Wafer slip-out prevention structure for probe station

Abstract

The utility model belongs to the technical field of anti-slip structures, and particularly relates to a wafer anti-slip structure for a probe station, which comprises an operation table, a stand column is fixedly arranged on the upper surface of the operation table, a transverse column is fixedly arranged on the upper surface of the stand column, a cylinder is fixedly arranged at the bottom of the transverse column, and a wafer test probe is fixedly arranged at the piston end of the cylinder. The servo motor, the rotating disc, the limiting ring, the countersunk bolt and the like are arranged, the servo motor drives the rotating disc to rotate, the countersunk bolt on one side of the rotating disc is exposed and taken out, then the limiting ring is replaced according to the size of a crystal disc, and the crystal disc is stacked and put into the storage barrel. The lowest wafer disc falls in the limiting ring, then the servo motor drives the rotating disc to rotate, the rotating disc drives the limiting ring to rotate, the limiting ring drives the internal wafer discs to rotate to the bottom of the wafer testing probe, and then the air cylinder drives the wafer testing probe to detect the wafer discs.

Description

Technical Field

[0001] The utility model relates to the technical field of anti-slip structures, in particular to a wafer anti-slip structure for a probe station. Background Art

[0002] Probe stations are mainly used in the testing of semiconductor industry, optoelectronic industry, integrated circuit and packaging, and are widely used in the research and development of precision electrical measurements of complex and high-speed devices.

[0003] However, in the existing equipment, when inspecting the wafer disk, it is necessary to manually pick up and place the wafer disk in sequence for fixed inspection. The inspection types are relatively single and it is impossible to inspect wafer disks of different sizes. Therefore, a wafer anti-slip structure for a probe station is proposed. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes a wafer anti-slip structure for a probe station.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a wafer anti-slip structure for a probe station, comprising an operating table, a column is fixedly provided on the upper surface of the operating table, a cross column is fixedly provided on the upper surface of the column, a cylinder is fixedly provided on the bottom of the cross column, a wafer test probe is fixedly provided on the piston end of the cylinder, a rotating groove is provided on the upper surface of the operating table, a discharge hole is provided on the upper surface of the rotating groove, a conveying structure is provided on the operating table, an L-shaped fixed column is fixedly provided on the upper surface of the operating table, an inner sleeve hole is provided on one side of the L-shaped fixed column, a fixing structure is provided on the L-shaped fixed column, a storage barrel is movably provided on the upper surface of the operating table, a connecting column is fixedly provided on one side of the storage barrel, the connecting column is slidably connected in the inner sleeve hole, and a fixing hole is provided on the upper surface of the connecting column.

[0006] As a further description of the above technical solution:

[0007] The conveying structure includes a servo motor fixedly connected to the bottom of the operating table, the output shaft of the servo motor is fixedly provided with a rotating disk, the rotating disk is rotatably connected in a rotating groove, the lower surface of the storage barrel is in contact with the upper surface of the rotating disk, and the upper surface of the rotating disk is provided with three placement grooves, each of the placement grooves is movably connected with a limit ring, and each of the limit rings has a threaded hole on one side.

[0008] As a further description of the above technical solution:

[0009] Three holes are opened on the side surface of the rotating disk, and a countersunk bolt is movably arranged in each hole, and each countersunk bolt is threadedly connected in a corresponding threaded hole.

[0010] As a further description of the above technical solution:

[0011] The fixing structure includes a fixing frame fixedly connected to the upper surface of the L-shaped fixing column, a sliding rod is slidably connected to the upper surface of the fixing frame, a pin is fixedly provided at the bottom of the sliding rod, the pin passes through the upper surface of the L-shaped fixing column and is slidably connected, and the pin is adapted to the fixing hole.

[0012] As a further description of the above technical solution:

[0013] A spring is movably provided on the sliding rod, one end of the spring is fixedly connected to one side of the pin, and the other end of the spring is fixedly connected to one side inside the fixing frame.

[0014] As a further description of the above technical solution:

[0015] A discharge plate is fixedly provided at the bottom of the operating table, and the discharge plate is located below the discharge hole.

[0016] The utility model has the following beneficial effects:

[0017] 1. Compared with the prior art, the polishing device for the surface of the luggage rack is provided with a servo motor, a rotating disk, a limit ring and a countersunk bolt, etc. The servo motor drives the rotating disk to rotate, so that the countersunk bolt on one side of the rotating disk is exposed, the countersunk bolt is taken out, and then the limit ring is replaced according to the size of the crystal disk, and the crystal disk is stacked and placed in the storage barrel, and the bottom crystal disk falls into the limit ring, and then the servo motor drives the rotating disk to rotate, and the rotating disk drives the limit ring to rotate, and the limit ring drives the internal crystal disk to rotate to the bottom of the wafer test probe, and then the cylinder drives the wafer test probe to detect the crystal disk.

[0018] 2. Compared with the prior art, the polishing device for the surface of the luggage rack is provided with a storage barrel, a fixed frame, a sliding rod, a pin and a spring, etc. The sliding rod is pulled, and the sliding rod drives the pin to move upward, so that the pin is separated from the L-shaped fixed column, and then the corresponding storage barrel is replaced again according to the size of the crystal disk. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a three-dimensional structural schematic diagram of a wafer anti-slip structure for a probe station proposed by the utility model;

[0020] Figure 2 A plan view of a wafer anti-slip structure for a probe station proposed by the utility model;

[0021] Figure 3 This is a cross-sectional view of a wafer anti-slip structure for a probe station proposed by the utility model;

[0022] Figure 4This is a diagram of an operating table for a wafer anti-slip structure for a probe station proposed by the utility model;

[0023] Figure 5 A schematic diagram of a conveying structure of a wafer anti-slip structure for a probe station proposed by the utility model;

[0024] Figure 6 An exploded diagram of a conveying structure of a wafer anti-slip structure for a probe station proposed by the utility model;

[0025] Figure 7 A schematic diagram of a fixing structure of a wafer anti-slip structure for a probe station proposed by the utility model;

[0026] Figure 8 An exploded view of a fixing structure and a material storage barrel of a wafer anti-slip structure for a probe station proposed by the utility model.

[0027] Legend:

[0028] 1. Operating table; 2. Vertical column; 3. Horizontal column; 4. Conveying structure; 401. Servo motor; 402. Rotating plate; 403. Limiting ring; 404. Countersunk bolt; 5. L-shaped fixing column; 6. Storage barrel; 7. Fixed structure; 701. Fixed frame; 702. Sliding rod; 703. Pin; 704. Spring; 8. Discharge plate; 9. Cylinder; 10. Wafer test probe; 11. Discharge hole; 12. Rotating groove. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] Reference Figures 1 to 8The utility model provides a wafer anti-slip structure for a probe station: it includes an operating table 1, a column 2 is fixedly provided on the upper surface of the operating table 1, a horizontal column 3 is fixedly provided on the upper surface of the column 2, a cylinder 9 is fixedly provided at the bottom of the horizontal column 3, a wafer test probe 10 is fixedly provided at the piston end of the cylinder 9, a rotating groove 12 is provided on the upper surface of the operating table 1, a discharge hole 11 is provided on the upper surface of the rotating groove 12, a discharge plate 8 is fixedly provided at the bottom of the operating table 1, and the discharge plate 8 is located below the discharge hole 11, a conveying structure 4 is provided on the operating table 1, an L-shaped fixed column 5 is fixedly provided on the upper surface of the operating table 1, an inner sleeve hole is provided on one side of the L-shaped fixed column 5, a fixing structure 7 is provided on the L-shaped fixed column 5, a material storage barrel 6 is movably provided on the upper surface of the operating table 1, a connecting column is fixedly provided on one side of the material storage barrel 6, the connecting column is slidably connected in the inner sleeve hole, and a fixing hole is provided on the upper surface of the connecting column;

[0031] The conveying structure 4 includes a servo motor 401 fixedly connected to the bottom of the operating table 1, and the output shaft of the servo motor 401 is fixedly provided with a rotating disk 402. Three holes are opened on the side of the rotating disk 402, and a countersunk bolt 404 is movably provided in each hole. The rotating disk 402 is rotatably connected in the rotating groove 12, and the lower surface of the storage barrel 6 is in contact with the upper surface of the rotating disk 402. Three placement grooves are opened on the upper surface of the rotating disk 402, and a limiting ring 403 is movably connected in each placement groove. A threaded hole is opened on one side of each limiting ring 403, and each countersunk bolt 404 is threadedly connected in the corresponding threaded hole. The countersunk bolt 404 is taken out, and then the limiting ring 403 is replaced according to the size of the crystal disk;

[0032] The fixed structure 7 includes a fixed frame 701 fixedly connected to the upper surface of the L-shaped fixed column 5, and a sliding rod 702 is slidably connected to the upper surface of the fixed frame 701. A pin 703 is fixedly arranged at the bottom of the sliding rod 702. The pin 703 penetrates the upper surface of the L-shaped fixed column 5 and is slidably connected. The pin 703 is adapted to the fixing hole. A spring 704 is movably arranged on the sliding rod 702. One end of the spring 704 is fixedly connected to one side of the pin 703, and the other end is fixedly connected to one side inside the fixed frame 701. The sliding rod 702 drives the pin 703 to move upward, so that the pin 703 is separated from the L-shaped fixed column 5, and then the corresponding storage barrel 6 is replaced again according to the size of the crystal disk.

[0033] Working principle: the servo motor 401 drives the rotating disk 402 to rotate, so that the countersunk bolt 404 on one side of the rotating disk 402 is exposed, the countersunk bolt 404 is taken out, and then the limit ring 403 is replaced according to the size of the crystal disk, and the sliding rod 702 is pulled, and the sliding rod 702 drives the pin 703 to move upward, so that the pin 703 is separated from the L-shaped fixed column 5, and then the corresponding storage barrel 6 is replaced again according to the size of the crystal disk. After the replacement of the limit ring 403 and the storage barrel 6 is completed, the crystal disk is stacked and placed in the storage barrel 6, and the bottom crystal disk falls into the limit ring 403, and then the servo motor 401 drives the rotating disk 402 to rotate The rotating disk 402 drives the limit ring 403 to rotate, and the limit ring 403 drives the internal crystal disk to rotate to the bottom of the wafer test probe 10, and then the cylinder 9 drives the wafer test probe 10 to detect the crystal disk. When the first crystal disk rotates to the detection position, the crystal disk at the bottom of the storage barrel 6 will fall into the next limit ring 403 and wait for detection. When the first crystal disk is detected, the rotating disk 402 is rotated again to transport the crystal disk to the discharge hole 11, and then it falls from the discharge hole 11 onto the discharge plate 8. Then the staff can collect it according to the detection data, and when it rotates to the bottom of the storage barrel 6 again, it will be loaded.

[0034] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer anti-slip structure for a probe station, comprising an operating table (1), characterized in that: A column (2) is fixedly provided on the upper surface of the operating table (1), a horizontal column (3) is fixedly provided on the upper surface of the column (2), a cylinder (9) is fixedly provided at the bottom of the horizontal column (3), a wafer test probe (10) is fixedly provided on the piston end of the cylinder (9), a rotating groove (12) is provided on the upper surface of the operating table (1), a discharge hole (11) is provided on the upper surface of the rotating groove (12), a conveying structure (4) is provided on the operating table (1), an L-shaped fixed column (5) is fixedly provided on the upper surface of the operating table (1), an inner sleeve hole is provided on one side of the L-shaped fixed column (5), a fixing structure (7) is provided on the L-shaped fixed column (5), a material storage barrel (6) is movably provided on the upper surface of the operating table (1), a connecting column is fixedly provided on one side of the material storage barrel (6), the connecting column is slidably connected in the inner sleeve hole, and a fixing hole is provided on the upper surface of the connecting column.

2. The wafer anti-slip structure for a probe station according to claim 1, characterized in that: The conveying structure (4) comprises a servo motor (401) fixedly connected to the bottom of the operating table (1); the output shaft of the servo motor (401) is fixedly provided with a rotating disk (402); the rotating disk (402) is rotatably connected in a rotating groove (12); the lower surface of the storage barrel (6) is in contact with the upper surface of the rotating disk (402); the upper surface of the rotating disk (402) is provided with three placement grooves; each of the placement grooves is movably connected with a limit ring (403); and each of the limit rings (403) is provided with a threaded hole on one side.

3. The wafer anti-slip structure for a probe station according to claim 2, characterized in that: Three holes are opened on the side of the rotating disk (402), and a countersunk bolt (404) is movably arranged in each hole. Each countersunk bolt (404) is threadedly connected in a corresponding threaded hole.

4. The wafer anti-slip structure for a probe station according to claim 1, characterized in that: The fixing structure (7) comprises a fixing frame (701) fixedly connected to the upper surface of the L-shaped fixing column (5); a sliding rod (702) is slidably connected to the upper surface of the fixing frame (701); a pin (703) is fixedly provided at the bottom of the sliding rod (702); the pin (703) penetrates the upper surface of the L-shaped fixing column (5) and is slidably connected; the pin (703) is adapted to the fixing hole.

5. The wafer anti-slip structure for a probe station according to claim 4, characterized in that: A spring (704) is movably provided on the sliding rod (702), one end of the spring (704) is fixedly connected to one side of the pin (703), and the other end is fixedly connected to one side inside the fixed frame (701).

6. The wafer anti-slip structure for a probe station according to claim 1, characterized in that: A discharge plate (8) is fixedly provided at the bottom of the operating table (1), and the discharge plate (8) is located below the discharge hole (11).

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