7, characterized in that: The upper surface of the cover is provided with a through hole, the Bernoulli suction cup is housed in the cavity, and its working end is embedded and snapped into the through hole; The working surface of the Bernoulli suction cup is exposed through the through hole, and its working surface does not protrude from the upper surface of the cover.

9. The adaptive variable stiffness Bernoulli air-float end effector according to claim 1, characterized in that: The frame body is provided in multiple ways, and the multiple frame bodies are fixed side by side in the horizontal direction on the same side of the mounting base.

10. An adaptive variable stiffness Bernoulli air-float end effector according to claim 9, characterized in that: The mounting base has a mounting slot on the side facing the main body of the frame that matches the end of the fixed frame assembly. The fixed frame assembly is embedded in the mounting slot and locked in place by fasteners.

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