Cleaning tool for quartz clamp

Abstract

The utility model discloses a cleaning tool for a quartz clamp. The cleaning tool comprises a handle and a base. A plurality of grooves are formed in the base at intervals; a gap is formed between every two adjacent grooves; a through hole is formed in the interval; the through hole penetrates through the base in the vertical direction; the handle is connected to the upper portion of the base. According to the scheme, through the grooves in the base, the quartz clamps can be placed in the grooves in a one-to-one correspondence mode, and the problem that the quartz clamps make contact with one another while the multiple quartz clamps are cleaned is solved; in addition, in the scheme, the base is provided with the through hole, so that the cleaning liquid can penetrate through the through hole in the process that the base is immersed in the cleaning liquid to immerse the quartz clamp more quickly, the cleaning effect can be ensured, and the cleaning efficiency can be improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor production technology, and in particular to a cleaning tool for a quartz fixture. Background Art

[0002] In the process of vertical liquid phase epitaxy, a clamp is needed to fix the substrate. Because the entire liquid phase epitaxy process is a process of repeated temperature increase and temperature decrease, a high temperature resistant material is required to fit the liquid phase epitaxy process. For this reason, quartz is generally used as the clamp material.

[0003] After quartz is processed from raw materials into quartz fixtures, there are impurity particles on the surface, so the quartz fixtures need to be cleaned. However, due to the small size and large number of quartz fixtures, the quartz fixtures are easily touched during the cleaning process, resulting in some fixtures being unable to be immersed in the cleaning liquid, which affects the cleaning effect. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a cleaning tool for a quartz fixture, so as to solve the problem that the quartz fixture is easily touched during the cleaning process.

[0005] In order to achieve the above technical purpose, the present application provides a cleaning tool for a quartz fixture, comprising: a handle and a base;

[0006] The base is provided with a plurality of grooves arranged at intervals;

[0007] A gap is formed between adjacent grooves;

[0008] The interval is provided with a through hole;

[0009] The through hole penetrates the base in a vertical direction;

[0010] The handle is connected above the base.

[0011] Further, it also includes a cleaning container;

[0012] The cleaning container is provided with a cleaning cavity for placing cleaning liquid;

[0013] The cleaning cavity is used for the base to be placed therein, and the shape of the cleaning cavity is adapted to the shape of the base.

[0014] Furthermore, the base is cylindrical.

[0015] Furthermore, a thread is provided at the bottom of the handle and is threadably connected to the base.

[0016] Furthermore, the handle is connected to the middle part of the base and forms a centrally symmetrical structure with the base.

[0017] Furthermore, the handle is provided with friction patterns.

[0018] Furthermore, a plurality of the through holes are arranged at intervals on the interval.

[0019] Furthermore, the groove edge of the groove is provided with a circular arc chamfer.

[0020] Furthermore, the groove width of the groove is 5±0.01 mm;

[0021] The groove depth of the groove is 6±0.01 mm.

[0022] Furthermore, the base is a polytetrafluoroethylene base.

[0023] It can be seen from the above technical solution that the present application provides a cleaning tool for a quartz fixture, including: a handle and a base; a plurality of grooves arranged at intervals are provided on the base; intervals are formed between adjacent grooves; through holes are provided on the intervals; the through holes penetrate the base in a vertical direction; and the handle is connected above the base.

[0024] In this solution, the grooves on the base can be used to place the quartz clamps one by one in the grooves, thereby cleaning multiple quartz clamps while avoiding the problem of quartz clamps contacting each other; and in this solution, through holes are provided on the base so that the cleaning liquid can pass through the through holes when the base is immersed in the cleaning liquid and immerse the quartz clamps more quickly, which can ensure the cleaning effect and improve the cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0026] Figure 1 A schematic diagram of a cleaning tool for a quartz fixture provided in an embodiment of the present application;

[0027] Figure 2 A schematic diagram of a handle of a cleaning tool for a quartz fixture provided in an embodiment of the present application. DETAILED DESCRIPTION

[0028] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0029] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0030] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0031] See also Figure 1 and Figure 2 A cleaning tool for a quartz fixture provided in an embodiment of the present application includes: a handle 10 and a base 20; a plurality of grooves 21 arranged at intervals are provided on the base 20; intervals 22 are formed between adjacent grooves 21; a through hole 23 is provided on the interval 22; the through hole 23 passes through the base 20 in a vertical direction; the handle 10 is connected to the top of the base 20.

[0032] The grooves 21 can be used to place quartz fixtures one by one, so as to achieve the purpose of loading multiple quartz fixtures at the same time; then the base 20 can be lifted by the handle 10 and immersed in the cleaning liquid for cleaning. When the base 20 is immersed in the cleaning liquid, the cleaning liquid flows from the bottom of the base 20 to the top of the base 20 through the through hole 23, and flows into the gap between adjacent quartz fixtures. On the one hand, the base 20 can enter the cleaning liquid more quickly, and on the other hand, it can ensure that the cleaning liquid cleans the gap between the quartz fixtures, thereby ensuring the cleaning effect and avoiding the quartz fixtures from contacting each other and bumping.

[0033] In order to ensure the flow effect of the through hole 23 , a plurality of through holes 23 may be arranged at intervals on the spacer 22 .

[0034] In a more specific embodiment, a cleaning container (not shown) is further included; the cleaning container is provided with a cleaning cavity for placing the cleaning liquid; the cleaning cavity is used for the base 20 to be placed therein, and the shape of the cleaning cavity is adapted to the shape of the base 20.

[0035] Specifically, setting the shape of the cleaning chamber to be consistent with that of the base 20 can reduce the occupied space of the quartz fixture cleaning device.

[0036] As an implementation mode, the cleaning chamber and the base 20 are cylindrical.

[0037] In one embodiment, the bottom of the handle 10 is provided with a thread and is threadedly connected to the base 20. That is, the handle 10 and the base 20 are detachably connected by the thread, which is convenient for storing the handle 10 and the base 20 when no operation is needed, and also convenient for replacing parts.

[0038] In order to ensure that the base 20 is lifted by the handle 10 with forces applied in all directions close to each other, the handle 10 is connected to the middle of the base 20 and forms a centrally symmetrical structure with the base 20 .

[0039] Furthermore, friction patterns are provided on the handle 10 to prevent the handle 10 from slipping when it is lifted.

[0040] In application, the groove edge of the groove 21 may be provided with a circular arc chamfer to facilitate the placement of the quartz fixture and to prevent the groove edge of the groove 21 from colliding with the quartz fixture.

[0041] In the embodiment provided in the present application, further, the base 20 is a polytetrafluoroethylene base.

[0042] In application, the groove width of the groove 21 is adapted to the quartz fixture, so that the quartz fixture can be clamped by the groove 21 after being placed in the groove 21 .

[0043] For this purpose, in one embodiment, the groove width of the groove 21 is 5±0.01 mm; and the groove depth of the groove 21 is 6±0.01 mm.

[0044] The overall diameter of the base 20 may be 100 mm and the thickness may be 15 mm; the length of the interval 22 may be 10 mm and the diameter of the through hole 23 may be 8 mm; the diameter of the handle 10 may be 4.8 mm and the length may be 100 mm.

[0045] The cleaning tool provided in the embodiment of the present application is simple to process and easy to operate. The handle 10 and the base 20 are easy to combine and convenient for operators to take and put. Compared with the traditional method of putting a large number of fixtures into the cleaning liquid together, the cleaning area of ​​the quartz fixture can be greatly increased, and the probability of overlapping between quartz fixtures and being unable to contact with the cleaning liquid is successfully reduced, so as to achieve a sufficient cleaning effect.

[0046] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A cleaning tool for a quartz fixture, characterized in that: include: A handle (10) and a base (20); The base (20) is provided with a plurality of grooves (21) arranged at intervals; A gap (22) is formed between adjacent grooves (21); The spacer (22) is provided with a through hole (23); The through hole (23) passes through the base (20) in a vertical direction; The handle (10) is connected above the base (20).

2. The cleaning tool for quartz fixture according to claim 1, characterized in that: Also included is a cleaning container; The cleaning container is provided with a cleaning cavity for placing cleaning liquid; The cleaning cavity is used for the base (20) to be placed therein, and the shape of the cleaning cavity is adapted to the shape of the base (20).

3. The cleaning tool for quartz fixture according to claim 2, characterized in that: The base (20) is cylindrical.

4. The cleaning tool for quartz fixture according to claim 1, characterized in that: The bottom of the handle (10) is provided with a thread and is threadably connected to the base (20).

5. The cleaning tool for quartz fixture according to claim 1 or 4, characterized in that: The handle (10) is connected to the middle part of the base (20) and forms a centrally symmetrical structure with the base (20).

6. The cleaning tool for quartz fixture according to claim 1, characterized in that: The handle (10) is provided with friction patterns.

7. The cleaning tool for quartz fixture according to claim 1, characterized in that: A plurality of through holes (23) are arranged at intervals on the interval (22).

8. The cleaning tool for quartz fixture according to claim 1, characterized in that: The groove edge of the groove (21) is provided with a circular arc chamfer.

9. The cleaning tool for quartz fixture according to claim 1, characterized in that: The groove width of the groove (21) is 5±0.01 mm; The groove depth of the groove (21) is 6±0.01 mm.

10. The cleaning tool for quartz fixture according to claim 1, characterized in that: The base (20) is a polytetrafluoroethylene base.

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